CN108287220A - A kind of experimental provision measured for transparent substrates film surface and interface mechanical characteristic - Google Patents
A kind of experimental provision measured for transparent substrates film surface and interface mechanical characteristic Download PDFInfo
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- CN108287220A CN108287220A CN201810028503.8A CN201810028503A CN108287220A CN 108287220 A CN108287220 A CN 108287220A CN 201810028503 A CN201810028503 A CN 201810028503A CN 108287220 A CN108287220 A CN 108287220A
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- 239000000758 substrate Substances 0.000 title claims abstract description 25
- 238000012360 testing method Methods 0.000 claims abstract description 96
- 238000006073 displacement reaction Methods 0.000 claims abstract description 50
- 238000012545 processing Methods 0.000 claims abstract description 20
- 238000003860 storage Methods 0.000 claims abstract description 4
- 230000003287 optical effect Effects 0.000 claims abstract description 3
- 238000006243 chemical reaction Methods 0.000 claims description 21
- 239000000523 sample Substances 0.000 claims description 8
- 238000000418 atomic force spectrum Methods 0.000 claims description 7
- 239000000919 ceramic Substances 0.000 claims description 7
- 230000003321 amplification Effects 0.000 claims description 3
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 3
- 240000002853 Nelumbo nucifera Species 0.000 claims 1
- 235000006508 Nelumbo nucifera Nutrition 0.000 claims 1
- 235000006510 Nelumbo pentapetala Nutrition 0.000 claims 1
- 239000010408 film Substances 0.000 description 46
- 238000005259 measurement Methods 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- 238000011065 in-situ storage Methods 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012512 characterization method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000012625 in-situ measurement Methods 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000005477 standard model Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0096—Testing material properties on thin layers or coatings
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Abstract
A kind of experimental provision measured for transparent substrates film surface and interface mechanical characteristic,The horizontal addload unit for loading tested film being arranged on hollow type micro-displacement unit,Micro-cantilever test cell above horizontal addload unit,It is used to acquire the micro-interference test cell of image data positioned at the lower section of hollow type micro-displacement unit,Signal processing unit respectively with micro-cantilever test cell,Horizontal addload unit,Hollow type micro-displacement unit is connected with the signal input output end of micro-interference test cell,The test data of storage micro-cantilever test cell is demarcated and acquired for the coefficient of elasticity to micro-cantilever test cell,Controlled level loading unit applies load to tested film,The movement of control hollow type micro-displacement unit enables micro-interference test cell to select suitable unsticking region in optical imagery,And acquire the data of micro-interference test cell acquisition.The present invention can more precisely compute out the films such as interface energy release rate and substrate adhesion characteristics information.
Description
Technical field
The present invention relates to a kind of mechanical property testing devices.It being used for transparent substrates film surface and interface power more particularly to one kind
Learn the experimental provision of feature measurement.
Background technology
Mechanical characteristic such as adhesion characteristics between film and substrate itself and film and substrate directly affect sample
Characteristic and application.Theoretical and experimental study shows material property, preparation method and technique, the preparation process of film and substrate
In environment and condition, sample application conditions and situation etc. may all influence adhesion characteristics.And energy release rate is evaluation adherency
One of leading indicator of characteristic.It is quite ripe to the theoretical research of energy release rate, and laboratory facilities relatively lag behind.Current
Detection measured in a manner of approximate or is offline mostly with experimental provision, load detached with test make part unsticking conceal and very
Hardly possible measures, and the deformation of thin membrane generated in test is approximate with pressure head radius, and unsticking area is by emulation or calculates, and test data without
Method calibration etc., these defects cannot meet the requirement of film or ultrathin membrane adhesion characteristics accurate Characterization.Therefore for high-precision
Acquisition unsticking can with the unsticking area in unsticking region, so as to more precisely compute out the films such as interface energy release rate with
Substrate adhesion characteristics information, the present invention propose a kind of experimental provision suitable for the original position on-line testing of thin film mechanics characteristic.
