CN209826672U - Three-dimensional scanning miniature optical probe - Google Patents
Three-dimensional scanning miniature optical probe Download PDFInfo
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- CN209826672U CN209826672U CN201820971110.6U CN201820971110U CN209826672U CN 209826672 U CN209826672 U CN 209826672U CN 201820971110 U CN201820971110 U CN 201820971110U CN 209826672 U CN209826672 U CN 209826672U
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Abstract
The utility model relates to an optical imaging technical field, the utility model discloses there is the technical problem such as slow of imaging speed to current miniature probe, provide a miniature optical probe of three-dimensional scanning, include: a collimating lens for collimating the laser light output from the laser input fiber; the dichroic mirror scanner is used for separating the laser light with different polarization states from the nonlinear optical signal and changing the incident angle of the laser light; an objective lens for converging the laser light from the dichroic mirror scanner into the interior of the living body sample to excite the living body sample to generate a nonlinear optical signal; a focusing lens for focusing the laser; a wave plate for changing the polarization direction of the laser light; the vertical dichroic mirror scanner is used for performing far-end Z-axis scanning to realize three-dimensional imaging; and the collecting lens is used for collecting the nonlinear optical signal and inputting the nonlinear optical signal into the laser output optical fiber.
Description
Technical Field
The utility model relates to an optical imaging technical field, concretely relates to miniature optical probe of three-dimensional scanning.
Background
For high resolution neuroscience research on experimental animals, multiphoton microscopy is commonly employed as a technique for noninvasive optical brain imaging. Generally, when a desktop multiphoton microscope is used, the head of a living specimen (an animal to be studied) needs to be fixed all the time, and the living specimen is under physical restraint and emotional stress (fear, unknown) all the time during an experiment, and the behavior of the living specimen in the case of free movement cannot be effectively studied.
In order to solve the above problems, chinese patent publication No. CN107049247A discloses a miniature two-photon microscopic imaging apparatus and method, and a living body sample behavior imaging system, wherein the miniature two-photon microscopic imaging apparatus includes: a femtosecond laser for generating laser light with a wavelength of 920 nm; the femtosecond laser modulator is used for receiving the laser output by the femtosecond laser, pre-chirping the laser to compensate the laser broadening to a preset value and outputting the laser; a microprobe, the microprobe comprising: a scanning imaging part for receiving laser output by the femtosecond laser modulator, wherein the laser scans tissues inside a living body sample to excite the living body sample to generate a fluorescence signal; and a laser output optical fiber for receiving and outputting the fluorescence signal output by the scanning imaging part. The miniature two-photon microscopic imaging device can stably observe the activities of dendrites and dendrite spines of freely moving animals in natural physiological environment.
In the specific use process of the above scheme, the total weight of the micro probe and the fixed support is about 2.15g (described in paragraph 0035 of the above document), the micro probe comprises a micro electromechanical scanner (MEMS), an objective lens, a scanning lens, a collimator, a dichroic mirror and a collecting lens (see paragraph 0071 and fig. 1 of the above document for details), and the imaging principle is that the micro electromechanical scanner (MEMS) is used for two-dimensionally scanning the plane of the internal tissue of the living body sample by the laser (with wavelength of 920 nm) by rotating to change the incident angle of the laser. The objective lens is used for converging laser from the micro-electromechanical scanner to the interior of the living body sample so as to excite the living body sample to generate the fluorescence signal and outputting the fluorescence signal. The scanning lens is arranged on an optical path between the micro-electromechanical scanner and the objective lens and is used for converting laser light with angle change generated by two-dimensional scanning of the micro-electromechanical scanner into laser light with position change. The collimator is arranged between the laser input fiber and the micro-electromechanical scanner and is used for collimating the laser light output from the laser input fiber and reducing chromatic aberration between the laser lights with different frequencies so as to match the image of the objective lens together with the scanning lens. The dichroic mirror is provided between the scanning lens and the objective lens, and is used for separating the laser light and the fluorescent signal and outputting the fluorescent signal.
In the scheme, the imaging speed of the miniature probe is low (only 40 Hz), and the miniature probe can only be used for two-dimensional scanning imaging, so that the structure of the miniature probe still has an optimizable space, the weight of the miniature probe can be continuously optimized, the volume of the miniature probe can be continuously optimized, and experimental errors caused by abnormal behaviors of a living body sample due to the fact that the living body sample is not suitable for the weight of the miniature probe in the research process are reduced.
