CN203824911U - Microscopic con-focal Raman reflector path device capable of accurately adjusting con-focal region - Google Patents
Microscopic con-focal Raman reflector path device capable of accurately adjusting con-focal region Download PDFInfo
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- CN203824911U CN203824911U CN201320676795.9U CN201320676795U CN203824911U CN 203824911 U CN203824911 U CN 203824911U CN 201320676795 U CN201320676795 U CN 201320676795U CN 203824911 U CN203824911 U CN 203824911U
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Abstract
The utility model provides a microscopic con-focal Raman reflector path device capable of accurately adjusting a con-focal region and belongs to the technical field of Raman spectrum. The utility model provides the microscopic con-focal Raman reflector path device capable of accurately adjusting the size of the con-focal region. According to the device, a microscopic objective lens adopts a zoom microscopic objective lens; the con-focal region corresponding to objective lens observation is utilized; visual accurate and continuous adjustment of the con-focal region can be realized by adjusting the zoom microscopic objective lens. A microscopic con-focal observation light path subsystem provided by the utility model can be used for accurately observing a con-focal region range of a microscopic con-focal Raman scattering light collection light path subsystem; the continuous adjustment of the size of the con-focal region of the microscopic con-focal Raman scattering light collection light path subsystem can be realized by using the zoom microscopic objective lens.
Description
Technical field
The utility model relates to Raman spectroscopy field, refers in particular to a kind of outer light path device of micro confocal Raman that can the confocal region of fine adjustment.
Background technology
Laser Raman spectroscopy technology is the spectral analysis technique growing up based on Raman scattering effect, can obtain molecular vibration, the rotation information of material, every kind of material molecule has its specific feature raman spectra, has been widely used in qualification, the molecular structure research of material.In the time that being irradiated on material, exciting light can there is elastic scattering and inelastic scattering, in scattered light, apart from the elastic component identical with excitation wavelength (this part is Rayleigh scattering light only) in addition, also have the composition (this part only Raman diffused light) long and shorter than excitation light wave.Because Raman scattering light intensity is very weak, less by 10 than Rayleigh scattering light intensity
10～10
14doubly.Therefore the design of Raman spectrometer, must can get rid of Rayleigh scattering light, and highly sensitive, effectively the raman scattering spectrum of collection of material.
The appearance of laser capture microdissection Raman technology improves the sensitivity of Raman spectrometer and resolution greatly, and laser capture microdissection Raman spectrometer is the perfect adaptation of microtechnic and Raman spectroscopy, adopts micro confocal mode to carry out filtering parasitic light.As application number 201110288486.X, name are called the patented claim of " a kind of microscopic confocal Raman spectrometer ", adopt ready-made commercialization microscope module to realize the microexamination to sample, recycle the mode that micro-module and pin hole combine and realize micro confocal, reach the object that improves Raman spectrometer signal to noise ratio (S/N ratio).The inVia Reflex model laser capture microdissection Raman spectrometer that Reinshaw company of micro-Raman spectroscopy manufacturer of Britain produces, adopt German leica microscope, standard configuration has 5 times, 20 times, 50 times, 100 x Microscope Objectives, the same micro confocal module that adopts reduces parasitic light, to realize the object of high s/n ratio.Above-mentioned micro confocal Raman module adopts lens rotation platform to switch different multiplying microcobjective, and the enlargement ratio of microcobjective is fixed, and is generally: 5 times, 10 times, 20 times, 50 times and 100 times.Although can realize the microcell Raman analysis to the large small sample of difference by the microcobjective of changing fixed multiplying power, there are some defects: the enlargement ratio of (1) microcobjective is discrete, cannot be to the continuous amplifying observation of sample microcell.(2) the confocal regional extent size adjustment of micro confocal light path collection raman spectral signal is discrete.(3) adjusting of confocal pinhole or replacing, only with personal experience and sensation, if confocal pinhole diameter is excessive, has more Rayleigh scattering signal and parasitic light and enter grating spectrograph; If confocal pinhole is too small, some faint Raman signal is blocked in confocal pinhole outside, either way can cause the reduction of signal to noise ratio (S/N ratio).
