CN108284107A - A kind of workpiece cleaning method - Google Patents
A kind of workpiece cleaning method Download PDFInfo
- Publication number
- CN108284107A CN108284107A CN201810103910.0A CN201810103910A CN108284107A CN 108284107 A CN108284107 A CN 108284107A CN 201810103910 A CN201810103910 A CN 201810103910A CN 108284107 A CN108284107 A CN 108284107A
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- China
- Prior art keywords
- plasma generator
- plasma
- gas
- workpiece
- cleaning method
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
Abstract
The present invention discloses a kind of workpiece cleaning method.This method includes：Working gas is passed through in the plasma generator, and the gas in plasma generator is extracted out, makes air pressure in the plasma generator within a preset range；Startup power supply makes to stay in the working gas electric discharge in plasma generator, generates plasma and cleaned to the workpiece to be cleaned；After preset time, it is passed through air into plasma generator, makes to restore normal pressure inside plasma generator.Workpiece cleaning method provided by the invention can be avoided generating waste water, be reduced environmental pollution.
Description
Technical field
The present invention relates to work pieces process fields, more particularly to a kind of workpiece cleaning method.
Background technology
Plating is a kind of process of surface treatment, and using electrolysis principle, one layer of metal or alloy coating is formed in workpiece surface
Process for treating surface, be referred to as electroplating technology.Plating can protect workpiece surface, decorated and be obtained certain particularity
Can, such as wearability, anticorrosion, dicoration, increase hardness.Plating is widely used in machinery, electronics, Aeronautics and Astronautics, military project etc.
Particularly significant status is occupied in many fields in China's manufacturing industry.According to incompletely statistics, existing electroplate factory of China about 1.5 at present
Wan Duojia, about 1,000,000 people of industry totality practitioner, annual value of production are more than 80,000,000,000 RMB.Electroplating industry is done for national economy
While going out tremendous contribution, due to using a large amount of poisonous and hazardous chemicals in process of production, generate a large amount of poisonous and harmful
Waste water, exhaust gas and waste residue, be one of three big contaminated industry of the world today, have high energy consumption, sewage discharge amount is big, pollutant is malicious
The features such as property is big.Under more next severe environmental protection pressure, electroplating enterprise wants survival and development, it is necessary to use and meet the new of clean manufacturing
Technique, new technology reduce pollution from source.
Before electroplating technology, need to clean workpiece.Workpiece cleaning method is as follows before traditional workpiece plating：Clearly
Washed journey needs oil removing, derusting, generally selects strong acid, highly basic and the water cleaning containing surfactant, generation during this
A large amount of waste water, it is difficult to handle, so as to cause environmental pollution.
Currently, some electroplate factories are before plating in terms of processing, using electrochemical degreasing, ultrasonic oil removal, aqueous cleaning agent,
The methods of oil is eliminated in microbial degradation.These methods can effectively carry out workpiece surface cleaning, but still make in these methods
Essentially, still belong to wet clean process although dosage is reduced with substances such as acid solution, lye, can not keep away
Exempt from the generation of waste water.
Invention content
The object of the present invention is to provide a kind of workpiece cleaning method, avoids generating waste water, reduce environmental pollution.
To achieve the above object, the present invention provides following schemes：
A kind of workpiece cleaning method, including：
Working gas is passed through in the plasma generator, and the gas in plasma generator is extracted out, is made
Air pressure in the plasma generator is within a preset range；
Startup power supply makes to stay in the working gas electric discharge in plasma generator, generates plasma and waits for clearly described
The workpiece washed is cleaned；Plasma power density is 0~100W/cm3；
After preset time, it is passed through air into plasma generator, makes to restore normal pressure inside plasma generator.
Optionally, described that working gas is passed through in the plasma generator, and will be in plasma generator
Gas is extracted out, and air pressure in the plasma generator is made to specifically include within a preset range：
The gas in the plasma generator is extracted out using mechanical pump, makes the gas in the plasma generator
Body pressure is within a preset range；
It is passed through working gas into the plasma generator, the pressure in the plasma generator is made to be restored to
Normal pressure；
It repeats two above step three times, then utilizes mechanical pump to take out the gas in the plasma generator again
Go out, continuing to be passed through the working gas makes gas pressure intensity in the plasma generator within a preset range.
