CN110112292A - Flexible display screen and preparation method thereof, smart machine - Google Patents

Flexible display screen and preparation method thereof, smart machine Download PDF

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Publication number
CN110112292A
CN110112292A CN201910397992.9A CN201910397992A CN110112292A CN 110112292 A CN110112292 A CN 110112292A CN 201910397992 A CN201910397992 A CN 201910397992A CN 110112292 A CN110112292 A CN 110112292A
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CN
China
Prior art keywords
island
flexible substrate
stops
display screen
flexible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910397992.9A
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Chinese (zh)
Inventor
瞿峰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
Original Assignee
Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Application filed by Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd filed Critical Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
Priority to CN201910397992.9A priority Critical patent/CN110112292A/en
Publication of CN110112292A publication Critical patent/CN110112292A/en
Pending legal-status Critical Current

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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/84Passivation; Containers; Encapsulations
    • H10K50/844Encapsulations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K77/00Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
    • H10K77/10Substrates, e.g. flexible substrates
    • H10K77/111Flexible substrates

Abstract

The present invention provides a kind of flexible display screen and preparation method thereof, smart machine.The flexible display screen includes: flexible substrate lamination;Inorganic barrier layer, the inorganic barrier layer are located on the flexible substrate lamination;Shine film layer, and the luminous film layer is located on the inorganic barrier layer;Wherein, the flexible substrate lamination includes: the first flexible substrate;Multiple first stop island, and the multiple first blocking island is located in first flexible substrate;Second flexible substrate, second flexible substrate are located in first flexible substrate, and cover the multiple first and stop island;Multiple second stop island, and the multiple second blocking island is located in second flexible substrate;Third flexible substrate, the third flexible substrate are located in second flexible substrate, and cover the multiple second and stop island.

