CN210155428U - Resonance scanning imaging structure, microscope and microprobe - Google Patents
Resonance scanning imaging structure, microscope and microprobe Download PDFInfo
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- CN210155428U CN210155428U CN201921257914.0U CN201921257914U CN210155428U CN 210155428 U CN210155428 U CN 210155428U CN 201921257914 U CN201921257914 U CN 201921257914U CN 210155428 U CN210155428 U CN 210155428U
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- 238000003384 imaging method Methods 0.000 title claims abstract description 36
- 239000012788 optical film Substances 0.000 claims abstract description 7
- 230000003287 optical effect Effects 0.000 claims description 22
- 239000010408 film Substances 0.000 claims description 21
- 239000000835 fiber Substances 0.000 claims description 7
- 230000004075 alteration Effects 0.000 claims description 3
- 238000012634 optical imaging Methods 0.000 abstract description 2
- 239000000523 sample Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 230000008859 change Effects 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 230000005284 excitation Effects 0.000 description 4
- 238000001914 filtration Methods 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000004038 photonic crystal Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/14—Beam splitting or combining systems operating by reflection only
- G02B27/141—Beam splitting or combining systems operating by reflection only using dichroic mirrors
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Microscoopes, Condenser (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Optical Radar Systems And Details Thereof (AREA)
- Facsimile Scanning Arrangements (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The utility model belongs to the technical field of optical imaging, in particular to a resonance scanning imaging structure, which comprises a scanner and an imaging unit for imaging an object to be detected, wherein the scanner comprises a resonance driver and a mirror surface, the resonance driver is used for changing the angle of the mirror surface, and the mirror surface comprises a photoelectric detector and an ultrathin slice; the photoelectric detector is fixed on the surface of the resonance driver, the ultrathin sheet is fixed on the surface of the photoelectric detector, the surface of the ultrathin sheet is plated with an optical film, and a rotating shaft is arranged on the outer side of the resonance driver; the microscope comprises a two-dimensional scanning imaging structure and a microprobe. The utility model discloses can reduce microprobe and microscopical volume.
Description
Technical Field
The utility model discloses the application belongs to optical imaging's technical field, specifically discloses a resonance scanning imaging structure, microscope and microprobe.
Background
In the field of laser scanning and photoelectric detection, such as bar code readers, laser scanning microscopes, laser radars (LIDAR) and the like, a scanner is often required to rapidly change the direction of a light beam and project the light beam onto a detected object, and after reflected light or backscattered light or excited emission light of the detected object is collected by a lens, photoelectric conversion is completed by a photoelectric detector to finally realize detection.
The micro imaging probe is a vital component in the detection process, and in the existing detection process or principle, the system structure is usually based on a scheme of a light source, a scanner, a lens (optional), an object to be detected, a lens, a scanner (optional) and a photoelectric detector.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a resonance scanning image structure, microscope and microprobe aims at reducing microprobe and microscopical volume.
In order to achieve the above object, the basic scheme of the utility model is:
a resonance scanning imaging structure comprises a scanner and an imaging unit for imaging an object to be detected, wherein the scanner comprises a resonance driver and a mirror surface, the resonance driver is used for changing the angle of the mirror surface, and the mirror surface comprises a photoelectric detector and an ultrathin sheet; the photoelectric detector is fixed on the surface of the resonance driver, the ultrathin sheet is fixed on the surface of the photoelectric detector, the surface of the ultrathin sheet is plated with an optical film, a rotating shaft is arranged on the outer side of the resonance driver, the resonance driver comprises a plurality of mirror bodies for transmitting nonlinear optical signals, and the mirror surfaces are fixed on the mirror bodies.
The working principle and the beneficial effects of the basic scheme are as follows:
the resonance driver in the technical scheme can change the inclination angle of the mirror surface to achieve the purpose of changing the angle of the reflection angle of the laser, so as to realize the scanning of the excited laser to the detected object. And the resonance driver can increase the observation range, the scanning range can be accurately controlled by loading different voltages to the resonance driver, and the imaging speed is high.
