CN201749088U - Detecting device for semiconductor silicon strain gage sensor - Google Patents
Detecting device for semiconductor silicon strain gage sensor Download PDFInfo
- Publication number
- CN201749088U CN201749088U CN2010201632561U CN201020163256U CN201749088U CN 201749088 U CN201749088 U CN 201749088U CN 2010201632561 U CN2010201632561 U CN 2010201632561U CN 201020163256 U CN201020163256 U CN 201020163256U CN 201749088 U CN201749088 U CN 201749088U
- Authority
- CN
- China
- Prior art keywords
- semiconductor silicon
- display
- data processor
- transducer
- silicon strain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
A detecting device for a semiconductor silicon strain gage sensor comprises a first digital lens, a second digital lens, a workbench, a first display, a second display and a data processor, wherein the first digital lens and the second digital lens are installed on the workbench and are respectively electrically connected with the data processor; and the first display and the second display are respectively electrically connected with the data processor. After adopting the above-mentioned technical scheme, the digital lens shoots the semiconductor silicon strain gauge sensor arranged on the workbench and sends the captured image to the data processor; the captured image is sent to the display after processed by the data processor; and an amplified image of the semiconductor silicon strain gauge sensor is displayed in the display. The data processor could identify and extract key technical characteristics of the amplified image in the display, compares with the extracted technical characteristics according to predetermined standard and performs qualified or unqualified determination.
Description
Technical field
The utility model belongs to the checkout equipment field, relates in particular to a kind of checkout equipment of semiconductor silicon strain-ga(u)ge transducer.
Background technology
The principle of work of semiconductor silicon foil gauge is when factor affecting foil gauges such as external environment condition is strong, light, temperature, humidity, can cause the variation of the resistance, inductance, electric capacity etc. of foil gauge, produce corresponding electricity output, thereby the variation of external environment condition is measured accurately.
In reality, using more widely, foil gauge mainly is to be made by pressure resistance type strain sensing material, be called as the semiconductor silicon strain-ga(u)ge transducer, its groundwork principle is: be pressed onto on diaphragm, elastic beam or the strain tube that is pasted with pressure resistance type strain sensing material by measuring pressure and make it to produce and be out of shape, the electric bridge of being made up of pressure resistance type strain sensing material has unbalance voltage output, this voltage with act on sensor on be directly proportional by measuring pressure, therefore, can reach by the variation of measuring output voltage by the accurate measurement of measuring pressure.In addition, in the time of advantages such as the semiconductor silicon strain-ga(u)ge transducer has the precision height, volume is little, in light weight, measurement range is wide, natural frequency is high, dynamic response is fast, also have vibration resistance, the good characteristics of shock resistance, be applicable to and measure hyperpressure, change or pressure, the acceleration of huge pulsation fast, be widely used in fields such as pressure-measuring instrument, automotive electronics, aeronautical product.Current, the manufacture method of semiconductor silicon strain-ga(u)ge transducer generally is to cut out foil gauge with mechanical means from stamper earlier, and the back is pasted foil gauge on the pressure film with bonding agent by the workman.In industry is used, the quality of semiconductor silicon strain-ga(u)ge transducer there is very strict requirement, mainly contain:
1, the foil gauge in the semiconductor silicon strain-ga(u)ge transducer can not have the scuffing that requires of being above standard, defective such as dirty;
2, the bonding agent that uses in the semiconductor silicon strain-ga(u)ge transducer can not have bubble or other flaws that influences quality that is above standard and requires;
3, the position of semiconductor silicon foil gauge on pressure film meets technical requirement.
Guarantee that the semiconductor silicon strain-ga(u)ge transducer reaches above-mentioned requirements, before dispatching from the factory, just must carry out strictness and detect, underproof product is removed away it.And traditional strain-ga(u)ge transducer detection method is a manual detection, relies on manually at microscopically defective product to be chosen; Because the collimation error and visual fatigue, the workman can often make a fault in testing process, and erroneous judgement omission phenomenon happens occasionally.
The utility model content
The purpose of this utility model is to provide a kind of checkout equipment of semiconductor silicon strain-ga(u)ge transducer, is intended to solve in the existing manual detection, because workman's collimation error and visual fatigue cause detecting the problem that fault phenomenon occurs frequently.