In addition, the above-described microprobe has a problem that it cannot be used in combination with a commercial endoscope. The main reasons are that the bending diameter (20 mm-40 mm) of the commercial endoscope cannot be satisfied, and the defect of detecting a no-mark signal cannot be satisfied. Particularly, since the objective lens of the miniature probe needs to be provided with the tube lens and the scanning lens, the volume cannot be further reduced (cannot be reduced to 5mm × 5 mm), and since the miniature probe mainly aims at detecting a living sample injected with fluorescent dye, when the miniature probe is used in a commercial endoscope, the miniature probe cannot clinically inject the fluorescent dye into a patient, so that the miniature probe cannot be applied to clinics.
SUMMERY OF THE UTILITY MODEL
The utility model discloses there is imaging speed too slow to current miniature probe, and weight is overweight, and is bulky, can't be applied to clinical technical problem, provides a miniature optical probe of three-dimensional scanning.
The utility model provides a basic scheme does: a three-dimensional scanning micro-optic probe comprising:
and a collimating lens for collimating the laser light output from the laser input fiber and reducing chromatic aberration between the laser lights of different frequencies and outputting a laser signal. The laser input fiber is a large mode field single mode fiber or a polarization maintaining fiber or a photonic crystal fiber;
the dichroic mirror scanner is used for separating laser and a nonlinear optical signal and outputting the nonlinear optical signal, and is also used for changing the incident angle of the laser to enable the laser to perform two-dimensional point scanning on the plane of the internal tissue of the living body sample, wherein the dichroic mirror of the dichroic mirror scanner is polarization sensitive, reflects S-type polarized light and transmits p-type polarized light;
a focusing lens for focusing the laser;
a wave plate for changing the polarization direction of the laser light;
the vertical dichroic mirror scanner is used for scanning a far-end Z axis to realize three-dimensional imaging;
an objective lens for converging the laser light from the dichroic mirror scanner into the interior of the living body sample to excite the living body sample to generate a nonlinear optical signal and for outputting the nonlinear optical signal;
and the collecting lens is used for collecting the nonlinear optical signals and imaging the nonlinear optical signals on the surface of the laser output optical fiber, and the laser output optical fiber is an imaging optical fiber bundle or a multimode optical fiber.
The utility model discloses a theory of operation and advantage lie in: in the scheme, s-shaped linear polarized laser is output from a laser input optical fiber to a collimating lens, the collimating lens collimates the received s-shaped linear polarized laser into parallel light (collimation processing), reduces chromatic aberration among lasers with different frequencies (achromatism processing), then a reflecting mirror reflects the collimated s-shaped linear polarized laser on the surface of a dichroic mirror scanner, the dichroic mirror scanner reflects the s-shaped linear polarized laser, then a focusing lens focuses the s-shaped linear polarized laser on the surface of a vertical dichroic mirror scanner, the s-shaped linear polarized laser continuously passes through a glass slide, the polarization direction of the s-shaped linear polarized laser rotates by 45 degrees, the vertical dichroic mirror scanner reflects the laser, the reflected and diffused laser passes through the glass slide again, the polarization direction of the laser rotates by 45 degrees in the same direction again to become p-shaped linear polarized light, and the light beam is changed into collimated light beam through the focusing lens and is projected on the surface of the dichroic, the dichroic mirror scanner transmits p-type linearly polarized laser light of the same wavelength, the dichroic mirror scanner is located in the back focal plane of the objective lens, the movable mirror in the dichroic mirror scanner rotates in two dimensions, and finally the p-type linearly polarized light passes through the objective lens to form a two-dimensional point scanning plane located within the sample, when the dichroic mirror scanner completes one frame of two-dimensional point scanning image, the movable dichroic mirror on the vertical dichroic mirror scanner moves a distance along the optical axis (Z direction), and the in vivo point scanning plane is moved along the optical axis by a distance through remote scanning (remotesscreening, see Boerby EJ, Smith, CW MM, et al. Abstract-free-two-dimensional multiphoton imaging of neural activity kHz. proceedings of the National Academy of Sciences of the United States of America 2012; 2919. 10.1073/pnnas. 1669. in the same principle of the biological tissue of the United States of America. 2012; 2919. the same optical axis is moved along the optical axis, three-dimensional scanning imaging is realized by scanning in the Z direction on a vertical dichroic mirror scanner, nonlinear signals excited in a sample are collected by an objective lens, pass through the dichroic mirror scanner for transmitting the wavelength of the nonlinear signals, a focusing lens and a glass slide and are focused on the surface of the vertical dichroic mirror scanner, the vertical dichroic mirror scanner transmits the wavelength of the nonlinear signals, then the nonlinear signals are focused on the surface of a laser output optical fiber by the collecting lens and finally transmitted to external photoelectric detection equipment.
