JP2001327934A - Cleaning device and cleaning method - Google Patents
Cleaning device and cleaning methodInfo
- Publication number
- JP2001327934A JP2001327934A JP2000151252A JP2000151252A JP2001327934A JP 2001327934 A JP2001327934 A JP 2001327934A JP 2000151252 A JP2000151252 A JP 2000151252A JP 2000151252 A JP2000151252 A JP 2000151252A JP 2001327934 A JP2001327934 A JP 2001327934A
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- Prior art keywords
- water
- cleaning
- electrolyzed
- electrolytic
- alkaline water
- Prior art date
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- Cleaning By Liquid Or Steam (AREA)
- Water Treatment By Electricity Or Magnetism (AREA)
- Detergent Compositions (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、機械部品、電気部
品、自動車、建築物外壁、土木建造物表面等の洗浄に供
する、洗浄水による洗浄装置、および該洗浄水を用いた
洗浄方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning apparatus using cleaning water for cleaning machine parts, electric parts, automobiles, building exterior walls, civil engineering building surfaces, and the like, and a cleaning method using the cleaning water.
【０００２】[0002]
【従来の技術】従来の機械部品あるいは電機部品の機械
加工後のクリーン化処理において、表面に残留する機械
加工油などを除去するために、有機溶剤あるいはフロン
等のハロゲン化炭化水素を用いた洗浄が一般的な方法と
知られている。水溶性洗浄液としては界面活性剤、アル
カリ性添加物など、いわゆる洗剤である化学物質が用い
られている。自動車、建築物外壁、土木建造物の洗浄に
は、洗剤の使用に加えて、高圧に加圧された洗浄水によ
る方法が一般的である。2. Description of the Related Art In conventional clean processing after machining of mechanical parts or electric parts, in order to remove machining oil remaining on the surface, cleaning with an organic solvent or a halogenated hydrocarbon such as chlorofluorocarbon. Is known as a common method. As the water-soluble cleaning liquid, a chemical substance which is a so-called detergent such as a surfactant and an alkaline additive is used. For cleaning automobiles, building exterior walls, and civil engineering structures, in addition to the use of detergents, a method using washing water pressurized to high pressure is generally used.
【０００３】一方、水の電気分解により得られる電解ア
ルカリ水または電解酸性水は洗浄能力に優れ、特に電解
アルカリ水は金属表面に付着する油成分を洗浄除去する
作用が強く、有機溶剤またはハロゲン化炭化水素による
洗浄方法の代替、あるいは界面活性剤等の化学物質を含
む洗浄水溶液の代替方法として、例えば特開平１０−１
９２８６０号公報には、ｐＨが８．０以上１３．０以
下、および／または酸化還元電位が−１００mVから−１
０００mVであり、残留塩素濃度が５ppm 以下である電解
アルカリ水による洗浄方法と洗浄装置が開示されてい
る。On the other hand, electrolyzed alkaline water or electrolyzed acidic water obtained by electrolysis of water is excellent in cleaning ability. Particularly, electrolyzed alkaline water has a strong action of cleaning and removing oil components adhering to a metal surface, and is hardly used in organic solvents or halogenated organic solvents. As an alternative to the cleaning method using hydrocarbons or an alternative method to the cleaning aqueous solution containing a chemical substance such as a surfactant, see, for example, JP-A-10-1
No. 92860 discloses that the pH is not less than 8.0 and not more than 13.0 and / or the oxidation-reduction potential is from -100 mV to -1.
A cleaning method and a cleaning apparatus using electrolytic alkaline water having a residual chlorine concentration of 5,000 mV and a residual chlorine concentration of 5 ppm or less are disclosed.
【０００４】また特開平８−１１２５７３号公報には、
水素を含む電解アルカリ水による洗浄と、水の電気分解
で発生した水素と酸素を、別に設置した固体高分子燃料
電池により変換して得た過酸化水素による洗浄との併用
により、洗浄能力をさらに高める洗浄方法と洗浄装置が
開示されている。かかる技術において、電解アルカリ水
を得る電気化学反応と過酸化水素を得る電気化学反応
は、別の装置で独立のものとしている。Japanese Patent Application Laid-Open No. Hei 8-112573 discloses that
The cleaning performance is further improved by using a combination of cleaning with electrolytic alkaline water containing hydrogen and cleaning with hydrogen peroxide obtained by converting hydrogen and oxygen generated by the electrolysis of water with a separately installed solid polymer fuel cell. An enhanced cleaning method and apparatus are disclosed. In such a technique, the electrochemical reaction for obtaining electrolytic alkaline water and the electrochemical reaction for obtaining hydrogen peroxide are independent using separate apparatuses.
【０００５】過酸化水素を溶解したアルカリ水が洗浄能
力に優れることは公知であり、シリコンウエハの表面汚
染除去には、過酸化水素とアンモニア水の混合水溶液が
一般的に用いられている。また特開平９−２７６８１１
号公報には、過酸化水素濃度が０．１〜５％、水酸化ナ
トリウム水溶液で調整されたアルカリ洗浄液を用いる医
薬品、化粧品および食品の製造装置の洗浄方法、および
その装置が開示されている。かかる技術においては、化
学薬品から調製された過酸化水素と水酸化ナトリウムの
混合水溶液が使用されている。It is known that alkaline water in which hydrogen peroxide is dissolved has excellent cleaning ability, and a mixed aqueous solution of hydrogen peroxide and ammonia water is generally used for removing surface contamination of a silicon wafer. Also, Japanese Patent Application Laid-Open No. 9-276811
Japanese Patent Application Publication No. JP-A-2002-115139 discloses a method for cleaning pharmaceutical, cosmetic and food manufacturing equipment using an alkaline cleaning liquid having a hydrogen peroxide concentration of 0.1 to 5% and adjusted with an aqueous sodium hydroxide solution, and the apparatus. In this technique, a mixed aqueous solution of hydrogen peroxide and sodium hydroxide prepared from chemicals is used.
【０００６】水あるいは電解質水溶液の電気分解におい
て、酸素が共存する場合は、陰極では下記水素発生反応
（１）と酸素還元反応（２）および（３）が同時に起こ
る。ここで、反応（２）は酸素の４電子還元反応、およ
び反応（３）は酸素の２電子還元反応あるいは過酸化水
素の生成反応と呼ばれる。 反応（１） Ｈ2 Ｏ＋２ｅ＝Ｈ2 ＋２ＯＨ- 反応（２） Ｏ2 ＋２Ｈ2 Ｏ＋４ｅ＝４ＯＨ- 反応（３） Ｏ2 ＋２Ｈ2 Ｏ＋２ｅ＝Ｈ2 Ｏ2 ＋２ＯＨ- When oxygen coexists in the electrolysis of water or an aqueous electrolyte solution, the following hydrogen generation reaction (1) and oxygen reduction reactions (2) and (3) occur simultaneously at the cathode. Here, the reaction (2) is called a four-electron reduction reaction of oxygen, and the reaction (3) is called a two-electron reduction reaction of oxygen or a production reaction of hydrogen peroxide. Reaction (1) H 2 O + 2e = H 2 + 2OH - Reaction (2) O 2 + 2H 2 O + 4e = 4OH - Reaction (3) O 2 + 2H 2 O + 2e = H 2 O 2 + 2OH -
【０００７】反応（２）と反応（３）のいずれが優先す
るかは陰極材料の種類に依存し、炭素材料では反応
（３）の選択性が高く、過酸化水素の工業的製造法の一
つとして古くから知られている。例えば「紙パルプ技術
協会誌」第５２巻第５号６１６頁（１９９８年）には、
表面処理をしたグラファイト粒子を充填した陰極に水酸
化ナトリウム水溶液と酸素を導入し、過酸化水素濃度が
４％のアルカリ水を得るオンサイト型・アルカリ性過酸
化水素製造装置が紹介され、製紙工業における新しい漂
白剤として応用できる旨述べられている。かかる技術は
高濃度の過酸化水素を得ることが目的であり、水酸化ナ
トリウムは別途供給され、過酸化水素と同時に生成する
ものではない。[0007] Which of the reactions (2) and (3) takes precedence depends on the type of the cathode material. For carbon materials, the selectivity of the reaction (3) is high, and one of the industrial methods for producing hydrogen peroxide is one. It has been known since ancient times. For example, "Paper and Pulp Technology Association" Vol. 52, No. 5, page 616 (1998) states that
An on-site type alkaline hydrogen peroxide production system that introduces an aqueous solution of sodium hydroxide and oxygen into a cathode filled with surface-treated graphite particles to obtain alkaline water with a hydrogen peroxide concentration of 4% was introduced. It is stated that it can be used as a new bleaching agent. The purpose of such a technique is to obtain a high concentration of hydrogen peroxide, and sodium hydroxide is supplied separately and is not produced simultaneously with hydrogen peroxide.
