CN108311793A - A kind of coaxial vision positioning laser scribing processing head - Google Patents
A kind of coaxial vision positioning laser scribing processing head Download PDFInfo
- Publication number
- CN108311793A CN108311793A CN201810225357.8A CN201810225357A CN108311793A CN 108311793 A CN108311793 A CN 108311793A CN 201810225357 A CN201810225357 A CN 201810225357A CN 108311793 A CN108311793 A CN 108311793A
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- Prior art keywords
- reflecting optics
- laser
- light
- processing head
- vision
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- 230000004438 eyesight Effects 0.000 title claims abstract description 42
- 230000003287 optical effect Effects 0.000 claims abstract description 28
- 238000000605 extraction Methods 0.000 claims abstract description 13
- 238000009826 distribution Methods 0.000 claims abstract description 5
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000005286 illumination Methods 0.000 description 5
- 238000003754 machining Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 230000007812 deficiency Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000013011 mating Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/361—Removing material for deburring or mechanical trimming
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
Abstract
The present invention relates to laser scoring technique field, especially a kind of coaxial vision positions laser scribing processing head.It includes a laser galvanometer, the first reflecting optics, the first focus lamp, the second reflecting optics and vision camera；The light extraction light path of first reflecting optics and laser galvanometer is in 45 degree of angles, the laser that laser galvanometer generates is shot down after the total reflection of the first reflecting optics along the primary optical axis of the first focus lamp, the primary optical axis of first focus lamp and the light shaft coaxle of vision camera, the first reflecting optics and the second reflecting optics are mutually in cross-distribution.The present invention, with the Image Acquisition light path coaxial where vision camera, will eliminate the sighting distance error between laser optical path and Image Acquisition light path using the first reflecting optics after the laser total reflection of laser galvanometer；It is deviated simultaneously on the contrary, to be compensated to the position deviation for positioning light with the light refraction in the first reflecting optics using the light refraction offset in the second reflecting optics, eliminates position error.
Description
Technical field
The present invention relates to laser scoring technique field, especially a kind of coaxial vision positions laser scribing processing head.
Background technology
As electronic product develops towards small, lightening direction, laser processing technology is more and more because of its advantage
It is applied in high-accuracy manufacturing industry.Laser processing is by by a point (diameter of the laser beam focus of high-energy to very little
40um or so), by laser galvanometer, by the energy point of laser processing it is contactless be applied to workpiece surface to be processed, to week
It encloses and does not cause any impact, this mode has been had been widely used at present in the fields such as welding, cutting, scribing line, is especially existed
The relatively high application scenario of positional precision, dimensional accuracy.Vision positioning system is one of key technology of laser precision machining, depending on
Feel that positioning system can be automatically positioned processing object, corrects object to correct Working position, the shape of product, surface are lacked
Sunken, size is detected, and is classified to product and processes positioning, improves the speed and precision of processing, therefore, vision is fixed
Position system plays vital influence to the precision of laser processing.
Existing vision positioning system generally includes paraxial vision positioning system and coaxial vision positioning system, paraxial vision
The light extraction light path of laser galvanometer in positioning system and the Image Acquisition light path of camera be not coaxial, improves add to a certain extent
Work precision, but it is increased in machining area, and camera tilts the far and near different characteristic of crawl, and there are certain sighting distance errors, clap
It takes the photograph image and there is distortion and aberration, therefore limit its scope of application and positioning accuracy.And existing coaxial vision positioning system,
One high transflector eyeglass is usually utilized, the Image Acquisition light path of the light extraction light path of laser galvanometer and camera is respectively arranged at height
The characteristics of transflector eyeglass both sides, the other side highly transmissive using high transflector eyeglass side is totally reflected, makes the light extraction of laser galvanometer
The Image Acquisition light path coaxial of light path and camera, solve to a certain extent because sighting distance error there are due to reduce machining accuracy
The problem of；But when due to both the light extraction light path of laser galvanometer and the Image Acquisition light path of camera through excessively high transflector eyeglass, one
A light reflection, another light refraction, to cause reflected light path accurate positioning, but refractive light paths can be because light be in high transflection
The refraction effect penetrated in eyeglass and the position deviation for causing positioning light, therefore certain position error is still had, it is such fixed
Position error (such as carries out scribing) in field of laser processing especially laser scribing field to LED display or solar panel
Manufacturing industry participant for, be that increasingly there is an urgent need to face and solve the problems, such as.
