CN210155429U - Resonance scanner comprising photoelectric detector - Google Patents
Resonance scanner comprising photoelectric detector Download PDFInfo
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- CN210155429U CN210155429U CN201921258121.0U CN201921258121U CN210155429U CN 210155429 U CN210155429 U CN 210155429U CN 201921258121 U CN201921258121 U CN 201921258121U CN 210155429 U CN210155429 U CN 210155429U
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/14—Beam splitting or combining systems operating by reflection only
- G02B27/141—Beam splitting or combining systems operating by reflection only using dichroic mirrors
Abstract
The utility model relates to a photoelectric detection and optical imaging's technical field, concretely relates to resonance scanner who contains photoelectric detector, including reciprocal anchorage's driver and mirror surface, the driver is the resonance driver, and the mirror surface includes reciprocal anchorage's ultrathin section and photoelectric detector, and photoelectric detector is located between ultrathin section and the driver, has plated optical film on the ultrathin section, and optical film is located the one end of keeping away from photoelectric detector on the ultrathin section. The adoption of the scheme can greatly reduce the number of elements in the scanning device, reduce the volume of the scanning device and meet the technical requirements of microscopes and endoscopes.
Description
Technical Field
The utility model relates to a photoelectric detection and optical imaging's technical field, concretely relates to resonance scanner who contains photoelectric detector.
Background
In the field of laser scanning and photoelectric detection, such as barcode readers, laser scanning microscopes, laser radars (LIDAR), and the like, a scanner is often required to change the direction of a light beam rapidly, the light beam is projected onto an object to be observed, reflected light or backscattered light of the object to be observed or emitted light excited is collected by a lens, and then is subjected to photoelectric conversion by a photoelectric detector to finally realize detection, so the path of the light beam inside a scanning system is generally as follows: in an application scenario where the requirement for the volume of equipment is very high, such as a micro laser radar module or a micro scanning microscope (including an ultra-compact desktop scanning microscope, a handheld scanning microscope, an experimental animal head-mounted scanning microscope, an endoscope, and the like), the scanning system is too bulky, and the conventional technology cannot achieve the purpose of reducing the volume of the scanning system by reducing all elements.
SUMMERY OF THE UTILITY MODEL
The utility model discloses it is anticipated to provide a resonance scanner that contains photoelectric detector to scanning system is too complicated among the prior art, the bulky technical problem of scanning device volume.
In order to achieve the above purpose, the utility model adopts the following technical scheme: a resonance scanner containing photoelectric detector is composed of a driver fixed to each other and a resonant driver, a mirror consisting of an ultrathin plate and a photoelectric detector fixed to each other, and a photoelectric detector between said ultrathin plate and driver.
The principle and the advantages of the scheme are as follows: 1) in the prior art, four independent devices respectively realize the separation of excitation light and emission light and change the angle of the reflection angle of the excitation light so as to realize the functions of scanning, filtering the excitation light and photoelectric conversion; the photoelectric detector and the optical film are arranged on the surface of the driver, so that the scheme has the four functions, the purposes of reducing the number of elements in the scanning device and reducing the volume and weight of the scanning device are achieved, and a miniature scanner is formed;
2) the inclination angle of the mirror surface can be changed through the arrangement of the driver, so that the aim of changing the angle of the reflection angle of the laser is fulfilled, and the scanning of the laser to the observed object is excited; and the driver of this scheme adopts resonance driver, and its scanning speed can reach 8KHZ, is favorable to promoting scanning device's scanning speed by a wide margin.
Preferably, as a modification, the optical film is a polarization splitting film and a filter film.
The polarization light splitting film and the light filtering film are used for reflecting S-shaped linear polarized light and transmitting P-shaped linear polarized light, and are suitable for being applied to the condition that the reflected light and the incident light of an observed object such as a micro laser radar module have the same wavelength.
Preferably, as a modification, the optical films are a dichroic mirror film and a filter film.
The dichroic mirror film and the light filtering film are used for reflecting exciting light and allowing emitted light to pass through, and are suitable for being applied to the situation that the exciting light and the emitted light of an observed object such as a micro scanning microscope have different wavelengths.