【０００８】[0008]
【発明が解決しようとする課題】フロン、トリクロロエ
タンなどのハロゲン化炭化水素は、地球温暖化有機物と
して使用廃止が求められて以来、代替フロンによる対応
が進められているものの、この種の洗浄剤はオゾン層破
壊の係数を減少するのみであり、基本的には使用廃止が
望ましい。Although the use of halogenated hydrocarbons such as chlorofluorocarbons and trichloroethane has been abolished as global warming organic substances, the use of alternative chlorofluorocarbons has been promoted. It only reduces the coefficient of ozone depletion, and basically it is desirable to stop using it.
【０００９】ハロゲンを含まない有機溶剤を用いた洗浄
方法においては、地球環境への負荷は軽減されるもの
の、揮発性で引火性が高いことから、安全性の観点での
排気、脱臭など付帯設備が必要となる。一方、従来から
機械部品あるいは自動車洗浄に一般的に使用されている
界面活性剤を溶解した洗浄液の使用に関しては、河川と
海洋の汚染防止の観点から洗浄廃液処理が求められ、大
量に使用する場合の処理コスト負担は小さくない。In a cleaning method using an organic solvent containing no halogen, the load on the global environment is reduced, but since it is volatile and highly flammable, additional equipment such as exhaustion and deodorization from the viewpoint of safety is provided. Is required. On the other hand, with regard to the use of detergents dissolved in surfactants, which are conventionally used for washing mechanical parts or automobiles, treatment of washing waste liquid is required from the viewpoint of prevention of river and ocean pollution. The processing cost burden is not small.
【００１０】電解アルカリ水による洗浄方法は、ｐＨ１
２以下で使用するのが一般的であり、環境への負荷軽減
の貢献は大きい。しかし、電解アルカリ水の洗浄効果を
高めている溶解水素は、同じく洗浄効果を高める洗浄水
の加熱操作により容易に離脱し、水素あるいは酸化還元
電位が低いことの効果は、加熱電解アルカリ水洗浄では
期待できない。The washing method using electrolytic alkaline water has a pH of 1
It is generally used in two or less, and the contribution to reducing the burden on the environment is great. However, dissolved hydrogen, which enhances the cleaning effect of electrolytic alkaline water, is easily separated by the heating operation of the cleaning water, which also enhances the cleaning effect. Can't expect.
【００１１】本発明は、環境負荷の小さい電解アルカリ
水による、機械部品、電機部品、自動車、建築物外壁、
土木構造物表面等の広い用途の洗浄において、過酸化水
素を溶解する電解アルカリ水を単一の電解水生成器でも
って調整し、さらに得られた電解アルカリ水を加熱と加
圧して供給できる洗浄装置および洗浄方法を提供するこ
とを目的とする。[0011] The present invention provides a method for manufacturing mechanical parts, electric parts, automobiles, building exterior walls,
In cleaning of civil engineering structure surfaces, etc., a single electrolyzed water generator is used to adjust electrolytic alkaline water that dissolves hydrogen peroxide, and the resulting electrolytic alkaline water can be supplied by heating and pressurizing. It is an object to provide an apparatus and a cleaning method.
【００１２】[0012]
【課題を解決するための手段】上記の目的を達成するた
めに本発明の洗浄装置は、図１に示すように、水または
電解質水溶液を電気分解して電解アルカリ水を生成する
隔膜１４を有する電解水生成器１と、該電解水生成器１
へ水または電解質水溶液を供給する送水器３と、該電解
水生成器１へ空気あるいは酸素を供給する通気器２と、
得られた電解アルカリ水を貯蔵する貯水槽７と、得られ
た電解アルカリ水を加熱する加熱器４と、得られた電解
アルカリ水を加圧する加圧器５と、および得られた加熱
加圧された電解アルカリ水を洗浄対象物へ噴射するノズ
ル６とを具備することを特徴とする。In order to achieve the above-mentioned object, a cleaning apparatus according to the present invention has, as shown in FIG. 1, a diaphragm 14 for electrolyzing water or an aqueous electrolytic solution to produce electrolytic alkaline water. Electrolyzed water generator 1 and electrolyzed water generator 1
A water supply device 3 for supplying water or an aqueous electrolyte solution, a ventilator 2 for supplying air or oxygen to the electrolytic water generator 1,
A water storage tank 7 for storing the obtained electrolytic alkaline water, a heater 4 for heating the obtained electrolytic alkaline water, a pressurizer 5 for pressurizing the obtained electrolytic alkaline water, and a heating and pressurizing method. And a nozzle 6 for spraying the electrolytic alkaline water onto the object to be cleaned.
【００１３】また本発明の洗浄装置では、上記の隔膜１
４を有する電解水生成器１が、該隔膜１４を挟んで対向
して設置される陰極１２と陽極１３を有し、酸素を含む
水あるいは電解質水溶液を電気分解することにより、陰
極１２表面で起こる水素発生反応と酸素還元反応によっ
て、過酸化水素を溶解したｐＨ９以上，１２以下の電解
アルカリ水を生成するものであることを特徴とする。In the cleaning apparatus of the present invention, the above-described diaphragm 1
An electrolyzed water generator 1 having a cathode 4 and a cathode 13 which are provided to face each other with the diaphragm 14 interposed therebetween, and is generated on the surface of the cathode 12 by electrolyzing water containing oxygen or an aqueous electrolyte solution. It is characterized by producing electrolytic alkaline water having a pH of 9 or more and 12 or less in which hydrogen peroxide is dissolved by a hydrogen generation reaction and an oxygen reduction reaction.
【００１４】また、本発明の隔膜１４を有する電解水生
成器１に供給する水あるいは電解質水溶液の電気電導度
が、５０μＳ／cm以上，１０ｍＳ／cm以下であることを
特徴とする。Further, the electric conductivity of the water or the aqueous electrolyte solution supplied to the electrolyzed water generator 1 having the diaphragm 14 of the present invention is characterized in that it is not less than 50 μS / cm and not more than 10 mS / cm.
【００１５】また、上記隔膜１４を有する電解水生成器
１に供給される空気あるいは酸素が、通気器２から陰極
１２表面に直接に吹き込まれ、陰極１２表面で起こる水
素発生反応に対する酸素還元反応の比率が高められるこ
とを特徴とする。Air or oxygen supplied to the electrolyzed water generator 1 having the above-mentioned diaphragm 14 is blown directly from the ventilator 2 to the surface of the cathode 12, and an oxygen reduction reaction to a hydrogen generation reaction occurring on the surface of the cathode 12 is performed. The ratio is raised.
【００１６】また、本発明の電解水生成器１に用いられ
る陰極１２は、貴金属、ステンレス、ニッケルまたはチ
タンよりなることを特徴とする。Further, the cathode 12 used in the electrolyzed water generator 1 of the present invention is characterized by being made of a noble metal, stainless steel, nickel or titanium.
【００１７】また、本発明の電解水生成器１に用いられ
る陰極１２は、黒鉛と活性炭の焼結体よりなることを特
徴とする。The cathode 12 used in the electrolyzed water generator 1 of the present invention is characterized in that it is made of a sintered body of graphite and activated carbon.
【００１８】また、本発明の洗浄装置で得られる電解ア
ルカリ水に溶解する過酸化水素の濃度は、０．１ppm 以
上，１００ppm 以下であることを特徴とする。Further, the concentration of hydrogen peroxide dissolved in the electrolytic alkaline water obtained by the cleaning apparatus of the present invention is characterized in that it is 0.1 ppm or more and 100 ppm or less.
【００１９】また本発明は、電解水生成器１に供給する
電解質水溶液に含まれる電解質が、ナトリウムの塩化
物、炭酸塩、炭酸水素塩、りん酸塩、またはりん酸水素
塩であることを特徴とする洗浄装置である。Further, the present invention is characterized in that the electrolyte contained in the aqueous electrolyte solution supplied to the electrolyzed water generator 1 is sodium chloride, carbonate, hydrogen carbonate, phosphate or hydrogen phosphate. This is a cleaning device.
【００２０】さらに本発明は、水または電解質水溶液を
電気分解して電解アルカリ水を生成する隔膜１４を有す
る電解水生成器１と、該電解水生成器１へ水または電解
質水溶液を供給する送水器３と、該電解水生成器１へ空
気あるいは酸素ガスを供給する通気器２とから得られた
ｐＨが９以上１２以下、過酸化水素濃度が０．１ppm以
上１００ppm 以下の電解アルカリ水を、さらに、圧力が
２．５気圧以上５０気圧以下に加圧し、温度が３０℃以
上８０℃以下に加熱し、得られた加圧・加熱電解アルカ
リ水を被洗浄物にノズル６より噴射し、該被洗浄物表面
を洗浄することを特徴とする洗浄方法であり、本発明は
電解アルカリ水による洗浄後に浄水でリンスすることを
必要としない洗浄方法である。The present invention further provides an electrolyzed water generator 1 having a diaphragm 14 for electrolyzing water or an aqueous electrolyte solution to generate electrolyzed alkaline water, and a water supply device for supplying the electrolyzed water generator 1 with water or an aqueous electrolyte solution. 3 and an aerator 2 for supplying air or oxygen gas to the electrolyzed water generator 1, pH 9 or more and 12 or less, and hydrogen peroxide concentration of 0.1 to 100 ppm or less. The pressure is increased to 2.5 to 50 atm, the temperature is increased to 30 to 80 ° C, and the obtained pressurized and heated electrolytic alkaline water is jetted from the nozzle 6 onto the object to be cleaned. A cleaning method characterized by cleaning the surface of a cleaning object, and the present invention is a cleaning method that does not require rinsing with purified water after cleaning with electrolytic alkaline water.