The utility model is to realize like this, a kind of checkout equipment of semiconductor silicon strain-ga(u)ge transducer, comprise that first a digital camera lens, that detects semiconductor silicon strain-ga(u)ge transducer outward appearance detects the second digital camera lens, worktable, first display, second display and the data processor of foil gauge position on the semiconductor silicon strain-ga(u)ge transducer, wherein, the described first digital camera lens and the second digital camera lens all are installed on the worktable and respectively and are electrically connected with data processor, and described first display and second display are electrically connected with data processor respectively.
Wherein, described checkout equipment also comprises a detection light source, and described detection light source is installed on the worktable.
Wherein, described worktable comprises a base station and the monitor station that is used to place semiconductor silicon strain-ga(u)ge transducer to be detected.Described monitor station is movably installed on the base station.
Wherein, described data processor is a computer, and described first display and second display are LCD.
After adopting above technical scheme, described digital camera lens can be taken and photographic images is transferred to data processor being positioned over semiconductor silicon strain-ga(u)ge transducer on the worktable, photographic images is transferred to display after data processor processes, the enlarged image of semiconductor silicon strain-ga(u)ge transducer in just demonstrating in display.Described data processor can also be discerned the enlarged image in the display and extract crucial technical characterictic, compares and make qualified/underproof judgement according to the technical characterictic of predefined standard and extraction.Therefore, behind the checkout equipment that use the utility model provides, no longer need the workman to detect, avoided effectively because workman's collimation error and visual fatigue cause detecting the generation of fault phenomenon.
In addition, the checkout equipment that the utility model provides is equipped with two digital camera lenses, whether digital camera lens is used to detect semiconductor silicon strain-ga(u)ge transducer outward appearance qualified, and another digital camera lens is used to detect whether conformance with standard of the position of foil gauge on pressure film.Be provided with two digital camera lens can once comprehensively be detected the semiconductor silicon strain-ga(u)ge transducer, avoided the semiconductor silicon strain-ga(u)ge transducer is carried out twice or repeated detection, saved detection time, improved detection efficiency, reduced the detection cost.
Description of drawings
Fig. 1 is the synoptic diagram of the checkout equipment of a kind of semiconductor silicon strain-ga(u)ge transducer of providing of the utility model embodiment.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearer,, the utility model is further elaborated below in conjunction with drawings and Examples.Should be appreciated that specific embodiment described herein only in order to explanation the utility model, and be not used in qualification the utility model.
See also Fig. 1, the utility model provides a kind of checkout equipment of semiconductor silicon strain-ga(u)ge transducer, comprises first digital camera lens 2, the second digital camera lens 3, first display 21, second display 31, data processor 4 and worktable 1; Described first digital camera lens 2, the second digital camera lens 3 is installed on the worktable 1, described worktable 1 is provided with a base station 11, on described base station 11, be provided with a monitor station 12, described monitor station 12 flexibly connects with base station, and it can move in the X-axis and the Y direction of base station 11 under the driving of motor (not shown).
See also Fig. 1, the main effect of the described first digital camera lens 2 is that the outward appearance to the semiconductor silicon strain-ga(u)ge transducer detects, specifically, be whether the bonding agent that the foil gauge in the semiconductor silicon strain-ga(u)ge transducer has or not scuffing, defective such as dirty and semiconductor silicon strain-ga(u)ge transducer to use to be had defective such as bubble detect, therefore its enlargement ratio is higher, to obtain an enlarged image clearly.
The main effect of the described second digital camera lens 3 is that whether conformance with standard detects for relative position to foil gauge and pressure film on the semiconductor silicon strain-ga(u)ge transducer, specifically, be whether the position of foil gauge on pressure film is offset, whether smooth foil gauge placed project such as and detected, therefore its enlargement ratio is lower than the first digital camera lens, to obtain a contour images clearly.
