CN108261179A - Micro-optical is popped one's head in - Google Patents

Micro-optical is popped one's head in Download PDF

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Publication number
CN108261179A
CN108261179A CN201810030801.0A CN201810030801A CN108261179A CN 108261179 A CN108261179 A CN 108261179A CN 201810030801 A CN201810030801 A CN 201810030801A CN 108261179 A CN108261179 A CN 108261179A
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CN
China
Prior art keywords
laser
optical
dichroscope
micro
scanner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810030801.0A
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Chinese (zh)
Inventor
不公告发明人
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Suzhou yibolun Photoelectric Instrument Co.,Ltd.
Original Assignee
NYMPH (TIANJIN) TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to CN201810030801.0A priority Critical patent/CN108261179A/en
Publication of CN108261179A publication Critical patent/CN108261179A/en
Pending legal-status Critical Current

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    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/0059Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
    • A61B5/0062Arrangements for scanning
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/0059Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
    • A61B5/0082Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence adapted for particular medical purposes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B23/00Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
    • G02B23/24Instruments or systems for viewing the inside of hollow bodies, e.g. fibrescopes
    • G02B23/2407Optical details
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B23/00Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
    • G02B23/24Instruments or systems for viewing the inside of hollow bodies, e.g. fibrescopes
    • G02B23/2407Optical details
    • G02B23/2461Illumination
    • G02B23/2469Illumination using optical fibres

Abstract

The present invention relates to optical image technology field, there are preponderances for existing miniature probe by the present invention, and volume is excessive, can not be applied to the technical problems such as clinic, provide a kind of micro-optical probe, including:Condenser lens, for collecting non linear optical signal;Collimation lens, for collimating the aberration between the laser and reduction different frequency laser that laser input optical fibre exports and exporting laser signal;Dichroscope scanner, for separating and exporting the non linear optical signal laser and non linear optical signal, the incidence angle angle for being additionally operable to change laser allows laser to carry out two-dimensional scan to the plane of biopsy sample interior tissue;Object lens, for the laser from dichroscope scanner to be converged to inside biopsy sample, biopsy sample to be excited to generate non linear optical signal and for output nonlinear optical signalling.

