CN108133918A - Micro capillary groove evaporator - Google Patents

Micro capillary groove evaporator Download PDF

Info

Publication number
CN108133918A
CN108133918A CN201810143996.XA CN201810143996A CN108133918A CN 108133918 A CN108133918 A CN 108133918A CN 201810143996 A CN201810143996 A CN 201810143996A CN 108133918 A CN108133918 A CN 108133918A
Authority
CN
China
Prior art keywords
micro
electrode
heat sink
heat
capillary groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201810143996.XA
Other languages
Chinese (zh)
Other versions
CN108133918B (en
Inventor
胡学功
唐瑾晨
于樱迎
何雨
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institute of Engineering Thermophysics of CAS
Original Assignee
Institute of Engineering Thermophysics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institute of Engineering Thermophysics of CAS filed Critical Institute of Engineering Thermophysics of CAS
Priority to CN201810143996.XA priority Critical patent/CN108133918B/en
Priority claimed from CN201810143996.XA external-priority patent/CN108133918B/en
Publication of CN108133918A publication Critical patent/CN108133918A/en
Application granted granted Critical
Publication of CN108133918B publication Critical patent/CN108133918B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/42Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
    • H01L23/427Cooling by change of state, e.g. use of heat pipes

Abstract

Present disclose provides a kind of micro capillary groove evaporator, hot face and radiating surface are taken including micro-nano compound structure surface is heat sink, wherein, there is hydrophilic nano coating on micro-nano compound structure surface is heat sink;Hot face and radiating surface is taken to surround a closed cavity, contains liquid working substance in closed cavity, in the cavity, the heat sink application high voltage electric field to micro-nano compound structure surface forms EHD effects.The ultra-high surface that hydrophilic nano coating has on the micro-nano compound structure surface of the micro capillary groove evaporator of the disclosure can enhance surface energy and roughness of the liquid working substance in micro-channel, improve surface wetting characteristic, electric field action applies directional draw to liquid working substance, increase the mass flow of liquid working substance, so that heat sink occur continual high-strength composite phase-change heat-exchange, the exchange capability of heat of radiator is enhanced.