See also body 1, also be provided with a light source (not shown) on the described worktable 1, described light source can send the light 13 of different colours.When semiconductor silicon strain-ga(u)ge transducer to be detected carries out complete detection on the first digital camera lens 2 and 3 pairs of monitor stations 12 of the second digital camera lens, described light source just sends the light 13 of different colours according to the different test items of strain-ga(u)ge transducer, to cooperate the first digital camera lens 2 and the second digital camera lens 3 to obtain complete distinct image, finish detection smoothly.
See also Fig. 1, the described first digital camera lens 2 is electrically connected with data processor 4, and described first display 21 is electrically connected with data processor 4; The described first digital camera lens 2, data processor 4 and first display 21 are formed the vision system of an inspection semiconductor silicon strain-ga(u)ge transducer outward appearance.Equally, the second digital camera lens 3 is electrically connected with data processor 4, and described second display 31 is electrically connected with data processor 4; The described second digital camera lens 3, data processor 4 and second display 31 are formed a vision system that detects foil gauge position on the semiconductor silicon strain-ga(u)ge transducer.
Semiconductor silicon strain-ga(u)ge transducer to be detected is positioned on the monitor station 12, data processor 4 drive the first digital camera lenses 2 and the second digital camera lens 3 along the Z direction move with adjust itself and semiconductor silicon strain-ga(u)ge transducer between focal length.After detecting beginning, the described first digital camera lens 2 and the second digital camera lens 3 detect item by item according to the instruction of data processor 4 index every to be checked to the semiconductor silicon strain-ga(u)ge transducer, and the light that described light source also sends respective color according to the instruction of data processor 4 cooperates the detection of digital camera lens.
Specifically, the described first digital camera lens 2 is transferred to demonstration in first display 21 with the photo of its semiconductor silicon strain-ga(u)ge transducer that photographs after data processor 4 is handled, demonstrate the enlarged image of semiconductor silicon strain-ga(u)ge transducer in first display 21, crucial technical characterictic is discerned and extracted to described data processor 4 with the enlarged image in first display 21, the technical characterictic of predefined standard feature and extraction compares in the data-driven processor 4, when the technical characterictic that extracts meets in the data processor 4 predefined standard, data processor 4 is made qualified judgement, proceeds the next link that detects; When the technical characterictic that extracts did not meet in the data processor 4 predefined standard, data processor 4 was made underproof judgement, ends to detect and also sends prompting; After the staff removed underproof product according to prompting, data processor 4 recovered to detect.
Similar with the first digital camera lens 2, the described second digital camera lens 3 is transferred to demonstration in second display 31 with the image of its semiconductor silicon strain-ga(u)ge transducer that photographs after data processor 4 is handled, demonstrate the overall profile image of semiconductor silicon strain-ga(u)ge transducer in second display 31, crucial technical characterictic is discerned and extracted to described data processor 4 with the overall profile in second display 31, detecting the position of foil gauge. predefined standard is judged with the position that detects foil gauge in the data-driven processor 4, when the position that detects foil gauge meets in the data processor 4 predefined standard, data processor 4 is made qualified judgement, proceeds the next link that detects; When the position that detects foil gauge did not meet in the data processor 4 predefined standard, data processor 4 was made underproof judgement, ended to detect and also sent prompting; After the staff removed underproof product according to prompting, data processor 4 recovered to detect.
Above-mentioned first display 21 and second display 31 are LCD, described data processor 4 is a computer, the described first digital camera lens 2 and the second digital camera lens 3 are the digital camera lens of industrial high precision, and the working procedure in the described data processor 4 can be write according to actual needs.Because above-mentioned part, instrument and working procedure are prior art, they maybe can be bought by market, or can be write according to actual needs by those of ordinary skill, are not the contents that the utility model is laid special stress on protecting, and therefore do not elaborate at this.
