CN205898296U - Raman spectrometer based on side band light filter - Google Patents
Raman spectrometer based on side band light filter Download PDFInfo
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- CN205898296U CN205898296U CN201620423111.8U CN201620423111U CN205898296U CN 205898296 U CN205898296 U CN 205898296U CN 201620423111 U CN201620423111 U CN 201620423111U CN 205898296 U CN205898296 U CN 205898296U
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Abstract
The utility model provides a raman spectrometer based on side band light filter, including special band pass filter and special side band light filter in its light path, wherein, special band pass filter and special side band light filter set up respectively on adjustable bracket, and so as to is right the accuracy regulation is carried out to the position and the angle of the laser beam process that single -grating raman spectrometer sent. The utility model discloses can conveniently hang down to the micro - confocal measurement of the sample raman signal of 10 wave numbers, have simple structure, stability good, adjust convenient, the transmissivity is high and be convenient for the advantage of extension.
Description
Technical field
This utility model is related to microspectrograph technical field, relate more specifically to a kind of based on sideband optical filter, tool
There are low cost and high permeability, the Raman spectrometer of as little as 10 wave number power of test.
Background technology
It is known that with the development of modern science and technology, the various optical filters being applied to Raman spectrum test arise at the historic moment.This
A little optical filters make to be no longer necessary to several monochromators to filter exciting light, thus allowing Raman spectrometer become very compact.Existing
Micro-Raman spectroscopy be integrated with laser instrument, microscope, confocal pinhole, grating and detector, as shown in Figure 1.It is up till now
Only, the monochromatic light grid Raman spectrometer using notch filtering light piece and sideband optical filter has already taken up main Raman spectrometer city
?.Here, notch filtering light piece and sideband optical filter had both played a part exciting light to reflex on sample, played filtration again and dissipated
Penetrate the effect of Rayleigh line in signal.
In raman spectroscopy measurement, many times it is desirable to obtaining the lower wave number Raman signal very close to exciting light,
But the monochromatic light grid Raman spectrometer of traditional outfit notch filtering light piece and sideband optical filter is typically only capable of measuring higher than 50 wave numbers
Raman signal, and it is very inconvenient to change laser instrument.And the raman spectral signal being less than 50 wave numbers typically requires three gratings and draws
Graceful spectrogrph or to be measured by the special functional module that three block grating notch filtering light pieces form.At this moment, due to grating and anti-
The reason penetrate the efficiency such as mirror, the spectral signal transmitance of three grating Raman spectrometers generally only has the 1/ of monochromatic light grid Raman spectrometer
10, even lower, although and the transmitance of body grating notch filtering light piece increases, very inconvenient, the Er Qiedan of its regulation
The use cost of optical maser wavelength is very high.Because the intensity of a lot of lower wave number Raman signals is all very weak, this is just widely to grind
Study carefully various material lower wave number Raman signals and bring very big difficulty.Therefore, how to utilize this spectrum of monochromatic light grid Raman spectrometer
The high feature of Signature penetrating rate but lower wave number Raman signal is not measured using body grating notch filtering light chip technology, be currently to draw
The urgent problem solving required for graceful spectral measurement methodses.
Gradually improving with filter technology, the cut-off frequency of sideband optical filter is more and more lower.Existing technology is
The special sideband optical filter that cut-off wave number is less than 25 wave numbers can be produced.Less and less with cut-off wave number, how to adjust side
Band optical filter makes its work wave number sufficiently low just highly difficult, and it is micro- in commercialization that this makes this special sideband optical filter be difficult to
Use on confocal Raman spectrometer.Even if cut-off wave number comes into city's number of fields less than the special sideband optical filter of 25 wave numbers at present
Year, but the minimum wave number of Raman spectrum of the use sideband optical filtering built-in testing of scientific paper report is still about 50 wave numbers.In addition,
Detect the Raman signal less than 10 wave numbers it is necessary to filter out the plasma line in laser using body grating bandpass filter.
Body grating bandpass filter and traditional bandpass filter have this qualitative difference, are a kind of reflective optical filters.Therefore, existing
Have in technology, in order to filter plasma line, all specially devise extra light path, body grating bandpass filter is introduced light path
In.Because body grating bandpass filter has specific operation wavelength, therefore, when changing optical maser wavelength, it is necessary for designing new
Light path.However, now numerous commercialization monochromatic light grid Raman spectrometers all employ modular design method, the regulation of light path is non-
Often tight, for this uncomprehending user for the vast principle to Raman light path, substantially can not possibly be to existing commercialization list
The laser light incident light path of grating Raman spectrometer improves.Therefore, how to design that a nested structure is simple, comprehensive on using to be examined
Consider replaceable difference laser rays and corresponding optical element and mating band optical filter just can detect the micro- common of as little as 10 wave numbers
Burnt Raman spectroscopy device, is one of desired important Raman spectroscopy difficult problem solving of vast Raman spectrum worker.
