CN108169307A - Dual chip perspiration sensor and preparation method thereof - Google Patents

Dual chip perspiration sensor and preparation method thereof Download PDF

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Publication number
CN108169307A
CN108169307A CN201810195191.XA CN201810195191A CN108169307A CN 108169307 A CN108169307 A CN 108169307A CN 201810195191 A CN201810195191 A CN 201810195191A CN 108169307 A CN108169307 A CN 108169307A
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China
Prior art keywords
electrode
chip
pad
external connection
working electrode
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Granted
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CN201810195191.XA
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Chinese (zh)
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CN108169307B (en
Inventor
颜丹
李强华
董青龙
李冠华
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Shenzhen Refresh Biosensor Technology Co ltd
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Shenzhen Refresh Intelligent Electronic Co Ltd
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Priority to CN201810195191.XA priority Critical patent/CN108169307B/en
Publication of CN108169307A publication Critical patent/CN108169307A/en
Priority to PCT/CN2018/092119 priority patent/WO2019169788A1/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28Electrolytic cell components
    • G01N27/30Electrodes, e.g. test electrodes; Half-cells
    • G01N27/327Biochemical electrodes, e.g. electrical or mechanical details for in vitro measurements
    • G01N27/3271Amperometric enzyme electrodes for analytes in body fluids, e.g. glucose in blood
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/128Microapparatus
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/01Measuring temperature of body parts ; Diagnostic temperature sensing, e.g. for malignant or inflamed tissue
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/145Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue
    • A61B5/14507Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue specially adapted for measuring characteristics of body fluids other than blood
    • A61B5/14517Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue specially adapted for measuring characteristics of body fluids other than blood for sweat
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/145Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue
    • A61B5/1486Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue using enzyme electrodes, e.g. with immobilised oxidase
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/48Other medical applications
    • A61B5/4869Determining body composition
    • A61B5/4875Hydration status, fluid retention of the body
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28Electrolytic cell components
    • G01N27/30Electrodes, e.g. test electrodes; Half-cells
    • G01N27/327Biochemical electrodes, e.g. electrical or mechanical details for in vitro measurements
    • G01N27/3275Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction
    • G01N27/3277Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction being a redox reaction, e.g. detection by cyclic voltammetry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28Electrolytic cell components
    • G01N27/30Electrodes, e.g. test electrodes; Half-cells
    • G01N27/327Biochemical electrodes, e.g. electrical or mechanical details for in vitro measurements
    • G01N27/3275Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction
    • G01N27/3278Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction involving nanosized elements, e.g. nanogaps or nanoparticles
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2560/00Constructional details of operational features of apparatus; Accessories for medical measuring apparatus
    • A61B2560/02Operational features
    • A61B2560/0223Operational features of calibration, e.g. protocols for calibrating sensors
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/04Arrangements of multiple sensors of the same type
    • A61B2562/043Arrangements of multiple sensors of the same type in a linear array

Abstract

The present invention provides a kind of dual chip perspiration sensors, including support plate, signal processing chip and electrode chip are provided on support plate, electrode chip is provided with working electrode, reference electrode and external connection pad, external connection pad includes work pole external connection pad and reference electrode external connection pad, working electrode is connect with work pole external connection pad by conducting wire, and reference electrode is connect with reference electrode external connection pad by conducting wire;External connection pad is connect with the pad on signal processing chip by lead key closing process, and the other pad on signal processing chip connects the pad on support plate by lead key closing process;Electrode chip and signal processing chip are encapsulated in by packaging plastic on support plate, and the head of working electrode leaks out packaging plastic.The signal that working electrode obtains can be directly delivered to signal processing chip by the conducting wire of wire bonding, and noise is small, so as to realize the function of the micro constitutent in detection human sweat.The present invention also provides the preparation methods of above-mentioned dual chip perspiration sensor.

Description

Dual chip perspiration sensor and preparation method thereof
Technical field
The present invention relates to sensor technical fields, and in particular to a kind of dual chip perspiration sensor and preparation method thereof.
Background technology
Human sweat mainly by 98~99% water (pH value 4.2~7.5), sodium chloride (about 300mg/100mL), 1~ 2% other substances (including a small amount of urea, lactic acid, aliphatic acid, glucose etc.) form.
