CN109374714A - Assembly type biologic sensor chip - Google Patents
Assembly type biologic sensor chip Download PDFInfo
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- CN109374714A CN109374714A CN201811248370.1A CN201811248370A CN109374714A CN 109374714 A CN109374714 A CN 109374714A CN 201811248370 A CN201811248370 A CN 201811248370A CN 109374714 A CN109374714 A CN 109374714A
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- 239000010410 layer Substances 0.000 claims abstract description 194
- 239000000463 material Substances 0.000 claims abstract description 79
- 239000000758 substrate Substances 0.000 claims abstract description 77
- 239000002344 surface layer Substances 0.000 claims abstract description 49
- 238000006243 chemical reaction Methods 0.000 claims description 18
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 13
- 230000005540 biological transmission Effects 0.000 claims description 10
- 210000001124 body fluid Anatomy 0.000 claims description 10
- 239000010839 body fluid Substances 0.000 claims description 10
- 239000000853 adhesive Substances 0.000 claims description 9
- 230000001070 adhesive effect Effects 0.000 claims description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8
- 239000002041 carbon nanotube Substances 0.000 claims description 8
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- 238000003466 welding Methods 0.000 claims description 8
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 7
- 239000000919 ceramic Substances 0.000 claims description 7
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 6
- 239000010931 gold Substances 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 6
- 229910021389 graphene Inorganic materials 0.000 claims description 5
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- 239000012528 membrane Substances 0.000 claims description 3
- 102000004190 Enzymes Human genes 0.000 claims description 2
- 108090000790 Enzymes Proteins 0.000 claims description 2
- 229920002521 macromolecule Polymers 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 241000208340 Araliaceae Species 0.000 claims 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 claims 1
- 235000003140 Panax quinquefolius Nutrition 0.000 claims 1
- 229910052785 arsenic Inorganic materials 0.000 claims 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims 1
- 229910052733 gallium Inorganic materials 0.000 claims 1
- 235000008434 ginseng Nutrition 0.000 claims 1
- 210000004243 sweat Anatomy 0.000 abstract description 9
- 239000007788 liquid Substances 0.000 abstract description 4
- 238000012986 modification Methods 0.000 abstract description 4
- 230000004048 modification Effects 0.000 abstract description 4
- 238000003487 electrochemical reaction Methods 0.000 abstract description 3
- 239000012530 fluid Substances 0.000 abstract description 3
- 230000008054 signal transmission Effects 0.000 abstract description 3
- 230000005684 electric field Effects 0.000 abstract description 2
- 238000001914 filtration Methods 0.000 abstract description 2
- 230000006641 stabilisation Effects 0.000 abstract description 2
- 238000011105 stabilization Methods 0.000 abstract description 2
- 238000001514 detection method Methods 0.000 description 9
- 238000005842 biochemical reaction Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 210000002700 urine Anatomy 0.000 description 5
- 239000008280 blood Substances 0.000 description 3
- 210000004369 blood Anatomy 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- -1 graphite Alkene Chemical class 0.000 description 3
- 238000001548 drop coating Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000004519 grease Substances 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- 210000001138 tear Anatomy 0.000 description 2
- 206010020843 Hyperthermia Diseases 0.000 description 1
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000036031 hyperthermia Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/416—Systems
Abstract
The present invention relates to a kind of assembly type biologic sensor chips, signal acquisition circuit and biological signal collecting working electrode are located at the first surface layer and second surface layer of first base material layer, and signal acquisition circuit is connected with biological signal collecting working electrode by the first conductive hole；Signal acquisition reference electrode is located at the first surface layer of the second substrate layer, first base material layer and the second substrate layer are electrically connected by conductive salient point, signal acquisition working electrode is against signal acquisition reference electrode, two electrodes form gap, fluid to be measured (such as sweat) flows through gap, it is reacted with the function film of working electrode surface modification and generates electric current or potential, which gives governor circuit processing after amplifying filtering acquisition by signal acquisition circuit.The sensor chip signal transmission path of structure assembling is short, signal path interference is small；Two electrode faces, the electric field between the two poles of the earth is more evenly stable, and capillary gap is more conducive to the flowing of liquid, and electrochemical reaction condition is more stable, and signal stabilization is good；Integrated level is high.
Description
Technical field
The present invention relates to sensor technical fields, and in particular to a kind of assembly type biologic sensor chip.
