CN209167196U - Biologic sensor chip - Google Patents

Biologic sensor chip Download PDF

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Publication number
CN209167196U
CN209167196U CN201821740762.5U CN201821740762U CN209167196U CN 209167196 U CN209167196 U CN 209167196U CN 201821740762 U CN201821740762 U CN 201821740762U CN 209167196 U CN209167196 U CN 209167196U
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Prior art keywords
electrode
substrate layer
signal
sensor chip
signal acquisition
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CN201821740762.5U
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Inventor
李冠华
颜丹
刘福龙
董青龙
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Shenzhen Refresh Biosensor Technology Co ltd
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Shenzhen Refresh Intelligent Electronic Co Ltd
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Abstract

It include substrate layer, signal acquisition circuit and biological signal collecting electrode the utility model relates to a kind of biologic sensor chip, signal acquisition circuit and biological signal collecting electrode are located at two different surfaces layers of substrate layer, signal acquisition circuit and biological signal collecting electrode and are connected by passing through the conductive hole of substrate layer;Substrate layer is silicon base layer, GaAs substrate layer, carbon nanotube substrate layer or graphene substrate layer or ceramic base material layer.Biological signal collecting electrode and signal acquisition circuit are integrated in the different sides of a chip, in the electrode signal acquisition face contact liquid to be detected of chip, the current signal that electrode signal acquisition obtains is directly connected to signal acquisition circuit by conductive hole (transcrystalline hole), signal transmission path is short, signal interference is small, integrated level is high, the detection line of various microelements is promoted, by integrated circuit, micro nano structure so as to realize the other detection of molecular level to sweat, urine etc..