When human body is when being moved, a large amount of sweat can be flowed out, when averagely containing Na in every liter of sweat+Less than 58.4mg, K+ Less than 10mg, Cl-During less than 45.4mg, human body will will appear a series of problems, so that human body is to regarding, the apparent mistake of auditory stimulation Quick, the regulating power of the antibody of body also decreases, it may appear that muscle cramp, even dehydration, the symptoms such as stupor, if it is possible to The content of the above-mentioned ion in these human sweats is detected in time, then people's early warning can be given in time, so as to avoid tragedy Occur, there are no the contents that related sensor and equipment can detect the micro constitutent in human sweat in time in the industry for current line.
Invention content
The technical problem to be solved by the present invention is to:A kind of content that can detect the micro constitutent in human sweat is provided Dual chip perspiration sensor.
A kind of dual chip perspiration sensor including support plate, is provided with signal processing chip and electrode chip, electrode on support plate Chip is provided with working electrode, reference electrode and external connection pad, and external connection pad includes work pole external connection pad and reference electrode external connection Pad, working electrode are connect with work pole external connection pad by conducting wire, and reference electrode is with reference electrode external connection pad by leading Electric line connects;
External connection pad is connect with the pad on signal processing chip by lead key closing process, another on signal processing chip Outer pad connects the pad on support plate by lead key closing process;
Electrode chip and signal processing chip are encapsulated in by packaging plastic on support plate, and the head of working electrode leaks out encapsulation Glue.
Preferably, capillary piece is further included, capillary piece is provided with the first pore;
Capillary piece is set to the top of packaging plastic, and sweat reaction compartment, sweat are provided between capillary piece and working electrode Reaction compartment is connected to another end face of capillary piece by the first pore;
First pore is located at the top of sweat reaction compartment;Or, first pore be located at the side of sweat reaction compartment, First pore is connected to sweat reaction compartment by sweat runner, and sweat runner is set to the top of packaging plastic or capillary piece Bottom, sweat runner are capillary channel.Sweat is flowed to by the first pore and sweat runner on reaction electrode (working electrode), After sweat flows into, working electrode and reference electrode can be connected, generates electrochemical reaction.
Preferably, sweat reaction compartment is provided with gel;
The side of sweat reaction compartment is provided with third water-absorbent material, and third water-absorbent material extends to the side of packaging plastic.
Preferably, another end of support plate is provided with the second water-absorbent material, and the second water-absorbent material is absorbed water with gel by third Material connects.
Preferably, working electrode is annular electrode, and electrode perforations are provided in the middle part of working electrode, and support plate is provided with second Pore, the first pore, sweat reaction compartment, electrode perforations and the second pore are sequentially communicated.
Preferably, electrode perforations are located at the middle part of working electrode, and electrode perforations are conductive hole or insulated hole.
Preferably, electrode perforations are conductive hole, and the bottom side of electrode perforations is chip bonding pad, and chip bonding pad is annular welds Disk, electrode perforations are soldered to support plate pad by chip bonding pad, and support plate pad is annular pad, and support plate pad is located at the second capillary The side in hole.
Preferably, reference electrode is in a ring or semi-circular is arranged outside with working electrode, reference electrode and working electrode Between be provided with gap, gap is a part for sweat reaction compartment.
Preferably, the side of working electrode is designed with temperature-sensitive circuit;It is provided with and adds on electrode chip, capillary piece or packaging plastic Heater circuit;Heater circuit is located at that the side of working electrode is relatively near or position farther out.
Temperature-sensitive circuit is used for the reaction temperature of the biological respinse enzyme of monitoring electrode, so that system can be according to temperature Degrees of data compensates result of calculation.Heater circuit can also be arranged on electrode chip can also be at other positions.Heating electricity Road and temperature-sensitive circuit are used cooperatively, it is ensured that the operating condition of biological respinse enzyme is in controllable and steady state.
Preferably, signal processing chip only includes front end amplification driving circuit;Front end amplification driving circuit output simulation letter Number to MCU (master controller), AD samplings and signal logic processing are completed by MCU.
Preferably, signal processing chip is only deposited comprising front end amplification driving circuit, AD sample circuits, logical process and calibration Storing up electricity road, logical process and calibration storage circuit export exact value and give MCU (master controller) processing;Calibrate storage unit simultaneously It is which time uses that the sensor (working electrode), which can be recorded, so as to calibrate and apply according to access times.
Preferably, governor circuit is further included, biological respinse enzyme is provided on working electrode, signal processing chip record has life Lot number, calibration data, the access times in application process and the reaction time of object reaction enzymes;Signal processing chip or governor circuit It compensates and calculates according to the lot number of biological respinse enzyme, calibration data, access times and reaction time information.