Preferably, as a modification, the shape of the driver is an arbitrary axisymmetric shape such as a polygon, a circle, or an ellipse.
The shape of the driver is designed into an axial symmetry shape, so that the driver can stably provide driving force for the mirror surface when the driver is operated, and the rotating angle and amplitude of the mirror surface are more balanced and stable.
Preferably, as a modification, the shape of the mirror surface is an arbitrary axisymmetric shape such as a polygon, a circle, or an ellipse.
The scheme ensures that the angle change of the reflected light is more stable during the rotation of the mirror surface, and is beneficial to more stably realizing scanning.
Preferably, as a modification, the photodetector is a photodiode, a phototransistor, a vacuum phototransistor, or a two-dimensional pixel photosensor.
The photoelectric detector of the scheme can select different photosensitive elements according to actual requirements, and is stronger in applicability and better in universality.
Preferably, as an improvement, the photodiode is an avalanche photodiode.
Compared with a vacuum photomultiplier, the avalanche photodiode has the advantages of small size, no need of a high-voltage power supply and the like, so that the avalanche photodiode is more suitable for practical application; compared with a common semiconductor photodiode, the avalanche photodiode has the advantages of high sensitivity, high speed and the like, and particularly when the system bandwidth is large, the avalanche photodiode can greatly improve the detection performance of the system.
Preferably, as an improvement, the two-dimensional pixel photosensor is a photoelectric coupling device, a metal semiconductor oxide device, a focal plane array device, a photomultiplier device, or a single photon counting device.
The photoelectric detector of the scheme can select different photosensitive elements according to actual requirements, and is stronger in applicability and better in universality.
Preferably, as an improvement, a torsion beam is fixedly arranged on the side surface of the driver.
The scheme enables the driver to rotate around the torsion beam, so that line scanning is realized.
Preferably, as a refinement, the driver is rectangular.
The driver of the scheme is in an axial symmetry shape, the running speed of the mirror surface is more stable during rotation, and the reflected light beam is more stable.
Drawings
Fig. 1 is a schematic structural diagram of a scanning device in a first embodiment of a resonance scanner including a photodetector according to the present invention.
Fig. 2 is a front cross-sectional view of a photo detector according to an embodiment of the present invention.
Fig. 3 is a sectional view taken along a-a of fig. 2.
Fig. 4 is a schematic diagram of a scanning device according to an embodiment of the present invention when the optical film is a polarization splitting film.
Fig. 5 is a schematic diagram of a scanning device according to an embodiment of the present invention when the optical film is a dichroic mirror film.
Fig. 6 is a schematic structural diagram of the scanning device of the present invention when applied to a point scanning micro scanning microscope.
Fig. 7 is a schematic structural diagram of the scanning device of the present invention when applied to a line scanning micro scanning microscope.
Detailed Description
The following is further detailed by way of specific embodiments:
reference numerals in the drawings of the specification include: the device comprises a driver 1, a photoelectric detector 2, an ultrathin sheet 3, a filter film 4, a dichroic mirror film 5, an optical film 6, an avalanche photodiode 7, a protective element 8, a torsion beam 9, a first external lens 10, a second external lens 11, a third external lens 12, an external cylindrical lens 13, an external wave plate 14, an object to be detected 15, a scanning device 16, an external optical fiber 17, an external scanning mirror 18, an external objective lens 19 and a computer 20.
Example one
As shown in figure 1: a resonance scanner containing a photoelectric detector comprises a driver 1 and a mirror surface which are fixed with each other, wherein the shape of the driver 1 is a polygon, a circle or an ellipse and is in an equiaxial symmetry shape, a rectangle is taken as an example for illustration, and a torsion beam 9 is fixedly connected to the left side surface of the driver 1 in a bonding mode; here, the driver 1 is a resonant driver 1, and a product of Cambridge Technology may be specifically selected, which is a prior art and is not described herein again.