Invention content
The technical problem to be solved by the invention is to provide a kind of energy high-precision acquisition unstickings in situ can be with unsticking region
Area, so as to more precisely compute out the films such as interface energy release rate and substrate adhesion characteristics information for transparent
The experimental provision that substrate film surface and interface mechanical characteristic measures,
The technical solution adopted in the present invention is：A kind of experiment measured for transparent substrates film surface and interface mechanical characteristic
Device, including hollow type micro-displacement unit, the water for loading tested film being arranged on the hollow type micro-displacement unit
Flat loading unit is located above the horizontal addload unit and is tested for carrying out the micro-cantilever of force curve test to being tested film
Unit, and positioned at the lower section of the hollow type micro-displacement unit be used for acquire tested film image data micro-interference survey
Try unit, be additionally provided with signal processing unit, the signal processing unit respectively with the micro-cantilever test cell, level
Loading unit, hollow type micro-displacement unit are connected with the signal input output end of micro-interference test cell, are respectively used to micro-
The test data of storage micro-cantilever test cell, controlled level are demarcated and acquired to the coefficient of elasticity of cantilever beam test cell
Loading unit applies load to tested film, and the movement of control hollow type micro-displacement unit enables micro-interference test cell to exist
Suitable unsticking region is selected in optical imagery, and acquires the data of micro-interference test cell acquisition.
The micro-cantilever test cell is coaxial arrangement with micro-interference test cell.
The signal processing unit is made of computer control section and slave computer control section, wherein the meter
Calculation machine control section includes computer, and the computer connects the micro-interference test cell by Ethernet, passes through
RS232 interface connects the Ultraprecise electric magnetic compensation balance for demarcating micro-cantilever test cell coefficient of elasticity, the calculating
Machine is sensed by USB interface connection for measuring the ccd image for the hot spot being radiated on the micro-cantilever test cell respectively
Device loads list for observing the camera of micro-cantilever beam probe movement in the micro-cantilever test cell, being used for controlled level
The side that member applies the high precision electro displacement controller of load to being tested film, and for controlling hollow type micro-displacement unit
The other side connection of the side of the hollow type micro-displacement unit controller moved horizontally, the high precision electro displacement controller is horizontal
The other side of loading unit, the hollow type micro-displacement unit controller connects hollow type micro-displacement unit；The slave computer
Control section includes FPGA control chip, and the FPGA control chip is connected by USB interface in computer control section
The drive output of computer, the FPGA control chip connects horizontal addload unit by controllor for step-by-step motor, described
The signal input part of FPGA control chip connects the level meter for detecting tested film levelness, the FPGA control chip
Signal input part is also respectively by the first A/D conversion modules and the connection of the 2nd A/D conversion modules for acquiring micro-cantilever test
The signal output end of the signal pretreatment unit of the cantilever beam deflection of unit, the FPGA control chip is turned by the 3rd A/D
Mold changing block is sequentially connected high-voltage amplifier and Z-direction piezo-ceramic micro displacement unit, and the Z-direction piezo-ceramic micro displacement unit is respectively set
Top in the bottom and micro-cantilever test cell of the tested film, it is single for driving tested film and micro-cantilever to test
Member moves up and down.
The signal input part of the FPGA control chip be also respectively connected with temperature sensor for detecting environment temperature and
Humidity sensor for detecting ambient humidity.
The signal pretreatment unit includes：Curvature signal for acquiring the micro-cantilever test cell
Four-quadrant photo detector, connect into the four-quadrant photo detector output end be used for the curvature signal that is acquired into
The I/V switching amplifiers of row conversion amplification, and the output end of the I/V switching amplifiers is connected to for being put to conversion
The first subtracter and the second subtracter that output signal after big is respectively processed, the output end connection of first subtracter
The output end of the input terminal of the first A/D conversion modules, second subtracter connects the 2nd A/D conversion modules.
A kind of experimental provision measured for transparent substrates film surface and interface mechanical characteristic of the present invention may be implemented micro- outstanding
The three-dimensional test of deformation of thin membrane when arm beam probe is pressed into, and realize the compensation that can be measured unsticking；It can be to being tested film sample
The load accurately controlled is realized, and using micro-cantilever and the box-like measuring system of micro-interference technology groups, to film table circle
Face mechanical characteristic carries out high-acruracy survey in situ.The present invention realizes unsticking energy and face while film function influence loaded
Long-pending in situ measurement, micro-cantilever calibration mode ensure that the reliability of force curve data, unsticking area can be measured directly and be obtained
, and then the measurement accuracy of film interface energy release rate is improved, it ensure that the actual effect and reliability of measurement data.This hair
It is bright in film preparation and characteristic present, the present invention can high-precision acquisitions unsticking in situ can with the area in unsticking region, thus
The films such as interface energy release rate and substrate adhesion characteristics information can be more precisely computed out, especially suitable for film and substrate
The evaluation of adhesion characteristics provides technical support for film preparation.
Description of the drawings
Fig. 1 is a kind of structural representation of the experimental provision measured for transparent substrates film surface and interface mechanical characteristic of the present invention
Figure；
Fig. 2 is the composition block diagram of signal processing unit in the present invention.