Preferably, the heating of all testing temperatures control heater circuit for the working electrode that governor circuit is sensed according to temperature-sensitive circuit Power, so as to which the operating ambient temperature of biological respinse enzyme be controlled to be in the temperature range of setting, so that at biological respinse enzyme In optimum activity state, such as the survival temperature of glucose response enzyme is 20 DEG C~70 DEG C, and the optimum activity temperature of glucose is 30 DEG C~50 DEG C, then the operating ambient temperature that can adjust biological respinse enzyme is 30 DEG C~50 DEG C;When there are many biological anti- When answering enzyme, respective optimum activity temperature can be combined, is adjusted to the acceptable best public temperature of each biological respinse enzyme Spend range.
Preferably, the electrode signal that signal processing chip receives includes current mode signal, such as glucose electrode, lactic acid electrode Deng size of current range 10nA~10uA;Voltage mode signals, such as K+ ion electrodes, Na+ ion electrodes, potential range 0.1mV Between~1000mV;Electrode pin can apply dynamic exciting voltage, and the voltage range of dynamic exciting voltage is -1V~1V;Core A variety of gains are supported in the design of piece internal amplification circuit.
Preferably, the thickness of signal processing chip is less than the thickness of electrode chip;Electrode chip include table top, groove and from Table top is to the slope of groove transition;
Groove is arranged on the side of table top;Working electrode is set on table top, and external connection pad is set on groove, connects work The conductive trace portion for making electrode and external connection pad is located on slope;The thickness of signal processing chip is less than the thickness of groove;Ditch The width of slot is 100 μm~300 μm, and the depth of groove is 50 μm~200 μm.
Preferably, the biological respinse enzyme of working electrode surface or selective reaction object can be capped gel thereon, protection Working electrode, gel can penetrate sweat, while prevent the sensors substances such as biological respinse enzyme enzyme to outward leakage;
Preferably, electrode chip only has working electrode and reference electrode;Or electrode chip have working electrode, reference electrode, Temperature sense circuit, heater circuit;Temperature sense circuit is used to measure the temperature in shell temperature and enzyme reaction section.
Preferably, signal processing chip is only comprising front end amplification driving circuit, and signal processing chip simulation output is to MCU (main controller), AD samplings and signal logic processing are completed by MCU.
Preferably, model processing chip is only deposited comprising front end amplification driving circuit, AD sample circuits, logical process and calibration Storing up electricity road exports exact value and gives MCU processing;It is which time uses (work to calibrate storage unit simultaneously and can record the sensor Make the access times and access times of biological respinse enzyme thereon of electrode), so as to calibrate and answer according to access times With.
Preferably, the preparation method of working electrode includes:
A. one layer of chromium and one layer of gold are plated on resin film;
B. layer gold and layers of chrome are etched, makes the circuit comprising electrode, pad and connection electrode and pad;
C. a strata paraxylene is deposited;
D. the parylene layer on etched electrodes and pad exposes electrode and pad;Electrode includes Na+Sensor electricity Pole, K+Sensor electrode and PVB electrodes;PVB electrodes are as Na+Sensor electrode, K+The reference electrode of sensor electrode, in Na+ Sensor electrode, K+Na is made on sensor electrode respectively+Ion selective membrane and K+Ion selective membrane can detect in time Na in human sweat+、K+Content perspiration sensor, Na can be detected in time+、K+Content in human sweat, can People's early warning is given in time, so as to avoid tragedy.
Different reaction enzymes or ion selective membrane are applied with appropriate method according to different application demands on the electrode Different sensors can be prepared, different ingredients can be detected respectively;Electrode includes Na in this research+Sensor electricity Pole, K+Sensor electrode and PVB electrodes;PVB electrodes are as Na+Sensor electrode, K+The reference electrode of sensor electrode.
Preferably, glucose electrode, lactic acid electrode and AgCl reference electrodes are further included;Na+Sensor electrode and K+Sensor Electrode can also do reference electrode with Ag/AgCl.
Preferably, Cl- elements sensor, Ca are further included2+Sensor electrode, Mg2+Sensor electrode etc..
Preferably, Na+Sensor electrode, K+Sensor electrode is the working end of working electrode, and PVB electrodes are reference electrode Working end.
Preferably, it is further included after step D:
E. silver layer is made on PVB electrodes, the thickness of silver layer is less than the thickness of Parylene;
F. by Na+Ion selectivity coating solution is injected into Na+Sensor electrode;
G. by K+Ion selectivity coating solution is injected into K+Sensor electrode;
H. by PVB reference electrodes solution coating to PVB electrodes.
Preferably, by Na in step F+Ion selectivity coating solution is:
By Na ionophores (0.5%~1.5%, w/w), Na-TFPB (0.3%~0.7%, w/w), PVC (25%~ 43%, w/w), DOS (60%~75%, w/w) mixes, then the 100mg mixtures is dissolved in the four of (600~750) uL in proportion In hydrogen furans, Na is formed+Ion selectivity coating solution.
