CN108167648A - 氟化氢供应单元 - Google Patents

氟化氢供应单元 Download PDF

Info

Publication number
CN108167648A
CN108167648A CN201810066265.XA CN201810066265A CN108167648A CN 108167648 A CN108167648 A CN 108167648A CN 201810066265 A CN201810066265 A CN 201810066265A CN 108167648 A CN108167648 A CN 108167648A
Authority
CN
China
Prior art keywords
hydrogen fluoride
storage container
hydrogen
supply unit
fluorination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810066265.XA
Other languages
English (en)
Inventor
阿兰.福别列茨
菲利普.莫雷勒
奥利维耶罗.黛安娜
彼得.M.普雷迪坎特
毛里齐奥.帕加宁
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Solvay SA
Original Assignee
Solvay SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Solvay SA filed Critical Solvay SA
Publication of CN108167648A publication Critical patent/CN108167648A/zh
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B1/00—Electrolytic production of inorganic compounds or non-metals
    • C25B1/01—Products
    • C25B1/24—Halogens or compounds thereof
    • C25B1/245—Fluorine; Compounds thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D90/00—Component parts, details or accessories for large containers
    • B65D90/22—Safety features
    • B65D90/24—Spillage-retaining means, e.g. recovery ponds
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B15/00—Operating or servicing cells
    • C25B15/08—Supplying or removing reactants or electrolytes; Regeneration of electrolytes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C3/00—Vessels not under pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/05—Size
    • F17C2201/054—Size medium (>1 m3)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/01—Mounting arrangements
    • F17C2205/0103—Exterior arrangements
    • F17C2205/0111—Boxes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/01—Mounting arrangements
    • F17C2205/0123—Mounting arrangements characterised by number of vessels
    • F17C2205/013—Two or more vessels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/01—Mounting arrangements
    • F17C2205/0123—Mounting arrangements characterised by number of vessels
    • F17C2205/013—Two or more vessels
    • F17C2205/0134—Two or more vessels characterised by the presence of fluid connection between vessels
    • F17C2205/0142—Two or more vessels characterised by the presence of fluid connection between vessels bundled in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/01—Mounting arrangements
    • F17C2205/0123—Mounting arrangements characterised by number of vessels
    • F17C2205/013—Two or more vessels
    • F17C2205/0134—Two or more vessels characterised by the presence of fluid connection between vessels
    • F17C2205/0146—Two or more vessels characterised by the presence of fluid connection between vessels with details of the manifold
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/01—Mounting arrangements
    • F17C2205/0153—Details of mounting arrangements
    • F17C2205/0157—Details of mounting arrangements for transport
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/01—Mounting arrangements
    • F17C2205/0153—Details of mounting arrangements
    • F17C2205/0157—Details of mounting arrangements for transport
    • F17C2205/0161—Details of mounting arrangements for transport with wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323—Valves
    • F17C2205/0326—Valves electrically actuated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/03—Mixtures
    • F17C2221/037—Containing pollutant, e.g. H2S, Cl
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0146—Two-phase
    • F17C2223/0153—Liquefied gas, e.g. LPG, GPL
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/03—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the pressure level
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/03—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the pressure level
    • F17C2223/033—Small pressure, e.g. for liquefied gas
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/01—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the phase
    • F17C2225/0107—Single phase
    • F17C2225/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/03—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the pressure level
    • F17C2225/033—Small pressure, e.g. for liquefied gas
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/01—Propulsion of the fluid
    • F17C2227/0128—Propulsion of the fluid with pumps or compressors
    • F17C2227/0135—Pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/01—Propulsion of the fluid
    • F17C2227/0192—Propulsion of the fluid by using a working fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/04—Methods for emptying or filling
    • F17C2227/041—Methods for emptying or filling vessel by vessel
    • F17C2227/042—Methods for emptying or filling vessel by vessel with change-over from one vessel to another
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/04—Methods for emptying or filling
    • F17C2227/044—Methods for emptying or filling by purging
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04—Indicating or measuring of parameters as input values
    • F17C2250/0404—Parameters indicated or measured
    • F17C2250/0408—Level of content in the vessel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04—Indicating or measuring of parameters as input values
    • F17C2250/0404—Parameters indicated or measured
    • F17C2250/0421—Mass or weight of the content of the vessel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2260/00—Purposes of gas storage and gas handling
    • F17C2260/04—Reducing risks and environmental impact
    • F17C2260/044—Avoiding pollution or contamination
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/01—Applications for fluid transport or storage
    • F17C2270/0165—Applications for fluid transport or storage on the road
    • F17C2270/0168—Applications for fluid transport or storage on the road by vehicles
    • F17C2270/0171—Trucks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0518—Semiconductors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/32—Hydrogen storage
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/4673—Plural tanks or compartments with parallel flow
    • Y10T137/479—Flow dividing compartments
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/4673—Plural tanks or compartments with parallel flow
    • Y10T137/4807—Tank type manifold [i.e., one tank supplies or receives from at least two others]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/4673—Plural tanks or compartments with parallel flow
    • Y10T137/4857—With manifold or grouped outlets
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/4673—Plural tanks or compartments with parallel flow
    • Y10T137/4857—With manifold or grouped outlets
    • Y10T137/4874—Tank truck type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/5762—With leakage or drip collecting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86187—Plural tanks or compartments connected for serial flow
    • Y10T137/86196—Separable with valved-connecting passage
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87571—Multiple inlet with single outlet