The mirror plate is fixed to the actuator 1 by bonding, and the shape of the mirror plate is an arbitrary axisymmetric shape such as a polygon, a circle, or an ellipse, and a rectangle is exemplified here. The mirror surface comprises an ultrathin sheet 3 and a photoelectric detector 2 which are fixedly bonded with each other, the photoelectric detector 2 is a photodiode, a phototriode, a vacuum phototube or a two-dimensional pixel photoelectric sensor (comprising a photoelectric coupling device, a metal semiconductor oxide device, a focal plane array device, a photomultiplier device or a single photon counting device), the avalanche photodiode 7 in the photodiode is taken as an example for description, as shown in fig. 2 and fig. 3, the photoelectric detector 2 in the embodiment is a whole square avalanche photodiode 7, the circle center of the avalanche photodiode 7 is mechanically drilled or corroded to form a light transmission hole, the light transmission hole is positioned at the geometric center of the avalanche photodiode 7, the avalanche photodiode 7 needs to be used in a reverse bias mode, so that the driving voltage is up to hundreds of thousands of volts, therefore, a protective element 8 for isolation is fixedly clamped around the avalanche photodiode 7, the protective element 8 is made of a transparent insulating material, here optical glass is taken as an example; the protective element 8 is rectangular in cross-section.
As shown in fig. 1, the lower end of the photodetector 2 is bonded and fixed with the driver 1, the upper end of the photodetector 2 is fixedly connected with the ultrathin slice 3 in a bonding mode, and the ultrathin slice 3 is made of a material having a transmittance of 50% or more for light with a wavelength of 390nm to 1720 nm; the material of the ultrathin sheet 3 is one of optical glass, high molecular polymer or semiconductor material, the ultrathin sheet 3 can also be a mixture of two or more of optical glass, high molecular polymer or semiconductor material, and the description is given by taking the ultrathin sheet 3 made of optical glass as an example; the one end of keeping away from photoelectric detector 2 on the ultrathin section 3 has plated optical film 6, under different application scenarios, should select optical film 6 who has different functions for use:
① when the excitation light and the emission light of the object 15 to be detected have different wavelengths, the optical film 6 is a dichroic mirror film 5 and a filter film 4, and the filter film 4 is located between the ultrathin sheet 3 and the dichroic mirror film 5. in the specific application, as shown in fig. 5, the light beam enters the dichroic mirror film 5 and is reflected by the dichroic mirror film 5, and then irradiates the object 15 to be detected to excite the emission light, the emission light (such as single photon fluorescence or non-linear optical signal) is collected by the external objective lens 19 and then sequentially passes through the dichroic mirror film 5, the optical filter and the ultrathin sheet 3 to irradiate the photodetector 2, the photodetector 2 converts the optical signal into an electrical signal and transmits the electrical signal to the computer 20 for processing after being amplified by the external amplifier circuit LM324, and the computer 20 is provided with image analysis software for displaying and analyzing pictures, which is exemplified by touppam series touppeew, wherein how the amplifier circuit and the computer receive the electrical signal transmitted by the photodetector 2 and form an image, which is not referred to the prior art.
② when the micro lidar module waits for the reflected light and the incident light of the object 15 to be detected to have the same wavelength, the optical film 6 is a polarization splitting film and a filter film 4 (i.e. the dichroic mirror film 5 in ① is replaced by a polarization splitting film), and the filter film 4 is located between the ultrathin sheet 3 and the polarization splitting film. in particular, as shown in fig. 4, S-linear polarized light emitted by an external light source is collimated by an external lens (not shown in the figure), reflected by the polarization splitting film, and then changed in polarization direction by the external wave plate 14, after being irradiated to the object 15 to be detected, is reflected by the object 15 to be detected and passes through the external wave plate 14, when the reflected light passes through the external wave plate 14, the external wave plate 14 makes the polarization direction of most of the reflected light be P-direction, the polarization splitting film reflects the S-linear polarized light and transmits the P-linear polarized light, so that the P-linear polarized light in the reflected light sequentially passes through the optical film 6, the filter film 4 and the ultrathin sheet 3 and irradiates the photodetector 2, and the photodetector 2 converts the optical signal into.