Utility model content
In view of this, the purpose of this utility model is to provide a kind of Raman spectrometer, to solving above-mentioned technical problem
At least one of.
To achieve these goals, this utility model provides a kind of Raman spectrometer based on sideband optical filter, including
Laser module, laser instrument are imported and are coupled and output module and signal detection module with purification blocks, light path, wherein,
Described laser module at least includes a laser instrument ls1, is used for sending laser beam；
Described laser instrument imports and includes at least two reflecting mirror m1, m3 and special bandpass filter bpf with purification blocks, uses
Reflex to the center of described special bandpass filter bpf in the laser beam sending described laser module via reflecting mirror, and
Subsequent optical path is reflexed to by described special bandpass filter bpf；
The coupling of described light path and output module include at least two reflecting mirror m4, m5, special sideband optical filter eft, micro-
Object lens obj and condenser lenses lns, the laser beam for reflecting described special bandpass filter bpf passes through two reflecting mirror m4, m5
Reflex to the center of described special sideband optical filter eft, laser beam is guided microcobjective by described special sideband optical filter eft again
Obj, focuses on sample smp through microcobjective obj and it is irradiated, and allow to irradiate the reflected light of described sample smp and
The center of described special sideband optical filter eft is arrived in the retroeflection after microcobjective obj collection of Raman signal light, and then using described spy
Different sideband optical filter eft is obtaining pure Raman signal light, and then converges to follow-up signal detection mould by condenser lenses lns
Block；
Described signal detection module includes monochromatic light grating spectrograph gpy and corresponding control circuit, for coupling to described light path
The pure Raman signal light being obtained with output module is detected, obtains the Raman spectrum of sample smp.
Wherein, described laser instrument is imported to be coupled with purification blocks and/or described light path and is divided with the reflecting mirror in output module
It is not fixed on a two-dimensional vertical adjustable articulator, two dimension is adjustable respectively to make their angle.
Wherein, reflecting mirror m5 laser beam being reflexed to the center of described special sideband optical filter eft is fixed on one two
On dimension vertically adjustable section frame, described two-dimensional vertical adjustable articulator is positioned on a two-dimension translational platform again, described two-dimension translational platform
It is used for adjusting the position to described reflecting mirror for the laser light incident, and described two-dimensional vertical adjustable articulator is used for adjusting described reflecting mirror
Direction makes it that laser beam is reflexed to the center of described special sideband optical filter eft.
Wherein, also include positioned at described laser module and special bandpass filter in described laser instrument importing and purification blocks
Polarization optical element p1 between piece bpf, the laser beam for sending to described laser module carries out anti-again after polarization manipulation
It is mapped to the center of described special bandpass filter bpf；Described light path coupling is also included positioned at described special sideband with output module
Polarization optical element p2 between optical filter eft and condenser lenses lns, for will transmit through described special sideband optical filter eft's
Laser beam re-directs condenser lenses lns after carrying out polarization manipulation；
Described polarization optical element p1 and p2 preferably includes linear polarizer, the group of 1/4 slide, 1/2 slide and said elements
Close, wherein said linear polarizer is used for setting the polarization direction of laser beam or Raman signal, and described 1/4 slide is used for linear polarization
Laser beam or Raman signal be changed into circularly polarized laser beam or Raman signal accordingly, described 1/2 slide is used for rotating sharp
Light beam or the polarization direction of Raman signal.
Wherein, described polarization optical element p1 and p2 is linear polarizer, and the optical axis direction of described two linear polarizer is mutual
When vertical, by position on reflecting mirror m5 and special sideband optical filter eft for the fine adjustment laser and fine adjustment reflection
The operating angle of mirror m5 and special sideband optical filter eft, when can detect more parallel with p2 optical axis direction than two linear polarizer p1
The lower Raman signal of frequency.
Wherein, described special bandpass filter bpf is a kind of reflective bandpass filter based on volume Bragg grating technology
Piece；
Preferably, the diffraction efficiency of described special bandpass filter bpf is more than 90%；
Preferably, the spectral bandwidth of described special bandpass filter bpf is more than or equal to 2 wave numbers, preferably greater than or equal to 5 ripples
Number；
Preferably, the deflection angle of described special bandpass filter bpf is more than or equal to 5 degree.
Wherein, the cut-off wave number of described special sideband optical filter eft is less than or equal to 50 wave numbers, is preferably smaller than equal to 25 ripples
Number；
Preferably, the Raman spectrum transmitance of described special sideband optical filter eft is more than or equal to 90%, and has and be less than
Equal to 10-6Laser rays transmitance.
As further preferred, described light path coupling includes two consistent special sidebands of operation wavelength with output module and filters
Mating plate eft is so that have less than or equal to 10 during the described two special sideband optical filter eft of laser beam transparent-10Transmitance.