Description

Micro-optical is popped one's head in
Technical field
The present invention relates to optical image technology fields, and in particular to a kind of micro-optical probe.
Background technology
For research subcellular, cell, loop and the processing of higher level neuronal messages on the freely animal of activity Basic principle, technology of the generally use photon microscope as non-invasive optical Brian Imaging.In general, desk-top double light are being used During sub- microscope, the head of biopsy sample (studied animal) needs to be fixed always, and biopsy sample is during the experiment always It is under physical constraint and emotional stress (frightened, unknown), for behavior of the biopsy sample in the case of freely activity It cannot effectively be studied.
To solve the above problems, China Patent Publication No. is a kind of miniature to be disclosed in the patent document of CN107049247A Two-photon microscopic imaging device and method, biopsy sample behavior imaging system, the miniature two-photon microscopic imaging device include: Femtosecond pulse laser is used for the laser that generation wavelength is 920 nanometers;Femtosecond pulse modulator is used to receive institute The laser of femtosecond pulse laser output is stated, and the pulse of prechirp compensation laser is widened to preset value, and export;Miniature spy Head, the miniature probe include:Scanning imagery part, should for receiving the laser of the femtosecond pulse modulator output Laser is scanned the tissue inside biopsy sample, the biopsy sample to be excited to generate fluorescence signal;With laser output light Fibre, is used to receive the fluorescence signal of the scanning imagery part output, and is exported.The miniature two-photon is micro- Imaging device can carry out stable observation in natural physiological environment to the freely dendron of the animal of activity and dendritic spines activity.
For said program during specifically used, miniature probe and support bracket fastened total weight are about that 2.15g (is recorded in 0035 section of the specification of above-mentioned file), miniature probe includes micro electromechanical scanning instrument (MEMS), object lens, scanning lens, collimation Device, dichroscope and collection len (record for referring to the attached drawing 1 of 0071-0077 sections of this document and this document), image-forming principle For, micro electromechanical scanning instrument (MEMS) for by way of changing laser light incident angle angle rotation by laser (920 nano wave lengths ) two-dimensional scan is carried out to the plane of biopsy sample interior tissue.Object lens are used to assemble from the laser of micro electromechanical scanning instrument To inside the biopsy sample, biopsy sample to be excited to generate the fluorescence signal and for exporting the fluorescence signal.It sweeps It retouches in the light path that lens are arranged between micro electromechanical scanning instrument and object lens, for will be caused by micro electromechanical scanning instrument two-dimensional scan The laser of angle change is converted to the laser of change in location.Collimator arrangement laser input optical fibre and micro electromechanical scanning instrument it Between, for collimating the aberration between laser that laser input optical fibre export and reduction different frequency laser, with scanning Lens match the image of object lens jointly.Dichroscope is located between scanning lens and object lens, for laser and fluorescence signal to be divided Open and export fluorescence signal.
In said program, the structure of miniature probe still has optimizable space, and weight also can continue to optimize, Its volume also can continue to optimize, and reduce weight of the biopsy sample because being not suitable with miniature probe in the course of the research, occur abnormal Behavior and the experimental error brought.
In addition, above-mentioned miniature probe also there are problems that be used in combination with commercial endoscope.Main cause is, can not Meet the bending diameter (20mm-40mm) of commercial endoscope, the defects of detecting unmarked signal can not be met.Specially due to this It needs to set tube lens and scanning lens on the object lens of miniature probe, causing volume that can not further reduce (can not be contracted to 5mm*5mm*5mm), and due to its mainly for the injection biopsy sample that has fluorescent dye be detected, in commercial endoscope In use, clinic cannot cause it that can not be applied to clinic patient injection fluorescent dye.
Invention content
There are preponderances for existing miniature probe by the present invention, and volume is excessive, can not be applied to clinical technology and ask Topic provides a kind of micro-optical probe.
Base case provided by the invention is:Micro-optical is popped one's head in, including:
Condenser lens, for collecting non linear optical signal;
Collimation lens, for collimating between the laser and reduction different frequency laser that laser input optical fibre exports Aberration simultaneously exports laser signal.Laser input optical fibre is polarization maintaining optical fibre or photonic crystal fiber.
Dichroscope scanner is believed for separating and exporting the nonlinear optics by laser and non linear optical signal Number, the incidence angle angle for being additionally operable to change laser allows laser to carry out two-dimensional scan to the plane of biopsy sample interior tissue;
Object lens, for the laser from dichroscope scanner to be converged to inside biopsy sample, to excite biopsy sample Generate non linear optical signal and for output nonlinear optical signalling.
The operation principle and advantage of the present invention is:In the present solution, laser is exported to collimation thoroughly from laser input optical fibre Mirror, collimation lens is to receiving laser alignment into directional light (collimation processing), and the aberration reduced between different frequency laser (disappears Aberration processing), then laser is exported to dichroscope scanner.Dichroscope scanner is by the laser reflection received to object Mirror, dichroscope scanner also as a kind of mems device (MEMS), can change the incidence angle angle of laser, realize Laser is allowed to carry out the purpose of two-dimensional scan to the plane of biopsy sample interior tissue.
By being entered in object lens after dichroscope scanner, object lens will converge laser from the laser of dichroscope scanner Gather inside biopsy sample, biopsy sample to be excited to generate non linear optical signal.Nonlinear optics letter is generated in biopsy sample After number, object lens are additionally operable to collect non linear optical signal and export to dichroscope scanner, non linear optical signal through two to To condenser lens, condenser lens can effectively collect non linear optical signal for output after the transmission of Look mirror scanner, output To laser output optical fibre, and finally it is transmitted to external optoelectronic detecting device.
