CN108163529A - Mask plate transport device - Google Patents
Mask plate transport device Download PDFInfo
- Publication number
- CN108163529A CN108163529A CN201711458786.1A CN201711458786A CN108163529A CN 108163529 A CN108163529 A CN 108163529A CN 201711458786 A CN201711458786 A CN 201711458786A CN 108163529 A CN108163529 A CN 108163529A
- Authority
- CN
- China
- Prior art keywords
- mask plate
- clamping element
- installing plate
- transport device
- pallet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/902—Devices for picking-up and depositing articles or materials provided with drive systems incorporating rotary and rectilinear movements
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The present invention discloses a kind of mask plate transport device, wherein the mask plate transport device includes pallet, set on the link mechanism of pallet, and at least one installing plate and clamping element in the pallet, the link mechanism is sequentially connected with clamping element, the clamping element is arranged at intervals with the installing plate, the link mechanism drive connection clamping element is separate or close to the installing plate, when the side of mask plate is connected to the installing plate, the link mechanism drives the clamping element close to the installing plate, and the clamping element is connected to the mask plate away from the side of installing plate.The mask plate transport device of the present invention can reduce the vibrations in mask plate transportational process convenient for mask plate fixed placement and taking-up, ensure the precision of mask plate.
Description
Technical field
The present invention relates to technical field of semiconductors, more particularly to a kind of mask plate transport device.
Background technology
Mask plate is one of auxiliary tool most important and costly in semicon industry, and the making of mask plate is transported, storage
Deposit all quite " enervated ", and once damage, there is fatal damage to the quality of product, mask plate repair in itself be also one very
Fine task, it is most important that the abnormal normal production for being likely to affect a product occurs in mask plate, therefore ensures mask
The quality of plate is particularly important.Mask plate transport at present is generally transported by shelf, during transport due to vibrations etc.
The damage of mask plate can be caused, so as to influence its precision, and mask plate is when taking out and placing shelf, also very inconvenient.
Invention content
The main object of the present invention is to provide a kind of mask plate transport device, it is intended to convenient for mask plate fixed placement and take
Go out, and the vibrations in mask plate transportational process can be reduced, ensure the precision of mask plate.
To achieve the above object, the present invention proposes a kind of mask plate transport device, which includes transport
Frame, set on the link mechanism of pallet and at least one installing plate in the pallet and clamping element, the connecting rod machine
Structure is sequentially connected with clamping element, and the clamping element is arranged at intervals with the installing plate, and the link mechanism is drivingly connected the folder
Tight part is separate or close to the installing plate, and when the side of mask plate is connected to the installing plate, the link mechanism drives institute
Clamping element is stated close to the installing plate, and the clamping element is connected to the mask plate away from the side of installing plate.
Preferably, the installing plate is set in the pallet vertically.
Preferably, the installing plate includes two spaced mounting blocks, and two mounting blocks are set on vertically respectively
The both ends of the pallet, the edge of the mask plate are connected to two mounting blocks.
Preferably, the installing plate is placed in for multiple and interval in the pallet, the corresponding clamping element to be multiple,
Each two clamping element is respectively placed at the mounting blocks at an installing plate both ends, and the link mechanism is two, positioned at each installing plate
The clamping element of the same end connects a link mechanism simultaneously.
Preferably, the link mechanism includes motion bar and is articulated with multiple connecting rods of the motion bar, and each connecting rod is remote
One end from the motion bar connects a corresponding clamping element.
Preferably, the clamping element is cam, and the connecting rod connects the cam, the cam to be driven to overturn or back and forth
It is mobile.
Preferably, the cam is eccentric wheel.
Preferably, the clamping element is clamping jaw, and the connecting rod is fixedly connected with one end of the clamping jaw, clamping jaw to be driven to overturn
Or move back and forth.
Preferably, the clamping jaw offers the notch being adapted with mask plate edge, and the clamping jaw is close to the installing plate
When, the edge of the mask plate is placed in the notch.
Preferably, which further includes multiple idler wheels, and the idler wheel is set on the pallet.
The present invention passes through pallet, at least one peace set on the link mechanism of pallet and in the pallet
Loading board and clamping element, the link mechanism are sequentially connected with clamping element, and the clamping element is arranged at intervals with the installing plate, described
The link mechanism drive connection clamping element is separate or close to the installing plate, when the side of mask plate is connected to the installing plate
When, the link mechanism drives the clamping element to be connected to the mask backboard close to the installing plate, and by the clamping element
Side from installing plate makes mask plate convenient for fixed placement and taking-up, and can reduce the vibrations in mask plate transportational process with this,
Ensure the precision of mask plate.