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Agricultural Chemicals And Associated Chemicals (AREA)
  • Hydrogen, Water And Hydrids (AREA)

Abstract

本发明涉及氟化氢供应单元。在此提供了一种氟化氢供应单元，它包括多个被连接到一条氟化氢供应管线(2)上的可运输的氟化氢储存容器(1)，以及包含该氟化氢供应单元的一个化工设备上。

Description

氟化氢供应单元
本申请是申请日为2011年9月12日，申请号为201180047274.0，发明名称为“氟化氢供应单元”的发明专利申请的分案申请。
技术领域
本发明要求于2010年9月16提交的欧洲专利申请号10177188.9(出于所有的目的将该申请的全部内容通过引用结合在此)的优先权，本发明涉及一种氟化氢供应单元、包含此单元的一种化工设备、以及一种氟化氢供应方法。
背景技术
氟化氢值得注意地作为化学品制造工艺如通过分子氟(F2)的电解的制造的进料材料是有用的，例如作为半导体工业中的室清洁气体是有用的、并且用于制造其他氟化的化学品如氟化烃类。
参见WO 2004/009873，描述了用于通过氟化氢的电解而产生氟的一种装置和方法。该装置包括：多个单独的氟产生盒(cassette)；所述单独的氟产生盒可操作地连接到一个用于所述氟气体的远程使用和消耗的一个氟气体分配系统上；所述氟产生盒单独地与所述气体分配系统分离并且可从该装置中移除用于远程维护。在第24页第32行提到在一个储箱中保持了一个液体氟化氢供应。一个氟化氢蒸发器将该储箱的液体氟化氢蒸发并且将其供应至这些盒以维持一个恒定的电解质浓度。
现在本发明使得一种允许稳定且经济地供应HF同时将安全风险最小化的氟化氢供应单元是可得的。
发明内容
本发明因此涉及一种氟化氢供应单元，该单元包括多个可运输的氟化氢储存容器(1)，这些容器被连接到一条氟化氢供应管线(2)上，其中这些氟化氢储存容器中的至少一个具有等于或大于500升的容量。优选地，所有这些氟化氢储存容器具有等于或大于500升的容量。
附图说明
图1示出了本发明的一种氟化氢供应单元，它包括多个储存容器1、一条氟化氢供应管线2、一个歧管3以及远程控制的阀门4。图1提供了一个实施方案，其中从这些储存容器1中排出的HF被转运至一个HF电解槽7，在该电解槽中生产F2。
具体实施方式
“氟化氢”(HF)应理解为具体地表示无水氟化氢。当包含在一个储存容器中时，该氟化氢一般是液态的。优选地，在这些氟化氢储存容器中不含吸附剂。优选地，该无水HF主要由HF组成。
根据本发明的氟化氢供应单元总体上包括从2到20、优选从3到10、更优选4或5或6个储存容器。
在一个具体实施方案中，该氟化氢供应单元进一步包括(优选永久性地)至少一个氟化氢应急容器。此氟化氢应急容器优选地是如在此描述的一个空的氟化氢储存容器，它优选地连接到该氟化氢供应管线上。该氟化氢应急容器适当地被保持在一种惰性气体的压力下或真空下。该氟化氢应急容器一般是可操作的用于从一个泄露氟化氢的储存容器中接收HF。