Preferably, by K in step G+Ion selectivity coating solution is:
By valinomycins (1%~3%, w/w), NaTPB (0.3%~0.7%, w/w), PVC (30%~37%, w/w), DOS (55%~76%, w/w) is mixed in proportion, then the 100mg mixtures is dissolved in the cyclohexanone of (300~400) uL, shape Into K+Ion selectivity coating solution.
Preferably, it is by PVB reference electrodes solution in step H:
79.1mg PVB and (40~60) mg NaCl are dissolved in 1ml methanol, then will (1~3) mg F127 with (0.1~ 0.3) mg multi-walled carbon nanotubes are added in above-mentioned solution, finally prepare PVB reference electrode solution.
Preferably, step E is further included:Silver layer is made on Ag/AgCl electrodes, the thickness of silver layer is less than Parylene Thickness;
Preferably, it is further included after step H:
I. FeCl3 solution is injected on Ag/AgCl electrodes;
J. by Prussian blue media deposition in the layer gold of glucose sensor electrode, Prussian blue medium layer is obtained, The mixed solution of glucose oxidase/Chitosan/carbon nanotube is coated in the Prussian blue medium layer obtained;
K. by Prussian blue media deposition in the layer gold of lactic acid sensor electrode, Prussian blue medium layer is obtained;It will be poly- Chitose/first requirement for solution deposition is dry on Prussian blue/Au layers of electrode;Then, lactate oxidase solution is coated, is done It is dry;Finally, it is coated with Chitosan/carbon nanotube mixed solution.
Preferably, it is by the mixed solution of glucose oxidase/Chitosan/carbon nanotube in step J:
J1. Chitosan is dissolved in 1%~3% acetic acid, using the magnetic agitation of 1h, formed 1% Chitosan it is molten Liquid;
J2. the Chitosan solution of formation and the single wall carbon of (1~3) 2mg/ml are received using the ultrasonic agitation of more than 30min Mitron is sufficiently mixed, and forms thick mixed solution;
J3. the thick mixed solution of formation is mixed with glucose oxidase solution, mixed volume ratio 2:1;
Wherein:Glucose oxidase solution is dissolved in for glucose oxidase in PBS, (8~15) mg/ml, pH value 7.2.
It preferably, will be in step K:It is in the layer gold of lactic acid sensor electrode by Prussian blue media deposition:
Using cyclic voltammetry (from -0.5V~0.6V, opposite with Ag/AgCl reference electrodes), Prussian blue medium is sunk Product carries out the electricity cycle in 10 periods in the layer gold of lactic acid sensor electrode, voltage changing rate 50mV/s, Prussian blue The allocation ratio of medium is:2.5mMol FeCl3:100mMol KCl:2.5mMol K3Fe(CN)6Solution:100mMol HCl.
Preferably, the thickness of layers of chrome is 20~40nm, 30~100nm of thickness of layer gold, and the thickness of parylene layer is 200~900nm, a diameter of 1~10mm of electrode, the diameter of windowing are less than the diameter of electrode.
The beneficial effects of the invention are as follows:Including support plate, signal processing is provided on support plate for a kind of dual chip perspiration sensor Chip and electrode chip, electrode chip are provided with working electrode, reference electrode and external connection pad, and it is extremely outer that external connection pad includes work Join pad and reference electrode external connection pad, working electrode is connect with work pole external connection pad by conducting wire, reference electrode and ginseng It is connected than pole external connection pad by conducting wire;External connection pad is connected with the pad on signal processing chip by lead key closing process It connects, the other pad on signal processing chip connects the pad on support plate by lead key closing process;Electrode chip and signal Processing chip is encapsulated in by packaging plastic on support plate, and the head of working electrode leaks out packaging plastic.The signal energy that working electrode obtains Signal processing chip is enough directly delivered to by the conducting wire of wire bonding, noise is small, so as to realize in detection human sweat Micro constitutent function.The present invention also provides the preparation methods of above-mentioned dual chip perspiration sensor.
Description of the drawings
The dual chip perspiration sensor of the present invention is described further below in conjunction with the accompanying drawings.
Fig. 1 is a kind of diagrammatic cross-section of the embodiment one of dual chip perspiration sensor of the present invention.
Fig. 2 is a kind of diagrammatic cross-section of the embodiment two of dual chip perspiration sensor of the present invention.