Therefore, it is necessary to which the laser scribing processing head to existing coaxial vision positioning system proposes improvement project, with most
Limits improving laser scribing line in positioning accuracy, to meet higher and higher precision, highdensity manufacturing demand.
Invention content
In view of the deficiency of the prior art, the purpose of the present invention is to provide a kind of coaxial visions to position laser scribing
Line processing head.
To achieve the goals above, the present invention adopts the following technical scheme that：
A kind of coaxial vision positioning laser scribing processing head, it is characterised in that：It includes the laser for generating laser
Galvanometer, be set to laser galvanometer light extraction light path side the first reflecting optics, be set to below the first reflecting optics it is first poly-
Jiao Jing, the second reflecting optics being set to above the first reflecting optics and the vision phase being set to above the second reflecting optics
Machine；
The light extraction light path of first reflecting optics and laser galvanometer is in 45 degree of angles, and first reflecting optics are to laser
Be totally reflected and transmit visible light, the laser that the laser galvanometer generates is after the total reflection of the first reflecting optics along the
The primary optical axis of one focus lamp is shot down；
The light shaft coaxle of the primary optical axis and vision camera of first focus lamp, first reflecting optics and the second reflection
Eyeglass is mutually in cross-distribution.
Preferably, it further includes the first eyeglass of the light extraction light path angle for adjusting the first reflecting optics and laser galvanometer
Seat, first reflecting optics are set on the first eyeglass seat.
Preferably, it further includes the second eyeglass of the primary optical axis angle for adjusting the second reflecting optics and the first focus lamp
Seat, second reflecting optics are set on the second eyeglass seat.
Preferably, it further includes the second focus lamp being set between vision camera and the second reflecting optics, and described second
The primary optical axis of focus lamp and the primary optical axis of the first focus lamp are coaxial
Preferably, it further includes the secondary light source for being set to laser galvanometer opposite side, and second reflecting optics are to auxiliary
The light of light source be totally reflected and transmitted to visible light, and the light of the secondary light source is totally reflected through the second reflecting optics
It penetrates the first speculum successively afterwards and the first focus lamp is shot down.
Preferably, it further includes the optical bench being adjusted for the irradiating angle to secondary light source, the secondary light source
End sleeve be set in optical bench.
As the above scheme is adopted, the present invention using the first reflecting optics by after the laser total reflection of laser galvanometer with regard
Feel the Image Acquisition light path coaxial where camera, eliminates the sighting distance error between laser optical path and Image Acquisition light path；Profit simultaneously
With the light refraction offset in the second reflecting optics with the light refraction offset in the first reflecting optics on the contrary, to positioning
The position deviation of light compensates, and eliminates position error.In addition, using on vision camera intelligent capture workpiece to be crossed
The location information of anchor point, and location information is automatically corrected by mating software.It is simple in structure tight based on this
It gathers, higher and higher precision, highdensity manufacturing demand can be met, there is very strong practical value and market popularization value.
Description of the drawings
Fig. 1 is the structural schematic diagram of the embodiment of the present invention；
Fig. 2 is the side view of the embodiment of the present invention；
Fig. 3 is the cross section structure schematic diagram of Fig. 2.
Specific implementation mode
The embodiment of the present invention is described in detail below in conjunction with attached drawing, but the present invention can be defined by the claims
Implement with the multitude of different ways of covering.