Optionally, after the preset time, it is passed through air into plasma generator, makes in plasma generator
After normal pressure is restored in portion, further include：
Workpiece after cleaning is put into electroplating work procedure to be electroplated.
Optionally, the plasma generator be atmospheric plasma generator, vacuum plasma generator, etc. from
One kind in daughter differential of the arc generating means and plasma flare.
Optionally, the power supply is one in high frequency electric source, radio-frequency power supply, microwave power supply, the pulse power and DC power supply
Kind.
Optionally, the working gas is in air, argon gas, nitrogen, hydrogen, oxygen, carbon dioxide, vapor, methylamine
One or two.
Optionally, the workpiece includes metalwork, plastics, rubber and ceramics.
According to specific embodiment provided by the invention, the invention discloses following technique effects：Work provided by the present invention
Part cleaning method realizes the cleaning to workpiece using plasma generator, avoids generating waste water in cleaning process, reduces environment
Pollution.
Description of the drawings
It in order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, below will be to institute in embodiment
Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the present invention
Example, for those of ordinary skill in the art, without having to pay creative labor, can also be according to these attached drawings
Obtain other attached drawings.
Fig. 1 is the method flow diagram of workpiece cleaning method embodiment one of the present invention；
Fig. 2 is the method flow diagram of workpiece cleaning method embodiment two of the present invention；
Fig. 3 is the method flow diagram of workpiece cleaning method embodiment three of the present invention.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
The method disclosed in this invention cleaned to workpiece using plasma technique, belongs to dry method cleaning,
A large amount of water are not used in the process, and chemistry, physical reactions occur for greasy dirt of plasma and workpiece surface etc., and ultimately generating product is
Water and carbon dioxide can avoid the generation of waste water, reduce environmental pollution, meet national energy-saving environmental protection policy.
Plasma is independently of the substance grown form that another other than gas, liquid, solid state is widely present, and is referred to as
4th state of substance.Plasma is under given conditions, such as to take heating, extra electric field, laser irradiation, burning, impact
The means such as wave make gas partly or completely ionize and the non-coacervated system that generates.It is by neutral atom or molecule, excitation state
Atom or molecule, free radical, electronics or anion, cation and radiated photons composition.Positive and negative charge quantity phase in system
Deng whole system presentation electroneutral.
The state of plasma depends primarily on its constituent particle, particle density and particle temperature.According to plasma
Particle temperature, plasma can be divided into two major classes, i.e. thermal equilibrium plasma and non-equilibrium plasma.It is wherein electric
Sub- temperature and the equal plasma of ion temperature, referred to as thermal equilibrium plasma.When electron temperature is much larger than ion temperature,
Referred to as non-equilibrium plasma, electron temperature may be up to 10000K or more, and the temperature of the heavy particle of ion and atom etc
Degree but can be as low as 300~500K.Therefore by the temperature of its heavy particle, also referred to as low temperature plasma, generally in the low of 10KPa
It is formed under air pressure conditions.In gas discharge, due to external electric field action, free electron is made to accelerate, free electron passes through collision
Neutral atom and molecule are transferred energy to, reactant molecule excitation, dissociation and ionization are made, generates more secondary freely electricity
Son, the more neutral particles of ionization finally make gas become conducting medium and form electric current, but reaction system can keep low temperature again,
Even close to room temperature, therefore very extensive application is obtained.
Contain the high-energy such as various ions, free radical, photon, electronics, excited atom and molecule in low temperature plasma
Active particle, the energy exchanges such as plasma and electroplating parts surface and oil contaminant are mainly by particle (charged particle and neutral particle)
What collision and the thermal effect based on ultraviolet light were realized in electroplating parts surface, the process of these energy transfers is exactly table
Face greasy dirt is able to the basic reason removed.
It is an object of the invention to be cleaned to workpiece using plasma technique, to reduce environmental pollution.