Description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, to embodiment or will show below
There is attached drawing needed in technology description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention, for those of ordinary skill in the art, without creative efforts, can be with
Structure according to these attached drawings obtains other attached drawings.
Fig. 1 is the structure diagram of one embodiment of mask plate transport device of the present invention；
After Fig. 2 is the overturning of Fig. 1 mask plates transport device, clamping element unclamps the structure diagram of mask plate；
Fig. 3 is the structure diagram of another embodiment of mask plate transport device of the present invention.
Drawing reference numeral explanation：
| Label | Title | Label | Title |
| 10 | Pallet | 40 | Clamping element |
| 20 | Link mechanism | 41 | Cam |
| 21 | Motion bar | 42 | Clamping jaw |
| 22 | Connecting rod | 421 | Notch |
| 30 | Installing plate | 50 | Idler wheel |
| 31 | Mounting blocks | 60 | Mask plate |
The embodiments will be further described with reference to the accompanying drawings for the realization, the function and the advantages of the object of the present invention.
Specific embodiment
Below in conjunction with the attached drawing in the embodiment of the present invention, the technical solution in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only the part of the embodiment of the present invention, instead of all the embodiments.Base
Embodiment in the present invention, those of ordinary skill in the art obtained without creative efforts it is all its
His embodiment, shall fall within the protection scope of the present invention.
It is to be appreciated that the directional instruction (such as up, down, left, right, before and after ...) of institute is only used in the embodiment of the present invention
In explaining relative position relation, motion conditions under a certain particular pose (as shown in drawings) between each component etc., if should
When particular pose changes, then directionality instruction also correspondingly changes correspondingly.
In the present invention unless specifically defined or limited otherwise, term " connection ", " fixation " etc. should be interpreted broadly,
For example, " fixation " can be fixedly connected or be detachably connected or integral；Can be mechanical connection or
Electrical connection；It can be directly connected, can also be indirectly connected by intermediary, can be the connection inside two elements or two
The interaction relationship of a element, unless otherwise restricted clearly.It for the ordinary skill in the art, can basis
Concrete condition understands the concrete meaning of above-mentioned term in the present invention.
In addition, in the present invention such as relating to the description of " first ", " second " etc. be only used for description purpose, and it is not intended that
Indicate or imply its relative importance or the implicit quantity for indicating indicated technical characteristic.Define as a result, " first ",
At least one this feature can be expressed or be implicitly included to the feature of " second ".In addition, the technical side between each embodiment
Case can be combined with each other, but must can be implemented as basis with those of ordinary skill in the art, when the combination of technical solution
Conflicting or can not realize when occur will be understood that the combination of this technical solution is not present, also not the present invention claims guarantor
Within the scope of shield.
The present invention proposes a kind of mask plate transport device.
Referring to Figures 1 and 2, in an embodiment of the present invention, which includes pallet 10, set on transport
The link mechanism 20 of frame 10 and at least one installing plate 30 and clamping element 40 in the pallet 10, the connecting rod machine
Structure 20 is sequentially connected with clamping element 40, and the clamping element 40 is arranged at intervals with the installing plate 30, and the link mechanism 20 drives
Connect the clamping element 40 far from or close to the installing plate 30, when the side of mask plate 60 is connected to the installing plate 30,
The link mechanism 20 drives the clamping element 40 close to the installing plate 30, and the clamping element 40 is connected to the mask
Plate 60 deviates from the side of installing plate 30.
