CN104355532A - Optical fiber preform manufacturing method - Google Patents
Optical fiber preform manufacturing method Download PDFInfo
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- CN104355532A CN104355532A CN201410598253.3A CN201410598253A CN104355532A CN 104355532 A CN104355532 A CN 104355532A CN 201410598253 A CN201410598253 A CN 201410598253A CN 104355532 A CN104355532 A CN 104355532A
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01853—Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/08—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant
- C03B2201/12—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant doped with fluorine
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/31—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with germanium
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
- C03B2207/12—Nozzle or orifice plates
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/36—Fuel or oxidant details, e.g. flow rate, flow rate ratio, fuel additives
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- Engineering & Computer Science (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Abstract
The invention discloses an optical fiber preform manufacturing method which comprises the following steps: an upper laser of a first laser instrument measures the diameter d of a sandwich layer, a lower laser measures the top end shape P of a powder preform, and a system determines the withdrawal rate of the powder preform according to the top end shape P; an upper laser and a lower laser of a second laser instrument measure diameters of an upper point and a lower point of a coating layer respectively to further calculate the slope K of the deposition coating layer. An analytical system compares the differences between the actual parameters d1, P1 and K1 and the set parameters d0, P0 and K0 of the deposition powder preform. During the deposition process of the powder preform, a measuring system (a laser diameter measuring instrument), a control system and the analytical system are in closed cycle, the system is in real-time measurement, analysis and adjustment processes, and the deposition process can be controlled through the K value at the initial period when the top end shape of the coating layer deviates from the control mid-value so as to obtain the coating layer with uniform external diameter and improve the quality of the powder preform.
Description
Technical field
The present invention relates to a kind of vapor axial legal system surpasses preformod of optical fiber with low water peak method for large size, be specifically related to a kind of manufacture method of preform;
Background technology
Optical fiber is the basis of modern communication, and preform is the main raw material(s) of wire drawing optical fiber; At present, the preparation method of commercial prefabricated rods generally adopts the manufacturing process of " two-step approach ", i.e. the first step, the preparation of plug; Second step, mandrel outer handbag layer with become rod; Wherein, typical plug manufacturing process comprises: PCVD (plasma chemical vapor deposition) plasma exciatiaon chemical Vapor deposition process, MCVD (modified chemical vapor deposition) modified chemical vapor deposition process (MCVD), OVD (outside vapor deposition) Outside Vapor sedimentation and VAD (vapor axial deposition) vapour phase axial deposition technique; Wherein, PCVD and MCVD is referred to as method in pipe, OVD and VAD is referred to as the outer method of pipe; Outer packet technology at present typical technology comprises tiretube process, the direct epiboly of soot, APVD plasma spraying process and sol-gel sol-gel method; Transport property that plug quality determines optical fiber is as attenuation, cutoff wavelength, dispersion property, mode field diameter, useful area etc.; The outer packet technology of plug determines the manufacturing cost of preform;
Mainly use G652 single-mode fiber in the market, its refractive index profile takes simple step matched cladding type and the recessed inner cladding type of simple step; Simple step matched cladding type optical fiber, general employing improves core refractive rate in sandwich layer doped with Ge;
Simple step recessed inner cladding type optical fiber, generally its inner cladding adopts doped F to produce recessed specific refractory power, can reduce the doping of sandwich layer Ge like this, improves optical fiber property;
With regard to production G652 optical fiber, external sediment technology (the OVD of plug, VAD) interior deposition technique (PCVD is better than, MCVD), external sediment technology main advantage is: need not use expensive synthetic quartz pipe, sedimentation rate, the deposition number of plies need not be subject to the restriction of deposited tube diameter, is particularly conducive to and deposits large scale prefabricated rod with high deposition rate; And wherein, VAD method is more suitable for doing low water peak G652 optical fiber;