Description

Flexible display screen and preparation method thereof, smart machine
Technical field
The present invention relates to field of electronic display more particularly to a kind of flexible display screen and preparation method thereof, smart machine.
Background technique
Existing flexible display screen generally uses polyimides (PI) as substrate.Water and oxygen pass through substrate in order to prevent The defects of enter display screen inside, it will usually one layer of barrier layer is formed on the substrate.The barrier layer is using silica nitrogen The inorganic thin film of SiClx production.The flexibility and ductility of the inorganic thin film are poor, can be in outside in display screen bending Slight crack is generated under the action of tensile stress or compression.With the increase of slight crack on barrier layer, barrier of the barrier layer to water and oxygen Ability also declines therewith, and barrier layer is caused to be failed.The thickness for increasing barrier layer can alleviate this problem, but this will affect lining The flexibility at bottom.
Summary of the invention
The present invention provides a kind of flexible display screen and preparation method thereof, smart machine, to improve existing flexible display screen Substrate to the obstructing capacity of water and oxygen.
To solve the above problems, the present invention provides a kind of flexible display screens comprising:
Flexible substrate lamination;
Inorganic barrier layer, the inorganic barrier layer are located on the flexible substrate lamination;
Shine film layer, and the luminous film layer is located on the inorganic barrier layer;Wherein,
The flexible substrate lamination includes:
First flexible substrate;
Multiple first stop island, and the multiple first blocking island is located in first flexible substrate;
Second flexible substrate, second flexible substrate are located in first flexible substrate, and cover the multiple One stops island;
Multiple second stop island, and the multiple second blocking island is located in second flexible substrate;
Third flexible substrate, the third flexible substrate are located in second flexible substrate, and cover the multiple Two stop island.
One aspect according to the present invention, the multiple first stops island to be distributed in discrete shape, and any two are adjacent The first discrete barrier island do not contact.
One aspect according to the present invention, the multiple second stops island to be distributed in discrete shape, and any two are adjacent The second discrete barrier island do not contact.
One aspect according to the present invention, the multiple second stops view field of the island in the first flexible substrate The region for not stopping island to cover by the multiple first in first flexible substrate is completely covered.
One aspect according to the present invention, the multiple first stops island and multiple second to stop island having the same Shape and area.
One aspect according to the present invention, it is the multiple first stop island and it is multiple second stop island be triangle, Rectangle or regular polygon.
One aspect according to the present invention, the multiple first stops island and multiple second that island is stopped to be lamination knot Structure, the laminated construction include at least two layers of inorganic thin film.
The present invention also provides a kind of production methods of flexible display screen comprising:
Form the first flexible substrate;
It forms multiple first and stops island, the multiple first blocking island is located in first flexible substrate;
The second flexible substrate is formed, second flexible substrate is located in first flexible substrate, and covers described more A first stops island;
It forms multiple second and stops island, the multiple second blocking island is located in second flexible substrate;
Third flexible substrate is formed, the third flexible substrate is located in second flexible substrate, and covers described more A second stops island;
Inorganic barrier layer is formed, the inorganic barrier layer is located in the third flexible substrate;
The film layer that shines is formed, the luminous film layer is located on the inorganic barrier layer.
One aspect according to the present invention, the multiple second stops view field of the island in the first flexible substrate The region for not stopping island to cover by the multiple first in first flexible substrate is completely covered, the multiple first stops island It is formed with the multiple second blocking island using same mask plate.
The present invention also provides a kind of smart machines comprising foregoing flexible display screen.
Display screen provided by the invention has the flexible substrate being stacked, and has at least two layers between flexible substrate lamination The flexible substrate is completely covered in patterned barrier structure, the projection of the barrier structure over the substrate.It is patterned The stress that generates when barrier structure can clear up display screen bending, will not crack, improve the flexible substrate to water and The obstructing capacity of oxygen.
Detailed description of the invention
Fig. 1 is the partial schematic diagram of display screen in the prior art;
Fig. 2 is the partial schematic diagram of the display screen in a specific embodiment of the invention;
Fig. 3 is the top view on the first blocking island and the first flexible substrate in a specific embodiment of the invention;
Fig. 4 is the top view on the second blocking island and the second flexible substrate in a specific embodiment of the invention;
Fig. 5 is the top view on the first blocking island and the first flexible substrate in another specific embodiment of the invention;
Fig. 6 is the top view on the second blocking island and the second flexible substrate in another specific embodiment of the invention.
Specific embodiment
The explanation of following embodiment is referred to the additional illustration, the particular implementation that can be used to implement to illustrate the present invention Example.The direction term that the present invention is previously mentioned, such as [on], [under], [preceding], [rear], [left side], [right side], [interior], [outer], [side] Deng being only the direction with reference to annexed drawings.Therefore, the direction term used be to illustrate and understand the present invention, rather than to The limitation present invention.The similar unit of structure is with being given the same reference numerals in the figure.
The prior art is briefly described first.The part of display screen in the prior art is shown referring to Fig. 1, Fig. 1 Schematic diagram.In figure, the display screen is inorganic including the first substrate 110, the second substrate 120, the first inorganic barrier layer 130, second Barrier layer 140 and tft layer 150.Certainly, the display screen further includes its above tft layer 150 His functional film layer, such as light emitting structure, color film layer etc., are not shown in the figure.
In general, first substrate 110 is hard substrates, such as glass or metal, shelled after display screen completes From.Second substrate 120 is polyimides or the flexible substrate that other flexible organic materials are formed.Due to the difference of material, There is the first defect 210, first substrate 110 and the second lining between first inorganic barrier layer 130 and the second substrate 120 There is the second defect 220 between bottom 120.If forming slight crack in the first inorganic barrier layer 130 and the second inorganic barrier layer 140, Then water and oxygen can reach tft layer 150 by the slight crack, destroy its circuit function, reduce the display of display screen Effect and service life.
