CN108281388B - Array substrate, manufacturing method thereof and display panel - Google Patents
Array substrate, manufacturing method thereof and display panel Download PDFInfo
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- CN108281388B CN108281388B CN201810078765.5A CN201810078765A CN108281388B CN 108281388 B CN108281388 B CN 108281388B CN 201810078765 A CN201810078765 A CN 201810078765A CN 108281388 B CN108281388 B CN 108281388B
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
- H10K77/10—Substrates, e.g. flexible substrates
- H10K77/111—Flexible substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/562—Protection against mechanical damage
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/842—Containers
- H10K50/8428—Vertical spacers, e.g. arranged between the sealing arrangement and the OLED
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses an array substrate, a manufacturing method thereof and a display panel, wherein the array substrate comprises: the barrier layer comprises a first flexible substrate and a first barrier layer positioned on one side of the first flexible substrate; the first blocking layer comprises a plurality of independently arranged grooves, and flexible materials are filled in the grooves. According to the invention, the plurality of independently arranged groove structures are arranged in the first barrier layer, and the grooves are filled with the flexible material, so that when the first barrier layer cracks, the flexible material filled in the grooves can effectively buffer the transverse tensile stress at the tips of the cracks, and prevent the cracks from continuously diffusing, thereby avoiding the cracks from being enlarged and penetrated, and the flexible material can ensure the integrity of the filling of the first barrier layer and ensure the performance of the device, therefore, the array substrate provided by the embodiment of the invention can prolong the service life of the display device.
Description
Technical Field
The invention relates to the technical field of flexible display, in particular to an array substrate, a manufacturing method thereof and a display panel.
Background
The flexible Display panel is a flexible printed circuit board with high reliability, which is made of polyimide or polyester film as a substrate, and an Organic Light Emitting Diode (OLED) Display panel is considered as the most potential Display device because of its advantages of self-luminescence, ultra-Light and thinness, fast response speed, wide viewing angle, low power consumption, etc. The use of flexible substrates to form curved or folded flexible display devices has become an important development for display devices.
At present, in a specific process of an OLED flexible display screen, as shown in fig. 1, a layer of barrier layer 002 is often deposited on a flexible substrate 001 to improve adhesion force on the surface, block water and oxygen, and simultaneously play a role in heat insulation and static electricity prevention, but since the barrier layer 002 is very thin and only has about 1um, cracks are easily generated in a film forming process and a later use process, and the barrier layer 002 has poor toughness, a transverse tensile stress at the tip of the crack cannot be effectively buffered, and the crack cannot be prevented from being continuously diffused, so that the crack is enlarged and penetrated, thereby greatly shortening the service life of a display device.
Disclosure of Invention
The embodiment of the invention provides an array substrate, a manufacturing method thereof and a display panel, which are used for solving the problem that in the prior art, a barrier layer on a flexible substrate is easy to crack, so that the service life of a display device is greatly shortened.
Therefore, an embodiment of the present invention provides an array substrate, including: the barrier layer comprises a first flexible substrate and a first barrier layer positioned on one side of the first flexible substrate; wherein the content of the first and second substances,
the first barrier layer comprises a plurality of independently arranged grooves, and flexible materials are filled in the grooves.
Preferably, in the array substrate provided in the embodiment of the present invention, the flexible material is a flexible hydrophobic material.
Preferably, in the array substrate provided in an embodiment of the present invention, the trench penetrates through the first barrier layer.
Preferably, in the array substrate provided by the embodiment of the present invention, the distances between orthogonal projections of every two adjacent trenches on the first flexible substrate are equal.
Preferably, in the array substrate provided in an embodiment of the present invention, the first barrier layer includes a first sub-barrier layer and a second sub-barrier layer stacked on each other, and the trench includes a first trench and a second trench; wherein the content of the first and second substances,
the first trench is located in the first sub-barrier layer, and the second trench is located in the second sub-barrier layer.