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, below in conjunction with the accompanying drawings and specific real
Applying mode, the present invention is described in further detail.
Fig. 1 is the method flow diagram of workpiece cleaning method embodiment one of the present invention.
Referring to Fig. 1, the workpiece cleaning method, including：
Step 101：Working gas is passed through in the plasma generator, and by the gas in plasma generator
Extraction makes air pressure in the plasma generator within a preset range.The working gas is air, argon gas, nitrogen, hydrogen
One or both of gas, oxygen, carbon dioxide, vapor, methylamine.The plasma generator is sent out for atmospheric plasma
One kind in raw device, vacuum plasma generator, plasma micro-arc generating means and plasma flare.
The step 101 specifically includes：
The gas in the plasma generator is extracted out using mechanical pump, makes the gas in the plasma generator
Body pressure is within a preset range.
It is passed through working gas into the plasma generator, the pressure in the plasma generator is made to be restored to
Normal pressure.
It repeats two above step three times, then utilizes mechanical pump to take out the gas in the plasma generator again
Go out, makes gas pressure intensity in the plasma generator within a preset range.
Step 102：Startup power supply makes to stay in the working gas electric discharge in plasma generator, generates plasma pair
The workpiece to be cleaned is cleaned；Plasma power density is 20W/cm3.The power supply is high frequency electric source, radio frequency electrical
One kind in source, microwave power supply, the pulse power and DC power supply.The workpiece includes metalwork, plastics, rubber and ceramics.
Step 103：After preset time, it is passed through air into plasma generator, makes extensive inside plasma generator
Multiple normal pressure.
Step 104：Workpiece after cleaning is put into electroplating work procedure to be electroplated.
Fig. 2 is the method flow diagram of workpiece cleaning method embodiment two of the present invention.
Referring to Fig. 2, which includes：
Step 201：Plating metal copper piece to be cleaned is put into plasma generator.
Step 202：Start mechanical pump, extracts the air in the plasma generator cavity, make plasma
Gas pressure intensity in device cavity drops to 5Pa hereinafter, being then filled with working gas oxygen into plasma generator cavity, incites somebody to action
Gas in plasma generator cavity in triplicate, is finally extracted out, continues to be passed through oxygen by the step of inflation and pumping again,
Maintain the air pressure in plasma generator cavity in 5Pa or less.
Step 203：Start radio-frequency power supply, set of frequency 13.56MHz, power setting 500W make oxygen in plasma
Body generator electricity interpolar discharge, generate oxygen plasma, which includes the oxygen atom of high activity, electronics, excitation state oxygen molecule,
Ultraviolet light etc., plasma power density 60W/cm3.During electric discharge, oxygen plasma and the plating metal copper piece of generation
Physics, chemical reaction occur for the greasy dirt molecule on surface, final to generate carbon dioxide and water, are excluded from plasma generator.
Step 204：After the radio-frequency power supply discharges 600 seconds, stop electric discharge, to the plasma generator cavity
It is inside passed through air, it is normal pressure to make the air pressure in the plasma generator cavity.
Step 205：Plating metal copper piece after cleaning is taken out from plasma generator, into electroplating work procedure.
Fig. 3 is the method flow diagram of workpiece cleaning method embodiment three of the present invention.
Referring to Fig. 3, which includes：
Step 301：Plating metal copper piece to be cleaned is placed at plasma generator lance outlet 2cm.
Step 302：It is passed through air into plasma generator spray gun, maintains lance outlet air pressure in 1atm.
Step 303：Start high frequency electric source, setting frequency is 40kHz, power 2000W, and air is made to occur in plasma
The electric interpolar discharge of device generates oxygen plasma and nitrogen plasma, plasma power density 80W/cm3.Including
Oxygen atom, nitrogen-atoms, electronics, the oxygen molecule of excitation state, nitrogen molecular, ultraviolet light of high activity etc.；Under the action of air draught,
Plasma is sprayed from lance outlet, is formed flame plasma and is carried out clearly to the plating metal copper piece surface at lance outlet
It washes；To the greasy dirt molecule on plating metal copper piece surface physics, chemical reaction occur for the flame plasma of generation, finally generate two
Carbonoxide and water.