In addition, because the resonance scanning imaging structure in this technical scheme includes the photoelectric detector, set up a packet photoelectric detector through the surface at the resonance driver, and plated optical film on the ultrathin sheet surface, so set up, make only need in this technical scheme through a device (photoelectric detector promptly, the whole that ultrathin sheet and optical film formed) realize that need four devices can accomplish among the prior art function (will arouse light and emission light separately, change the reflection angle of arousing light in order to realize the scanning, with arousing light filtering and carry out photoelectric conversion), the scanning imaging structure in this technical scheme possesses four functions simultaneously, reached and reduced the quantity of miniature imaging probe interior device, let miniature imaging probe can further reduce volume and weight.
During scanning imaging, in order to ensure that a two-dimensional image can be formed, multipoint scanning is needed in unit time, a scanner assembly in the prior art needs to deflect continuously so as to complete scanning for a plurality of times, only one assembly for scanning is usually arranged in the prior scanner, the assembly for scanning needs to rotate by a large angle during scanning so as to complete scanning once, and the rotating speed of the scanning assembly for scanning needs to be extremely high; however, the scanner in this solution includes a plurality of scanning assemblies (i.e. mirror surfaces), and during scanning, the scanning assembly only needs to rotate by a small angle to scan the point to be scanned by the next scanning assembly, and the rotation speed of the scanning assembly can be slightly slower, so the requirement for the resonance driver is lower than that of a scanner with only one scanning assembly.
Further, the optical films include a dichroic mirror film and a filter film.
When the excitation light and the emission light used for the detected object such as a micro scanning microscope have different wavelengths, the dichroic mirror film is used for reflecting the excitation light to the detected object, the emission light excited by the detected object passes through the dichroic mirror film, the filter film is used for filtering out the residual excitation light, and the photoelectric detector receives the emission light passing through the filter film to realize photoelectric conversion.
Further, the mirror surface is cylindrical.
When the mirror surface is circular, nonlinear optical signals can be better transmitted, and interference on the nonlinear optical signals is avoided.
Further, the mirror surface is a regular hexagon.
When the mirror surface is a regular hexagon, the reflection effect of the laser can be greatly improved, and the scanning speed is improved.
Further, the resonant drive is a resonant scan mirror.
The resonance scanning mirror in the technical scheme has wide scanning range and high scanning speed.
Further, the device comprises an objective lens, wherein the objective lens is used for converging the laser from the scanner to the interior of the living body sample so as to excite the living body sample to generate a nonlinear optical signal and outputting the nonlinear optical signal.
Further, a galvanometer mirror is arranged between the objective lens and the scanner.
The galvanometer mirror that sets up among this technical scheme can be used for carrying out more careful scanning observation to local area, can satisfy the demand of user polymorphic.
A kind of microprobe, including the outer cover, include collimating lens, exterior scanning element, lens battery and scanner in the basic scheme sequentially along the direction of light path, the said collimating lens is used for collimating the laser from laser input fiber output and reducing the chromatic aberration among the laser of different frequency and outputting the laser signal; the external scanning component is used for separating laser and nonlinear optical signals and outputting the nonlinear optical signals, and is also used for changing the incident angle of the laser to enable the laser to carry out one-dimensional scanning on the plane of the internal tissue of the detected object, and the collimating lens, the external scanning component, the lens group and the scanner are all arranged in the shell.
The micro probe in the technical scheme adopts the scanner in claim 1, so that the number of components in the micro probe can be reduced, and the volume of the whole micro probe is smaller.
Further, the lens group includes a first lens and a second lens, which are disposed parallel to each other.
The lens group composed of the first lens and the second lens in the technical scheme plays a role in gathering and reflecting light beams.
A microscope comprises a resonance scanning imaging structure in a basic scheme and a microprobe in an optimized scheme.
The microscope in the technical scheme adopts the scanning imaging structure of the basic scheme and the microscope probe in the optimization scheme, and reduces components in the microscope, so that the overall size of the microscope is reduced, the cost can be saved, the power consumption can be saved, and the integration level is improved.
Drawings
Fig. 1 is a working schematic diagram of a microscope of the present invention;
fig. 2 is a perspective view of a scanner in a resonance imaging structure according to the present invention;
FIG. 3 is a schematic view of the structure of FIG. 1;
fig. 4 is a schematic structural diagram of a microscope according to a second embodiment of the present invention.