Description

Micro capillary groove evaporator
Technical field
The disclosure belongs to enhanced heat exchange and electrical cooling field, and in particular to a kind of micro capillary groove evaporator.
Background technology
With microelectronics and the high speed development of MEMS, chip integration and performance are continuously improved so that electricity Sub- equipment tends to high-power, miniaturization.Thus the calorific value of device is also significantly increased, if heat cannot be arranged in time Go out, it will serious stability, reliability or even the collapse for causing system for reducing device and system.Therefore heat dissipation is high-power Critical bottleneck problem in the design of high power density power electronic devices and manufacture.When heat flow density be more than 150W/cm2, More than stock size surface occur pool boiling phase-change heat-exchange critical heat flux density, may be defined as superelevation heat flow density, at this time into Capable heat transfer process is known as superpower heat exchange.
Micro slot group composite phase change heat transfer technology is set with the features such as its coefficient of heat transfer height, the operation is stable in high-power electric and electronic It is used widely in standby, it utilizes three-phase line of contact at the extension meniscus that liquid working substance is formed by capillary force in microflute The nucleate boiling of thickness liquid film region liquid working substance answers at the high intensity evaporation in neighbouring evaporation thin film region and intrinsic meniscus Phase-change heat-exchange mechanism is closed, the exchange capability of heat of high intensity is realized, is a kind of novel high-performance minute yardstick phase-change heat-exchange technology.But Be, under superelevation heat flow density under the conditions of, the liquid working substance in microflute group can be from top to bottom by with heat source heat flow density Constantly increase and generate it is dry, if it is dry it is lasting occur, liquid working substance can not be replenished in time, and extend high-strength on meniscus Degree evaporation will be unable to occur, and the heat exchange of the composite phase-change of high intensity can not also carry out, the exchange capability of heat that microflute group basis is heat sink by Greatly deteriorate.Therefore, when liquid working substance along microflute flowing institute it is attainable extension meniscus on wet length become make The about key point of microflute group exchange capability of heat.
The micro slot group composite phase change heat exchange skill proposed for technological deficiency existing for the cold heat transfer technology of existing air-cooled or liquid Heat dissipation of many researchs that art and technique device in combination carry out to solution device for high-power power electronic or system Problem has certain effect, but does not obtain obvious achievement.When power is increasing suffered by device, the hot-fluid faced is close When degree is also higher and higher, situation that is dry too early and leading to heat transfer deterioration easily occurs for the liquid working substance in microflute.When heat source work( When rate is increasing, heating power is also increasing, and the heat flow density being applied on microflute group's heating surface is also increasing, micro- Heated liquid evaporation aggravation on extension meniscus in slot, liquid film is gradually thinning, and flow resistance increases, and wet length reduces, heat dissipation Ability declines.
Invention content
(1) technical problems to be solved
Present disclose provides a kind of micro capillary groove evaporator, at least partly to solve the technical issues of set forth above.
(2) technical solution
Present disclose provides a kind of micro capillary groove evaporator, including:Hot face is taken, is connect by Heat Conduction Material with heat source, is wrapped It includes:Microflute group is heat sink;And nano coating, the heat sink surface of microflute group is created on, it is compound with the heat sink composition micro-nano of microflute group Body structure surface is heat sink;Radiating surface with hot face is taken to surround a closed cavity, contains liquid working substance in closed cavity;And electrode, It is set in closed cavity, connect high voltage power supply, it is heat sink to micro-nano compound structure surface on liquid working substance apply electric field;Its In, after heat source releases heat, hot face is taken to receive and transmits the heat of heat source generation, the evaporation and boiling of high intensity occur for closed cavity Composite phase-change exchanges heat, and the heat of releasing is shed by several radiated ribs being connected with radiator to external environment.
In some embodiments of the present disclosure, closed cavity both ends are provided with electrode outlet, and wherein the electrode of one end is with drawing Go out terminal to be connected as a single entity, and electric wire is drawn in the upper end of closed cavity and is connect with high voltage power supply, electrode leading-out terminal passes through electricity Polar cushion piece and clamp nut are fixed on the outside of closed cavity, the lower end electrode exit that the line electrode of the other end passes through cavity Ground connection is drawn after son, electrode pads and clamp nut connection.
In some embodiments of the present disclosure, electrode is line electrode, mesh electrode, plate electrode or needle electrode.
In some embodiments of the present disclosure, the radius of line electrode is 0.001~1mm, and length is 1~500mm, with microflute The axially vertical distance that group is heat sink is 0.1~100mm;Mesh electrode length and width are 1~100mm, and thickness is 0.5~10mm, netted The mesh equivalent diameter of electrode is 0.0001~1mm, is 0.1~100mm with the heat sink axially vertical distance of microflute group;Tablet electricity The length and width of pole are 1~100mm, and thickness is 0.5~10mm, and the positive and negative anodes vertical interval of plate electrode is 10~100mm;Needle-shaped electricity The radius of curvature of pole needle point is 0.01~1mm, is 0.1~100mm with the axially vertical distance of microflute group.
In some embodiments of the present disclosure, the voltage of high voltage power supply is 1~50kV.
In some embodiments of the present disclosure, line electrode, the liquid working substance that the microflute group of mesh electrode is heat sink are insulation work Matter;Plate electrode, the liquid working substance that the microflute group of needle electrode is heat sink are insulation working medium or conductive working medium;Insulation working medium be FC72, R113, R123, R141 or pentane;Conductive working medium is distilled water or ethyl alcohol.