Wherein, described special bandpass filter bpf and/or special sideband optical filter eft is fixedly installed on one two respectively
On dimension vertically adjustable section frame；Described two-dimensional vertical adjustable articulator is preferably respectively arranged at described Raman spectrum in pluggable mode
On the pedestal of instrument；
Preferably, described two-dimensional vertical adjustable articulator includes adjusting screw thread, can be to fixed thereon described special
The position of bandpass filter bpf and/or special sideband optical filter eft and angle are fine-tuned.
Wherein, described laser module includes at least two groups laser instrument ls1, ls2, and described laser instrument imports and purification blocks
Including one group of reflecting mirror m1, m2, described one group of reflecting mirror m1, m2 are respectively placed in a respective cunning with two fixed positions
On rail, a position on the described slide rail with two fixed positions makes corresponding reflecting mirror be located in light path, by described reflection
Laser beam that laser instrument corresponding to mirror sends imports subsequent optical path, another one position not in light path, by described one group
The switching of reflector position imports subsequent optical path come the laser beam to select to send corresponding laser instrument.
Wherein, the monochromatic light grating spectrograph gpy in described signal detection module includes slit slt, reflecting mirror ma, reflecting mirror
Mb, grating grt and detector ccd, the Raman signal light being wherein derived from slit slt incides reflecting mirror ma, and reflected mirror ma is anti-
Flashlight after penetrating is irradiated on grating grt, and the flashlight after grating grt dispersion is collected and is reflexed to by reflecting mirror mb
Detector ccd is detected；
Preferably, described condenser lenses lns is positioned on D translation adjusting bracket, adjusted by adjusting described D translation
Three translation shafts of section frame, can not only be adjusted up the position of described condenser lenses in two-dimensional vertical side additionally it is possible in optical axis
Direction adjusts the position of described plus lens so that Raman signal light can be accurately incident and focus on the narrow of signal detection module
Seam slt is simultaneously detected for signal detection module.
Understand, this utility model has the advantage that and beneficial effect based on technique scheme:
(1) design of laser instrument import modul is simple and practical, can easily switch various lasers, simultaneously can be easily
Expand to more multi-laser；
(2) by special sideband optical filter eft and reflecting mirror before and provisioned two-dimension translational platform and related two
Dimension adjusting bracket, can adjust the incident angle that laser instrument incides special sideband optical filter eft on a large scale, realize unique edge
Optimization with optical filter eft operating angle adjusts and measures come the Raman signal realizing as little as 10 wave numbers；
(3) each laser is all equipped with special bandpass filter bpf and special sideband optical filter eft accordingly, and these are special
Different bandpass filter bpf and special sideband optical filter eft is fixed on two-dimensional vertical adjustable articulator, and each adjusting bracket can be real
Existing two-dimensional directional fine-tunes, and these two-dimensional vertical adjustable articulators are placed on the pillar being fixed on spectrogrph substrate pluggablely.
Based on this, in the case of the different wave length laser rays switching same laser instrument and switching various lasers, can be rapidly accurate
Straight regulation light path；
(4) being used in combination of reflective special bandpass filter bpf and special sideband optical filter eft, not only can be
Purification laser in the very narrow scope of wave number, and ensure that the measurement of the lower Raman signal of frequency.
(5) in laser optical path and Raman signal light path polarization optical element with the use of being obtained in that lower the drawing of frequency
Graceful spectral signal；
(6) Raman spectrometer of the present utility model has low cost, EO-1 hyperion transmitance, the detection energy of as little as 10 wave numbers
Power, the advantages of easy and simple to handle, light path arrangement is reasonable and extensibility is strong.
Brief description
Fig. 1 is the structural representation of microscopic confocal Raman spectrometer of the prior art；
Fig. 2 is shown based on the structure of sideband optical filter and the ultralow wavenumber Raman spectra instrument of a laser instrument for this utility model
It is intended to；
Fig. 3 is super brilliant by the germanium silicon tested using this utility model ultralow wavenumber Raman spectra instrument and 532 nano lasers
The Raman spectrogram of lattice, minimum wave number is up to 10 wave numbers；
Fig. 4 is shown based on the structure of sideband optical filter and the ultralow wavenumber Raman spectra instrument of two laser instrument for this utility model
It is intended to；
Fig. 5 is using this utility model ultralow wavenumber Raman spectra instrument and 785 nano lasers, when laser optical path and Raman
The Low-frequency Raman spectroscopy of the l- cystine tested when two linear polarizer difference parallel (vv) of signal light path and vertical (hv)
Figure is it is seen that hv configuration can measure the lower raman spectral signal of frequency than vv configuration.
Specific embodiment
For making the purpose of this utility model, technical scheme and advantage become more apparent, below in conjunction with specific embodiment, and
Referring to the drawings, the utility model is described in further detail.
The utility model discloses a kind of Raman spectrometer, special bandpass filter and special sideband are included on its light path
Optical filter, wherein, special bandpass filter and special sideband optical filter are respectively arranged on two-dimensional vertical adjustable articulator, so as to
The position that enough laser beams that this Raman spectrometer is sent pass through and angle carry out accurate adjustment.