用于将HF从一个泄露HF的储存容器中转运到该氟化氢应急容器中的装置包括例如惰性气体压力或泵。
在根据本发明的氟化氢供应单元中，这些氟化氢储存容器一般是空心体，它们可以任选地被安装在轮子上或者它们可以通过例如升降叉车来进行运输。该氟化氢储存总体上具有至少一个液体管线和一个气体管线。在此情况下，该液体管线在适当时可以连接到该氟化氢供应管线上，例如借助一种法兰盘连接。该气体管线可以另外地连接到一个惰性气体(例如无水空气或氮气)供应管线上，该惰性气体供应管线允许对该氟化氢储存容器加压。
在根据本发明的氟化氢供应单元中，优选地每个氟化氢储存容器具有的容量是一般从500至5000升、更优选500升至4000升、并且尤其优选地从1000至3000升。氟化氢储存容器的具体例子是UN T22或优选UN T20类型的RID/ADR-IMDG-所认证的储箱。此类储箱是可商购的。
在根据本发明的氟化氢供应单元中，每个储存容器都可以通过一个歧管3被连接到该氟化氢供应管线上。
在根据本发明的氟化氢供应单元中，每个储存容器都优选地可单独地与该氟化氢供应管线分离。
在根据本发明的氟化氢供应单元中，这些储存容器1可以总体上通过一个远程控制的装置4、优选是一个远程控制的阀门而与该氟化氢供应管线2分离。更优选地，每个储存容器都装备有一个远程控制的装置4、优选一个远程控制的阀门，从而允许将该容器与氟化氢供应管线分离。
当存在远程控制的阀门时，适当地另外安装手动阀门。这些远程控制的阀门允许例如从一个远程控制室中操作这些HF储存容器。
在一个优选实施方案中，这些HF储存容器包括一个自动的HF液面传感器。特别地，这些HF储存容器被安装在磅秤上。在这个优选实施方案中，优选地，一个过程控制系统、特别是一个自动过程控制系统是可操作的以关闭第一空的HF容器的远程控制的阀门并且打开另一个第二含HF的氟化氢储存容器的远程控制的阀。这个实施方案特别有效地避免了对HF阀门的手动操作并且确保了连续的HF供应。
在一个优选方面，这些阀门是可操作地以在异常操作状态下自动关闭，例如像在连接到HF供应管线的处理设备中的过程中断时。
在另一个优选的方面，这些阀门是可操作的以在根据本发明的氟化氢供应单元中HF泄露的情况下自动关闭。此类HF泄露可能是例如由于该HF储存容器内部的任选法兰连接的泄露而造成的。这尤其避免了在这种情况下必须要接近该氟化氢供应单元。
更优选地，可以通过具有封闭的分离空间的双重分离阀门将这些储存容器与HF供应管线分离。在此情况下，根据本发明的氟化氢供应单元适当地进一步包括至少一个与一个或多个封闭的分离空间相连接的空隙通气阀。该空隙通气阀总体是可操作来任选地从该封闭的分离空间中移除现有的HF。移除可以例如通过施加真空来进行。在另一个方面，移除可以例如通过用一种惰性气体和/或一种加压的吹扫气体(例如像无水空气或优选地氮气)来冲扫该封闭的分离空间而进行。在一个方面，这种移除是连续进行的。优选地，这种移除是不连续地进行的，特别是当一个HF储存容器连接到该供应管线上和/或与之脱连接时。适当时，适当地使从该封闭的分离空间中回收的气体排出到一个HF销毁单元，例如一个涤气器。