Current VAD technique first makes major diameter plug, then major diameter plug is drawn into the little plug of a lot of root, and then deposits covering by epiboly;
In view of the processing requirement of VAD, the major diameter plug of deposition is needed to be drawn into minor diameter plug, in order to ensure that fiber optics characteristic is as the stability of mode field diameter energy and plug stretching difficulty, need to ensure the sandwich layer diameter d of deposition plug and the stable of coating layer diameter D;
Tradition VAD manufacture method only utilizes laser controlling soot preforms end shape P, measurement point under the first laser as shown in Figure 1, the deposition of measuring result after then can only being terminated by to(for) the diameter of mandrel deposited and coating layer diameter, utilize experience to adjust blowtorch reactant flow, fuel flow and blowtorch relative position adjust, therefore every platform VAD equipment debugging efforts workload in early stage is great, and its processing parameter is relatively single, the preform type changing production fast cannot be utilized; In addition, as in deposition process, equipment state changes, as there is slight shift blowtorch position, could judge after deposition must be waited to terminate, on the impact of deposition, to cause the waste of production process;
United States Patent (USP) (US20120103023A1) method of preform " manufacture " discloses one and takes two blowtorch, blowtorch one with deposited powder on the end of the straight soot preforms of axis, thus grow sandwich layer; Blowtorch two at the outside deposited powder of sandwich layer, thus grows inner cladding; Geometrical shape-cylindric coating layer diameter the D of soot preforms tail end is detected by CCD imager, cylindric sandwich layer diameter d and coating layer and sandwich layer angle θ, by the difference between image analysis software analyzing and testing geometry and setting geometry, Controlling System is utilized to regulate blowtorch gas flow and composition, blowtorch position controls the total quality of soot preforms, and acquisition D/d has the high quality optical fiber prefabricated rods compared with minor swing;
Such method has following problem:
1, in deposition process, be full of the solid granule of suspension in deposition chamber, can obtain in image process at CCD imager and cause larger background noise, impact obtains the quality of image, and then reduces control accuracy;
2, tailing effect is had in blowtorch deposition process, namely loosening body fluffy in a large number can be deposited at the far-end of depositional plane, and the second blowtorch is at the sandwich layer outer end of deposition deposition coating layer, therefore, in deposition process, the loosening body fluffy in a large number that the far-end of the first blowtorch depositional plane deposits can sinter by the second blowtorch, cause soot preforms end surface shape in actual deposition process larger with setting form variations, and second blowtorch depositional plane far-end deposition loosening body fluffy in a large number lower because of its density, be not suitable as the outside diameter control parameter of soot preforms;
Therefore, need to develop a kind of vapor axial deposition method, described vapor axial deposition method can not only can be used on the geometrical dimension of the Obtaining Accurate soot preforms of long-time stable in whole deposition process but also automatically can stop when deposition process exceeds control, cuts the waste; Further, there is high production in enormous quantities ability, production stability;
Summary of the invention
Because the above-mentioned defect of prior art, the invention provides a kind of manufacture method of preform, i.e. a kind of vapor axial deposition method, accurately can control the geometrical dimension of soot preforms, and there is high production in enormous quantities energy and production stability;
For achieving the above object, the invention provides a kind of manufacture method of preform, it comprises the following steps: 1, in the geometric parameter sandwich layer diameter d 0 of the soot preforms of Deposition Control Systems input setting, end shape P0, coating layer deposition arbitrfary point, outer end, inclined-plane diameter D20 and inner arbitrfary point diameter D10, coating layer slope K 0=(D2-D10)/2h (h is vertical height between the upper and lower measurement point of coating layer), and the span of control of d0, P0 and K0;
2, after starting deposition, the first blowtorch is at the end deposition sandwich layer of soot preforms, and the second blowtorch is at sandwich layer outside deposition coating layer;