See also Fig. 1, the utility model can once detect a plurality of semiconductor silicon strain-ga(u)ge transducers.Specifically, the semiconductor silicon strain-ga(u)ge transducer is put into the anchor clamps (not shown), described semiconductor silicon strain-ga(u)ge transducer is square formation and places in anchor clamps.Anchor clamps are put on the monitor station 12, and checkout equipment detects one of them semiconductor silicon strain-ga(u)ge transducer; After detection finished, data processor 4 instruction motor-driven monitor station 12 moved along X-axis, and checkout equipment detects adjacent semiconductor silicon strain-ga(u)ge transducer.After the detection of finishing row's semiconductor silicon strain-ga(u)ge transducer, data processor 4 instruction motor-driven monitor stations 12 are moving along y-axis shift, and checkout equipment detects next row's semiconductor silicon strain-ga(u)ge transducer; Repeatable operation like this is till finishing the detection of the semiconductor silicon strain-ga(u)ge transducer on the whole anchor clamps.Behind the semiconductor silicon strain-ga(u)ge transducer that detects on complete the anchor clamps, data processor 4 sends the signal prompt workman and takes anchor clamps away.After the workman takes anchor clamps away, another anchor clamps are positioned on the monitor station 12, carry out the detection of next round.
The above only is preferred embodiment of the present utility model; not in order to restriction the utility model; all any modifications of within spirit of the present utility model and principle, being done, be equal to and replace and improvement etc., all should be included within the protection domain of the present utility model.
Claims (4)
1. the checkout equipment of a semiconductor silicon strain-ga(u)ge transducer, it is characterized in that: comprise that first a digital camera lens, that detects semiconductor silicon strain-ga(u)ge transducer outward appearance detects the second digital camera lens, worktable, first display, second display and the data processor of foil gauge position on the semiconductor silicon strain-ga(u)ge transducer, wherein, the described first digital camera lens and the second digital camera lens all are installed on the worktable and respectively and are electrically connected with data processor, and described first display and second display are electrically connected with data processor respectively.
2. the checkout equipment of a kind of semiconductor silicon strain-ga(u)ge transducer as claimed in claim 1 is characterized in that: described checkout equipment also comprises a detection light source, and described detection light source is installed on the worktable.
3. the checkout equipment of a kind of semiconductor silicon strain-ga(u)ge transducer as claimed in claim 1 is characterized in that: described worktable comprises a base station and is used to place the monitor station of semiconductor silicon strain-ga(u)ge transducer to be detected.Described monitor station is movably installed on the base station.
4. the checkout equipment of a kind of semiconductor silicon strain-ga(u)ge transducer as claimed in claim 1 is characterized in that: described data processor is a computer, and described first display and second display are LCD.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201632561U CN201749088U (en) | 2010-04-13 | 2010-04-13 | Detecting device for semiconductor silicon strain gage sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201632561U CN201749088U (en) | 2010-04-13 | 2010-04-13 | Detecting device for semiconductor silicon strain gage sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201749088U true CN201749088U (en) | 2011-02-16 |
Family
ID=43583764
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010201632561U Expired - Lifetime CN201749088U (en) | 2010-04-13 | 2010-04-13 | Detecting device for semiconductor silicon strain gage sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201749088U (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102589431A (en) * | 2012-02-07 | 2012-07-18 | 中国地震局地质研究所 | Automatic detection method for accurate positions and directions of multiple strain foils |
| CN102928434A (en) * | 2012-08-23 | 2013-02-13 | 深圳市纳研科技有限公司 | Method and apparatus for array graphic detection |
| CN103293167A (en) * | 2013-06-08 | 2013-09-11 | 湖南竟宁科技有限公司 | Automatic detection method and system of copper grains in foam nickel |
| CN104198386A (en) * | 2014-09-11 | 2014-12-10 | 上海功源电子科技有限公司 | Method and device for displaying and acquiring multi-camera images based on dual displays |