In the aspect of imaging the brain of the moving animal, the scanning lens (Scan lens) and the Tube lens (Tube lens) are not arranged in the scheme, and the dichroic mirror scanner and the vertical dichroic mirror scanner are adopted to replace the dichroic mirror and the micro electro mechanical scanner in the prior art, so that the purposes of greatly improving the imaging speed, optimizing the internal structure and reducing the self weight on the premise of meeting the imaging quality are achieved. On the premise that the weight of the miniature optical probe is reduced, when data of a living body sample is acquired, particularly in the aspect of brain imaging of a moving animal, the miniature optical probe is more conveniently worn on the head of the animal, the influence of the weight on the movement of the animal is reduced, and detection errors are avoided.
In the aspect of combining with a commercial endoscope, because a patient cannot be injected with a fluorescent dye in clinical use, only 3 label-free signal modes of two-photon excitation autofluorescence, second harmonic generation and coherent anti-Stokes Raman scattering can be applied to the clinic. Specifically, two-photon excitation autofluorescence TPEAF (2 incident excitation photons, one fluorescence photon emitting a cell endogenous fluorophore), second harmonic generation SHG (one incident excitation photon, one emitting photon with a wavelength of 1/2), coherent anti-stokes raman scattering CARS (3 photons incident with 2 wavelengths, one emitting photon with a wavelength satisfying 2 incident wavelength specific raman shifts). The 3 imaging modes without the mark signals can be realized by changing the wavelength of laser in the laser incident optical fiber and configuring dichroic mirror scanners with different parameters. In addition, as the scheme is not provided with a scanning lens (Scan lens) and a Tube lens (Tube lens), the whole volume of the miniature optical probe can be effectively reduced, so as to achieve the aim of combining with a commercial endoscope for use clinically. In addition, in the scheme, because the wavelengths of the laser signal input by the laser input optical fiber and the nonlinear optical signal received by the focusing lens are different (namely, the wavelengths of the laser signal and the nonlinear optical signal have a plurality of different wavelengths), the chromatic aberration effect can be achieved through the collimating lens, and the basic imaging requirement can be met.
Now that practical applications drive technological development, engineers think of some variants, and even if there are no specific application requirements, but would be considered to be of no use at all and would not continue to develop. Engineers in the existing MEMS two-dimensional scanner are all the origins of electronic engineering (micromachining process) or mechanical engineering (structural design), and they have good technical capabilities in the structural design and process implementation of the MEMS two-dimensional scanner, especially some engineers who are transferred from the computer chip manufacturing industry, and they have made great impetus for the implementation and progress of the MEMS two-dimensional scanner technology.
There is no need or power for engineers who do MEMS two-dimensional scanners to change the structure of existing MEMS two-dimensional scanners. An improved direction for engineers in MEMS two-dimensional scanners is now to increase the scanning speed. For engineers and most researchers, if the problem of reducing the weight and volume of the micro-optical probe is encountered, since the weight and volume of the MEMS two-dimensional scanner are affected by the chip manufacturing process and the material of the reflective mirror, it is very difficult to further reduce the weight and volume of the MEMS two-dimensional scanner, which is basically equivalent to reaching the technical bottleneck, and for engineers, the weight and volume of the micro-optical probe is equivalent to the technical bottleneck (cannot be improved based on the original design).
The utility model discloses miniature optical probe is through to adopt dichroic mirror scanner and perpendicular dichroic mirror scanner to replace dichroic mirror and micro electromechanical system scanner among the prior art to omit scanning lens (Scan lens) and tube lens (tube lens), under the prerequisite that satisfies imaging quality, improve imaging speed greatly, optimize inner structure, reduce the purpose of self weight. The requirements of small volume and light weight of the miniature optical probe are met when the brain of the moving animal is imaged. In addition, the collimating lens and the objective lens have the achromatic function in the scheme, and the endoscope can be combined with the existing commercial endoscope without injecting fluorescent dye to a patient.