As shown in Figure 1 to Figure 3, a kind of coaxial vision provided in an embodiment of the present invention positions laser scribing processing head, it is wrapped
One is included for generating the first reflecting optics 2 of the laser galvanometer 1 of laser, the light extraction light path side for being set to laser galvanometer 1, being set to
First focus lamp 3 of 2 lower section of the first reflecting optics, the second reflecting optics 4 for being set to 2 top of the first reflecting optics and setting
Vision camera 5 above the second reflecting optics 4；The light extraction light path of first reflecting optics 2 and laser galvanometer 1 is in 45 degree of angles,
And first reflecting optics 2 laser be totally reflected and transmitted to visible light, the laser that laser galvanometer 1 generates is anti-through first
It penetrates after eyeglass 2 is totally reflected and is shot down along the primary optical axis of the first focus lamp 3, and be focused into below the first focus lamp 3 superfine small
Hot spot, workpiece setting to be crossed is at the hot spot of laser；The primary optical axis and the optical axis of vision camera 5 of first focus lamp 3 are same
Axis, the first reflecting optics 2 and the second reflecting optics 4 are mutually in cross-distribution, and the first reflecting optics 2 and the second reflecting optics 4
Intersecting angle is within the scope of 90 ± 10 degree (i.e. between 80-100 degree).
Based on the setting of the above structure, the first reflecting optics 2 of this implementation are swashed using AOI laser lens using AOI
Light microscopic piece is totally reflected the laser of specific wavelength (such as in the laser that the common wavelength in laser scribing field is 532nm), but
The characteristics of visible light is transmitted, after the laser that laser galvanometer 1 generates is totally reflected with the image where vision camera 5
Light path is acquired (to be reflected successively through the first focus lamp 3, the first reflecting optics 2 and second upwards by workpiece to be crossed successively
The light path of vision camera 5 is reached after reflecting optics 4) coaxially, to eliminate the sighting distance between laser optical path and Image Acquisition light path
Error；Mutually it is in cross-distribution using the first reflecting optics 2 and the second reflecting optics 4 simultaneously in Image Acquisition light path, and
First reflecting optics 2 and 4 intersecting angle of the second reflecting optics (i.e. between 80-100 degree), make image adopt within the scope of 90 ± 10 degree
Collect light refraction offset of the luminous ray in light path in the second reflecting optics 4 to roll over the light in the first reflecting optics 2
Offset is penetrated on the contrary, to be compensated to the position deviation for positioning light, that is, utilizes the second reflecting optics 4 and the first reflecting optics
2 are coordinated, and position error caused by due to the refraction of the first reflecting optics 2 deviates is eliminated.In specific operation process, it can lead to
Cross angle (the i.e. key light of the second reflecting optics 4 and the first focus lamp 3 between the second reflecting optics 4 and the first reflecting optics 2
The angle of axis) it (is needed in practical application anti-according to selected second to adjust the refraction eccentric traveling distance of the second reflecting optics 4
The refractive index of eyeglass 4 and the first reflecting optics 2 is penetrated to be finely adjusted), to eliminate position error；In addition, using vision camera 5
The location information of anchor point on intelligent capture workpiece to be crossed, and automatic school is carried out to location information by mating software
Just.
Further, it is fixed for the ease of the angle to the first reflecting optics 2, the processing head of the present embodiment further includes
The first eyeglass seat 21 for adjusting the first reflecting optics 2 and the Laser output light path angle of laser galvanometer 1, the first reflecting optics
2 are set on the first eyeglass seat 21.The angle of first reflecting optics 2 can be adjusted by rotating the first eyeglass seat 21 as a result,
It saves and fixed.
Further, it is adjusted for the ease of the angle to the second reflecting optics 4, the processing head of the present embodiment further includes
The second eyeglass seat 41 for the primary optical axis angle for adjusting the second reflecting optics 4 and the first focus lamp 3, the second reflecting optics 4 are set
It is placed on the second eyeglass seat 41.The angle of second reflecting optics 4 can be finely adjusted by rotating the second eyeglass seat 41 as a result,.