Laser measurement sandwich layer diameter d 1 on first laser diameter measuring instrument, lower laser measurement soot preforms end shape P0; On second laser diameter measuring instrument, laser measurement coating layer deposition arbitrfary point, outer end, inclined-plane diameter D2 and lower laser measurement inner arbitrfary point diameter D1, upper and lower laser spots vertical range h, obtain coating layer slope K 1=(D2-D1)/2h;
3, laser diameter measuring instrument carries out sweep measurement to the top of soot preforms in real time, and analytical system is by deposited powder prefabricated rods measuring result d1, and the parameter d 0, P0 of P1 and K1 and setting and K0 contrast, and comparing result is fed back to Controlling System;
4, Controlling System is by the reactant flow of adjustment first blowtorch, and the relative position of fuel and ignition dope flow and blowtorch makes the soot preforms sandwich layer diameter d 1 of deposition be in span of control;
Controlling System, by regulating target rod pulling speed, makes soot preforms end shape P1 fluctuate around Systematical control intermediate value P0;
Controlling System is by the reactant flow of adjustment second blowtorch, and the relative position of fuel and ignition dope flow and blowtorch makes coating layer deposition inclined-plane slope K 1 be in span of control;
5, analytical system judges the result after Controlling System adjustment, as regulated the soot preforms geometric parameter of rear deposition within the relevant parameter span of control of default, then continues deposition;
6, Controlling System continues to regulate target rod pulling speed to make the soot preforms end shape P1 of deposition consistent with set(ting)value P0, regulate the reactant flow of the first blowtorch, fuel makes the soot preforms sandwich layer diameter d 1 of deposition consistent with set(ting)value d0 with the relative position of ignition dope flow and blowtorch; Controlling System regulates the reactant flow of target rod the second blowtorch, and fuel makes coating layer deposition inclined-plane slope K 1 consistent with set(ting)value K0, until deposition terminates with the relative position of ignition dope flow and blowtorch;
7, as the end shape P1 of the soot preforms after adjustment, sandwich layer diameter d 1 and any one deposition in inclined-plane slope K 1 of coating layer exceed the relevant parameter span of control of default, then deposit stopping;
8, soot preforms to be transferred to dehydration-sintering furnace and is carried out dehydration sintering by deposition after terminating, and the solid bar after condensation is stretched to specific external diameter, recycles epiboly outsourcing covering, finished product preform;
As preferably, the controling parameters of the soot preforms of the setting in described step 1 comprises: the column sandwich layer outside diameter d 0, end shape P0 of deposited powder prefabricated rods, slope K 0 outside coating layer deposition inclined-plane;
As preferably, the controling parameters d0 of the soot preforms of the setting in described step 1, P0 and K0 has corresponding span of control respectively;
As preferably, in the deposition process in described step 1, the first blowtorch deposition SiO
2with GeO
2mixture, as sandwich layer; Second blowtorch deposition covering is pure SiO
2or SiO
2with the mixture of F, as coating layer;
As preferably, the first blowtorch in described step 4 is with SiCl
4and GeCl
4mixture as reactant, with H
2as fuel, with O
2as ignition dope, with N
2or Ar is as protection gas;
As preferably, the second blowtorch in described step 4 is with SiCl
4or SiCl
4with the mixture of fluoro-gas as reactant, with H
2as fuel, with O
2as ignition dope, with N
2or Ar is as protection gas;
As preferably, the target rod pulling speed in described step 4 is determined by Laser Measurement measured value under the first laser and set(ting)value;
As preferably, the relative position of the blowtorch in described step 4 comprises the relative angle of the horizontal throw of blowtorch and target rod vertical axis and blowtorch and the excellent vertical axis of target;
As preferably, on the second laser diameter measuring instrument in described step 2, coating layer deposition arbitrfary point, outer end, the inclined-plane diameter D2 range of choice of laser measurement is D2≤coating layer diameter D0 × 95%, and the inner arbitrfary point diameter D1 range of choice of lower laser measurement is D1 >=sandwich layer diameter d 0 × 105%;
As preferably, the deposition targets rod in described step 4 is made up of high temperature ceramic material or quartz material;
As preferably, the measuring system of described manufacture method, Controlling System, analytical system forms closed cycle, in deposition process, measuring system, Controlling System, analytical system is in real-time monitoring, regulates, in decision state;