Step 304：It waits for after reaction, closing high frequency electric source, being passed through air into plasma generator spray gun, make
Air pressure in plasma generator spray gun is normal pressure.
Step 305：Plating metal copper piece after cleaning is put into electroplating technology and is electroplated.
The above embodiment of the present invention has the following technical effects：
(1) method disclosed by the invention cleaned to workpiece using plasma technique before electroplating technology, is belonged to
Dry-type cleaning method does not have the generation of spent acid, salkali waste and waste water in cleaning process, reduces the pollution of environment.
(2) using plasma cleaning device can reduce floor space, reduce workshop usable floor area, reduce enterprise and found the factory
Investment.
(3) plasma processing tools electricity consumption is few, and compared with conventional method, low energy consumption.
Each embodiment is described by the way of progressive in this specification, the highlights of each of the examples are with other
The difference of embodiment, just to refer each other for identical similar portion between each embodiment.
Principle and implementation of the present invention are described for specific case used herein, and above example is said
The bright method and its core concept for being merely used to help understand the present invention；Meanwhile for those of ordinary skill in the art, foundation
The thought of the present invention, there will be changes in the specific implementation manner and application range.In conclusion the content of the present specification is not
It is interpreted as limitation of the present invention.
Claims (7)
1. a kind of workpiece cleaning method, which is characterized in that including：
Working gas is passed through in the plasma generator, and the gas in plasma generator is extracted out, is made described
Air pressure in plasma generator is within a preset range；
Startup power supply makes to stay in the working gas electric discharge in plasma generator, generates plasma to described to be cleaned
Workpiece is cleaned；Plasma power density is 0~100W/cm3；
After preset time, it is passed through air into plasma generator, makes to restore normal pressure inside plasma generator.
2. a kind of workpiece cleaning method according to claim 1, which is characterized in that it is described working gas is passed through it is described etc.
In plasma generator, and the gas in plasma generator is extracted out, the air pressure in the plasma generator is made to exist
In preset range, specifically include：
The gas in the plasma generator is extracted out using mechanical pump, makes the gas pressure in the plasma generator
By force within a preset range；
It is passed through working gas into the plasma generator, the pressure in the plasma generator is made to be restored to often
Pressure；
It repeats two above step three times, then utilizes mechanical pump to extract the gas in the plasma generator out again,
Continuing to be passed through the working gas makes gas pressure intensity in the plasma generator within a preset range.
3. a kind of workpiece cleaning method according to claim 1, which is characterized in that after the preset time, Xiang Dengli
It is passed through air in daughter generator, makes after restoring normal pressure inside plasma generator, further includes：
Workpiece after cleaning is put into electroplating work procedure to be electroplated.
4. a kind of workpiece cleaning method according to claim 1 or 2, which is characterized in that the plasma generator is
In atmospheric plasma generator, vacuum plasma generator, plasma micro-arc generating means and plasma flare
It is a kind of.
5. a kind of workpiece cleaning method according to claim 1, which is characterized in that the power supply is high frequency electric source, radio frequency
One kind in power supply, microwave power supply, the pulse power and DC power supply.
6. a kind of workpiece cleaning method according to claim 1, which is characterized in that the working gas be air, argon gas,
One or both of nitrogen, hydrogen, oxygen, carbon dioxide, vapor, methylamine.