| CN104535584A (en) * | 2014-12-30 | 2015-04-22 | 天津市日津科技有限公司 | Vision detection method |
| CN106123779A (en) * | 2016-08-31 | 2016-11-16 | 深圳职业技术学院 | One quickly detects equipment |
| CN107644417A (en) * | 2017-09-22 | 2018-01-30 | 西北工业大学 | Foil gauge outward appearance defect detection method |
| CN110726730A (en) * | 2019-11-05 | 2020-01-24 | 韩向东 | Self-adaptive transmission detection device |
| CN112325763A (en) * | 2020-09-27 | 2021-02-05 | 中车唐山机车车辆有限公司 | Inspection device and inspection method for detecting mounting quality of mounted strain gauge |
-
2010
- 2010-04-13 CN CN2010201632561U patent/CN201749088U/en not_active Expired - Lifetime
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102589431A (en) * | 2012-02-07 | 2012-07-18 | 中国地震局地质研究所 | Automatic detection method for accurate positions and directions of multiple strain foils |
| CN102589431B (en) * | 2012-02-07 | 2014-01-15 | 中国地震局地质研究所 | Automatic detection method for accurate positions and directions of multiple strain foils |
| CN102928434A (en) * | 2012-08-23 | 2013-02-13 | 深圳市纳研科技有限公司 | Method and apparatus for array graphic detection |
| CN103293167A (en) * | 2013-06-08 | 2013-09-11 | 湖南竟宁科技有限公司 | Automatic detection method and system of copper grains in foam nickel |
| CN104198386A (en) * | 2014-09-11 | 2014-12-10 | 上海功源电子科技有限公司 | Method and device for displaying and acquiring multi-camera images based on dual displays |
| CN104535584A (en) * | 2014-12-30 | 2015-04-22 | 天津市日津科技有限公司 | Vision detection method |
| CN106123779A (en) * | 2016-08-31 | 2016-11-16 | 深圳职业技术学院 | One quickly detects equipment |
| CN107644417A (en) * | 2017-09-22 | 2018-01-30 | 西北工业大学 | Foil gauge outward appearance defect detection method |
| CN110726730A (en) * | 2019-11-05 | 2020-01-24 | 韩向东 | Self-adaptive transmission detection device |
| CN110726730B (en) * | 2019-11-05 | 2022-12-06 | 黑龙江瑞兴科技股份有限公司 | Self-adaptive transmission detection device |
| CN112325763A (en) * | 2020-09-27 | 2021-02-05 | 中车唐山机车车辆有限公司 | Inspection device and inspection method for detecting mounting quality of mounted strain gauge |
| CN112325763B (en) * | 2020-09-27 | 2022-02-01 | 中车唐山机车车辆有限公司 | Inspection device and inspection method for detecting mounting quality of mounted strain gauge |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN201749088U (en) | Detecting device for semiconductor silicon strain gage sensor | |
| CN207688816U (en) | A kind of thickness detection apparatus of soft-package battery | |
| CN102478385B (en) | Probe card detection method and system | |
| CN102486365B (en) | Air gauge and working method thereof | |
| CN103673971A (en) | Backlight source flatness detecting jig and backlight source flatness detecting method | |
| CN102840833A (en) | Method and device for measuring thickness of wafer | |
| CN201247031Y (en) | End-face annular and trapezoid slots detection measuring tool | |
| CN112325763B (en) | Inspection device and inspection method for detecting mounting quality of mounted strain gauge | |
| CN202661035U (en) | Valve body diameter measuring device | |
| CN102636100B (en) | A kind of warpage of label paper measuring method and application thereof | |
| US20080127713A1 (en) | Method and apparatus for distortion measurement imaging | |
| CN215865154U (en) | Quick detection device of external diameter | |
| CN203824505U (en) | Testing fixture used for detecting workpiece planeness | |
| CN2835989Y (en) | Device for checking cupping testing machine | |
| CN205317153U (en) | Be fit for detection mechanism that spare part used | |
| CN107084698B (en) | Rail vehicle wheel detection system and detection method | |
| CN204115708U (en) | Flatness checking device | |
| CN110890043B (en) | Cross line defect detection method and system, array substrate and display panel | |
| CN107144295A (en) | A kind of device of the portable hydrostatic level calibration measured based on height gauge | |
| CN210268508U (en) | Advanced generation TFT glass A type frame detection device | |
| CN102607474A (en) | High-precision large-plane flatness detection method based on liquid-level method | |
| CN110542367A (en) | Method for simply, conveniently and rapidly detecting verticality of part profile | |
| CN206300585U (en) | One kind is for the measurement of deformation contactor contact travel and position regulator | |
| CN109373899A (en) | A kind of complex parts geometric dimension precision measurement system and method | |
| CN205561812U (en) | Power assisted steering oil pump blade straightness verifying attachment that hangs down |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20110216 |