Preferably, in the array substrate provided in an embodiment of the present invention, the first trench penetrates through the first sub-barrier layer, and the second trench penetrates through the second sub-barrier layer.
Preferably, in the array substrate provided in the embodiment of the present invention, orthographic projections of the first trenches on the first flexible substrate and orthographic projections of the second trenches on the first flexible substrate are alternately arranged.
Preferably, in the array substrate provided in the embodiment of the present invention, the array substrate further includes: the second flexible substrate is positioned on one side, away from the first flexible substrate, of the first barrier layer, and the second barrier layer is positioned on one side, away from the first flexible substrate, of the second flexible substrate.
Correspondingly, the embodiment of the invention also provides a display panel which comprises any one of the array substrates provided by the embodiment of the invention.
Correspondingly, the embodiment of the invention also provides a manufacturing method of the array substrate, which comprises the following steps:
forming a pattern of a first barrier layer on a first flexible substrate;
forming a plurality of independently disposed trenches in the first barrier layer;
and filling a flexible material in the groove of the first barrier layer.
The array substrate, the manufacturing method thereof and the display panel provided by the embodiment of the invention comprise the following steps: the barrier layer comprises a first flexible substrate and a first barrier layer positioned on one side of the first flexible substrate; the first blocking layer comprises a plurality of independently arranged grooves, and flexible materials are filled in the grooves. According to the invention, the plurality of independently arranged groove structures are arranged in the first barrier layer, and the grooves are filled with the flexible material, so that when the first barrier layer cracks, the flexible material filled in the grooves can effectively buffer the transverse tensile stress at the tips of the cracks, and prevent the cracks from continuously diffusing, thereby avoiding the cracks from being enlarged and penetrated, and the flexible material can ensure the integrity of the filling of the first barrier layer and ensure the performance of the device, therefore, the array substrate provided by the embodiment of the invention can prolong the service life of the display device.
Drawings
Fig. 1 is a schematic structural diagram of a conventional array substrate;
fig. 2 is a schematic structural diagram of an array substrate according to an embodiment of the present invention;
fig. 3 is a second schematic structural diagram of an array substrate according to an embodiment of the invention;
fig. 4 is a flowchart of a method for manufacturing an array substrate according to an embodiment of the invention;
FIGS. 5a to 5c and FIG. 2 are schematic cross-sectional views illustrating steps performed according to an embodiment of the present invention;
fig. 6a to 6e and fig. 3 are schematic cross-sectional structures after steps are performed according to a second embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, specific embodiments of an array substrate, a manufacturing method thereof, an organic light emitting display panel and a display panel according to embodiments of the present invention are described in detail below with reference to the accompanying drawings.
The thicknesses and shapes of the films in the drawings do not reflect the actual scale of the array substrate, and are only intended to illustrate the present invention.
An embodiment of the present invention provides an array substrate, as shown in fig. 2, including: a first flexible substrate 10 and a first barrier layer 20 on one side of the first flexible substrate 10; wherein the content of the first and second substances,
the first barrier layer 20 includes a plurality of independently disposed trenches 01, and each trench 01 is filled with a flexible hydrophobic material.
According to the array substrate provided by the embodiment of the invention, the plurality of independently arranged groove structures are arranged in the first barrier layer, and the grooves are filled with the flexible material, so that when the first barrier layer cracks, the flexible material filled in the grooves can effectively buffer the transverse tensile stress at the tips of the cracks, and prevent the cracks from continuously diffusing, thereby avoiding the cracks from increasing and penetrating, and the flexible material can ensure the integrity of the filling of the first barrier layer and the performance of a device, therefore, the array substrate provided by the embodiment of the invention can prolong the service life of a display device.
It should be noted that the array substrate provided by the embodiment of the present invention is mainly suitable for a flexible OLED display, and the material of the first flexible substrate is polyimide, but may be other flexible materials, so long as the structure includes the structure of the embodiment of the present invention, which falls within the protection scope of the present invention.