Background technique
Electrochemical process analysis bio signal is a kind of common method, generally can be to urine, sweat and the blood of biology
Etc. being detected, the other detection of molecular level is realized to liquid, gas.
Currently, the detection means of row industry routine, is limited to sensor design and reaction condition, it is all in professional institution's list
Position or large hospital carry out, and equipment volume is big, complicated for operation.On the other hand, bioelectrical signals generally all it is weaker (nA grades, mV,
V grades of μ), traditional electrochemical sensor usually all makees sensor very big, makes response current as big as possible, to reduce
The difficulty of signal acquisition determines that his device systems can not be done small in this way, cannot do the popularization of consumer level, be not easy to take
Band.
Summary of the invention
The technical problem to be solved by the present invention is propose a biologic sensor chip, by biological signal collecting electrode and
Signal acquisition circuit is integrated in a chip, and the detection line of various microelements is promoted by integrated circuit, micro nano structure
(detect the electric current for obtaining nA grades, the voltage of mV, the voltage that V grades of μ).
A kind of assembly type biologic sensor chip, including first base material layer, the second substrate layer, signal acquisition circuit, signal
Collecting work electrode and signal acquisition reference electrode；First base material layer is provided with the first conductive hole and second of connection upper and lower surface
Conductive hole；
Signal acquisition circuit and biological signal collecting working electrode are located at the first surface layer and of first base material layer
Two superficial layers, signal acquisition circuit and biological signal collecting working electrode realize circuit connection by the first conductive hole；
Signal acquisition reference electrode is located at the first surface layer of the second substrate layer, the first surface layer setting of the second substrate layer
There is the first conductive salient point, the first conductive salient point and signal acquisition reference electrode pass through circuit connection；
Signal acquisition working electrode welds or passes through conductive adhesive against signal acquisition reference electrode, the first conductive salient point
In the second surface layer of first base material layer, first base material layer and the second substrate layer formation mechanical interconnection and electrical interconnection, signal are adopted
Gap or runner are provided between collection working electrode and signal acquisition reference electrode；First base material layer and the second substrate layer are silicon substrate
Layer, GaAs substrate layer, carbon nanotube substrate layer or graphene substrate layer or ceramic base material layer.
Signal acquisition working electrode is conducive to form uniform electricity between electrodes against signal acquisition reference electrode
, fluid to be measured (sweat) flows through in two interelectrode gaps, makes electrochemical reaction more stable, allows sweat collecting sensor
Design is easier to realize.
Preferably, the first conductive salient point is welded on the second conductive hole；Or,
First conductive salient point is welded on the circuit of the second surface layer of first base material layer being electrically connected with the second conductive hole.
Preferably, the first conductive salient point is existed under low temperature (being lower than 100 DEG C) or room temperature (20-50 DEG C) by conductive adhesive
On second conductive hole of the second surface layer of first base material layer；Or, the first conductive salient point passes through conducting resinl under low temperature or room temperature
It is bonded on the circuit of the second surface layer of first base material layer being electrically connected with the second conductive hole.Bio signal reacts film layer may
The assembling needs of unbearable high temperature, first base material layer and the second substrate layer carry out under low temperature or room temperature or localized hyperthermia；It can
To consider normal temperature cure conductive adhesive, ultrasonic bonding or lead key closing process.It preferably, further include to electrode, to electrode
Positioned at the first surface layer of the second substrate layer, it is to the effect of electrode to the acquisition reference electrode setting of electrode adjacent signal and works
Electrode forms circuit to pass through electric current.
Signal acquisition working electrode is porous nano gold microelectrode or porous nano platinum microelectrode.Porous nano gold microelectrode
Micropore aperture in 10nm-500nm, nano-porous structure can increase the surface area of sensor, increase detection limit, Ke Yijian
Measure the Weak current of the body fluid come, the minimum value or maximum value of voltage or resistance；Porous structure facilitates fixed reaction film simultaneously,
Interface impedance is smaller, reduces signal interference.
Preferably, the back side of first base material layer is provided with pit, and signal acquisition working electrode is located in pit；Signal acquisition
The surface of working electrode is provided with bio signal reaction film layer.