In order to fully explain the effect of the present solution, the embodiment also discloses a case of a point scanning micro scanning microscope to which the scanning device 16 adopting the present solution is applied in the form of a one-dimensional scanning galvanometer, as shown in fig. 6, an external optical fiber 17, an external lens one 10, an external scanning mirror 18, an external lens two 11, an external lens three 12, a scanning device 16, and an external objective lens 19 are sequentially arranged according to the advancing direction of a light beam. An external optical fiber 17, a first external lens 10, an external scanning mirror 18, a second external lens 11, a third external lens 12 and an external objective lens 19 are all fixed with an external frame, a scanning device 16 is rotatably arranged with the external frame through a torsion beam 9, the output end of a photoelectric detector 2 on the scanning device 16 is connected with the input end of an amplifying circuit, and the output end of the amplifying circuit is connected with the input end of a computer 20; the amplifying circuit is LM 324; the computer 20 is installed with image analysis software for displaying and analyzing pictures, and the ToupView of ToupCam series is taken as an example. The external optical fiber 17 is a polarization maintaining optical fiber or a photonic crystal optical fiber, the design wavelength is any wavelength between 700nm and 1600nm, the material of the external optical fiber 17 is optical glass, quartz, plastic or high molecular polymer, and the external optical fiber 17 is used for transmitting ultrafast laser pulses generated by an external excitation light source.
The first external lens 10 is a collimating lens, and the collimating lens is an achromatic collimating lens 1710 (a miniature head-mounted microscope 65-286, Edmund Optics Inc., Barrington, NJ, USA; diameter: 2mm, equivalent focal length: 3mm, special near infrared light) which can collimate the output laser and reduce chromatic aberration between different frequency components of the femtosecond laser, thus improving transmission efficiency (up to 50% from the laser source to the sample), beam focusing efficiency and excitation efficiency.
As shown in fig. 6, the excitation light emitted from the external optical fiber 17 is collimated by the external lens 10, then scanned in the X direction by the external scanning mirror 18, and then passes through the lens composed of the external lens two 11 and the external lens three 12, and then irradiated onto the scanning device 16 for scanning in the Y direction, the two-dimensional scanning light beam is focused in the object to be detected by the external objective lens 19, the emitted light (such as single photon fluorescence or nonlinear optical signal) excited in the object to be detected is collected by the external objective lens 19, and then sequentially passes through the dichroic mirror film 5, the optical filter and the ultrathin sheet 3 and is irradiated onto the photodetector 2, and is converted into an electrical signal by the photodetector 2, and finally sent to the external amplifying circuit and the computer 20 for processing.
Example two
The difference between the present embodiment and the first embodiment is that the present embodiment discloses a case of a line scanning micro scanning microscope in which the scanning device 16 adopting the present embodiment is applied in the form of a one-dimensional scanning galvanometer. In the application of line scanning, the photodetector 2 is a two-dimensional pixel photosensor, which may be a CCD (photoelectric coupling device) device, a CMOS (metal semiconductor oxide) device, an FPA (focal plane array) device, a PMT (photomultiplier tube) device, or a single photon counting device, and the CCD is taken as an example for description. As shown in fig. 7, excitation light emitted from an external light source is collimated by an external lens, and then focused by an external cylindrical lens 13 into a linear focus on a dichroic mirror film 5, the dichroic mirror film 5 reflects the excitation light to scan, a one-dimensional scanning light beam is focused in a detected object by an external objective lens 19 (where an external high-dispersion objective lens is selected) to form a scanning line, and emitted light (such as single-photon fluorescence or nonlinear optical signals) excited in the detected object is collected by the external high-dispersion objective lens, then sequentially passes through the dichroic mirror film 5, a filter and an ultrathin sheet 3, is focused on a photodetector 2 and converted into an electrical signal, and finally is sent to an external amplifying circuit and a computer 20 for processing. Since the wavelength of the emitted light (such as single photon fluorescence or nonlinear optical signal) excited in the object to be detected is shorter than that of the excitation light, and the focal length of the emitted light passing through the external high-dispersion objective lens is smaller than that of the excitation light, the emitted light emitted from the focal point can be focused on the photodetector 2 again after being focused by the external high-dispersion objective lens by selecting appropriate materials and parameters.