Detailed Description
The following is further detailed by way of specific embodiments:
example one
Reference numerals in the drawings of the specification include: the device comprises a collimating lens 1, an external scanning piece 2, a first lens 3, a second lens 4, a scanner 5, an objective lens 6, an object to be detected 7, an imaging unit 8, an external stage 9, a resonance driver 10, a photoelectric detector 11, an ultrathin sheet 12, a filter film 13, a dichroic mirror film 14, a rotating shaft 15, a shell 16, a reflecting mirror 17, a laser input optical fiber 18, a lead wire 19, a galvanometer vibrating mirror 20 and an external light source 21.
Example one
The embodiment is basically as shown in the attached figure 1: a resonance scanning imaging structure comprises a scanner 5 and an imaging unit 8 for imaging an object 7 to be detected, and as shown in fig. 2, the scanner 5 comprises a resonance driver 10 and a mirror, the resonance driver 10 is used for changing the angle of the mirror, the resonance driver 10 in this embodiment is usually driven electrostatically, specifically, the resonance driver 10 can adopt surface micromachining process SOIMUMP of MEMSCAP company, the technology is prior art, and is not described herein again, and the resonance driver 10 in this embodiment adopts CRS series resonance scanning mirror in prior art.
The mirror surface comprises a photoelectric detector 11 and an ultrathin sheet 12, and the ultrathin sheet 12 in the embodiment should satisfy the following conditions: has a transmittance of 50% or more at any wavelength in the range of 390nm to 1720 nm. The ultrathin sheet 12 is coated with optical thin films, the optical thin films in this embodiment include a dichroic mirror thin film 14 and a filter thin film 13, the resonance driver 10 includes a plurality of mirror bodies (not shown in the figure) for transmitting nonlinear optical signals, and the mirror bodies are made of optical glass, high molecular polymer, semiconductor material, metal, carbon fiber, or a mixture of any of the above materials.
The photoelectric detector 11, the ultrathin sheet 12 light filtering film 13 and the dichroic mirror film 14 are all fixed on the surface of the mirror body of the resonance driver 10, the bottom surface of the photoelectric detector 11 is fixed on the upper surface of the resonance driver 10 through a bonding process, the ultrathin sheet 12 is also fixed on the surface, away from the resonance driver 10, of the photoelectric detector 11 through the bonding process, the photoelectric detector 11, the ultrathin sheet 12 light filtering film 13 and the dichroic mirror film 14 are all of a circular structure and are coaxially arranged with one another, and therefore the formed mirror surface is integrally cylindrical. Of course, the photodetector 11, the ultrathin sheet 12 filter film 13, and the dichroic mirror film 14 in this embodiment may all have a regular hexagonal structure, so that the entire mirror surface formed by the photodetector 11, the ultrathin sheet 12 filter film 13, and the dichroic mirror film 14 may be a regular hexagon.
The photodetector 11 is a photodiode including an avalanche photodiode and an avalanche photodiode array. The resonant actuator 10 is integrally formed with a rotating shaft 15 at both sides thereof.
As shown in fig. 1, the resonant scanning imaging structure in the present embodiment further includes an objective lens 6, and the objective lens 6 is used for converging the laser light from the scanner 5 into the living body sample to excite the living body sample to generate a nonlinear optical signal and outputting the nonlinear optical signal.
The embodiment also comprises a microprobe, which is combined with the structure shown in fig. 1, and sequentially comprises a collimating lens 1, an external scanning component 2, a lens group and a scanner 5 along the light path direction, wherein the collimating lens 1 is used for collimating the laser output from the laser input optical fiber 18, reducing chromatic aberration among the lasers with different frequencies and outputting a laser signal; the external scanning component 2 is used for separating the laser and the nonlinear optical signal and outputting the nonlinear optical signal, and is also used for changing the incident angle of the laser to enable the laser to perform one-dimensional scanning on the plane of the internal tissue of the detected object 7, and the external scanning component 2 in the embodiment adopts a micro-electromechanical system scanner 5 in the prior art.
The lens group in the present embodiment includes a first lens 3 and a second lens 4, and the first lens 3 and the second lens 4 are arranged in parallel with each other.