Beneficial effect of the present invention: by above-mentioned control method, first, can judge its follow-up deposition tendency at soot preforms coating layer deposition commitment, measure the control techniques of the soot preforms coating layer diameter after formation of deposits mutually than ever, better control effects can be obtained; Secondly, laser diameter measuring instrument is compared CCD imager and is had higher precision and immunity from interference; Finally, the second laser diameter measuring instrument useful range is reasonably limited, flame between blowtorch can be reduced and interfere with each other with the tailing effect of flame deposited measuring the error caused in real time; Therefore, the stability of the plug ratio depositing prefabricated rods can be ensured, and then improve the optical property of final wire drawing optical fiber; After the geometric parameter of the soot preforms of deposition runaways, system can stop deposition automatically, thus stops scrapping in production process, reduces prefabricated rods production cost;
Be described further below with reference to the technique effect of accompanying drawing to design of the present invention, concrete structure and generation, to understand object of the present invention, characteristic sum effect fully;
Accompanying drawing explanation
Fig. 1 is method flow diagram of the present invention;
Fig. 2 is the vapor axial deposition apparatus design figure of the specific embodiment of the present invention;
Fig. 3 is soot preforms top geometric parameter of the present invention and measurement point schematic diagram thereof;
Fig. 4 is specific embodiment 1 soot preforms diameter distribution profile of the present invention;
Fig. 5 is specific embodiments of the invention 2 soot preforms diameter distribution profile;
Embodiment
According to the vapor axial deposition apparatus of a preferred case study on implementation of the present invention; As shown in Figure 1, target rod 11 vertical hangings are installed in reaction cavity, and Gua Bang mechanism, by the guide rail on pylon, utilizes motor and servomotor to move up and down and to rotate, and then are with vertical movement and the rotation of moving-target rod 11; The speed that moves up and down and the speed of rotation of target rod can be controlled by target rod control system 31; Blowtorch starts deposited powder prefabricated rods on target rod 11 subsequently;
First blowtorch 13 deposits sandwich layer, and the second blowtorch 14 is at sandwich layer periphery deposition coating layer; Sandwich layer is the SiO including Ge
2composition, its specific refractory power is relatively high, and coating layer is the SiO including F
2or pure SiO
2composition, specific refractory power is relatively low; At the initial period of powder deposition, by utilizing the second blowtorch 14, powder is deposited over the bottom of target rod 11, to form spheroid; When spheroid is by when constantly deposition reaches predetermined size, by utilizing the first blowtorch 13 and the second blowtorch 14, sandwich layer and coating layer are formed simultaneously on spheroid; Along with the lifting of target rod 11, plug and coating layer, along vertical axis 18 direction homoepitaxial, form uniform soot preforms 12;
First blowtorch 13 supply gas of deposition plug is by reactant (SiCl
4and GeCl
4), fuel (H
2), ignition dope (O
2) and protection gas (N
2) composition; Second blowtorch supply gas of deposition coating layer is by reactant (SiCl
4and fluoro-gas), fuel (H
2), ignition dope (O
2) and protection gas (N
2) composition;
Laser measurement sandwich layer diameter d 1 on first laser diameter measuring instrument, lower laser measurement soot preforms end shape P1; On second laser diameter measuring instrument, laser measurement coating layer deposition arbitrfary point, outer end, inclined-plane diameter D2 and lower laser measurement inner arbitrfary point diameter D1, upper and lower laser spots vertical range h, obtain coating layer slope K 1=(D2-D1)/2h;
Analytical system compares the soot preforms end shape of acquisition, d1, P1 and K1 value and setup parameter d0, difference between P0 and K0, by result feedback to Controlling System 20, after system 40 is analyzed by analysis, according to the difference between soot preforms end shape P1 and setting shape P0, control target rod pulling speed, according to d1 and K1 and the difference between set(ting)value d0 and K0, independent adjustment blowtorch reactant flow, fuel, the supply of ignition dope, the relative position of blowtorch;
In addition, exhaust system 38 is arranged on opposite side relative with blowtorch in deposition chamber;
As the first blowtorch 13 of deposition sandwich layer and the second blowtorch 14 of deposition coating layer, independently reactant can be controlled by Controlling System 20, fuel, the supply of ignition dope, the relative position of blowtorch;