7. a kind of workpiece cleaning method according to claim 1, which is characterized in that the workpiece include metalwork, plastics,
Rubber and ceramics.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810103910.0A CN108284107A (en) | 2018-02-02 | 2018-02-02 | A kind of workpiece cleaning method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810103910.0A CN108284107A (en) | 2018-02-02 | 2018-02-02 | A kind of workpiece cleaning method |
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| Publication Number | Publication Date |
|---|---|
| CN108284107A true CN108284107A (en) | 2018-07-17 |
Family
ID=62836405
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810103910.0A Pending CN108284107A (en) | 2018-02-02 | 2018-02-02 | A kind of workpiece cleaning method |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109055702A (en) * | 2018-10-17 | 2018-12-21 | 含山县林头宝兴铸造厂 | A kind of lathe spindle with good impact flexibility |
| CN109671613A (en) * | 2018-11-29 | 2019-04-23 | 贵州振华风光半导体有限公司 | One kind being suitable for substrate circuit nitrogen-hydrogen mixing plasma cleaning method |
| CN109686650A (en) * | 2018-11-29 | 2019-04-26 | 贵州振华风光半导体有限公司 | One kind being suitable for integrated circuit metal shell nitrogen-hydrogen mixing plasma cleaning method |
| CN111658798A (en) * | 2020-06-15 | 2020-09-15 | 安徽静斯德科技有限公司 | Mask disinfection and sterilization method based on plasma |
| CN113426763A (en) * | 2021-06-15 | 2021-09-24 | 扬州国兴技术有限公司 | Device and method for cleaning rubber residues and scraps of drill point of printed circuit board |
| CN114405935A (en) * | 2022-02-22 | 2022-04-29 | 杨武保 | Environment-friendly metal surface rust and dirt removing cleaning method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105448659A (en) * | 2014-09-25 | 2016-03-30 | 中芯国际集成电路制造(上海)有限公司 | Method of improving cleaning efficiency |
| CN105903724A (en) * | 2016-06-22 | 2016-08-31 | 西北大学 | Surface discharge cleaning method and device in micro spaces |
| CN105928366A (en) * | 2016-05-10 | 2016-09-07 | 中国航空工业集团公司北京长城计量测试技术研究所 | Sealing device applicable to soaking cavity of high-temperature reproduction furnace |
| CN106053387A (en) * | 2016-06-29 | 2016-10-26 | 南京青辰光电科技有限公司 | Exhaled air detection method and device |
| CN106088697A (en) * | 2016-08-17 | 2016-11-09 | 泰安腾飞实业有限公司 | The dustless assembly shop of GIS cubicle switch and assembly method |
-
2018
- 2018-02-02 CN CN201810103910.0A patent/CN108284107A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105448659A (en) * | 2014-09-25 | 2016-03-30 | 中芯国际集成电路制造(上海)有限公司 | Method of improving cleaning efficiency |
| CN105928366A (en) * | 2016-05-10 | 2016-09-07 | 中国航空工业集团公司北京长城计量测试技术研究所 | Sealing device applicable to soaking cavity of high-temperature reproduction furnace |
| CN105903724A (en) * | 2016-06-22 | 2016-08-31 | 西北大学 | Surface discharge cleaning method and device in micro spaces |
| CN106053387A (en) * | 2016-06-29 | 2016-10-26 | 南京青辰光电科技有限公司 | Exhaled air detection method and device |
| CN106088697A (en) * | 2016-08-17 | 2016-11-09 | 泰安腾飞实业有限公司 | The dustless assembly shop of GIS cubicle switch and assembly method |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109055702A (en) * | 2018-10-17 | 2018-12-21 | 含山县林头宝兴铸造厂 | A kind of lathe spindle with good impact flexibility |
| CN109671613A (en) * | 2018-11-29 | 2019-04-23 | 贵州振华风光半导体有限公司 | One kind being suitable for substrate circuit nitrogen-hydrogen mixing plasma cleaning method |
| CN109686650A (en) * | 2018-11-29 | 2019-04-26 | 贵州振华风光半导体有限公司 | One kind being suitable for integrated circuit metal shell nitrogen-hydrogen mixing plasma cleaning method |
| CN111658798A (en) * | 2020-06-15 | 2020-09-15 | 安徽静斯德科技有限公司 | Mask disinfection and sterilization method based on plasma |
| CN113426763A (en) * | 2021-06-15 | 2021-09-24 | 扬州国兴技术有限公司 | Device and method for cleaning rubber residues and scraps of drill point of printed circuit board |
| CN114405935A (en) * | 2022-02-22 | 2022-04-29 | 杨武保 | Environment-friendly metal surface rust and dirt removing cleaning method |
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Application publication date: 20180717 |