Description

Biologic sensor chip
Technical field
The utility model relates to sensor technical fields, and in particular to a kind of biologic sensor chip.
Background technique
Electrochemical process analysis bio signal is a kind of common method, generally can be to urine, sweat and the blood of biology Etc. being detected, the other detection of molecular level is realized to liquid, gas.
Currently, the detection means of row industry routine, is limited to sensor design and reaction condition, it is all in professional institution's list Position or large hospital carry out, and equipment volume is big, complicated for operation.On the other hand, bioelectrical signals generally all it is weaker (nA grades, mV, V grades of μ), traditional electrochemical sensor usually all makees sensor very big, makes response current as big as possible, to reduce The difficulty of signal acquisition determines that his device systems can not be done small in this way, cannot do the popularization of consumer level, be not easy to take Band.
Utility model content
Technical problem to be solved by the utility model is: a biologic sensor chip is proposed, by biological signal collecting electricity Pole and signal acquisition circuit are integrated in a chip, and the inspection of various microelements is promoted by integrated circuit, micro nano structure Outlet (detect the electric current for obtaining nA grades, the voltage of mV, the voltage that V grades of μ).
A kind of biologic sensor chip includes substrate layer, signal acquisition circuit and biological signal collecting electrode, signal acquisition Circuit and biological signal collecting electrode are located at two different surfaces layers of substrate layer, signal acquisition circuit and biological signal collecting Electrode is connected by passing through the conductive hole of substrate layer;Substrate layer is silicon base layer, GaAs substrate layer, carbon nanotube substrate layer or stone Mertenyl material layer or ceramic base material layer.
Preferably, biological signal collecting electrode is located at the back side of substrate layer;Signal acquisition circuit is located at the front of substrate layer;
Biological signal collecting electrode includes working electrode and reference electrode;Or, biological signal collecting electrode includes work electricity Pole, reference electrode and to electrode (effect to electrode be and working electrode composition circuit to pass through electric current.);
Working electrode is porous nano gold microelectrode or porous nano platinum microelectrode.
Preferably, the back side of substrate layer is provided with pit, and working electrode and reference electrode are located in pit;
The surface of working electrode is provided with bio signal reaction film layer.
Preferably, pit is step pit, and bio signal reacts film layer and the surface of reference electrode is in sustained height Layer.
Preferably, pit is circular pit, and the middle part that working electrode is located at pit is cylindrical, and reference electrode is in arcuation point It is distributed in the side of working electrode.
Preferably, biological signal collecting electrode includes 2 groups or more of working electrode and reference electrode, every group of working electrode and Reference electrode is used to detect an a kind of bio signal of body fluid;
The each working electrode and each reference electrode of every group of working electrode and reference electrode constitute an electrode pair.
Preferably, substrate layer is also integrated with bluetooth transmission circuit, the electrode connection bluetooth transmitting-receiving of biological signal collecting electrode The current input terminal of circuit.
Preferably, for the quantity of electrode pair more than N number of, electrode is distributed circumferentially array or rectangular array, and N is greater than 2, N For natural number;
Body fluid is sweat, blood, urine, tear or grease.
Preferably, substrate layer is also integrated with bluetooth transmission circuit and bioelectricity generating battery;Or,
Substrate layer is also integrated with bluetooth transmission circuit and wireless charging circuit.
Preferably, the bio signal reaction film layer of the working electrode of N number of electrode pair has 2 or more different-thickness values; Or,
The bio signal reaction film layer of the working electrode of N number of electrode pair has 2 or more different cross section values.
Preferably, the surface of signal acquisition circuit is provided with solder sphere by planting ball technique.
Preferably, the surface setting bonding salient point of signal acquisition circuit.
The beneficial effects of the utility model are: including substrate layer, letter the utility model relates to a kind of biologic sensor chip Number Acquisition Circuit and biological signal collecting electrode, signal acquisition circuit and biological signal collecting electrode are located at substrate layer two Different surfaces layer, signal acquisition circuit and biological signal collecting electrode are connected by passing through the conductive hole of substrate layer;Substrate layer is Silicon base layer, GaAs substrate layer, carbon nanotube substrate layer or graphene substrate layer or ceramic base material layer.By biological signal collecting electricity Pole and signal acquisition circuit are integrated in the different sides of a chip, in the electrode signal acquisition face contact liquid to be detected of chip Body, the current signal that electrode signal acquisition obtains are directly connected to signal acquisition circuit, signal transmission by conductive hole (transcrystalline hole) Path is short, signal interference is small, and integrated level is high, and the detection line of various microelements is promoted by integrated circuit, micro nano structure, So as to realize the other detection of molecular level to sweat, urine etc., nA grades of electric current, the voltage of mV or V grades of μ of voltage are obtained.
Detailed description of the invention
The biologic sensor chip of the utility model is described further with reference to the accompanying drawing.
Fig. 1 is a kind of top view at the back side of the substrate layer 1 of biologic sensor chip of the utility model.
Fig. 2 is a kind of structural schematic diagram of the circuit connection of biologic sensor chip of the utility model.
Fig. 3 is a kind of cross-sectional view of the embodiment one of biologic sensor chip of the utility model.
Fig. 4 is a kind of cross-sectional view of the embodiment two of biologic sensor chip of the utility model.