In figure
1：Hollow type micro-displacement unit 2：Horizontal addload unit
3：Micro-cantilever test cell 4：Signal processing unit
41：Computer control section 411：Computer
412：Ultraprecise electric magnetic compensation balance 413：Ccd image sensor
414：Camera 415：High precision electro displacement controller
416：Hollow type micro-displacement unit controller 42：Slave computer control section
421：FPGA control chip 422：Controllor for step-by-step motor
423：Temperature sensor 424：Humidity sensor
425：Level meter 426：First A/D conversion modules
427：2nd A/D conversion modules 428：Signal pretreatment unit
4281：Four phases limit photodetector 4282：I/V switching amplifiers
4283：First subtracter 4284：Second subtracter
429：3rd A/D conversion modules 4210：High-voltage amplifier
4211：Z-direction piezo-ceramic micro displacement unit 5：Micro-interference test cell
6：Tested film
Specific implementation mode
What transparent substrates film surface and interface mechanical characteristic measured is used for a kind of of the present invention with reference to example and attached drawing
Experimental provision is described in detail.
As shown in Figure 1, a kind of experimental provision measured for transparent substrates film surface and interface mechanical characteristic of the present invention, packet
Hollow type micro-displacement unit 1 is included, the level for loading tested film 6 being arranged on the hollow type micro-displacement unit 1 adds
Carrier unit 2 is located at 2 top of the horizontal addload unit and is tested for carrying out the micro-cantilever of force curve test to being tested film 6
Unit 3, and positioned at the lower section of the hollow type micro-displacement unit 1 be used to acquire tested film 6 image data it is micro- dry
Test cell 5 is related to, signal processing unit 4, the micro-cantilever test cell 3 and micro-interference test cell 5 are additionally provided with
For coaxial arrangement.The signal processing unit 4 respectively with the micro-cantilever test cell 3, horizontal addload unit 2, hollow
The displacement unit 1 that declines is connected with the signal input output end of micro-interference test cell 5, is respectively used to test micro-cantilever single
The test data of storage micro-cantilever test cell 3, controlled level loading unit 2 are demarcated and acquired to the coefficient of elasticity of member 3
Load is applied to tested film 6, the movement of control hollow type micro-displacement unit 1 enables micro-interference test cell 5 in optics
Suitable unsticking region is selected in image, and acquires the data of the acquisition of micro-interference test cell 5.
Wherein micro-cantilever test cell 3, which has, tests and two kinds of operating modes of calibration can be in test job pattern
Carry out the test of surface topography and force curve；In staking-out work pattern, micro-cantilever beam elasticity coefficient can be demarcated, be carried
The high confidence level of force curve experimental data.
With micro-interference test cell 5, using being coaxially disposed, micro-cantilever beam probe may be implemented in micro-cantilever test cell 3
The indentation three-dimensional test that tested film 6 deforms when being tested film 6, and realize the compensation that can be measured being tested 6 unsticking of film, it improves
Unsticking can measurement accuracy.
As shown in Fig. 2, the signal processing unit 4 is by 42 structure of computer control section 41 and slave computer control section
At wherein the computer control section 41 includes computer 411, the computer 411 connects institute by Ethernet
Micro-interference test cell 5 is stated, the superfinishing for demarcating 3 coefficient of elasticity of micro-cantilever test cell is connected by RS232 interface
Cipher telegram magnetic compensation balance 412, the computer 411 are radiated at the micro-cantilever by USB interface connection for measuring respectively
The ccd image sensor 413 of hot spot on beam test cell 3, for observing micro-cantilever in the micro-cantilever test cell 3
The camera 414 of probe movement, the high precision electro displacement control for applying load to being tested film 6 for controlled level loading unit 2
The side of device 415 processed, and the hollow type micro-displacement unit controller moved horizontally for controlling hollow type micro-displacement unit 1
416 side, the other side connection horizontal addload unit 2 of the high precision electro displacement controller 415, the hollow type micro-displacement
The other side connection hollow type micro-displacement unit 1 of cell controller 416；The slave computer control section 42 includes FPGA controls
Coremaking piece 421, the FPGA control chip 421 connect the computer 411 in computer control section 41, institute by USB interface
The drive output for stating FPGA control chip 421 connects horizontal addload unit 2, the FPGA by controllor for step-by-step motor 422
Level meter 425 of the signal input part connection of chip 421 for detecting 6 levelness of tested film is controlled, the FPGA controls core
The signal input part of piece 421 is also respectively by the first A/D conversion modules 426 and the connection of the 2nd A/D conversion modules 427 for acquiring
The signal pretreatment unit 428 of the cantilever beam deflection of micro-cantilever test cell 3, the signal of the FPGA control chip 421
Output end is sequentially connected high-voltage amplifier 4210 and Z-direction piezo-ceramic micro displacement unit 4211 by the 3rd A/D conversion modules 429,
The Z-direction piezo-ceramic micro displacement unit 4211 is separately positioned on bottom and the micro-cantilever test cell 3 of the tested film 6
Top, for driving moving up and down for tested film 6 and micro-cantilever test cell 3.