In case study on implementation, as shown in Figure 2, the top geometry of soot preforms 12 is divided into two portions, first blowtorch 13 is at the cylindric plug of target rod 11 bottom deposit, and its diameter is defined as d0, and plug top parameter-definition is P0, the cylindric coating layer that second blowtorch 14 deposits around plug, coating layer deposition arbitrfary point, outer end, inclined-plane diameter D2 and inner arbitrfary point diameter D1, upper and lower laser spots vertical range h, obtain coating layer slope K 1=(D2-D1)/2h;
In deposition process, with laser measurement diameter of mandrel d1 on the first laser diameter measuring instrument 35, lower laser measurement plug top parameter P1; Second laser diameter measuring instrument 36 measures arbitrfary point, outer end, coating layer inclined-plane diameter D1 and inner arbitrfary point diameter D2, the upper and lower laser spots vertical range h of the second blowtorch 14 deposition, obtains coating layer slope K 1=(D2-D1)/2h; Coating layer deposition arbitrfary point, outer end, the inclined-plane diameter D2 range of choice that second laser diameter measuring instrument is measured is D2≤coating layer diameter D0 × 95%, and inner arbitrfary point diameter D1 range of choice is D1 >=sandwich layer diameter d 0 × 105%;
Measuring result by analysis system 40 feeds back to Controlling System 20, and Controlling System 20 makes plug top parameter P1 in the span of control of set(ting)value P0 by regulating target rod pulling speed, regulate reactant flow in the first blowtorch, fuel and ignition dope flow, and the relative position of blowtorch, make d1 in span of control, Controlling System 20 is by reactant flow in adjustment second blowtorch, fuel and ignition dope flow, and the relative position of blowtorch, make K1 value in span of control, such as, P1 span of control 2-3, d1 span of control 33-37mm, K1 span of control is 0.7-0.9, control with this, soot preforms 12 deposition parameter of deposition can be made consistent with target value (if PO is 2.5, d10 is 35mm, K0 is 0.8, intermediate value as deposition control parameters),
In powder deposition process, soot preforms 12 rotates with certain speed and moves up to along vertical axis 18; By making soot preforms 12 rotate along vertical axis 18, soot preforms is provided with rotational symmetry; And by making soot preforms 12 move vertically upward along target rod 11, soot preforms 12 continues growth downwards along vertical axis 18;
Soot preforms 12 top geometric parameter P1 can by adjustment target rod 11 pulling speeies, and the P1 as detected exceeds P0, then increase target rod 11 pulling speeies;
The diameter of mandrel d1 of soot preforms 12 can be supplied to the reactant flow of the first spray 13 lamp by adjustment, the relative position of fuel and ignition dope flow and the first blowtorch controls; D1 as detected exceeds d0, can by reducing the SiCl in blowtorch
4and GeCl
4feed rate, reduces H
2and O
2feed rate and one or more modes of relative position of the first blowtorch regulate;
Soot preforms 12 top geometric parameter K1 can be supplied to the reactant flow of the second blowtorch 14 by adjustment, the relative position of fuel and ignition dope flow and the second blowtorch controls; As measuring result K exceeds K0, can by reducing the SiCl in blowtorch
4with fluoro-gas feed rate, reduce H
2and O
2feed rate, regulate one or more modes of the relative position of the second blowtorch to regulate;
Preferably, soot preforms 12 top geometric parameter P1 is within the scope of 2-3, and d1 is within the scope of 33 to 37mm, and soot preforms 12 end shape geometric parameter K is within the scope of 0.7-0.9;
After deposition terminates, the soot preforms 12 of acquisition is heated to about 1100-1200 DEG C, contains He and Cl
2gas in dewater, then temperature is increased to 1500-1600 DEG C containing He gas in sinter;
Fig. 1 describes the control method of a preferred case study on implementation of the present invention; First-selected, the geometric parameter d0 of the soot preforms of setting is inputted in Controlling System 20, P0 and K0, and the span of control (step 1) of geometric parameter P0, d0 and K0, then, first laser diameter measuring instrument measures the sandwich layer diameter d 1 of soot preforms 12, the coating layer that second laser measures soot preforms 12 deposits distal diameter D2 and proximal diameter D1, upper and lower measurement point vertical height h, coating layer slope K 1=(D2-D1)/h on inclined-plane;
The soot preforms 12 top geometric parameter (d1 that analytical system will obtain, P1 and K1) geometric parameter (d0 that sets with the top of soot preforms, P0, K0) contrast rear (step 3) is carried out, feed back to Controlling System 20, Controlling System 20 regulates target rod 11 pulling speeies, reactant flow in blowtorch, fuel and ignition dope flow, and the relative position (step 4) of blowtorch; Meanwhile, target rod 11 pulling speeies, the reactant flow of blowtorch, the relative position of fuel and ignition dope flow and blowtorch can independent or multinomial together with carry out controls adjustment;