In terms of for moving animals Brian Imaging, this programme is not provided with scanning lens (Scan lens) and tube lens (Tube lens), by the way that dichroscope scanner will be used to substitute dichroscope and micro electromechanical scanning instrument in the prior art, to reach To under the premise of image quality is met, optimize internal structure, reduce the purpose of own wt.In the weight of micro-optical probe Under the premise of reduction, in the data acquisition for carrying out biopsy sample, especially in terms of moving animals Brian Imaging is carried out, it is more convenient It is worn on the head of animal, reduces influence of the weight to animal activity, avoid detection error.
In terms of for being used in combination with commercial endoscope, due in Clinical practice, it is impossible to which patient injection fluorescence is contaminated Material, therefore, only can be by two-photon excitation autofluorescence, and second harmonic occurs and 3 kinds of nothings of coherent anti-stokes raman scattering The mode of marking signal is applied to clinic.Specifically, two-photon excitation autofluorescence TPEAF (incident 2 excitation photons, outgoing The fluorescent photon of one endogenous cellular fluorogen), SHG occurs for second harmonic, and (an incident excitation photon, is emitted a wavelength Photon for 1/2), (3 photons of incident 2 wavelength are emitted a wavelength and meet coherent anti-stokes raman scattering CARS The photon of 2 specific Raman frequency shifts of incident wavelength).The imaging mode of above-mentioned 3 kinds of unmarked signals, this programme can be by changing The wavelength for becoming the laser in laser light incident optical fiber and the dichroscope scanner that different parameters are configured are realized.And due to we Case is not provided with scanning lens (Scan lens) and tube lens (Tube lens), and it is whole can effectively to reduce micro-optical probe The volume of body, to achieve the purpose that clinically to be used in combination with commercial endoscope.And in the present solution, since laser inputs The wavelength of the non linear optical signal difference that the laser signal of optical fiber input is received with condenser lens is (i.e. with several different waves It is long), there can be achromatic effect in itself by collimation lens, to meet basic imaging demand.
It is the development of practical application actuation techniques now, if without specific application demand, engineer finds out Variants (mutation, deformation), however can be considered not using at all, it would not also continue development and go down.Existing MEMS bis- The engineer of dimension scanner is electronic engineering (micro fabrication) or mechanical engineering (structure design) class origin, they are in MEMS bis- The structure design and technique realization for tieing up scanner have excellent technical capability, are more especially transferred to civilian work from computer chip manufacture The engineer to come over, they play huge impetus to the realization and progress of MEMS two-dimensional scanner technologies.
For being the engineer of MEMS two-dimensional scanners, there is no demand and power to go to change existing MEMS two dimensions The structure of scanner.Now, engineer is to improve sweep speed to the improved direction of MEMS two-dimensional scanners.For engineer For most of researchers, if the problem of meeting the weight and volume for reducing micro-optical probe, due to MEMS two dimensions The weight and volume of scanner is influenced by the material of chip processing procedure, reflecting optics, is further reduced MEMS two dimensions now and is swept The technology for retouching the weight and volume of device is extremely difficult, has basically been equivalent to and has reached technical bottleneck, this to engineer and Speech, micro-optical probe weight and volume be also equal to meet technical bottleneck (can not be based on it is original design be improved ).
Micro-optical of the present invention probe, by the way that dichroscope scanner will be used to substitute dichroscope in the prior art and micro- Electromechanical scanner, and scanning lens (Scan lens) and tube lens (Tube lens) are omitted, meeting image quality Under the premise of, optimize internal structure, reduce the purpose of own wt.When meeting progress moving animals Brian Imaging, micro-optical is visited Small, light-weight requirement.And collimation lens and object lens are respectively provided with achromatic function in this programme, without to disease People injects fluorescent dye, you can existing commercialization endoscope is used in combination.
Further, object lens correct object lens for infinity.
The needs of scanning imagery are met by the light of object lens in this way with collimated light beam directive infinity.
Further, speculum is further included, speculum is arranged in the light path between collimation lens and dichroscope scanner, For adjusting the angle of collimation lens output laser and reflexing to dichroscope scanner.
Adding in the design of speculum can avoid laser input optical fibre from being directly output on dichroscope scanner, Ke Yifang Just the incidence angle angle of the laser to being input on dichroscope scanner is adjusted, convenient for imaging.
Further, for speculum for light path of transferring, material is optical glass or high molecular polymer, and speculum includes transmission Face and reflecting surface, transmission plane have the optical coating of enhancing transmissivity, and reflecting surface has the optical coating of enhancing reflectivity.
Such design can reach preferable reflecting effect.
Further, dichroscope scanner includes dichroic eyeglass and does not influence the micro electronmechanical of non linear optical signal transmission Driver, dichroic eyeglass are covered on microcomputer electric drive, and the automatically controlled face of microcomputer can drive dichroic eyeglass to change angle.
Existing micro electromechanical scanning instrument (MEMS) includes reflecting optics and microcomputer electric drive, and reflecting optics are covered in microcomputer On electric drive, wherein, reflecting optics have several, and microcomputer electric drive can drive reflecting optics to change angle respectively.At this In scheme, reflecting optics are substituted, and microcomputer electric drive does not interfere with nonlinear optical in this programme with dichroic eyeglass Learn the transmission of signal.Its dichroscope piece i.e. play the role of dichroscope of the prior art, also reached allow it is micro electronmechanical Driver changes the effect of laser reflection angle, but also can reach reduction number of elements so that entire micro-optical probe Volume smaller, weight are lighter.By way of above-mentioned assembling, it can realize that low cost gets dichroscope scanner.
Further, dichroscope scanner includes dichroscope and microcomputer electric drive, and dichroscope is located at micro electronmechanical drive On dynamic device, microcomputer electric drive can drive dichroic eyeglass to change angle, and the back side of the wafer of microcomputer electric drive is reacted with deep Ion etching technology empty be useful for non linear optical signal transmitted through beam orifice, beam orifice is located at the dichroscope back side.