The signal input part of the FPGA control chip 421 is also respectively connected with the temperature sensor for detecting environment temperature
423 and the humidity sensor 424 for detecting ambient humidity.
The signal pretreatment unit 428 includes：Curvature for acquiring the micro-cantilever test cell 3 is believed
Number four-quadrant photo detector 4281, the output end for connecting into the four-quadrant photo detector 4281 is used for being acquired
Curvature signal carries out the I/V switching amplifiers 4282 of conversion amplification, and is connected to the I/V switching amplifiers 4282
Output end the first subtracter 4283 and the second subtracter that are used to be respectively processed to converting amplified output signal
4284, the output end of first subtracter 4283 connects the input terminal of the first A/D conversion modules 426, and described second subtracts
The output end of musical instruments used in a Buddhist or Taoist mass 4284 connects the 2nd A/D conversion modules 427.
In a kind of experimental provision measured for transparent substrates film surface and interface mechanical characteristic of the present invention, described is hollow
The displacement unit that declines uses the device of model P-733.3CD or P-733.2CD；The horizontal addload unit uses model
The device of N-216.1A1；The micro-cantilever test cell uses the device of model OpenSys；The micro-interference
Test cell uses the device of model MMA；The Ultraprecise electric magnetic compensation balance uses the device of model SE2；It is described
High precision electro displacement controller use model E-712.1AM device.
A kind of realization step of experimental provision measured for transparent substrates film surface and interface mechanical characteristic of the present invention is：
(1) micro-cantilever beam elasticity coefficient is demarcated, Ultraprecise electric magnetic compensation balance is specially gone into micro-cantilever test
Below unit, the coefficient of elasticity of micro-cantilever test cell is demarcated, by signal processing unit acquisition, handles and stores bullet
Property coefficient nominal data.
(2) area coefficient that image is acquired to micro-interference test cell is demarcated, and specially places graphics standard model
Above micro-interference test cell, opens micro-interference test cell and standard pattern data is acquired, by signal processing
Unit carries out data calculation processing, obtains area coefficient, and store area coefficient nominal data.
(3) height coefficient of micro-interference test cell is demarcated, standard step, which is specially positioned over micro-interference, surveys
It tries above unit, opens micro-interference test cell to standard number of steps according to being acquired, data are carried out by signal processing unit
Calculation processing obtains height coefficient, and storing highly coefficient nominal data.
(4) horizontal addload unit is gone to below micro-cantilever test cell, is applied to having installed the tested film finished additional
Load is observed the unsticking situation of tested film with micro-interference test cell；Mobile hollow type micro-displacement unit, micro-
Suitable unsticking region is selected in interference testing unit.
(5) micro-cantilever test cell carries out force curve test, respectively selected unsticking region and non-unsticking region into
Row test, the difference for being acquired by signal processing unit, handling and calculating two region plastic work dones obtain interfacial detachment energy；It is micro- dry
Test cell acquisition deformation data is related to, by signal processing unit acquisition, handles and unsticking can be compensated.
(6) image data in micro-interference test cell acquisition unsticking region by signal processing unit acquisition, is handled and is obtained
Obtain unsticking region area；Final application energetics model calculates interfacial energy release rate.
Claims (5)
1. a kind of experimental provision measured for transparent substrates film surface and interface mechanical characteristic, including hollow type micro-displacement unit
(1), the horizontal addload unit (2) for loading tested film (6) being arranged on the hollow type micro-displacement unit (1), position
Micro-cantilever test cell above the horizontal addload unit (2) for carrying out force curve test to being tested film (6)
(3), and positioned at the lower section of the hollow type micro-displacement unit (1) it is used to acquire the micro- of the image data of tested film (6)
Interference testing unit (5), which is characterized in that be additionally provided with signal processing unit (4), the signal processing unit (4) respectively with
Micro-cantilever test cell (3), horizontal addload unit (2), hollow type micro-displacement unit (1) and the micro-interference test list
The signal input output end of first (5) is connected, and is respectively used to that the coefficient of elasticity of micro-cantilever test cell (3) is demarcated and adopted
The test data of collection storage micro-cantilever test cell (3), controlled level loading unit (2) apply load to tested film (6),
The movement of control hollow type micro-displacement unit (1) makes micro-interference test cell (5) that can be selected in optical imagery suitably
Unsticking region, and acquire the data of micro-interference test cell (5) acquisition.