In some embodiments of the present disclosure, nano coating is nanoscale planar structures or nanoscale protrusion;Nanometer applies The material of layer is metal, metal oxide, metal fluoride, semi-conducting material or organic polymer coating;The thickness of nano coating It spends for 0~1000nm.
In some embodiments of the present disclosure, the surface texture that microflute group is heat sink is micron grooves channel array structure, nanometer slot Channel array structure or micro-nano composite slot channel array structure;The micro-channel cross section that microflute group is heat sink is rectangle, triangle or trapezoidal, Equivalent diameter is 10-3~1000 μm;The material that microflute group is heat sink is metal, metal oxide, metal nitride, semiconductor material Material, glass or ceramics.
In some embodiments of the present disclosure, the cross section of closed cavity is rectangle, rectangular, triangle or sector;Closing Cavity is air chamber or vacuum chamber.
In some embodiments of the present disclosure, it is 0 °~180 ° that micro-nano compound structure surface is heat sink with horizontal direction angle.
(3) advantageous effect
It can be seen from the above technical proposal that disclosure micro capillary groove evaporator at least have the advantages that wherein it One:
(1) ultra-high surface that hydrophilic nano coating has on micro-nano compound structure surface can enhance liquid working substance and exist Surface energy and roughness in micro-channel, improve surface wetting characteristic, so that heat sink occur continual high intensity Composite phase-change exchanges heat, and enhances heat sink exchange capability of heat;
(2) liquid working substance is applied directional and is led by Coulomb force, dielectrophoresis force and the electroluminescent convergent force under electric field action The effect of drawing increases the mass flow of liquid working substance, reduces thermal resistance, effectively lifts capillary wetting length of the liquid working substance in micro-channel Degree;
(3) wet length of microflute group work is improved, quickly the liquid working substance in micro-channel is effectively and timely mended It fills, prevents the constricted flow of liquid working substance and dry situation under the conditions of higher thermal current density, optimization liquid film distribution is further strong Changed the high intensity evaporation and heat-exchange performance of extension meniscus liquid working substance in microflute group, avoid the heat exchange of dry initiation unstable and The generation of deterioration;
(4) due to quickly can effectively and timely be supplemented the liquid working substance in micro-channel, so heat dissipation can be solved In device liquid working substance filling it is excessive the problem of so that radiator is light, small size, lightweight;
(5) by nano coating and electric field action, radiator has the ability of superpower heat exchange, so relatively energy saving, consumption Power is smaller;
(6) since radiator is light, small, so having a wide range of application.
Description of the drawings
Fig. 1 is the vertical view of micro capillary groove evaporator in the first embodiment of the present disclosure.
Fig. 2 a are the rectangular cross section schematic diagram of radiator closed cavity shown in Fig. 1.
Fig. 2 b are the square cross section schematic diagram of radiator closed cavity shown in Fig. 1.
Fig. 2 c are the triangular cross section schematic diagram of radiator closed cavity shown in Fig. 1.
Fig. 2 d are the fan shaped cross section schematic diagram of radiator closed cavity shown in Fig. 1.
Fig. 3 is first embodiment of the present disclosure central electrode in the structure of radiator closed cavity and sealing arrangement form.
The schematic diagram that Fig. 4 is heat sink for microflute group in micro capillary groove evaporator in the first embodiment of the present disclosure.
Fig. 5 is the microflute group structure figure that nano coating is nanoscale planar structures in the first embodiment of the present disclosure.
Fig. 6 is the microflute group structure figure that nano coating is nanoscale protrusion in the first embodiment of the present disclosure.
Fig. 7 is first embodiment of the present disclosure central electrode schematic diagram.
Fig. 8 is first embodiment of the present disclosure center line array electrode schematic diagram.
Fig. 9 is that EHD strengthens the heat sink wetting spy in micro-nano compound structure surface in closed cavity in the first embodiment of the present disclosure The design sketch of property and heat exchange property.
The schematic diagram that Figure 10 is heat sink for microflute group in micro capillary groove evaporator in the second embodiment of the present disclosure.
The schematic diagram that Figure 11 is heat sink for microflute group in micro capillary groove evaporator in the third embodiment of the present disclosure.
The schematic diagram that Figure 12 is heat sink for microflute group in micro capillary groove evaporator in the fourth embodiment of the present disclosure.
【Embodiment of the present disclosure main element symbol description in attached drawing】
10- micro-nano compound structures surface is heat sink;
11- microflute groups are heat sink;12- nanoscale planar structures;
13- nanoscale protrusions;
20- electrodes;
21- line electrodes;22- linear array electrodes;
23- mesh electrodes;24- needle electrodes;
25- plate electrodes;26- electrode leading-out terminals;
27- clamp nuts;28- electrode pads;
30- takes hot face;
40- liquid working substances;
The closed cavity of 50- radiators;
51- radiator closed cavities rectangular section;52- radiator closed cavities square-section;
53- radiator closed cavities triangular-section;54- radiator closed cavity sector crosssections;
60- high voltage power supplies;
70- electric wires;
The fin of 80- radiators.
Specific embodiment
Present disclose provides a kind of micro capillary groove evaporator, hot face and radiating surface are taken including micro-nano compound structure surface is heat sink, Wherein, micro-nano compound structure surface it is heat sink on have hydrophilic nano coating;Hot face and radiating surface is taken to surround a closed cavity, is sealed Contain liquid working substance in closed chamber body, in the cavity, the heat sink application high voltage electric field to micro-nano compound structure surface forms EHD effects. The ultra-high surface that hydrophilic nano coating has on the micro-nano compound structure surface of the micro capillary groove evaporator of the disclosure can be strengthened Surface of the liquid working substance in micro-channel can and roughness, improve surface wetting characteristic, electric field action applies liquid working substance It reorders to draw, increases the mass flow of liquid working substance so that is heat sink that continual high-strength composite phase inversion occurs Heat enhances the exchange capability of heat of radiator.