In figure:
1- substrate layer;2- signal acquisition circuit;3- biological signal collecting electrode;31- working electrode;32- reference electrode; 33- is to electrode;4- conductive hole;5- pit;6- bio signal reacts film layer;7- bluetooth transmission circuit;8- bioelectricity generating battery; 9- wireless charging circuit;10- solder sphere.
Specific embodiment
A kind of 1~4 pair of biologic sensor chip of the utility model is described further with reference to the accompanying drawing.
Embodiment one
A kind of biologic sensor chip, including substrate layer 1, signal acquisition circuit 2 and biological signal collecting electrode 3, signal Acquisition Circuit 2 and biological signal collecting electrode 3 are located at 1 two different surfaces layers of substrate layer, signal acquisition circuit 2 and biology Electrode signal acquisition 3 is connected by passing through the conductive hole 4 of substrate layer 1;Substrate layer 1 is silicon base layer, GaAs substrate layer, carbon nanometer Pipe substrate layer or graphene substrate layer or ceramic base material layer.
In the present embodiment, biological signal collecting electrode 3 is located at the back side of substrate layer 1;Signal acquisition circuit 2 is located at substrate layer 1 front;
Biological signal collecting electrode 3 includes that work includes working electrode 31, reference electrode 32 and to electrode 33, to electrode 33 Effect is to form circuit with working electrode 31 to pass through electric current.
Working electrode 31 is porous nano gold microelectrode or porous nano platinum microelectrode.
Biological signal collecting electrode 3 and signal acquisition circuit 2 are integrated in the different sides of a chip (substrate layer 1), The face contact liquid to be detected where electrode signal acquisition 3 in chip, the current signal that electrode signal acquisition 3 obtains pass through Conductive hole 4 (transcrystalline hole) is directly connected to signal acquisition circuit 2, and signal transmission path is short, signal interference is small, and integrated level is high, passes through Integrated circuit, micro nano structure promote the detection line of various microelements to realize, so as to the realizations such as sweat, urine point The detection of sub- rank obtains nA grades of electric current, the voltage of mV or V grades of μ of voltage.
Embodiment two
A kind of biologic sensor chip, including substrate layer 1, signal acquisition circuit 2 and biological signal collecting electrode 3, signal Acquisition Circuit 2 and biological signal collecting electrode 3 are located at 1 two different surfaces layers of substrate layer, signal acquisition circuit 2 and biology Electrode signal acquisition 3 is connected by passing through the conductive hole 4 of substrate layer 1;Substrate layer 1 is silicon base layer, GaAs substrate layer, carbon nanometer Pipe substrate layer or graphene substrate layer or ceramic base material layer.
In the present embodiment, biological signal collecting electrode 3 is located at the back side of substrate layer 1;Signal acquisition circuit 2 is located at substrate layer 1 front;
Biological signal collecting electrode 3 includes working electrode 31 and reference electrode 32;Or, biological signal collecting electrode 3 includes Working electrode 31, reference electrode 32 and to electrode 33, the effect to electrode 33 is and working electrode 31 forms circuit to pass through electricity Stream.
Working electrode 31 is porous nano gold microelectrode or porous nano platinum microelectrode.
In the present embodiment, the back side of substrate layer 1 is provided with pit 5, and working electrode 31 and reference electrode 32 are located at pit 5 It is interior;
The surface of working electrode 31 is provided with bio signal reaction film layer 6.
In the present embodiment, pit 5 is step pit, and bio signal reaction film layer 6 and the surface of reference electrode 32 are in Sustained height layer.
In the present embodiment, pit 5 is circular pit, and the middle part that working electrode 31 is located at pit 5 is cylindrical, reference electrode 32 are distributed in the side of working electrode 31 in arcuation.
In the present embodiment, biological signal collecting electrode 3 includes 2 groups or more of working electrode 31 and reference electrode 32, and every group Working electrode 31 and reference electrode 32 are used to detect an a kind of bio signal of body fluid;
The each working electrode 31 and each reference electrode 32 of every group of working electrode 31 and reference electrode 32 constitute an electricity It is extremely right.
In the present embodiment, the quantity of electrode pair is more than N number of, and electrode is distributed circumferentially array or rectangular array, and N is greater than 2, N be natural number.
In the present embodiment, substrate layer 1 is also integrated with bluetooth transmission circuit 7, and the electrode of biological signal collecting electrode 3 connects blue The current input terminal of tooth transmission circuit 7.
Alternative solution as one preferred: it is also possible to substrate layer 1 and is integrated with bluetooth transmission circuit 7 and bioelectricity hair Battery 8 gives bluetooth transmission circuit 7 to power by bioelectricity power generation pond 8;Or, substrate layer 1 is also integrated with bluetooth transmission circuit 7 With wireless charging circuit 9, powered by wireless charging circuit 9 to biological signal collecting electrode 3 and bluetooth transmission circuit 7.
In the present embodiment, the bio signal reaction film layer 6 of the working electrode 31 of N number of electrode pair has 2 or more differences Thickness value;Or,
The bio signal reaction film layer 6 of the working electrode 31 of N number of electrode pair has 2 or more different cross section values.
In the present embodiment, the surface of signal acquisition circuit 2 is provided with solder sphere 10 by planting ball technique.
In the present embodiment, body fluid is sweat, and bio signal is that the chloride ion in sweat is reacted with bio signal in film layer 6 Substance reacts the electric current of generation.
As needed, body fluid is also possible to blood, urine, tear or grease
The utility model is not limited to the above embodiment, and the technical solution of above-mentioned each embodiment of the utility model is each other New technical solution can be formed with combined crosswise, in addition all technical solutions formed using equivalent replacement, it is practical new to all fall within this In the protection scope that type requires.