Summary of the invention
The purpose of this utility model is for overcoming the deficiencies in the prior art, a kind of outer light path device of microscopic confocal Raman spectrometer (microcobjective in device adopts zoom microcobjective) that can accurately regulate continuously confocal area size is proposed, utilize eyepiece to observe corresponding confocal region, by regulating zoom microcobjective to realize, the visual of confocal region accurately regulated continuously.
The technical solution of the utility model is:
The outer light path device of micro confocal Raman that can the confocal region of fine adjustment, comprises that micro confocal observation optical path subsystem, micro-raman laser excitation light path subsystem, micro confocal Raman diffused light collect light path subsystem; Three light path subsystems are connected in sequence according to light path order, form T-shaped common micro confocal structure.
In the outer light path device of micro confocal Raman that can the confocal region of fine adjustment, be provided with sample stage, testing sample is placed on the sample stage of horizontal positioned, and this sample stage is at x, y, and tri-directions of z are adjustable; Wherein said micro confocal observation optical path subsystem is perpendicular to the sample stage of horizontal positioned, for accurately locating testing sample target microcell and selecting suitable confocal target microcell size, comprise zoom microcobjective, tube lens, observation pin hole, eyepiece and white-light illuminating light source composition; Along perpendicular to horizontal sample platform direction, configure successively from the bottom to top zoom microcobjective, tube lens, observation pin hole and eyepiece, white-light illuminating light source is positioned at horizontal sample platform upper left side;
Wherein said micro-raman laser excitation light path subsystem, for the target microcell surface central authorities to testing sample by laser vernier focusing, comprise laser instrument, laser beam expander, completely reflecting mirror I, completely reflecting mirror II, depression optical filter I, completely reflecting mirror III and zoom microcobjective; Laser instrument is positioned at below, micro confocal observation optical path subsystem right side, laser level is placed left, and in laser emitting light path, horizontal direction configures the zoom microcobjective of placing below laser beam expander, completely reflecting mirror I, the completely reflecting mirror II placing along completely reflecting mirror I reflection direction, the depression optical filter I placing along completely reflecting mirror II reflection direction, the completely reflecting mirror III placing along depression optical filter I light path reflection direction and completely reflecting mirror III successively.
Wherein said micro confocal Raman diffused light is collected light path subsystem, for the Raman signal of testing sample target microcell being collected after the most Rayleigh scattering lights of also filtering, focusing enters confocal pinhole, comprises zoom microcobjective, completely reflecting mirror III, depression optical filter I, depression optical filter II, condenser lens and confocal pinhole; Along configure successively zoom microcobjective, completely reflecting mirror III, the depression optical filter I configuring successively along completely reflecting mirror III reflection direction, depression optical filter II, condenser lens and confocal pinhole perpendicular to horizontal sample platform direction.
Utilize the above-mentioned outer light path device of micro confocal Raman that can the confocal region of fine adjustment to obtain the method for the raman spectral signal of material, carry out according to following step: (1) opens microscope illumination white light source, utilize eyepiece to observe sample, adjust up and down sample position to clear, horizontal adjustment sample to microcell to be measured is positioned at eyepiece field of view center.Add observation pin hole, regulate zoom microcobjective, until selected good best confocal region.(2) open laser instrument, laser is by micro-raman laser exciton system vernier focusing to testing sample surface, and testing sample produces Raman diffused light and Rayleigh scattering light after by laser excitation.(3) collect light path subsystem by micro confocal Raman signal and collect Raman diffused light and Rayleigh scattering light, depression optical filter in this subsystem is by Rayleigh scattering light filtering, Raman diffused light is focused lens focus, the front needle holding hole that enters grating spectrograph, finally obtains Raman scattering signal by grating spectrograph.
The beneficial effects of the utility model:
1. can accurately observe the confocal regional extent of being collected light path subsystem by micro confocal Raman diffused light by micro confocal observation optical path subsystem.
2. utilize zoom microcobjective can realize the continuous adjusting of micro confocal Raman diffused light being collected to the confocal area size of light path subsystem.
Brief description of the drawings
Fig. 1 is a kind of structural representation of the outer light path device of micro confocal Raman that can the confocal region of fine adjustment, wherein 1, laser instrument 2, laser beam expander 3, completely reflecting mirror I4, completely reflecting mirror II5, depression optical filter I6, depression optical filter II7, completely reflecting mirror III8, zoom microcobjective 9, sample stage 10, white-light illuminating light source 11, tube lens 12, observe pin hole 13, eyepiece 14, eyes 15, condenser lens 16, confocal pinhole 17, grating spectrograph 18, extinction device.