Pit is conducive to that the bio signal of the modification of signal acquisition working electrode surface is protected to react film layer not by machinery damage
Wound, while a stable space environment is provided to biochemical reaction, avoid extraneous motion artifacts.Bio signal reacts film layer
Biological enzyme membrane, ion selective membrane or other have selective metal layer or macromolecule membranous layer, pass through different method of modifying
It obtains.
Preferably, signal acquisition reference electrode is located at the side of the outside of pit.Only signal acquisition work is electric in pit
Pole, signal acquisition reference electrode and is located on the surface outside pit electrode；Pit is for fixed biochemical bio signal reaction film
Layer, the drop coating dosage of control bio signal reaction film layer；A stable space environment is provided to biochemical reaction simultaneously, so that outside
Portion's operation or the mobile biochemical reaction for not influencing inside, to guarantee the stability of signal.
Preferably, being also possible to pit is 2 grades or multi-stage stairs formula pit, and signal acquisition working electrode is located at pit most
On rudimentary pit or lower level step, signal acquisition reference electrode is located on the more advanced step of pit.The lowermost level of pit is recessed
Hole or lower level step are for fixing bio signal reaction film layer, the drop coating dosage of control bio signal reaction film layer；It gives simultaneously
Biochemical reaction provides a stable space environment, so that peripheral operation or the mobile biochemical reaction for not influencing inside, to protect
Demonstrate,prove the stability of signal.Preferably, a signal acquisition working electrode and a signal acquisition reference electrode constitute an electrode
Right, the quantity of electrode pair is more than N number of, and electrode is distributed circumferentially array or rectangular array, and it is natural number that N, which is greater than 2, N,；
Each electrode is to a bio signal for detecting a kind of body fluid.
Preferably, body fluid is sweat, blood, urine, tear or grease.
Preferably, substrate layer is also integrated with bluetooth transmission circuit, the electrode connection bluetooth transmitting-receiving of biological signal collecting electrode
The current input terminal of circuit.
Preferably, first base material layer is also integrated with bluetooth transmission circuit and bioelectricity generating battery；Or,
First base material layer is also integrated with bluetooth transmission circuit and wireless charging circuit.
Preferably, for detect an a kind of bio signal of body fluid electrode pair quantity at M or more, M is greater than 2, M
For natural number；
The bio signal reaction film layer of the signal acquisition working electrode of M electrode pair has 2 or more different-thickness values；
Or,
The bio signal reaction film layer of the signal acquisition working electrode of M electrode pair has 2 or more different cross section values.
Preferably, first base material layer first surface is provided with the second conductive bump array, the weldering of the second conductive bump array
Ball connects with signal acquisition circuit, biological signal collecting working electrode and signal acquisition reference electrode electrical respectively.
The present invention also provides another assembly type biologic sensor chips.
A kind of assembly type biologic sensor chip, including first base material layer, the second substrate layer, signal acquisition circuit, signal
Collecting work electrode and signal acquisition reference electrode；First base material layer is provided with the first conductive hole and second of connection upper and lower surface
Conductive hole；
Signal acquisition circuit and biological signal collecting working electrode are located at the first surface layer and of first base material layer
Two superficial layers, signal acquisition circuit and biological signal collecting working electrode realize circuit connection by the first conductive hole；
Signal acquisition reference electrode is located at the first surface layer of the second substrate layer；
The second surface layer of first base material layer is provided with third conductive salient point；
First base material layer and the welding of the second substrate layer, signal acquisition working electrode is against signal acquisition reference electrode, signal
There are gap or runner between collecting work electrode and signal acquisition reference electrode, third conductive salient point welds or is bonded in second
The first surface layer of substrate layer, third conductive salient point connect with signal acquisition reference electrode electrical；
First base material layer and the second substrate layer are silicon base layer, GaAs substrate layer, carbon nanotube substrate layer or graphene-based
Material layer or ceramic base material layer.The beneficial effects of the present invention are: a kind of assembly type biologic sensor chip, including first base material layer,
Second substrate layer, signal acquisition circuit, signal acquisition working electrode and signal acquisition reference electrode；First base material layer is provided with company
The first conductive hole and the second conductive hole of logical upper and lower surface；Signal acquisition circuit and biological signal collecting working electrode are located at
The first surface layer and second surface layer of first base material layer, signal acquisition circuit and biological signal collecting working electrode pass through first
Conductive hole realizes circuit connection；Signal acquisition reference electrode is located at the first surface layer of the second substrate layer, and the of the second substrate layer
One superficial layer is provided with the first conductive salient point, and the first conductive salient point and signal acquisition reference electrode pass through circuit connection；First base
Material layer and the welding of the second substrate layer, signal acquisition working electrode against signal acquisition reference electrode, signal acquisition working electrode and
There are gap or runner between signal acquisition reference electrode, the first conductive salient point is welded on the second surface layer of first base material layer；
First base material layer and the second substrate layer are silicon base layer, GaAs substrate layer, carbon nanotube substrate layer or graphene substrate layer or pottery
Porcelain substrate layer.Biological signal collecting electrode and signal acquisition circuit are integrated on two chips, two chips pass through conductive stud
Spot welding, in the electrode signal acquisition face contact liquid to be detected of chip, the current signal that electrode signal acquisition obtains passes through
Conductive hole transcrystalline hole is directly connected to signal acquisition circuit, and signal transmission path is short, signal interference is small, and integrated level is high, by integrated
Circuit, micro nano structure promote the detection lines of various microelements, so as to realizing that molecular level is other to sweat, urine etc.