Step 5 in an embodiment, if system result of determination is yes, namely by the top geometric parameter (d1 of the soot preforms 12 of above-mentioned acquisition, P1, K1) at the top of soot preforms 12 setting geometric parameter (d0, P0, K0) in span of control, then the same with the 4th step, Controlling System 20 is by regulating target rod 11 pulling speeies, reactant flow in blowtorch, fuel and ignition dope flow, and one or more (step 6) in the relative position of blowtorch, simultaneity factor continues deposition (step 8), until deposition terminates;
Step 5 in an embodiment, if system result of determination is no, namely by the top geometric parameter (d1 of repeatedly comparative analysis acquisition, P1, K1) span of control on top setting geometric parameter (d0, P0, K0) of soot preforms 12 is all departed from, then deposition process stops (step 7) immediately, reduces the generation of unacceptable product;
By the control method in above-mentioned preferred embodiment, in whole deposition process, measuring system (the first laser diameter measuring instrument and the second laser diameter measuring instrument), analytical system 40, Controlling System 20 is in closed cycle, and depositing system is in measurement always, analyze, in the process regulated, and K1 value can depart from coating layer deposition and controls starting stage of intermediate value and carry out deposition process to it and regulate, and therefore the soot preforms external diameter of formation of deposits fluctuates less; Therefore the soot preforms 12 prepared and improving from the optical property that soot preforms 12 obtains optical fiber, and production in enormous quantities ability and the reliability of soot preforms can be improved;
By above-mentioned control method, the stable of the geometric parameter of the soot preforms in batch production process can be ensured, ensure that the diameter of soot preforms, density, the F doping content in the Ge doping and covering of sandwich layer in the axial direction with stablizing in radial direction; And because of geometry stable of the soot preforms of deposition, soot preforms generates defect such as crackle and variant machine can be reduced, thus can obtain stay-in-grade high-quality preform; After the geometric parameter of the soot preforms of deposition runaways, system can stop deposition automatically, thus reduces scrapping in production process, reduces prefabricated rods production cost;
A. embodiment 1: traditional method: use diameter for 35mm high purity quartz target rod in VAD method deposition, adopt two blowtorch to deposit sandwich layer and covering powder bed respectively, its center core layer is SiO
2with GeO
2mixture, covering is SiO
2powder, soot preforms mean density is 0.28gram/cm
3, body of powder uniform external diameter partial-length is 1000mm; Soot preforms top geometric parameter set(ting)value intermediate value P0 is 2.5, P0 span of control is 2-3; Soot preforms top geometric parameter is measured in real time by measuring system, and analytical system carries out analytical calculation to measuring result, and wherein measuring system is made up of the first laser diameter measuring instrument and the second laser diameter measuring instrument;
Deposition terminates the delivery platform that rear soot preforms transfers to dehydration-sintering furnace, prefabricated rods is put in dehydration-sintering furnace from top to bottom, hot zone temperature is risen to 1100 DEG C, 40SLPM helium is filled with in the bottom of sintering oven, 5SLPM chlorine, body of powder from top to bottom through the hot-zone of sintering oven, after completing above-mentioned dehydration procedure, measures soot preforms diameter as shown in Fig. 4 series 1 with 400mm/min speed;
B. the embodiment of the present invention: use diameter for 35mm high purity quartz target rod in VAD method deposition, adopt two blowtorch to deposit sandwich layer and covering powder bed respectively, its center core layer is SiO
2with GeO
2mixture, covering is SiO
2powder, soot preforms mean density is 0.28gram/cm
3, body of powder length is 1000mm; Soot preforms top geometric parameter set(ting)value intermediate value d0 is 35mm, d0 span of control is that 33mm-37mm, P0 control intermediate value 2.5, and span of control 2-3, K0 control intermediate value 0.8, span of control 0.7-0.9; Soot preforms top geometric parameter is measured in real time by measuring system, and analytical system carries out analytical calculation to measuring result, and wherein measuring system is made up of the first laser diameter measuring instrument and the second laser diameter measuring instrument;