In a specific implementation, the material of the first barrier layer is an inorganic material.
Further, during implementation, the first blocking layer is used for blocking water and oxygen, so that water vapor permeation can be effectively blocked, deterioration of device performance is prevented, the service life of the device is prolonged, and the filled flexible material is a flexible hydrophobic material.
In specific implementation, since the material of the first barrier layer is an inorganic material, cracks are easily generated due to the thin thickness of the first barrier layer, and in order to completely block lateral diffusion of the cracks, as shown in fig. 2, the trenches 01 penetrate through the first barrier layer 20 in the array substrate provided in the embodiment of the present invention. Therefore, the crack is generated at any position of the inorganic layer, the transverse tensile stress at the tip of the crack can be effectively buffered, the crack is prevented from being continuously diffused, and the crack is prevented from being enlarged and penetrated.
Further, in order to better buffer the transverse tensile stress at the crack tip and prevent the crack from further spreading in the implementation, in the array substrate provided by the embodiment of the present invention, as shown in fig. 2, the distances between the orthographic projections of every two adjacent trenches 01 on the first flexible substrate 10 are equal.
Further, in the case of implementation, since cracks may occur at each part of the first barrier layer 20, the structure shown in fig. 2 has been effective in preventing the continued propagation of cracks, but since the structure of fig. 2 is such that the trenches 01 penetrate the first barrier layer 10, although the hydrophobic material is filled, the complete compactness of the composite material cannot be ensured, the effect of blocking water vapor is not good as that of the original first blocking layer 10, although the trench 01 shown in fig. 2 may not penetrate the first barrier layer 10, the thickness of the portion that does not penetrate is thinner, cracks are more likely to occur, therefore, in order to effectively prevent the diffusion of cracks and effectively block the permeation of water vapor, in the array substrate provided in the embodiment of the present invention, as shown in fig. 3, the first barrier layer 20 includes a first sub-barrier layer 201 and a second sub-barrier layer 202 stacked one another, and the trench 01 includes a first trench 011 and a second trench 012; wherein the content of the first and second substances,
the first trenches 011 are located in the first sub-barrier layer 201, and the second trenches 012 are located in the second sub-barrier layer 202.
Preferably, in practice, the thickness of the first sub-barrier layer 201 is equal to the thickness of the second sub-barrier layer 202, which is 1/2 times the thickness of the first barrier layer 20.
In specific implementation, the material of the first barrier layer is an inorganic material, the first barrier layer is coated twice, and in order to completely block lateral diffusion of cracks, as shown in fig. 3, in the array substrate provided in the embodiment of the present invention, the first trench 011 penetrates through the first sub-barrier layer 201, and the second trench 012 penetrates through the second sub-barrier layer 202.
Further, in order to more effectively prevent the diffusion of cracks and block the permeation of water vapor in the implementation, in the array substrate provided by the embodiment of the present invention, as shown in fig. 3, the orthographic projections of the first grooves 011 on the first flexible substrate 10 and the orthographic projections of the second grooves 012 on the first flexible substrate 10 are alternately arranged. Like this each slot all does not run through whole first barrier layer 10, not only can effectually prevent the diffusion of crackle, more can obstruct the infiltration of steam effectively.
In particular, for convenience of manufacturing, in the array substrate provided in the embodiment of the present invention, as shown in fig. 3, the orthographic projections of the first trenches 011 on the first flexible substrate 10 and the orthographic projections of the second trenches 012 on the first flexible substrate 10 are alternately arranged at equal intervals. Thus, the first trenches 011 and the second trenches 012 are uniformly distributed in the first barrier layer 10, which is convenient for manufacturing.
Further, in order to ensure the flatness of the film layer and better block the permeation of water vapor in the specific implementation, in the array substrate provided in the embodiment of the present invention, as shown in fig. 2 and 3, the array substrate further includes: a second flexible substrate 30 on a side of the first barrier layer 20 facing away from the first flexible substrate 10, and a second barrier layer 40 on a side of the second flexible substrate 30 facing away from the first flexible substrate 10.