The above description is only an example of the present invention, and the detailed technical solutions and/or characteristics known in the solutions are not described too much here. It should be noted that, for those skilled in the art, without departing from the technical solution of the present invention, several modifications and improvements can be made, which should also be regarded as the protection scope of the present invention, and these will not affect the effect of the implementation of the present invention and the practicability of the patent. The scope of the claims of the present application shall be determined by the contents of the claims, and the description of the embodiments and the like in the specification shall be used to explain the contents of the claims.
Claims (10)
1. A resonant scanner including a photodetector, comprising a driver and a mirror fixed to each other, characterized in that: the driver is a resonance driver, the mirror surface comprises an ultrathin sheet and a photoelectric detector which are fixed with each other, the photoelectric detector is positioned between the ultrathin sheet and the driver, an optical film is plated on the ultrathin sheet, and the optical film is positioned at one end, far away from the photoelectric detector, of the ultrathin sheet.
2. A resonant scanner including a photodetector according to claim 1, wherein: the optical film is a polarization light splitting film and a light filtering film.
3. A resonant scanner including a photodetector according to claim 1, wherein: the optical films are a dichroic mirror film and a light filtering film.
4. A resonant scanner including a photodetector according to claim 1, wherein: the shape of the driver is any axisymmetric shape such as a polygon, a circle or an ellipse.
5. A resonant scanner including a photodetector according to claim 1, wherein: the shape of the mirror surface is any axisymmetric shape such as a polygon, a circle or an ellipse.
6. A resonant scanner including a photodetector according to claim 1, wherein: the photoelectric detector is a photodiode, a phototriode, a vacuum phototube or a two-dimensional pixel photoelectric sensor.
7. A resonant scanner including a photodetector according to claim 6, wherein: the photodiode is an avalanche photodiode.
8. A resonant scanner including a photodetector according to claim 6, wherein: the two-dimensional pixel photoelectric sensor is a photoelectric coupling device, a metal semiconductor oxide device, a focal plane array device, a photomultiplier device or a single photon counting device.
9. A resonant scanner including a photodetector according to claim 1, wherein: and a torsion beam is fixedly arranged on the side surface of the driver.
10. A resonant scanner including a photodetector according to claim 1, wherein: the driver is rectangular.
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| CN201921228983.9U Active CN210155424U (en) | 2019-03-19 | 2019-07-31 | One-dimensional scanner comprising photoelectric detector |
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| CN111965811A (en) * | 2020-09-10 | 2020-11-20 | 上海汽车集团股份有限公司 | Three-dimensional MEMS scanning mirror |
| CN114624872A (en) * | 2022-03-14 | 2022-06-14 | Oppo广东移动通信有限公司 | Scanning galvanometer and glasses |
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| US3460880A (en) * | 1964-12-18 | 1969-08-12 | Beckman Instruments Inc | Point illumination and scanning mechanism for microscopes |
| JP3440465B2 (en) * | 1998-12-17 | 2003-08-25 | 株式会社高岳製作所 | Multi-slit scanning imaging device |
| CN103743714B (en) * | 2014-01-14 | 2015-12-30 | 苏州大猫单分子仪器研发有限公司 | A kind of inclination wide field light section scanning imagery microscopic system and formation method thereof |
| CN107991769B (en) * | 2018-01-12 | 2020-07-10 | 凝辉(天津)科技有限责任公司 | Two-dimensional scanning device |
| CN108261179A (en) * | 2018-01-12 | 2018-07-10 | 凝辉(天津)科技有限责任公司 | Micro-optical is popped one's head in |
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| CN111722406A (en) | 2020-09-29 |
| CN210166581U (en) | 2020-03-20 |
| CN210155425U (en) | 2020-03-17 |
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| CN111722407A (en) | 2020-09-29 |
| CN210166579U (en) | 2020-03-20 |
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