As shown in fig. 3, the microprobe in this embodiment further includes a housing 16, the housing 16 is a sealing structure made of a high molecular polymer material, and a reflecting mirror 17 is further bonded and fixed to a side wall of the housing 16 in order to improve a reflection effect of the dichroic mirror film 14. A laser input fiber 18 is further bonded to the top end of the housing 16, the laser input fiber 18 in this embodiment is a polarization maintaining fiber or a photonic crystal fiber, and the laser input fiber 18 outputs laser to the collimating lens 1. The photodetector 11 in this embodiment is electrically connected to a lead wire 19.
The collimator lens 1, the first lens 3, the second lens 4, the scanner 5 and the objective lens 6 are all mounted in a housing 16, and the resonant actuator 10 is rotatably connected in the housing 16 through a rotating shaft 15.
The specific implementation process is as follows: excitation light emitted by an external light source 21 passes through a laser input optical fiber 18, is reflected to a collimating lens 1 through a reflecting mirror 17 for collimation, then is scanned in the X direction by an external scanning piece 2, and is irradiated to a dichroic mirror film 14 of a scanner 5 through a lens group consisting of a first lens 3 and a second lens 4 for reflection and scanning in the Y direction, then the scanning light beam is focused in a detected object 7 on an external objective table 9 through an objective lens 6, emitted light (such as single photon fluorescence or nonlinear optical signals) excited in the detected object 7 is collected by the objective lens 6, then sequentially passes through the dichroic mirror film 14, an optical filter and an ultrathin sheet 12 of the scanner 5, is converted into an electric signal by a photoelectric detector 11, and finally is sent to an external amplifying circuit and a computer for processing.
The resonance driver 10 in this embodiment can change the inclination angle of the whole mirror surface to achieve the purpose of changing the reflection angle of the laser, so as to excite the laser to scan the detected object 7. And the resonance driver 10 can increase the observation range, the scanning range can be accurately controlled by loading different voltages to the resonance driver 10, and the imaging speed is high.
Example two
As shown in fig. 4, the difference from the first embodiment is that: in this embodiment, a galvanometer mirror 20 is further disposed between the objective lens 6 and the scanner 5, and the galvanometer mirror 20 is mounted in the housing 16 of the probe, so that the galvanometer mirror 20 provided in this embodiment can be used for scanning and observing a local area more finely, and can meet the requirements of users in multiple forms.
The above description is only an example of the present invention, and the common general knowledge of the known specific structures and characteristics of the embodiments is not described herein. It should be noted that, for those skilled in the art, without departing from the structure of the present invention, several modifications and improvements can be made, which should also be regarded as the protection scope of the present invention, and these will not affect the effect of the implementation of the present invention and the practicability of the patent.
Claims (10)
1. A resonance scanning imaging structure comprises a scanner and an imaging unit for imaging an object to be detected, and is characterized in that the scanner comprises a resonance driver and a mirror surface, the resonance driver is used for changing the angle of the mirror surface, and the mirror surface comprises a photoelectric detector and an ultrathin sheet; the photoelectric detector is fixed on the surface of the resonance driver, the ultrathin sheet is fixed on the surface of the photoelectric detector, the surface of the ultrathin sheet is plated with an optical film, a rotating shaft is arranged on the outer side of the resonance driver, the resonance driver comprises a plurality of mirror bodies for transmitting nonlinear optical signals, and the mirror surfaces are fixed on the mirror bodies.
2. A resonant scanning imaging structure according to claim 1, wherein said optical films comprise dichroic mirror films and filter films.
3. A resonant scanning imaging structure, according to claim 1, wherein said mirror is cylindrical.
4. A resonant scanning imaging structure, according to claim 1, wherein said mirror is a regular hexagon.
5. A resonant scanning imaging structure, as set forth in claim 1, wherein the resonant driver is a resonant scanning mirror.
6. A resonant scanning imaging structure according to claim 1, further comprising an objective lens for focusing laser light from the scanner into the interior of the living body sample to excite the living body sample to produce the nonlinear optical signal and for outputting the nonlinear optical signal.
7. A resonance scanning imaging arrangement according to claim 6, wherein a galvanometer mirror is provided between the objective lens and the scanner.