【００２１】[0021]
【発明の実施の形態】以下に、本発明の洗浄装置と洗浄
方法を図面に基づいて詳細に説明する。図１は本発明の
洗浄装置の構成の略図を示したものであり、隔膜を有す
る電解水生成器１、電解水生成器１に空気あるいは酸素
を供給する通気器２、電解水生成器１ヘ水あるいは電解
質水溶液を供給する送水器３、得られた電解アルカリ水
を貯蔵する貯水槽７と、貯水槽に貯えられた電解アルカ
リ水を吸引して加熱する加熱器４、さらに得られた電解
アルカリ水を加圧する圧縮器５、および得られた加熱加
圧された電解アルカリ水を洗浄対象物へ噴射するノズル
６を具備している。DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a cleaning apparatus and a cleaning method according to the present invention will be described in detail with reference to the drawings. FIG. 1 is a schematic view of the structure of a cleaning apparatus according to the present invention, which includes an electrolytic water generator 1 having a diaphragm, a ventilator 2 for supplying air or oxygen to the electrolytic water generator 1, and an electrolytic water generator 1. A water supply device 3 for supplying water or an aqueous electrolyte solution; a water storage tank 7 for storing the obtained electrolytic alkaline water; a heater 4 for sucking and heating the electrolytic alkaline water stored in the water storage tank; The apparatus includes a compressor 5 for pressurizing water, and a nozzle 6 for injecting the obtained heated and pressurized electrolytic alkaline water to an object to be cleaned.
【００２２】電解水生成器１は、隔膜１４を挟んで陰極
１２と陽極１３が対向して配置され、両電極間に電源１
１から直流電流を印加して電気化学反応を行う装置であ
る。上記電解水生成器の隔膜１４で分離された陰極室１
５と陽極室１６には、送水器３の送水ポンプ３１と３２
から原水が送水され、さらに電解質注入ポンプ３３と３
４から用途に応じて電解質水溶液が連続的に送水され、
電解水生成器１ヘ導入される水溶液の伝導度が調整され
る。The electrolyzed water generator 1 has a cathode 12 and an anode 13 opposed to each other with a diaphragm 14 interposed therebetween.
This is an apparatus for performing an electrochemical reaction by applying a direct current from Step 1. Cathode chamber 1 separated by diaphragm 14 of the electrolyzed water generator
5 and the anode chamber 16 are provided with water pumps 31 and 32 of the water transmitter 3.
Raw water is supplied from the pump and the electrolyte injection pumps 33 and 3
The electrolyte aqueous solution is continuously fed from 4 depending on the application,
The conductivity of the aqueous solution introduced into the electrolyzed water generator 1 is adjusted.
【００２３】上記送水ポンプ３１と注入ポンプ３３から
陰極室１５へ送水される水あるいは電解質水溶液には、
通気器２から空気あるいは酸素ガスが微細気泡として供
給される。空気あるいは酸素ガスの気泡を陰極室１５の
下部から供給し、気泡が陰極１２表面と直接に接触する
ことが好ましい。The water or the electrolyte solution sent from the water pump 31 and the injection pump 33 to the cathode chamber 15 includes:
Air or oxygen gas is supplied from the aerator 2 as fine bubbles. It is preferable that air or oxygen gas bubbles are supplied from the lower part of the cathode chamber 15 and the bubbles come into direct contact with the surface of the cathode 12.
【００２４】次に、本発明の洗浄装置を構成する上記の
電解水生成器１における電気化学反応を詳細に説明す
る。電解水生成器１は、隔膜１４により陰極室１５と陽
極室１６が隔離されており、陰極１２と陽極１３の表面
で起こる電気化学反応生成物が、拡散により直接に混合
することを抑制した構成としている。Next, the electrochemical reaction in the electrolyzed water generator 1 constituting the cleaning apparatus of the present invention will be described in detail. In the electrolyzed water generator 1, the cathode chamber 15 and the anode chamber 16 are separated by the diaphragm 14, and the electrochemical reaction products generated on the surfaces of the cathode 12 and the anode 13 are suppressed from being directly mixed by diffusion. And
【００２５】陰極１２表面での電気化学反応は、下記反
応（１）で示す水分子の還元による水素発生反応、反応
（２〉で示す酸素の４電子還元反応、および反応（３）
で示す酸素の２電子還元反応である。 反応（１） Ｈ2 Ｏ＋２ｅ＝Ｈ2 ＋２ＯＨ- 反応（２） Ｏ2 ＋２Ｈ2 Ｏ十４ｅ＝４ＯＨ- 反応（３） Ｏ2 ＋２Ｈ2 Ｏ＋２ｅ＝Ｈ2 Ｏ2 ＋２ＯＨ- The electrochemical reaction on the surface of the cathode 12 includes a hydrogen generation reaction by reduction of water molecules shown in the following reaction (1), a four-electron reduction reaction of oxygen shown in the reaction (2), and a reaction (3)
Is a two-electron reduction reaction of oxygen. Reaction (1) H 2 O + 2e = H 2 + 2OH - Reaction (2) O 2 + 2H 2 O tens 4e = 4OH - Reaction (3) O 2 + 2H 2 O + 2e = H 2 O 2 + 2OH -
【００２６】いずれの反応においても水酸化物イオンＯ
Ｈ- が生成し、液のｐＨは上昇する。陰極室から得られ
る電解アルカリ水のｐＨは、印加する電流と溶液の流速
で調整することができ、環境負荷が小さく、かつ洗浄能
力が高いｐＨ９以上，１２以下であることを特徴とす
る。さらに、反応（３）による酸素の２電子還元反応に
より、陰極で生成する液は過酸化水素を含むことができ
る。すなわち、本発明の洗浄装置が具備する電解水生成
器１の陰極室１５から得られる電解アルカリ水は、脱脂
作用の強いｐＨ９以上，１２以下のアルカリ水であり、
かつ有機物を酸化してその除去作用の高い過酸化水索を
含むことを特徴とする。In any of the reactions, the hydroxide ion O
H - is produced, and the pH of the liquid increases. The pH of the electrolytic alkaline water obtained from the cathode chamber can be adjusted by the applied current and the flow rate of the solution, and is characterized in that the environmental load is small and the washing ability is high, that is, pH 9 or more and 12 or less. Further, the liquid generated at the cathode by the two-electron reduction reaction of oxygen by the reaction (3) can contain hydrogen peroxide. That is, the electrolytic alkaline water obtained from the cathode chamber 15 of the electrolytic water generator 1 provided in the cleaning device of the present invention is alkaline water having a strong degreasing action and having a pH of 9 or more and 12 or less,
Further, it is characterized in that it contains a water peroxide line having a high action of removing organic substances by oxidation.
【００２７】上記の電解アルカリ水が含む過酸化水素の
濃度を増大する第１の方法は、陰極１２に接触する酸素
量を増大し、反応（３）の反応量を増やすことである。
かかる酸素量の増大は、陰極室１５に供給される水ある
いは電解質液に含まれる溶解酸素量を増やすことであ
り、空気を気泡として供給することで溶解酸素量を約８
ppm 、高純度酸素ガスを気泡として供給することで溶解
酸素量を約２５ppm まで高めることができる。さらに過
酸化水素濃度を高めるには、空気あるいは酸素ガスの気
泡を陰極室１５へ吹き込み、陰極１２表面に気泡を直接
接触させ、気体状酸素を直接に還元することである。A first method for increasing the concentration of hydrogen peroxide contained in the above-mentioned electrolytic alkaline water is to increase the amount of oxygen in contact with the cathode 12 to increase the reaction amount of the reaction (3).
Such an increase in the amount of oxygen is to increase the amount of dissolved oxygen contained in the water or the electrolyte solution supplied to the cathode chamber 15, and the amount of dissolved oxygen is reduced by about 8 by supplying air as air bubbles.
The dissolved oxygen amount can be increased to about 25 ppm by supplying high-purity oxygen gas as air bubbles. In order to further increase the hydrogen peroxide concentration, air or oxygen gas bubbles are blown into the cathode chamber 15, the bubbles are brought into direct contact with the surface of the cathode 12, and gaseous oxygen is directly reduced.