Purpose, technical scheme and advantage to make the disclosure are more clearly understood, below in conjunction with specific embodiment, and reference The disclosure is further described in attached drawing.
Disclosure some embodiments will be done with reference to appended attached drawing in rear and more comprehensively describe to property, some of but not complete The embodiment in portion will be shown.In fact, the various embodiments of the disclosure can be realized in many different forms, and should not be construed To be limited to this several illustrated embodiment;Relatively, these embodiments are provided so that the disclosure meets applicable legal requirement.
In first exemplary embodiment of the disclosure, a kind of micro capillary groove evaporator is provided.
Fig. 1 is the vertical view of first embodiment of the present disclosure micro capillary groove evaporator.As shown in Figure 1, its appearance is a heronsbill The radiator of type, disclosure micro capillary groove evaporator include that micro-nano compound structure surface is heat sink takes hot face 30 and radiating surface 90, wherein, There is hydrophilic nano coating on micro-nano compound structure surface is heat sink;Hot face 30 and radiating surface 90 is taken to connect and surround a closed cavity 50, closed cavity 50 is interior containing a certain amount of liquid working substance, and in the cavity, heat sink to micro-nano compound structure surface by electrode Apply high voltage electric field, form EHD effects;Heat source is by high thermal conductivity material heat-conducting silicone grease, heat conductive silica gel or graphite and takes hot face 30 connections.
In closed cavity 50, liquid working substance is injected, high voltage electric field is applied to liquid working substance, microflute group answers in itself micro-nano Under the driving for closing capillary structure effect, a part of liquid working substance enters in micro-channel and the certain altitude that climbs.In micro-channel face Wired electrodes are arranged on the surface, liquid working substance is climbed in time under the electric field force effect of positive very high voltage by drives edge micro-channel Higher moistening height is raised to, the composite phase-change heat exchange effect of superhigh intensity evaporation and boiling occurs.After heat source releases heat, take Hot face 30 receives and transmits the heat of heat source generation, and the evaporation of high intensity and boiling composite phase-change heat exchange occur in cavity, releasing Heat is shed by several radiated ribs 80 being connected with radiator to external environment.
Each component part of the present embodiment micro capillary groove evaporator is described in detail individually below.
Fig. 2 a~2d are the cross-sectional view of radiator closed cavity shown in Fig. 1.As shown in Fig. 2 a~2d, radiator envelope The cross section of closed chamber body 50 is rectangle (as shown in Figure 2 a), rectangular (as shown in Figure 2 b), triangle (as shown in Figure 2 c), sector (as shown in Figure 2 d).Closed cavity 50 is air chamber or vacuum chamber.
Fig. 3 is first embodiment of the present disclosure central electrode in the structure of radiator closed cavity and sealing arrangement form.Such as Shown in Fig. 3,50 both ends of radiator closed cavity are provided with electrode outlet 26, and the wherein electrode of one end is linked as one with electrode terminal Body, and draw electric wire 70 in the upper end of closed cavity, electric wire 70 is connect after drawing with high voltage power supply 60, electrode leading-out terminal 26 More than 50 outside of closed cavity of radiator, it is attached and fixes by electrode pads 28 and clamp nut 27.Closed cavity For metal cavitg, the line electrode 21 of the lower end other end of cavity is contacted, and pass through electrode and draw by electric wire one end with inside cavity Go out and ground connection is drawn after terminal 26 is connect with electrode pads 28 and clamp nut 27.
Fig. 4 is the heat sink schematic diagram with electrode of microflute group in micro capillary groove evaporator in the first embodiment of the present disclosure.Such as Fig. 4 institutes Showing, micro-nano compound structure surface is heat sink including microflute group heat sink 11 and nano coating 12, wherein, nano coating 12 is created on microflute The surface of group heat sink 11, heat sink with microflute group 11 form micro-nano compound structure surface heat sink 10;Electrode 20 is line electrode, is connected High voltage power supply, the liquid working substance on heat sink to micro-nano compound structure surface 10 apply electric field.
As shown in figure 4, the surface texture of microflute group heat sink 11 for micron grooves channel array structure, nanometer conduit array structure or Micro-nano composite slot channel array structure.
Microflute group is heat sink 11 micro-channel cross section for rectangle, triangle or trapezoidal;Microflute group is heat sink 11 micro-channel it is horizontal The equivalent diameter in section is 10-3~1000 μm;Microflute group is heat sink 11 surfacing for metal, metal oxide, nitride metal Object, semi-conducting material, glass or ceramics.
A length of 80~the 150mm of apparent size that microflute group is heat sink, width are 20~50mm;The size of conduit for groove depth 0.05~ 1mm, 0.05~1mm of groove width, 0.05~1mm of separation;
Nano coating 12 be nanoscale planar structures or nanoscale protrusion, wherein;Nano coating is nanometer-level plane knot The microflute group structure figure of structure is as shown in figure 5, nano coating is as shown in Figure 6 for the microflute group structure figure of nanoscale protrusion.Nanometer Coating is for strengthening micro-structure surface hydrophily, roughness, increases micro-structure surface surface energy.
The material of nano coating 12 is metal, metal oxide, metal fluoride, semi-conducting material or organic polymer apply Material;Hydrophilic coating is aluminium oxide, titanium oxide or zinc oxide;The thickness of nano coating 12 is 0~1000nm.
Electrode 20 is line electrode in the present embodiment, and line electrode includes single line electrode shown in Fig. 7 and line shown in Fig. 8 Array electrode.
And liquid working substance line electrode arrangement is characterized in line electrode as anode, and one end is above liquid working substance, i.e., It does not contact, the other end is immersed in liquid working substance.Cathode is the array frid or other charged metal structures of micro-nano compound structure Shell.
Fig. 7 is please referred to, line electrode radius is 0.3~1mm, and length is 50~150mm, and liquid working substance did not had line electrode height 5~20mm is adjusted with heat sink axially vertical distance in 1~20mm.
In the present embodiment, high voltage control is adjusted in the range of 2~20kV.
Liquid working substance is insulating liquid working medium, including FC72, R113, R123, R141, pentane etc..
It is vacuum condition or condition of normal pressure in closed cavity.