The laser beam source further comprises a reflecting mirror, wherein the reflecting mirror is arranged on a light path between the collimating lens and the dichroic mirror scanner and is used for adjusting the angle of the laser output by the collimating lens and reflecting the laser to the dichroic mirror scanner.
The design of adding the speculum can conveniently adjust the incident angle of the laser of inputing on the dichroic mirror scanner, the formation of image of being convenient for.
Furthermore, the reflector is used for turning the light path, the material is optical glass or high molecular polymer, the reflector comprises a transmission surface and a reflection surface, the transmission surface is provided with an optical coating film for enhancing the transmissivity, and the reflection surface is provided with an optical coating film for enhancing the reflectivity.
By the design, a better reflection effect can be achieved.
Further, the dichroic mirror scanner includes a dichroic mirror and an annular micro-electromechanical driver that does not affect transmission of the nonlinear optical signal, the dichroic mirror is covered on the annular micro-electromechanical driver, and the micro-electromechanical driver can drive the dichroic mirror to change an angle, or a movable mirror is manufactured by a process integration method using a material relatively transparent to visible light and near infrared light, such as silicon dioxide, and optical coating processing is performed on the movable mirror to form the dichroic mirror.
The existing micro-electromechanical scanner (MEMS) includes a plurality of mirrors and a plurality of MEMS actuators, wherein the MEMS actuators can respectively actuate the mirrors to change angles. In this scheme, the mirror plate is replaced by a dichroic mirror plate, and in this scheme the mems driver does not affect the transmission of the nonlinear optical signal. Its dichroic lens has played the effect of dichroic mirror among the prior art promptly, has also reached the effect that lets micro-electromechanical driver change the laser reflection angle, but also can reach and reduce component quantity for whole miniature optical probe volume is littleer, weight is lighter. By the assembling mode, the dichroic mirror scanner can be obtained at low cost.
Furthermore, the back surface of the wafer of the dichroic mirror scanner is hollowed by etching technology with transmission holes for transmitting the nonlinear optical signal, and the transmission holes are positioned on the back surface of the dichroic mirror.
Above-mentioned design, the comparatively ripe product of acquisition that can be quick.
The optical fiber comprises a large mode field single mode fiber, a polarization maintaining fiber and a photonic crystal fiber.
The design can meet the purpose that when the scheme is matched with a commercial endoscope for use, lasers with different wavelengths need to be input. The scheme and the commercial endoscope can be matched for use more conveniently.
The laser device further comprises a laser output optical fiber which is an optical fiber bundle or a multimode optical fiber.
The design can facilitate the collection of nonlinear optical signals and meet the imaging requirement.
The device further comprises a shell, the shell is a sealing structure made of high molecular polymer materials, and the focusing lens, the collimating lens, the dichroic mirror scanner, the objective lens and the reflector are all arranged in the shell.
Such a design enables other elements to be tightly packed, waterproof, provide a biocompatible surface, and do not cause any damage to the living sample (or human body).
Drawings
FIG. 1 is a schematic diagram of an embodiment of a micro optical probe according to the present invention;
FIG. 2 is a schematic view of the structure of FIG. 1;
FIG. 3 is a schematic view showing the state in which the apparatus of FIG. 1 is mounted on a mouse;
fig. 4 is a schematic structural diagram of a dichroic mirror scanner;
FIG. 5 is a view from another perspective of FIG. 4;
FIG. 6 is a front cross-sectional view of a dichroic mirror scanner produced by etching;
FIG. 7 is a schematic view of the present invention in use with a commercial endoscope;
fig. 8 is a schematic diagram of the three-dimensional scanning according to the present invention.
Detailed Description
The following is further detailed by the specific embodiments:
reference numerals in the drawings of the specification include: collimating lens 10, mirror 20, dichroic mirror scanner 30, objective lens 40, focusing lens 50, slide 60, vertical dichroic mirror scanner 70, collecting lens 80, laser input fiber 90, laser output fiber 91, housing 100, substrate 11, driver 22, dichroic mirror 33.
The embodiment is basically as shown in the attached figures 1 and 2: the three-dimensional scanning micro optical probe sequentially comprises the following components according to an optical path: the laser scanning device comprises a collimating lens 10, a reflecting mirror 20, a dichroic mirror scanner 30, an objective lens 40, a focusing lens 50, a glass slide 60, a vertical dichroic mirror scanner 70 and a collecting lens 80, wherein the objective lens 40 is an aspheric lens, and the collimating lens 10 is used for collimating laser light output from a laser input fiber 90, reducing chromatic aberration among laser light with different frequencies and outputting a laser signal to the reflecting mirror 20. The objective lens 40 of the aspherical lens has a curvature radius varying with the central axis to improve optical quality, reduce optical elements, and reduce design cost.
