CN108147655A - The manufacturing equipment and its manufacturing method of preform - Google Patents
The manufacturing equipment and its manufacturing method of preform Download PDFInfo
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- CN108147655A CN108147655A CN201611102309.7A CN201611102309A CN108147655A CN 108147655 A CN108147655 A CN 108147655A CN 201611102309 A CN201611102309 A CN 201611102309A CN 108147655 A CN108147655 A CN 108147655A
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- sandwich layer
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
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- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Abstract
A kind of manufacturing equipment of preform, it includes depositing target rod, first blowtorch and the first control device, the blowtorch mouth of the deposition blowlamp is set towards the deposition target rod, first blowtorch is connect with first control device, the manufacturing equipment is further included calibrates unit with what first control device was connect, it is described to calibrate unit for measuring the sandwich layer diameter of the plug every a preset time and feeding back to first control device, first control device presets sandwich layer diameter target, if a diameter of detection sandwich layer diameter of the sandwich layer measured, when the detection sandwich layer diameter and the sandwich layer diameter target, there are during deviation, first control device controls to adjust the SiCl of first blowtorch4Flow.The present invention also provides a kind of manufacturing methods of preform.SiCl is adjusted according to detection sandwich layer diameter control4Flow, ensure the consistency of the sandwich layer diameter of plug, improve the product yield of preform.
Description
Technical field
The present invention relates to preform manufacturing technology field, the manufacturing equipment of more particularly to a kind of preform and its
Manufacturing method.
Background technology
Preform manufacture is divided into plug manufacture and is manufactured with surrounding layer, i.e., first manufactures plug (including sandwich layer and optics packet
Layer), then deposit covering outside plug and preform is made.The manufacturing method of optical fiber prefabricated rod mandrel mainly has axial gas
Phase sedimentation (VAD), modified chemical vapor deposition process (MCVD) (MCVD), plasma chemical vapor deposition (PCVD) and pipe outer gas
Phase sedimentation (OVD), surrounding layer manufacture is based on direct OVD synthesis and quartz socket tube assembling.However, no matter which kind of method passed through
Preform is manufactured, in the fabrication process, for the influence of certain factors, causes product yield not high, such as, during exhaust
Because airflow fluctuation can caused by environmental temperature fluctuation residing for plug, cause the dopant profiles in the sandwich layer uneven, can cause
Axial section consistency is bad.
Invention content
In view of this, it is necessary to which manufacturing equipment and its manufacturer of a kind of preform for avoiding the above problem are provided
Method.
A kind of manufacturing equipment of preform, it is described heavy including deposition target rod, the first blowtorch and the first control device
For forming plug in attaching powder in deposition process, the plug includes sandwich layer and is coated on the sandwich layer lateral surface product target rod
Optics covering, the blowtorch mouth of the deposition blowlamp is towards the deposition target rod setting, in first blowtorch and described first
Device connection is controlled, the manufacturing equipment further includes the unit of calibrating being connect with first control device, described to calibrate unit use
In the sandwich layer diameter that the plug is measured every a preset time and first control device is fed back to, dress is controlled in described first
Put default sandwich layer diameter target, if the sandwich layer measured it is a diameter of detection sandwich layer diameter, when it is described detection sandwich layer diameter with it is described
For sandwich layer diameter target there are during deviation, first control device controls to adjust the SiCl of first blowtorch4Flow.
Further, the prefabricated rods have stick position, and first control device corresponds to each stick position setting sandwich layer diameter
Target, the sandwich layer diameter target are a sandwich layer diameter range, when the detection sandwich layer diameter in a stick position is less than accordingly default core
When the minimum threshold values of layer diameter range or the maximum threshold values more than the default sandwich layer diameter range, the first control device control
System adjusts the first blowtorch SiCl4Flow.
Further, the default sandwich layer diameter range is 58.3~58.7mm.
Further, the manufacturing equipment further includes the second blowtorch, and the unit of calibrating is additionally operable to detect the optics packet
Layer diameter simultaneously feeds back to first control device, and first control device is according to the corresponding stick of the detection sandwich layer predetermined diameter
The optics covering target of position, if the optics cladding diameter detected is detection optics cladding diameter, when the detection light of a certain stick position
When learning cladding diameter less than corresponding optics cladding diameter target, then the SiCl for increasing by second blowtorch is controlled4Flow；When certain
The detection optics cladding diameter of one stick position is more than corresponding optics cladding diameter target, then reduces the SiCl of the second blowtorch4Flow.
Further, detection 4.15 times of sandwich layer diameter of the optics covering target of a certain stick position for corresponding stick position.
Further, the optics cladding diameter ranging from 240~244mm.
Further, the unit of calibrating calibrates unit including first and second calibrates unit, and described first calibrates unit
For measuring the sandwich layer diameter of the plug, described second calibrates unit for measuring the optics cladding diameter of the plug.
Further, the manufacturing equipment further includes the temperature measurement unit being connect with first control device, described
Temperature measurement unit is used to monitor the depositing temperature of the plug sandwich layer and feeds back to the detection depositing temperature detected described
First control device, first control device control to adjust the H in first blowtorch according to the detection depositing temperature2Stream
Amount.
A kind of manufacturing method of preform, the plug include sandwich layer and are coated on the optics of the sandwich layer lateral surface
Covering, the manufacturing method include the sandwich layer diameter of monitoring plug, if a diameter of detection sandwich layer diameter of the sandwich layer measured, works as institute
State detection sandwich layer diameter and default sandwich layer diameter target there are during deviation, adjust for the sandwich layer growth raw material is provided first
The SiCl of blowtorch4Flow.
Further, the manufacturing method further includes the optics cladding diameter for detecting the plug, if the optics detected
Cladding diameter is detection optics cladding diameter, and the preset optical covering target of a certain stick position is straight according to the detection sandwich layer of corresponding stick position
Diameter is set, and when the detection optics cladding diameter of a certain stick position is less than corresponding optics cladding diameter target, then increase is controlled to use
In the SiCl for the second blowtorch for providing optics covering growth raw material4Flow；When the detection optics cladding diameter is more than corresponding stick
The optics cladding diameter target of position then reduces the SiCl of the second blowtorch4Flow.