Above-mentioned pallet 10 can be the cabinet body structure of frame structure or sealing；60 one end of mask plate is connected to peace
Loading board 30, the other end are abutted by clamping element 40, and mask plate 60 is made to be anchored on installing plate 30 and is not deviated, and ensure that mask plate 60 exists
Stability in transportational process, and make clamping element 40 that can unclamp or clamp mask plate 60 by link mechanism 20, it is not required to very important person
Work operates, convenient and efficient, and can ensure the precision of mask plate 60.Wherein link mechanism 20 is driven by external motor and run, folder
Tight part 40 can one end be articulated in connection transportation frame 10, the other end is fixedly connected with link mechanism 20 or hingedly, passes through connecting rod machine
Structure 20 drives clamping element 40 to carry out overturning movement, makes clamping element 40 separate or close to installing plate 30, peace is placed in release or clamping
Mask plate 60 in loading board 30；Wherein clamping element 40 can also one end be slidably connected to 10 inner wall of pallet, the other end and connecting rod machine
Structure 20 is fixedly connected or is hinged, and clamping element 40 is driven to be moved back and forth by link mechanism 20, with separate or close installing plate
30, it is unclamped or clamping is placed in mask plate 60 on installing plate 30.Location structure can be equipped on installing plate 30 therein, makes to cover
Diaphragm plate 60 can be accurately placed on installing plate 30, and improves clamping element 40 to 60 fixed stability of mask plate；Still further,
Mask plate 60 can be made to be abutted with installing plate 30 more stable by increasing roughness on installing plate 30；Further enhance mask plate 60
Pass through the stability of the mask plate transporting apparatus transports；Further, rubber can be used with 60 contact surface of mask plate in clamping element 40
The tight ness rating of both rubber cushion enhancings contact.
One embodiment of the invention by pallet 10, set on the link mechanism 20 of pallet 10 and set on the pallet
At least one installing plate 30 and clamping element 40 in 10, the link mechanism 20 are sequentially connected with clamping element 40, the clamping element
40 are arranged at intervals with the installing plate 30, the link mechanism 20 be drivingly connected the clamping element 40 far from or close to the installation
Plate 30, when the side of mask plate 60 is connected to the installing plate 30, the link mechanism 20 drives the clamping element 40 close
The installing plate 30, and the clamping element 40 is connected to the mask plate 60 away from the side of installing plate 30, mask is made with this
Plate 60 is convenient for fixed placement and taking-up, and can reduce the vibrations in 60 transportational process of mask plate, is easy to implement automation, can prevent
Human contact's mask plate 60 ensures 60 precision of mask plate, and improves whole efficiency.
Preferably, the installing plate 30 is set in the pallet 10 vertically.Mask plate 60 is made to be supported in vertical placement with this
Installing plate 30 is connected to, ensures that flatness and precision of the mask plate 60 in transportational process are unaffected.
Preferably, the installing plate 30 includes two spaced mounting blocks 31, and two mounting blocks 31 erect respectively
The both ends of the pallet 10 are directly set on, the edge of the mask plate 60 is connected to two mounting blocks 60.It is preferred that mounting blocks
31 are set on the lower edges of mask plate 60, and the edge of mask plate 60 is connected to by two mounting blocks 31, can reduce mask plate 60
Vibrations in transportational process ensure the precision of mask plate 60.
Further, the installing plate 30 is placed in for multiple and interval in the pallet 10, the corresponding clamping element
40 be multiple, and each two clamping element 40 is respectively placed at the mounting blocks 31 at 30 both ends of an installing plate, and the link mechanism 20 is two
A, the clamping element 40 positioned at each 30 the same end of installing plate connects a link mechanism 20 simultaneously.
The tightness that mask plate 60 is connected to installing plate 30 is further enhanced by two clamping elements 40, makes mask plate 60 logical
It is more stable to cross the mask plate transporting apparatus transports, does not influence the precision of mask plate 60.
Preferably, the link mechanism 20 includes motion bar 21 and is articulated with multiple connecting rods 22 of the motion bar 21, often
The one end of one connecting rod 22 far from the motion bar 21 connects a corresponding clamping element 40.
Above-mentioned motion bar 21 can move back and forth under the drive of external motor, and connecting rod 22 is under the drive of motion bar 21
Simultaneous bias clamping element 40 to be driven to move, makes clamping element 40 clamp or unclamp the mask plate 60 for being connected to installing plate 30.
It specifically, will by external equipment after mask plate 60 is by mask plate transporting apparatus transports to fixed position end
Mask plate transport device is integrally overturn, and mask plate 60 is made to be horizontal and is placed on horizontal installing plate 30, in order to clamping element
During 40 release mask plate 60, mask plate 60 is stably placed on installing plate 30, is taken out convenient for mask plate 60, ensures mask plate 60
Security and stability in transportational process improves its precision.
Another embodiment is：The clamping element 40 is cam 41, and the connecting rod 22 connects the cam 41, with described in drive
Cam 41 overturns or moves back and forth.