The mirror 20 is used to adjust the angle of the laser light output by the collimator lens 12 and reflect the laser light to the dichroic mirror scanner 30. In other embodiments, the reflecting mirror 20 may be a plurality of pieces for translating the optical path, and is made of optical glass or high molecular polymer, and has an optical coating film for enhancing the transmittance on the transmission surface and an optical coating film for enhancing the reflectance on the reflection surface;
the dichroic mirror scanner 30 is used for separating the laser and the nonlinear optical signal and outputting the nonlinear optical signal, and is also used for changing the incident angle of the laser, the dichroic mirror scanner 30 reflects s-shaped linear polarized laser, then the focusing lens 50 focuses the s-shaped linear polarized laser on the surface of the vertical dichroic mirror scanner 70, the s-shaped linear polarized laser continuously passes through the glass slide 60, the polarization direction of the s-shaped linear polarized laser rotates by 45 degrees, the vertical dichroic mirror scanner 70 reflects the laser, the reflected and dispersed laser passes through the glass slide 60 again, the polarization direction of the laser rotates by 45 degrees in the same direction again, the laser becomes p-shaped linear polarized light, the collimated light beam is projected on the surface of the dichroic mirror scanner 30 through the focusing lens 50 again, the dichroic mirror scanner 30 transmits the p-shaped linear polarized laser with the same wavelength, the dichroic mirror scanner 30 is located on the back focal plane of the objective lens 40, the movable lens in the dichroic mirror scanner 30 performs two-dimensional rotation, finally, p-type linearly polarized light passes through the objective lens 40 to form a two-dimensional Scanning track in the sample, when the dichroic mirror scanner 30 completes one frame of two-dimensional point Scanning image, the movable dichroic mirror on the vertical dichroic mirror scanner 70 moves a distance along the optical axis (Z direction), the two-dimensional point Scanning plane of the internal tissue of the living body sample also moves a distance along the optical axis by the principle of Remote Scanning (Remote Scanning), three-dimensional Scanning is realized by Scanning in the Z direction on the vertical dichroic mirror scanner 70, the nonlinear signal excited in the sample is collected by the objective lens 40, passes through the dichroic mirror scanner 30 which transmits the wavelength of the nonlinear signal, the focusing lens 50, the slide 60 is linearly focused on the surface of the vertical dichroic mirror scanner 70 in the Y direction, the vertical dichroic mirror scanner 70 transmits the wavelength of the nonlinear signal, then, the collecting lens 80 linearly focuses the nonlinear signal on the surface of the laser output fiber 91 in the X direction, and finally transmits the nonlinear signal to the external photoelectric detection device, wherein the laser input fiber 90 is a large mode field single mode fiber or a polarization maintaining fiber or a photonic crystal fiber, the laser output fiber 91 is a fiber bundle or a multimode fiber, and the three-dimensional scanning schematic diagram is shown in fig. 8 in detail;
in addition, due to the point scanning mode adopted by the present invention, the detection of the moving point-like fluorescence is accomplished by a Photomultiplier Tube (PMT);
the specific dichroic mirror scanner 30 comprises a dichroic mirror 33 and a micro-electromechanical driver 22 which does not affect the transmission of the nonlinear optical signal, the dichroic mirror 33 covers the micro-electromechanical driver 22, and the micro-electromechanical control surface can drive the dichroic mirror 33 to change the angle;
the device further comprises a shell 100, the shell 100 is a sealing structure made of high molecular polymer materials, and the collimating lens 10, the reflecting mirror 20, the dichroic mirror scanner 30, the objective lens 40, the focusing lens 50, the glass slide 60, the vertical dichroic mirror scanner 70 and the collecting lens 80 are all arranged in the shell 100.
When in specific use: the collimating lens 10 of the present embodiment uses an achromatic collimating lens 10(#65-286, Edmund Optics Inc., Barrington, NJ, USA; diameter: 2mm, equivalent focal length: 3mm, dedicated near infrared light) capable of collimating the output laser and reducing chromatic aberration between different frequency components of the femtosecond laser, which is advantageous for improving transmission efficiency (up to 50% from the laser source to the sample), beam focusing and excitation efficiency. Of course, the design wavelength may be achromatic, and any 2 wavelengths between 700nm and 1600nm, which may be 817nm and 1064nm, but are not limited to these two wavelengths, and the material is optical glass or high molecular polymer, and the surface has an optical coating film with enhanced transmittance for laser collimation.