In a specific implementation, the material of the second flexible substrate is the same as that of the first flexible substrate, such as polyimide, but may also be other flexible materials, which is not limited herein.
In specific implementation, the material of the second barrier layer is the same as that of the first barrier layer, and is an inorganic material.
Based on the same inventive concept, an embodiment of the present invention further provides a method for manufacturing an array substrate, as shown in fig. 4, including:
s401, forming a pattern of a first barrier layer on a first flexible substrate;
s402, forming a plurality of independently arranged grooves in the first barrier layer;
and S403, filling the flexible material in the groove of the first barrier layer.
The method for manufacturing the array substrate shown in fig. 2 and 3 is described in detail by two specific embodiments.
The first embodiment is as follows: the manufacturing method of the array substrate shown in fig. 2 may include the following steps:
(1) forming a pattern of a first barrier layer 20 on the first flexible substrate 10, as shown in fig. 5 a;
(2) etching a plurality of trenches 01, which are independently arranged and penetrate through the first barrier layer 20, in the first barrier layer 20 by an etching process, as shown in fig. 5 b;
(3) filling the groove 01 of the first barrier layer 20 with a flexible hydrophobic material;
(4) forming a pattern of a second flexible substrate 30 on the first barrier layer 20, as shown in fig. 5 c;
(5) a second barrier layer 40 is patterned on the second flexible substrate 30 as shown in fig. 2.
The array substrate shown in fig. 2 provided by the embodiment of the present invention can be obtained through the steps (1) to (5) of the first embodiment.
Example two: the manufacturing method of the array substrate shown in fig. 3 may include the following steps:
(1') forming a pattern of a first sub-barrier layer 201 on the first flexible substrate 10, wherein the thickness of the first sub-barrier layer 201 is 1/2 times the thickness of the first barrier layer 20, as shown in FIG. 6 a;
(2') etching a plurality of first trenches 011, which are independently disposed and penetrate through the first sub-barrier layer 201, in the first sub-barrier layer 201 by an etching process, as shown in fig. 6 b;
(3') filling the first trench 011 of the first sub-barrier layer 201 with a flexible hydrophobic material;
(4') forming a pattern of a second sub-barrier layer 202 on the first sub-barrier layer 201, wherein the thickness of the second sub-barrier layer 202 is 1/2 times the thickness of the first barrier layer 20, as shown in fig. 6 c;
(5') a plurality of second trenches 012 which are independently formed and penetrate through the second sub-barrier layer 202 are etched in the second sub-barrier layer 202 through an etching process, and the second trenches 012 and the first trenches 011 are alternately arranged at equal intervals, as shown in fig. 6 d.
(6') filling the second moats 012 of the second sub-barrier layer 202 with a flexible hydrophobic material;
(7') A second flexible substrate 30 is patterned on the second sub-barrier layer 202, as shown in FIG. 6 e.
(8') A second barrier layer 40 is patterned on the second flexible substrate 30, as shown in FIG. 3.
The array substrate shown in fig. 3 provided by the embodiment of the present invention can be obtained through the steps (1 ') to (8') of the second embodiment.
Based on the same inventive concept, the embodiment of the invention further provides a display panel, which comprises any one of the array substrates provided by the embodiment of the invention. The principle of the display panel to solve the problem is similar to the array substrate, so the implementation of the display panel can be referred to the implementation of the array substrate, and repeated details are not repeated herein.
In specific implementation, the display panel provided in the embodiment of the present invention further includes an LTPS (Low Temperature Poly-silicon) back plate layer, an organic light emitting layer, a TFE (Thin Film Encapsulation) Encapsulation layer, and the like, which are sequentially stacked on the second barrier layer, and these Film layers are the same as those in the prior art and are not described in detail herein.