Above-mentioned design can quickly obtain more mature product.
Further, laser input optical fibre is further included, the laser input optical fibre is multimode fibre or fiber optic bundle.
When such design disclosure satisfy that this programme is used cooperatively with commercial endoscope, need to input the laser of different wave length Purpose.This programme is easily facilitated to be used cooperatively with commercial endoscope.
Further, laser output optical fibre is further included, the laser output optical fibre is multimode fibre or fiber optic bundle.
Such design can be convenient for the collection of non linear optical signal, meet imaging needs.
Further, shell is further included, sealing structure of the shell for the material of high molecular polymer, condenser lens, collimation are saturating Mirror, dichroscope scanner, object lens and speculum are mounted in shell.
Such design can wrap up other elements into intimate, waterproof, the surface of bio-compatible be provided, to biopsy sample (or human body) does not generate any damage.
Description of the drawings
Fig. 1 is the schematic diagram of micro-optical probe embodiments of the present invention;
Fig. 2 is the structure diagram of Fig. 1;
Fig. 3 is the status diagram being mounted on the device in Fig. 1 on mouse;
Fig. 4 is the structure diagram of dichroscope scanner;
Fig. 5 is the view at another visual angle of Fig. 4;
Fig. 6 is the front elevational view that dichroscope scanner is produced by the way of deep reactive ion etch;
Fig. 7 is the structure diagram when present invention is used cooperatively with commercial endoscope.
Specific embodiment
Below by the further details of explanation of specific embodiment:
Reference numeral in Figure of description includes:Collimation lens 10, speculum 20, dichroscope scanner 30, object lens 40th, condenser lens 50, laser input optical fibre 60, laser output optical fibre 61, shell 70, substrate 11, driver 22, dichroscope 33。
Embodiment is basic as shown in attached drawing 1, Fig. 2:Micro-optical is popped one's head in, and is included successively according to light path:It is collimation lens 10, anti- Mirror 20, dichroscope scanner 30, object lens 40 and condenser lens 50 are penetrated, object lens 40 are non-spherical lens, and collimation lens 10 is used Believe in collimating the laser exported from laser input optical fibre 60 and reducing the aberration between different frequency laser and export laser Number to speculum 20.The object lens 40 of non-spherical lens, radius of curvature changes with central shaft, to improve optical quality, subtracts Few optical element, reduces design cost.
Speculum 20 is used to adjust the angle of the output laser of collimation lens 10 and reflexes to dichroscope scanner 30.At it In his embodiment, speculum 20 can be multi-disc, and for translating light path, material is optical glass or high molecular polymer, is transmitted There is the optical coating of enhancing transmissivity in face, and reflecting surface has the optical coating of enhancing reflectivity;
Dichroscope scanner 30 is used to separate and export the nonlinear optics by laser and non linear optical signal Signal, the incidence angle angle for being additionally operable to change laser allow laser to carry out two-dimensional scan to the plane of biopsy sample interior tissue, i.e., Dichroic scanning mirror exports laser signal to object lens 40, and object lens 40 are used to assemble from the laser of dichroscope scanner 30 To inside biopsy sample, biopsy sample to be excited to generate non linear optical signal, then object lens 40 receive simultaneously unbalanced input light Signal is learned to dichroic scanner, non linear optical signal is transmitted through condenser lens 50, condenser lens 50 from dichroic scanner For effectively collecting non linear optical signal, wherein, laser input optical fibre 60 is multimode fibre;
Specific dichroscope scanner 30 includes dichroscope 33 and does not influence the micro- of non linear optical signal transmission Electromechanical driver 22, dichroscope 33 are covered on microcomputer electric drive 22, and the automatically controlled face of microcomputer can drive dichroscope 33 change angles;
Further include shell 70, sealing structure of the shell 70 for the material of high molecular polymer, condenser lens 50, collimation lens 10th, dichroscope scanner 30, object lens 40 and speculum 20 are mounted in shell 70.
When specifically used:The collimation lens 10 of the present embodiment use achromatism collimation lens 10 (#65-286, Edmund Optics Inc., Barrington, NJ, USA;Diameter:2mm, equivalent focal length:3mm, special near infrared light), it can Collimation output laser simultaneously reduces the aberration between the different frequency component of femto-second laser, is conducive to improve efficiency of transmission in this way (50% is up to from lasing light emitter to sample), light beam focuses on and launching efficiency.Can certainly be achromat-design, design wavelength is 700nm can be 817nm and 1064nm, but be not limited to the two wavelength, material is to arbitrary 2 wavelength between 1600nm Optical glass or high molecular polymer, there is the optical coating of enhancing transmissivity on surface, for the collimation of ultrashort pulse.
Object lens 40, a diameter of 1mm of dichroscope scanner 30, package dimension are 5 × 5mm2, and the first resonant frequency is 28kHz, greatest optical scanning angle are ± 15 degree, and it is 400x400um2's that support frame sign, which is 512 × 512 maximums field of view, 50Hz is imaged, to realize that video rate image acquires.(our own index) particularly, is substituted existing with dichroscope 33 There is the speculum 20 on micro electromechanical scanning instrument.In another embodiment, it is 700nm that object lens 40, which are achromat-design design wavelength, To arbitrary 2 wavelength between 1600nm, usually 817nm and 1064nm, but be not limited to the two wavelength, material is optics glass Glass or high molecular polymer, surface have enhancing transmissivity optical coating, structure can be traditional refractor, gradient refractive index Rate lens or the gradient-index lens with curved profile for incident ultrafast laser to be focused in external sample, swash Non linear optical signal is sent out, and transmitting optical signal is collected in a manner of falling and penetrate formula detection.
In another embodiment, condenser lens 50 is achromat-design, and design wavelength is 350nm to appointing between 700nm Anticipate 2 wavelength, usually 408nm and 633nm, but be not limited to the two wavelength, material be optical glass or high molecular polymer, There is the optical coating of enhancing transmissivity on surface, for being focused on the non linear optical signal received and being coupled into collection optical fiber.