【００２８】かかる空気あるいは酸素ガスの供給方法に
より、過酸化水素を含む電解アルカリ水を得ることがで
きる。なお、供給される空気は特に清浄である必要はな
く、外気を除塵するのみで十分であり、酸素ガスの供給
には、例えば吸脱着式の酸素製造器（ＰＳＡ）を用いる
ことでよい。By such a method of supplying air or oxygen gas, electrolytic alkaline water containing hydrogen peroxide can be obtained. It is to be noted that the supplied air does not need to be particularly clean, and it is sufficient to merely remove the outside air. For the supply of oxygen gas, for example, an adsorption / desorption type oxygen maker (PSA) may be used.
【００２９】電解アルカリ水が含む過酸化水素の濃度を
増大する第２の方法は、反応（２）に対する反応（３）
の選択性を高め、陰極１２に接触した酸素が反応（３）
により優先的に過酸化水素へ還元することである。反応
（３）のかかる選択性の向上は、陰極１２の材料を特定
することで達成できる。A second method for increasing the concentration of hydrogen peroxide contained in the electrolytic alkaline water is a reaction (3) with respect to the reaction (2).
Oxygen in contact with the cathode 12 reacts (3)
To preferentially reduce to hydrogen peroxide. Such improvement in the selectivity of the reaction (3) can be achieved by specifying the material of the cathode 12.
【００３０】電解アルカリ水生成器１の陰極１２に用い
られる電極材料には、弱アルカリ性水溶液で安定なステ
ンレス、ニッケル、チタン、貴金属、あるいは炭素材料
等の少なくとも一種が用いられる。上記の反応（３）の
選択性を高めるには、白金および金など貴金属微粒子と
チタンから成る多孔質電極を用いることで達成され、空
気あるいは酸素ガスの陰極１２表面への直接供給を併用
することにより、過酸化水素を数ppm 含む電解アルカリ
水を得ることができる。炭素あるいはグラファイト粉末
の多孔質焼結体を陰極材料とすることで、反応（３）を
反応（２）に対して優先的に進めることができ、過酸化
水素濃度をさらに増大して、１００ppm までの過酸化水
素を含む電解アルカリ水を容易に得ることができる。As the electrode material used for the cathode 12 of the electrolytic alkaline water generator 1, at least one of stainless steel, nickel, titanium, a noble metal, a carbon material, or the like, which is stable in a weak alkaline aqueous solution, is used. The selectivity of the above reaction (3) can be enhanced by using a porous electrode composed of fine particles of noble metal such as platinum and gold and titanium, and using a direct supply of air or oxygen gas to the surface of the cathode 12. As a result, electrolytic alkaline water containing several ppm of hydrogen peroxide can be obtained. By using a porous sintered body of carbon or graphite powder as a cathode material, the reaction (3) can proceed preferentially to the reaction (2), and the hydrogen peroxide concentration is further increased to 100 ppm. The electrolytic alkaline water containing hydrogen peroxide can be easily obtained.
【００３１】上記の様に、本発明の洗浄装置が具備する
電解水生成器１は、陰極室１５から得られる電解水のｐ
Ｈが９以上１２以下、かつ過酸化水素濃度が０．１ppm
以上１００ppm 以下である電解アルカリ水を供給するも
のである。As described above, the electrolyzed water generator 1 provided in the cleaning device of the present invention is provided with the p electrolyzed water obtained from the cathode chamber 15.
H is 9 or more and 12 or less, and the concentration of hydrogen peroxide is 0.1 ppm
It supplies electrolytic alkaline water of not less than 100 ppm or less.
【００３２】上記の反応（１），（２）および（３）の
陰極１２表面での反応、および下記反応（４）の陽極１
３表面での反応を、電源１１から印加される直流電流で
もって行わせるには、電極間の抵抗が小さいことが必要
である。電極間の抵抗を小さくする第１の方法は、電極
間の間隔を狭めることであり、その間隔はｌ０mm以下、
より好ましくは６mm以下である。 反応（４） ２Ｈ2 Ｏ＝Ｏ2 ＋４Ｈ+ ＋４ｅThe reactions (1), (2) and (3) on the surface of the cathode 12 and the following reactions (4) for the anode 1
In order for the reaction on the three surfaces to be performed by a direct current applied from the power supply 11, the resistance between the electrodes must be small. The first method of reducing the resistance between the electrodes is to reduce the distance between the electrodes, and the distance is 10 mm or less.
It is more preferably 6 mm or less. Reaction (4) 2H 2 O = O 2 + 4H + + 4e
【００３３】電極間の抵抗を小さくする第２の方法は、
溶液に電解質を加えてイオン伝導度を高めることであ
る。一方、得られた電解アルカリ水の洗浄能力を維持す
るためには、電解質濃度は小さいことが好ましい。また
本発明の洗浄装置が、環境負荷の小さい洗浄水を供給す
ること、浄水による後洗浄を必要としないことを目的と
する観点からも、電解質の濃度は低いことが好ましい。A second method for reducing the resistance between the electrodes is as follows:
To increase the ionic conductivity by adding an electrolyte to the solution. On the other hand, in order to maintain the cleaning ability of the obtained electrolytic alkaline water, the electrolyte concentration is preferably low. In addition, the concentration of the electrolyte is preferably low from the viewpoint that the cleaning apparatus of the present invention supplies cleaning water with a small environmental load and does not require post-cleaning by purified water.
【００３４】本発明の洗浄装置が具備する電解水生成器
１に供給する水あるい電解質溶液の伝導度は、５０μＳ
／cm以上１０ｍＳ／cm以下であり、水道水、地下水、脱
イオン水、蒸留水あるいは超純水に、目的とするｐＨに
必要に応じて電解質を加えて調整される。すなわち、ｐ
Ｈ９〜１０程度の電解アルカリ水を得るには、小さい電
流の負荷で十分であり、５０μＳ／cm以上の伝導度を有
する水道水あるい地下水を原水とする場合は、電解質溶
液の注入ポンプ３３，３４を稼働することなしに、原水
を直接に送水器３から電解水生成器１ヘ供給することが
できる。The conductivity of the water or the electrolyte solution supplied to the electrolyzed water generator 1 provided in the cleaning apparatus of the present invention is 50 μS
/ Cm or more and 10 mS / cm or less, and is adjusted by adding an electrolyte to tap water, groundwater, deionized water, distilled water or ultrapure water to a desired pH as needed. That is, p
A small current load is sufficient to obtain electrolytic alkaline water of about H9 to H10. When tap water or groundwater having a conductivity of 50 μS / cm or more is used as raw water, an electrolyte solution injection pump 33, The raw water can be directly supplied from the water feeder 3 to the electrolyzed water generator 1 without operating the fuel cell 34.
【００３５】伝導度が小さい脱イオン水、蒸留水あるい
は超純水を原水とする場合、原水へ電解質溶液を注入ポ
ンプ３３，３４から供給し、電解水生成器１へ供給され
る水溶液の伝導度を５０μＳ／cm以上に調整する。さら
に、少なくともｐＨ１１以上の電解アルカリ水を得るこ
とを目的とする場合は、電解水生成器１へ供給する水溶
液の伝導度は１ｍＳ／cm以上であることが好ましい。In the case where deionized water, distilled water or ultrapure water having low conductivity is used as raw water, an electrolyte solution is supplied to the raw water from the injection pumps 33 and 34, and the conductivity of the aqueous solution supplied to the electrolytic water generator 1 is supplied. Is adjusted to 50 μS / cm or more. Furthermore, when the purpose is to obtain electrolytic alkaline water having a pH of 11 or more, the conductivity of the aqueous solution supplied to the electrolytic water generator 1 is preferably 1 mS / cm or more.
【００３６】上記の伝導度を調整するために注入ポンプ
３３，３４から供給される電解質には、塩化ナトリウ
ム、炭酸ナトリウム、炭酸水素ナトリウム、りん酸ナト
リウム、あるいはりん酸水素ナトリウムが用いられる。As the electrolyte supplied from the injection pumps 33 and 34 for adjusting the conductivity, sodium chloride, sodium carbonate, sodium hydrogen carbonate, sodium phosphate, or sodium hydrogen phosphate is used.
【００３７】上記したように電解アルカリ水の生成に用
いられる原水は、水道水、地下水、イオン交換水、蒸留
水、超純水などから、洗浄対象物と洗浄目的に対応して
選ばれる。自動車、建築物外壁、土木建造物などを洗浄
する用途では、特に精製した水である必要はない。ま
た、機械部品や電機部品の洗浄においても、原水は水道
水あるいは地下水であってもよい。As described above, the raw water used for producing the electrolytic alkaline water is selected from tap water, groundwater, ion-exchanged water, distilled water, ultrapure water, etc. according to the object to be cleaned and the purpose of cleaning. For applications such as cleaning automobiles, building exterior walls, civil engineering structures, etc., there is no particular need for purified water. In washing mechanical parts and electric parts, raw water may be tap water or groundwater.