Detection, obtains nA grades of electric current, the voltage of mV or V grades of μ of voltage.
Two electrodes form gap, and fluid to be measured such as sweat flows through gap, anti-with the function film of working electrode surface modification
Electric current or potential should be generated, which gives governor circuit processing after amplifying filtering acquisition by signal acquisition circuit.The structure group
The sensor chip signal transmission path of dress is short, signal path interference is small；Two electrode faces, the electric field between the two poles of the earth is more evenly
Stablize, capillary gap is more conducive to the flowing of liquid, and electrochemical reaction condition is more stable, and signal stabilization is good；Integrated level is high.Pass through
Integrated circuit and electrode height be integrated, electrode stereochemical structure, and micro-nano surface processing electrode etc. promotes various micro members to realize
The detection line of element, so as to realize the other detection of molecular level to sweat, urine etc..
Detailed description of the invention
Assembly type biologic sensor chip of the invention is described further with reference to the accompanying drawing.
Fig. 1 is a kind of top view at the back side of the substrate layer 1 of biologic sensor chip of the present invention.
Fig. 2 is a kind of structural schematic diagram of the circuit connection of biologic sensor chip of the present invention.
Fig. 3 is a kind of cross-sectional view of the embodiment one of biologic sensor chip of the present invention.
Fig. 4 is a kind of cross-sectional view of the embodiment two of biologic sensor chip of the present invention.
Fig. 5 is a kind of cross-sectional view of the embodiment three of biologic sensor chip of the present invention.
Fig. 6 is a kind of cross-sectional view of another embodiment of biologic sensor chip of the present invention.
In figure:
11- first base material layer；The second substrate layer of 12-；2- signal acquisition circuit；31- signal acquisition working electrode；311- is raw
Object signal reaction film layer；32- signal acquisition reference electrode；33- is to electrode；The first conductive hole of 41-；The second conductive hole of 42-；51-
First conductive salient point；The second conductive bump array of 52-；53- third conductive salient point；6- pit；7- bluetooth transmission circuit；8- biology
Electric generating battery；9- wireless charging circuit.
Specific embodiment
A kind of assembly type biologic sensor chip of 1~6 couple of present invention is described further with reference to the accompanying drawing.
Embodiment one
A kind of assembly type biologic sensor chip, including first base material layer 11, the second substrate layer 12, signal acquisition circuit 2,
Signal acquisition working electrode 31 and signal acquisition reference electrode 32；First base material layer 11 is provided with first leading for connection upper and lower surface
Electric hole 41 and the second conductive hole 42；
Signal acquisition circuit 2 and biological signal collecting working electrode 31 are located at the first surface layer of first base material layer 11
With second surface layer, signal acquisition circuit 2 and biological signal collecting working electrode 31 are connected by the first conductive hole 41 realization circuit
It connects；
Signal acquisition reference electrode 32 is located at the first surface layer of the second substrate layer 12, the first surface of the second substrate layer 12
Layer is provided with the first conductive salient point 51, and the first conductive salient point 51 passes through circuit connection with signal acquisition reference electrode 32；
Signal acquisition working electrode 31 welds or passes through conduction against signal acquisition reference electrode 32, the first conductive salient point 51
For glue sticking in the second surface layer of first base material layer 11, first base material layer 11 and the second substrate layer 12 form mechanical interconnection and electrical
Interconnection, is provided with gap or runner between signal acquisition working electrode 31 and signal acquisition reference electrode 32；
First base material layer 11 and the second substrate layer 12 are silicon base layer, GaAs substrate layer, carbon nanotube substrate layer or graphite
Alkene substrate layer or ceramic base material layer.