Specific laser input optical fibre 60 is photonic crystal fiber (Photonic Crystal Fiber) or polarization maintaining optical fibre, Design wavelength is 700nm to the arbitrary wavelength between 1600nm, and material is optical glass, quartz, plastics or high molecular polymer, It is used for transmission the ultrashort pulse of external excitation light source generation.
Dichroscope scanner 30 be biplate single-shaft configuration or monolithic cross-compound arrangement, eyeglass be dichroscope 33, two to 33 sheet material of Look mirror is optical glass or high molecular polymer, for the ultrashort pulse that reflection wavelength is 700nm-1600nm And the transmitting optical signal that transmission peak wavelength is 350nm-700nm.
Object lens 40 are achromat-design, and design wavelength is 700nm to arbitrary 2 wavelength between 1600nm, usually 817nm and 1064nm, but the two wavelength are not limited to, material is optical glass or high molecular polymer, and surface has enhancing to transmit The optical coating of rate, structure can be traditional refractor, gradient-index lens or the gradient refractive index with curved profile Rate lens for incident ultrafast laser to be focused on biopsy sample (or human body) surface, inspire non linear optical signal.
Speculum 20 is in 45 degree of placements, for ultrashort pulse (laser signal) to be reflected 90 degree to dichroscope scanning Device 30.
In the present embodiment, the volume of final shell 70 (i.e. entire micro-optical probe) is less than 5mm*5mm*5mm, weight About 1.76g less than the outer diameter (9mm-11mm) of commercial endoscope, can be directly used cooperatively with commercial endoscope.And combination makes With facilitating, in addition, the field obscuration very little to commercial endoscope.In addition, condenser lens 50 believes nonlinear optics in the present embodiment It number feeds back in external photoelectronic imaging equipment, external photoelectronic imaging equipment is by multiple photomultiplier detectors, multi-disc dichroic Mirror 33, multiple optical filters and multi-disc condenser lens 50 form, and the transmitting optical signal transmitted for receiving collection optical fiber is simultaneously completed Opto-electronic conversion supplies computer disposal.When being used cooperatively with commercial endoscope, due to laser input optical fibre 60 and laser output light Fibre 61 is to need to be to reduce installation volume, laser input optical fibre 60 and laser output optical fibre 61 to pop one's head in micro-optical as far as possible On position be sufficiently close to, therefore in the present embodiment be provided with multiple speculums 20 (as shown in Figure 7), for adjusting light path, It is used cooperatively with facilitating with commercial endoscope.
When specifically used, the present invention can be installed on to the crown (as shown in Figure 3) of mouse.In other embodiments, It can be installed on the crown of other animals, such as marmoset, rabbit.
In the present embodiment, a kind of dichroscope scanner 30 (as shown in Figure 4, Figure 5) is also disclosed, including substrate 11, is driven Dynamic device 22 and minute surface, driver 22 are fixed on substrate 11, and driver 22 is used to change according to instruction the angle of minute surface, the mirror Face includes several dichroscopes 33, and dichroscope 33 includes superthin section, is coated with dichroic films on the superthin section, described two to Look mirror 33 passes through for reflection laser and for non linear optical signal, and the driver 22 includes several for nonlinear optics Signal transmitted through mirror body, dichroscope 33 is individually fixed in mirror body, and mirror body is annular, and dichroscope 33 is fixed on mirror body Surface, the material of the substrate 11 is high molecular polymer, and the shape of the minute surface is disc.
When specifically used:Certainly in other examples, it is also an option that existing micro electromechanical scanning instrument (MEMS), is incited somebody to action Its 20 face of speculum replaces with dichroscope 33, and passes through deeply instead with the back side of 33 corresponding position of dichroscope on substrate 11 Ion etching technology etching is answered to empty (as shown in Figure 6).The driver 22 of existing two-dimensional scan device is usually to use Electrostatic drive, the present embodiment is designed using existing driver 22 in the design of 22 this block of driver, specifically can be with Using the Surface-Micromachining SOIMUMPs of MEMSCAP companies.The technology is the prior art, and details are not described herein, the application In, distinctive points once are described emphatically.
First point, in the present embodiment, (by SOIMUMPs techniques, the second layer is more for the selected as dichroscope 33 of minute surface 20 face of speculum that crystal silicon and second layer phosphorosilicate glass and third layer polysilicon are formed replaces with the super of plating dichroic polarizing coating Thin slice), i.e., selection is speculum 20 in the prior art, the dichroscope 33 selected in the present embodiment.Second point, about substrate 11 Transmittance, due in actual use, being that requirement non linear optical signal can be completely from two-dimensional scanner transmitted through therefore base The selection of piece 11 is particularly important, and the behind of dichroscope 33 is engraved structure (by deep reaction ion etching technology, by substrate 11 Behind hollow out, set annular mirror body), achieved the effect that convenient for non linear optical signal transmit.
Specifically, in the hollow out design about substrate 11, the substrate 11 of hollow out can be selected to be used as driver 22 Support construction, driver 22 select annular driver 22, the both ends of driver 22 set torsion beam, such mode It can realize the effect transmitted convenient for non linear optical signal.
Above-described is only the embodiment of the present invention, and the common sense such as well known concrete structure and characteristic are not made herein in scheme Excessive description, technical field that the present invention belongs to is all before one skilled in the art know the applying date or priority date Ordinary technical knowledge can know the prior art all in the field, and with using routine experiment hand before the date The ability of section, one skilled in the art with reference to self-ability can improve and implement under the enlightenment that the application provides This programme, some typical known features or known method should not implement the application as one skilled in the art Obstacle.It should be pointed out that for those skilled in the art, without departing from the structure of the invention, it can also make Go out several modifications and improvements, these should also be considered as protection scope of the present invention, these all do not interfere with the effect that the present invention is implemented Fruit and practical applicability.The scope of protection required by this application should be based on the content of the claims, the tool in specification The records such as body embodiment can be used for explaining the content of claim.