【００３８】しかし、水道水あるいは地下水には、カル
シウムおよびマグネシウムイオンの硬度成分、あるいは
シリカ、鉄イオンなど他の無機物が含まれ、これら無機
成分の陰極１２表面への析出は、電解アルカリ水生成効
率の低下をもたらす。かかる陰極１２の劣化と電解効率
の低下を軽減するする目的で、原水の軟水化装置を付加
し、無機成分の濃度を低減した原水を用いることが好ま
しい。However, tap water or groundwater contains hardness components of calcium and magnesium ions, or other inorganic substances such as silica and iron ions, and the precipitation of these inorganic components on the surface of the cathode 12 depends on the electrolytic alkaline water generation efficiency. Causes a decrease. For the purpose of reducing the deterioration of the cathode 12 and the decrease in electrolysis efficiency, it is preferable to add a raw water softening device and use raw water having a reduced concentration of inorganic components.
【００３９】本発明の洗浄装置が具備する電解水生成器
１において、陽極１３およびその表面での電気化学反応
は、電解アルカリ水の生成に直接的な影響はないもの
の、隔膜１４を介した陰極室１５への影響を最小限にす
ること、および電解水生成器１の寿命を延ばすために、
陽極１３を構成する材料には、酸性水溶液中で耐食性の
高い白金、金、イリジュウムなどの貴金属、あるいは貴
金属とチタンの混合体、フェライトなどの導電性酸化物
などが用いられる。In the electrolyzed water generator 1 provided in the cleaning apparatus of the present invention, the electrochemical reaction on the anode 13 and its surface does not directly affect the generation of the electrolyzed alkaline water, but the cathode 13 via the diaphragm 14 In order to minimize the effect on the chamber 15 and extend the life of the electrolyzed water generator 1,
As a material forming the anode 13, a noble metal such as platinum, gold, and iridium having high corrosion resistance in an acidic aqueous solution, a mixture of a noble metal and titanium, and a conductive oxide such as ferrite are used.
【００４０】上記のように、電解水生成器１の陰極室１
５から得られる過酸化水素を含む電解アルカリ水は加圧
器５により、ノズル６から噴射される圧力が２．５気圧
以上５０気圧以下に加圧される。ここで、加圧する圧力
は、洗浄対象物と表面汚染の状況、およびノズル６の先
端から洗浄対象物までの距離で選ばれる。As described above, the cathode chamber 1 of the electrolyzed water generator 1
The electrolytic alkaline water containing hydrogen peroxide obtained from 5 is pressurized by a pressurizer 5 so that the pressure injected from a nozzle 6 is at least 2.5 atm and at most 50 atm. Here, the pressure to be applied is selected based on the state of the cleaning target and the surface contamination, and the distance from the tip of the nozzle 6 to the cleaning target.
【００４１】本発明の洗浄装置には、上記の加圧器５に
加えて加熱器４を具備し、ノズル６から噴射される洗浄
水の温度が３０℃以上８０℃以下に加熱されることを特
徴とする。ここで、図１に示すように、電解水生成器か
ら得られた電解アルカリ水が加圧される前に加熱して
も、逆に加圧後に加熱してもよい。The cleaning apparatus of the present invention is provided with a heater 4 in addition to the pressurizer 5 described above, wherein the temperature of the cleaning water injected from the nozzle 6 is heated to 30 ° C. or more and 80 ° C. or less. And Here, as shown in FIG. 1, the electrolyzed alkaline water obtained from the electrolyzed water generator may be heated before being pressurized, or may be heated after being pressurized.
【００４２】本発明の方法は、水または電解質水溶液を
電気分解して電解アルカリ水を生成する隔膜１４を有す
る電解水生成器１と、該電解水生成器１へ水または電解
質水溶液を供給する送水器３と、該電解水生成器１へ空
気あるいは酸素ガスを供給する通気器２とから得られた
ｐＨが９以上１２以下、過酸化水素濃度が０．１ppm以
上１００ppm 以下の電解アルカリ水を、さらに、圧力が
２．５気圧以上５０気圧以下に加圧し、温度が３０℃以
上８０℃以下に加熱し、得られた加圧・加熱電解アルカ
リ水を被洗浄物にノズル６より噴射し、該被洗浄物表面
を洗浄することを特徴とする洗浄方法である。The method of the present invention comprises an electrolyzed water generator 1 having a diaphragm 14 for electrolyzing water or an aqueous electrolyte solution to generate electrolyzed alkaline water, and a water supply for supplying the electrolyzed water generator 1 with water or an aqueous electrolyte solution. Alkaline water having a pH of 9 or more and 12 or less and a hydrogen peroxide concentration of 0.1 ppm or more and 100 ppm or less obtained from a vessel 3 and an aerator 2 for supplying air or oxygen gas to the electrolyzed water generator 1; Further, the pressure is increased to 2.5 atm or more and 50 atm or less, the temperature is heated to 30 ° C or more and 80 ° C or less, and the obtained pressurized and heated electrolytic alkaline water is jetted from the nozzle 6 onto the object to be cleaned. A cleaning method characterized by cleaning a surface of an object to be cleaned.
【００４３】上記の洗浄方法における電解アルカリ水の
ｐＨは、洗浄対象物の材質、表面汚染物質の種類と汚染
の程度、洗浄の目的に応じて選ばれる。高いｐＨは洗浄
効果を高めるが、高ｐＨは高電解質濃度を意味し、例え
ばｐＨ１３などの過剰な高ｐＨは好ましくない。電解ア
ルカリ水の洗浄効果は、過酸化水素を含むことで高める
ことができる。すなわち本発明の洗浄方法では、電解ア
ルカリ水と過酸化水素の相乗効果により、低いｐＨと低
い過酸化水素濃度の穏和な条件でも、高い洗浄効果が得
られることを特徴とする。The pH of the electrolytic alkaline water in the above-mentioned cleaning method is selected according to the material of the object to be cleaned, the type and degree of contamination of surface contaminants, and the purpose of cleaning. A high pH enhances the cleaning effect, but a high pH means a high electrolyte concentration, and an excessively high pH such as pH 13 is not preferred. The cleaning effect of the electrolytic alkaline water can be enhanced by including hydrogen peroxide. That is, the cleaning method of the present invention is characterized in that a high cleaning effect can be obtained even under mild conditions of low pH and low hydrogen peroxide concentration by the synergistic effect of the alkaline water and hydrogen peroxide.
【００４４】電解アルカリ水を加熱することは、水およ
び表面汚染成分の粘度を低下させ、両者の混合する速度
を加速し、さらに混合したエマルジョンを安定化し、洗
浄を顕著に促進する効果を有する。本発明の洗浄方法に
おける電解アルカリ水の加熱温度は３０℃以上、好まし
くは５０℃以上である。しかし、８０℃超に加熱するこ
とは、化学的および熱的に不安定な過酸化水素の分解を
加速することになり、好ましくない。Heating the electrolytic alkaline water has the effects of reducing the viscosity of water and surface contaminants, accelerating the speed of mixing the two, stabilizing the mixed emulsion, and significantly promoting washing. The heating temperature of the electrolytic alkaline water in the cleaning method of the present invention is 30 ° C. or higher, preferably 50 ° C. or higher. However, heating to more than 80 ° C. accelerates the decomposition of chemically and thermally unstable hydrogen peroxide, which is not preferable.
【００４５】電解アルカリ水を加圧噴霧することによっ
ても洗浄効果が顕著に高められる。本発明の電解アルカ
リ水を加圧する圧力は２．５気圧以上である。圧力が
２．５気圧未満で洗浄効果を得るには、ノズル６の先端
から洗浄対象物までの距離を極端に近づける必要があ
り、実用的でない。加圧する圧力は、洗浄の目的とノズ
ル６先端から洗浄対象物までの距離に依存し、適度に近
い距離がエネルギー的に有利である。The cleaning effect can also be significantly improved by spraying electrolytic alkaline water under pressure. The pressure for pressurizing the electrolytic alkaline water of the present invention is 2.5 atm or more. In order to obtain a cleaning effect when the pressure is less than 2.5 atm, the distance from the tip of the nozzle 6 to the object to be cleaned needs to be extremely short, which is not practical. The pressure to be applied depends on the purpose of cleaning and the distance from the tip of the nozzle 6 to the object to be cleaned, and a suitably short distance is advantageous in terms of energy.