Preferably, this special bandpass filter is a kind of reflective bandpass filter based on volume Bragg grating technology
Piece.The diffraction efficiency of this special bandpass filter is more than 90%；Spectral bandwidth is more than or equal to 2 wave numbers, preferably greater than or equal to 5 ripples
Number；Deflection angle is more than or equal to 5 degree；Cut-off wave number is less than or equal to 50 wave numbers, is preferably smaller than equal to 25 wave numbers；Raman spectrum passes through
Rate is more than or equal to 90%, and has less than or equal to 10-6Laser rays transmitance.
Preferably, this special bandpass filter and/or special sideband optical filter are respectively arranged in pluggable mode
On two-dimensional vertical adjustable articulator.
Preferably, this two-dimensional vertical adjustable articulator also includes adjusting screw thread, can be on two-dimensional vertical adjustable articulator
The position of optical filter of support and angle are fine-tuned.
Preferably, this Raman spectrometer includes at least two laser instrument, and a laser instrument imports and purification blocks, swashs
Light device imports and includes this special bandpass filter and multiple reflecting mirror with purification blocks, and multiple reflecting mirrors pass through the conversion group of position
Close the light path that the laser beam realizing sending one of at least two laser instrument laser instrument imports irradiating sample and detector unit.
As a preferred embodiment, the conversion combination of multiple reflector positions is by being respectively provided with multiple reflecting mirrors
On multiple corresponding slide rails with two fixed positions, by combination switching between different fixed positions for multiple reflecting mirrors
Laser to realize sending one of at least two laser instrument laser instrument imports the light path of irradiating sample and detector unit.
As a preferred embodiment of the present utility model, the invention also discloses a kind of based on sideband optical filter
Raman spectrometer, is imported and is coupled and output module and signal detection mould with purification blocks, light path including laser module, laser instrument
Block it is characterised in that
Described laser module at least includes a laser instrument ls1, is used for sending laser beam；
Described laser instrument imports and purification blocks include at least two reflecting mirror m1, m3, polarization optical element p1 and special
Bandpass filter bpf, the laser beam for sending described laser module reflexes to described special band logical filter via reflecting mirror
The center of mating plate bpf, and subsequent optical path is reflexed to by described special bandpass filter bpf；
The coupling of described light path and output module include at least two reflecting mirror m4, m5, special sideband optical filter eft, micro-
Object lens obj, polarization optical element p2 and condenser lenses lns, the laser beam for reflecting described special bandpass filter bpf leads to
Cross the center that two reflecting mirrors (m4, m5) reflex to described special sideband optical filter eft, described special sideband optical filter eft will again
Laser beam guides microcobjective obj, focuses on sample smp through microcobjective obj and it is irradiated, and allows to irradiate described
The reflected light of sample smp and Raman signal light after microcobjective obj collection retroeflection in described special sideband optical filter eft
The heart, and then obtain pure Raman signal light using described special sideband optical filter eft, and then converged by condenser lenses lns
To follow-up signal detection module；
Described signal detection module includes monochromatic light grating spectrograph gpy and corresponding control circuit, for coupling to described light path
The pure Raman signal light being obtained with output module is detected, obtains raman spectral signal.
Further, concrete light path includes:
Laser beam laser instrument being sent through configuration reflecting mirror m1 incides reflecting mirror m3, and reflected mirror m3 reflexes to spy
Different bandpass filter bpf, and then after the laser after special bandpass filter bpf reflection is continuously across reflecting mirror m4 and m5 reflection
Incide special sideband optical filter eft center, and microcobjective obj is reflexed to by special sideband optical filter eft, via micro- thing
Mirror obj focuses on sample smp surface.Meanwhile, microcobjective obj collects the laser-bounce light from sample smp and Raman signal
Light incides special sideband optical filter eft via after microcobjective obj collection；Special sideband optical filter eft is by laser-bounce light
Filter and decay to only original 1/106To 1/1012, and make the Raman signal light transmission of the overwhelming majority, and line focus is saturating
Mirror lns focuses on after entering monochromatic light grating spectrograph gpy slit and detects for monochromatic light grating spectrograph gpy.
Further, reflecting mirror m1, m3, m4 and m5 is both secured to make on two-dimensional vertical adjustable articulator their angle equal
Two dimension is adjustable；Adjusting reflecting mirror m3 allows laser beam to incide the center of special bandpass filter bpf.
Further, special bandpass filter bpf is fixed on a two-dimensional vertical adjustable articulator；Two-dimensional vertical scalable
Frame is placed on a pillar being fixed on spectrogrph pedestal pluggablely；When changing different wave length laser, phase will be fixed with
The two-dimensional vertical adjustable articulator answering special bandpass filter bpf is changed on this pillar；Adjusting bracket screw thread, can be by special band logical
Optical filter bpf is critically adjusted to its operating angle and reflects the laser light to reflecting mirror m4.