Claims (10)

1. a kind of biologic sensor chip, which is characterized in that adopted including substrate layer (1), signal acquisition circuit (2) and bio signal Collector (3), the signal acquisition circuit (2) and the biological signal collecting electrode (3) are located at the substrate layer (1) two A different surfaces layer, the signal acquisition circuit (2) and the biological signal collecting electrode (3) are by passing through the substrate layer (1) conductive hole (4) connection;The substrate layer (1) is silicon base layer, GaAs substrate layer, carbon nanotube substrate layer or graphene Substrate layer or ceramic base material layer.
2. biologic sensor chip as described in claim 1, which is characterized in that the biological signal collecting electrode (3) is located at institute State the back side of substrate layer (1);The signal acquisition circuit (2) is located at the front of the substrate layer (1);
The biological signal collecting electrode (3) includes working electrode (31) and reference electrode (32);Or, the biological signal collecting Electrode (3) includes working electrode (31), reference electrode (32) and to electrode (33);
The working electrode (31) is porous nano gold microelectrode or porous nano platinum microelectrode.
3. biologic sensor chip as claimed in claim 2, which is characterized in that the back side of the substrate layer (1) is provided with pit (5), the working electrode (31) and reference electrode (32) are located in the pit (5);
The surface of the working electrode (31) is provided with bio signal reaction film layer (6).
4. biologic sensor chip as claimed in claim 3, which is characterized in that the pit (5) is step pit, the life The surface of object signal reaction film layer (6) and the reference electrode (32) is in sustained height layer.
5. biologic sensor chip as claimed in claim 4, which is characterized in that the pit (5) is circular pit, the work The middle part that electrode (31) is located at the pit (5) is cylindrical, and the reference electrode (32) is distributed in the work electricity in arcuation The side of pole (31).
6. biologic sensor chip as claimed in claim 5, which is characterized in that the biological signal collecting electrode (3) includes 2 groups Above working electrode (31) and reference electrode (32), working electrode described in every group (31) and reference electrode (32) are for detecting one One bio signal of kind body fluid;
The each working electrode (31) and each reference electrode (32) structure of working electrode described in every group (31) and reference electrode (32) At an electrode pair.
7. biologic sensor chip as claimed in claim 6, which is characterized in that the quantity of the electrode pair is described more than N number of Electrode is distributed circumferentially array or rectangular array, and it is natural number that N, which is greater than 2, N,;
The body fluid is sweat, blood, urine, tear or grease.
8. biologic sensor chip as claimed in claim 7, which is characterized in that the substrate layer (1) is also integrated with bluetooth transmitting-receiving Circuit (7) and bioelectricity generating battery (8);Or,
The substrate layer (1) is also integrated with bluetooth transmission circuit (7) and wireless charging circuit (9);Or,
The substrate layer (1) is also integrated with bluetooth transmission circuit (7), and the electrode of the biological signal collecting electrode (3) connects institute State the current input terminal of bluetooth transmission circuit (7).
9. biologic sensor chip as claimed in claim 8, which is characterized in that the working electrode (31) of N number of electrode pair Bio signal reacts the different-thickness value that film layer (6) have 2 or more;Or,
Bio signal reaction film layer (6) of the working electrode (31) of N number of electrode pair has 2 or more different cross section values.
10. biologic sensor chip as described in claim 1, which is characterized in that the surface of the signal acquisition circuit (2) passes through It plants ball technique and is provided with solder sphere (10);Or,
The surface setting bonding salient point of the signal acquisition circuit (2).
CN201821740762.5U 2018-10-25 2018-10-25 Biologic sensor chip Active CN209167196U (en)

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Application Number Priority Date Filing Date Title
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110726765A (en) * 2019-12-17 2020-01-24 深圳市刷新智能电子有限公司 Graphene biosensor electrode and preparation process thereof
CN111879341A (en) * 2020-07-31 2020-11-03 北京大学 Self-powered sensing micro-system based on laser-induced graphene process

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110726765A (en) * 2019-12-17 2020-01-24 深圳市刷新智能电子有限公司 Graphene biosensor electrode and preparation process thereof
CN111879341A (en) * 2020-07-31 2020-11-03 北京大学 Self-powered sensing micro-system based on laser-induced graphene process

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Address after: 518000 Tsinghua University, west of South Gate, No. 13, Langshan Road, songpingshan community, Xili street, Nanshan District, Shenzhen, Guangdong Province

Patentee after: Shenzhen refresh biosensor technology Co.,Ltd.

Address before: 518040 f3.83d302a, 3D building, Tianjing building, Tian'an Digital City, Tairan fifth road, Tian'an community, Shatou street, Futian District, Shenzhen, Guangdong Province

Patentee before: SHENZHEN REFRESH INTELLIGENT TECHNOLOGY Co.,Ltd.

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