The present invention provides a kind of flexible display screen and preparation method thereof, smart machine.To existing flexible aobvious in the present invention The structure of flexible substrate in display screen is improved, to improve barrier of the substrate of existing flexible display screen to water and oxygen Ability.
Specifically, referring to fig. 2, the flexible display screen includes: flexible substrate lamination, inorganic barrier layer 130 and luminescent film Layer 150.Wherein, the inorganic barrier layer 130 is located on the flexible substrate lamination, and the luminous film layer 150 is located at the nothing On machine barrier layer 130.
In the present embodiment, the flexible substrate lamination includes the first flexible substrate 120c being stacked, multiple first resistances Keep off island 320, the second flexible substrate 120b, multiple second blocking islands 310 and third flexible substrate 120a.
Preferably, the first flexible substrate 120c, the second flexible substrate 120b and third flexible substrate 120a are formed Material is flexible polymer, such as polyimides.
Specifically, the hard substrate 110 for making flexible display screen is arranged in the first flexible substrate 120c, lead to Chang Suoshu hard substrate 110 is metal or glass.Interface tool between the first flexible substrate 120c and hard substrate 110 There is the second defect 220.
The multiple first blocking island 320 is located on the first flexible substrate 120c.Described first stops island 320 to be figure The inorganic thin film of shape, since the rigidity of inorganic thin film is higher, in the present embodiment, it is arranged the multiple first and stops Island 320 is distributed in discrete shape, and the first adjacent discrete barrier island of any two does not contact.Meanwhile it is described in order to further cut down First stops the rigidity on island 320, and inorganic thin film is avoided to crack, and the multiple first is arranged in the present embodiment and stops island 320 For laminated construction, the laminated construction includes at least two layers of inorganic thin film.
The second flexible substrate 120b is located on the first flexible substrate 120c, and covers the multiple first and stop Island 320.Referring to fig. 2, the second flexible substrate 120b can fill the gap between the multiple first blocking island 320, and With being a relatively flat surface, it is used to form the second blocking island 310.Described first stops island 320 and the first flexible substrate 120c Between have the first defect 210, and it is described first blocking island 320 can cover first defect 210, avoid water and oxygen from entering It invades.
The multiple second blocking island 310 is located on the second flexible substrate 120b.Described second stops island 310 to be figure The inorganic thin film of shape, since the rigidity of inorganic thin film is higher, in the present embodiment, it is arranged the multiple second and stops Island 310 is distributed in discrete shape, and the first adjacent discrete barrier island of any two does not contact.Meanwhile it is described in order to further cut down Second stops the rigidity on island 310, and inorganic thin film is avoided to crack, and the multiple second is arranged in the present embodiment and stops island 310 For laminated construction, the laminated construction includes at least two layers of inorganic thin film.
The third flexible substrate 120a is located on the second flexible substrate 120b, and covers the multiple second and stop Island 310.Referring to fig. 2, the third flexible substrate 120a can fill the gap between the multiple second blocking island 310, and With being a relatively flat surface, it is used to form the second blocking island 310.Described second stops island 310 and the second flexible substrate 120b Between have the first defect 210, and it is described second blocking island 310 can cover first defect 210, avoid water and oxygen from entering It invades.
In the present embodiment, in order to ensure the first blocking island 320 and the second blocking island 310 can cover the flexibility Issuable defect area in substrate, the multiple second stops view field of the island 310 on the first flexible substrate 120c The region not covered by the multiple first blocking island 320 on the first flexible substrate 120c is completely covered.
In the present embodiment, it is the multiple first blocking island 320 and it is multiple second blocking island 310 be of similar shape and Area stops island 320 and multiple second to stop island 310 so as to use same mask plate to form the multiple first.This Sample setting can simplify processing step, save the cost.
Preferably, in order to ensure the multiple first stops island 320 and multiple second to stop island 310 in the flexible substrate The flexible substrate lamination is completely covered in projection on lamination, and the multiple first stops island 320 and multiple second to stop island 310 For triangle, rectangle or regular polygon.
Specifically, referring to Fig. 3 and Fig. 4, Fig. 3 is first to stop island 320 and the in a specific embodiment of the invention The top view of one flexible substrate 120c, Fig. 4 are the second blocking island 310 and the second flexibility in a specific embodiment of the invention The top view of substrate 120b.In the present embodiment, the multiple first stops island 320 and multiple second that island 310 is stopped to be rectangle, And the length of a line of the length of a line of the rectangle equal to the second flexible substrate 120b.The multiple first resistance It keeps off island 320 and multiple second and stops the complementary setting in island 310.The multiple first blocking island 320 and multiple second blockings island 310 exist The first flexible substrate 120c is completely covered in projection on the first flexible substrate 120c.
Specifically, referring to figs. 5 and 6, Fig. 5 is the first blocking island and first in another specific embodiment of the invention The top view of flexible substrate;Fig. 6 is the second blocking island and the second flexible substrate in another specific embodiment of the invention Top view.In the present embodiment, the multiple first stops island 320 and multiple second that island 310 is stopped to be rectangle.Specifically, institute Stating multiple first stops island 320 and multiple second that island 310 is stopped to be square arranged in a crossed manner.The multiple first stops island 320 and multiple second stop the complementary setting in island 310.The multiple first stops island 320 and multiple second to stop island 310 described The first flexible substrate 120c is completely covered in projection on first flexible substrate 120c.Compared to rectangular in Fig. 3 and Fig. 4 Shape, multiple first in the present embodiment stop islands 320 and multiple second that each of island 310 is stopped to have smaller area, It is not likely to produce crackle.
Correspondingly, the present invention also provides a kind of production methods of flexible display screen comprising:
Form the first flexible substrate 120c;
It forms multiple first and stops island 320, the multiple first blocking island 320 is located at the first flexible substrate 120c On;
The second flexible substrate 120b is formed, the second flexible substrate 120b is located on the first flexible substrate 120c, And it covers the multiple first and stops island 320;