Relative to the prior art, apparatus for preparing optical fiber blanks provided by the invention and its manufacturing method, according to detection core
Layer diameter control adjusts SiCl4Flow, ensure the consistency of the sandwich layer diameter of plug, the product for improving preform is good
Rate.
Description of the drawings
Fig. 1 is the schematic diagram for the preform manufacture system that present pre-ferred embodiments provide.
Fig. 2 is prefabricated rods end view.
Fig. 3 is the first manufacturing equipment schematic diagram.
Fig. 4 is the single rod refractivity axial direction test comparison figure of former technique and the present embodiment.
Fig. 5 is the schematic diagram of plug.
Fig. 6 is the second manufacturing equipment schematic diagram.
Main element symbol description
Preform manufacture system 300
Prefabricated rods 400
Plug 401
Surrounding layer 403
Sandwich layer 405
Optics covering 407
Axis 409,101
First manufacturing equipment 100
Second manufacturing equipment 200
Deposition chamber 11
Lifting device 12
Rotating device 13
Deposit target rod 14,207
First blowtorch 15
Second blowtorch 16
Gas supply device 17
Temperature measurement unit 18
Calibrate unit 19
First control device 20
Distance measuring unit 201
Deposition blowlamp 203
Second control device 205
Lower specific embodiment will be further illustrated the present invention with reference to above-mentioned attached drawing.
Specific embodiment
Below in conjunction with the attached drawing in the embodiment of the present invention, the technical solution in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other without making creative work
Embodiment shall fall within the protection scope of the present invention.In the absence of conflict, the feature in following embodiment and embodiment can
To be combined with each other.
It should be noted that in the present invention, when a component is considered as with another component " being connected ", it can be with
It is to be connected directly with another component or be indirectly connected by component placed in the middle and another component.
Unless otherwise defined, all of technologies and scientific terms used here by the article is with belonging to technical field of the invention
The normally understood meaning of technical staff is identical.Term used in the description of the invention herein is intended merely to description tool
The purpose of the embodiment of body, it is not intended that in the limitation present invention.
Referring to Fig. 1, the present invention provides a kind of preform manufacture system 300, for manufacturing prefabricated rods 400.It please join
Fig. 2 is read, the prefabricated rods 400 include plug 401 and the surrounding layer 403 being coated on the plug 401.
Preform manufacture system 300 includes the first manufacturing equipment 100 and the second manufacturing equipment 200.First manufacture is set
Standby 100 for deposit manufacture plug 401, plug 401 include made of glass material for the starting stick of growth base is provided with
And by it is described starting stick end deposited powder and the sandwich layer 405 formed and the optics packet being coated on the sandwich layer 405
Layer 407.The high refractive index of the sandwich layer 405 is in the refractive index of the optics covering 407.Second manufacturing equipment 200 is used to deposit
Manufacture surrounding layer 403.In present embodiment, the first manufacturing equipment 100 prepares plug 401 by axial vapor deposition method (VAD)；
Second manufacturing equipment 200 forms surrounding layer 403 by pipe Outside Vapor Deposition (OVD) in deposition on plug 401.
It please refers to shown in Fig. 3, the first manufacturing equipment 100 includes deposition chamber 11, lifting device 12, rotating device 13, sinks
Product target rod 14, the second blowtorch 16, gas supply device 17, temperature measurement unit 18, calibrates unit 19 and first at first blowtorch 15
Control device 20.
Lifting device 12 is set on the top of deposition chamber 11, and rotating device 13 is installed on lifting device 12.Deposit target rod
14 are installed on rotating device 13 and are contained in deposition chamber 11.If rotating device 13 has axis 101.Lifting device 12 is used to drive
Dynamic deposition target rod 14 rises or falls along axis 101, and rotating device 13 rotates for driving deposition target rod 14 around axis 101.It is heavy
Product target rod 40 is used for the attaching powder in deposition process and forms plug 401.
First blowtorch 15 and the second blowtorch 16 are located at the lower section side of deposition chamber 11.Blowtorch mouth (the figure of first blowtorch 15
Do not mark) and the blowtorch mouth (figure do not mark) of the second blowtorch 16 be respectively positioned on the inside of deposition chamber 11 and set towards deposition target rod 14.
Form sandwich layer 405 using end deposited powder of first blowtorch 15 in plug 401, with enable sandwich layer 405 from the end of plug 401 to
Lower growth.In other words, first blowtorch 15 is used to provide sandwich layer growth raw material.Using the second blowtorch 16 in plug 401
End deposited powder forms optics covering 407, with optics covering 407 is enabled to be deposited on sandwich layer 405 and from the end of plug 401 to
Lower growth.In other words, second blowtorch 16 is used to provide optics covering growth raw material.
Gas supply device 17 is connect with the first blowtorch 50 and the second blowtorch 60, for the first blowtorch 50 and the second blowtorch
60 provide gas, such as SiCl4、GeCl4Deng and fuel, such as hydrogen and the mixture of oxygen.Gas supply device 17 includes multiple gas
Body supply department (not shown).In the present embodiment, multiple gas supply departments include SiCl4Supply department, GeCl4Supply department, Ar are supplied
Answer portion, O2Supply department, H2Supply department etc., multiple gas supply departments pass through pipeline and the first blowtorch 50 and the second blowtorch respectively
60 connections.Gas control unit (not shown) is equipped between each gas supply department and corresponding blowtorch, for controlling different phase
Throughput.Multiple gas control units are communicated to connect with the first control device 20.
SiCl4Flow can adjust between 0.1g/min~20g/min), flame hydrolysis generates SiO in the case of a high temperature2, use
In the covering and sandwich layer that form prefabricated rods；GeCl4Flow can adjust between 0.01g/min~1.0g/min, in the case of a high temperature
Flame hydrolysis generates GeO2, sandwich layer is entrained in improve core refractive rate.Convey SiCl4、GeCl4Pipe surface need to lay
Heating tape, temperature are controlled at 100 DEG C.