Fig. 2 is the optical structure chart of the multiplying power of zoom microcobjective 8 while being 40 times (corresponding focal length is 4.5mm).
Fig. 3 is the optical structure chart of the multiplying power of zoom microcobjective 8 while being 20 times (corresponding focal length is 9mm).
Fig. 4 is the optical structure chart of the multiplying power of zoom microcobjective 8 while being 13.3 times (corresponding focal length is 13.5mm).
Embodiment
Below in conjunction with accompanying drawing, the utility model is further illustrated.Of the present utility model can the confocal region of fine adjustment micro confocal Raman outside optical system structural drawing as shown in Figure 1, be divided into 3 subsystems by function: micro confocal observation optical path subsystem, micro-raman laser excitation light path subsystem, micro confocal Raman diffused light are collected light path subsystem.Three light path subsystems are connected in sequence according to light path order, form T-shaped common micro confocal structure.
In the outer light path device of micro confocal Raman that can the confocal region of fine adjustment, be provided with sample stage 9, testing sample is placed on the sample stage of horizontal positioned, and this sample stage is at x, y, and tri-directions of z are adjustable.Micro confocal observation optical path subsystem is perpendicular to horizontal sample platform 9, for accurately locating testing sample target microcell and selecting suitable confocal target microcell size.Along perpendicular to horizontal sample platform 9 directions, configure successively from the bottom to top zoom microcobjective 8, removable completely reflecting mirror 7, tube lens 11, observe pin hole 12 and eyepiece 13, white-light illuminating light source 10 is positioned at horizontal sample platform 9 upper left sides; Micro-raman laser excitation light path subsystem is for the target microcell surface central authorities to testing sample by laser vernier focusing.Laser instrument 1 is positioned at below, micro confocal observation optical path subsystem right side, and laser emitting direction is perpendicular to micro confocal observation optical path subsystem.Horizontal direction in the laser emitting light path of laser instrument 1, configures laser beam expander 2, completely reflecting mirror 3, the completely reflecting mirror 4 of placing along catoptron 3 reflection directions, the depression optical filter 5 of placing along completely reflecting mirror 4 reflection directions, the completely reflecting mirror 7 of placing along depression optical filter 5 light path reflection directions and the zoom microcobjective 8 of completely reflecting mirror 7 belows successively; Micro confocal Raman diffused light is collected light path subsystem for collecting after the Raman signal filtering overwhelming majority Rayleigh scattering light of testing sample target microcell, focusing enters confocal pinhole 16, this subsystem by the zoom microcobjective 8 perpendicular to horizontal sample platform, be positioned at the completely reflecting mirror 7 directly over zoom microcobjective 8, the depression optical filter 5 configuring successively along completely reflecting mirror 7 reflection directions, depression optical filter 6, condenser lens 15 and the preposition confocal pinhole 16 of grating spectrograph and grating spectrograph 17 forms.
Micro confocal observation optical path subsystem is used for observing sample surfaces and finds target microcell, when use, must remove completely reflecting mirror 7, utilize white-light illuminating light source 10 to irradiate sample 9, illuminated sample 9 is imaged onto observation pin hole 12 place planes through zoom microcobjective 8 and tube lens 11, human eye 14, by eyepiece 13, can be observed sample surfaces micro-structure.Up-down adjustment sample 9 is to high-visible, and horizontal adjustment sample 9, makes target area to be measured be positioned at eyepiece field of view central authorities.Add and observe pin hole 12 (its diameter is identical with the diameter of confocal pinhole 16), adjust the multiplying power of zoom microcobjective 8, the visual range of eyepiece 13 zooms in or out along with the variation of object lens multiplying power, until adjust to eyepiece 13 visibility regions just when the testing sample target microcell.Now selected region is the confocal regional extent of the best that micro confocal Raman diffused light is collected light path subsystem, realizes the observation location to sample surfaces microstructure, also can accurately determine the scope in confocal region simultaneously.