It should be noted that electrode 20 can also be mesh electrode, plate electrode and needle electrode.
So far, the introduction of first embodiment of the present disclosure micro capillary groove evaporator finishes.
Fig. 9 is the design sketch that EHD strengthens the heat sink wetting characteristics in micro-nano compound structure surface and heat exchange property in closed cavity. As shown in figure 9, microflute group is heat sink in the embodiment of the present disclosure realizes superpower heat exchange by following two aspects:
(1) nano coating is prepared on microflute group is heat sink, forms micro-nano compound structure surface heat sink 10.Nano coating has Hydrophily, stability, nano coating effect are the wetabilitys by strengthening microflute group's heat sink surface, improve the capillary profit of microflute group Wet ability makes micro-nano compound structure heat sink in angle of inclination even vertical placement, and capillary moistening height is higher, realizes effect As shown in Figure 9.
In application, heat source 30 is connected by high thermal conductivity materials such as heat-conducting silicone grease, heat conductive silica gel, graphenes, heat conduction To microflute, group is heat sink, and the vertical micro-nano compound structure heat sink 10 for placing application is made first in the capillary of its own micro-nano compound structure Under, liquid working substance 40 climbs along its array micro-channel to certain moistening height, when the superelevation hot-fluid that heat source 40 distributes is close When degree is inputted perpendicular to heat sink direction, heat sink heat exchange surface major part region is wetted, and extension bent moon occurs in microflute at this time The high-strength composite phase-change heat-exchange of the nucleate boiling of the evaporation in thin liquid film region and thick liquid film, strengthens changing for liquid working substance 40 on face Hot property.The spreader surface that heat is delivered to outside closed cavity 50 simultaneously radiates.In closed cavity 50, occur compound The steam of phase-change heat-exchange encounters peripheral wall surface and condenses, and condensing droplet, which reenters, realizes cycle in liquid working substance.
(2) electric field applied in micro-nano compound structure heat sink surface to liquid working substance generates EHD effects, the effect realized Fruit is as shown in Figure 9.
In application, collective effect of the EHD effects by the Coulomb force of electric field, dielectrophoretic force and electroluminescent convergent force, once Occur under superelevation heat flow density, in micro-channel part it is dry when, the various different forms arranged on the surface that is faced in conduit Electrode 20 liquid working substance 40 on micro-nano compound structure surface 10 is acted, liquid working substance is on the one hand generated Existing moistening height is lifted in time under electric field force effect, hydrophilic nano coating on another aspect micro-nano compound structure surface The ultra-high surface having also can further strengthen the wetting characteristics of microflute, so that heat sink occur continual high intensity Composite phase-change exchanges heat, and not only enhances heat sink exchange capability of heat, but also improve heat sink be resistant to critical heat flux density, finally makes The heat sink heating problem that can solve high-power, superelevation heat flow density power electric component, further, the heat quilt of releasing It is transmitted to outside closed cavity and carries out cooling.Heat sink timely fluid infusion ability ensure that the reliable of heat sink superpower heat exchange property Property.
In second exemplary embodiment of the disclosure, a kind of micro capillary groove evaporator is provided.Figure 10 is the disclosure the The heat sink schematic diagram with electrode of microflute group in two embodiment micro capillary groove evaporators.As shown in Figure 10, with the microflute of first embodiment Group radiator is compared, the present embodiment micro capillary groove evaporator difference lies in:
Electrode is mesh electrode 23.The form of this electrode arrangement be electrode as anode, one end is in liquid working substance Above, i.e., it is not contacted with liquid working substance, the other end is immersed in liquid working substance.Cathode for micro-nano compound structure array frid or The shell of other charged metal structures.
A length of 80~the 150mm of apparent size of mesh electrode, width for 20~50mm, (if mesh electrode, then work as by mesh Measure a diameter of 0.5~1mm), liquid working substance did not had mesh electrode 5~20mm of height, with heat sink axially vertical distance in 1~20mm In the range of adjust.
In closed cavity, liquid working substance is injected, high voltage electric field is applied to liquid working substance, microflute group is compound in itself micro-nano Under the driving of capillary structure effect, a part of liquid working substance enters in micro-channel and the certain altitude that climbs.It is faced in micro-channel Surface on be disposed with Figure 10 mesh electrodes, liquid working substance under the electric field force effect of positive very high voltage by drives edge micro-channel and When climb to higher moistening height, the composite phase-change heat exchange effect of superhigh intensity evaporation and boiling occurs.
In order to achieve the purpose that brief description, in above-described embodiment one, any technical characteristic narration for making same application is all And in this, without repeating identical narration.
So far, a kind of micro capillary groove evaporator introduction of the second embodiment of the present disclosure finishes.
In the third exemplary embodiment of the disclosure, a kind of micro capillary groove evaporator is provided.
Fig. 1] it is the heat sink schematic diagram with electrode of microflute group in third embodiment of the present disclosure micro capillary groove evaporator.Such as Figure 11 institutes Show, compared with the micro capillary groove evaporator of first embodiment, the present embodiment micro capillary groove evaporator difference lies in:
Electrode is needle electrode 24, this kind of electrode arrangement form vacantly arranges that cathode is answered for micro-nano as anode for electrode Close the array frid of structure or the shell of other charged metal structures.
The radius of curvature of needle electrode needle point is 0.05~0.5mm, can be in 1~20mm ranges with heat sink axially vertical distance Interior adjusting.
It can be insulating liquid working medium that liquid working substance, which is, including FC72, R113, R123, R141, pentane etc.;It can also For conductive working medium, including distilled water, ethyl alcohol etc..
It is condition of normal pressure in closed cavity.