In the present embodiment, the first conductive salient point 51 is soldered ball, and the first conductive salient point 51 is welded on the second conductive hole 42；
Or, the first conductive salient point 51 is welded on the circuit of the second surface layer of first base material layer 11 being electrically connected with the second conductive hole 42
On.
Alternative as one preferred, is also possible to: the first conductive salient point 51 (lower than 100 degree or is lower than in low temperature
70 degree) or room temperature under by conductive adhesive on the second conductive hole 42 of the second surface layer of first base material layer 11；Or, first
Conductive salient point 51 under low temperature or room temperature by conductive adhesive first base material layer 11 second surface layer with second conduction
On the circuit that hole 42 is electrically connected.
It further include that the first surface layer of the second substrate layer 12 is located to electrode 33, to electrode to electrode 33 in the present embodiment
33 adjacent signals acquire reference electrode 32 and are arranged；Effect to electrode 33 is and working electrode 31 forms circuit to pass through electric current.
Signal acquisition working electrode 31 is porous nano gold microelectrode or porous nano platinum electrode.
The aperture of the micropore of porous nano gold microelectrode can increase sensor in 10nm-500nm, nano-porous structure
Surface area increases detection limit, the minimum value or maximum value of the Weak current of the body fluid that can detecte out, voltage or resistance；Together
When porous structure facilitate fixed reaction film, interface impedance is smaller, reduce signal interference.
Embodiment two
A kind of assembly type biologic sensor chip, including first base material layer 11, the second substrate layer 12, signal acquisition circuit 2,
Signal acquisition working electrode 31 and signal acquisition reference electrode 32；First base material layer 11 is provided with first leading for connection upper and lower surface
Electric hole 41 and the second conductive hole 42；
Signal acquisition circuit 2 and biological signal collecting working electrode 31 are located at the first surface layer of first base material layer 11
With second surface layer, signal acquisition circuit 2 and biological signal collecting working electrode 31 are connected by the first conductive hole 41 realization circuit
It connects；
Signal acquisition reference electrode 32 is located at the first surface layer of the second substrate layer 12, the first surface of the second substrate layer 12
Layer is provided with the first conductive salient point 51, and the first conductive salient point 51 passes through circuit connection with signal acquisition reference electrode 32；
First base material layer 11 and the welding of the second substrate layer 12, signal acquisition working electrode 31 is against signal acquisition reference electrode
32, there are gap or runner, the welderings of the first conductive salient point 51 between signal acquisition working electrode 31 and signal acquisition reference electrode 32
Connect or be bonded in the second surface layer of first base material layer 11；
First base material layer 11 and the second substrate layer 12 are silicon base layer, GaAs substrate layer, carbon nanotube substrate layer or graphite
Alkene substrate layer or ceramic base material layer.
In the present embodiment, the first conductive salient point 51 is welded on the second conductive hole 42；Or, the first conductive salient point 51 is welded on
On the circuit of the second surface layer of first base material layer 11 being electrically connected with the second conductive hole 42.
It further include that the first surface layer of the second substrate layer 12 is located to electrode 33, to electrode to electrode 33 in the present embodiment
33 adjacent signals acquire reference electrode 32 and are arranged；Effect to electrode 33 is and working electrode 31 forms circuit to pass through electric current.
Signal acquisition working electrode 31 is porous nano gold microelectrode or porous nano platinum microelectrode.
In the present embodiment, the back side of first base material layer 11 is provided with pit 6, and signal acquisition working electrode 31 is located at pit 6
It is interior；The surface of signal acquisition working electrode 31 is provided with bio signal reaction film layer 311.
Pit 6 be conducive to protect the bio signal of the modification on 31 surface of signal acquisition working electrode react film layer 311 not by
Mechanical damage, while a stable space environment is provided to biochemical reaction, avoid extraneous motion artifacts.In the present embodiment,
One signal acquisition working electrode 31 and a signal acquisition reference electrode 32 constitute an electrode pair, and the quantity of electrode pair is in N
More than a, electrode is distributed circumferentially array or rectangular array, and it is natural number that N, which is greater than 2, N,；
Each electrode is to a bio signal for detecting a kind of body fluid.