H2Flow can adjust between 0.1L/min~30L/min；O2Flow can adjust between 0.1L/min~50L/min,
In, H2Combust acts on, O2Serve it is combustion-supporting, in addition, in order to allow H2Reaction completely, in flow set, needs O2Flow is set
It is set to more than needed.
Ar flows can adjust between 0.1L/min to 10L/min.There are two the effect of Ar is main, one is as carrier gas, fortune
Carry unstrpped gas；Second, by H2、O2It separates, prevents it from mixing, reacting in blowtorch.
Temperature measurement unit 18 is located at the lower section of deposition chamber 11, and is set with the first blowtorch 15 and the second blowtorch 16 interval
It puts.Temperature measurement unit 18 is used to monitor 405 depositing temperature of sandwich layer of 401 end of plug, and will be detected every preset time
Depositing temperature feed back to the first control device 20.The depositing temperature that temperature measurement unit 18 is detected is known as detecting deposition temperature
Degree.In the present embodiment, temperature measurement unit 18 is infrared thermography.First control device 20 be pre-stored pre-set target temperature,
Preset temperature deviation and default adjusting flow.First control device 20 detects depositing temperature and the pre-set target temperature by described
Calculation processing is carried out, and according to the handling result control H of the first control device 202Supply department is carried out to the first blowtorch 15 and second
Blowtorch 16 carries out gas supply.
If the depositing temperature detected is detection depositing temperature, the detection depositing temperature forms the first group, institute
State the first group according to detection ordering include t1, t2, t3 ... t (i-1), ti, first control device 20 take continuous n times
The average value of depositing temperature is detected, the average value forms the second group, and second group includes according to sequence is averaged
T1 ', t2 ', t3 ' ... t (i-1) ', ti ', if t (i-1) ' is the preceding value of ti ', by ti ' compared with the pre-set target temperature,
When ti ' is not more than the preset temperature deviation compared to the deviation of the pre-set target temperature, then in first blowtorch 15
H2Flow remains unchanged.
Work as ti ' more than the deviation between the pre-set target temperature and ti ' and the pre-set target temperature more than described pre-
If during temperature deviation, then by ti ' compared with t (i-1) ', if ti ', more than t (i-1) ', adjusting reduces in first blowtorch 15
H2Flow；If ti ' is less than t (i-1) ', H2Flow remains unchanged.
Work as ti ' less than the deviation between the pre-set target temperature and ti ' and the pre-set target temperature more than described pre-
If during temperature deviation, then by ti ' compared with t (i-1) ', if ti ' is less than t (i-1) ', adjusting drop increases in the first blowtorch 15
H2Flow.
Specifically, if 1050 DEG C are pre-set target temperature, if preset temperature deviation is 2 DEG C, if the default flow that adjusts is
0.1L/min.Temperature measurement unit 18 detects the depositing temperature of 401 end sandwich layer 405 of plug of acquisition at interval of the 10S times,
Be denoted as successively t1, t2, t3 ... t (i-1), ti.The detection depositing temperature forms the first group, includes according to detection ordering
t1、t2、t3、……t(i-1)、ti.The detection depositing temperature is fed back to the first control device 20 by temperature measurement unit 18.
First control device 20 takes the detection depositing temperature of continuous 5 times and calculates average value, for example, the average value of t1 to t5 be denoted as t1 ',
The average value of t2 to t6 is denoted as t2 ', and so on.The average value forms the second group.Second group include t1 ',
t2’、t3’……t(i-1)’、ti’.If t (i-1) ' is the preceding value of ti ', for example, t2 ' is the preceding value of t1 '.Each average value point
(such as t2 ' is not with 1050 DEG C compared with t1 ' compared with 1050 DEG C and the preceding value；T3 ' is with 1050 DEG C compared with t2 ' ...), such as
One average value and it is described 1050 DEG C compared to deviation no more than 2 DEG C, then H2Flow remains unchanged；Such as average value is than described 1050 DEG C
More than 2 DEG C or more, then compared with preceding value, by taking t2 ' as an example, the H if t2 ' is more than t1 '2Flow-reduction 0.1L/min, such as t2 ' are less than
T1 ', then H2Flow remains unchanged；Such as 2 DEG C smaller than the pre-set target temperature or more, then compared with preceding value, by taking t2 ' as an example, such as
T2 ' is more than t1 ' then H2Flow remains unchanged, if t2 ' is less than t1 ', then H2Flow increases 0.1L/min.
It is appreciated that can not be averaged, and according to the H in detection depositing temperature regulation and control blowtorch2Flow.
If being appreciated that, deviation between average value and the pre-set target temperature is more than 2 DEG C, not with the preceding value ratio
Compared in the case of, by H2Flow increases 0.1L/min.
It is appreciated that do not limit it is N number of detection depositing temperature as continuous detection ordering, may be randomly select it is N number of
Detect depositing temperature.
It is appreciated that limiting temperature measuring unit 18 does not detect acquisition primary depositing temperature at interval of the 10S times, also may be used
It is detected and acquired with interval other time.
It is appreciated that pre-set target temperature, preset temperature deviation, presetting adjusting flow can be prefabricated according to actual deposition manufacture
It is set during stick.
It is appreciated that control device 20 calculates default adjusting flow control according to the detection depositing temperature and handling result
H2Adjust flow.
It is appreciated that limiting temperature measuring unit 18 is not infrared thermography, may be other temperature-sensitive stickers.
It is appreciated that the detection depositing temperature forms the first group, including t1, t2, t3 ..., t (i-1), ti, right
Whole detection depositing temperatures of first group are averaged, when the deviation between the average value and preset temperature target not
More than the H of preset temperature deviation, then first blowtorch 152Flow remains unchanged；When the average value and the preset temperature
Deviation between target is more than preset temperature deviation, then adjusting increases H2Flow wherein per 1 DEG C big, then adjusts first spray
The H of lamp 152Flow increases 0.1L/min, such as 1 DEG C big, adjusts the H of first blowtorch 152Flow 0.1L/min, it is 2 DEG C big, then
Adjust the H of first blowtorch 152Increase flow 0.2L/min.