8. A microprobe comprising a housing, characterized by comprising a collimating lens for collimating laser light outputted from a laser input fiber and reducing chromatic aberration between laser lights of different frequencies and outputting a laser signal, an external scanning member, a lens group, and the scanner of claim 1 in this order along an optical path direction; the external scanning component is used for separating laser and nonlinear optical signals and outputting the nonlinear optical signals, and is also used for changing the incident angle of the laser to enable the laser to carry out one-dimensional scanning on the plane of the internal tissue of the detected object, and the collimating lens, the external scanning component, the lens group and the scanner are all arranged in the shell.
9. A microprobe according to claim 8, wherein the lens group comprises a first lens and a second lens, the first lens and the second lens being arranged in parallel with each other.
10. A microscope comprising a resonant scanning imaging structure according to claim 1 and a microprobe according to any one of claims 8 to 9.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910216141 | 2019-03-19 | ||
| CN201910216141X | 2019-03-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210155428U true CN210155428U (en) | 2020-03-17 |
Family
ID=69766693
Family Applications (16)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921228981.XU Expired - Fee Related CN210155423U (en) | 2019-03-19 | 2019-07-31 | Two-dimensional scanner comprising photoelectric detector |
| CN201921228983.9U Expired - Fee Related CN210155424U (en) | 2019-03-19 | 2019-07-31 | One-dimensional scanner comprising photoelectric detector |
| CN201921228346.1U Expired - Fee Related CN210155422U (en) | 2019-03-19 | 2019-07-31 | Multi-facet scanner comprising photodetector |
| CN201921228593.1U Expired - Fee Related CN210243982U (en) | 2019-03-19 | 2019-07-31 | One-dimensional scanner |
| CN201921247898.7U Expired - Fee Related CN210573035U (en) | 2019-03-19 | 2019-08-02 | Miniature endoscope |
| CN201921247900.0U Expired - Fee Related CN210166579U (en) | 2019-03-19 | 2019-08-02 | Two-dimensional scanning imaging structure, microscope and microprobe |
| CN201910713415.6A Pending CN111722407A (en) | 2019-03-19 | 2019-08-02 | Microscope imaging system and method for improving fluorescence collection rate |
| CN201910713369.XA Pending CN111722406A (en) | 2019-03-19 | 2019-08-02 | Miniature endoscope |
| CN201921248506.9U Expired - Fee Related CN210155427U (en) | 2019-03-19 | 2019-08-02 | Scanner comprising photoelectric detector |
| CN201921248507.3U Expired - Fee Related CN210166580U (en) | 2019-03-19 | 2019-08-02 | One-dimensional line scanning imaging structure, microscope and microprobe |
| CN201921248384.3U Expired - Fee Related CN210155425U (en) | 2019-03-19 | 2019-08-02 | Miniature head-mounted microscope |
| CN201921248385.8U Expired - Fee Related CN210155426U (en) | 2019-03-19 | 2019-08-02 | Microscopic imaging structure, microscope and microscopic probe |
| CN201910713335.0A Pending CN111722405A (en) | 2019-03-19 | 2019-08-02 | Miniature head-mounted microscope |
| CN201921257914.0U Expired - Fee Related CN210155428U (en) | 2019-03-19 | 2019-08-05 | Resonance scanning imaging structure, microscope and microprobe |
| CN201921258121.0U Expired - Fee Related CN210155429U (en) | 2019-03-19 | 2019-08-05 | Resonance scanner comprising photoelectric detector |
| CN201921258068.4U Expired - Fee Related CN210166581U (en) | 2019-03-19 | 2019-08-05 | Multi-surface scanning imaging structure, microscope and microprobe |
Family Applications Before (13)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921228981.XU Expired - Fee Related CN210155423U (en) | 2019-03-19 | 2019-07-31 | Two-dimensional scanner comprising photoelectric detector |