Further, reflecting mirror m5 is positioned on two-dimensional vertical adjustable articulator, and this two-dimensional vertical adjustable articulator is placed
On two-dimension translational platform；Two-dimension translational platform is used for adjusting the position that laser beam incides on reflecting mirror, and two-dimensional vertical scalable
Frame makes it that laser beam is reflexed to the center of special sideband optical filter eft for adjusting reflecting mirror direction；Two-dimension translational platform and two
Being applied in combination of dimension vertically adjustable section frame, can accurately adjust the angle that laser beam incides special sideband optical filter eft center.
Further, special sideband optical filter eft is fixed on a two-dimensional vertical adjustable articulator；Two-dimensional vertical scalable
Frame is placed on a pillar being fixed on optical table pluggablely；When changing different wave length laser, will be fixed with corresponding
The two-dimensional vertical adjustable articulator of special sideband optical filter eft is changed on this pillar；Adjusting bracket screw thread, you can make laser light incident
To microcobjective obj；It is used in combination by the two-dimensional vertical adjustable articulator of this two-dimensional vertical adjustable articulator and reflecting mirror m5, you can
Make laser beam datum incide microcobjective obj, and focus on sample smp, realize the detection of sample smp Raman signal.Its
The flashlight that middle line focus lens lns converged and entered slit slt incides reflecting mirror ma, the signal after reflected mirror ma reflection
Illumination is mapped on grating grt, and the flashlight after grating grt dispersion is collected by reflecting mirror mb and reflexes to detector ccd
Detected.
Further, special bandpass filter bpf is a kind of reflective bandpass filter based on body grating technology, and it spreads out
Penetrate efficiency up to more than 90%, spectral bandwidth is more than 5 degree up to 5 wave numbers, deflection angle.
Further, special sideband optical filter eft is a kind of sideband optical filter through particular design, and its cut-off wave number can
Less than 25 wave numbers, be equivalent to the 0.2% of optical maser wavelength, its Raman spectrum transmitance is more than 90%, and has less than 10-6Laser
Line transmitance.
Further, laser module also includes laser instrument ls2, and this laser instrument imports and also includes reflecting mirror with purification blocks
M2, is used cooperatively with reflecting mirror m1, and wherein said one group of reflecting mirror m1, m2 are respectively placed in respective one and have two fixed bits
On the slide rail put, a position on the described slide rail with two fixed positions makes corresponding reflecting mirror be located in light path, by institute
State the laser beam that the laser instrument corresponding to reflecting mirror sends and import subsequent optical path, another one position not in light path, by institute
The switching stating one group of reflector position imports subsequent optical path come the laser beam to select to send corresponding laser instrument.
Further, condenser lenses lns is positioned on D translation adjusting bracket, by adjusting the three of D translation adjusting bracket
Individual translation shaft, can not only be adjusted up the position of described condenser lenses additionally it is possible to adjust in optical axis direction in two-dimensional vertical side
The position of described plus lens is so that Raman signal light can be accurately incident and focus on the slit slt of signal detection module simultaneously
Detected for signal detection module.
Further, polarization optical element p1 and p2 includes linear polarizer, 1/4 slide, 1/2 slide and combinations thereof unit
Part, wherein linear polarizer are used for setting the polarization direction of laser or Raman signal, and 1/4 slide is used for the laser of linear polarization or draws
Graceful signal is changed into circularly polarized laser or Raman signal accordingly, and 1/2 slide is used for the polarization of rotary laser or Raman signal
Direction.
Further, polarization optical element p1 and p2 is chosen as linear polarizer, and the optical axis direction of described two linear polarizer
When being mutually perpendicular to, by position on reflecting mirror m5 and special sideband optical filter eft for the fine adjustment laser and fine adjustment
The operating angle of reflecting mirror m5 and special sideband optical filter eft, can detect and put down than two linear polarizer p1 and p2 optical axis direction
Frequency lower Raman signal during row.
As a preferred embodiment of the present utility model, as shown in Fig. 2 the utility model discloses a kind of be based on sideband
The ultralow wavenumber Raman spectra instrument of optical filter, is imported and is coupled with purification blocks, light path and output including laser module, laser instrument
Module and signal detection module；This laser module includes a laser instrument ls1；This laser instrument import with purification blocks include to
Few two reflecting mirror m1 and m3, polarization optical element p1 and removable special bandpass filter bpf.The coupling of this light path and output
Module includes special sideband optical filter eft, at least 2 reflecting mirror m4 and m5, microcobjective obj, polarization optical element p2 and gathers
Focus lens lns.This light path coupling module is used for excite light directing by arranging the inside light path in this light path coupling module
Sample is simultaneously irradiated to it, allows for sample reflected light and Raman signal light retroeflection in wherein, and then using removable
Special sideband optical filter eft is obtaining pure Raman signal light, and then passes through the Raman signal light obtaining follow-up further
Signal detection module detecting；This signal detection module is included by entrance slit slt, at least two reflecting mirror ma and mb, light
The monochromatic light grating spectrograph gpy of grid grt and detector ccd composition and corresponding control system.