Deposition terminates the delivery platform that rear soot preforms transfers to dehydration-sintering furnace, prefabricated rods is put in dehydration-sintering furnace from top to bottom, hot zone temperature is risen to 1100 DEG C, 40SLPM helium is filled with in the bottom of sintering oven, 5SLPM chlorine, body of powder from top to bottom through the hot-zone of sintering oven, after completing above-mentioned dehydration procedure, measures soot preforms external diameter as shown in Fig. 4 series 2 with 400mm/min speed;
C. embodiment 2: traditional method: use diameter for 30mm high purity quartz target rod in VAD method deposition, adopt two blowtorch to deposit sandwich layer and covering powder bed respectively, its center core layer is SiO
2with GeO
2mixture, covering is SiO
2with the mixture of F, soot preforms mean density is 0.25gram/cm
3, body of powder length is 1000mm; The d0 of soot preforms top geometric parameter set(ting)value intermediate value is 30mm, d10 span of control is 28mm-32mm; Soot preforms top geometric parameter is measured in real time by measuring system, and analytical system carries out analytical calculation to measuring result, and wherein measuring system is made up of the first laser diameter measuring instrument and the second laser diameter measuring instrument;
After deposition terminates, soot preforms is transferred to the delivery platform of dehydration-sintering furnace, prefabricated rods is put in dehydration-sintering furnace from top to bottom, hot zone temperature is risen to 1100 DEG C, 40SLPM helium is filled with in the bottom of sintering oven, 5SLPM chlorine, body of powder from top to bottom through the hot-zone of sintering oven, after completing above-mentioned dehydration procedure, measures soot preforms external diameter as schemed shown in series 3 with 400mm/min speed;
D. the embodiment of the present invention: use diameter for 30mm high purity quartz target rod in VAD method deposition, adopt two blowtorch to deposit sandwich layer and covering powder bed respectively, its center core layer is SiO
2with GeO
2mixture, covering is SiO
2with the mixture of F, soot preforms mean density is 0.25gram/cm
3, body of powder length is 1000mm; The d0 of soot preforms top geometric parameter set(ting)value intermediate value is 30mm, D1 be 35mm, D2 is 91mm, K0=D2/D1=2.6; D10 span of control is 28mm-32mm, K span of control is 0.6-0.8; Soot preforms top geometric parameter is measured in real time by measuring system, and analytical system carries out analytical calculation to measuring result, and wherein measuring system is made up of the first laser diameter measuring instrument and the second laser diameter measuring instrument;
After deposition terminates, soot preforms is transferred to the delivery platform of dehydration-sintering furnace, prefabricated rods is put in dehydration-sintering furnace from top to bottom, hot zone temperature is risen to 1100 DEG C, 40SLPM helium is filled with in the bottom of sintering oven, 5SLPM chlorine, body of powder from top to bottom through the hot-zone of sintering oven, after completing above-mentioned dehydration procedure, measures soot preforms external diameter as shown in Fig. 5 series 2 with 400mm/min speed;
More than describe preferred embodiment of the present invention in detail; Should be appreciated that those of ordinary skill in the art just design according to the present invention can make many modifications and variations without the need to creative work; Therefore, all technician in the art, all should by the determined protection domain of claims under this invention's idea on the basis of existing technology by the available technical scheme of logical analysis, reasoning, or a limited experiment;
Claims (10)
1. the manufacture method of preform, is characterized in that, its method steps is:
(1), in the geometric parameter sandwich layer diameter d 0 of the soot preforms of Deposition Control Systems input setting, end shape P0, coating layer deposition arbitrfary point, outer end, inclined-plane diameter D20 and inner arbitrfary point diameter D10, coating layer slope K 0=(D2-D10)/2h (h is vertical height between the upper and lower measurement point of coating layer), and the span of control of d0, P0 and K0;
(2), start deposition after, the first blowtorch soot preforms end deposition sandwich layer, the second blowtorch sandwich layer outside deposition coating layer;
Laser measurement sandwich layer diameter d 1 on first laser diameter measuring instrument, lower laser measurement soot preforms end shape P0; On second laser diameter measuring instrument, laser measurement coating layer deposition arbitrfary point, outer end, inclined-plane diameter D2 and lower laser measurement inner arbitrfary point diameter D1, upper and lower laser spots vertical range h, obtain coating layer slope K 1=(D2-D1)/2h;
(3), laser diameter measuring instrument carries out sweep measurement to the top of soot preforms in real time, and analytical system is by deposited powder prefabricated rods measuring result d1, and the parameter d 0, P0 of P1 and K1 and setting and K0 contrast, and comparing result is fed back to Controlling System;