在根据本发明的氟化氢供应单元的一个优选方面，这些氟化氢储存容器1被包含在一个封闭空间5内，该封闭空间具有至少一个可关闭的门6，从而允许一个氟化氢储存容器进入该封闭空间之中或从中移除。在这个方面的一个实施方案中，该封闭空间包含这些氟化氢储存容器以及到该氟化氢供应管线上的连接件。在另一个实施方案中，该封闭空间另外包含一个蒸发器用于液体HF的蒸发。在这个优选方面及其实施方案中，该封闭空间适当地包括一个HF传感器，该传感器能够触发该封闭空间与一个HF销毁系统10的连接。适当地，该封闭空间通过一个抽吸管线9被连接到该HF销毁系统上，该抽吸管线被连接到一个风扇上，该风扇是可操作的以将气体从该封闭空间运输至该HF销毁系统。该HF销毁系统优选是一个涤气器。该涤气器适当地包含一种水性碱溶液，例如一种KOH溶液。
本发明还涉及一种包含该根据本发明的氟化氢供应单元的化工设备。在一个特别优选的方面，根据本发明的化工设备被用于通过HF的电解而制造氟。在此情况下，总体上将该氟化氢供应管线2连接到一个用于通过一种熔融盐电解质的HF电解而生产氟的电解槽7上。
在这个特别优选的方面，有利的是该设备包括一个用于F2和HF的常用销毁系统。此种常用销毁系统可以例如是包含一种KOH水溶液以及任选地Na2S2O3或K2S2O3的一个涤气器。
在根据本发明的化工设备，这些氟化氢储存容器的总计容量总体上对应于该化工设备以全容量生产该化学品时的5至60天、优选从15至30天的HF要求，例如F2。
图1示出了根据本发明的一种氟设备的一个具体实施方案，但无意进行限制：
多个可运输的氟化氢储存容器1通过一个歧管3连接到一个氟化氢供应管线2上。各个储存容器1可以通过一个远程控制的阀门4而单独地与该氟化氢供应管线2分离。这些氟化氢储存容器1、歧管以及远程控制的阀门被包含在一个封闭空间5内，该封闭空间具有至少一个可关闭的门6，从而允许一个氟化氢储存容器1进入该封闭空间之中或从中移除。该封闭空间进一步包括一个HF传感器，该传感器能够触发该封闭空间与一个HF销毁系统10的连接。该封闭空间通过一个抽吸管线9被连接到该HF销毁系统上，该抽吸管线被连接到一个风扇(未示出)上，该风扇是可操作的以将气体从该封闭空间运输至该HF销毁系统。该氟化氢供应管线2进入一个HF蒸发器8中，该蒸发器是可操作的以蒸发液体HF、被连接到电解槽7上，在该电解槽中可以电解HF来生产分子氟(F2)。
在一个特定的方面，根据本发明的化工设备具有若干个，例如1、2、3、4、5、6、7或8个生产线用于通过HF的电解来制造氟，这些生产线具有对应数目的根据本发明的氟化氢供应单元。
在另一个特定的方面，根据本发明的化工设备具有若干个，例如1、2、3、4、5、6、7或8个生产线，例如用于通过HF的电解来制造氟，并且具有更小数目(例如1、2、3或4)个根据本发明的氟化氢供应单元。
本发明还涉及一种用于制造化学品、特别是氟的方法，该方法包括使用根据本发明的化工设备。
本发明还涉及一种用于将氟化氢供应至一个化工设备的方法，该方法包括(a)用氟化氢填充至少一个可运输的氟化氢储存容器、(b)将该氟化氢储存容器运输到该氟化氢供应单元、(c)将该氟化氢储存容器连接到该氟化氢供应管线上、并且(d)将氟化氢从该氟化氢储存容器供应至该氟化氢供应管线。