【００４６】ノズル６の先端から洗浄対象物までの距離
が１ｍ以下の場合、例えば金属製の機械部品や電機部品
の洗浄では、１０気圧以下に加圧された本発明の洗浄方
法で、工作油等の油脂成分を除去することができる。自
動車、建築物外壁、土木構造物の洗浄に関しては、ノズ
ル６の先端から洗浄対象物までの距離が長くなり、加熱
効率が減少することから、例えば２０気圧以上の高い圧
力を必要とするが、５０気圧以下で十分洗浄効果が得ら
れので、省エネルギー洗浄方法を提供できる。When the distance from the tip of the nozzle 6 to the object to be cleaned is 1 m or less, for example, for cleaning of metal mechanical parts and electric parts, the cleaning method of the present invention pressurized to 10 atm or less, the machine oil is used. And the like can be removed. For cleaning automobiles, building exterior walls, and civil engineering structures, since the distance from the tip of the nozzle 6 to the object to be cleaned increases and the heating efficiency decreases, a high pressure of, for example, 20 atmospheres or more is required. Since a sufficient cleaning effect can be obtained at 50 atm or less, an energy-saving cleaning method can be provided.
【００４７】[0047]
【実施例】図１に概略を示した洗浄装置を用いて洗浄試
験を行い、本発明の効果を確認した。洗浄対象物として
は、電気機器等に用いられるめっき後処理をした電気亜
鉛めっき鋼板に、プレス油を塗布したものを用いた。洗
浄時間は全て５秒とし、洗浄の程度は残存する炭素量μ
ｇ／cm2 で評価した。なお残存炭素量が１μｇ／cm 2 以
下では十分に洗浄されたと見なされている。DESCRIPTION OF THE PREFERRED EMBODIMENTS A cleaning test was conducted using a cleaning apparatus schematically shown in FIG.
An experiment was conducted to confirm the effects of the present invention. As an object to be cleaned
Is an electric sub-plate that has been subjected to post-plating treatment used for electrical equipment, etc.
What applied press oil to the lead plating steel plate was used. Washing
The cleaning time was 5 seconds, and the degree of cleaning was the amount of residual carbon μ
g / cmTwoWas evaluated. The residual carbon content is 1 μg / cm TwoLess than
Below it is considered fully cleaned.
【００４８】洗浄に用いた電解アルカリ水のｐＨと過酸
化水素濃度は、陰極室１５の出口で採取して分析した。
温度は加熱器４の出口、圧力はノズル６直前で測定し
た。また、電解水生成器１に供給される水あるいは電解
質溶液の伝導度は、送水器３と電解水生成器１との間で
採取して測定した。The pH and hydrogen peroxide concentration of the electrolytic alkaline water used for washing were collected at the outlet of the cathode chamber 15 and analyzed.
The temperature was measured at the outlet of the heater 4 and the pressure was measured immediately before the nozzle 6. Further, the conductivity of the water or the electrolyte solution supplied to the electrolyzed water generator 1 was measured by collecting the water between the water feeder 3 and the electrolyzed water generator 1.
【００４９】（実施例１〜４）電解水生成器１におい
て、面積が１５０cm2 である白金粉末を塗布焼結したチ
タン板２枚を陰極１２と陽極１３、フッ素樹脂系の多孔
質膜を隔膜１４とし、通気器２から空気を陰極室へ０〜
５０cm3 ／分で供給した。電解水生成器１には、水道水
を原水とし、食塩を添加して５０μＳ／cmから１ｍＳ／
cmの範囲に調整した水溶液を、送水器３から１００〜５
００ｍｌ／分（ｌはリットル）にて供給した。さらに、
水の電気分解と酸素の還元に供する電流は、電源１１か
ら１．５〜２０アンペアの範囲で調節して印加し、ｐＨ
範囲が９〜１２、過酸化水素濃度が０．ｌppm から２pp
m である電解アルカリ水を得た。得られた電解アルカリ
水を加熱・加圧して洗浄水とし、ノズル６の先端から４
５cmの距離にある洗浄対象物を５秒間洗浄した。結果を
表１に示す。(Examples 1 to 4) In the electrolyzed water generator 1, two titanium plates coated and sintered with a platinum powder having an area of 150 cm 2 were used as a cathode 12 and an anode 13, and a fluororesin porous membrane was used as a diaphragm. 14, air from the ventilator 2 to the cathode chamber
It was fed at 50 cm 3 / min. In the electrolyzed water generator 1, tap water is used as raw water, salt is added, and 50 μS / cm to 1 mS / cm.
The aqueous solution adjusted to the range of cm
It was supplied at a rate of 00 ml / min (1 is liter). further,
The electric current used for the electrolysis of water and the reduction of oxygen is adjusted from the power supply 11 in the range of 1.5 to 20 amperes and applied.
The range is 9 to 12 and the concentration of hydrogen peroxide is 0.1. lpp to 2pp
m was obtained. The obtained electrolytic alkaline water is heated and pressurized to obtain washing water.
An object to be washed at a distance of 5 cm was washed for 5 seconds. Table 1 shows the results.
【００５０】（比較例１〜３）水道水と水酸化ナトリウ
ムとから調整されたアルカリ水を加熱・加圧して洗浄水
とし、ノズル６の先端から４５cmの距離にある洗浄対象
物を５秒間洗浄した結果を、表１に併せて示す。(Comparative Examples 1 to 3) Alkaline water prepared from tap water and sodium hydroxide was heated and pressurized to obtain washing water, and an object to be washed at a distance of 45 cm from the tip of the nozzle 6 was washed for 5 seconds. The results are shown in Table 1.
【００５１】[0051]
【表１】 [Table 1]
【００５２】表１の実施例１〜４および比較例１〜３か
ら明らかなように、本発明の過酸化水素を含む電解アル
カリ水は、同一のｐＨである水酸化ナトリウム水溶液に
比較して高い洗浄効果が確認された。また、洗浄効果は
高ｐＨ、高温で顕著である。As is clear from Examples 1 to 4 and Comparative Examples 1 to 3 in Table 1, the electrolytic alkaline water containing hydrogen peroxide of the present invention is higher than an aqueous sodium hydroxide solution having the same pH. The cleaning effect was confirmed. The cleaning effect is remarkable at high pH and high temperature.
【００５３】（実施例５〜８）電解水生成器１におい
て、電極面積が１５０cm2 であるチタン基板上に黒鉛粒
子と活性炭およびバインダーとしてフッ素樹脂粉末の混
合体を塗布して焼結した多孔質電極を陰極１２、実施例
１〜４に同じく電極面積が１５０cm2 である白金粉末を
塗布焼結したチタン板を陽極１３、フッ素樹脂系の多孔
質膜を隔膜１４とし、通気器２から空気を陰極室へ５〜
５０cm3 ／分で供給した。(Examples 5 to 8) In the electrolyzed water generator 1, a mixture of graphite particles, activated carbon and a fluororesin powder as a binder was applied on a titanium substrate having an electrode area of 150 cm 2 and sintered to form a porous body. The electrode is a cathode 12, the titanium plate obtained by applying and sintering a platinum powder having the electrode area of 150 cm 2 in Examples 1 to 4 is an anode 13, the fluororesin porous film is a diaphragm 14, and air is passed from the ventilator 2. 5 to the cathode compartment
It was fed at 50 cm 3 / min.
【００５４】電解水生成器１には、水道水を原水とし、
炭酸水素ナトリウムを添加して５０μＳ／cmから１ｍＳ
／cmの範囲に調整した水溶液を、送水器３から１００〜
３００ｍｌ／分にて供給した。さらに、水の電気分解と
酸素の還元に供する電流は、電源１１から１．５〜５ア
ンペアの範囲で調節して印加し、ｐＨ範囲が１０〜１
１、過酸化水素濃度が５ppm から３０ppm である電解ア
ルカリ水を得た。得られた電解アルカリ水を７０℃に加
熱、２．５気圧に加圧して洗浄水とし、ノズル６の先端
から４５cmの距離にある洗浄対象物を５秒間洗浄した。
結果を表２に示す。In the electrolyzed water generator 1, tap water is used as raw water,
50 μS / cm to 1 mS by adding sodium bicarbonate
/ Cm of the aqueous solution adjusted to the range of
It was fed at 300 ml / min. Further, the electric current used for the electrolysis of water and the reduction of oxygen is adjusted and applied in the range of 1.5 to 5 amps from the power supply 11, and the pH range is 10 to 1.
1. Electrolyzed alkaline water having a hydrogen peroxide concentration of 5 ppm to 30 ppm was obtained. The obtained electrolytic alkaline water was heated to 70 ° C. and pressurized to 2.5 atm to form washing water, and an object to be washed at a distance of 45 cm from the tip of the nozzle 6 was washed for 5 seconds.
Table 2 shows the results.
【００５５】（比較例４）実施例１〜４と同じ電解水生
成器１に、通気器２から窒素を陰極室へ１０cm3／分で
供給し、過酸化水素を含まない電解アルカリ水を得た。
ｐＨ１０．２、２．５気圧での洗浄結果を、表２に併せ
て示す。Comparative Example 4 Nitrogen was supplied from the ventilator 2 to the cathode chamber at 10 cm 3 / min to the same electrolyzed water generator 1 as in Examples 1 to 4, to obtain electrolyzed alkaline water containing no hydrogen peroxide. Was.