Fig. 3 is a kind of diagrammatic cross-section of the embodiment three of dual chip perspiration sensor of the present invention.
Fig. 4 is a kind of diagrammatic cross-section of the example IV of dual chip perspiration sensor of the present invention.
Fig. 5 is the sectional view before a kind of encapsulation packaging plastic of example IV of dual chip perspiration sensor of the present invention.
In figure:
1- support plates;The second pores of 11-;2- signal processing chips;3- electrode chips;31- working electrodes;32- references electricity Pole;33- external connection pads;34- electrode perforations;4- packaging plastics;5- capillary pieces;The first pores of 51-;6- sweat reaction compartments;7- Gel;The second water-absorbent materials of 8-;9- third water-absorbent materials;031- table tops;032- grooves;033- slopes.
Specific embodiment
Below in conjunction with the accompanying drawings 1~5 and the technical solution that is further illustrated the present invention by specific embodiment.
The present invention provides a kind of dual chip perspiration sensors.
Embodiment one
It please refers to Fig.1.
A kind of dual chip perspiration sensor including support plate 1, is provided with signal processing chip 2 and electrode chip 3 on support plate 1, Electrode chip 3 is provided with working electrode 31, reference electrode 32 and external connection pad 33, and external connection pad 33 includes work pole external connection pad With reference electrode external connection pad, working electrode 31 is connect with work pole external connection pad by conducting wire, reference electrode 32 and reference Pole external connection pad is connected by conducting wire;
By lead key closing process, (wire bonding conducting wire connect work to external connection pad 33 with the pad on signal processing chip 2 Make the pad of pole external connection pad 33 and signal processing chip 2, the bottom of signal processing chip 2 and electrode chip 3 passes through bonded adhesives It is adhered on support plate 1) it connects, the other pad on signal processing chip 2 passes through the weldering on lead key closing process connection support plate 1 Disk;
Electrode chip 3 and signal processing chip 2 are encapsulated in by packaging plastic 4 on support plate 1, and the head of working electrode 31 leaks out Packaging plastic 4.
External connection pad 33 is connect with the pad on signal processing chip 2 by lead key closing process, avoids circuit boards The interference of material, the signal that working electrode 31 obtains can be directly delivered to signal processing chip 2 by the conducting wire of wire bonding, make an uproar Sound is small, so as to realize the function of the micro constitutent in detection human sweat.
In the present embodiment, capillary piece 5 is further included, capillary piece 5 is provided with the first pore 51;
Capillary piece 5 is set to the top of packaging plastic 4, and sweat reaction compartment is provided between capillary piece 5 and working electrode 31 6, sweat reaction compartment 6 is connected to another end face (end) of capillary piece 5 by the first pore 51;
First pore 51 is located at the top of sweat reaction compartment 6;Or, first pore 51 be located at sweat reaction compartment 6 Side, the first pore 51 is connected to sweat reaction compartment 6 by sweat runner, and sweat runner is set to the top of packaging plastic 4 Portion or the bottom of capillary piece 5, sweat runner are capillary channel, and sweat runner is set to the bottom of capillary piece 5 or the top of packaging plastic 4 Portion.
In the present embodiment, sweat reaction compartment 6 is provided with gel 7;
The side of sweat reaction compartment 6 is provided with third water-absorbent material 9, and third water-absorbent material 9 extends to the side of packaging plastic 4 Face.When the first pore 51 is located at the side of sweat reaction compartment 6, the first pore 51 passes through sweat runner (sweat runner The bottom of reference electrode circuit board or the top of packaging plastic are set to, sweat runner is capillary channel) it is connected to sweat reaction compartment 6, sweat runner is located at the not homonymy of sweat reaction compartment 6 with third water-absorbent material 9;Sweat passes through the first pore 51 and sweat Runner flows to reaction electrode (working electrode 31), and there is water-absorbent material (third water-absorbent material 9) in the side of reaction electrode, reaction Sweat after (being measured to sweat) siphons away.
In the present embodiment, working electrode 31 is annular electrode, and the middle part of working electrode 31 is provided with electrode perforations 34, support plate 1 is provided with the second pore 11, and the first pore 51, sweat reaction compartment 6,34 and second pore 11 of electrode perforations connect successively It is logical.
In the present embodiment, reference electrode 32 is in a ring or semi-circular is arranged outside with working electrode 31, reference electrode 32 Gap is provided between working electrode 31.
In the present embodiment, the side of working electrode 31 is designed with temperature-sensitive circuit;
Heater circuit is provided on electrode chip 3, capillary piece 5 or packaging plastic 4;Heater circuit is located at the week of working electrode 31 Side.