It is appreciated that gas supply device 17 can be omitted, first manufacturing equipment 100 is filled with external gas supply
Put connection.
It is appreciated that lifting device 12, rotating device 13, deposition chamber 11 can be omitted.
Since in the deposition process of sandwich layer 405, temperature measurement unit 18 carries out the depositing temperature of end sandwich layer 405 real
When monitor and feed back to the first control device 20, the first control device 20 according to detection depositing temperature control to adjust H in real time2Stream
Amount, ensures the stability of the surface temperature of plug 401, and then improves the stability of 405 refractive index of plug.The present embodiment, base
In face temperature acquisition technology, the deposition of gas flow, accurate control plug 401 is adjusted in real time, can effectively prevent density gradient
Plug is caused to crack greatly, so as to improve product quality and yield.It please refers to shown in Fig. 4, is that former technique is not (therewith for the present embodiment
By adjusting H according to sandwich layer depositing temperature2Flow) single rod refractivity axial direction test comparison figure.In the present embodiment, plug
401 maximum temperature is maintained at minimum temperature within 10 DEG C.
It is appreciated that being not limited to the depositing temperature of monitoring end sandwich layer 405, core can also manufactured with other techniques
During stick, the depositing temperature of plug sandwich layer, such as pipe Outside Vapor Deposition (OVD) are monitored.
Unit 19 is calibrated to calibrate unit 191 including first and second calibrate unit 193.First calibrates unit 191 positioned at heavy
The side-lower of product cavity 11, neighbouring temperature measurement unit 18 is simultaneously set far from the first blowtorch 15, for the end of measure-axis 401
The diameter of sandwich layer 405.Second calibrates the side-lower that unit 193 is located at deposition chamber 11, and neighbouring second blowtorch 16 is set, and is used for
The diameter of 401 final optical covering 407 of measure-axis.In the present embodiment, first, which calibrates unit 191 and second, calibrates unit 193
For CCD camera.If first calibrates a diameter of detection sandwich layer diameter of sandwich layer that unit 191 detects, if second calibrates unit 193 and examines
The optics cladding diameter measured is detection optics cladding diameter.First calibrates unit 191 default calibrates the time i.e. at interval of first
End sandwich layer diameter is detected and the detection sandwich layer diameter is fed back into the first control device 20, second calibrates unit
193 at interval of second it is default calibrate time detection optics covering and feed back to control in first by the detection optics cladding diameter fill
Put 20.
Referring to Fig. 5, a diameter of d of sandwich layer is set, if optics cladding diameter is D.Unit 191 is calibrated at interval of 1 minutes
End sandwich layer diameter is detected.First control device 20 is pre-stored sandwich layer diameter target, in present embodiment, presets core
Layer diameter target is a default sandwich layer diameter range, and the default sandwich layer diameter range is 58.3~58.7mm.Such as the detection
Sandwich layer diameter is within the scope of 58.3~58.7mm, then the SiCl of the first blowtorch 154Flow is constant；As the detection sandwich layer is straight
Diameter is less than the minimum threshold values 58.3mm of the default sandwich layer diameter range, then the first control device 20 controls to adjust the first blowtorch 15
SiCl4Flow increases 0.05g/min, and such as described detection sandwich layer diameter is more than the maximum threshold values of the default sandwich layer diameter range
The SiCl of 58.7mm, then the first blowtorch 15 of the first control device 20 control and regulation4Flow-reduction 0.05g/min.
In present embodiment, if the prefabricated rods 400 are origin with the neighbouring endpoint of lifting device 12, if along described prefabricated
The a certain position of the axis direction (consistent with length direction) of stick 400 is stick position, and each stick position has corresponding length (position
The distance between described origin), sandwich layer diameter d and optics cladding diameter D and stick diameter (diameters of prefabricated rods 400).Specifically,
First calibrates a diameter of d of detection sandwich layer that unit 191 detects stick position L, by L and equal the first control devices of typing 20 of d.
For first control device 20 according to stick position L and its corresponding sandwich layer diameter d, calculation processing obtains the default of corresponding stick position
Optics cladding diameter target, the optics covering target are 4.15 times of the detection sandwich layer diameter d of corresponding stick position.Second calibrates list
Member 193 is controlled during the detection optics cladding diameter is sent to first and is filled at interval of the optics cladding diameter of detection in 1 minute
Put 20.Second blowtorch, 16 initial SiCl4Flow is 50g/min, is adjusted based on the detection optics cladding diameter.When described
Detect the SiCl that optics cladding diameter is less than the optics cladding diameter target, then the second blowtorch 16 of corresponding stick position4Flow increases
0.5g/min, when the detection optics cladding diameter is more than the optics cladding diameter target of corresponding stick position, then the second blowtorch 16
SiCl4Flow-reduction 0.5g/min.
In plug made from common process, sandwich layer diameter range be 58~60mm, optics cladding diameter ranging from 240~
258mm, in an axial direction sandwich layer diameter d and the variation tendency of optics cladding diameter D differ, the fluctuation of D/d is 0.2.And this implementation
In example, the sandwich layer diameter range that deposits is 58~59mm, optics cladding diameter ranging from 240~244mm, the fluctuation of D/d
It is 0.05.It calibrates unit 191 and sandwich layer 405 diameter in end is monitored, and the first control device 20 is according to monitoring due to first
Sandwich layer diameter situation adjusts the SiCl of the first blowtorch 154Flow, and then ensure that the sandwich layer diameter consistency of deposition growing, and the
One control device 20 sets optics covering target, and according to the optics covering target according to the detection sandwich layer diameter of corresponding stick position
And detection optics cladding diameter adjusts the SiCl of the second blowtorch 164Flow ensures optics cladding diameter into Mobile state accuracy controlling
Consistency, and the core packet being further ensured that than consistency, improve the manufacturing yield of plug 401.