It forms multiple second and stops island 310, the multiple second blocking island 310 is located at the second flexible substrate 120b On;
Third flexible substrate 120a is formed, the third flexible substrate 120a is located on the second flexible substrate 120b, And it covers the multiple second and stops island 310;
Inorganic barrier layer 130 is formed, the inorganic barrier layer 130 is located on the third flexible substrate 120a;
The film layer 150 that shines is formed, the luminous film layer 150 is located on the inorganic barrier layer 130.
Preferably, the first flexible substrate 120c, the second flexible substrate 120b and third flexible substrate 120a are formed Material is flexible polymer, such as polyimides.
Specifically, the hard substrate 110 for making flexible display screen is arranged in the first flexible substrate 120c, lead to Chang Suoshu hard substrate 110 is metal or glass.Interface tool between the first flexible substrate 120c and hard substrate 110 There is the second defect 220.
The multiple first blocking island 320 is located on the first flexible substrate 120c.Described first stops island 320 to be figure The inorganic thin film of shape, since the rigidity of inorganic thin film is higher, in the present embodiment, it is arranged the multiple first and stops Island 320 is distributed in discrete shape, and the first adjacent discrete barrier island of any two does not contact.Meanwhile it is described in order to further cut down First stops the rigidity on island 320, and inorganic thin film is avoided to crack, and the multiple first is arranged in the present embodiment and stops island 320 For laminated construction, the laminated construction includes at least two layers of inorganic thin film.
The second flexible substrate 120b is located on the first flexible substrate 120c, and covers the multiple first and stop Island 320.Referring to fig. 2, the second flexible substrate 120b can fill the gap between the multiple first blocking island 320, and With being a relatively flat surface, it is used to form the second blocking island 310.Described first stops island 320 and the first flexible substrate 120c Between have the first defect 210, and it is described first blocking island 320 can cover first defect 210, avoid water and oxygen from entering It invades.
The multiple second blocking island 310 is located on the second flexible substrate 120b.Described second stops island 310 to be figure The inorganic thin film of shape, since the rigidity of inorganic thin film is higher, in the present embodiment, it is arranged the multiple second and stops Island 310 is distributed in discrete shape, and the first adjacent discrete barrier island of any two does not contact.Meanwhile it is described in order to further cut down Second stops the rigidity on island 310, and inorganic thin film is avoided to crack, and the multiple second is arranged in the present embodiment and stops island 310 For laminated construction, the laminated construction includes at least two layers of inorganic thin film.
The third flexible substrate 120a is located on the second flexible substrate 120b, and covers the multiple second and stop Island 310.Referring to fig. 2, the third flexible substrate 120a can fill the gap between the multiple second blocking island 310, and With being a relatively flat surface, it is used to form the second blocking island 310.Described second stops island 310 and the second flexible substrate 120b Between have the first defect 210, and it is described second blocking island 310 can cover first defect 210, avoid water and oxygen from entering It invades.
In the present embodiment, in order to ensure the first blocking island 320 and the second blocking island 310 can cover the flexibility Issuable defect area in substrate, the multiple second stops view field of the island 310 on the first flexible substrate 120c The region not covered by the multiple first blocking island 320 on the first flexible substrate 120c is completely covered.
In the present embodiment, it is the multiple first blocking island 320 and it is multiple second blocking island 310 be of similar shape and Area stops island 320 and multiple second to stop island 310 so as to use same mask plate to form the multiple first.This Sample setting can simplify processing step, save the cost.
Preferably, in order to ensure the multiple first stops island 320 and multiple second to stop island 310 in the flexible substrate The flexible substrate lamination is completely covered in projection on lamination, and the multiple first stops island 320 and multiple second to stop island 310 For triangle, rectangle or regular polygon.
Specifically, referring to Fig. 3 and Fig. 4, Fig. 3 is first to stop island 320 and the in a specific embodiment of the invention The top view of one flexible substrate 120c, Fig. 4 are the second blocking island 310 and the second flexibility in a specific embodiment of the invention The top view of substrate 120b.In the present embodiment, the multiple first stops island 320 and multiple second that island 310 is stopped to be rectangle, And the length of a line of the length of a line of the rectangle equal to the second flexible substrate 120b.The multiple first resistance It keeps off island 320 and multiple second and stops the complementary setting in island 310.The multiple first blocking island 320 and multiple second blockings island 310 exist The first flexible substrate 120c is completely covered in projection on the first flexible substrate 120c.
Specifically, referring to figs. 5 and 6, Fig. 5 is the first blocking island and first in another specific embodiment of the invention The top view of flexible substrate;Fig. 6 is the second blocking island and the second flexible substrate in another specific embodiment of the invention Top view.In the present embodiment, the multiple first stops island 320 and multiple second that island 310 is stopped to be rectangle.Specifically, institute Stating multiple first stops island 320 and multiple second that island 310 is stopped to be square arranged in a crossed manner.The multiple first stops island 320 and multiple second stop the complementary setting in island 310.The multiple first stops island 320 and multiple second to stop island 310 described The first flexible substrate 120c is completely covered in projection on first flexible substrate 120c.Compared to rectangular in Fig. 3 and Fig. 4 Shape, multiple first in the present embodiment stop islands 320 and multiple second that each of island 310 is stopped to have smaller area, It is not likely to produce crackle.
The present invention also provides a kind of smart machines comprising foregoing flexible display screen.
Display screen provided by the invention has the flexible substrate being stacked, and has at least two layers between flexible substrate lamination The flexible substrate is completely covered in patterned barrier structure, the projection of the barrier structure over the substrate.It is patterned The stress that generates when barrier structure can clear up display screen bending, will not crack, improve the flexible substrate to water and The obstructing capacity of oxygen.
In conclusion although the present invention has been disclosed above in the preferred embodiment, but above preferred embodiment is not to limit The system present invention, those skilled in the art can make various changes and profit without departing from the spirit and scope of the present invention Decorations, therefore protection scope of the present invention subjects to the scope of the claims.