In the present embodiment, governor circuit is further included, biological respinse enzyme, signal processing chip 2 are provided on working electrode 31 Record has access times and reaction time in the lot number, calibration data, application process of biological respinse enzyme;Signal processing chip 2 Or governor circuit is compensated and is calculated according to the lot number of biological respinse enzyme, calibration data, access times and reaction time information.
In the present embodiment, governor circuit controls heater circuit according to all testing temperatures of working electrode 31 that temperature-sensitive circuit senses Heating power, so as to control the operating ambient temperature of biological respinse enzyme.
In the present embodiment, the thickness of signal processing chip 2 is less than the thickness of electrode chip 3;Electrode chip 3 includes table top 031st, groove 032 and from table top 031 to the slope 033 of 032 transition of groove;
Groove 032 is arranged on the side of table top 031;
Working electrode 31 is set on table top 031, and external connection pad 33 is set on groove 032, connection working electrode 31 with The conductive trace portion of external connection pad 33 is located on slope 033;The thickness of signal processing chip 2 is less than the thickness of groove 032;Ditch The width of slot 032 is 100 μm~300 μm, and the depth of groove 032 is 50 μm~200 μm.
In the present embodiment, the preparation method of working electrode includes:
A. one layer of chromium and one layer of gold are plated on matrix;
B. layer gold and layers of chrome are etched, is made comprising working electrode, pad and the circuit of connection working electrode and pad;
C. a strata paraxylene is deposited;
D. the parylene layer on etched electrodes and pad exposes working electrode and pad;Working electrode includes Na+It passes Sensor electrode, K+Sensor electrode and PVB electrodes;PVB electrodes are as Na+Sensor electrode, K+The reference electricity of sensor electrode Pole.
In the present embodiment, another end face of gel support plate 1 is provided with the second water-absorbent material 8, the second water-absorbent material 8 and gel Gel 7 is connected by third water-absorbent material 9.
Embodiment two
Please refer to Fig. 2.
A kind of dual chip perspiration sensor including support plate 1, is provided with signal processing chip 2 and electrode chip 3 on support plate 1, Electrode chip 3 is provided with working electrode 31, reference electrode 32 and external connection pad 33, and external connection pad 33 includes work pole external connection pad With reference electrode external connection pad, working electrode 31 is connect with work pole external connection pad by conducting wire, reference electrode 32 and reference Pole external connection pad is connected by conducting wire;
External connection pad 33 is connect with the pad on signal processing chip 2 by lead key closing process, on signal processing chip 2 Other pad pass through lead key closing process connect support plate 1 on pad;
Electrode chip 3 and signal processing chip 2 are encapsulated in by packaging plastic 4 on support plate 1, and the head of working electrode 31 leaks out Packaging plastic 4.
In the present embodiment, capillary piece 5 is further included, capillary piece 5 is provided with the first pore 51;
Capillary piece 5 is set to the top of packaging plastic 4, is sweat reaction compartment between the first pore 51 and working electrode 31 6, sweat reaction compartment 6 is connected to another end face of capillary piece 5 by the first pore 51.
In the present embodiment, working electrode 31 is annular electrode, and the middle part of working electrode 31 is provided with electrode perforations 34, support plate 1 is provided with the second pore 11, and the first pore 51, sweat reaction compartment 6,34 and second pore 11 of electrode perforations connect successively It is logical.The microchannel of sweat circulation is formed, the working electrode 31 that can be is in always in fresh sweat environment, can be obtained true Real effective sweat parameter.
In the present embodiment, electrode perforations 34 are located at the middle part of working electrode 31, and electrode perforations 34 are insulated hole.
Embodiment three
Please refer to Fig. 3.
A kind of dual chip perspiration sensor including support plate 1, is provided with signal processing chip 2 and electrode chip 3 on support plate 1, Electrode chip 3 is provided with working electrode 31, reference electrode 32 and external connection pad 33, and external connection pad 33 includes work pole external connection pad With reference electrode external connection pad, working electrode 31 is connect with work pole external connection pad by conducting wire, reference electrode 32 and reference Pole external connection pad is connected by conducting wire;
External connection pad 33 is connect with the pad on signal processing chip 2 by lead key closing process, on signal processing chip 2 Other pad pass through lead key closing process connect support plate 1 on pad;
Electrode chip 3 and signal processing chip 2 are encapsulated in by packaging plastic 4 on support plate 1, and the head of working electrode 31 leaks out Packaging plastic 4.