It is as follows that micro confocal observation optical path subsystem is accurately chosen confocal region principle: micro confocal observation optical path subsystem and micro confocal Raman diffused light are collected light path subsystem and jointly used zoom microcobjective 8, tube lens 11 and convergent lens 15 are same model lens, that is: f
tube lens=f
condenser lenstherefore micro confocal observation optical path subsystem is identical (that is: with the enlargement ratio that micro confocal Raman diffused light is collected light path subsystem optical imagery
), and it is identical with the diameter of confocal pinhole 16 to observe pin hole 12.Therefore the region of, being observed by eyepiece 13 and to collect the confocal region of Raman spectrum by micro confocal Raman spectrum collection subsystem be identical.Utilize behind the selected good best confocal region of micro confocal observation optical path subsystem, collect light path subsystem with micro confocal Raman diffused light and collect raman spectral signal, can reach the object of accurate confocal removal parasitic light.
The effect of micro-raman laser excitation light path subsystem is to testing sample microcell surface central authorities by laser vernier focusing.After laser excitation sample, except producing Raman diffused light, be also attended by Rayleigh scattering light.The process of utilizing this subsystem that laser vernier focusing is produced to Raman diffused light and Rayleigh scattering light to sample surface excitation is as follows: utilize behind the selected good best confocal region of micro confocal observation optical path subsystem, insert completely reflecting mirror 7 (position of catoptron as shown in Figure 1); Open laser instrument 1, laser after laser beam expander 2, completely reflecting mirror 3, completely reflecting mirror 4, depression optical filter 5, completely reflecting mirror 7 reflections, is gathered on testing sample 9 by zoom microcobjective 8 successively, and sample is excited and produces Raman diffused light and Rayleigh scattering light;
Micro confocal Raman diffused light is collected light path subsystem and is used for collecting Raman diffused light spectrum signal as much as possible, filtering Rayleigh scattering light signal.In opening laser instrument 1, testing sample 9 is excited and produces Raman diffused light and Rayleigh scattering light, now, Raman diffused light and Rayleigh scattering light are collected and are collimated by zoom micro objective 8 and become directional light, after directional light is totally reflected mirror 7 reflection folding and turn 90 degrees, arrive depression optical filter 5, now reflected by depression optical filter 5 with the identical part light wave of excitation wavelength (with the identical only Rayleigh scattering light of excitation wavelength), the light wave long and shorter than excitation light wave (being Raman diffused light than excitation wavelength and short light wave) sees through depression optical filter 5 and depression optical filter 6, the Raman diffused light seeing through is focused lens 15 and focuses on the preposition confocal pinhole 16 of grating spectrograph, and the diameter of confocal pinhole 16 is identical with the diameter of the observation pin hole 12 in micro confocal observation optical path subsystem, by confocal pinhole 16 filterings the various parasitic lights beyond most of confocal region.The scattered light that sees through confocal pinhole 16 is that the Raman diffused light in confocal regional extent is collected by grating spectrograph 17.
The utility model has been simulated the transmission path of exciting light, Raman diffused light and Rayleigh scattering light by optical simulation software.Find by simulation, native system has good parasitic light and suppresses ability, adds two depression optical filters Rayleigh intensity can be reduced to 10
12the individual order of magnitude.Found by analog result, also have some inevitably stronger inner parasitic lights in system, the utility model absorbs inner parasitic light by adding extinction device 18.
The principal feature of zoom microcobjective 8 is to realize continuous vari-focus.In the time that tube lens 13 and condenser lens 15 focal lengths are all 180mm, the multiplying power range of adjustment of continuous zoom microcobjective 8 is 13.3 times～40 times, corresponding adjustable focal length scope is 4.5mm～13.5mm, in the situation that not changing microcobjective, can realize the continuous adjusting of confocal regional extent size.Accompanying drawing 2,3 and 4 is respectively and regulates the multiplying power of zoom microcobjective to be respectively: the optical structure chart of (corresponding focal length is respectively: 4.5mm, 9mm, 13.5) 40 times, 20 times, 13.3 times time.