It calibrates unit 191 it is appreciated that not limiting first, second calibrate the time of 193 assay intervals of unit.
It calibrates unit 191 it is appreciated that not limiting first, second calibrate unit 193 as CCD camera, may be it
His measurement distance inductor, such as, ultrasonic wave sensor.
Unit is calibrated it is appreciated that calibrating unit 190 and can be one, is set to 11 lower section of deposition chamber, then
By image processing unit being set to handle image in the first control device 20, sandwich layer diameter and optics cladding diameter are obtained.
It is appreciated that the first control device 20 is pre-stored corresponding default sandwich layer diameter range, sandwich layer according to each stick position
Diameter target and optics cladding diameter target, foundation monitor that detection sandwich layer diameter and default sandwich layer diameter range adjust the second spray
The SiCl of lamp 164Flow, foundation monitor that detection optics cladding diameter and optics cladding diameter target adjust the second blowtorch 16
SiCl4Flow.
Second manufacturing equipment 200 is used to form surrounding layer in deposition on plug 401 by pipe Outside Vapor Deposition (OVD)
403 so formed prefabricated rods 400.The axis of the prefabricated rods 400 along its length is overlapped with axis 101.
Referring to Fig. 6, distance measuring unit 201, deposition blowlamp 203, the second control device are set in the second manufacturing equipment 200
205 and deposition target rod 207.Distance measuring unit 201, deposition blowlamp 203 and the second control device 205 communicate to connect.Distance measuring unit 201
For monitoring the stick diameter of prefabricated rods 400.In present embodiment, distance measuring unit 201 is ultrasonic range finder.It is appreciated that second
Manufacturing equipment 200 further includes other necessary or inessential structures, and such as deposition chamber, therefore not to repeat here.
Prefabricated rods 400 have axis 409 (along the length direction of prefabricated rods).203 energy of distance measuring unit 201 and deposition blowlamp
It is enough to be moved along the relatively described prefabricated rods 400 of axis for being roughly parallel to the axis 409.Second control device 205 is pre-stored to be surveyed
The first motion path away from unit 201 along the axial-movement for being parallel to the axis 409, and distance measuring unit 201 is controlled to detect
According to the first movement path during stick diameter, and control distance measuring unit 201 test bar diameter and its corresponding stick position position at regular intervals
It puts.Second control device 205 is pre-stored deposition blowlamp 203 and moves road along the second of the axial-movement for being parallel to the axis 409
Diameter, and control deposition blowlamp 203 according to second movement path and and the opposite prefabricated rods 400 of record stick position.
The distance measuring unit 201 and the deposition blowlamp 203 can relatively described prefabricated rods 400 move, the ranging list
Member 201 detects the stick diameter of the prefabricated rods 400 and feeds back to control in described second by test bar diameter and fills when moving to corresponding stick position
205 are put, the 205 preset reference stick diameter of control device, second control device 205 is according to the corresponding test bar in each stick position
The comparison result of diameter and the reference bar diameter, moves to the deposition blowlamp 203 SiCl during corresponding stick position4Flow is adjusted
It is whole.
When the test bar diameter of a certain stick position is more than the reference bar diameter, second control device 205 controls described heavy
Product blowtorch 203 adjusts the SiCl for reducing the deposition blowlamp 203 when moving to corresponding stick position4Flow；When the detection of a certain stick position
When stick diameter is less than the reference bar diameter, when second control device 205 controls the deposition blowlamp 203 to move to corresponding stick position
Adjust the SiCl for increasing the deposition blowlamp4Flow.
In the present embodiment, the primary stick diameter distribution in real time of distance measuring unit test in 201 every 5 minutes.During test, distance measuring unit 201
Along be parallel to prefabricated rods 400 axis 409 axis with respect to 400 motion detection prefabricated rods 400 of prefabricated rods stick diameter and will detect
Stick diameter and corresponding position (recording a stick diameter value every 2mm) feed back to the second control device 205, for example, first leg diameter B1 and its
Corresponding stick position position L1, the second stick diameter B2 and its corresponding stick position position L2, third leg diameter ..., and so on.In second
The average value B ' that the test bar diameter (B1, B2 ...) is calculated in control device 205 is used as with reference to stick diameter, and calculate the inspection of each point
The stick diameter difference between stick diameter and the reference bar diameter B ' is surveyed, for example, the stick diameter difference between B1 and B ' is B1 ', B2 and B ' it
Between stick diameter difference for B2 ' ..., and so on.Second control device 205 moves the stick diameter difference with deposition blowlamp 205
Path is associated with, in corresponding stick position, when the deviation between the reference bar diameter and test bar diameter often differs 1mm, 205 row of deposition blowlamp
When proceeding to corresponding stick position position, the SiCl of deposition blowlamp 2054Flow accordingly adjusts 0.5g/min.
It is appreciated that the distance measuring unit 201 and deposition blowlamp 203 are not limited along the axis 409 for being parallel to prefabricated rods 400
Axis moved with respect to prefabricated rods 400, the distance measuring unit 201 can measure the stick diameter of the prefabricated rods 400, deposition
Blowtorch 203 can provide prefabricated rods 400 raw material of deposition growing.
It is appreciated that the distance measuring unit 201 is used for the test bar that monitors the stick diameter of the prefabricated rods 400 and will detect
Diameter feeds back to second control device 205, and second control device 205 is according to the test bar diameter to the deposition blowlamp
SiCl4Flow is adjusted.
It is appreciated that the reference bar diameter can not be the average value of the test bar diameter, second control device 205
Preset reference stick diameter needed for middle foundation, the second control device 205 is according to the corresponding test bar diameter in each stick position and reference bar diameter
Comparison result, to the deposition blowlamp in the SiCl of corresponding stick position4Flow is adjusted.
