CN108160127A - A kind of microfluidic separation chip and production method - Google Patents
A kind of microfluidic separation chip and production method Download PDFInfo
- Publication number
- CN108160127A CN108160127A CN201810092602.2A CN201810092602A CN108160127A CN 108160127 A CN108160127 A CN 108160127A CN 201810092602 A CN201810092602 A CN 201810092602A CN 108160127 A CN108160127 A CN 108160127A
- Authority
- CN
- China
- Prior art keywords
- pdms
- substrate
- separation
- liquid storage
- storage tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000926 separation method Methods 0.000 title claims abstract description 128
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 189
- 239000004205 dimethyl polysiloxane Substances 0.000 claims abstract description 167
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims abstract description 167
- 239000007788 liquid Substances 0.000 claims abstract description 153
- 238000003860 storage Methods 0.000 claims abstract description 83
- 239000011521 glass Substances 0.000 claims abstract description 43
- 239000008188 pellet Substances 0.000 claims abstract description 38
- 238000005370 electroosmosis Methods 0.000 claims abstract description 31
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 21
- 229910052710 silicon Inorganic materials 0.000 claims description 21
- 239000010703 silicon Substances 0.000 claims description 21
- 238000009413 insulation Methods 0.000 claims description 13
- 238000005516 engineering process Methods 0.000 claims description 12
- -1 polydimethylsiloxane Polymers 0.000 claims description 12
- 238000004026 adhesive bonding Methods 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 8
- 238000005530 etching Methods 0.000 claims description 7
- 239000007787 solid Substances 0.000 claims description 7
- 230000008569 process Effects 0.000 claims description 6
- 229920005573 silicon-containing polymer Polymers 0.000 claims description 6
- 239000000853 adhesive Substances 0.000 claims description 5
- 230000001070 adhesive effect Effects 0.000 claims description 5
- 238000001259 photo etching Methods 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 235000007164 Oryza sativa Nutrition 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 239000008367 deionised water Substances 0.000 claims description 4
- 229910021641 deionized water Inorganic materials 0.000 claims description 4
- 238000001020 plasma etching Methods 0.000 claims description 4
- 235000009566 rice Nutrition 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 3
- 238000002347 injection Methods 0.000 claims description 3
- 239000007924 injection Substances 0.000 claims description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 3
- 229910052753 mercury Inorganic materials 0.000 claims description 3
- 240000007594 Oryza sativa Species 0.000 claims 1
- 239000011324 bead Substances 0.000 claims 1
- VIKNJXKGJWUCNN-XGXHKTLJSA-N norethisterone Chemical compound O=C1CC[C@@H]2[C@H]3CC[C@](C)([C@](CC4)(O)C#C)[C@@H]4[C@@H]3CCC2=C1 VIKNJXKGJWUCNN-XGXHKTLJSA-N 0.000 claims 1
- 230000015556 catabolic process Effects 0.000 abstract description 23
- 238000002474 experimental method Methods 0.000 abstract description 6
- 235000013870 dimethyl polysiloxane Nutrition 0.000 abstract 6
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 abstract 6
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 abstract 6
- 230000006378 damage Effects 0.000 description 8
- 238000001514 detection method Methods 0.000 description 6
- 230000005684 electric field Effects 0.000 description 5
- 238000010891 electric arc Methods 0.000 description 4
- 241000209094 Oryza Species 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000009616 inductively coupled plasma Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000010454 slate Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- JZZIHCLFHIXETF-UHFFFAOYSA-N dimethylsilicon Chemical compound C[Si]C JZZIHCLFHIXETF-UHFFFAOYSA-N 0.000 description 1
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 239000003532 endogenous pyrogen Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000005660 hydrophilic surface Effects 0.000 description 1
- 238000002032 lab-on-a-chip Methods 0.000 description 1
- 108010052620 leukocyte endogenous mediator Proteins 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 238000002174 soft lithography Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/10—Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/12—Specific details about manufacturing devices
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Dispersion Chemistry (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Hematology (AREA)
- Clinical Laboratory Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Micromachines (AREA)
Abstract
The invention discloses a kind of microfluidic separation chip and production methods, including PDMS substrates and PDMS cover plates, PDMS substrates are set there are one tap drain road, tap drain road is equipped with separation fulcrum and separate channels, PDMS substrates are equipped with 1 and detach the corresponding 8 electroosmotic flow coordination electrodes of liquid storage tank into liquid pool, 8 separation liquid storage tanks and with 8, and 8 electroosmotic flow coordination electrodes are detached with 8 to be equipped with the PDMS that 1 layer thickness is 5 microns between liquid storage tank and insulate Dam.PDMS cover plates bottom corresponding position is equipped with detaches liquid storage tank and into the identical liquid storage tank of liquid pool size and into liquid pool with 8 on substrate, and position corresponding with detaching fulcrum on substrate is placed with a diameter of 5 microns of glass pellet respectively on cover plate.The voltage carried out needed for dielectric breakdown in the present invention is low, can realize the separation that automatically controls of sample, the safety of experiment and operability are high, and experimental cost is low.
Description
Technical field
The present invention relates to a kind of microfluidic separation chip and production methods.
Background technology
Micro-fluidic chip is called " chip lab " (Lab-on-a-chip), is in a piece of area using micro-electromechanical technology
On narrow chip, the structural details such as Micropump, micro-valve, microelectrode, microstrainer, microreactor are made, realize each experiment of macroscopic view
The micromation of chamber unit function integrates, the final function of realizing chip lab.Microfluidic chip technology and traditional bioid
Sample detection technology of preparing is learned to compare, the loss of the sample of the technology less, detection response it is fast, easy to operate, can both shorten detection
Time, and the sensitivity, accuracy and efficiency of detection can be improved, it is gradually promoted in field of biochemistry detection
Using with very important application value.
At present, the micro-fluidic chip designed by Most scholars, the control of sample detection product is unidirectional, manually
Intervene height, the degree of automation is low, and there are certain difficulty for the separation and extraction between different products, this also constrains this skill
The application and popularization of art.
According to scientist's, research shows that, the dielectric breakdown that some materials are occurred under given conditions will not cause permanently
Destruction, have restorability.
Breakdown is divided into thermal breakdown and electrical breakdown, and wherein electrical breakdown is under room temperature or low temperature, since electronics unstability causes
, belong to intrinsic breakdown.
Solid dielectric punctures under high electric field causes the factor of dielectric breakdown to be：Temperature and field strength reach thermal breakdown or
The electric discharge of person's electric arc causes to damage.It is carried out in the raceway groove of filling conducting liquid, can discharge under sealed environment to avoid electric arc generates
Electrical breakdown.In order to avoid the damage of thermal breakdown, once reaching the field strength of intrinsic breakdown, it is not just further added by voltage；It is logical as possible
Cross the increase that various means reduce heat, the damage that thermal breakdown is avoided to bring.
The formation of electric arc electrical discharge arc be between electrode air neutrality proton (molecule and atom) by free process.
In Klein experiments, electrode both ends add voltage, and the electric current of 10 ampere levels is generated in microsecond, and current density can reach 1010A/
cm2.It is carried out in the raceway groove of filling conducting liquid due to testing, the breakdown generated that can discharge under sealed environment to avoid electric arc is broken
It is bad.
Thermal shock is installed with determining critical breakdown strength, and the order of magnitude is 108V/m or higher, a large amount of heat can be led
Cause the damage (fusing) of material.In order to avoid the damage of thermal breakdown, once reaching the field strength of intrinsic breakdown, it is not just further added by electricity
Pressure；The increase of heat, the damage that thermal breakdown is avoided to bring are reduced by various means as possible.
Enter the heat Q of system in unit interval by heat-conducting system by surface A1, unit volume (AL) in the unit interval
The heat Q that middle endogenous pyrogen (electrical heating) generates2, in the unit interval in unit volume heat increase Q3。
Heat conduction Establishing energy-balance equation：Q1+Q2=Q3.Under (assuming that being under steady-state model) stable state, Q3Be 0, i.e., it is interior
The heat that heat source generates all conducts, and does not cause change of internal energy.
The equation of thermal conductivity is：
A(m2) --- heat conducting cross-sectional section, L (m) --- two heat source thickness, Δ T (K) --- temperature difference,It is single
The heat directly conducted in the time of position, thermal conductivity k (W/mK) --- the ability of material conducts heat.
It is drawn a conclusion by emulation data, the conduit wall of micro-fluidic chip (controls) thickness design micro- 5 for dielectric breakdown
Punch through damage can be effectively prevent within rice, corresponding channel diameter is designed as 10 micron levels.
The disruptive field intensity of PDMS is 140kV/cm, and required disruptive field intensity is less than glass.PDMS
(polydimethylsiloxane), dimethyl silicone polymer is in bio-microelectromechanical system, soft etching (soft
Lithography) technology is largely used to micro sprue system.Channel is designed on silicon crystal slate, is subsequently poured into the dimethyl-silicon of liquid
Oxygen alkane is in these silicon crystal slates and heating makes dimethyl siloxane be hardened.When dimethyl siloxane removal, even micron-sized micro-
Runner design details can be also imprinted on PDMS (dimethyl silicone polymer) plate.There is this special silicane rubber plate, using anti-
Ion etching machine (RIE) is answered to carry out hydrophilic surface modification.Once surface bond is destroyed, typically one piece of glass slide is placed on sharp
A sidechain siloxane (trace of side) living.Once bond is returned to normal condition, the glass then permanent and hardened conjunctions of PDMS, from original
Channel is designed on this silicon crystal slate and becomes a Waterproof passages.There is this technology, qurer makes fluid channel, micro-mixer, micro-
Elements, the minimum geometric dimensions such as pump, micro-valve door can also reach nano-scale.
Therefore, the separating effect and efficiency for raising " chip lab " product, from the angle of practical application, sheet
Invention designs a kind of digital microfluidic separating chips based on dielectric breakdown technology, and provides its production method.
Invention content
The technical problems to be solved by the invention are to provide a kind of microfluidic separation chip and production method, carry out dielectric
Voltage needed for breakdown is low, and can realize sample automatically controls separation, improves safety and the operability of experiment, reduces real
Test cost.
The technical solution of invention is as follows：
A kind of microfluidic separation chip, including PDMS (polydimethylsiloxane, dimethyl silicone polymer) substrate
With PDMS cover plates, PDMS substrates and PDMS cover plates are all cuboid, and bottom is the square that the length of side is 6 centimetres, a height of 3 millimeters,
PDMS substrates and the bonding of PDMS cover plates.
It is set at PDMS substrate centers there are one the substrate of cylinder barrel shaped into liquid pool, substrate is 10 microns high into liquid pool, bottom surface circle
A diameter of 3 millimeters.
On PDMS substrates, in substrate, there are one cuboid tap drain roads into setting in front of liquid pool, connects, lead into liquid pool with substrate
Raceway groove is parallel with the bottom surface of PDMS substrates, and main channel length is 1.75 centimetres, and width is 10 microns, is highly 10 microns.
Tap drain road is equipped with 4 separation fulcrums for being separated by 0.25 centimetre successively, rearmost separation fulcrum and substrate into liquid pool
At a distance of 1 centimetre, each fulcrum the right and left that detaches is equipped with mutually symmetrical with a pair of separated raceway groove, forefront separation fulcrum both sides
Separate channels and main channel vertical, forward with tap drain road in 60 degree of angles, the width of separate channels is other separate channels
10 microns, be highly 10 microns.
On PDMS substrates, on tap drain road forefront separation fulcrum the right and left it is lateral symmetry be respectively provided with 4 it is equal in magnitude
Cylinder barrel shaped substrate separation liquid storage tank, substrate separation liquid storage tank connect successively with separate channels, a pair nearest from tap drain road
It is separated by 0.4 centimetre between substrate separation liquid storage tank, detaches the separate channels connection on fulcrum both sides, substrate separation with forefront respectively
Liquid storage tank bottom surface circular diameter is 2 millimeters, a height of 10 microns.
The 8 electroosmotic flow coordination electrodes opposite with 8 substrate separation liquid storage tanks, 8 electroosmotic flow are equipped in front of PDMS substrates
The PDMS insulation Dam that 1 layer thickness is 5 microns is equipped between coordination electrode and 8 substrate separation liquid storage tanks.
PDMS cover plates are equipped with 1 cylinder barrel shaped cover plate into liquid pool, cover plate feed liquor bottom of pond with substrate into liquid pool corresponding position
Face circular diameter is 3 millimeters, a height of 1 millimeter.
PDMS cover plates detach liquid storage tank with 8 substrate separation liquid storage tank corresponding positions equipped with 8 cylinder barrel shaped cover plates, lid
Piece separation liquid storage tank bottom surface circular diameter is 2 millimeters, a height of 1 millimeter.
4 groups of glass pellets laterally closely are adhesive on PDMS cover plates, every group of glass pellet is by 3 a diameter of 5 microns
Glass pellet forms, and the glass pellet of the middle of every group of glass pellet is corresponding with the separation position of the fulcrum on PDMS substrates.
PDMS substrates and the bonding of PDMS cover plates include following step：The substrate of PDMS substrates into liquid pool, separation fulcrum, substrate
The cover plate of separation liquid storage tank and PDMS cover plates closes up into liquid pool, glass pellet, cover plate separation liquid storage tank corresponding surface.
A kind of production method of microfluidic separation chip, includes the following steps：
A) using silicon chip photoetching process, all figures of chip substrate are obtained on silicon chip, utilize ICP plasma etching skills
Art (Inductively Couple Plasma Etch, sense coupling) performs etching silicon chip, obtains base
Piece into liquid pool, tap drain road, separate channels, substrate separation liquid storage tank, insulation Dam, electroosmotic flow coordination electrode planform.
B) mold is made using silicon chip, PDMS material is selected to be poured into a mould on silicon chip, carried out revolving die, obtain PDMS
(polydimethylsiloxane, dimethyl silicone polymer) substrate, the structure of PDMS substrates are as follows：
PDMS substrates are cuboid, and bottom is the square that the length of side is 6 centimetres, a height of 3 millimeters.
It is set at PDMS substrate centers there are one the substrate of cylinder barrel shaped into liquid pool, substrate is 10 microns high into liquid pool, bottom surface circle
A diameter of 3 millimeters.
On PDMS substrates, in substrate, there are one cuboid tap drain roads into setting in front of liquid pool, connects, lead into liquid pool with substrate
Raceway groove is parallel with the bottom surface of PDMS substrates, and main channel length is 1.75 centimetres, and width is 10 microns, is highly 10 microns.
Tap drain road is equipped with 4 separation fulcrums for being separated by 0.25 centimetre successively, rearmost separation fulcrum and substrate into liquid pool
At a distance of 1 centimetre, each fulcrum the right and left that detaches is equipped with mutually symmetrical with a pair of separated raceway groove, forefront separation fulcrum both sides
Separate channels and main channel vertical, forward with tap drain road in 60 degree of angles, the width of separate channels is other separate channels
10 microns, be highly 10 microns.
On PDMS substrates, on tap drain road forefront separation fulcrum the right and left it is lateral symmetry be respectively provided with 4 it is equal in magnitude
Cylinder barrel shaped substrate separation liquid storage tank, substrate separation liquid storage tank connect successively with separate channels, a pair nearest from tap drain road
It is separated by 0.4 centimetre between substrate separation liquid storage tank, detaches the separate channels connection on fulcrum both sides, substrate separation with forefront respectively
Liquid storage tank bottom surface circular diameter is 2 millimeters, a height of 10 microns.
The 8 electroosmotic flow coordination electrodes opposite with 8 substrate separation liquid storage tanks, 8 electroosmotic flow are equipped in front of PDMS substrates
The PDMS insulation Dam that 1 layer thickness is 5 microns is equipped between coordination electrode and 8 substrate separation liquid storage tanks.
8 electroosmotic flow coordination electrodes on PDMS substrates are respectively by the copper wire of 100 microns of the gluing diameter on corresponding position
It forms, copper wire length protrudes 1 centimetre of PDMS substrate edges, for chip and external electrical connections.
C) square, a height of 3 millimeters of a length of 6 centimetres of a size shape bottom sides identical with PDMS substrates are made
Cuboid carton corresponds to PDMS substrates a diameter of 3 millimeters into gluing on pool location, a height of 1 millimeter of solid cylinder at it
Model corresponds at it and a diameter of 2 millimeters, a height of 1 millimeter of gluing 8 is distinguished on position of 8 separation liquid storage tanks of PDMS substrates
Solid cylinder model, select PDMS material injection carton, cure, stripping obtains PDMS cover plates, PDMS cover plates and substrate feed liquor
Pond corresponding position is equipped with 1 cylinder barrel shaped cover plate into liquid pool, and cover plate feed liquor bottom of pond face circular diameter is 3 millimeters, a height of 1 millimeter,
PDMS cover plates detach liquid storage tank, cover plate separation storage with 8 substrate separation liquid storage tank corresponding positions equipped with 8 cylinder barrel shaped cover plates
Liquid pool bottom surface circular diameter is 2 millimeters, a height of 1 millimeter.
4 groups of glass pellets laterally closely are adhesive on PDMS cover plates, every group of glass pellet is by 3 a diameter of 5 microns
Glass pellet forms, and the glass pellet of the middle of every group of glass pellet is corresponding with the separation position of the fulcrum on PDMS substrates.
D) PDMS substrates are bonded with PDMS cover plates：PDMS substrates and PDMS cover plates are placed on lower 3 lis of 6 watts of low pressure mercury lamps
At rice, irradiation will drip upper deionized water after 3 hours on PDMS substrates and PDMS cover plates, by the substrate of PDMS substrates in 1 minute
Cover plate into liquid pool, separation fulcrum, substrate separation liquid storage tank and PDMS cover plates detaches liquid storage tank into liquid pool, glass pellet, cover plate
Corresponding surface closes up, and is positioned over after closing up in drying box and is preserved 2 hours under 65 degree, is then taken out, and it is small to place 24 in air
When it is spare.
Advantageous effect：
The electroosmotic flow coordination electrode of the present invention with detach the insulation dam for thering is between liquid storage tank 1 layer thickness to be 5 microns carry out every
From, when sample detaches, all raceway grooves are full of conduction liquid, thus, being applied to can be direct by conduction liquid into the voltage on liquid pool
Separation liquid storage tank is transmitted to, an electric field will be formed between liquid storage tank namely can be with detaching in electroosmotic flow coordination electrode in this way
Electroosmotic flow coordination electrode and between liquid pool formed an electric field, the separation of sample will be by being applied into liquid pool and coordination electrode
Between the electroosmotic flow driving of this electric place forming realize.It is wide for 5 microns since the disruptive field intensity of PDMS is 140kV/cm
PDMS insulation dam for, carry out dielectric breakdown and in raceway groove formed electroosmotic flow needed for voltage only needing 70 volts or so, much
The kilovolt step voltage needed for electric osmose flow separation is carried out less than conventional method, improves safety and the operability of experiment, drop
Low experimental cost.In addition, being automatically controlled to realize to sample separation, diameter is respectively equipped at the separation fulcrum in tap drain road
For 5 millimeters of glass pellet, so as to combine optical lens amplifying technique and Image Acquisition sensing technology, to sample in raceway groove
Kind class is monitored in real time, the feature recognition of sample image is carried out using digital image processing techniques, to the image identified
Database data with having been saved in computer is compared, and determines the type of sample, the need then detached according to sample
Will, control instruction is exported by computer and switches electronic control switch to electrode, realizes the switching control to different sample split tunnels
System, that realizes sample automatically controls separation.
Description of the drawings
Fig. 1 is the structure chart of microfluidic separation chip；
Fig. 2 is the photoetching of silicon chip, etch process flow figure；
Fig. 3 is PDMS chip manufacturing flow charts.
Specific embodiment
The present invention is described in further details below with reference to the drawings and specific embodiments：
Embodiment 1：A kind of microfluidic separation chip, as shown in Figure 1, (polydimethylsiloxane gathers including PDMS
Dimethyl siloxane) substrate and PDMS cover plates, PDMS substrates and PDMS cover plates are all cuboid, and bottom is that the length of side is 6 centimetres
Square, a height of 3 millimeters, PDMS substrates and PDMS cover plates are bonded.
It is set at PDMS substrate centers there are one the substrate of cylinder barrel shaped into liquid pool, substrate is 10 microns high into liquid pool, bottom surface circle
A diameter of 3 millimeters.
On PDMS substrates, in substrate, there are one cuboid tap drain roads into setting in front of liquid pool, connects, lead into liquid pool with substrate
Raceway groove is parallel with the bottom surface of PDMS substrates, and main channel length is 1.75 centimetres, and width is 10 microns, is highly 10 microns.
Tap drain road is equipped with 4 separation fulcrums for being separated by 0.25 centimetre successively, rearmost separation fulcrum and substrate into liquid pool
At a distance of 1 centimetre, each fulcrum the right and left that detaches is equipped with mutually symmetrical with a pair of separated raceway groove, forefront separation fulcrum both sides
Separate channels and main channel vertical, forward with tap drain road in 60 degree of angles, the width of separate channels is other separate channels
10 microns, be highly 10 microns.
On PDMS substrates, on tap drain road forefront separation fulcrum the right and left it is lateral symmetry be respectively provided with 4 it is equal in magnitude
Cylinder barrel shaped substrate separation liquid storage tank, substrate separation liquid storage tank connect successively with separate channels, a pair nearest from tap drain road
It is separated by 0.4 centimetre between substrate separation liquid storage tank, detaches the separate channels connection on fulcrum both sides, substrate separation with forefront respectively
Liquid storage tank bottom surface circular diameter is 2 millimeters, a height of 10 microns.
The 8 electroosmotic flow coordination electrodes opposite with 8 substrate separation liquid storage tanks, 8 electroosmotic flow are equipped in front of PDMS substrates
The PDMS insulation Dam that 1 layer thickness is 5 microns is equipped between coordination electrode and 8 substrate separation liquid storage tanks.
PDMS cover plates are equipped with 1 cylinder barrel shaped cover plate into liquid pool, cover plate feed liquor bottom of pond with substrate into liquid pool corresponding position
Face circular diameter is 3 millimeters, a height of 1 millimeter.
PDMS cover plates detach liquid storage tank with 8 substrate separation liquid storage tank corresponding positions equipped with 8 cylinder barrel shaped cover plates, lid
Piece separation liquid storage tank bottom surface circular diameter is 2 millimeters, a height of 1 millimeter.
4 groups of glass pellets laterally closely are adhesive on PDMS cover plates, every group of glass pellet is by 3 a diameter of 5 microns
Glass pellet forms, and the glass pellet of the middle of every group of glass pellet is corresponding with the separation position of the fulcrum on PDMS substrates.
PDMS substrates and the bonding of PDMS cover plates include following step：The substrate of PDMS substrates into liquid pool, separation fulcrum, substrate
The cover plate of separation liquid storage tank and PDMS cover plates closes up into liquid pool, glass pellet, cover plate separation liquid storage tank corresponding surface.
A kind of production method of microfluidic separation chip, includes the following steps：
A) using silicon chip photoetching process, all figures of chip substrate are obtained on silicon chip, utilize ICP plasma etching skills
Art (Inductively Couple Plasma Etch, sense coupling) performs etching silicon chip, obtains base
Piece into liquid pool, tap drain road, separate channels, substrate separation liquid storage tank, insulation Dam, electroosmotic flow coordination electrode planform.
As shown in Fig. 2, the photoetching of silicon chip, etch process flow are as follows：
Cleaning：Successively it is cleaned by ultrasonic silicon chip each 5 minutes with acetone, alcohol and deionized water respectively, is put after being dried up with nitrogen
It is dried 2~5 minutes on the hot plate that temperature is 150 DEG C.
Spin coating：Spin coating in two steps, the first step 500r/min rotation 15s~20 second, second step with 4000r/min rotation 30~
35s。
Prior exposure：Uv-exposure 90s,
After dry：120s is toasted on 120 DEG C of hot plate,
Post-exposure：Uv-exposure 160s,
Development：Develop 40~45s in developer solution,
Sputtering：Radio-frequency power is 120W, and vacuum degree is 4 × 10-4Pa, ar pressure 5mTorr, the substrate type of cooling are
Water cooling.Sputter rate is about 16nm/min, sputtering time 12min.Cr film thickness is 100nm or so.
Then, photoresist lift off is carried out, then selects the model Oxford Instruments Plasma- of etching instrument
The etching machine of lab system 100 is performed etching using the Bosch techniques built in system.Built-in inductively coupled plasma
Body coupling parameter is as shown in the table：
B) mold is made using silicon chip, PDMS material is selected to be poured into a mould on silicon chip, carried out revolving die, obtain PDMS
(polydimethylsiloxane, dimethyl silicone polymer) substrate, the structure of PDMS substrates are as follows：
PDMS substrates are cuboid, and bottom is the square that the length of side is 6 centimetres, a height of 3 millimeters.
It is set at PDMS substrate centers there are one the substrate of cylinder barrel shaped into liquid pool, substrate is 10 microns high into liquid pool, bottom surface circle
A diameter of 3 millimeters.
On PDMS substrates, in substrate, there are one tap drain roads into setting in front of liquid pool, connects with substrate into liquid pool, tap drain road and
The bottom surface of PDMS substrates is parallel, and main channel length is 1.75 centimetres, and width is 10 microns, is highly 10 microns.
Tap drain road is equipped with 4 separation fulcrums for being separated by 0.25 centimetre successively, rearmost separation fulcrum and substrate into liquid pool
At a distance of 1 centimetre, each fulcrum the right and left that detaches is equipped with mutually symmetrical with a pair of separated raceway groove, forefront separation fulcrum both sides
Separate channels and main channel vertical, forward with tap drain road in 60 degree of angles, the width of separate channels is other separate channels
10 microns, be highly 10 microns.
On PDMS substrates, on tap drain road forefront separation fulcrum the right and left it is lateral symmetry be respectively provided with 4 it is equal in magnitude
Cylinder barrel shaped substrate separation liquid storage tank, substrate separation liquid storage tank connect successively with separate channels, a pair nearest from tap drain road
It is separated by 0.4 centimetre between substrate separation liquid storage tank, detaches the separate channels connection on fulcrum both sides, substrate separation with forefront respectively
Liquid storage tank bottom surface circular diameter is 2 millimeters, a height of 10 microns.
The 8 electroosmotic flow coordination electrodes opposite with 8 substrate separation liquid storage tanks, 8 electroosmotic flow are equipped in front of PDMS substrates
The PDMS insulation Dam that 1 layer thickness is 5 microns is equipped between coordination electrode and 8 substrate separation liquid storage tanks.
8 electroosmotic flow coordination electrodes on PDMS substrates are respectively by the copper wire of 100 microns of the gluing diameter on corresponding position
It forms, copper wire length protrudes 1 centimetre of PDMS substrate edges, for chip and external electrical connections.
C) square, a height of 3 millimeters of a length of 6 centimetres of a size shape bottom sides identical with PDMS substrates are made
Cuboid carton corresponds to PDMS substrates at it and places a diameter of 3 millimeters into gluing on pool location, a height of 1 millimeter solid
Cylinder model corresponds to gluing on the position of 8 separation liquid storage tanks of PDMS substrates at it and places 8 a diameter of 2 millimeters respectively, height
For 1 millimeter of solid cylinder model, select PDMS material injection carton, cure, stripping, obtain PDMS cover plates, PDMS cover plates with
Substrate is equipped with 1 cylinder barrel shaped cover plate into liquid pool into liquid pool corresponding position, and cover plate feed liquor bottom of pond face circular diameter is 3 millimeters, high
It it is 1 millimeter, PDMS cover plates detach liquid storage tank with 8 substrate separation liquid storage tank corresponding positions equipped with 8 cylinder barrel shaped cover plates, lid
Piece separation liquid storage tank bottom surface circular diameter is 2 millimeters, a height of 1 millimeter.
4 groups of glass pellets laterally closely are adhesive on PDMS cover plates, every group of glass pellet is by 3 a diameter of 5 microns
Glass pellet forms, and the glass pellet of the middle of every group of glass pellet is corresponding with the separation position of the fulcrum on PDMS substrates.
D) PDMS substrates are bonded with PDMS cover plates：PDMS substrates and PDMS cover plates are placed on lower 3 lis of 6 watts of low pressure mercury lamps
At rice, irradiation will drip upper deionized water after 3 hours on PDMS substrates and PDMS cover plates, by the substrate of PDMS substrates in 1 minute
Cover plate into liquid pool, separation fulcrum, substrate separation liquid storage tank and PDMS cover plates detaches liquid storage tank into liquid pool, glass pellet, cover plate
Corresponding surface closes up, and is positioned over after closing up in drying box and is preserved 2 hours under 65 degree, is then taken out, and it is small to place 24 in air
When it is spare.
PDMS chip manufacturing flows are as shown in Figure 3.
The copper wire of 8 100 microns of electroosmotic flow coordination electrode position gluing diameters in the present invention, copper wire length protrude PDMS bases
1 centimetre of piece edge is connected on the output pin of external multi-channel analog control switch chip CD4051.
A diameter of 5 millimeters of glass pellet is respectively equipped at the separation fulcrum in tap drain road, so as to combine optical lens
Mirror amplifying technique and Image Acquisition sensing technology, monitor sample type in raceway groove in real time, utilize Digital Image Processing
Technology carries out the feature recognition of sample image, and the image identified and the database data having been saved in computer are carried out
Comparison determines the type of sample, the needs then detached according to sample, and control instruction is exported to external multi-channel analog by computer
Switch chip CD4051 is controlled, utilizes tri- input channel selection ends of ABC of external multi-channel analog control switch chip CD4051
Realize the switching control to different sample split tunnels, that realizes sample automatically controls separation.
The electroosmotic flow coordination electrode of the present invention with detach the insulation dam for thering is between liquid storage tank 1 layer thickness to be 5 microns carry out every
From, when sample detaches, all raceway grooves are full of conduction liquid, thus, being applied to can be direct by conduction liquid into the voltage on liquid pool
Separation liquid storage tank is transmitted to, an electric field will be formed between liquid storage tank namely can be with detaching in electroosmotic flow coordination electrode in this way
Electroosmotic flow coordination electrode and between liquid pool formed an electric field, the separation of sample will be by being applied into liquid pool and coordination electrode
Between the electroosmotic flow driving of this electric place forming realize.It is wide for 5 microns since the disruptive field intensity of PDMS is 140kV/cm
PDMS insulation dam for, carry out dielectric breakdown and in raceway groove formed electroosmotic flow needed for voltage only needing 70 volts or so, much
The kilovolt step voltage needed for electric osmose flow separation is carried out less than conventional method, improves safety and the operability of experiment, drop
Low experimental cost.
Claims (4)
1. a kind of microfluidic separation chip, which is characterized in that including PDMS (polydimethylsiloxane, poly dimethyl silicon
Oxygen alkane) substrate and PDMS cover plates, the PDMS substrates and PDMS cover plates are all cuboid, and bottom is the pros that the length of side is 6 centimetres
Shape, a height of 3 millimeters, the PDMS substrates and PDMS cover plates are bonded,
It is set at the PDMS substrate centers there are one the substrate of cylinder barrel shaped into liquid pool, the substrate is 10 microns high into liquid pool, bottom
Face circular diameter is 3 millimeters,
On the PDMS substrates, in substrate into setting in front of liquid pool there are one cuboid tap drain road, connect with the substrate into liquid pool
It connecing, the tap drain road is parallel with the bottom surface of the PDMS substrates, and the main channel length is 1.75 centimetres, and width is 10 microns,
It is highly 10 microns,
The tap drain road is equipped with 4 separation fulcrums for being separated by 0.25 centimetre successively, rearmost separation fulcrum and substrate into liquid pool
At a distance of 1 centimetre, each fulcrum the right and left that detaches is equipped with mutually symmetrical with a pair of separated raceway groove, forefront separation fulcrum both sides
Separate channels and main channel vertical, other separate channels are forward with tap drain road in 60 degree of angles, the width of the separate channels
It is 10 microns, is highly 10 microns,
The right and left of forefront separation fulcrum is lateral symmetry on the PDMS substrates, on the tap drain road is respectively provided with 4 sizes
Equal cylinder barrel shaped substrate separation liquid storage tank, the substrate separation liquid storage tank is connect successively with the separate channels, from tap drain
It is separated by 0.4 centimetre between the nearest a pair of substrate separation liquid storage tank in road, detaches the separate channels on fulcrum both sides with forefront respectively
Connection, the substrate separation liquid storage tank bottom surface circular diameter be 2 millimeters, a height of 10 microns,
The 8 electroosmotic flow coordination electrodes opposite with 8 substrate separation liquid storage tanks, 8 electroosmotic flow are equipped in front of the PDMS substrates
The PDMS insulation Dam that 1 layer thickness is 5 microns are equipped between coordination electrode and 8 substrate separation liquid storage tanks,
The PDMS cover plates are equipped with 1 cylinder barrel shaped cover plate into liquid pool, the cover plate with the substrate into liquid pool corresponding position
Feed liquor bottom of pond face circular diameter be 3 millimeters, a height of 1 millimeter,
The PDMS cover plates detach liquid storage tank with 8 substrate separation liquid storage tank corresponding positions equipped with 8 cylinder barrel shaped cover plates, institute
It is 2 millimeters, a height of 1 millimeter to state cover plate separation liquid storage tank bottom surface circular diameter.
2. microfluidic separation chip according to claim 1, which is characterized in that 4 groups of horizontal strokes are adhesive on the PDMS cover plates
To glass pellet closely, every group of glass pellet is made of 3 a diameter of 5 microns of glass pellets, and every group of glass pellet is just
Intermediate glass pellet is corresponding with the separation position of the fulcrum on the PDMS substrates.
3. micro-fluidic chip according to claim 2, which is characterized in that the PDMS substrates and the bonding of PDMS cover plates include
Following step：The substrate of the PDMS substrates into liquid pool, separation fulcrum, substrate separation liquid storage tank and PDMS cover plates cover plate feed liquor
Pond, glass pellet, cover plate separation liquid storage tank corresponding surface close up.
4. a kind of production method of microfluidic separation chip, which is characterized in that include the following steps：
A) using silicon chip photoetching process, all figures of chip substrate is obtained on silicon chip, utilize ICP plasma etching technologies
(Inductively Couple Plasma Etch, sense coupling) performs etching silicon chip, obtains substrate
Into liquid pool, tap drain road, separate channels, substrate separation liquid storage tank, insulation Dam, electroosmotic flow coordination electrode planform；
B) mold is made using silicon chip, PDMS material is selected to be poured into a mould on silicon chip, carried out revolving die, obtain PDMS
(polydimethylsiloxane, dimethyl silicone polymer) substrate, the structure of the PDMS substrates are as follows：
The PDMS substrates are cuboid, and bottom is the square that the length of side is 6 centimetres, a height of 3 millimeters,
It is set at the PDMS substrate centers there are one the substrate of cylinder barrel shaped into liquid pool, the substrate is 10 microns high into liquid pool, bottom
Face circular diameter is 3 millimeters,
On the PDMS substrates, in substrate into setting in front of liquid pool there are one cuboid tap drain road, connect with the substrate into liquid pool
It connecing, the tap drain road is parallel with the bottom surface of the PDMS substrates, and the main channel length is 1.75 centimetres, and width is 10 microns,
It is highly 10 microns,
The tap drain road is equipped with 4 separation fulcrums for being separated by 0.25 centimetre successively, rearmost separation fulcrum and substrate into liquid pool
At a distance of 1 centimetre, each fulcrum the right and left that detaches is equipped with mutually symmetrical with a pair of separated raceway groove, forefront separation fulcrum both sides
Separate channels and main channel vertical, other separate channels are forward with tap drain road in 60 degree of angles, the width of the separate channels
It is 10 microns, is highly 10 microns,
The right and left of forefront separation fulcrum is lateral symmetry on the PDMS substrates, on the tap drain road is respectively provided with 4 sizes
Equal cylinder barrel shaped substrate separation liquid storage tank, the substrate separation liquid storage tank is connect successively with the separate channels, from tap drain
It is separated by 0.4 centimetre between the nearest a pair of substrate separation liquid storage tank in road, detaches the separate channels on fulcrum both sides with forefront respectively
Connection, the substrate separation liquid storage tank bottom surface circular diameter be 2 millimeters, a height of 10 microns,
The 8 electroosmotic flow coordination electrodes opposite with 8 substrate separation liquid storage tanks, 8 electroosmotic flow are equipped in front of the PDMS substrates
The PDMS insulation Dam that 1 layer thickness is 5 microns are equipped between coordination electrode and 8 substrate separation liquid storage tanks,
8 electroosmotic flow coordination electrodes on the PDMS substrates are respectively by the copper wire of 100 microns of the gluing diameter on corresponding position
It forms, copper wire length protrudes 1 centimetre of PDMS substrate edges, for chip and external electrical connections；
C) the rectangular of square, a height of 3 millimeters of a length of 6 centimetres of a size shape bottom sides identical with PDMS substrates is made
Body carton corresponds to PDMS substrates a diameter of 3 millimeters into gluing on pool location at it, a height of 1 millimeter of solid cylinder model,
Correspond on position of 8 separation liquid storage tanks of PDMS substrates a diameter of 2 millimeters of gluing 8 respectively, a height of 1 millimeter solid at it
Cylinder model is selected PDMS material injection carton, is cured, and stripping obtains PDMS cover plates, the PDMS cover plates and the substrate into
Liquid pool corresponding position sets 1 cylinder barrel shaped cover plate into liquid pool, and cover plate feed liquor bottom of pond face circular diameter is 3 millimeters, a height of 1 milli
Rice, the PDMS cover plates detach liquid storage tank with 8 substrate separation liquid storage tank corresponding positions equipped with 8 cylinder barrel shaped cover plates, institute
It is 2 millimeters to state cover plate separation liquid storage tank bottom surface circular diameter, a height of 1 millimeter,
The glass pellet of 4 groups of gluing laterally closely on the PDMS cover plates, every group of glass pellet is by 3 a diameter of 5 microns of glass
Glass bead forms, and the glass pellet of the middle of every group of glass pellet is corresponding with the separation position of the fulcrum on the PDMS substrates；
D) PDMS substrates are bonded with PDMS cover plates：PDMS substrates and PDMS cover plates are placed on lower 3 centimetres of 6 watts of low pressure mercury lamps
Place, irradiation will drip upper deionized water after 3 hours on PDMS substrates and PDMS cover plates, by the base of the PDMS substrates in 1 minute
The cover plate of piece into liquid pool, separation fulcrum, substrate separation liquid storage tank and PDMS cover plates detaches liquid storage into liquid pool, glass pellet, cover plate
Pond corresponding surface closes up, and is positioned over after closing up in drying box and is preserved 2 hours under 65 degree, then takes out, place 24 in air
Hour is spare.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810092602.2A CN108160127B (en) | 2018-01-31 | 2018-01-31 | Microfluidic separation chip and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810092602.2A CN108160127B (en) | 2018-01-31 | 2018-01-31 | Microfluidic separation chip and manufacturing method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108160127A true CN108160127A (en) | 2018-06-15 |
| CN108160127B CN108160127B (en) | 2020-03-27 |
Family
ID=62512815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810092602.2A Expired - Fee Related CN108160127B (en) | 2018-01-31 | 2018-01-31 | Microfluidic separation chip and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108160127B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110963457A (en) * | 2018-09-29 | 2020-04-07 | 中国科学院微电子研究所 | High-precision micro-channel network manufacturing method |
| CN111450907A (en) * | 2020-04-26 | 2020-07-28 | 京东方科技集团股份有限公司 | Microfluidic device, sample mixing method and microfluidic system |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20160151784A1 (en) * | 2011-06-03 | 2016-06-02 | The Regents Of The University Of California | Microfluidic devices with flexible optically transparent electrodes |
| CN106531710A (en) * | 2017-01-11 | 2017-03-22 | 中芯长电半导体（江阴）有限公司 | Packager piece of integrated power supply system and package method |
| CN107164212A (en) * | 2017-02-27 | 2017-09-15 | 大连海事大学 | A kind of unicellular automatic manipulation sorting unit and method based on micro-fluidic chip |
-
2018
- 2018-01-31 CN CN201810092602.2A patent/CN108160127B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20160151784A1 (en) * | 2011-06-03 | 2016-06-02 | The Regents Of The University Of California | Microfluidic devices with flexible optically transparent electrodes |
| CN106531710A (en) * | 2017-01-11 | 2017-03-22 | 中芯长电半导体（江阴）有限公司 | Packager piece of integrated power supply system and package method |
| CN107164212A (en) * | 2017-02-27 | 2017-09-15 | 大连海事大学 | A kind of unicellular automatic manipulation sorting unit and method based on micro-fluidic chip |
Non-Patent Citations (1)
| Title |
|---|
| FENG JIANG ET AL.: "Research of Dielectric Breakdown Microfluidic Sampling Chip", 《JOURNAL OF NANOMATERIALS》 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110963457A (en) * | 2018-09-29 | 2020-04-07 | 中国科学院微电子研究所 | High-precision micro-channel network manufacturing method |
| CN111450907A (en) * | 2020-04-26 | 2020-07-28 | 京东方科技集团股份有限公司 | Microfluidic device, sample mixing method and microfluidic system |
| CN111450907B (en) * | 2020-04-26 | 2022-06-24 | 京东方科技集团股份有限公司 | Microfluidic device, sample mixing method and microfluidic system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108160127B (en) | 2020-03-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103816805B (en) | Electroosmosis micropump device | |
| CN104588137A (en) | Micro-fluidic chip and preparation method thereof | |
| SE470347B (en) | Microstructure for fluid flow systems and process for manufacturing such a system | |
| CN104743506B (en) | It is prepared by the replica Mold Making of micro-fluidic chip and its fluidic chip detecting system | |
| CN108160127A (en) | A kind of microfluidic separation chip and production method | |
| CN109012771B (en) | Full-transparent microfluidic acoustic bulk wave chip and preparation method thereof | |
| CN203090949U (en) | Multi-stage driving electroosmosis micropump device | |
| CN204746344U (en) | Electroosmosis micropump device | |
| CN110496657B (en) | Microfluidic chip capable of forming liquid metal droplets and preparation method thereof | |
| CN112094742B (en) | Micro-fluidic chip for synchronously realizing cell electroporation transfection and living cell sorting | |
| CN1683931A (en) | Method for preparing organic glass microflow control chip by poly dimethyl siloxane male die in-site polymerisation | |
| CN110354925B (en) | Microfluidic chip containing deformable liquid metal electrode and preparation method thereof | |
| CN209222159U (en) | A kind of compound micro-fluidic chip of array PDMS- paper base for single cell analysis | |
| CN1645137A (en) | Assistant hot-pressed packing method for polymethylmethacrylate microflow controlled chip solvent | |
| EP2149610A1 (en) | Method and device for detecting genetic material by means of polymerase chain reaction | |
| WO2012153192A2 (en) | Microfluidic device with holding interface, and method of use | |
| CN102183388B (en) | Preparation method of free flow electrophoresis chip with two-dimensional depth | |
| US9157551B2 (en) | Reconfigurable microactuator and method of configuring same | |
| CN116920975B (en) | Anode-bonded optical tweezers chip | |
| CN209451370U (en) | A kind of AC Electric Heater micro mixing device of inclined field heating | |
| WO2024114438A1 (en) | Cell electrofusion chip device based on bilateral flow field pairing structure array and preparation method therefor | |
| EP4144438A1 (en) | Detection chip and usage method therefor, and reaction system | |
| JP4312675B2 (en) | Method and apparatus for producing molded body | |
| Liu et al. | A rigid poly (dimethylsiloxane) sandwich electrophoresis microchip based on thin‐casting method | |
| Mottet et al. | A technique to design complex 3D lab on a chip involving multilayered fluidics, embedded thick electrodes and hard packaging—application to dielectrophoresis and electroporation of cells |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200327 |