Further, concrete light path includes: through configuration reflecting mirror m1 laser light incident to reflecting mirror m3, reflected mirror m3
Reflex to special bandpass filter bpf, so the laser after special bandpass filter bpf reflection continuously across reflecting mirror m4 and
Incide special sideband optical filter eft center after m5 reflection, and microcobjective obj, warp are reflexed to by special sideband optical filter eft
Sample smp surface is focused on by microcobjective obj.Meanwhile, microcobjective obj collect from sample smp laser-bounce light and
Raman signal light incides special sideband optical filter eft；Laser-bounce light is filtered and only decays to by special sideband optical filter eft
There is original 1/106To 1/1012, and make the Raman signal light transmission of the overwhelming majority, and line focus lens lns focuses on and enters list
Monochromatic light grating spectrograph gpy is supplied to detect after grating spectrograph gpy slit.
Using this ultralow wavenumber Raman spectra instrument based on sideband optical filter, test the Raman spectrum of germanium silicon superlattices, make
With 100 times of Lycra microcobjectives, 1800 ruling gratings, 80 microns of spectrometer input slit width, using 532nm pumped solid state
Laser instrument, the Raman spectrogram surveyed is as shown in Figure 3.532 nanometers of nano edge using iridian Spectra-Tech, Inc. (US) 652 Glenbrook Road, P.O. Box 2190 Stamford, Connecticut draw
Graceful optical filter, the cutoff wavelength of this Raman optical filter is 38 wave numbers.But because this is drawn based on the ultralow wave number of sideband optical filter
The angles and positions of graceful spectrogrph energy accurate adjustment critical optical elements, this spectrogrph minimum test wave number reaches 10 wave numbers.
In addition, this Raman spectrometer also has extraordinary autgmentability.For example, expand to second even plural
Laser instrument is it might even be possible to from easily introducing other large-scale lasers.Fig. 4 gives an inclusion 2 laser modules
The ultralow wavenumber Raman spectra instrument based on sideband optical filter structural representation.When laser module as shown in Figure 4 includes
Two laser instrument ls1, ls2, laser instrument imports and includes reflecting mirror m1, m2, m3, one of which reflecting mirror m1, m2 with purification blocks
It is respectively placed in respective one and have on the slide rail of two fixed positions, on the described slide rail with two fixed positions
Position makes corresponding reflecting mirror be located in light path, and the laser beam that the laser instrument corresponding to described reflecting mirror is sent imports subsequent optical
Road, another one position is not in light path.Just one of wavelength laser can be incided through configuration reflecting mirror m1 and m2
Reflecting mirror m3, reflected mirror m3 reflex to special bandpass filter bpf, and then swashing after special bandpass filter bpf reflection
Light incides special sideband optical filter eft center continuously across after reflecting mirror m4 and m5 reflection, and by special sideband optical filter eft
Reflex to microcobjective obj, focus on sample smp surface via microcobjective obj.Meanwhile, microcobjective obj collects and is derived from sample
The laser-bounce light of product smp and Raman signal light incide special sideband optical filter eft；Special sideband optical filter eft is by laser
Reflected light filters and decays to only original 1/106To 1/1012, and make the Raman signal light transmission of the overwhelming majority, and warp
Condenser lenses lns focuses on after entering monochromatic light grating spectrograph gpy slit and detects for monochromatic light grating spectrograph gpy.
Using this ultralow wavenumber Raman spectra instrument based on sideband optical filter, using the 785 of iridian Spectra-Tech, Inc. (US) 652 Glenbrook Road, P.O. Box 2190 Stamford, Connecticut
Nanometer nano edge Raman optical filter, also measures the Low-frequency Raman spectroscopy of l- cystine under different polarization configuration, employs
100 times of Lycra microcobjectives, 1800 ruling gratings, 80 microns of spectrometer input slit width, is swashed using 785 nanometers of Ti∶Sapphire laser
Light device, the Raman spectrogram surveyed is as shown in Figure 5.The cutoff wavelength of 785 nanometers of nano edge Raman optical filters is 26 wave numbers,
But the angle due to this ultralow wavenumber Raman spectra instrument energy accurate adjustment critical optical elements based on sideband optical filter and position
Put, the low frequency Raman signal of the l- cystine of 15 wave numbers can be tested.
If polarization optical element p1 and p2 of the laser optical path in selection Fig. 4 and Raman signal light path is linear polarizer
When, the optical axis direction of p1 and p2 is set to be mutually perpendicular to, that is, under hv or vh Raman scattering configuration, is existed by fine adjustment laser
Position on reflecting mirror m5 and special sideband optical filter eft and fine adjustment reflecting mirror m5 and special sideband optical filter eft's
Operating angle, this spectrogrph minimum test wave number under this cross polarization configures equally has reached 10 wave numbers.