The results of washing at pH 10.2 and 2.5 atm are also shown in Table 2.
【００５６】実施例５〜８の結果から、過酸化水素濃度
を増大することにより、電解アルカリ水の洗浄効果が高
まり、実施例２と３に比較して低い圧力条件でも十分高
い洗浄効果が得られることが確認された。As can be seen from the results of Examples 5 to 8, by increasing the concentration of hydrogen peroxide, the cleaning effect of the electrolytic alkaline water was enhanced, and a sufficiently high cleaning effect was obtained even under low pressure conditions as compared with Examples 2 and 3. Was confirmed.
【００５７】比較例４で得た過酸化水素を全く含まない
電解水アルカリ水は、比較例１に示した同一ｐＨの水酸
化ナトリウム水溶液より洗浄効果が高いものの、実施例
７の過酸化水素を含む電解アルカリ水には洗浄効果が劣
る。電解アルカリ水に含まれる過酸化水素は、３０℃な
ど穏和な加熱でも高い洗浄効果をもたらす。The electrolyzed alkaline water containing no hydrogen peroxide obtained in Comparative Example 4 has a higher cleaning effect than the aqueous sodium hydroxide solution of the same pH shown in Comparative Example 1, but the hydrogen peroxide of Example 7 is used. The cleaning effect is inferior to the contained alkaline water. Hydrogen peroxide contained in the electrolytic alkaline water provides a high cleaning effect even under mild heating such as 30 ° C.
【００５８】[0058]
【表２】 [Table 2]
【００５９】（実施例９〜１３）実施例５〜８と同じ電
解水生成器１を用い、通気器２から圧縮酸素を陰極１２
表面へ５０cm3 ／分で供給した。電解水生成器１には、
水道水を原水とし、食塩を添加して１〜５ｍＳ／cmの範
囲に調整した水溶液を、送水器３から２００〜３００ｍ
ｌ／分にて供給した。さらに、水の電気分解と酸素の還
元に供する電流は、電源１１から１０〜２５アンペアの
範囲で調節して印加し、ｐＨが１１〜ｌｌ．５、過酸化
水素濃度が５０〜７０ppm である電解アルカリ水を得
た。(Examples 9 to 13) Using the same electrolyzed water generator 1 as in Examples 5 to 8, compressed oxygen was
It was fed to the surface at 50 cm 3 / min. In the electrolyzed water generator 1,
Tap water was used as raw water, and an aqueous solution adjusted to a range of 1 to 5 mS / cm by adding salt was supplied from the water feeder 3 to 200 to 300 m
1 / min. Further, the electric current used for the electrolysis of water and the reduction of oxygen was adjusted from the power source 11 in the range of 10 to 25 amperes and applied, and the pH was 11 to 11. 5. Electrolyzed alkaline water having a hydrogen peroxide concentration of 50 to 70 ppm was obtained.
【００６０】得られた電解アルカリ水を７０℃に加熱、
１０〜６０気圧に加圧して洗浄水とし、ノズル６の先端
から５ｍの距離にある洗浄対象物を５秒間洗浄した。結
果を表３に示す。表３の結果が示すように、ノズル先端
から洗浄対象物までの距離が離れていても、５０気圧以
下の加圧圧力で十分な洗浄効果が得られることが確認さ
れた。The obtained electrolytic alkaline water is heated to 70 ° C.
The cleaning water was pressurized to a pressure of 10 to 60 atm, and the cleaning object at a distance of 5 m from the tip of the nozzle 6 was cleaned for 5 seconds. Table 3 shows the results. As shown in the results in Table 3, it was confirmed that a sufficient cleaning effect could be obtained with a pressure of 50 atm or less even if the distance from the nozzle tip to the object to be cleaned was large.
【００６１】（比較例５）ｐＨ１１．５の水酸化ナトリ
ウム水溶液を洗浄水として、実施例１３と同じ条件で洗
浄効果を調べた結果を、表３に併せて示す。実施例１３
は十分に洗浄されているのに対し、比較例５は洗浄不十
分であることが確認された。(Comparative Example 5) The results of examining the cleaning effect under the same conditions as in Example 13 using an aqueous solution of sodium hydroxide having a pH of 11.5 as the washing water are also shown in Table 3. Example 13
Was sufficiently washed, while Comparative Example 5 was insufficiently washed.
【００６２】[0062]
【表３】 [Table 3]
【００６３】[0063]
【発明の効果】以上のように、本発明の洗浄装置は、水
あるいは電解質水溶液から、単一の電解水生成器でもっ
て、洗浄性に優れた過酸化水素を含む電解アルカリ水を
提供するものである。また、本発明の洗浄方法によれ
ば、優れた洗浄効果に加えて、洗浄後の浄水によるリン
スが不要であり、かつ洗浄水が環境負荷の小さい電解質
の希薄水溶液と分解し易い過酸化水素からなることか
ら、系外への排出処理が容易となり、工業的かつ環境対
策的に価値の高い洗浄が可能となる。As described above, the cleaning apparatus of the present invention provides an electrolytic alkaline water containing hydrogen peroxide excellent in cleanability from water or an aqueous electrolyte solution by using a single electrolytic water generator. It is. Further, according to the cleaning method of the present invention, in addition to the excellent cleaning effect, rinsing by purified water after cleaning is unnecessary, and the cleaning water is composed of hydrogen peroxide that is easily decomposed with a dilute aqueous solution of an electrolyte having a small environmental load. As a result, discharge treatment to the outside of the system becomes easy, and high-value cleaning can be performed industrially and environmentally.
【図１】本発明の実施の形態を示す洗浄装置の構成図で
ある。FIG. 1 is a configuration diagram of a cleaning apparatus according to an embodiment of the present invention.
１：電解水生成器 １１：直流電源 １２：陰極 １３：陽極 １４：隔膜 １５：陰極室 １６：陽極室 １７：電解アルカリ水貯水槽 ２：通気器 ３：送水器 ３１，３２：送水ポンプ ３３，３４：電解質注入ポンプ ４：加熱器 ５：加圧器 ６：ノズル 1: Electrolyzed water generator 11: DC power supply 12: Cathode 13: Anode 14: Diaphragm 15: Cathode room 16: Anode room 17: Electrolyte alkaline water storage tank 2: Ventilator 3: Water supply 31, 32: Water supply pump 33, 34: electrolyte injection pump 4: heater 5: pressurizer 6: nozzle
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ テーマコート゛(参考） Ｃ１１Ｄ 7/12 Ｃ１１Ｄ 7/12 7/16 7/16 7/18 7/18 17/08 17/08 (72)発明者 坂下 雅雄 東京都千代田区麹町１丁目６番地 株式会 社日鉄技術情報センター内 (72)発明者 田籠 直子 東京都千代田区麹町１丁目６番地 株式会 社日鉄技術情報センター内 Ｆターム(参考） 3B201 AA31 AA46 BB21 BB82 BB89 BB90 BB92 CB01 CC21 4D061 DA03 DB08 EA02 EB12 EB29 EB30 EB31 EB39 ED12 FA01 FA11 FA16 FA20 GC20 4H003 BA12 BA20 DA07 DA11 DA14 DA15 EA08 EA16 EA19 EA31 EE04 FA28 ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification symbol FI theme coat ゛ (Reference) C11D 7/12 C11D 7/12 7/16 7/16 7/18 7/18 17/08 17/08 ( 72) Inventor Masao Sakashita 1-6 Kojimachi, Chiyoda-ku, Tokyo, Japan Nippon Steel Technical Information Center (72) Inventor Naoko 1-6-6 Kojimachi, Chiyoda-ku, Tokyo Nippon Steel Technical Information Center F Term (reference) 3B201 AA31 AA46 BB21 BB82 BB89 BB90 BB92 CB01 CC21 4D061 DA03 DB08 EA02 EB12 EB29 EB30 EB31 EB39 ED12 FA01 FA11 FA16 FA20 GC20 4H003 BA12 BA20 DA07 DA11 DA14 DA15 EA08 EA16 EA19 EA16 EA19
Claims (9)
解アルカリ水を生成する隔膜を有する電解水生成器と、
該電解水生成器へ水または電解質水溶液を供給する送水
器と、該電解水生成器へ空気あるいは酸素を供給する通
気器と、得られた電解アルカリ水の貯水槽と、得られた
電解アルカリ水を加熱する加熱器と、得られた電解アル
カリ水を加圧する加圧器と、および得られた加熱加圧さ
れた電解アルカリ水を洗浄対象物へ噴射するノズルとを
具備することを特徴とする洗浄装置。1. An electrolyzed water generator having a diaphragm for electrolyzing water or an aqueous electrolyte solution to produce electrolyzed alkaline water,
A water supplier for supplying water or an aqueous electrolyte solution to the electrolyzed water generator, an aerator for supplying air or oxygen to the electrolyzed water generator, a storage tank for the obtained electrolyzed alkaline water, and an obtained electrolyzed alkaline water , A pressurizing device for pressurizing the obtained electrolytic alkaline water, and a nozzle for injecting the obtained heated and pressurized electrolytic alkaline water to a cleaning object apparatus.