The numerical aperture of the objective lens 40 is 0.7 (in water), the diameter of the movable dichroic mirror in the dichroic mirror scanner 30 is 2mm, the packaging size is 5 × 5mm2, the first resonance frequency is 400Hz, the maximum optical scanning angle is ± 15 degrees, the moving range of the vertical dichroic mirror scanner in the Z direction is 300um, in addition, the actual single-mode fiber core of the laser output fiber 91 is considered to be 3um at the minimum, and the size of the support frame is 512 × 512 × 100, and the maximum field of view is 400 × 400 × 300um 3. Specifically, the mirror plate 20 on the existing microelectromechanical scanner is replaced with a dichroic mirror 33. In yet another embodiment, the objective lens 40 is an achromatic design with any 2 wavelengths between 700nm and 1600nm, typically 817nm and 1064nm, but not limited to these two wavelengths, and is made of optical glass or polymer, and has an optical coating with enhanced transmittance on its surface, and the structure can be a conventional refractive lens, a gradient index lens or a gradient index lens with a curved profile, for focusing the incident laser light in the external sample, exciting the nonlinear optical signal, and collecting the nonlinear optical signal in an epi-detection manner.
In yet another embodiment, focusing lens 50 is of achromatic design, designed at any 2 wavelengths between 350nm and 700nm, typically 408nm and 633nm, but not limited to these two wavelengths, and is made of optical glass or polymer with optical coatings of enhanced transmission on its surface for focusing and coupling the received nonlinear optical signal into the collection fiber.
The specific laser input fiber 90 is a large mode field single mode fiber or a polarization maintaining fiber or a photonic crystal fiber, the design wavelength is any wavelength between 700nm and 1600nm, and the material is optical glass, quartz, plastic or high molecular polymer and is used for transmitting laser generated by an external excitation light source.
The dichroic mirror scanner 30 is of a uniaxial structure, the lens is a dichroic mirror 33, and the dichroic mirror 33 is made of optical glass or high molecular polymer and is used for reflecting s-type polarized laser with the wavelength of 700nm-1600nm and transmitting p-type polarized laser with the wavelength of 700nm-1600nm and nonlinear optical signals with the wavelength of 350nm-700 nm.
The lens of the vertical dichroic mirror scanner 70 is a dichroic mirror 44 sheet, and the dichroic mirror 44 sheet is optical glass or high molecular polymer, and is used for reflecting laser with the wavelength of 700nm-1600nm and transmitting nonlinear optical signals with the wavelength of 350nm-700 nm.
The objective lens 40 is an achromatic design, and is designed to have any 2 wavelengths between 700nm and 1600nm, typically 817nm and 1064nm, but not limited to these two wavelengths, and is made of optical glass or high molecular polymer, and has an optical coating with a surface with enhanced transmittance, and the structure may be a conventional refractive lens, a gradient index lens or a gradient index lens with a curved surface profile, and is used for focusing incident laser on the surface of a living body sample (or human body) to excite a nonlinear optical signal.
The mirror 20 is placed at 45 degrees for reflecting the laser light (laser signal) 90 degrees to the dichroic mirror scanner 30.
In this embodiment, the volume of the final housing 100 (i.e., the entire three-dimensional scanning micro-optical probe) is less than 5mm, and less than the outer diameter (9 mm-11 mm) of a commercial endoscope, and the final housing can be used directly with a commercial endoscope. And the combined use is convenient, and in addition, the view of the commercial endoscope is shielded very little. In addition, in this embodiment, the collecting lens 80 feeds back the nonlinear optical signal to an external photoelectric imaging device, which is composed of a plurality of photomultiplier tube detectors, a plurality of dichroic mirrors, a plurality of optical filters, and a plurality of lenses, and is configured to receive the nonlinear optical signal transmitted by the laser output fiber 91 and complete photoelectric conversion for processing by a computer. When the optical fiber laser probe is used with a commercial endoscope, since the laser input fiber 90 and the laser output fiber 91 need to be installed in a reduced size as much as possible, and the positions of the laser input fiber 90 and the laser output fiber 91 on the three-dimensional scanning micro optical probe are very close to each other, a plurality of reflecting mirrors 20 (as shown in fig. 7) are provided in the present embodiment for adjusting the optical path, so as to be conveniently used with the commercial endoscope.