在根据本发明的方法中，这种填充可以优选地在一个HF生产位置进行，在这里例如通过氟石与硫酸的反应来生产HF。
在根据本发明的方法中，将该氟化氢储存容器运输到该氟化氢供应单元总体上包括通过一种运输工具如轮船、铁路或优选地卡车来运输。通常，通过适当的装置例如像起重机或升降叉车将该氟化氢储存容器负载到该第二容器上和/或从其上卸载。
在根据本发明的方法一个优选实施方案中，在一个第二容器、优选一个ISO容器中运输多于一个的氟化氢储存容器。在此情况下，在所述第二容器中的氟化氢储存容器的数目优选地小于在该氟化氢供应单元中的氟化氢储存容器的数目。
在一个具体的例子中，将3个相同的各自具有2000-3000升、优选约2500升容量的氟化氢储存容器(例如UN T 20类型的容器)加载到1个ISO容器中并且运输到一个根据本发明的氟化氢供应单元。后者的氟化氢供应单元优选包括4个相同的如之前描述的容器。
在根据本发明的方法中，这种连接一般是以大于12天、经常等于或大于15天或18天的周期性进行的，优选地该周期性是大于20天。
一种用于将液体HF从一个氟化氢储存容器供应至该HF供应管线的适当方法是用一种惰性气体如N2对该容器加压。
在根据本发明的方法的一个优选的方面，这种供应包括将氟化氢顺序地从不同的氟化氢储存容器供应至该氟化氢供应管线。在此情况下，一般仅一个氟化氢储存容器具有一种向该氟化氢供应管线开放的连接。一个具体的顺序供应方案包括从除一个之外所有的氟化氢储存容器中顺序地供应氟化氢。
已经发现根据本发明的氟供应单元、根据本发明的化工设备以及根据本发明的方法允许维修和连接操作的数目减小，因此将与HF连接中的危害风险最小化。
若任何通过引用结合在此的专利、专利申请以及公开物中的披露内容与本说明相冲突，而这种冲突的程度使得一个术语变得不清楚，则应该优先采取本说明。
以下实例应理解为是展示本发明而非限制本发明。
实例
在一个HF制造设备中，3个UN T 20类型容器各自填充了2500升的无水HF并且用一个起重机加载到一个ISO容器中，该ISO容器被加载到一辆卡车上。该卡车将该ISO容器运输至一个氟制造设备，在这里通过一个升降叉车将这些UN T 20类型容器卸载并且经一个门运输至一个HF储存室中，该储存室是由涂覆有钢的聚合物制成的、具有一个海运容器的尺寸，从该室中移除3个空的UN T 20类型容器并且加载到该ISO容器中。一个操作员将这3个含HF的容器通过标准的连接而连接到一个歧管上，该歧管装配由多个远程控制阀门，具有另一个连接到其上的含HF的UN T 20类型容器。连接之后，操作员离开该房间并关上门。从一个控制室中，一个自动系统关闭并且打开这些远程控制阀门以使一个含HF的UN T 20类型将HF递送到一个HF供应管线，该管线穿过一个蒸发器。HF储存容器被安装在磅秤上，这样当一个HF容器为空时，一个过程控制系统关闭这些空容器的分离阀门并且打开另一个含HF的容器的阀门，而不手动操作并且不中断HF的供应。气态HF被进料到一个电解槽中，该电解槽在含KF x2HF的熔融电解质中通过HF的电解而生产F2。该设备的F2容量是150吨/年。约15天的全容量的F2生产之后，供应3个满的UN T 20类型的HF容器并更换掉如上描述的这些空容器。