Conventionally by pipe Outside Vapor Deposition (OVD) prefabricated rods of surrounding layer formation, stick diameter model are formed in deposition on plug
It encloses for 239~246mm, the fluctuation of stick diameter is 8mm.And in the present embodiment, the second control device 205 is detected according to distance measuring unit 201
The test bar diameter control deposition blowlamp 205 arrived adjusts SiCl in corresponding stick position position4Flow is implemented in deposition process to stick diameter
It is modified, stick diameter ranging from 241~243mm, single stick diameter fluctuation 2mm, the stick diameter tool of prefabricated rods 400 is consistent well
Property further improves the performance and manufacturing yield of prefabricated rods 400.In addition, it can also improve the mould of the prefabricated rods 400 in an axial direction
Field diameter and uniform by wavelength, in present embodiment, standard deviation 11 after wire drawing of prefabricated rods 400, exceeding standard rate is
0.1%.
The present invention also provides a kind of manufacturing methods of preform, include the following steps：
Step 601, plug is formed in attaching powder in deposition target rod, the plug includes sandwich layer and optics covering.This reality
It applies in example, the plug is manufactured by axial vapor deposition method.The deposition target rod opposite can provide sandwich layer life for offer
The first blowtorch movement of long raw material.
Step 602, surrounding layer is formed in the optics covering deposited powder of plug, and then forms prefabricated rods.In the present embodiment,
The plug is manufactured by pipe Outside Vapor Deposition.
In step 601, the depositing temperature of the sandwich layer 405 of monitoring plug is further included, the deposition according to the monitoring sandwich layer
Temperature controls to adjust the H in the first blowtorch for providing sandwich layer growth raw material2Flow.
Further, the depositing temperature of sandwich layer is detected at interval of a preset time, if the depositing temperature detected
For detect depositing temperature, it is described detection depositing temperature form the first group, first group according to detection ordering include t1, t2,
T3 ... t (i-1), ti take the average value of the detection depositing temperature of continuous n times, and the average value forms the second group, described
Second group includes t1 ', t2 ', t3 ' ... t (i-1) ', ti ' according to sequence is averaged, will if t (i-1) ' is the preceding value of ti '
For ti ' compared with the pre-set target temperature, the deviation for working as ti ' compared to the pre-set target temperature is not more than the preset temperature
During deviation, then the H in first blowtorch2Flow remains unchanged, and the deviation worked as between ti ' and the pre-set target temperature is more than
During the preset temperature deviation, by ti ' compared with t (i-1) ', and institute is adjusted according to the difference between the ti ' and t (i-1) '
State the H in the first blowtorch2Flow.
Work as ti ' more than the deviation between the pre-set target temperature and ti ' and the pre-set target temperature more than described pre-
If during temperature deviation, then by ti ' compared with t (i-1) ', if ti ', more than t (i-1) ', adjusting reduces in first blowtorch 15
H2Flow；If ti ' is less than t (i-1) ', H2Flow remains unchanged.
Work as ti ' less than the deviation between the pre-set target temperature and ti ' and the pre-set target temperature more than described pre-
If during temperature deviation, then by ti ' compared with t (i-1) ', if ti ' is less than t (i-1) ', adjusting drop increases H in the first blowtorch2
Flow.
Specifically, if 1050 DEG C are pre-set target temperature, if preset temperature deviation is 2 DEG C, if the default flow that adjusts is
0.1L/min.At interval of the 10S times detect acquisition 401 end sandwich layer 405 of plug depositing temperature, be denoted as successively t1, t2,
t3、t4、t5、t6、t7、t8、t9…….It is described detection depositing temperature form the first group, including t1, t2, t3, t4, t5,
t6、t7、t8、t9…….The detection depositing temperature is fed back to the first control device 20 by temperature measurement unit 18.It is controlled in first
Device 20 takes the detection depositing temperature of continuous 5 times and calculates average value, for example, the average value of t1 to t5 is denoted as t1 ', t2 to t6's
Average value is denoted as t2 ', and so on.The average value forms the second group.Second group include t1 ', t2 ',
t3’…….T2 ' is the preceding value of t1 '.Each average value respectively with 1050 DEG C and it is described before compared with value (such as t2 ' with 1050 DEG C with
T1 ' compares；T3 ' is with 1050 DEG C compared with t2 ' ...), if an average value and described 1050 DEG C are not more than 2 DEG C compared to deviation, then
H2Flow remains unchanged；Such as average value is more than 2 DEG C or more than described 1050 DEG C, then compared with preceding value, by taking t2 ' as an example, such as t2 '
More than the H of t1 ' then the first blowtorch2Flow-reduction 0.1L/min, such as t2 ' are less than t1 ', then H2Flow remains unchanged；Such as than default mesh
Mark small 2 DEG C of temperature or more, then compared with preceding value, by taking t2 ' as an example, the H if t2 ' is more than t1 '2Flow remains unchanged, as t2 ' is less than
T1 ', then H2Flow increases 0.1L/min.
If being appreciated that, deviation between average value and the pre-set target temperature is more than 2 DEG C, not with the preceding value ratio
Compared in the case of, by the H of the first blowtorch2Flow increases 0.1L/min.
It is appreciated that N number of detection depositing temperature is not limited as continuous detection ordering, the N number of inspection that can also be randomly selected
Survey depositing temperature.
It is appreciated that pre-set target temperature, if preset temperature deviation is 2 DEG C, presetting adjusting flow can be according to actual deposition
It is set during manufacture prefabricated rods.
May be pipe Outside Vapor Deposition, improvedization it is appreciated that being not limited to axial vapor deposition method
Other methods such as vapour deposition process (MCVD), plasma chemical vapor deposition (PCVD) are learned, as long as can be in the deposition of sandwich layer
In growth course, by monitoring the depositing temperature of sandwich layer and the depositing temperature according to sandwich layer adjusts H in real time2Flow, with ensure
The stability of temperature.