Two above example illustrates the ultralow wavenumber Raman spectra instrument based on sideband optical filter of this patent design in difference
The intrasonic Raman signal measurement of minimum 10 wave numbers can be realized under optical maser wavelength.This test performance can be with three general gratings
The lower wave number test function of Raman spectrometer compares favourably, or even the survey of closely 5 wave numbers based on body grating notch filtering light piece
The examination limit.The lower wave number test performance of the ultralow wavenumber Raman spectra instrument based on sideband optical filter of the present utility model is much better than one
As the commercialization Raman spectrometer based on sideband optical filter respective performances.In addition, Raman spectrometer of the present utility model
Autgmentability is very strong, and cost performance is far above existing commercialization micro confocal spectrogrph, facilitates implementation high performance-price ratio micro- common
The popularization of burnt spectrogrph, and application in investigation of materials for the confocal micro Raman spectrum can be promoted.
Particular embodiments described above, has carried out entering one to the purpose of this utility model, technical scheme and beneficial effect
Step describes in detail it should be understood that the foregoing is only specific embodiment of the utility model, is not limited to this reality
With new, all within spirit of the present utility model and principle, any modification, equivalent substitution and improvement done etc., all should comprise
Within protection domain of the present utility model.
Claims (21)
1. a kind of Raman spectrometer based on sideband optical filter, imports and purification blocks, light path including laser module, laser instrument
Coupling with output module and signal detection module it is characterised in that
Described laser module at least includes a laser instrument；
Described laser instrument imports and includes at least two first reflecting mirrors and special bandpass filter bpf with purification blocks, described extremely
Few two the first reflecting mirrors reflex to the laser beam that described laser module sends in described special bandpass filter bpf
The heart, and subsequent optical path is reflexed to by described special bandpass filter bpf；
Described light path coupling includes at least two second reflecting mirrors, special sideband optical filter eft, microcobjective with output module
Obj and condenser lenses lns, the laser beam that described special bandpass filter bpf is reflected by described at least two second reflecting mirrors is anti-
It is mapped to the center of described special sideband optical filter eft, laser beam is guided described micro- thing by described special sideband optical filter eft again
Mirror obj, focuses on sample smp through microcobjective obj and it is irradiated, and irradiates reflected light and the Raman of described sample smp
Flashlight collect through described microcobjective obj after retroeflection to described special sideband optical filter eft center, and then utilize described spy
Different sideband optical filter eft, to obtain pure Raman signal light, converges to follow-up signal detection mould by described condenser lenses lns
Block；
Described signal detection module includes monochromatic light grating spectrograph gpy and corresponding control circuit, for described light path coupling with defeated
The pure Raman signal light going out module acquisition is detected, obtains the Raman spectrum of sample smp.
2. Raman spectrometer according to claim 1 is it is characterised in that described laser instrument imports and the in purification blocks
One reflecting mirror and/or the coupling of described light path are individually fixed in a two-dimensional vertical scalable with the second reflecting mirror in output module
On frame, two dimension is adjustable respectively to make their angle.
3. Raman spectrometer according to claim 2 filters it is characterised in that laser beam is reflexed to described special sideband
Second reflecting mirror at the center of piece eft is fixed on a two-dimensional vertical adjustable articulator, and described two-dimensional vertical adjustable articulator is put again
It is placed on a two-dimension translational platform, described two-dimension translational platform is used for adjusting the position to described second reflecting mirror for the laser light incident,
And described two-dimensional vertical adjustable articulator is used for adjusting described second reflecting mirror direction and makes it that laser beam is reflexed to described unique edge
Center with optical filter eft.
4. Raman spectrometer according to claim 1 is it is characterised in that also wrap in the importing of described laser instrument and purification blocks
Include the first polarization optical element between described laser module and special bandpass filter bpf, to described laser die
The laser beam that block sends is re-reflected into the center of described special bandpass filter bpf after carrying out polarization manipulation；Described light path coupling
And output module also includes the second polarization optical element between described special sideband optical filter eft and condenser lenses lns,
Will transmit through described special sideband optical filter eft laser beam carry out polarization manipulation after re-direct condenser lenses lns.
5. Raman spectrometer according to claim 4 is it is characterised in that described first polarization optical element and second polarizes
Optical element includes linear polarizer, the combination of 1/4 slide, 1/2 slide and said elements respectively, and wherein said linear polarizer sets
Laser beam or the polarization direction of Raman signal, described 1/4 slide is changed into the laser beam of linear polarization or Raman signal accordingly
Circularly polarized laser beam or Raman signal, the polarization direction of described 1/2 slide slewed laser beam or Raman signal.
6. Raman spectrometer according to claim 4 is it is characterised in that described first polarization optical element and second polarizes
Optical element is linear polarizer, and when the optical axis direction of described two linear polarizer is mutually perpendicular to, by fine adjustment laser anti-
Penetrate the operating angle of position on mirror and special sideband optical filter eft and fine adjustment reflecting mirror and special sideband optical filter eft
Degree, when can detect more parallel than described first polarization optical element and the second polarization optical element optical axis direction, frequency is lower
Raman signal.