In closed cavity, liquid working substance is injected, high voltage electric field is applied to liquid working substance, microflute group is compound in itself micro-nano Under the driving of capillary structure effect, a part of liquid working substance enters in micro-channel and the certain altitude that climbs.It is faced in micro-channel Surface on be disposed with needle electrode shown in Figure 11, needle electrode generates suction force, lifting is in battle array in time by ionized air In row channel structure there is the liquid working substance of certain altitude, moistening height is made further to be promoted, superhigh intensity evaporation and boiling occurs The composite phase-change heat exchange effect risen.
In order to achieve the purpose that brief description, in above-described embodiment one, any technical characteristic narration for making same application is all And in this, without repeating identical narration.
So far, a kind of micro capillary groove evaporator introduction of the third embodiment of the present disclosure finishes.
In the 4th exemplary embodiment of the disclosure, a kind of micro capillary groove evaporator is provided.
Figure 12 is the heat sink schematic diagram with electrode of microflute group in third embodiment of the present disclosure micro capillary groove evaporator.Such as Figure 12 institutes Show, compared with the microflute group of the superpower heat exchange of first embodiment is heat sink and preparation method thereof, the microflute of the superpower heat exchange of the present embodiment Group is heat sink and preparation method thereof difference lies in:
Electrode is plate electrode 25, this kind of electrode arrangement is characterized in that electrode did not had liquid as anode in closed cavity Working medium, cathode are fixed on vertical frid upper end.
The size length and width of plate electrode positive and negative anodes are 10~30mm, and anode is immersed in liquid working substance, positive electrode and negative electrode Axial distance is 40~100mm.
Liquid working substance can be insulating liquid working medium, including FC72, R113, R123, R141, pentane;Or it leads Electrician's matter, including distilled water, ethyl alcohol.
It is vacuum condition or condition of normal pressure in closed cavity.
In closed cavity, liquid working substance is injected, high voltage electric field is applied to liquid working substance, microflute group is compound in itself micro-nano Under the driving of capillary structure effect, a part of liquid working substance enters in micro-channel and the certain altitude that climbs.It is faced in micro-channel Surface on be disposed with plate electrode shown in Figure 12, since anode tablet is placed in liquid working substance, liquid working substance is just high Under the electric field force effect of voltage by drives edge micro-channel climb in time to certain moistening height, occur superhigh intensity evaporation and The composite phase-change heat exchange effect of boiling.
So far, the introduction of fourth embodiment of the present disclosure micro capillary groove evaporator finishes.
So far, attached drawing is had been combined the embodiment of the present disclosure is described in detail.According to above description, art technology Personnel should have disclosure micro capillary groove evaporator clear understanding.
It should be noted that in attached drawing or specification text, the realization method that is not painted or describes is affiliated technology Form known to a person of ordinary skill in the art in field, is not described in detail.In addition, the above-mentioned definition to each element and method is simultaneously Various concrete structures, shape or the mode mentioned in embodiment are not limited only to, those of ordinary skill in the art can carry out letter to it It singly changes or replaces.
In conclusion present disclose provides a kind of micro capillary groove evaporator, hot face is taken including micro-nano compound structure surface is heat sink And radiating surface, wherein, there is hydrophilic nano coating on micro-nano compound structure surface is heat sink;Hot face and radiating surface is taken to surround an envelope Closed chamber body contains liquid working substance in closed cavity, in the cavity, heat sink application high voltage electric field, shape to micro-nano compound structure surface Into EHD effects.The superelevation that hydrophilic nano coating has on the micro-nano compound structure surface of the micro capillary groove evaporator of the disclosure Surface can enhance surface energy and roughness of the liquid working substance in micro-channel, improve surface wetting characteristic, electric field action pair Liquid working substance applies directional draw, increases the mass flow of liquid working substance so that heat sink that continual high intensity occurs Composite phase-change exchanges heat, and enhances the exchange capability of heat of radiator.
Unless there are known entitled phase otherwise meaning, the numerical parameter in this specification and appended claims are approximations, energy Enough required characteristic changings according to as obtained by content of this disclosure.Specifically, all be used in specification and claim The number of the middle content for representing composition, reaction condition etc., it is thus understood that repaiied by the term of " about " in all situations Decorations.Under normal circumstances, the meaning of expression refers to include by specific quantity ± 10% variation in some embodiments, at some ± 5% variation in embodiment, ± 1% variation in some embodiments, in some embodiments ± 0.5% variation.
Similarly, it should be understood that in order to simplify the disclosure and help to understand one or more of each open aspect, Above in the description of the exemplary embodiment of the disclosure, each feature of the disclosure is grouped together into single implementation sometimes In example, figure or descriptions thereof.However, the method for the disclosure should be construed to reflect following intention:I.e. required guarantor The disclosure of shield requires features more more than the feature being expressly recited in each claim.More precisely, as following Claims reflect as, open aspect is all features less than single embodiment disclosed above.Therefore, Thus the claims for following specific embodiment are expressly incorporated in the specific embodiment, wherein each claim is in itself All as the separate embodiments of the disclosure.
Particular embodiments described above has carried out the purpose, technical solution and advantageous effect of the disclosure further in detail It describes in detail bright, it should be understood that the foregoing is merely the specific embodiment of the disclosure, is not limited to the disclosure, it is all Within the spirit and principle of the disclosure, any modification, equivalent substitution, improvement and etc. done should be included in the guarantor of the disclosure Within the scope of shield.