One of laser capture microdissection Raman spectrometer most critical technology be realize confocal.Sample 9 surface scattering light collimate through zoom microcobjective 8, by completely reflecting mirror 7 reflect folding turn 90 degrees after, be focused lens 15 and converge in confocal pinhole 16.Confocal region inscattering light is after confocal light path, and most of scattered light is focused at the pin hole central authorities of confocal pinhole 16, can pass through smoothly confocal pinhole 16, and confocal region inscattering light projects the loose point of the lip-deep light of confocal pinhole 16.And non-confocal zonal ray (being parasitic light) is after confocal light path, major part is focused at around the pin hole of confocal pinhole 16, can not see through confocal pinhole 16, the loose point of the light of non-confocal zonal ray on confocal pinhole 16 surfaces.Parasitic light beyond the confocal region of outside optical system energy of the present utility model filtering.
Claims (4)
1. the outer light path device of micro confocal Raman that can the confocal region of fine adjustment, is characterized in that comprising that micro confocal observation optical path subsystem, micro-raman laser excitation light path subsystem, micro confocal Raman diffused light collect light path subsystem; Three light path subsystems are connected in sequence according to light path order, form T-shaped common micro confocal structure.
2. the outer light path device of micro confocal Raman that can the confocal region of fine adjustment according to claim 1, it is characterized in that in the outer light path device of micro confocal Raman in the confocal region of fine adjustment, being provided with sample stage, wherein said micro confocal observation optical path subsystem is perpendicular to the sample stage of horizontal positioned, this sample stage is at x, y, tri-directions of z are adjustable, for accurately locating testing sample target microcell and selecting suitable confocal target microcell size, comprise zoom microcobjective, tube lens, observation pin hole, eyepiece and white-light illuminating light source composition; Along perpendicular to horizontal sample platform direction, configure successively from the bottom to top zoom microcobjective, tube lens, observation pin hole and eyepiece, white-light illuminating light source is positioned at horizontal sample platform upper left side.
3. the outer light path device of micro confocal Raman that can the confocal region of fine adjustment according to claim 1, it is characterized in that wherein said micro-raman laser excitation light path subsystem, for the target microcell surface central authorities to testing sample by laser vernier focusing, comprise laser instrument, laser beam expander, completely reflecting mirror I, completely reflecting mirror II, depression optical filter I, completely reflecting mirror III and zoom microcobjective; Laser instrument is positioned at below, micro confocal observation optical path subsystem right side, laser level is placed left, and in laser emitting light path, horizontal direction configures the zoom microcobjective of placing below laser beam expander, completely reflecting mirror I, the completely reflecting mirror II placing along completely reflecting mirror I reflection direction, the depression optical filter I placing along completely reflecting mirror II reflection direction, the completely reflecting mirror III placing along depression optical filter I light path reflection direction and completely reflecting mirror III successively.
4. the outer light path device of micro confocal Raman that can the confocal region of fine adjustment according to claim 1, it is characterized in that wherein said micro confocal Raman diffused light collection light path subsystem, for the Raman signal of testing sample target microcell being collected after the most Rayleigh scattering lights of also filtering, focusing enters confocal pinhole, comprises zoom microcobjective, completely reflecting mirror III, depression optical filter I, depression optical filter II, condenser lens and confocal pinhole; Along configure successively zoom microcobjective, completely reflecting mirror III, the depression optical filter I configuring successively along completely reflecting mirror III reflection direction, depression optical filter II, condenser lens and confocal pinhole perpendicular to horizontal sample platform direction.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103529014A (en) * | 2013-10-31 | 2014-01-22 | 江西农业大学 | Microscopy confocal Raman reflector path device with confocal area capable of being precisely adjusted |
| CN114018895A (en) * | 2021-09-29 | 2022-02-08 | 合肥国轩高科动力能源有限公司 | Method for analyzing abnormal points of diaphragm based on Raman spectrum detection |
-
2013
- 2013-10-31 CN CN201320676795.9U patent/CN203824911U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103529014A (en) * | 2013-10-31 | 2014-01-22 | 江西农业大学 | Microscopy confocal Raman reflector path device with confocal area capable of being precisely adjusted |
| CN114018895A (en) * | 2021-09-29 | 2022-02-08 | 合肥国轩高科动力能源有限公司 | Method for analyzing abnormal points of diaphragm based on Raman spectrum detection |
| CN114018895B (en) * | 2021-09-29 | 2024-03-08 | 合肥国轩高科动力能源有限公司 | Diaphragm abnormal point analysis method based on Raman spectrum detection |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140910 Termination date: 20161031 |