Claims (9)

1. micro-optical is popped one's head in, including:
Condenser lens, for collecting non linear optical signal;
Collimation lens, for collimating the aberration between the laser and reduction different frequency laser that laser input optical fibre exports And export laser signal;
It is characterized in that, it further includes:
Dichroscope scanner, for separating and exporting the non linear optical signal by laser and non linear optical signal, The incidence angle angle for being additionally operable to change laser allows laser to carry out two-dimensional scan to the plane of biopsy sample interior tissue;
Object lens, for the laser from dichroscope scanner to be converged to inside biopsy sample, biopsy sample to be excited to generate Non linear optical signal and for output nonlinear optical signalling.
2. micro-optical probe according to claim 1, it is characterised in that:Object lens correct object lens for infinity.
3. micro-optical probe according to claim 1, it is characterised in that:Speculum is further included, speculum is arranged on standard Directly in light path between lens and dichroscope scanner, for adjust the angle of collimation lens output laser and reflex to two to Look mirror scanner.
4. micro-optical probe according to claim 3, it is characterised in that:For speculum for light path of transferring, material is light Glass or high molecular polymer are learned, speculum includes transmission plane and reflecting surface, and transmission plane has the optical coating of enhancing transmissivity, instead There is the optical coating of enhancing reflectivity in the face of penetrating.
5. it is popped one's head according to claim 1-4 any one of them micro-optical, it is characterised in that:Dichroscope scanner includes two To Look mirror piece and the microcomputer electric drive for the annular for not influencing non linear optical signal transmission, the dichroic eyeglass is covered in micro- On electromechanical driver, the microcomputer electric drive can drive dichroic eyeglass to change angle.
6. it is popped one's head according to claim 1-4 any one of them micro-optical, it is characterised in that:Dichroscope scanner includes two To Look mirror and microcomputer electric drive, dichroscope is located on microcomputer electric drive, and microcomputer electric drive can drive dichroic eyeglass Change angle, the back side of the wafer of microcomputer electric drive is emptied with deep reactive ion etch technology is useful for non linear optical signal Transmitted through beam orifice, beam orifice is located at the dichroscope back side.
7. it is popped one's head according to claim 1-4 any one of them micro-optical, it is characterised in that:Laser input optical fibre is further included, The laser input optical fibre is polarization maintaining optical fibre or photonic crystal fiber.
8. it is popped one's head according to claim 1-4 any one of them micro-optical, it is characterised in that:Laser output optical fibre is further included, The laser output optical fibre is multimode fibre or fiber optic bundle.
9. it is popped one's head according to claim 1-4 any one of them micro-optical, it is characterised in that:Shell is further included, shell is height The sealing structure of the material of Molecularly Imprinted Polymer, condenser lens, collimation lens, dichroscope scanner, object lens and speculum are equal It is installed in shell.
CN201810030801.0A 2018-01-12 2018-01-12 Micro-optical is popped one's head in Pending CN108261179A (en)