In order to reduce the volume of processing head, expand the visual range of vision camera 5, the processing head of the present embodiment further includes setting
The second focus lamp 6 being placed between vision camera 5 and the second reflecting optics 4, and the primary optical axis of the second focus lamp 6 and first focuses
The primary optical axis of mirror 3 is coaxial.As a result, using the second focus lamp 6 to the light in the Image Acquisition light path where vision camera 5 into
Line focusing compared with using traditional camera lens, reduces the volume of equipment to expand the visual range of vision camera 5, with full
The higher and higher precision of foot, highdensity manufacturing demand.
In order to (when the dark of scribing position), ensure that vision camera 5 is adopted in the luminous intensity deficiency of environment
Collect the clarity of image, preferably, the processing head of the present embodiment further includes the auxiliary for being set to 1 opposite side of laser galvanometer
Light source 7 (i.e. laser galvanometer 1 is located at the left side of the second reflecting optics 4, and secondary light source 7 is located at the right side of the second reflecting optics 4), the
Two-mirror piece 4 to the light that secondary light source 7 is sent out be totally reflected and transmit visible light, the light of secondary light source 7
The first speculum 2 is penetrated after the total reflection of the second reflecting optics 4 successively and the first focus lamp 3 is shot down, and is irradiated in and is waited crossing
Workpiece on.Based on the above structure, AOI eyeglasses can be used in second speculum 4 of the present embodiment, using AOI eyeglasses to certain wave
The light of long secondary light source is totally reflected, while the characteristics of transmitted to visible light, the light that secondary light source 7 is sent out
It is totally reflected, to pass sequentially through the first speculum 2 and 3 direct irradiation of the first focus lamp on workpiece to be crossed, to draw
Line position carries out local lighting, improves the clarity of 5 acquired image of vision camera.Existing laser Machining head matches auxiliary
Light source is helped, 3 lower section of the first focus lamp is generally disposed at and position annular light source is arranged, the workpiece illumination for treating scribing line carries out big model
The illumination enclosed does not have specific aim, and with the variation for waiting for scribing position, light source illumination is easy to block, and does not have specific aim, and originally
The workpiece that the secondary light source 7 of embodiment can treat scribing line carries out pointedly local lighting, improves the fineness and essence of illumination
Exactness, while to further reduce the volume of processing head, architecture basics are provided, further to meet higher and higher precision, height
The manufacturing demand of density.
Further, in order to adjust the second reflecting optics 4 angle while, convenient for adjusting accordingly secondary light source 7
Light irradiating angle, the processing head of the present embodiment further includes the light tool being adjusted for the irradiating angle to secondary light source 7
Seat 71, the end sleeve of secondary light source 7 is set in optical bench 71.Preferably, can make optical bench 71 and processing head main body it
Between be set as shaft connection, thus can be convenient for adjust optical bench 71 angle, to change the light illumination angle of secondary light source 7
Degree.
The foregoing is merely the preferred embodiment of the present invention, are not intended to limit the scope of the invention, every utilization
Equivalent structure or equivalent flow shift made by description of the invention and accompanying drawing content is applied directly or indirectly in other correlations
Technical field, be included within the scope of the present invention.
Claims (6)
1. a kind of coaxial vision positions laser scribing processing head, it is characterised in that：It includes that the laser for being used to generate laser shakes
Mirror, be set to laser galvanometer light extraction light path side the first reflecting optics, be set to below the first reflecting optics first focus
Mirror, the second reflecting optics being set to above the first reflecting optics and the vision camera being set to above the second reflecting optics；
The light extraction light path of first reflecting optics and laser galvanometer is in 45 degree of angles, and first reflecting optics carry out laser
It is totally reflected and visible light is transmitted, the laser that the laser galvanometer generates is poly- along first after the total reflection of the first reflecting optics
The primary optical axis of burnt mirror is shot down；
The light shaft coaxle of the primary optical axis and vision camera of first focus lamp, first reflecting optics and the second reflecting optics
Mutually it is in cross-distribution.