隔膜を挟んで対向して設置される陰極と陽極を有し、酸
素を含む水あるいは電解質水溶液を電気分解することに
より、陰極表面で起こる水素発生反応と酸素還元反応と
によって、過酸化水素を溶解したｐＨ９以上，１２以下
の電解アルカリ水を生成するものであることを特徴とす
る請求項１記載の洗浄装置。2. An electrolyzed water generator having the above-mentioned diaphragm has a cathode and an anode installed to face each other with the above-mentioned diaphragm interposed therebetween, and electrolyzes water containing oxygen or an aqueous electrolyte solution to form a cathode surface. 2. The cleaning apparatus according to claim 1, wherein the hydrogen generation reaction and the oxygen reduction reaction that occur in the reaction generate electrolytic alkaline water having a pH of 9 or more and 12 or less in which hydrogen peroxide is dissolved.
する水あるいは電解質水溶液の伝導度が５０μＳ／cm以
上，１０ｍＳ／cm以下であることを特徴とする請求項１
記載の洗浄装置。3. The conductivity of water or an aqueous electrolyte solution supplied to the electrolyzed water generator having the above-mentioned diaphragm is 50 μS / cm or more and 10 mS / cm or less.
The cleaning device according to the above.
れる空気あるいは酸素が、通気器から陰極表面に直接吹
き込まれることを特徴とする請求項１または２記載の洗
浄装置。4. The cleaning apparatus according to claim 1, wherein air or oxygen supplied to the electrolyzed water generator having the diaphragm is directly blown from an aerator into a cathode surface.
ケルまたはチタンよりなることを特徴とする請求項２記
載の洗浄装置。5. The cleaning apparatus according to claim 2, wherein the cathode is made of a noble metal, stainless steel, nickel, or titanium.
なることを特徴とする請求項２記載の洗浄装置。6. The cleaning apparatus according to claim 2, wherein the cathode is made of a sintered body of graphite and activated carbon.
素の濃度が０．１ppm 以上，１００ppm 以下であること
を特徴とする請求項２記載の洗浄装置。7. The cleaning apparatus according to claim 2, wherein the concentration of hydrogen peroxide dissolved in the electrolytic alkaline water is 0.1 ppm or more and 100 ppm or less.
含まれる電解質が、ナトリウムの塩化物、炭酸塩、炭酸
水素塩、りん酸塩またはりん酸水素塩であることを特徴
とする請求項２または３記載の洗浄装置。8. The electrolyte contained in the aqueous electrolyte solution supplied to the electrolyzed water generator is sodium chloride, carbonate, hydrogen carbonate, phosphate or hydrogen phosphate. Or the cleaning device according to 3.
解アルカリ水を生成する隔膜を有する電解水生成器と、
該電解水生成器へ水または電解質水溶液を供給する送水
器と、該電解水生成器へ空気あるいは酸素ガスを供給す
る通気器とから得られたｐＨが９以上，１２以下、過酸
化水素濃度が０．１ppm 以上，１００ppm 以下の電解ア
ルカリ水を、さらに、圧力が２．５気圧以上，５０気圧
以下に加圧し、温度が３０℃以上，８０℃以下に加熱
し、得られた加圧・加熱電解アルカリ水を被洗浄物にノ
ズルより噴射し、該被洗浄物表面を洗浄することを特徴
とする洗浄方法。9. An electrolyzed water generator having a diaphragm for electrolyzing water or an aqueous electrolyte solution to produce electrolyzed alkaline water,
The pH obtained from a water feeder for supplying water or an aqueous electrolyte solution to the electrolyzed water generator and an aerator for supplying air or oxygen gas to the electrolyzed water generator is 9 or more and 12 or less, and the hydrogen peroxide concentration is 0.1 ppm or more and 100 ppm or less of electrolytic alkaline water is further pressurized to a pressure of 2.5 or more and 50 or less and heated to a temperature of 30 or more and 80 or less. A cleaning method, comprising spraying electrolytic alkaline water onto a workpiece to be cleaned from a nozzle to clean the surface of the workpiece.
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|---|---|---|---|
| JP2000151252A JP2001327934A (en) | 2000-05-23 | 2000-05-23 | Cleaning device and cleaning method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000151252A JP2001327934A (en) | 2000-05-23 | 2000-05-23 | Cleaning device and cleaning method |
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|---|---|
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| Country | Link |
|---|---|
| JP (1) | JP2001327934A (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003097535A1 (en) * | 2002-05-17 | 2003-11-27 | Nippon Oil Corporation | Aqueous solution for diluting water-soluble metal working fluid, apparatus for production thereof, fluid coolant, and apparatus for production of fluid coolant |
| JP2005290336A (en) * | 2004-03-31 | 2005-10-20 | Takahashi Kinzoku Kk | Cleaning method of non-chromium film-coated steel plate product |
| JP2007050400A (en) * | 2005-07-20 | 2007-03-01 | Ai System Product:Kk | Method for producing minus ion water, and minus ion water |
| JP2007063998A (en) * | 2005-08-29 | 2007-03-15 | Mt System Kiki Kk | Cleaning method and cleaning device for engine |
| JP2007152189A (en) * | 2005-12-02 | 2007-06-21 | Takku & Company:Kk | House cleaning system, floor stone cleaning system, non-slip floor cleaning system, carpet cleaning system, and overall cleaning system |
| JP2008063648A (en) * | 2006-09-11 | 2008-03-21 | Sumitomo Heavy Ind Ltd | Apparatus for producing rinse water containing hydrogen peroxide, and method for producing rinse water containing hydrogen peroxide |
| JP2008080245A (en) * | 2006-09-27 | 2008-04-10 | Sumitomo Heavy Ind Ltd | Washing water making apparatus and washing water making method |
| JP2009283842A (en) * | 2008-05-26 | 2009-12-03 | Nakamura Choko:Kk | Method of cleaning metal plate |
| JP2011000524A (en) * | 2009-06-17 | 2011-01-06 | Ryobi Shoji Kk | Method and apparatus for removing coating film |
| JP2013086033A (en) * | 2011-10-19 | 2013-05-13 | Kb:Kk | Cleaning method for building external wall and external wall cleaning system |
| JP2016211087A (en) * | 2015-04-30 | 2016-12-15 | ナルコジャパン合同会社 | Method for cleaning deposit generated in dissolving pulp production process |
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2000
- 2000-05-23 JP JP2000151252A patent/JP2001327934A/en not_active Withdrawn
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003097535A1 (en) * | 2002-05-17 | 2003-11-27 | Nippon Oil Corporation | Aqueous solution for diluting water-soluble metal working fluid, apparatus for production thereof, fluid coolant, and apparatus for production of fluid coolant |
| JP2005290336A (en) * | 2004-03-31 | 2005-10-20 | Takahashi Kinzoku Kk | Cleaning method of non-chromium film-coated steel plate product |
| JP4644589B2 (en) * | 2005-07-20 | 2011-03-02 | 株式会社エー・アイ・システムプロダクト | Negative ion water production method and negative ion water |
| JP2007050400A (en) * | 2005-07-20 | 2007-03-01 | Ai System Product:Kk | Method for producing minus ion water, and minus ion water |
| JP2007063998A (en) * | 2005-08-29 | 2007-03-15 | Mt System Kiki Kk | Cleaning method and cleaning device for engine |
| JP2007152189A (en) * | 2005-12-02 | 2007-06-21 | Takku & Company:Kk | House cleaning system, floor stone cleaning system, non-slip floor cleaning system, carpet cleaning system, and overall cleaning system |
| JP2008063648A (en) * | 2006-09-11 | 2008-03-21 | Sumitomo Heavy Ind Ltd | Apparatus for producing rinse water containing hydrogen peroxide, and method for producing rinse water containing hydrogen peroxide |
| JP2008080245A (en) * | 2006-09-27 | 2008-04-10 | Sumitomo Heavy Ind Ltd | Washing water making apparatus and washing water making method |
| JP2009283842A (en) * | 2008-05-26 | 2009-12-03 | Nakamura Choko:Kk | Method of cleaning metal plate |
| JP2011000524A (en) * | 2009-06-17 | 2011-01-06 | Ryobi Shoji Kk | Method and apparatus for removing coating film |
| JP2013086033A (en) * | 2011-10-19 | 2013-05-13 | Kb:Kk | Cleaning method for building external wall and external wall cleaning system |
| JP2016211087A (en) * | 2015-04-30 | 2016-12-15 | ナルコジャパン合同会社 | Method for cleaning deposit generated in dissolving pulp production process |
| JP2020131089A (en) * | 2019-02-15 | 2020-08-31 | 株式会社日本キャンパック | CIP cleaning method |
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