Claims (10)

1. a kind of flexible display screen, which is characterized in that the flexible display screen includes:
Flexible substrate lamination;
Inorganic barrier layer, the inorganic barrier layer are located on the flexible substrate lamination;
Shine film layer, and the luminous film layer is located on the inorganic barrier layer;Wherein,
The flexible substrate lamination includes:
First flexible substrate;
Multiple first stop island, and the multiple first blocking island is located in first flexible substrate;
Second flexible substrate, second flexible substrate are located in first flexible substrate, and cover the multiple first resistance Keep off island;
Multiple second stop island, and the multiple second blocking island is located in second flexible substrate;
Third flexible substrate, the third flexible substrate are located in second flexible substrate, and cover the multiple second resistance Keep off island.
2. flexible display screen according to claim 1, which is characterized in that the multiple first stops island in discrete shape point Cloth, the first adjacent discrete barrier island of any two do not contact.
3. flexible display screen according to claim 2, which is characterized in that the multiple second stops island in discrete shape point Cloth, the second adjacent discrete barrier island of any two do not contact.
4. flexible display screen according to claim 3, which is characterized in that the multiple second stops island in the first flexible liner The region for not stopping island to cover by the multiple first in first flexible substrate is completely covered in view field on bottom.
5. flexible display screen according to claim 1, which is characterized in that the multiple first stops island and multiple second resistances Gear island has the same shape and area.
6. flexible display screen according to claim 4, which is characterized in that the multiple first stops island and multiple second resistances Gear island is triangle, rectangle or regular polygon.
7. flexible display screen according to claim 1, which is characterized in that the multiple first stops island and multiple second resistances Gear island is laminated construction, and the laminated construction includes at least two layers of inorganic thin film.
8. a kind of production method of flexible display screen, which is characterized in that this method comprises:
Form the first flexible substrate;
It forms multiple first and stops island, the multiple first blocking island is located in first flexible substrate;
The second flexible substrate is formed, second flexible substrate is located in first flexible substrate, and covers the multiple One stops island;
It forms multiple second and stops island, the multiple second blocking island is located in second flexible substrate;
Third flexible substrate is formed, the third flexible substrate is located in second flexible substrate, and covers the multiple the Two stop island;
Inorganic barrier layer is formed, the inorganic barrier layer is located in the third flexible substrate;
The film layer that shines is formed, the luminous film layer is located on the inorganic barrier layer.
9. the production method of flexible display screen according to claim 8, which is characterized in that the multiple second blocking island exists View field in first flexible substrate, which is completely covered in first flexible substrate, does not stop island covering by the multiple first Region, the multiple first blocking island and the multiple second blocking island are formed using same mask plate.
10. a kind of smart machine, which is characterized in that the smart machine includes soft described in any one of claim 1-7 Property display screen.
CN201910397992.9A 2019-05-14 2019-05-14 Flexible display screen and preparation method thereof, smart machine Pending CN110112292A (en)