When in specific use, the utility model can be arranged on the top of the head of a mouse (as shown in figure 3). In other embodiments, the composition can be also applied to the top of the head of other animals, such as marmoset, rabbit, etc.
In this embodiment, a dichroic mirror scanner 30 (as shown in fig. 4 and 5) is further disclosed, which includes a substrate 11, a driver 22, and a mirror surface, where the driver 22 is fixed on the substrate 11, the driver 22 is configured to change an angle of the mirror surface according to an instruction, the mirror surface includes a plurality of dichroic mirrors 33, the dichroic mirrors 33 include ultrathin sheets, the ultrathin sheets are coated with dichroic films, the dichroic mirrors 33 are configured to reflect laser light and allow nonlinear optical signals to pass through, the driver 22 includes a plurality of mirror bodies through which the nonlinear optical signals can pass, the dichroic mirrors 33 are respectively fixed on the mirror bodies, the mirror bodies are ring-shaped, the dichroic mirrors 33 are fixed on surfaces of the mirror bodies, the substrate 11 is made of a high polymer, and the mirror surfaces are in a shape of a circular disk.
When in specific use: of course, in other embodiments, it is also possible to select an existing micro-electromechanical scanner (MEMS), replace the mirror 20 side with the dichroic mirror 33, and etch out the back side of the substrate 11 at the position corresponding to the dichroic mirror 33 by deep reactive ion etching (as shown in fig. 6). The driver 22 of the conventional two-dimensional scanning device is usually driven by electrostatic, and the present embodiment adopts the design of the conventional driver 22 in the design of the driver 22, and specifically, the mems cap surface micromachining process soi mems ps can be adopted. This technology is the prior art, and is not described herein again, and in this application, the following differences are emphasized.
First, in the present embodiment, the mirror surface is selected as the dichroic mirror 33 (in the soi mems process, the surface of the reflecting mirror 20 formed by the second layer of polysilicon, the second layer of phosphorosilicate glass, and the third layer of polysilicon is replaced by an ultrathin sheet coated with a dichroic film), that is, the reflecting mirror 20 is selected in the prior art, and the dichroic mirror 33 is selected in the present embodiment. Second, regarding the transmittance of the substrate 11, in practical use, the nonlinear optical signal is required to be transmitted completely from the two-dimensional scanner, so that the selection of the substrate 11 is particularly important, and the back of the dichroic mirror 33 is a hollow structure (the back of the substrate 11 is hollow by a deep reactive ion etching technique, and an annular mirror body is arranged), so as to achieve the effect of facilitating the transmission of the nonlinear optical signal.
Specifically, in the hollow design of the substrate 11, the substrate 11 that has been hollow may be selected as a supporting structure of the driver 22, the driver 22 is selected from an annular driver 22, and torsion beams are disposed at two ends of the driver 22, so that the effect of facilitating transmission of the nonlinear optical signal may also be achieved.
The above description is only for the embodiments of the present invention, and the common general knowledge of the known specific structures and characteristics in the schemes is not described herein too much, and those skilled in the art will know all the common technical knowledge in the technical field of the present invention before the application date or the priority date, can know all the prior art in this field, and have the ability to apply the conventional experimental means before this date, and those skilled in the art can combine their own ability to perfect and implement the schemes, and some typical known structures or known methods should not become obstacles for those skilled in the art to implement the present application. It should be noted that, for those skilled in the art, without departing from the structure of the present invention, several modifications and improvements can be made, which should also be regarded as the protection scope of the present invention, and these will not affect the effect of the implementation of the present invention and the practicability of the patent. The scope of the claims of the present application shall be determined by the contents of the claims, and the description of the embodiments and the like in the specification shall be used to explain the contents of the claims.
Claims (10)
1. A three-dimensional scanning micro-optic probe comprising:
a collimating lens for collimating the laser light output from the laser input fiber, reducing chromatic aberration between the laser lights of different frequencies, and outputting a laser signal;
it is characterized by also comprising:
the dichroic mirror scanner is used for separating the laser and the nonlinear optical signal and outputting the nonlinear optical signal, and is also used for changing the incident angle of the laser to enable the laser to carry out two-dimensional point scanning on the plane of the internal tissue of the living body sample;
an objective lens for converging the laser light from the dichroic mirror scanner into the interior of the living body sample to excite the living body sample to generate a nonlinear optical signal and for outputting the nonlinear optical signal;
a focusing lens for focusing the laser;
wave plate: for changing the polarization direction of the laser light;
the vertical dichroic mirror scanner is used for scanning a far-end Z axis to realize three-dimensional imaging;
and the collecting lens is used for collecting the nonlinear optical signal and inputting the nonlinear optical signal into the laser output optical fiber.