| CN201921228983.9U Expired - Fee Related CN210155424U (en) | 2019-03-19 | 2019-07-31 | One-dimensional scanner comprising photoelectric detector |
| CN201921228346.1U Expired - Fee Related CN210155422U (en) | 2019-03-19 | 2019-07-31 | Multi-facet scanner comprising photodetector |
| CN201921228593.1U Expired - Fee Related CN210243982U (en) | 2019-03-19 | 2019-07-31 | One-dimensional scanner |
| CN201921247898.7U Expired - Fee Related CN210573035U (en) | 2019-03-19 | 2019-08-02 | Miniature endoscope |
| CN201921247900.0U Expired - Fee Related CN210166579U (en) | 2019-03-19 | 2019-08-02 | Two-dimensional scanning imaging structure, microscope and microprobe |
| CN201910713415.6A Pending CN111722407A (en) | 2019-03-19 | 2019-08-02 | Microscope imaging system and method for improving fluorescence collection rate |
| CN201910713369.XA Pending CN111722406A (en) | 2019-03-19 | 2019-08-02 | Miniature endoscope |
| CN201921248506.9U Expired - Fee Related CN210155427U (en) | 2019-03-19 | 2019-08-02 | Scanner comprising photoelectric detector |
| CN201921248507.3U Expired - Fee Related CN210166580U (en) | 2019-03-19 | 2019-08-02 | One-dimensional line scanning imaging structure, microscope and microprobe |
| CN201921248384.3U Expired - Fee Related CN210155425U (en) | 2019-03-19 | 2019-08-02 | Miniature head-mounted microscope |
| CN201921248385.8U Expired - Fee Related CN210155426U (en) | 2019-03-19 | 2019-08-02 | Microscopic imaging structure, microscope and microscopic probe |
| CN201910713335.0A Pending CN111722405A (en) | 2019-03-19 | 2019-08-02 | Miniature head-mounted microscope |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921258121.0U Expired - Fee Related CN210155429U (en) | 2019-03-19 | 2019-08-05 | Resonance scanner comprising photoelectric detector |
| CN201921258068.4U Expired - Fee Related CN210166581U (en) | 2019-03-19 | 2019-08-05 | Multi-surface scanning imaging structure, microscope and microprobe |
Country Status (1)
| Country | Link |
|---|---|
| CN (16) | CN210155423U (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111965811A (en) * | 2020-09-10 | 2020-11-20 | 上海汽车集团股份有限公司 | Three-dimensional MEMS scanning mirror |
| CN114624872A (en) * | 2022-03-14 | 2022-06-14 | Oppo广东移动通信有限公司 | Scanning galvanometer and glasses |
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| US3460880A (en) * | 1964-12-18 | 1969-08-12 | Beckman Instruments Inc | Point illumination and scanning mechanism for microscopes |
| JP3440465B2 (en) * | 1998-12-17 | 2003-08-25 | 株式会社高岳製作所 | Multi-slit scanning imaging device |
| CN103743714B (en) * | 2014-01-14 | 2015-12-30 | 苏州大猫单分子仪器研发有限公司 | A kind of inclination wide field light section scanning imagery microscopic system and formation method thereof |
| CN108261179A (en) * | 2018-01-12 | 2018-07-10 | 凝辉(天津)科技有限责任公司 | Micro-optical is popped one's head in |
| CN107991769B (en) * | 2018-01-12 | 2020-07-10 | 凝辉(天津)科技有限责任公司 | Two-dimensional scanning device |
-
2019
- 2019-07-31 CN CN201921228981.XU patent/CN210155423U/en not_active Expired - Fee Related
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Also Published As
| Publication number | Publication date |
|---|---|
| CN210166581U (en) | 2020-03-20 |
| CN111722405A (en) | 2020-09-29 |
| CN111722406A (en) | 2020-09-29 |
| CN210155423U (en) | 2020-03-17 |
| CN210155425U (en) | 2020-03-17 |
| CN210155427U (en) | 2020-03-17 |
| CN210166580U (en) | 2020-03-20 |
| CN210243982U (en) | 2020-04-03 |
| CN210155424U (en) | 2020-03-17 |
| CN210166579U (en) | 2020-03-20 |
| CN210573035U (en) | 2020-05-19 |
| CN210155429U (en) | 2020-03-17 |
| CN111722407A (en) | 2020-09-29 |
| CN210155426U (en) | 2020-03-17 |
| CN210155422U (en) | 2020-03-17 |
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