In step 601, monitoring sandwich layer diameter is further included, if a diameter of detection sandwich layer diameter of the sandwich layer measured, works as institute
State detection sandwich layer diameter and default sandwich layer diameter target there are during deviation, adjust for the sandwich layer growth raw material is provided first
The SiCl of blowtorch4Flow.In the present embodiment, a diameter of sandwich layer end diameter of sandwich layer, it is default core to preset sandwich layer diameter target
Layer diameter range.
When detecting end sandwich layer diameter not in default sandwich layer diameter range, adjust for sandwich layer growth raw material is provided the
The SiCl of one blowtorch4Flow.
Further, when detecting sandwich layer diameter and being less than the minimum threshold values of default sandwich layer diameter range, then increase the is adjusted
The SiCl of one blowtorch4Flow；When detecting end cladding diameter and being more than the maximum threshold values for presetting sandwich layer diameter range, then drop is adjusted
The SiCl of low first blowtorch4Flow.
If a diameter of d of sandwich layer, if optics cladding diameter is D.Unit 191 is calibrated at interval of 1 minutes i.e. to end core
Layer diameter is detected.In present embodiment, it is 58.3~58.7mm to preset sandwich layer diameter range.Such as the detection sandwich layer diameter
Within the scope of 58.3~58.7mm, then the SiCl of the first blowtorch 154Flow is constant；As the detection sandwich layer diameter is less than institute
The minimum threshold values 58.3mm of default sandwich layer diameter range is stated, then controls to adjust the SiCl of the first blowtorch 154Flow increases 0.05g/
Min, such as described detection sandwich layer diameter are more than the maximum threshold values 58.7mm of the default sandwich layer diameter range, then control to adjust first
The SiCl of blowtorch 154Flow-reduction 0.05g/min.
In step 601, the optics cladding diameter for detecting the plug is further included, if the optics cladding diameter detected is
Optics cladding diameter is detected, the preset optical covering target of a certain stick position is set according to the detection sandwich layer diameter of corresponding stick position, when
When the detection optics cladding diameter of a certain stick position is less than corresponding optics cladding diameter target, then increase is controlled for providing optics
The SiCl of second blowtorch of covering growth raw material4Flow；When the detection optics cladding diameter is more than the optics packet of corresponding stick position
Layer diameter target then reduces the SiCl of the second blowtorch4Flow.
In the present embodiment, according to stick position preset optical cladding diameter target, the preset optical covering target is corresponding stick
4.15 times of the detection sandwich layer diameter d of position.
Further, it when the optics cladding diameter target for detecting optics cladding diameter and being less than corresponding stick position, then adjusts
Increase for provide optics covering growth raw material the second blowtorch flow；When the detection optics cladding diameter is more than corresponding stick
The optics cladding diameter target of position then adjusts the flow for reducing the second blowtorch for providing optics covering growth raw material.
Specifically, according to stick position L and its corresponding sandwich layer diameter d, calculation processing obtains preset optical cladding diameter target,
The optics covering target is 4.15 times of the detection sandwich layer diameter d of corresponding stick position.At interval of the final optical of detection in 1 minute
Cladding diameter.Second blowtorch, 16 initial SiCl4Flow is 50g/min, is adjusted based on the detection optics cladding diameter.When
The detection optics cladding diameter is less than the optics cladding diameter target of corresponding stick position, then the flow of the second blowtorch 16 increases
0.5g/min, when the detection optics cladding diameter is more than the optics cladding diameter target of corresponding stick position, then the second blowtorch 16
Flow-reduction 0.5g/min.
May be pipe Outside Vapor Deposition, improvedization it is appreciated that being not limited to axial vapor deposition method
Other methods such as vapour deposition process (MCVD), plasma chemical vapor deposition (PCVD) are learned, as long as can be in sandwich layer and optics
During the deposition growing of covering, by monitoring sandwich layer diameter and optics cladding diameter, the first blowtorch and the second spray are adjusted in real time
The SiCl of lamp4Flow, and then ensure the consistency of sandwich layer diameter and optics cladding diameter consistency.
In step 602, the stick diameter of monitoring prefabricated rods is further included, according to the test bar diameter detected to deposition blowlamp
SiCl4Flow is adjusted.
The stick diameter of the prefabricated rods is monitored by a distance measuring unit, the distance measuring unit and deposition blowlamp can be relatively described
Prefabricated rod motion, the prefabricated rods have stick position, and the distance measuring unit detects the stick of the prefabricated rods when moving to corresponding stick position
Diameter, according to the corresponding test bar diameter in each stick position and reference bar diameter be compared as a result, moving to phase to the deposition blowlamp
Answer SiCl during stick position4Flow is adjusted.In present embodiment, distance measuring unit is ultrasonic range finder.Distance measuring unit every
Certain time test bar diameter and its corresponding stick position position.
In the present embodiment, the primary stick diameter distribution in real time of distance measuring unit test in every 5 minutes.During test, distance measuring unit is along parallel
With respect to prefabricated rods motion detection stick diameter and the test bar diameter and corresponding position are recorded in the axis of the axis of prefabricated rods, such as the
One stick diameter B1 and its corresponding stick position position L1, the second stick diameter B2 and its corresponding stick position position L2, third leg diameter ..., successively
Analogize.The average value B ' that the test bar diameter (B1, B2 ...) is calculated is used as with reference to stick diameter, and calculate the practical stick of each point
Stick diameter difference between diameter and the reference bar diameter B ', for example, the stick diameter difference between B1 and B ' is B1 ', B2 and B ' between
Stick diameter difference is B2 ' ..., and so on.The stick diameter difference is associated with the deposition blowlamp motion path, diameter is per phase
Poor 1mm, when deposition blowlamp marches to corresponding stick position position, SiCl4Flow accordingly adjusts 0.5g/min.
It is appreciated that the manufacturing method includes monitoring the stick diameter of prefabricated rods by a distance measuring unit, according to what is detected
Test bar diameter is to the SiCl of deposition blowlamp4Flow is adjusted.