7. Raman spectrometer according to claim 1 is it is characterised in that described special bandpass filter bpf is a kind of base
Reflective bandpass filter in volume Bragg grating technology.
8. Raman spectrometer according to claim 7 is it is characterised in that the diffraction of described special bandpass filter bpf is imitated
Rate is more than 90%.
9. Raman spectrometer according to claim 7 is it is characterised in that the band of described special bandpass filter bpf
It is wider than equal to 2 wave numbers.
10. Raman spectrometer according to claim 7 is it is characterised in that the band of described special bandpass filter bpf
It is wider than equal to 5 wave numbers.
11. Raman spectrometers according to claim 7 are it is characterised in that the deflection angle of described special bandpass filter bpf
Degree is more than or equal to 5 degree.
12. Raman spectrometers according to claim 7 are it is characterised in that the cut-off wave of described special sideband optical filter eft
Number is less than or equal to 50 wave numbers.
13. Raman spectrometers according to claim 7 are it is characterised in that the cut-off wave of described special sideband optical filter eft
Number is less than or equal to 25 wave numbers.
14. Raman spectrometers according to claim 7 are it is characterised in that the Raman light of described special sideband optical filter eft
Spectrum transmitance is more than or equal to 90%, and has less than or equal to 10-6Laser rays transmitance.
15. Raman spectrometers according to claim 1 are it is characterised in that the coupling of described light path includes two with output module
The consistent special sideband optical filter eft of individual operation wavelength is so that tool during laser beam transparent described two special sideband optical filter eft
Have less than or equal to 10-10Transmitance.
16. Raman spectrometers according to claim 1 are it is characterised in that described special bandpass filter bpf and/or spy
Different sideband optical filter eft is fixedly installed on a two-dimensional vertical adjustable articulator respectively.
17. Raman spectrometers according to claim 16 are it is characterised in that described two-dimensional vertical adjustable articulator is with pluggable
Mode be respectively arranged on the pedestal of described Raman spectrometer.
18. Raman spectrometers according to claim 16 are it is characterised in that described two-dimensional vertical adjustable articulator includes adjusting
Screw thread, can be to the position of described special bandpass filter bpf fixed thereon and/or special sideband optical filter eft and angle
Degree is fine-tuned.
19. Raman spectrometers according to claim 1 it is characterised in that described laser module include at least two groups swash
Light device, described laser instrument imports and includes one group of first reflecting mirror with purification blocks, and described one group of first reflecting mirror is respectively placed in respectively
From one have on the slide rail of two fixed positions, a position on the described slide rail with two fixed positions makes correspondence
First reflecting mirror is located in light path, and the laser beam that the laser instrument corresponding to described first reflecting mirror is sent imports subsequent optical path,
Another one position, not in light path, selects to send corresponding laser instrument by the switching of described one group of first reflector position
Laser beam import subsequent optical path.
20. Raman spectrometers according to claim 1 are it is characterised in that monochromatic light grid light in described signal detection module
Spectrometer gpy includes slit slt, the 3rd reflecting mirror ma, the 4th reflecting mirror mb, grating grt and detector ccd, is wherein derived from slit
The Raman signal light of slt incides the 3rd reflecting mirror ma, and the flashlight after the 3rd reflecting mirror ma reflection is irradiated to grating grt
On, the flashlight after grating grt dispersion is collected by the 4th reflecting mirror mb and reflexes to detector ccd being detected.
21. Raman spectrometers according to claim 20 are it is characterised in that described condenser lenses lns is positioned over three-dimensional putting down
Move on adjusting bracket, by adjusting three translation shafts of described D translation adjusting bracket, can not only raise in two-dimensional vertical direction
Save the position of described condenser lenses lns additionally it is possible to adjust the position of described condenser lenses lns so that Raman is believed in optical axis direction
Number light can be accurately incident and focus on the slit slt of signal detection module and detected for signal detection module.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107462566A (en) * | 2017-08-11 | 2017-12-12 | 上海合森生物科技有限公司 | For detecting the Raman spectrometer of specific narrow wave-number range |
| CN107843564A (en) * | 2017-10-27 | 2018-03-27 | 中国人民解放军国防科技大学 | Reflection type optical material nonlinear polarization spectrum measuring device |
-
2016
- 2016-05-11 CN CN201620423111.8U patent/CN205898296U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107462566A (en) * | 2017-08-11 | 2017-12-12 | 上海合森生物科技有限公司 | For detecting the Raman spectrometer of specific narrow wave-number range |
| CN107462566B (en) * | 2017-08-11 | 2023-10-31 | 上海氘峰医疗科技有限公司 | Raman spectrometer for detecting specific narrow wavenumber range |
| CN107843564A (en) * | 2017-10-27 | 2018-03-27 | 中国人民解放军国防科技大学 | Reflection type optical material nonlinear polarization spectrum measuring device |
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