Claims (22)

1.一种氟化氢供应单元，该氟化氢供应单元包括多个可运输的氟化氢储存容器(1)，该可运输的氟化氢储存容器连接到氟化氢供应管线(2)，该氟化氢供应管线(2)连接到HF蒸发器(8)，该氟化氢供应单元还包括至少一个氟化氢应急容器，该应急容器是连接到该氟化氢供应管线上的至少部分为空的氟化氢储存容器，其中该氟化氢储存容器中的至少一个具有等于或大于500升的容量，其中该氟化氢为无水液态氟化氢，以及其中该无水HF基本由HF组成，该氟化氢应急容器可用于从泄露氟化氢的储存容器接收HF，每个储存容器都装备有远程控制的阀门，可用于将该容器与氟化氢供应管线分离，在异常操作状态下自动关闭，以及在氟化氢供应单元中HF泄露的情况下自动关闭，氟化氢储存容器被包含在封闭空间内，该封闭空间具有至少一个可关闭的门，从而允许氟化氢储存容器进入该封闭空间之中或从中移除，该封闭空间包括HF传感器，该传感器能够触发该封闭空间与HF销毁系统的连接。
2.根据权利要求1所述的氟化氢供应单元，包括2到20个储存容器。
3.根据权利要求1所述的氟化氢供应单元，包括3到10个储存容器。
4.根据权利要求1所述的氟化氢供应单元，包括4到6个储存容器。
5.根据权利要求1所述的氟化氢供应单元，其中每个储存容器都通过歧管(3)连接到该氟化氢供应管线。
6.根据权利要求1所述的氟化氢供应单元，其中每个储存容器都单独地与该氟化氢供应管线可分离。
7.根据权利要求6所述的氟化氢供应单元，其中该储存容器(1)能通过远程控制的装置(4)而与该氟化氢供应管线(2)分离。
8.根据权利要求6所述的氟化氢供应单元，其中该储存容器(1)能通过远程控制的阀门而与该氟化氢供应管线(2)分离。
9.根据权利要求1所述的氟化氢供应单元，其中该氟化氢储存容器(1)被容纳在封闭空间(5)内，该封闭空间具有至少一个可关闭的门(6)，从而允许氟化氢储存容器进入该封闭空间之中或从该封闭空间中移除。
10.根据权利要求1至9中任一项所述的氟化氢供应单元，其中每个氟化氢储存容器都具有500至5000升的容量。
11.根据权利要求1至9中任一项所述的氟化氢供应单元，其中每个氟化氢储存容器都具有500至4000升的容量。
12.根据权利要求1至9中任一项所述的氟化氢供应单元，其中每个氟化氢储存容器都具有1000至3000升的容量。
13.一种化工设备，包括根据权利要求1至12中任一项所述的氟化氢供应单元。
14.根据权利要求13所述的化工设备，用于制造氟，其中该氟化氢供应管线(2)连接到电解槽(7)用于通过熔融盐电解质的HF电解而生产氟。
15.根据权利要求13或14所述的化工设备，其中该氟化氢储存容器的总计容量对应于该化工设备以全部生产能力生产化学品时的15至60天的HF要求。
16.根据权利要求13或14所述的化工设备，其中该氟化氢储存容器的总计容量对应于该化工设备以全部生产能力生产化学品时的15至30天的HF要求。
17.一种用于制造化学品的方法，包括使用根据权利要求13至16中任一项所述的化工设备。
18.一种用于将氟化氢供应至根据权利要求13至16中任一项所述的化工设备的方法，该方法包括：(a)用氟化氢填充至少一个可运输的氟化氢储存容器、(b)将该氟化氢储存容器运输到该氟化氢供应单元、(c)将该氟化氢储存容器连接到该氟化氢供应管线、以及(d)将氟化氢从该氟化氢储存容器供应至该氟化氢供应管线。
19.根据权利要求18所述的方法，其中在第二容器中运输多于一个的氟化氢储存容器，并且在所述第二容器中的氟化氢储存容器的数目小于在该氟化氢供应单元中的氟化氢储存容器的数目。
20.根据权利要求19所述的方法，其中所述第二容器为ISO容器。
21.根据权利要求18至20中任一项所述的方法，其中所述连接是以多于12天的周期性进行的。
22.根据权利要求18至20中任一项所述的方法，其中所述连接是以多于15天的周期性进行的。
CN201810066265.XA 2010-09-16 2011-09-12 氟化氢供应单元 Pending CN108167648A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP10177188 2010-09-16
EP10177188.9 2010-09-16
CN2011800472740A CN103154594A (zh) 2010-09-16 2011-09-12 氟化氢供应单元

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN2011800472740A Division CN103154594A (zh) 2010-09-16 2011-09-12 氟化氢供应单元

Publications (1)

Publication Number Publication Date
CN108167648A true CN108167648A (zh) 2018-06-15

Family

ID=43431224

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201810066265.XA Pending CN108167648A (zh) 2010-09-16 2011-09-12 氟化氢供应单元
CN2011800472740A Pending CN103154594A (zh) 2010-09-16 2011-09-12 氟化氢供应单元

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN2011800472740A Pending CN103154594A (zh) 2010-09-16 2011-09-12 氟化氢供应单元

Country Status (12)