In the present embodiment, capillary piece 5 is further included, capillary piece 5 is provided with the first pore 51;
Capillary piece 5 is set to the top of packaging plastic 4, is sweat reaction compartment between the first pore 51 and working electrode 31 6, sweat reaction compartment 6 is connected to another end face of capillary piece 5 by the first pore 51.
In the present embodiment, working electrode 31 is annular electrode, and the middle part of working electrode 31 is provided with electrode perforations 34, support plate 1 is provided with the second pore 11, and the first pore 51, sweat reaction compartment 6,34 and second pore 11 of electrode perforations connect successively It is logical.The microchannel of sweat circulation is formed, the working electrode 31 that can be is in always in fresh sweat environment, can be obtained true Real effective sweat parameter.
In the present embodiment, electrode perforations 34 are located at the middle part of working electrode 31, and electrode perforations 34 are conductive hole.
In the present embodiment, electrode perforations 34 are conductive hole, and the bottom sides of electrode perforations 34 is chip bonding pad, chip bonding pad For annular pad, electrode perforations 34 are soldered to support plate pad by chip bonding pad, and support plate pad is annular pad, support plate pad position In the side of the second pore 11.
In the present embodiment, the thickness of signal processing chip 2 is less than the thickness of electrode chip 3.
Example IV
Please refer to Fig. 4 and Fig. 5.
A kind of dual chip perspiration sensor including support plate 1, is provided with signal processing chip 2 and electrode chip 3 on support plate 1, Electrode chip 3 is provided with working electrode 31, reference electrode 32 and external connection pad 33, and external connection pad 33 includes work pole external connection pad With reference electrode external connection pad, working electrode 31 is connect with work pole external connection pad by conducting wire, reference electrode 32 and reference Pole external connection pad is connected by conducting wire;
External connection pad 33 is connect with the pad on signal processing chip 2 by lead key closing process, on signal processing chip 2 Other pad pass through lead key closing process connect support plate 1 on pad;
Electrode chip 3 and signal processing chip 2 are encapsulated in by packaging plastic 4 on support plate 1, and the head of working electrode 31 leaks out Packaging plastic 4.
In the present embodiment, capillary piece 5 is further included, capillary piece 5 is provided with the first pore 51;
Capillary piece 5 is set to the top of packaging plastic 4, is sweat reaction compartment between the first pore 51 and working electrode 31 6, sweat reaction compartment 6 is connected to another end face of capillary piece 5 by the first pore 51.
In the present embodiment, working electrode 31 is annular electrode, and the middle part of working electrode 31 is provided with electrode perforations 34, support plate 1 is provided with the second pore 11, and the first pore 51, sweat reaction compartment 6,34 and second pore 11 of electrode perforations connect successively It is logical.
In the present embodiment, electrode perforations 34 are located at the middle part of working electrode 31, and electrode perforations 34 are conductive hole.
In the present embodiment, electrode perforations 34 are conductive hole, and the bottom sides of electrode perforations 34 is chip bonding pad, chip bonding pad For annular pad, electrode perforations 34 are soldered to support plate pad by chip bonding pad, and support plate pad is annular pad, support plate pad position In the side of the second pore 11.
In the present embodiment, electrode chip 3 includes table top 031, groove 032 and from table top 031 to the slope of 032 transition of groove 033;
Groove 032 is arranged on the side of table top 031;
Working electrode 31 is set on table top 031, and external connection pad 33 is set on groove 032, connection working electrode 31 with The conductive trace portion of external connection pad 33 is located on slope 033.
In the present embodiment, the thickness of signal processing chip 2 is less than the thickness of groove 032.
In the present embodiment, the width of groove 032 is 100 μm~300 μm, and the depth of groove 032 is 50 μm~200 μm.
The present invention's is not limited to above-described embodiment, and the technical solution of above-mentioned each embodiment of the invention can be handed over each other Fork combination form new technical solution, in addition it is all using equivalent replacement formed technical solution, all fall within the present invention claims guarantor In the range of shield.

Claims (11)

1. a kind of dual chip perspiration sensor, including support plate (1), which is characterized in that be provided with signal processing on the support plate (1) Chip (2) and electrode chip (3), the electrode chip (3) are provided with working electrode (31), reference electrode (32) and external connection pad (33), the external connection pad (33) includes work pole external connection pad and reference electrode external connection pad, the working electrode (31) and work Make pole external connection pad to connect by conducting wire, the reference electrode (32) is connected with reference electrode external connection pad by conducting wire It connects;
The external connection pad (33) is connect with the pad on the signal processing chip (2) by lead key closing process, the letter Other pad in number processing chip (2) passes through lead key closing process and connects pad on support plate (1);
The electrode chip (3) and signal processing chip (2) are encapsulated in by packaging plastic (4) on the support plate (1), the work The head of electrode (31) leaks out the packaging plastic (4).