It is appreciated that the distance measuring unit can relatively described prefabricated rod motion, the prefabricated rods have stick position, the survey
The stick diameter of the prefabricated rods is detected during away from unit motion to corresponding stick position, according to the corresponding test bar diameter in each stick position and reference bar
It is that diameter is compared as a result, SiCl when corresponding stick position is moved to the deposition blowlamp4Flow is adjusted.
Apparatus for preparing optical fiber blanks provided by the invention and its manufacturing method control tune in real time according to detection depositing temperature
Save H2Flow, ensure the stability of the surface temperature of plug, and then improve the stability of plug refractive index, also improve light
The product yield of fine prefabricated rods.Further, the SiCl of the first blowtorch is adjusted according to monitoring sandwich layer diameter situation4Flow, and then
It ensure that the sandwich layer diameter consistency of deposition growing, and the detection sandwich layer diameter according to corresponding stick position sets optics covering target,
And it is protected according to the flow of the optics covering target and detection optics cladding diameter the second blowtorch of adjusting into Mobile state accuracy controlling
Demonstrate,prove the consistency of optics cladding diameter, and the core packet being further ensured that than consistency, improve the manufacturing yield of plug.More very
Person, the test bar diameter control deposition blowlamp detected according to distance measuring unit adjust SiCl in corresponding stick position position4Flow is implemented in
Stick diameter is modified in deposition process, the stick diameter of prefabricated rods is caused to have good consistency, further improves the property of prefabricated rods
Energy and manufacturing yield.
It is understood that those skilled in the art can also do other variations etc. in spirit of the invention is used in the present invention's
Design, without departing from the technique effect of the present invention.These variations that spirit is done according to the present invention, should all be included in
Within scope of the present invention.
Claims (10)
1. a kind of manufacturing equipment of preform, including deposition target rod, the first blowtorch and the first control device, the deposition
Target rod is used in deposition process form plug in attaching powder, and the plug includes sandwich layer and is coated on the sandwich layer lateral surface
Optics covering, the blowtorch mouth of the deposition blowlamp is towards the deposition target rod setting, and first blowtorch in described first with controlling
Device connects, it is characterised in that：The manufacturing equipment further include connect with first control device calibrate unit, the survey
Diameter unit is used to measure the sandwich layer diameter of the plug every a preset time and feeds back to first control device, and described the
One control device presets sandwich layer diameter target, if a diameter of detection sandwich layer diameter of the sandwich layer measured, when the detection sandwich layer is straight
There are during deviation, first control device controls to adjust the SiCl of first blowtorch for diameter and the sandwich layer diameter target4's
Flow.
2. the manufacturing equipment of preform as described in claim 1, it is characterised in that：The prefabricated rods have stick position, institute
It states the first control device and corresponds to each stick position setting sandwich layer diameter target, the sandwich layer diameter target is a sandwich layer diameter range,
When the detection sandwich layer diameter in a stick position is less than the minimum threshold values of corresponding default sandwich layer diameter range or more than the default sandwich layer
During the maximum threshold values of diameter range, first control device controls to adjust the first blowtorch SiCl4Flow.
3. the manufacturing equipment of preform as claimed in claim 2, it is characterised in that：The default sandwich layer diameter range is
58.3~58.7mm.
4. the manufacturing equipment of preform as claimed in claim 2, it is characterised in that：The manufacturing equipment further includes second
Blowtorch, the unit of calibrating are additionally operable to detect the optics cladding diameter and feed back to first control device, and described first
Optics covering target of the control device according to the corresponding stick position of the detection sandwich layer predetermined diameter, if the optics cladding diameter detected
To detect optics cladding diameter, when the detection optics cladding diameter of a certain stick position is less than corresponding optics cladding diameter target,
Then controlling increases the SiCl of second blowtorch4Flow；When the detection optics cladding diameter of a certain stick position is more than corresponding optics
Cladding diameter target then reduces the SiCl of the second blowtorch4Flow.
5. the manufacturing equipment of preform as claimed in claim 4, it is characterised in that：The optics covering target of a certain stick position
4.15 times that detect sandwich layer diameter for corresponding stick position.
6. the manufacturing equipment of preform as claimed in claim 4, it is characterised in that：The diameter range of the optics covering
For 240~244mm.
7. the manufacturing equipment of preform as claimed in claim 4, it is characterised in that：The unit of calibrating includes the first survey
Diameter unit and second calibrate unit, described first calibrates unit for measuring the sandwich layer diameter of the plug, and described second calibrates
Unit is used to measure the optics cladding diameter of the plug.
8. the manufacturing equipment of the preform as described in claim 1 to 7, it is characterised in that：The manufacturing equipment is also wrapped
The temperature measurement unit being connect with first control device is included, the temperature measurement unit is used to monitor the plug sandwich layer
The detection depositing temperature detected is simultaneously fed back to first control device by depositing temperature, and first control device is according to institute
State the H in detection depositing temperature control and regulation first blowtorch2Flow.
9. a kind of manufacturing method of preform, the plug includes sandwich layer and is coated on the optics packet of the sandwich layer lateral surface
Layer, which is characterized in that the manufacturing method includes the sandwich layer diameter of monitoring plug, if a diameter of detection sandwich layer of the sandwich layer measured
Diameter, when detection sandwich layer diameter and the default sandwich layer diameter target, there are during deviation, adjust to provide the sandwich layer growth
The SiCl of first blowtorch of raw material4Flow.
10. the manufacturing method of preform as claimed in claim 9, it is characterised in that：The manufacturing method further includes inspection
The optics cladding diameter of the plug is surveyed, if the optics cladding diameter detected is detection optics cladding diameter, a certain stick position
Preset optical covering target is set according to the detection sandwich layer diameter of corresponding stick position, when the detection optics cladding diameter of a certain stick position is small
When corresponding optics cladding diameter target, then increase is controlled for providing the second blowtorch of optics covering growth raw material
SiCl4Flow；When the optics cladding diameter target for detecting optics cladding diameter and being more than corresponding stick position, then described second is reduced
The SiCl of blowtorch4Flow.
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