Claims (10)

1. a kind of micro capillary groove evaporator, including:
Hot face (10) is taken, is connect by Heat Conduction Material with heat source (30), including:
Microflute group is heat sink (11);And
Nano coating (12) is created on the surface of the microflute group heat sink (11), and (11) heat sink with the microflute group form micro- Nano compound structure surface is heat sink;
Radiating surface (90) takes hot face (10) to surround a closed cavity (50), contains liquid in the closed cavity (50) with described Body working medium;And
Electrode (20) is set in the closed cavity (50), connection high voltage power supply (60), to the micro-nano compound structure table Liquid working substance on face is heat sink applies electric field;
Wherein, after heat source releases heat, the heat for hot face (10) being taken to receive and transmit heat source generation, the closed cavity (50) The interior evaporation that high intensity occurs and boiling composite phase-change heat exchange, the heat of releasing pass through several cooling fins for being connected with radiator Piece (80) sheds to external environment.
2. micro capillary groove evaporator according to claim 1, wherein,
Closed cavity (50) both ends are provided with electrode outlet, and the wherein electrode of one end is connected as a single entity with leading-out terminal (26), And electric wire (70) is drawn in the upper end of closed cavity and is connect with high voltage power supply (60), the electrode leading-out terminal (26) passes through electricity Polar cushion piece (28) and clamp nut (27) are fixed on the outside of closed cavity, the lower end electrode that the line electrode of the other end passes through cavity Ground connection is drawn after leading-out terminal (26), electrode pads (28) and clamp nut (27) connection.
3. micro capillary groove evaporator according to claim 1, wherein,
The electrode (20) is line electrode, mesh electrode, plate electrode or needle electrode.
4. micro capillary groove evaporator according to claim 1, wherein,
The radius of the line electrode is 0.001~1mm, and length is 1~500mm, and the axial direction of (11) heat sink with the microflute group is hung down Straight distance is 0.1~100mm;
The mesh electrode length and width are 1~100mm, and thickness is 0.5~10mm, and the mesh equivalent diameter of the mesh electrode is 0.0001~1mm, the axially vertical distance of (11) heat sink with the microflute group is 0.1~100mm;
The length and width of the plate electrode are 1~100mm, and thickness is 0.5~10mm, and the positive and negative anodes vertical interval of plate electrode is 10 ~100mm;
The radius of curvature of the needle electrode needle point is 0.01~1mm, is 0.1~100mm with the axially vertical distance of microflute group.
5. micro capillary groove evaporator according to claim 1, wherein,
The voltage of the high voltage power supply is 1~50kV.
6. micro capillary groove evaporator according to claim 1, wherein,
The line electrode, the liquid working substance that the microflute group of mesh electrode is heat sink are insulation working medium;
The plate electrode, the liquid working substance that the microflute group of needle electrode is heat sink are insulation working medium or conductive working medium;
The insulation working medium is FC72, R113, R123, R141 or pentane;
The conduction working medium is distilled water or ethyl alcohol.
7. micro capillary groove evaporator according to claim 1, wherein,
The nano coating (12) is nanoscale planar structures or nanoscale protrusion;
The material of the nano coating (12) is metal, metal oxide, metal fluoride, semi-conducting material or organic polymer Coating;
The thickness of the nano coating (12) is 0~1000nm.
8. micro capillary groove evaporator according to claim 1, wherein,
The surface texture of the microflute group heat sink (11) is micron grooves channel array structure, nanometer conduit array structure or micro-nano are compound Conduit array structure;
The micro-channel cross section of the microflute group heat sink (11) is rectangle, triangle or trapezoidal, equivalent diameter 10-3~1000 μ m;
The material of the microflute group heat sink (11) is metal, metal oxide, metal nitride, semi-conducting material, glass or pottery Porcelain.
9. micro capillary groove evaporator according to claim 1, wherein,
The cross section of the closed cavity (50) is rectangle, rectangular, triangle or sector;
The closed cavity (50) is air chamber or vacuum chamber.
10. micro capillary groove evaporator according to claim 1, wherein,
It is 0 °~180 ° that the micro-nano compound structure surface is heat sink with horizontal direction angle.
CN201810143996.XA 2018-02-11 Micro-groove group radiator Active CN108133918B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810143996.XA CN108133918B (en) 2018-02-11 Micro-groove group radiator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810143996.XA CN108133918B (en) 2018-02-11 Micro-groove group radiator