The array substrate, the manufacturing method thereof and the display panel provided by the embodiment of the invention comprise the following steps: the barrier layer comprises a first flexible substrate and a first barrier layer positioned on one side of the first flexible substrate; the first blocking layer comprises a plurality of independently arranged grooves, and flexible materials are filled in the grooves. According to the invention, the plurality of independently arranged groove structures are arranged in the first barrier layer, and the grooves are filled with the flexible material, so that when the first barrier layer cracks, the flexible material filled in the grooves can effectively buffer the transverse tensile stress at the tips of the cracks, and prevent the cracks from continuously diffusing, thereby avoiding the cracks from being enlarged and penetrated, and the flexible material can ensure the integrity of the filling of the first barrier layer and ensure the performance of the device, therefore, the array substrate provided by the embodiment of the invention can prolong the service life of the display device.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (4)
1. An array substrate, comprising: the barrier layer comprises a first flexible substrate and a first barrier layer positioned on one side of the first flexible substrate; wherein the content of the first and second substances,
the first barrier layer comprises a first sub-barrier layer and a second sub-barrier layer which are stacked, the first sub-barrier layer comprises a plurality of independently arranged first grooves, and the second sub-barrier layer comprises a plurality of independently arranged second grooves; flexible hydrophobic materials are filled in the first grooves and the second grooves;
the orthographic projection of the first grooves on the first flexible substrate and the orthographic projection of the second grooves on the first flexible substrate are alternately arranged at equal intervals, and the interval is larger than 0;
the array substrate further includes: the second flexible substrate is positioned on one side, away from the first flexible substrate, of the first barrier layer, and the second barrier layer is positioned on one side, away from the first flexible substrate, of the second flexible substrate.
2. The array substrate of claim 1, wherein the first trench penetrates through the first sub-barrier layer, and the second trench penetrates through the second sub-barrier layer.
3. A display panel comprising the array substrate according to claim 1 or 2.
4. A manufacturing method of an array substrate is characterized by comprising the following steps:
forming a pattern of a first sub-barrier layer on a first flexible substrate;
forming a plurality of independently disposed first trenches in the first sub-barrier layer;
filling flexible hydrophobic materials in the first grooves;
forming a pattern of a second sub-barrier layer on the first sub-barrier layer;
forming a plurality of independently disposed second trenches in the second sub-barrier layer; wherein the orthographic projection of the first grooves on the first flexible substrate and the orthographic projection of the second grooves on the first flexible substrate are alternately arranged at equal intervals, and the interval is larger than 0;
filling flexible hydrophobic materials in the second grooves;
forming a second flexible substrate on the second sub-barrier layer;
a second barrier layer is formed on the second flexible substrate.
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| CN201810078765.5A CN108281388B (en) | 2018-01-23 | 2018-01-23 | Array substrate, manufacturing method thereof and display panel |
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| CN108281388B true CN108281388B (en) | 2021-02-26 |
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| CN110085641A (en) * | 2019-04-25 | 2019-08-02 | 武汉华星光电半导体显示技术有限公司 | A kind of display panel and display device |
| CN110112292A (en) * | 2019-05-14 | 2019-08-09 | 武汉华星光电半导体显示技术有限公司 | Flexible display screen and preparation method thereof, smart machine |
| CN110165076B (en) * | 2019-05-27 | 2020-11-24 | 武汉华星光电半导体显示技术有限公司 | Organic light emitting diode display panel |
| CN110444116B (en) * | 2019-07-16 | 2021-07-06 | 武汉华星光电半导体显示技术有限公司 | Flexible substrate and preparation method thereof |
| CN111092169B (en) * | 2020-01-02 | 2022-10-18 | 云谷（固安）科技有限公司 | Display panel and display terminal |
| CN111146342A (en) * | 2020-01-22 | 2020-05-12 | 京东方科技集团股份有限公司 | Flexible substrate, display panel and display device |
| CN113285046B (en) * | 2021-05-21 | 2023-07-04 | 京东方科技集团股份有限公司 | Substrate, substrate manufacturing method and display panel |
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