In the present embodiment, body fluid is sweat, blood, urine, tear or grease.
In the present embodiment, substrate layer 1 is also integrated with bluetooth transmission circuit 7, and the electrode of biological signal collecting electrode 3 connects blue
The current input terminal of tooth transmission circuit 7.
Alternative as one preferred, is also possible to: first base material layer 11 is also integrated with bluetooth transmission circuit 7 and life
Object electricity generating battery 8；Or, first base material layer 11 is also integrated with bluetooth transmission circuit 7 and wireless charging circuit 9.
In the present embodiment, for a kind of quantity of the electrode pair of a bio signal for detecting body fluid at M or more, M is big
In 2, M be natural number；
The bio signal reaction film layer 311 of the signal acquisition working electrode 31 of M electrode pair is thick with 2 or more differences
Angle value；Or,
The bio signal reaction film layer 311 of the signal acquisition working electrode 31 of M electrode pair is cut with 2 or more differences
Face amount.
In the present embodiment, 11 first surface of first base material layer is provided with the second conductive bump array 52, the second conductive salient point
The soldered ball of array 52 is electric with signal acquisition circuit 2, biological signal collecting working electrode 31 and signal acquisition reference electrode 32 respectively
Connection.
Embodiment three
A kind of assembly type biologic sensor chip, including first base material layer 11, the second substrate layer 12, signal acquisition circuit 2,
Signal acquisition working electrode 31 and signal acquisition reference electrode 32；First base material layer 11 is provided with first leading for connection upper and lower surface
Electric hole 41 and the second conductive hole 42；
Signal acquisition circuit 2 and biological signal collecting working electrode 31 are located at the first surface layer of first base material layer 11
With second surface layer, signal acquisition circuit 2 and biological signal collecting working electrode 31 are connected by the first conductive hole 41 realization circuit
It connects；
Signal acquisition reference electrode 32 is located at the first surface layer of the second substrate layer 12；
The second surface layer of first base material layer 11 is provided with third conductive salient point 53；
First base material layer 11 and the welding of the second substrate layer 12, signal acquisition working electrode 31 is against signal acquisition reference electrode
32, there are gap or runner between signal acquisition working electrode 31 and signal acquisition reference electrode 32, third conductive salient point 53 is welded
The first surface layer in the second substrate layer 12 is connect, third conductive salient point 53 is electrically connected with signal acquisition reference electrode 32；
First base material layer 11 and the second substrate layer 12 are silicon base layer, GaAs substrate layer, carbon nanotube substrate layer or graphite
Alkene substrate layer or ceramic base material layer.
The present invention is not limited to the above embodiment, and the technical solution of above-mentioned each embodiment of the invention can intersect each other
Combination form new technical solution, in addition it is all using equivalent replacement formed technical solution, all fall within the present invention claims protection
In range.
Claims (10)
1. a kind of assembly type biologic sensor chip, which is characterized in that including first base material layer (11), the second substrate layer (12),
Signal acquisition circuit (2), signal acquisition working electrode (31) and signal acquisition reference electrode (32)；The first base material layer (11)
It is provided with the first conductive hole (41) and the second conductive hole (42) of connection upper and lower surface；
The signal acquisition circuit (2) and the biological signal collecting working electrode (31) are located at the first base material layer
(11) first surface layer and second surface layer, the signal acquisition circuit (2) and the biological signal collecting working electrode
(31) circuit connection is realized by first conductive hole (41)；
The signal acquisition reference electrode (32) is located at the first surface layer of second substrate layer (12), second substrate layer
(12) first surface layer is provided with the first conductive salient point (51), first conductive salient point (51) and the signal acquisition reference
Electrode (32) passes through circuit connection；
The opposite signal acquisition reference electrode (32) of the signal acquisition working electrode (31), first conductive salient point (51)
Welding or second surface layer by conductive adhesive in the first base material layer (11), the first base material layer (11) and described
Second substrate layer (12) forms mechanical interconnection and electrical interconnection, the signal acquisition working electrode (31) and signal acquisition ginseng
Than being provided with gap or runner between electrode (32)；The first base material layer (11) and the second substrate layer (12) are silicon base layer, arsenic
Change gallium substrate layer, carbon nanotube substrate layer or graphene substrate layer or ceramic base material layer.