2. a kind of coaxial vision as described in claim 1 positions laser scribing processing head, it is characterised in that：It further includes being used for
The first eyeglass seat of the first reflecting optics and the light extraction light path angle of laser galvanometer is adjusted, first reflecting optics are set to
On one eyeglass seat.
3. a kind of coaxial vision as claimed in claim 2 positions laser scribing processing head, it is characterised in that：It further includes being used for
The second eyeglass seat of the primary optical axis angle of the second reflecting optics and the first focus lamp is adjusted, second reflecting optics are set to
On two eyeglass seats.
4. a kind of coaxial vision as claimed in any one of claims 1-3 positions laser scribing processing head, it is characterised in that：It
Further include the second focus lamp being set between vision camera and the second reflecting optics, the primary optical axis of second focus lamp and
The primary optical axis of one focus lamp is coaxial.
5. a kind of coaxial vision as claimed in claim 4 positions laser scribing processing head, it is characterised in that：It further includes setting
Secondary light source in laser galvanometer opposite side, second reflecting optics carry out total reflection to the light of secondary light source and to visible
Light is transmitted, and the light of the secondary light source penetrates the first speculum and first after the total reflection of the second reflecting optics and gathers successively
Burnt mirror is shot down.
6. a kind of coaxial vision as claimed in claim 5 positions laser scribing processing head, it is characterised in that：It further includes being used for
To the optical bench that the irradiating angle of secondary light source is adjusted, the end sleeve of the secondary light source is set in optical bench.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810225357.8A CN108311793A (en) | 2018-03-19 | 2018-03-19 | A kind of coaxial vision positioning laser scribing processing head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810225357.8A CN108311793A (en) | 2018-03-19 | 2018-03-19 | A kind of coaxial vision positioning laser scribing processing head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108311793A true CN108311793A (en) | 2018-07-24 |
Family
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810225357.8A Pending CN108311793A (en) | 2018-03-19 | 2018-03-19 | A kind of coaxial vision positioning laser scribing processing head |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111421249A (en) * | 2020-05-09 | 2020-07-17 | 沈阳仪表科学研究院有限公司 | Coaxial visual laser output device for processing warped wafer |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100206854A1 (en) * | 2009-02-17 | 2010-08-19 | Panasonic Corporation | Laser soldering apparatus |
| CN101893751A (en) * | 2010-06-25 | 2010-11-24 | 深圳市大族激光科技股份有限公司 | Focusing lens group and laser processing applied optics system |
| CN103170733A (en) * | 2013-04-01 | 2013-06-26 | 深圳市木森科技有限公司 | Coaxial laser processing mechanism |
| CN203292701U (en) * | 2013-04-01 | 2013-11-20 | 深圳市木森科技有限公司 | Coaxial laser machining mechanism |
-
2018
- 2018-03-19 CN CN201810225357.8A patent/CN108311793A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100206854A1 (en) * | 2009-02-17 | 2010-08-19 | Panasonic Corporation | Laser soldering apparatus |
| CN101893751A (en) * | 2010-06-25 | 2010-11-24 | 深圳市大族激光科技股份有限公司 | Focusing lens group and laser processing applied optics system |
| CN103170733A (en) * | 2013-04-01 | 2013-06-26 | 深圳市木森科技有限公司 | Coaxial laser processing mechanism |
| CN203292701U (en) * | 2013-04-01 | 2013-11-20 | 深圳市木森科技有限公司 | Coaxial laser machining mechanism |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111421249A (en) * | 2020-05-09 | 2020-07-17 | 沈阳仪表科学研究院有限公司 | Coaxial visual laser output device for processing warped wafer |
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Application publication date: 20180724 |