(4), Controlling System by the reactant flow of adjustment first blowtorch, the relative position of fuel and ignition dope flow and blowtorch makes the soot preforms sandwich layer diameter d 1 of deposition be in span of control;
Controlling System, by regulating target rod pulling speed, makes soot preforms end shape P1 fluctuate around Systematical control intermediate value P0;
Controlling System is by the reactant flow of adjustment second blowtorch, and the relative position of fuel and ignition dope flow and blowtorch makes coating layer deposition inclined-plane slope K 1 be in span of control;
(5), analytical system to Controlling System regulate after result judge, as regulated the soot preforms geometric parameter of rear deposition within the relevant parameter span of control of default, then continue deposition;
(6), Controlling System continues to regulate target rod pulling speed to make the soot preforms end shape P1 of deposition consistent with set(ting)value P0, regulate the reactant flow of the first blowtorch, fuel makes the soot preforms sandwich layer diameter d 1 of deposition consistent with set(ting)value d0 with the relative position of ignition dope flow and blowtorch; Controlling System regulates the reactant flow of target rod the second blowtorch, and fuel makes coating layer deposition inclined-plane slope K 1 consistent with set(ting)value K0, until deposition terminates with the relative position of ignition dope flow and blowtorch;
(7), as the end shape P1 of soot preforms after regulating, sandwich layer diameter d 1 and any one deposition in inclined-plane slope K 1 of coating layer exceed the relevant parameter span of control of default, then deposit stopping;
(8), soot preforms to be transferred to dehydration-sintering furnace and carries out dehydration sintering by deposition after terminating, and the solid bar after condensation is stretched to specific external diameter, recycles epiboly outsourcing covering, finished product preform.
2. the manufacture method of preform according to claim 1, it is characterized in that, the controling parameters of the soot preforms of the setting in described step (1) comprises: the column sandwich layer outside diameter d 0, end shape P0 of deposited powder prefabricated rods, slope K 0 outside coating layer deposition inclined-plane.
3. the manufacture method of preform according to claim 1, is characterized in that, the controling parameters d0 of the soot preforms of the setting in described step 1, P0 and K0 has corresponding span of control respectively.
4. the manufacture method of preform according to claim 1, is characterized in that, in the deposition process in described step 1, and the first blowtorch deposition SiO
2with GeO
2mixture, as sandwich layer; Second blowtorch deposition covering is pure SiO
2or SiO
2with the mixture of F, as coating layer.
5. the manufacture method of preform according to claim 1, is characterized in that, the first blowtorch in described step 4 is with SiCl
4and GeCl
4mixture as reactant, with H
2as fuel, with O
2as ignition dope, with N
2or Ar is as protection gas.
6. the manufacture method of preform according to claim 1, is characterized in that, the second blowtorch in described step 4 is with SiCl
4or SiCl
4with the mixture of fluoro-gas as reactant, with H
2as fuel, with O
2as ignition dope, with N
2or Ar is as protection gas.
7. the manufacture method of preform according to claim 1, is characterized in that, the target rod pulling speed in described step 4 is determined by Laser Measurement measured value under the first laser and set(ting)value.
8. the manufacture method of preform according to claim 1, is characterized in that, the relative position of the blowtorch in described step 4 comprises the horizontal throw of blowtorch and target rod vertical axis and the relative angle of blowtorch and target rod vertical axis; Described target rod is made up of high temperature ceramic material or quartz material.
9. the manufacture method of preform according to claim 1, it is characterized in that, on the second laser diameter measuring instrument in described step 2, coating layer deposition arbitrfary point, outer end, the inclined-plane diameter D2 range of choice of laser measurement is D2≤coating layer diameter D0 × 95%, and the inner arbitrfary point diameter D1 range of choice of lower laser measurement is D1 >=sandwich layer diameter d 0 × 105%.
10. the manufacture method of preform according to claim 1, is characterized in that, the measuring system of described manufacture method, Controlling System, analytical system forms closed cycle, in deposition process, and measuring system, Controlling System, analytical system is in real-time monitoring, regulates, in decision state.
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