2. assembly type biologic sensor chip as described in claim 1, which is characterized in that the first conductive salient point (51) welding
On second conductive hole (42)；Or, first conductive salient point (51) is welded on the second of the first base material layer (11)
On the circuit of superficial layer being electrically connected with second conductive hole (42)；Or,
First conductive salient point (51) is under low temperature or room temperature through conductive adhesive on second conductive hole (42)；
Or, first conductive salient point (51) passes through conductive adhesive the second of the first base material layer (11) under low temperature or room temperature
On the circuit of superficial layer being electrically connected with second conductive hole (42).
3. assembly type biologic sensor chip as described in claim 1, which is characterized in that further include to electrode (33), it is described right
Electrode (33) is located at the first surface layer of second substrate layer (12), described to adjoin the signal acquisition reference to electrode (33)
Electrode (32) setting；
The signal acquisition working electrode (31) is porous nano gold microelectrode or porous nano platinum electrode.
4. assembly type biologic sensor chip as claimed in claim 2, which is characterized in that the second of the first base material layer (11)
Superficial layer is provided with pit (6), and the signal acquisition working electrode (31) is located in the pit (6)；The signal acquisition work
The surface for making electrode (31) is provided with bio signal reaction film layer (311), and bio signal reaction film layer (311) is biological enzyme
Film, ion selective membrane or other have selective metal layer or macromolecule membranous layer.
5. assembly type biologic sensor chip as claimed in claim 4, which is characterized in that the signal acquisition reference electrode (32)
Positioned at the side of the outside of the pit (6)；Or,
The pit (6) is 2 grades or multi-stage stairs formula pit, and the signal acquisition working electrode (31) is located at the pit (6)
Lowermost level pit or lower level step on, the signal acquisition reference electrode (32) is located at more advanced of the pit (6)
On rank.
6. the assembly type biologic sensor chip as described in any one of claim 3, which is characterized in that a signal acquisition work
Make electrode (31) and a signal acquisition reference electrode (32) constitutes an electrode pair, the quantity of the electrode pair is N number of
More than, the electrode is distributed circumferentially array or rectangular array, and it is natural number that N, which is greater than 2, N,；
Each electrode is to a bio signal for detecting a kind of body fluid.
7. the assembly type biologic sensor chip as described in any one of claim 6, it is characterised in that the substrate layer (1) is also integrated
Have bluetooth transmission circuit (7), the electrode of the biological signal collecting electrode (3) connects the electric current of the bluetooth transmission circuit (7)
Input terminal.
8. raw assembly type biologic sensor chip as claimed in claim 7, which is characterized in that for detecting one of a kind of body fluid
For the quantity of the electrode pair of bio signal at M or more, it is natural number that M, which is greater than 2, M,；
Bio signal reaction film layer (311) of the signal acquisition working electrode (31) of the M electrode pair have 2 or more no
Stack pile value；Or,
Bio signal reaction film layer (311) of the signal acquisition working electrode (31) of the M electrode pair have 2 or more no
With section value.
9. raw assembly type biologic sensor chip as claimed in claim 7, which is characterized in that the first base material layer (11) first
Surface is provided with the second conductive bump array (52), and the soldered ball of second conductive bump array (52) is adopted with the signal respectively
Collector (2), biological signal collecting working electrode (31) and signal acquisition reference electrode (32) electrical connection.