2. The three-dimensional scanning micro optical probe of claim 1, wherein: the reflecting mirror is arranged on a light path between the collimating lens and the dichroic mirror scanner and used for adjusting the angle of laser output by the collimating lens and reflecting the laser to the dichroic mirror scanner, the collimating lens is made of optical glass or high polymer, the reflecting mirror comprises a transmission surface and a reflection surface, the transmission surface is provided with an optical coating film for enhancing the transmissivity, and the reflection surface is provided with an optical coating film for enhancing the reflectivity.
3. The three-dimensional scanning micro optical probe of claim 1, wherein: the dichroic mirror scanner comprises a dichroic mirror and an annular micro-electromechanical driver which does not affect the transmission of nonlinear optical signals, the dichroic mirror is covered on the annular micro-electromechanical driver, the micro-electromechanical driver can drive the dichroic mirror to change the angle, or a movable mirror is manufactured by a process integration method by using a material which is relatively transparent to visible light and near infrared light, such as silicon dioxide, and optical coating processing is carried out on the movable mirror to form the dichroic mirror.
4. The three-dimensional scanning micro optical probe according to any one of claims 1-3, wherein: the back of the wafer of the dichroic mirror scanner is hollowed by etching technology with a transmission hole for transmitting the nonlinear optical signal, the transmission hole is positioned on the back of the dichroic mirror, and the dichroic mirror scanner is positioned on the back focal plane of the objective lens.
5. The three-dimensional scanning micro optical probe according to any one of claims 1-3, wherein: the dichroic mirror of the dichroic mirror scanner is polarization sensitive, reflects S-polarized light, and transmits p-polarized light.
6. The three-dimensional scanning micro optical probe according to any one of claims 1-3, wherein: the fiber laser also comprises a laser input fiber, wherein the laser input fiber is a large mode field single-mode fiber or a polarization maintaining fiber or a photonic crystal fiber.
7. The three-dimensional scanning micro optical probe according to any one of claims 1-3, wherein: the laser device also comprises a laser output optical fiber which is an optical fiber bundle or a multimode optical fiber.
8. The three-dimensional scanning micro optical probe according to any one of claims 1-3, wherein: the vertical dichroic mirror scanner comprises a dichroic mirror and an annular micro-electromechanical driver which does not affect the transmission of nonlinear optical signals, wherein the dichroic mirror is covered on the annular micro-electromechanical driver, and the micro-electromechanical driver can drive the dichroic mirror to move vertical to the surface of a chip, or a movable mirror is manufactured by a process integration method by using a material which is relatively transparent to visible light and near infrared light, such as silicon dioxide, and optical coating processing is carried out on the movable mirror to form the dichroic mirror.
9. The three-dimensional scanning micro optical probe according to any one of claims 1-3, wherein: the back of the wafer of the vertical dichroic mirror scanner is hollowed by etching technology to form a transmission hole for transmitting the nonlinear optical signal, the transmission hole is positioned on the back of the vertical dichroic mirror, and the vertical dichroic mirror scanner is positioned on the back focal plane of the focusing lens.
10. The three-dimensional scanning micro optical probe according to any one of claims 1-3, wherein: the device also comprises a shell, wherein the shell is a sealing structure made of high molecular polymer materials, and the focusing lens, the collimating lens, the collecting lens, the dichroic mirror scanner, the glass slide, the vertical dichroic mirror scanner, the objective lens and the reflecting mirror are all arranged in the shell.
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| CN201820971110.6U CN209826672U (en) | 2018-06-22 | 2018-06-22 | Three-dimensional scanning miniature optical probe |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110623636A (en) * | 2018-06-22 | 2019-12-31 | 凝辉(天津)科技有限责任公司 | Three-dimensional scanning miniature optical probe |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110623636A (en) * | 2018-06-22 | 2019-12-31 | 凝辉(天津)科技有限责任公司 | Three-dimensional scanning miniature optical probe |
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