The cam 41 therein is preferably eccentric wheel, and cam 41 uses irregular curve, the peak that cam 41 is overturn
It can meet with minimum point and the mask plate 60 on installing plate 30 is clamped and unclamped, external machinery equipment further can be achieved
Do not interfere when picking and placeing mask plate 60.It is fixed by connecting rod 22 and 41 center one end of cam, the other end is cut with scissors by motion bar 21
It connecing, realizes that multiple connecting rods 22 link, cam 41 goes to minimum point in the drive backspin of connecting rod 22, carries out unclamping mask plate 60,
Cam 41 goes to peak in the drive backspin of connecting rod 22, is clamped mask plate 60, and steps up to lock, and ensures to fix.
With reference to Fig. 3, another embodiment is that the clamping element 40 is clamping jaw 42, and the connecting rod 22 is fixedly connected with the clamping jaw
42 one end, clamping jaw 42 to be driven to overturn or is moved back and forth.Further, the clamping jaw 42 offers and 60 edge phase of mask plate
The notch 421 of adaptation, when the clamping jaw 42 is close to the installing plate 30, the edge of the mask plate 60 is placed in the notch
421。
Clamping jaw 42 can be ensured when clamping mask plate 60 by notch 421, the vertical plane at 60 edge of mask plate and side with
The inner wall of notch 421 closely abuts, and is locked mask plate 60, prevents its movement, improves mask plate 60 in transportational process
Stability.
Preferably, which further includes multiple idler wheels 50, and the idler wheel 50 is set on the pallet 10.
Above-mentioned idler wheel 50 is preferably four, is respectively arranged at four angles of 10 bottom of pallet, is convenient for by idler wheel 50
Pallet 10 moves, and further, idler wheel 50 can just have rubber material, to reduce the vibrations in moving process, ensures mask plate
Precision in 60 transportational processes is unaffected, ensures the precision of mask plate 60.
The foregoing is merely the preferred embodiment of the present invention, are not intended to limit the scope of the invention, every at this
The equivalent structure transformation made under the inventive concept of invention using description of the invention and accompanying drawing content or directly/utilization indirectly
It is included in the scope of patent protection of the present invention in other related technical areas.
Claims (10)
1. a kind of mask plate transport device, which is characterized in that including pallet, set on the link mechanism of pallet and set on institute
State at least one installing plate and the clamping element in pallet, the link mechanism is sequentially connected with clamping element, the clamping element with
The installing plate is arranged at intervals, and the link mechanism drives the clamping element to be supported close to the installing plate, and by the clamping element
It is connected to the side that the mask plate deviates from installing plate.
2. mask plate transport device as described in claim 1, which is characterized in that the installing plate is set on the pallet vertically
It is interior.
3. mask plate transport device as claimed in claim 2, which is characterized in that the installing plate is spaced including two
Mounting blocks, two mounting blocks are set on the both ends of the pallet vertically respectively, and the edge of the mask plate is connected to two
The mounting blocks.
4. mask plate transport device as claimed in claim 3, which is characterized in that the installing plate is placed in institute for multiple and interval
It states in pallet, the corresponding clamping element is multiple, and each two clamping element is respectively placed at the mounting blocks at an installing plate both ends,
The link mechanism is two, and the clamping element positioned at each installing plate the same end connects a link mechanism simultaneously.
5. the mask plate transport device as described in claim 1-4 is any, which is characterized in that the link mechanism includes motion bar
With the multiple connecting rods for being articulated with the motion bar, the one end of each connecting rod far from the motion bar connects a corresponding clamping element.
6. mask plate transport device as claimed in claim 5, which is characterized in that the clamping element is cam, and the connecting rod connects
The cam is connect, the cam to be driven to overturn or is moved back and forth.
7. mask plate transport device as claimed in claim 6, which is characterized in that the cam is eccentric wheel.
8. mask plate transport device as claimed in claim 5, which is characterized in that the clamping element is clamping jaw, and the connecting rod is consolidated
Surely one end of the clamping jaw is connected, clamping jaw to be driven to overturn or is moved back and forth.
9. mask plate transport device as claimed in claim 8, which is characterized in that the clamping jaw offers and mask plate edge phase
The notch of adaptation, when the clamping jaw is close to the installing plate, the edge of the mask plate is placed in the notch.