2. a kind of experimental provision measured for transparent substrates film surface and interface mechanical characteristic according to claim 1,
It is characterized in that, the micro-cantilever test cell (3) is coaxial arrangement with micro-interference test cell (5).
3. a kind of experimental provision measured for transparent substrates film surface and interface mechanical characteristic according to claim 1,
It being characterized in that, the signal processing unit (4) is made of computer control section (41) and slave computer control section (42),
Wherein the computer control section (41) includes computer (411), and the computer (411) is connected by Ethernet
The micro-interference test cell (5) is connected by RS232 interface for demarcating micro-cantilever test cell (3) coefficient of elasticity
Ultraprecise electric magnetic compensation balance (412), the computer (411) respectively by USB interface connection for measure be radiated at
The ccd image sensor (413) of hot spot on the micro-cantilever test cell (3) is tested for observing the micro-cantilever
Micro-cantilever beam probe moves in unit (3) camera (414) applies tested film (6) for controlled level loading unit (2)
The side of the high precision electro displacement controller (415) of lotus is loaded, and is moved for controlling the horizontal of hollow type micro-displacement unit (1)
The side of dynamic hollow type micro-displacement unit controller (416), the other side connection of the high precision electro displacement controller (415)
The other side of horizontal addload unit (2), the hollow type micro-displacement unit controller (416) connects hollow type micro-displacement unit
(1)；The slave computer control section (42) includes FPGA control chip (421), and the FPGA control chip (421) passes through
USB interface connects the computer (411) in computer control section (41), the driving output of the FPGA control chip (421)
End connects horizontal addload unit (2), the signal input of the FPGA control chip (421) by controllor for step-by-step motor (422)
Level meter (425) of the end connection for detecting tested film (6) levelness, the signal input of the FPGA control chip (421)
End is also surveyed by the first A/D conversion modules (426) and the connection of the 2nd A/D conversion modules (427) for acquiring micro-cantilever respectively
Try the signal pretreatment unit (428) of the cantilever beam deflection of unit (3), the signal output of the FPGA control chip (421)
End is sequentially connected high-voltage amplifier (4210) and Z-direction piezo-ceramic micro displacement unit by the 3rd A/D conversion modules (429)
(4211), the Z-direction piezo-ceramic micro displacement unit (4211) is separately positioned on bottom and the micro-cantilever of the tested film (6)
The top of test cell (3), for driving moving up and down for tested film (6) and micro-cantilever test cell (3).
4. a kind of experimental provision measured for transparent substrates film surface and interface mechanical characteristic according to claim 3,
It is characterized in that, the signal input part of the FPGA control chip (421) is also respectively connected with the temperature for detecting environment temperature and passes
Sensor (423) and humidity sensor (424) for detecting ambient humidity.
5. a kind of experimental provision measured for transparent substrates film surface and interface mechanical characteristic according to claim 3,
It is characterized in that, the signal pretreatment unit (428) includes：For acquiring the curved of the micro-cantilever test cell (3)
The four-quadrant photo detector (4281) of curvature signal, the output end for connecting into the four-quadrant photo detector (4281) are used for
The I/V switching amplifiers (4282) of conversion amplification are carried out to the curvature signal acquired, and are connected to the I/V and are turned
Change the first subtracter that the output end of amplifier (4282) is used to be respectively processed to converting amplified output signal
(4283) and the second subtracter (4284), the output end of first subtracter (4283) connect the first A/D conversion modules
(426) output end of input terminal, second subtracter (4284) connects the 2nd A/D conversion modules (427).
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111368963A (en) * | 2020-03-13 | 2020-07-03 | 江南大学 | Film form control device based on visual shooting detection technology |
| CN112197862A (en) * | 2020-09-03 | 2021-01-08 | 中国人民解放军国防科技大学 | Ground test system and test method for surface sunlight pressure of thin film spacecraft |
| CN113074841A (en) * | 2021-03-29 | 2021-07-06 | 合肥工业大学 | FBG probe system-based deformation sensitivity measuring method and interface force calibration method |
| CN114623991A (en) * | 2022-03-08 | 2022-06-14 | 天津大学 | Shadow method based micro-cantilever calibration device and method |
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| CN112197862B (en) * | 2020-09-03 | 2023-02-28 | 中国人民解放军国防科技大学 | Ground test system and test method for surface sunlight pressure of thin film spacecraft |
| CN113074841A (en) * | 2021-03-29 | 2021-07-06 | 合肥工业大学 | FBG probe system-based deformation sensitivity measuring method and interface force calibration method |
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