Country Link
US (1) US9334574B2 (zh)
EP (1) EP2616735A2 (zh)
JP (1) JP2013540964A (zh)
KR (1) KR101914799B1 (zh)
CN (2) CN108167648A (zh)
BR (1) BR112013005993A2 (zh)
MA (1) MA34518B1 (zh)
MY (1) MY183341A (zh)
SG (1) SG188462A1 (zh)
TW (1) TWI525042B (zh)
WO (1) WO2012034979A2 (zh)
ZA (1) ZA201301842B (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201028363A (en) 2008-10-24 2010-08-01 Solvay Fluor Gmbh Bundle trailer for gas delivery
CN102980022B (zh) * 2012-12-13 2015-02-25 福建瓮福蓝天氟化工有限公司 一种利用槽车中残余无水氟化氢气体的方法
WO2017056277A1 (ja) 2015-09-30 2017-04-06 株式会社 東芝 水素製造装置及び水素製造システム
CN109289444B (zh) * 2018-07-25 2021-01-15 浙江森田新材料有限公司 一种无水氢氟酸生产线转炉出气方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5685350A (en) * 1996-02-07 1997-11-11 Air Products And Chemicals, Inc. Method and apparatus for transporting, storing and delivering dangerous chemicals
US5837027A (en) * 1996-05-20 1998-11-17 Advanced Technology Materials, Inc. Manufacturing process for gas source and dispensing systems
CN1502548A (zh) * 2002-11-20 2004-06-09 ����̿����ʽ���� 氟气发生装置
CN1668780A (zh) * 2002-07-19 2005-09-14 波克股份有限公司 生产氟的设备和方法
CN1942365A (zh) * 2003-09-09 2007-04-04 高级技术材料公司 用于多容器阵列中的气体存储和分配容器的转接的自动切换系统
CN101006303A (zh) * 2004-08-12 2007-07-25 乔治洛德方法研究和开发液化空气有限公司 储气系统及其使用方法以及安装有该储气系统的车辆
CN101248216A (zh) * 2005-08-25 2008-08-20 东洋炭素株式会社 氟系气体产生装置
CN101514446A (zh) * 2008-02-22 2009-08-26 普莱克斯技术有限公司 多安瓿输送系统

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2544285A (en) * 1944-03-15 1951-03-06 Kenneth E Stuart Electrolytic cell
US3476292A (en) * 1966-08-04 1969-11-04 Holiday Inns Of America Inc Apparatus for making polyurethane foam
US3503411A (en) * 1967-06-12 1970-03-31 Bowles Eng Corp Pure fluid automatic cargo control system
US5366606A (en) * 1993-05-17 1994-11-22 Florida Scientific Laboratories Inc. Electrolytic gas generator
US6406519B1 (en) * 1998-03-27 2002-06-18 Advanced Technology Materials, Inc. Gas cabinet assembly comprising sorbent-based gas storage and delivery system
US6199384B1 (en) 1999-07-09 2001-03-13 American Air Liquide Inc. System and method for controlled delivery of liquefied gases including control aspects
WO2001083084A1 (en) * 2000-05-03 2001-11-08 Advanced Technology Materials, Inc. Gas cabinet assembly comprising sorbent-based gas storage and delivery system
JP2002147695A (ja) * 2000-11-08 2002-05-22 Sony Corp 液体フッ化水素用容器、この容器内への液補充方法及び基板処理装置
GB0111417D0 (en) * 2001-05-09 2001-07-04 Boc Group Plc Gas containment system
WO2003052167A1 (fr) * 2001-12-17 2003-06-26 Toyo Tanso Co., Ltd. Appareil et procede de production d'un gaz f2 et gaz f2 ainsi obtenu
US6857447B2 (en) * 2002-06-10 2005-02-22 Advanced Technology Materials, Inc. Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases
US7325561B2 (en) * 2004-12-02 2008-02-05 Honda Motor Co., Ltd. Hydrogen vehicle gas utilization and refueling system
US7638058B2 (en) 2005-04-07 2009-12-29 Matheson Tri-Gas Fluid storage and purification method and system
US7784502B2 (en) * 2005-04-08 2010-08-31 Air Products And Chemicals, Inc. Method and system of supply and delivery of product contained in a carrier