10. mask plate transport device as claimed in claim 5, which is characterized in that the mask plate transport device further includes multiple
Idler wheel, the idler wheel are set on the pallet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711458786.1A CN108163529B (en) | 2017-12-28 | 2017-12-28 | Mask plate conveying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711458786.1A CN108163529B (en) | 2017-12-28 | 2017-12-28 | Mask plate conveying device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108163529A true CN108163529A (en) | 2018-06-15 |
| CN108163529B CN108163529B (en) | 2019-12-31 |
Family
ID=62519064
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711458786.1A Active CN108163529B (en) | 2017-12-28 | 2017-12-28 | Mask plate conveying device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108163529B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109051686A (en) * | 2018-09-29 | 2018-12-21 | 苏州精濑光电有限公司 | A kind of workpiece method of operation |
| CN109143776A (en) * | 2018-08-03 | 2019-01-04 | 武汉华星光电半导体显示技术有限公司 | A kind of exposure light shield packing device and its locking mechanism |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1905905A (en) * | 1930-04-26 | 1933-04-25 | Pittsburgh Plate Glass Co | Clamp for plate glass racks |
| CN105668236A (en) * | 2016-03-28 | 2016-06-15 | 吴江南玻华东工程玻璃有限公司 | Glass carrying device |
| CN206050955U (en) * | 2016-08-26 | 2017-03-29 | 沭阳鑫达新材料有限公司 | A kind of glass placing rack |
| CN206218834U (en) * | 2016-11-30 | 2017-06-06 | 东旭科技集团有限公司 | Glass substrate marginal ray detection clamping device |
| CN206494525U (en) * | 2017-02-15 | 2017-09-15 | 北京四汇建筑工程有限责任公司 | Glass placing rack |
| CN206798622U (en) * | 2017-04-05 | 2017-12-26 | 鸿富准精密工业(深圳)有限公司 | It is fed support frame |
-
2017
- 2017-12-28 CN CN201711458786.1A patent/CN108163529B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1905905A (en) * | 1930-04-26 | 1933-04-25 | Pittsburgh Plate Glass Co | Clamp for plate glass racks |
| CN105668236A (en) * | 2016-03-28 | 2016-06-15 | 吴江南玻华东工程玻璃有限公司 | Glass carrying device |
| CN206050955U (en) * | 2016-08-26 | 2017-03-29 | 沭阳鑫达新材料有限公司 | A kind of glass placing rack |
| CN206218834U (en) * | 2016-11-30 | 2017-06-06 | 东旭科技集团有限公司 | Glass substrate marginal ray detection clamping device |
| CN206494525U (en) * | 2017-02-15 | 2017-09-15 | 北京四汇建筑工程有限责任公司 | Glass placing rack |
| CN206798622U (en) * | 2017-04-05 | 2017-12-26 | 鸿富准精密工业(深圳)有限公司 | It is fed support frame |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109143776A (en) * | 2018-08-03 | 2019-01-04 | 武汉华星光电半导体显示技术有限公司 | A kind of exposure light shield packing device and its locking mechanism |
| CN109051686A (en) * | 2018-09-29 | 2018-12-21 | 苏州精濑光电有限公司 | A kind of workpiece method of operation |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108163529B (en) | 2019-12-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2000024856A (en) | Jig replacing device and jig replacing method | |
| CN205466058U (en) | Flexible frock | |
| CN108163529A (en) | Mask plate transport device | |
| KR101830921B1 (en) | PCB board conveying device and its method | |
| CN107352488A (en) | Panel display apparatus tipping arrangement | |
| CN105708184B (en) | One kind is used for carriage gas dome accommodating tool | |
| CN213197056U (en) | Positioning and placing device and automatic transfer equipment | |
| CN211240366U (en) | FPCB flexible circuit board automatic alignment equipment | |
| CN220501932U (en) | Fitting transfer device | |
| CN218908967U (en) | Be used for spare and accessory parts to snatch handling mechanism | |
| CN217343306U (en) | Double-plate detection error-proofing device | |
| CN207983184U (en) | Lever tool mechanism | |
| JP2004123276A (en) | Plate material placement device | |
| CN212245283U (en) | Feeding mechanical arm mechanism | |
| CN110589253A (en) | Complete equipment shell assembling and transporting method and device | |
| CN220640330U (en) | Automatic film coating device | |
| CN218087321U (en) | Automobile body part circulation system | |
| CN220448751U (en) | Rotor shell feeding machine | |
| CN218052261U (en) | Clamping device | |
| CN210802366U (en) | Motor stator detection device | |
| CN218927825U (en) | Bilateral general clamping manipulator | |
| CN214140499U (en) | Metal part production, processing, taking and placing mechanism | |
| CN215511044U (en) | Manipulator capable of being carried in dislocation mode | |
| CN219237714U (en) | Tool for transferring battery parts | |
| CN217618983U (en) | Full-automatic assembly machine for linear vibration motor FCP |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |