CN108147655B - Apparatus for manufacturing optical fiber preform and method for manufacturing the same - Google Patents
Apparatus for manufacturing optical fiber preform and method for manufacturing the same Download PDFInfo
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- CN108147655B CN108147655B CN201611102309.7A CN201611102309A CN108147655B CN 108147655 B CN108147655 B CN 108147655B CN 201611102309 A CN201611102309 A CN 201611102309A CN 108147655 B CN108147655 B CN 108147655B
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
Abstract
The manufacturing equipment of the optical fiber preform comprises a deposition target rod, a first blast burner and a first central control device, wherein a burner of the deposition blast burner faces towards the deposition target rod, the first blast burner is connected with the first central control device, the manufacturing equipment further comprises a diameter measuring unit connected with the first central control device, the diameter measuring unit is used for measuring the core layer diameter of the core rod at intervals of preset time and feeding back the core layer diameter to the first central control device, the core layer diameter target is preset in the first central control device, the measured core layer diameter is set as the detected core layer diameter, and when the detected core layer diameter deviates from the core layer diameter target, the first central control device controls and adjusts SiCl of the first blast burner4The flow rate of (c). The invention also provides a manufacturing method of the optical fiber preform. SiCl control and adjustment according to detection of core layer diameter4The flow rate of the core rod ensures the consistency of the core layer diameter of the core rod, and the product yield of the optical fiber perform rod is improved.
Description
Technical Field
The invention relates to the technical field of optical fiber perform manufacturing, in particular to manufacturing equipment and a manufacturing method of an optical fiber perform.
Background
The optical fiber preform manufacturing includes core rod manufacturing and outer cladding manufacturing, that is, the core rod (including the core layer and the optical cladding) is manufactured first, and then the cladding is deposited outside the core rod to manufacture the optical fiber preform. The manufacturing method of the optical fiber preform core rod mainly comprises an axial vapor deposition method (VAD), a modified chemical vapor deposition Method (MCVD), a plasma chemical vapor deposition method (PCVD) and an outside vapor deposition method (OVD), and the manufacture of the outer cladding mainly comprises direct OVD synthesis and quartz sleeve assembly. However, regardless of the method used to manufacture the optical fiber preform, the yield is not high due to some factors during the manufacturing process, such as the fluctuation of the ambient temperature of the core rod caused by the fluctuation of the air flow during the exhausting process, the dopant distribution in the core layer is not uniform, and the uniformity of the axial profile is not good.
Disclosure of Invention
In view of the above, it is desirable to provide an apparatus for manufacturing an optical fiber preform and a method for manufacturing the same that avoid the above-mentioned problems.
An optical fiber preform manufacturing device comprises a deposition target rod, a first blast lamp and a first central control device, the deposition target rod is used for forming a core rod on the attached powder in the deposition process, the core rod comprises a core layer and an optical cladding layer coated on the outer side surface of the core layer, the burner of the deposition burner is arranged towards the deposition target rod, the first burner is connected with the first central control device, the manufacturing equipment also comprises a diameter measuring unit connected with the first central control device, the diameter measuring unit is used for measuring the core layer diameter of the core rod at intervals of preset time and feeding back the core layer diameter to the first central control device, the first central control device presets a core diameter target, the measured core diameter is set as a detection core diameter, and when the detected core diameter is deviated from the target core diameter, the first central control device controls and adjusts SiCl of the first blast lamp.4The preform has a rod position, the manufacturing equipment further comprises a second torch, the diameter measuring unit is further used for detecting the diameter of the optical cladding and feeding back the diameter to the first central control device, the first central control device presets an optical cladding target of the corresponding rod position according to the diameter of the detection core layer, the detected optical cladding diameter is set as the detected optical cladding diameter, and when the detected optical cladding diameter of a certain rod position is smaller than the corresponding optical cladding diameter target, SiCl of the second torch is controlled to be increased4Flow rate; when the diameter of the optical cladding for detection of a certain rod position is larger than the corresponding target of the optical cladding diameter, the SiCl of the second blast lamp is reduced4And (4) flow rate.
Further, the first central control device sets a core diameter target corresponding to each rod position, the core diameter target is a core diameter range, and when the detected core diameter of one rod position is smaller than the minimum threshold value of the corresponding preset core diameter range or larger than the maximum threshold value of the preset core diameter range, the first central control device controls and adjusts the first torch SiCl4The flow rate of (c).
Furthermore, the diameter range of the preset core layer is 58.3-58.7 mm.
Further, the optical cladding for a rod position targets 4.15 times the diameter of the detection core for the corresponding rod position.
Further, the diameter of the optical cladding ranges from 240 mm to 244 mm.
Furthermore, the diameter measuring unit comprises a first diameter measuring unit and a second diameter measuring unit, the first diameter measuring unit is used for measuring the diameter of the core layer of the core rod, and the second diameter measuring unit is used for measuring the diameter of the optical cladding layer of the core rod.
Further, the manufacturing equipment also comprises a temperature measuring unit connected with the first central control device, the temperature measuring unit is used for monitoring the deposition temperature of the core rod layer and feeding back the detected deposition temperature to the first central control device, and the first central control device controls and adjusts H in the first blast lamp according to the detected deposition temperature2And (4) flow rate.
The manufacturing method comprises the steps of monitoring the diameter of the core layer of the core rod, setting the measured diameter of the core layer as the diameter of a detection core layer, and adjusting SiCl of a first torch for providing a core layer growth raw material when the diameter of the detection core layer deviates from a preset core layer diameter target4The method further comprises detecting the optical cladding diameter of the core rod, setting the detected optical cladding diameter as the detected optical cladding diameter, setting a preset optical cladding target for a certain rod position according to the detected core diameter of the corresponding rod position, and controlling to increase SiCl of a second torch for supplying raw material for optical cladding growth when the detected optical cladding diameter of the certain rod position is smaller than the corresponding optical cladding diameter target4Flow rate; when the detected optical cladding diameter is larger than the optical cladding diameter target of the corresponding rod position, reducing SiCl of the second blast lamp4And (4) flow rate.
Compared with the prior art, the optical fiber preform manufacturing equipment and the manufacturing method thereof provided by the invention have the advantages that SiCl is controlled and adjusted according to the diameter of the detected core layer4Flow rate of (2), guarantee coreThe consistency of the diameter of the core layer of the rod improves the product yield of the optical fiber perform rod.
Drawings
FIG. 1 is a schematic view of an optical fiber preform manufacturing system according to a preferred embodiment of the present invention.
Fig. 2 is a schematic end view of a preform.
Fig. 3 is a schematic view of a first manufacturing apparatus.
FIG. 4 is a graph comparing the axial refractive index of the single rod of the present example with that of the prior art.
Fig. 5 is a schematic view of a mandrel.
Fig. 6 is a schematic view of a second manufacturing apparatus.
Description of the main elements
Optical fiber preform manufacturing system 300
Preform 400
Core rod 401
First central control device 20
Second central control device 205
The following detailed description will further illustrate the invention in conjunction with the above-described figures.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention. The embodiments described below and the features of the embodiments can be combined with each other without conflict.
It should be noted that, when an element is referred to as being "connected" to another element in the present invention, it can be directly connected to the other element or be indirectly connected to the other element through intervening elements.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.
Referring to fig. 1, the present invention provides an optical fiber preform manufacturing system 300 for manufacturing a preform 400. Referring to fig. 2, the preform 400 includes a core rod 401 and an outer cladding 403 covering the core rod 401.
The optical fiber preform manufacturing system 300 includes a first manufacturing apparatus 100 and a second manufacturing apparatus 200. The first manufacturing apparatus 100 is used for deposition manufacturing of a core rod 401, the core rod 401 including a starting rod made of a glass material for providing a growth base, a core layer 405 formed by depositing powder on an end portion of the starting rod, and an optical cladding layer 407 clad on the core layer 405. The refractive index of the core layer 405 is higher than the refractive index of the optical cladding 407. The second fabrication apparatus 200 is used to deposit a fabrication overclad 403. In the present embodiment, the first manufacturing apparatus 100 prepares the core rod 401 by an axial vapor deposition (VAD); the second manufacturing apparatus 200 forms an outer cladding 403 on the core rod 401 by deposition through an Outside Vapor Deposition (OVD) method.
Referring to fig. 3, the first manufacturing apparatus 100 includes a deposition chamber 11, a lifting device 12, a rotating device 13, a deposition target 14, a first torch 15, a second torch 16, a gas supply device 17, a temperature measuring unit 18, a diameter measuring unit 19, and a first central control device 20.
The lifting device 12 is provided above the deposition chamber 11, and the rotating device 13 is installed on the lifting device 12. The deposition target rod 14 is installed on the rotating device 13 and is accommodated in the deposition chamber 11. The rotating device 13 is provided with an axis 101. The elevating device 12 is used for driving the deposition target rod 14 to ascend or descend along the axis 101, and the rotating device 13 is used for driving the deposition target rod 14 to rotate around the axis 101. The deposition target 40 is used to attach powder to form the core rod 401 during deposition.
The first and second torches 15 and 16 are located at a lower side of the deposition chamber 11. A burner (not shown) of the first burner 15 and a burner (not shown) of the second burner 16 are located inside the deposition chamber 11 and are disposed toward the deposition target 14. The core layer 405 is formed by depositing powder on the end of the core rod 401 using the first torch 15 so that the core layer 405 grows downward from the end of the core rod 401. In other words, the first torch 15 is used to supply the core growth raw material. An optical cladding layer 407 is formed by depositing powder on the end of the core rod 401 using a second torch 16 such that the optical cladding layer 407 is deposited on the core layer 405 and grows downward from the end of the core rod 401. In other words, the second torch 16 is used to provide an optical cladding growth feedstock.
The gas supply device 17 is connected to the first and second torches 50 and 60, and supplies gas, such as SiCl, to the first and second torches 50 and 604、GeCl4Etc., and fuels, such as mixtures of hydrogen and oxygen. The gas supply device 17 includes a plurality of gas supply portions (not shown). In this embodiment, the plurality of gas supplies includes SiCl4Supply part, GeCl4Supply part, Ar supplyStrain part, O2Supply part, H2And a supply part, and a plurality of the gas supply parts are connected to the first and second torches 50 and 60 through pipes, respectively. A gas control unit (not shown) is provided between each gas supply portion and the corresponding torch for controlling the gas flow rate at different stages. A plurality of gas control units are communicatively connected to the first central control 20.
SiCl4The flow can be adjusted between 0.1g/min and 20 g/min), and SiO is generated by flame hydrolysis under the condition of high temperature2For forming a cladding layer and a core layer of a preform; GeCl4The flow rate can be adjusted between 0.01g/min and 1.0g/min, and GeO is generated by flame hydrolysis under the condition of high temperature2And doping the core layer to improve the refractive index of the core layer. Transport of SiCl4、GeCl4The surface of the pipeline needs to be laid with a heating belt, and the temperature is controlled at 100 ℃.
H2The flow rate can be adjusted between 0.1L/min and 30L/min; o is2The flow rate can be adjusted between 0.1L/min and 50L/min, wherein H2Has a combustion function, O2Has combustion supporting effect, and is used for allowing H2Complete reaction, at the time of flow rate setting, it is necessary to add O2The flow rate is set to surplus.
The Ar flow can be adjusted between 0.1L/min and 10L/min. The function of Ar is mainly two, one of the two functions is used as a carrier gas to carry a raw material gas; secondly, it is prepared by reacting H2、O2And the separation is realized, so that the mixing and the reaction in the torch are prevented.
The temperature measuring unit 18 is located below the deposition chamber 11 and spaced apart from the first and second torches 15 and 16. The temperature measuring unit 18 is configured to monitor a deposition temperature of the core layer 405 at the end of the mandrel 401, and feed back the detected deposition temperature to the first central control device 20 at preset time intervals. The deposition temperature detected by the temperature measuring unit 18 is referred to as a detected deposition temperature. In this embodiment, the temperature measuring unit 18 is an infrared thermal imager. The first central control device 20 prestores a preset target temperature, a preset temperature deviation and a preset regulation flow. The first central control device 20 calculates the detected deposition temperature and the preset target temperature, and controls H according to the processing result of the first central control device 202The supply part performs the pairThe first torch 15 and the second torch 16 perform gas supply.
Setting the detected deposition temperatures as detected deposition temperatures, the detected deposition temperatures forming a first group, the first group including t1, t2, t3, … … t (i-1) and ti in a detection sequence, the first central control device 20 averaging the detected deposition temperatures N times, the average forming a second group, the second group including t1 ', t2 ', t3 ' … … t (i-1) ', ti ' in an averaging sequence, setting t (i-1) ' as a previous value of ti ', comparing ti ' with the preset target temperature, and when the deviation of ti ' from the preset target temperature is not greater than the preset temperature deviation, then H in the first torch 15 is H2The flow rate remains unchanged.
When ti 'is greater than the preset target temperature and the deviation between ti' and the preset target temperature is greater than the preset temperature deviation, comparing ti 'with t (i-1)', and if ti 'is greater than t (i-1)', adjusting to reduce H in the first torch 152Flow rate; if ti 'is less than t (i-1)', then H2The flow rate remains unchanged.
When ti 'is less than the preset target temperature and the deviation between ti' and the preset target temperature is greater than the preset temperature deviation, comparing ti 'with t (i-1)', and if ti 'is less than t (i-1)', adjusting to decrease and increase H in the first torch 152And (4) flow rate.
Specifically, 1050 ℃ is set as a preset target temperature, the preset temperature deviation is set as 2 ℃, and the preset regulation flow is set as 0.1L/min. The temperature measuring unit 18 detects and collects the deposition temperature of the core layer 405 at the end of the mandrel 401 every time at intervals of 10S, and the temperature is recorded as t1, t2, t3, … … t (i-1) and ti in sequence. The inspection deposition temperatures are grouped into a first group, which includes t1, t2, t3, … … t (i-1), ti in inspection order. The temperature measurement unit 18 feeds back the detected deposition temperature to the first central control device 20. The first central control device 20 takes the deposition temperature detected 5 consecutive times and calculates an average value, for example, an average value from t1 to t5 is denoted as t1 ', an average value from t2 to t6 is denoted as t 2', and so on. The average values form a second group. The second group comprises t1 ', t2 ', t3 ' … … t (i-1) ', ti'. Let t (i-1) 'be the previous value of ti', e.g., t2 'be the previous value of t 1'. Each average value is compared to 1050 ℃ and the previous value (e.g., t2 'compared to 1050 ℃ and t 1', t3 'compared to 1050 ℃ and t 2', … …), respectively, and H is assigned if an average value does not deviate more than 2 ℃ from 1050 ℃ than H2The flow rate is kept unchanged; if the average value is greater than 1050 ℃ and greater than 2 ℃, the average value is compared with the previous value, taking t2 ' as an example, if t2 ' is greater than t1 ', H2The flow rate is reduced by 0.1L/min, if t2 'is less than t 1', then H2The flow rate is kept unchanged; if the temperature is lower than the preset target temperature by more than 2 ℃, comparing the temperature with the previous value, taking t2 ' as an example, if t2 ' is higher than t1 ', H2The flow rate is kept unchanged, if t2 'is less than t 1', then H2The flow rate was increased by 0.1L/min.
It will be appreciated that H in the torch can be regulated based on the detected deposition temperature without taking the average2And (4) flow rate.
It will be appreciated that if the deviation between the average value and the preset target temperature is greater than 2 ℃, H will be compared without comparing with the previous value2The flow rate was increased by 0.1L/min.
It is to be understood that the N detected deposition temperatures are not limited to a sequential detection order, but may be N detected deposition temperatures that are randomly extracted.
It is to be understood that the temperature measurement unit 18 is not limited to detecting and collecting deposition temperatures every 10S intervals, but may detect and collect deposition temperatures every other time.
It can be understood that the preset target temperature, the preset temperature deviation and the preset regulation flow can be set according to the actual deposition process for manufacturing the preform.
It is understood that the central control device 20 calculates the preset regulation flow control H according to the detected deposition temperature and the processing result2The flow rate is adjusted.
It is understood that the temperature measuring unit 18 is not limited to an infrared thermal imager, but may be other temperature sensors.
It is understood that the detected deposition temperatures constitute a first group comprising t1, t2, t3 … … t (i-1), ti, all detections of said first groupThe deposition temperature is averaged, and when the deviation between the average value and a preset temperature target is not greater than a preset temperature deviation, H of the first torch 15 is determined2The flow rate is kept unchanged; when the deviation between the average value and the preset temperature target is larger than the preset temperature deviation, adjusting to increase H2Flow rate, wherein H of said first torch 15 is adjusted every 1 ℃ C2The H of said first torch 15 is adjusted with a flow increase of 0.1L/min, for example 1 ℃ more2The flow rate is 0.1L/min, 2 ℃ higher, H of the first torch 15 is adjusted2The flow rate was increased by 0.2L/min.
It is to be understood that the gas supply device 17 may be omitted and the first manufacturing apparatus 100 is connected to an external gas supply device.
It will be appreciated that the lifting means 12, the rotating means 13, the deposition chamber 11 may be omitted.
Since the temperature measuring unit 18 monitors the deposition temperature of the end core layer 405 in real time and feeds the deposition temperature back to the first central control device 20 during the deposition of the core layer 405, the first central control device 20 controls and adjusts H in real time according to the detected deposition temperature2The flow rate of (2) ensures the stability of the surface temperature of the core rod 401, and further improves the stability of the refractive index of the core rod 405. In this embodiment, based on the surface temperature acquisition technology, the gas flow is adjusted in real time, the deposition of the mandrel 401 is accurately controlled, and cracking of the mandrel caused by a large density gradient can be effectively prevented, so that the product quality and the yield are improved. FIG. 4 shows the process of this example (without adjusting H based on the core deposition temperature)2Flow) of the single rod refractive index axial test contrast plot. In this embodiment, the maximum temperature and the minimum temperature of the core rod 401 are kept within 10 ℃.
It will be appreciated that the deposition temperature of the tip core layer 405 is not limited to being monitored, and that the deposition temperature of the core rod layer may also be monitored when the core rod is manufactured by other processes, such as Outside Vapor Deposition (OVD).
The diameter measuring unit 19 includes a first diameter measuring unit 191 and a second diameter measuring unit 193. The first diameter measuring unit 191 is located below the side of the deposition chamber 11, adjacent to the temperature measuring unit 18 and disposed away from the first torch 15, for measuring the diameter of the distal core layer 405 of the mandrel 401. A second caliper unit 193 is located below the side of the deposition chamber 11 and adjacent to the second torch 16 for measuring the diameter of the optical cladding 407 at the end of the core rod 401. In this embodiment, the first diameter measuring unit 191 and the second diameter measuring unit 193 are CCD cameras. The core diameter detected by the first diameter measuring unit 191 is set as the detection core diameter, and the optical cladding diameter detected by the second diameter measuring unit 193 is set as the detection optical cladding diameter. The first diameter measuring unit 191 detects the diameter of the core layer at the tail end at intervals of a first preset diameter measuring time and feeds back the detected core layer diameter to the first central control device 20, and the second diameter measuring unit 193 detects the optical cladding at intervals of a second preset diameter measuring time and feeds back the detected optical cladding diameter to the first central control device 20.
Referring to FIG. 5, let D be the core diameter and D be the optical cladding diameter. The diameter measuring unit 191 detects the diameter of the end core layer at intervals of 1 minute. The first central control device 20 prestores a core layer diameter target, in this embodiment, the preset core layer diameter target is a preset core layer diameter range, and the preset core layer diameter range is 58.3-58.7 mm. If the diameter of the detection core layer is within the range of 58.3-58.7 mm, the SiCl of the first blast lamp 154The flow is not changed; if the diameter of the detected core layer is smaller than the minimum threshold value of the preset core layer diameter range of 58.3mm, the first central control device 20 controls and adjusts SiCl of the first blast lamp 154The flow rate is increased by 0.05g/min, and if the core layer diameter is detected to be larger than the maximum threshold value of the preset core layer diameter range by 58.7mm, the first central control device 20 controls and adjusts SiCl of the first blast lamp 154The flow rate was reduced by 0.05 g/min.
In this embodiment, an end point of the preform 400 adjacent to the lifting device 12 is set as an origin, and a certain position along the axial direction (which is the same as the length direction) of the preform 400 is set as a rod position, and each rod position has a corresponding length (a distance between the position and the origin), a core diameter D, an optical cladding diameter D, and a rod diameter (the diameter of the preform 400). Specifically, the first diameter measuring unit 191 detects that the diameter of the detection core layer at the rod position L is d, and both L and d are recorded into the first central control device 20.
In the firstAnd the control device 20 calculates and processes the rod position L and the corresponding core layer diameter d to obtain a preset optical cladding diameter target of the corresponding rod position, wherein the optical cladding target is 4.15 times of the detection core layer diameter d of the corresponding rod position. The second caliper unit 193 detects the optical cladding diameter every 1 minute and transmits the detected optical cladding diameter to the first central control device 20. Second torch 16 initial SiCl4The flow rate was 50g/min, and was adjusted based on the detection optical cladding diameter. When the detected optical cladding diameter is less than the optical cladding diameter target for the corresponding rod position, the SiCl of the second torch 164The flow rate is increased by 0.5g/min, and when the detected optical cladding diameter is larger than the optical cladding diameter target of the corresponding rod position, the SiCl of the second torch 16 is increased4The flow rate was reduced by 0.5 g/min.
In the core rod prepared by the conventional process, the diameter range of the core layer is 58-60 mm, the diameter range of the optical cladding layer is 240-258 mm, the change trend of the diameter D of the core layer along the axial direction is different from that of the diameter D of the optical cladding layer, and the D/D fluctuation is 0.2. In the embodiment, the diameter of the core layer obtained by deposition ranges from 58mm to 59mm, the diameter of the optical cladding layer ranges from 240 mm to 244mm, and the D/D fluctuation is 0.05. As the diameter of the tail end core layer 405 is monitored by the first diameter measuring unit 191, and the SiCl of the first blast lamp 15 is adjusted by the first central control device 20 according to the diameter condition of the monitored core layer4The flow rate, and thus the uniformity of the diameter of the core layer grown by deposition, is ensured, and the first central control device 20 sets the target of the optical cladding layer according to the diameter of the core layer detected at the corresponding rod position, and adjusts the SiCl of the second torch 16 according to the target of the optical cladding layer and the diameter of the detected optical cladding layer4The flow is dynamically and accurately regulated, the diameter consistency of the optical cladding is guaranteed, the core cladding ratio consistency is further guaranteed, and the manufacturing yield of the core rod 401 is improved.
It is understood that the time of the detection interval of the first and second caliper units 191 and 193 is not limited.
It is understood that the first and second diameter measuring units 191 and 193 are not limited to be CCD cameras, but may be other distance measuring sensors, such as ultrasonic sensors.
It is understood that the diameter measuring unit 190 can be a diameter measuring unit, which is disposed below the deposition chamber 11, and then the image processing unit is disposed through the first central control device 20 to process the image, so as to obtain the core diameter and the optical cladding diameter.
It can be understood that the first central control device 20 prestores the corresponding preset core diameter range, core diameter target and optical cladding diameter target according to each rod position, and adjusts the SiCl of the second torch 16 according to the detected core diameter and the preset core diameter range4Flow rate, adjusting SiCl of the second torch 16 based on the detected optical cladding diameter and the target optical cladding diameter4And (4) flow rate.
The second manufacturing apparatus 200 is used to form the preform 400 by depositing an overclad 403 on the core rod 401 by an Outside Vapor Deposition (OVD) method. The axis of the preform 400 along its length coincides with the axis 101.
Referring to fig. 6, a distance measuring unit 201, a deposition burner 203, a second central control device 205, and a deposition target rod 207 are disposed in the second manufacturing apparatus 200. The distance measuring unit 201 and the deposition burner 203 are in communication connection with a second central control device 205. The distance measuring unit 201 is used to monitor the rod diameter of the preform 400. In the present embodiment, the distance measuring unit 201 is an ultrasonic distance meter. It is understood that the second fabrication apparatus 200 may also include other necessary or non-necessary structures, such as a deposition chamber, which are not described in detail herein.
The preform 400 has an axis 409 (along the length of the preform). The ranging unit 201 and the deposition torch 203 are movable relative to the preform 400 along an axis substantially parallel to the axis 409. The second central control device 205 prestores a first motion path of the distance measuring unit 201 moving along an axis parallel to the axis 409, controls the distance measuring unit 201 to move along the first motion path when detecting the rod diameter, and controls the distance measuring unit 201 to detect the rod diameter and the corresponding rod position at regular intervals. The second central control device 205 prestores a second moving path along which the deposition torch 203 moves along an axis parallel to the axis 409, and controls the deposition torch 203 to move along the second moving path and record the rod position relative to the preform 400.
The distance measuring unit 201 and the deposition burner 203 can be opposite to the pre-deposition burnerMoving the rod making 400, detecting the rod diameter of the preform rod 400 when the distance measuring unit 201 moves to the corresponding rod position and feeding back the detected rod diameter to the second central control device 205, wherein the central control device 205 presets a reference rod diameter, and the second central control device 205 compares the detected rod diameter corresponding to each rod position with the reference rod diameter to obtain the SiCl when the deposition burner 203 moves to the corresponding rod position4The flow rate is adjusted.
When the detected rod diameter of a certain rod position is larger than the reference rod diameter, the second central control device 205 controls the deposition torch 203 to move to the corresponding rod position, and adjusts and reduces SiCl of the deposition torch 2034Flow rate; when the detected rod diameter of a certain rod position is smaller than the reference rod diameter, the second central control device 205 controls the deposition torch 203 to move to the corresponding rod position, and then SiCl of the deposition torch is adjusted and increased4And (4) flow rate.
In this embodiment, the distance measuring unit 201 measures the real-time rod diameter distribution every 5 minutes. During the test, the distance measuring unit 201 moves relative to the preform 400 along an axis parallel to the axis 409 of the preform 400 to measure the rod diameter of the preform 400 and feeds back the measured rod diameter and the corresponding position (one rod diameter value is recorded every 2 mm) to the second central control device 205, such as the first rod diameter B1 and its corresponding rod position L1, the second rod diameter B2 and its corresponding rod position L2, the third rod diameter … …, and so on. The second central control unit 205 calculates an average value B 'of the detected rod diameters (B1, B2 … …) as a reference rod diameter, and calculates a difference between the detected rod diameter and the reference rod diameter B' at each point, for example, the difference between the detected rod diameters B1 and B 'is B1', the difference between the detected rod diameters B2 and B 'is B2' … …, and so on. The second central control device 205 correlates the difference in the diameters of the rods with the movement path of the deposition torch 205, and when the deposition torch 205 travels to the corresponding rod position every 1mm difference in the deviation between the reference diameter and the detected diameter, SiCl of the deposition torch 2054The flow rate is correspondingly adjusted to 0.5 g/min.
It is understood that the distance measuring unit 201 and the deposition burner 203 do not limit the movement relative to the preform 400 along an axis parallel to the axis 409 of the preform 400, the distance measuring unit 201 can measure the rod diameter of the preform 400, and the deposition burner 203 can provide the preform 400 with the deposition-grown material.
It is understood that the distance measuring unit 201 is used to monitor the rod diameter of the preform 400 and feed back the detected rod diameter to the second central control device 205, and the second central control device 205 performs the SiCl torch deposition according to the detected rod diameter4The flow rate is adjusted.
It is understood that the reference rod diameter may not be an average value of the detection rod diameters, the second central control device 205 pre-sets the reference rod diameter according to the requirement, and the second central control device 205 performs the SiCl spraying on the deposition torch at the corresponding rod position according to the comparison result between the detection rod diameter corresponding to each rod position and the reference rod diameter4The flow rate is adjusted.
Conventionally, an outer tube vapor deposition (OVD) method is used for depositing on a core rod to form a prefabricated rod formed by an outer cladding layer, the diameter range of the rod is 239-246 mm, and the diameter fluctuation of the rod is 8 mm. In this embodiment, the second central control device 205 controls the deposition torch 205 to adjust SiCl at the corresponding rod position according to the diameter of the detected rod detected by the distance measuring unit 2014The flow rate is realized by correcting the rod diameter in the deposition process, the rod diameter range is 241-243 mm, the diameter of a single rod fluctuates by 2mm, the rod diameter of the prefabricated rod 400 has good consistency, and the performance and the manufacturing yield of the prefabricated rod 400 are further improved. In addition, the mode field diameter of the preform 400 in the axial direction and the cut wavelength can be improved to be uniform, and in the embodiment, the standard deviation of the preform 400 after drawing is 11, and the standard exceeding rate is 0.1%.
The invention also provides a manufacturing method of the optical fiber preform, which comprises the following steps:
step 601, attaching powder on a deposition target rod to form a core rod, wherein the core rod comprises a core layer and an optical cladding layer. In this embodiment, the core rod is manufactured by an axial vapor deposition method. The deposition target rod is movable relative to a first torch for providing a core growth feedstock.
Step 602, depositing soot on the optical cladding of the core rod to form an outer cladding, thereby forming a preform. In this example, the core rod was produced by an outside-tube vapor deposition method.
In step 601, the method further comprises monitoring the deposition temperature of the core layer 405 of the core rod, and controlling and adjusting H in the first blast lamp for providing the core layer growth raw material according to the deposition temperature of the monitored core layer2And (4) flow rate.
Further, the deposition temperature of the core layer is detected at intervals of a preset time, the detected deposition temperatures are set as detected deposition temperatures, the detected deposition temperatures form a first group, the first group comprises t1, t2, t3, … … t (i-1) and ti in detection sequence, the average value of the detected deposition temperatures for N times is obtained continuously, the average value forms a second group, the second group comprises t1 ', t2 ', t3 ' … … t (i-1) ', and ti ' in averaging sequence, t (i-1) ' is a front value of ti ', the ti ' is compared with the preset target temperature, and when the deviation of the ti ' compared with the preset target temperature is not larger than the preset temperature deviation, the H in the first torch is H2Keeping the flow constant, comparing ti ' with t (i-1) ' when the deviation between ti ' and the preset target temperature is greater than the preset temperature deviation, and adjusting H in the first torch according to the difference between ti ' and t (i-1) '2And (4) flow rate.
When ti 'is greater than the preset target temperature and the deviation between ti' and the preset target temperature is greater than the preset temperature deviation, comparing ti 'with t (i-1)', and if ti 'is greater than t (i-1)', adjusting to reduce H in the first torch 152Flow rate; if ti 'is less than t (i-1)', then H2The flow rate remains unchanged.
When ti 'is less than the preset target temperature and the deviation between ti' and the preset target temperature is greater than the preset temperature deviation, comparing ti 'with t (i-1)', and if ti 'is less than t (i-1)', adjusting to increase H in the first blowtorch2And (4) flow rate.
Specifically, 1050 ℃ is set as a preset target temperature, the preset temperature deviation is set as 2 ℃, and the preset regulation flow is set as 0.1L/min. Detecting and collecting the deposition temperature of the core layer 405 at the tail end of the core rod 401 at intervals of 10S, and sequentially recording the deposition temperatures as t1, t2, t3, t4, t5, t6, t7,t8, t9 … …. The detected deposition temperatures comprise a first group comprising t1, t2, t3, t4, t5, t6, t7, t8, t9 … …. The temperature measurement unit 18 feeds back the detected deposition temperature to the first central control device 20. The first central control device 20 takes the deposition temperature detected 5 consecutive times and calculates an average value, for example, an average value from t1 to t5 is denoted as t1 ', an average value from t2 to t6 is denoted as t 2', and so on. The average values form a second group. The second group includes t1 ', t2 ', t3 ' … …. t2 'is the previous value of t 1'. Each average value is compared to 1050 ℃ and the previous value (e.g., t2 'compared to 1050 ℃ and t 1', t3 'compared to 1050 ℃ and t 2', … …), respectively, and H is assigned if an average value does not deviate more than 2 ℃ from 1050 ℃ than H2The flow rate is kept unchanged; if the average value is greater than 1050 deg.C by more than 2 deg.C, the average value is compared with the previous value, taking t2 ' as an example, if t2 ' is greater than t1 ', H of the first torch is2The flow rate is reduced by 0.1L/min, if t2 'is less than t 1', then H2The flow rate is kept unchanged; if the temperature is lower than the preset target temperature by more than 2 ℃, comparing the temperature with the previous value, taking t2 ' as an example, if t2 ' is higher than t1 ', H2The flow rate is kept unchanged, if t2 'is less than t 1', then H2The flow rate was increased by 0.1L/min.
It will be appreciated that if the deviation between the average value and said preset target temperature is greater than 2 ℃, the H of the first torch is compared without comparing with said previous value2The flow rate was increased by 0.1L/min.
It is to be understood that the N detected deposition temperatures are not limited to a sequential detection order, but may be randomly extracted.
It can be understood that the target temperature is preset, the preset temperature deviation is set to be 2 ℃, and the preset regulation flow can be set according to the actual deposition process of manufacturing the preform.
It is to be understood that the axial vapor deposition method is not limited to the axial vapor deposition method, and other methods such as the outside vapor deposition method, the modified chemical vapor deposition Method (MCVD), the plasma chemical vapor deposition method (PCVD), etc. may be used as long as the deposition temperature of the core layer is monitored and H is adjusted in real time according to the deposition temperature of the core layer during the deposition growth of the core layer2Of the flow rate ofThe stability of the temperature is ensured.
In step 601, the method further comprises monitoring the diameter of the core layer, setting the measured diameter of the core layer as the diameter of the detection core layer, and adjusting SiCl of a first torch for providing the raw material for the growth of the core layer when the diameter of the detection core layer deviates from a preset target diameter of the core layer4The flow rate of (c). In this embodiment, the core diameter is the diameter of the end of the core, and the target of the predetermined core diameter is the range of the predetermined core diameter.
Adjusting SiCl of a first torch for supplying a core growth raw material when the diameter of the end core is not detected within the range of the preset core diameter4And (4) flow rate.
Further, when the diameter of the detected core layer is smaller than the minimum threshold value of the preset core layer diameter range, the SiCl of the first blast lamp is adjusted and increased4Flow rate; when the diameter of the detected tail end cladding is larger than the maximum threshold value of the preset core diameter range, the SiCl of the first blast lamp is adjusted and reduced4And (4) flow rate.
Let the core diameter be D and let the optical cladding diameter be D. The diameter measuring unit 191 detects the diameter of the end core layer at intervals of 1 minute. In the present embodiment, the diameter of the predetermined core layer is 58.3-58.7 mm. If the diameter of the detection core layer is within the range of 58.3-58.7 mm, the SiCl of the first blast lamp 154The flow is not changed; if the diameter of the detection core layer is smaller than the minimum threshold value of the preset core layer diameter range of 58.3mm, controlling and adjusting SiCl of the first blast lamp 154The flow is increased by 0.05g/min, and if the diameter of the detected core layer is larger than the maximum threshold value of the preset core layer diameter range by 58.7mm, the SiCl of the first blast lamp 15 is controlled and adjusted4The flow rate was reduced by 0.05 g/min.
In step 601, the method further includes detecting an optical cladding diameter of the core rod, setting the detected optical cladding diameter as the detected optical cladding diameter, setting a preset optical cladding target for a certain rod position according to the detected core diameter of the corresponding rod position, and controlling to add SiCl of a second torch for providing raw material for optical cladding growth when the detected optical cladding diameter of the certain rod position is smaller than the corresponding optical cladding diameter target4Flow rate; when the diameter of the detection optical cladding is larger than that of the detection optical claddingThe target of the optical cladding diameter of the corresponding rod position is reduced by SiCl of the second torch4And (4) flow rate.
In this embodiment, the optical cladding diameter target is preset according to the rod position, and the preset optical cladding target is 4.15 times of the detection core diameter d of the corresponding rod position.
Further, when the diameter of the detection optical cladding is smaller than the target diameter of the optical cladding at the corresponding rod position, the flow rate of a second blast lamp for providing optical cladding growth raw material is adjusted and increased; and when the detected optical cladding diameter is larger than the target optical cladding diameter of the corresponding rod position, adjusting and reducing the flow rate of a second torch for providing the optical cladding growth raw material.
Specifically, a preset optical cladding diameter target is obtained through calculation processing according to the rod position L and the corresponding core layer diameter d, wherein the optical cladding target is 4.15 times of the detected core layer diameter d of the corresponding rod position. The end optical cladding diameter was measured every 1 minute interval. Second torch 16 initial SiCl4The flow rate was 50g/min, and was adjusted based on the detection optical cladding diameter. When the detected optical cladding diameter is less than the optical cladding diameter target for the corresponding rod position, the flow rate of the second torch 16 is increased by 0.5g/min, and when the detected optical cladding diameter is greater than the optical cladding diameter target for the corresponding rod position, the flow rate of the second torch 16 is decreased by 0.5 g/min.
It is understood that the axial vapor deposition method is not limited to be used, and other methods such as the outside-tube vapor deposition method, the modified chemical vapor deposition Method (MCVD), the plasma chemical vapor deposition method (PCVD), etc. can be used, as long as the SiCl of the first and second torches can be adjusted in real time by monitoring the diameter of the core layer and the diameter of the optical cladding layer during the deposition and growth of the core layer and the optical cladding layer4And the flow rate is further ensured, so that the diameter consistency of the core layer and the diameter consistency of the optical cladding layer are ensured.
In step 602, the method further comprises monitoring the rod diameter of the preform, and depositing SiCl for the torch based on the detected rod diameter4The flow rate is adjusted.
The diameter of the preform rod is monitored by a distance measuring unit, and the distance measuring unit and the deposition blowtorch can be opposite to each otherThe prefabricated rod moves, the prefabricated rod has rod positions, the distance measuring unit detects the rod diameter of the prefabricated rod when moving to the corresponding rod positions, and according to the comparison result of the detected rod diameter corresponding to each rod position and the reference rod diameter, SiCl when the deposition blowtorch moves to the corresponding rod position is detected4The flow rate is adjusted. In the present embodiment, the distance measuring unit is an ultrasonic distance meter. The distance measuring unit detects the rod diameter and the corresponding rod position at regular intervals.
In this embodiment, the ranging unit tests the real-time rod diameter distribution every 5 minutes. During testing, the ranging unit moves the detection rod diameter along the axis parallel to the axis of the preform rod relative to the preform rod and records the detection rod diameter and corresponding positions, such as the first rod diameter B1 and the corresponding rod position L1, the second rod diameter B2 and the corresponding rod position L2, the third rod diameter … … and so on. Calculating an average value B 'of the detection rod diameters (B1, B2 … …) as a reference rod diameter, and calculating a rod diameter difference between the actual rod diameter and the reference rod diameter B' of each point, wherein the rod diameter difference between B1 and B 'is B1', the rod diameter difference between B2 and B 'is B2' … …, and the like. And correlating the rod diameter difference with the movement path of the deposition blowtorch, wherein when the difference of the diameters is 1mm, the deposition blowtorch moves to the corresponding rod position, SiCl is adopted4The flow rate is correspondingly adjusted to 0.5 g/min.
It is understood that the manufacturing method includes monitoring the diameter of the preform by a distance measuring unit, and depositing SiCl of the torch according to the detected diameter4The flow rate is adjusted.
It can be understood that the distance measuring unit is capable of moving relative to the preform, the preform has rod positions, the distance measuring unit detects the rod diameters of the preform when moving to the corresponding rod positions, and according to the result of comparing the detected rod diameter corresponding to each rod position with the reference rod diameter, the deposition torch is aligned with the SiCl when moving to the corresponding rod position4The flow rate is adjusted.
The optical fiber preform manufacturing equipment and the manufacturing method thereof provided by the invention control and adjust H in real time according to the detected deposition temperature2The stability of the surface temperature of the core rod is ensured, and then the flow rate is improvedThe stability of the refractive index of the core rod is improved, and the product yield of the optical fiber perform rod is also improved. Further, SiCl of the first torch is adjusted according to the diameter condition of the monitored core layer4And the flow rate is further ensured, the consistency of the diameters of the core layers grown by deposition is ensured, the optical cladding target is set according to the diameter of the detection core layer at the corresponding rod position, the flow rate of the second blowtorch is adjusted according to the optical cladding target and the diameter of the detection optical cladding for dynamic accurate regulation and control, the consistency of the diameters of the optical cladding is ensured, the consistency of core cladding ratio is further ensured, and the manufacturing yield of the core rod is improved. Furthermore, the deposition blowtorch is controlled to adjust SiCl at the corresponding rod position according to the detected rod diameter detected by the distance measuring unit4And the flow rate is realized, and the rod diameter is corrected in the deposition process, so that the rod diameter of the prefabricated rod has good consistency, and the performance and the manufacturing yield of the prefabricated rod are further improved.
It is to be understood that other variations and modifications within the spirit of the invention may be devised by those skilled in the art without departing from the technical effects of the invention. Such variations are intended to be included within the scope of the invention as claimed.
Claims (7)
1. The utility model provides a manufacturing equipment of optical fiber perform, its includes deposit target rod, first blowtorch and first central control device, deposit target rod is used for depositing in-process and forms the plug in attaching powder, the plug includes sandwich layer and cladding in the optics cladding of sandwich layer lateral surface, the blowtorch mouth of deposit blowtorch is towards deposit target rod setting, first blowtorch with first central control device is connected its characterized in that: the manufacturing equipment further comprises a diameter measuring unit connected with the first central control device, the diameter measuring unit is used for measuring the core layer diameter of the core rod at intervals of preset time and feeding the core layer diameter back to the first central control device, the first central control device presets a core layer diameter target, the measured core layer diameter is set as a detected core layer diameter, and when the detected core layer diameter deviates from the core layer diameter target, the first central control device controls and adjusts SiCl of the first blast lamp4The preform having a rodWhen the detected core diameter of a rod position is smaller than the minimum threshold value of the corresponding preset core diameter range or larger than the maximum threshold value of the preset core diameter range, the first central control device controls and adjusts the first blowtorch SiCl4The diameter measuring unit is further used for detecting the diameter of the optical cladding and feeding the diameter of the optical cladding back to the first central control device, the first central control device presets an optical cladding target of a corresponding rod position according to the diameter of the detection core layer, the detected diameter of the optical cladding is set as the diameter of the detected optical cladding, and when the diameter of the detected optical cladding of a certain rod position is smaller than the diameter target of the corresponding optical cladding, SiCl of the second torch is controlled to be increased4Flow rate; when the diameter of the optical cladding for detection of a certain rod position is larger than the corresponding target of the optical cladding diameter, the SiCl of the second blast lamp is reduced4And (4) flow rate.
2. An apparatus for manufacturing an optical fiber preform according to claim 1, wherein: the diameter range of the preset core layer is 58.3-58.7 mm.
3. An apparatus for manufacturing an optical fiber preform according to claim 1, wherein: the optical cladding for a rod position targets 4.15 times the diameter of the detection core for the corresponding rod position.
4. An apparatus for manufacturing an optical fiber preform according to claim 1, wherein: the diameter range of the optical cladding is 240-244 mm.
5. An apparatus for manufacturing an optical fiber preform according to claim 1, wherein: the diameter measuring unit comprises a first diameter measuring unit and a second diameter measuring unit, the first diameter measuring unit is used for measuring the diameter of a core layer of the core rod, and the second diameter measuring unit is used for measuring the diameter of an optical cladding of the core rod.
6. An apparatus for manufacturing an optical fiber preform according to any one of claims 1 to 5, wherein: the manufacturing equipment also comprises a temperature measuring unit connected with the first central control device, the temperature measuring unit is used for monitoring the deposition temperature of the core rod layer and feeding back the detected deposition temperature to the first central control device, and the first central control device controls and adjusts H in the first blast burner according to the detected deposition temperature2And (4) flow rate.
7. The manufacturing method of the optical fiber preform rod is characterized by comprising the steps of monitoring the diameter of a core layer of the core rod, setting the measured diameter of the core layer as the diameter of a detection core layer, and adjusting SiCl of a first blowtorch for providing a core layer growth raw material when the diameter of the detection core layer is deviated from the target of the preset diameter of the core layer4The method further comprises detecting the optical cladding diameter of the core rod, setting the detected optical cladding diameter as the detected optical cladding diameter, setting a preset optical cladding target for a certain rod position according to the detected core diameter of the corresponding rod position, and controlling to increase SiCl of a second torch for supplying raw material for optical cladding growth when the detected optical cladding diameter of the certain rod position is smaller than the corresponding optical cladding diameter target4Flow rate; when the detected optical cladding diameter is larger than the optical cladding diameter target of the corresponding rod position, reducing SiCl of the second blast lamp4And (4) flow rate.
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| CN112408776B (en) * | 2020-11-24 | 2022-04-12 | 江苏亨通光导新材料有限公司 | Control method for improving parameter uniformity of optical fiber preform |
| CN113772947B (en) * | 2021-09-17 | 2023-04-18 | 杭州金星通光纤科技有限公司 | System and method for controlling density of loose body of optical fiber preform rod in production process |
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