10. a kind of assembly type biologic sensor chip, which is characterized in that including first base material layer (11), the second substrate layer (12),
Signal acquisition circuit (2), signal acquisition working electrode (31) and signal acquisition reference electrode (32)；The first base material layer (11)
It is provided with the first conductive hole (41) and the second conductive hole (42) of connection upper and lower surface；
The signal acquisition circuit (2) and the biological signal collecting working electrode (31) are located at the first base material layer
(11) first surface layer and second surface layer, the signal acquisition circuit (2) and the biological signal collecting working electrode
(31) circuit connection is realized by first conductive hole (41)；
The signal acquisition reference electrode (32) is located at the first surface layer of second substrate layer (12)；
The second surface layer of the first base material layer (11) is provided with third conductive salient point (53)；
The first base material layer (11) and second substrate layer (12) welding pass through conductive adhesive, the signal acquisition work
Make electrode (31) against the signal acquisition reference electrode (32), the signal acquisition working electrode (31) and the signal acquisition
There are gap or runner between reference electrode (32), the third conductive salient point (53) is welded on second substrate layer (12)
First surface layer, the third conductive salient point (53) are electrically connected with the signal acquisition reference electrode (32)；
The first base material layer (11) and the second substrate layer (12) be silicon base layer, GaAs substrate layer, carbon nanotube substrate layer or
Graphene substrate layer or ceramic base material layer.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110169757A (en) * | 2019-07-01 | 2019-08-27 | 深圳市刷新智能电子有限公司 | Capsule-type biochemical parameter acquisition device of good seal performance and preparation method thereof |
| CN110715968A (en) * | 2019-10-16 | 2020-01-21 | 深圳市刷新智能电子有限公司 | Micro-channel miniature assembled biosensor structure |
| CN111007129A (en) * | 2019-12-17 | 2020-04-14 | 深圳市刷新智能电子有限公司 | Preparation process of graphene biosensor electrode |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040251131A1 (en) * | 2002-07-02 | 2004-12-16 | Hiroya Ueno | Biosensor, biosensor chip, and biosensor device |
| CN101368926A (en) * | 1998-10-08 | 2009-02-18 | 特拉森斯公司 | Small volume in vitro analyte sensor with diffusible or non-leachable redox mediator |
| CN101713757A (en) * | 2009-11-19 | 2010-05-26 | 浙江大学 | Photoelectric compound integral sensor for detecting cell physiological parameters and preparation method thereof |
| CN102033089A (en) * | 2010-10-27 | 2011-04-27 | 清华大学 | Biosensor and packaging structure thereof and detection system |
| CN108169307A (en) * | 2018-03-09 | 2018-06-15 | 深圳市刷新智能电子有限公司 | Dual chip perspiration sensor and preparation method thereof |
| CN209264620U (en) * | 2018-10-25 | 2019-08-16 | 深圳市刷新智能电子有限公司 | Assembly type biologic sensor chip |
-
2018
- 2018-10-25 CN CN201811248370.1A patent/CN109374714B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101368926A (en) * | 1998-10-08 | 2009-02-18 | 特拉森斯公司 | Small volume in vitro analyte sensor with diffusible or non-leachable redox mediator |
| US20040251131A1 (en) * | 2002-07-02 | 2004-12-16 | Hiroya Ueno | Biosensor, biosensor chip, and biosensor device |
| CN101713757A (en) * | 2009-11-19 | 2010-05-26 | 浙江大学 | Photoelectric compound integral sensor for detecting cell physiological parameters and preparation method thereof |
| CN102033089A (en) * | 2010-10-27 | 2011-04-27 | 清华大学 | Biosensor and packaging structure thereof and detection system |
| CN108169307A (en) * | 2018-03-09 | 2018-06-15 | 深圳市刷新智能电子有限公司 | Dual chip perspiration sensor and preparation method thereof |
| CN209264620U (en) * | 2018-10-25 | 2019-08-16 | 深圳市刷新智能电子有限公司 | Assembly type biologic sensor chip |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110169757A (en) * | 2019-07-01 | 2019-08-27 | 深圳市刷新智能电子有限公司 | Capsule-type biochemical parameter acquisition device of good seal performance and preparation method thereof |
| CN110169757B (en) * | 2019-07-01 | 2023-05-23 | 深圳刷新生物传感科技有限公司 | Capsule type biochemical parameter acquisition device with good sealing performance and manufacturing method thereof |
| CN110715968A (en) * | 2019-10-16 | 2020-01-21 | 深圳市刷新智能电子有限公司 | Micro-channel miniature assembled biosensor structure |
| CN110715968B (en) * | 2019-10-16 | 2024-04-12 | 深圳刷新生物传感科技有限公司 | Micro-assembly type biosensor structure with micro-flow channels |
| CN111007129A (en) * | 2019-12-17 | 2020-04-14 | 深圳市刷新智能电子有限公司 | Preparation process of graphene biosensor electrode |
| CN111007129B (en) * | 2019-12-17 | 2022-05-13 | 深圳市刷新智能电子有限公司 | Preparation process of graphene biosensor electrode |
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