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Application Number Priority Date Filing Date Title
CN201910397992.9A CN110112292A (en) 2019-05-14 2019-05-14 Flexible display screen and preparation method thereof, smart machine

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Citations (9)

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CN104637438A (en) * 2013-11-06 2015-05-20 三星显示有限公司 Flexible display and manufacturing method thereof
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CN106876612A (en) * 2017-02-23 2017-06-20 深圳市华星光电技术有限公司 A kind of encapsulating structure of OLED and preparation method thereof, metal mask plate
CN108281388A (en) * 2018-01-23 2018-07-13 京东方科技集团股份有限公司 Array substrate, its production method and display panel
CN108470738A (en) * 2018-04-03 2018-08-31 友达光电股份有限公司 Flexible display device and preparation method thereof
CN109449290A (en) * 2018-09-29 2019-03-08 云谷(固安)科技有限公司 Flexible base board and preparation method thereof, array substrate, display panel and display device
CN109585678A (en) * 2018-11-30 2019-04-05 云谷(固安)科技有限公司 Encapsulating structure, the display device including encapsulating structure and encapsulating structure preparation method

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100151209A1 (en) * 2008-12-15 2010-06-17 Industrial Technology Research Institute Organic/inorganic multi-layered gas barrier film
CN104637438A (en) * 2013-11-06 2015-05-20 三星显示有限公司 Flexible display and manufacturing method thereof
CN104392901A (en) * 2014-10-28 2015-03-04 京东方科技集团股份有限公司 Flexible underlying substrate and manufacturing method thereof
CN105702624A (en) * 2016-03-30 2016-06-22 武汉华星光电技术有限公司 Laminated flexible substrate and production method
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CN109449290A (en) * 2018-09-29 2019-03-08 云谷(固安)科技有限公司 Flexible base board and preparation method thereof, array substrate, display panel and display device
CN109585678A (en) * 2018-11-30 2019-04-05 云谷(固安)科技有限公司 Encapsulating structure, the display device including encapsulating structure and encapsulating structure preparation method

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