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Cited By (4)

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Publication number Priority date Publication date Assignee Title
CN109662696A (en) * 2019-01-31 2019-04-23 北京超维景生物科技有限公司 The positioning formula adsorbent equipment and laser scanning microscope of settable fiber optic bundle
CN109674438A (en) * 2019-01-31 2019-04-26 北京超维景生物科技有限公司 The adjustable cavity endoscope detection device of object lens and laser scanning cavity endoscope
CN111722407A (en) * 2019-03-19 2020-09-29 苏州溢博伦光电仪器有限公司 Microscope imaging system and method for improving fluorescence collection rate
CN116338931A (en) * 2023-05-30 2023-06-27 成都庆龙航空科技有限公司 Unmanned aerial vehicle photoelectricity sighting device

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CN109662696A (en) * 2019-01-31 2019-04-23 北京超维景生物科技有限公司 The positioning formula adsorbent equipment and laser scanning microscope of settable fiber optic bundle
CN109674438A (en) * 2019-01-31 2019-04-26 北京超维景生物科技有限公司 The adjustable cavity endoscope detection device of object lens and laser scanning cavity endoscope
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CN116338931A (en) * 2023-05-30 2023-06-27 成都庆龙航空科技有限公司 Unmanned aerial vehicle photoelectricity sighting device

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