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5685350A (en) * 1996-02-07 1997-11-11 Air Products And Chemicals, Inc. Method and apparatus for transporting, storing and delivering dangerous chemicals
US5837027A (en) * 1996-05-20 1998-11-17 Advanced Technology Materials, Inc. Manufacturing process for gas source and dispensing systems
CN1668780A (zh) * 2002-07-19 2005-09-14 波克股份有限公司 生产氟的设备和方法
CN1502548A (zh) * 2002-11-20 2004-06-09 ����̿����ʽ���� 氟气发生装置
CN1942365A (zh) * 2003-09-09 2007-04-04 高级技术材料公司 用于多容器阵列中的气体存储和分配容器的转接的自动切换系统
CN101006303A (zh) * 2004-08-12 2007-07-25 乔治洛德方法研究和开发液化空气有限公司 储气系统及其使用方法以及安装有该储气系统的车辆
CN101248216A (zh) * 2005-08-25 2008-08-20 东洋炭素株式会社 氟系气体产生装置
CN101514446A (zh) * 2008-02-22 2009-08-26 普莱克斯技术有限公司 多安瓿输送系统

Also Published As

Publication number Publication date
SG188462A1 (en) 2013-04-30
TWI525042B (zh) 2016-03-11
KR20130140666A (ko) 2013-12-24
US9334574B2 (en) 2016-05-10
EP2616735A2 (en) 2013-07-24
MA34518B1 (fr) 2013-09-02
TW201221475A (en) 2012-06-01
WO2012034979A2 (en) 2012-03-22
KR101914799B1 (ko) 2018-11-02
CN103154594A (zh) 2013-06-12
BR112013005993A2 (pt) 2016-06-07
US20130180609A1 (en) 2013-07-18
MY183341A (en) 2021-02-18
WO2012034979A3 (en) 2012-05-10
ZA201301842B (en) 2014-08-27
JP2013540964A (ja) 2013-11-07

Similar Documents

Publication Publication Date Title
CN108167648A (zh) 氟化氢供应单元
KR101061263B1 (ko) 용기 내의 검사, 수리 및/또는 다른 작업을 수행하기 위한 장치 및 방법
US7784501B2 (en) Efficient system and method for delivery of product and return of carrier
US20100129606A1 (en) Chemical process for obtaining anti-reflective glass, comprising immersion in an acid solution, for simultaneous and continuous production
KR101755190B1 (ko) 시료 채취 장치 및 시료 채취 방법
CN100378248C (zh) 生产氟的设备以及该设备的操作和维护方法
US8871174B2 (en) Method for the supply of fluorine
US20210162507A1 (en) Inertable container for transporting an additive manufacturing powder
US9757775B2 (en) Chamber cleaning method using F2 and a process for manufacture of F2 for this method
WO2020104119A1 (en) A method and equipment for storing and transporting hot gas emitting components
US20120240650A1 (en) Stabilization and remote recovery of acid gas fractions from sour wellsite gas
US20230009044A1 (en) Liquid chemical supply device system and method thereof capable of processing gases contained therein
CN108486549B (zh) 物料回收装置
US7163036B2 (en) Method of supplying fluorine
CN114787550B (zh) 气体替换方法
EP4134343A1 (en) Tank container and method for manufacturing same
KR20160073707A (ko) 액화천연가스 운반선의 운용방법
WO2015067541A1 (en) Gas transportation vessel
CN211952255U (zh) 一种无水氟化氢卸车分析取样管路系统
RU2803856C1 (ru) Система мониторинга состояния заполненных криогенным продуктом танк-контейнеров при перевозке авиационным транспортом
JP2715271B2 (ja) 液化ガス充填容器の検査方法
CN100419986C (zh) 衬底处理设备和衬底处理方法
NZ774532B2 (en) A method and equipment for storing and transporting hot gas emitting components
EA041015B1 (ru) Способ и оборудование для хранения и транспортировки компонентов, выделяющих горячий газ
CN117897532A (zh) 海上设备

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
WD01 Invention patent application deemed withdrawn after publication
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20180615