2. dual chip perspiration sensor as described in claim 1, which is characterized in that further include capillary piece (5), the capillary piece (5) it is provided with the first pore (51);
The capillary piece (5) is set to the top of the packaging plastic (4), the capillary piece (5) and the working electrode (31) it Between be provided with sweat reaction compartment (6), the sweat reaction compartment (6) is connected to the hair by first pore (51) Another end face of shred (5);
First pore (51) is positioned at the top of the sweat reaction compartment (6);Or, first pore (51) is located at The side of the sweat reaction compartment (6), first pore (51) are connected to the sweat by sweat runner and react empty Between (6), the sweat runner is set to the top of the packaging plastic (4) or the bottom of the capillary piece (5), the sweat runner For capillary channel.
3. dual chip perspiration sensor as claimed in claim 2, which is characterized in that the sweat reaction compartment (6) is provided with Gel (7);
The side of the sweat reaction compartment (6) is provided with third water-absorbent material (9), and the third water-absorbent material (9) extends to The side of the packaging plastic (4).
4. dual chip perspiration sensor as claimed in claim 2, which is characterized in that the working electrode (31) is annular electro Pole is provided with electrode perforations (34) in the middle part of the working electrode (31), and the support plate (1) is provided with the second pore (11), First pore (51), sweat reaction compartment (6), electrode perforations (34) and the second pore (11) are sequentially communicated.
5. dual chip perspiration sensor as claimed in claim 4, which is characterized in that the reference electrode (32) is in a ring or half Annular is arranged the outside with the working electrode (31), is provided between the reference electrode (32) and the working electrode (31) Gap, the gap are a part for the sweat reaction compartment (6).
6. dual chip perspiration sensor as claimed in claim 2, which is characterized in that the side design of the working electrode (31) There is temperature-sensitive circuit;
Heater circuit is provided on the electrode chip (3), capillary piece (5) or packaging plastic (4);The heater circuit is located at work The side of electrode (31).
7. perspiration sensor as claimed in claim 6, which is characterized in that further include governor circuit, the working electrode (31) On be provided with biological respinse enzyme, signal processing chip (2) record have the lot number of the biological respinse enzyme, calibration data, should With access times in the process and reaction time;The signal processing chip (2) or governor circuit are according to the biological respinse enzyme Lot number, calibration data, access times and reaction time information compensate and calculate.
8. perspiration sensor as claimed in claim 6, which is characterized in that the governor circuit is sensed according to the temperature-sensitive circuit All testing temperatures of the working electrode (31) control the heating power of the heater circuit, so as to control the biological respinse enzyme Operating ambient temperature be in setting temperature range.
9. perspiration sensor as described in claim 1, which is characterized in that the electrode letter that the signal processing chip (2) receives Number include current mode signal, size of current range 10nA~10uA;Voltage mode signals, between potential range 0.1mV~1000mV.
10. dual chip perspiration sensor as described in claim 1, which is characterized in that the thickness of the signal processing chip (2) is small Thickness in the electrode chip (3);The electrode chip (3) including table top (031), groove (032) and from table top (031) to The slope (033) of groove (032) transition;
The groove (032) is arranged on the side of the table top (031);
The working electrode (31) is set on the table top (031), and the external connection pad (33) is set to the groove (032) On, it connects the working electrode (31) and the conductive trace portion of external connection pad (33) is located on the slope (033);The letter The thickness of number processing chip (2) is less than the thickness of the groove (032);The width of the groove (032) is 100 μm~300 μm, The depth of the groove (032) is 50 μm~200 μm.
11. such as the preparation method of claim 1~10 any one of them dual chip perspiration sensor, which is characterized in that work The preparation method of electrode includes:
A. one layer of chromium and one layer of gold are plated on matrix;
B. layer gold and layers of chrome are etched, is made comprising working electrode, pad and the circuit of connection working electrode and pad;
C. a strata paraxylene is deposited;
D. the parylene layer on etched electrodes and pad exposes working electrode and pad;Electrode includes Na+Sensor electrode, K+Sensor electrode and PVB electrodes;PVB electrodes are as Na+Sensor electrode, K+The reference electrode of sensor electrode;
Electrode further includes glucose electrode, lactic acid electrode and AgCl reference electrodes in this research;
Na+Sensor electrode and K+Sensor electrode can also do reference electrode with Ag/AgCl.
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