Publications (2)

Publication Number Publication Date
CN108133918A true CN108133918A (en) 2018-06-08
CN108133918B CN108133918B (en) 2024-04-26

Family

ID=

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109631651A (en) * 2018-12-06 2019-04-16 华北电力大学 A kind of local auto-adaptive controllable immersing coupling micro-structure enhanced boiling heat transfer method
CN109855075A (en) * 2018-12-06 2019-06-07 华北电力大学 A kind of Boiling Heat Transfer Surfaces of wall surface micro-structure coupling localizing electrode
CN112366192A (en) * 2020-12-01 2021-02-12 哈尔滨工业大学 Electronic component heat abstractor based on electric field regulation and control solid-liquid phase change
CN112611240A (en) * 2020-12-10 2021-04-06 武汉大学 Device and method for enhancing condensation heat exchange by utilizing ion wind

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6708501B1 (en) * 2002-12-06 2004-03-23 Nanocoolers, Inc. Cooling of electronics by electrically conducting fluids
WO2006074583A1 (en) * 2005-01-14 2006-07-20 Hongwu Yang A plate radiator of a heat pipe type
US20080225489A1 (en) * 2006-10-23 2008-09-18 Teledyne Licensing, Llc Heat spreader with high heat flux and high thermal conductivity
US20090056917A1 (en) * 2005-08-09 2009-03-05 The Regents Of The University Of California Nanostructured micro heat pipes
CN102157470A (en) * 2011-03-08 2011-08-17 华南理工大学 Micro LHP radiating system for integrated electrofluid power pump
US20140272291A1 (en) * 2013-03-14 2014-09-18 Korea Institute Of Science And Technology Fabrication method for hydrophilic aluminum surface and hydrophilic aluminum surface body
EP2896926A1 (en) * 2014-01-17 2015-07-22 Alcatel Lucent A heat transfer apparatus
CN206073779U (en) * 2016-09-13 2017-04-05 中国科学院工程热物理研究所 A kind of micro-nano compound structure surface is heat sink
CN107084378A (en) * 2017-06-14 2017-08-22 中国科学院工程热物理研究所 LED radiator
CN208240661U (en) * 2018-02-11 2018-12-14 中国科学院工程热物理研究所 Micro capillary groove evaporator

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6708501B1 (en) * 2002-12-06 2004-03-23 Nanocoolers, Inc. Cooling of electronics by electrically conducting fluids
WO2006074583A1 (en) * 2005-01-14 2006-07-20 Hongwu Yang A plate radiator of a heat pipe type
US20090056917A1 (en) * 2005-08-09 2009-03-05 The Regents Of The University Of California Nanostructured micro heat pipes
US20080225489A1 (en) * 2006-10-23 2008-09-18 Teledyne Licensing, Llc Heat spreader with high heat flux and high thermal conductivity
CN102157470A (en) * 2011-03-08 2011-08-17 华南理工大学 Micro LHP radiating system for integrated electrofluid power pump
US20140272291A1 (en) * 2013-03-14 2014-09-18 Korea Institute Of Science And Technology Fabrication method for hydrophilic aluminum surface and hydrophilic aluminum surface body
EP2896926A1 (en) * 2014-01-17 2015-07-22 Alcatel Lucent A heat transfer apparatus
CN206073779U (en) * 2016-09-13 2017-04-05 中国科学院工程热物理研究所 A kind of micro-nano compound structure surface is heat sink
CN107084378A (en) * 2017-06-14 2017-08-22 中国科学院工程热物理研究所 LED radiator
CN208240661U (en) * 2018-02-11 2018-12-14 中国科学院工程热物理研究所 Micro capillary groove evaporator

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
戴勇;罗小平;方振鑫;: "EHD强化微细槽道沸腾传热实验研究", 中南大学学报(自然科学版), no. 05, 26 May 2011 (2011-05-26), pages 1316 - 1320 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109631651A (en) * 2018-12-06 2019-04-16 华北电力大学 A kind of local auto-adaptive controllable immersing coupling micro-structure enhanced boiling heat transfer method
CN109855075A (en) * 2018-12-06 2019-06-07 华北电力大学 A kind of Boiling Heat Transfer Surfaces of wall surface micro-structure coupling localizing electrode
CN112366192A (en) * 2020-12-01 2021-02-12 哈尔滨工业大学 Electronic component heat abstractor based on electric field regulation and control solid-liquid phase change
CN112611240A (en) * 2020-12-10 2021-04-06 武汉大学 Device and method for enhancing condensation heat exchange by utilizing ion wind

Similar Documents

Publication Publication Date Title
US10727156B2 (en) Heat spreader with high heat flux and high thermal conductivity
CN109631651B (en) Local self-adaptive controllable wettability coupling microstructure enhanced boiling heat exchange method
CN110267485B (en) Evaporation-boiling capillary core coupling liquid-supplementing capillary core combined structure
CN102378547B (en) Vapor chamber
CN104658992A (en) Novel micro heat sink provided with pin-fin array
US20220392827A1 (en) Heat dissipation structure and heat dissipation system
CN109979900A (en) A kind of microchannel of GaN HEMT device substrate grade-nanoporous composite construction evaporator
CN110234214A (en) A kind of electric drive liquid metal heat radiation component
CN208237524U (en) LED lamp
CN208240662U (en) Microflute group is heat sink
CN208240661U (en) Micro capillary groove evaporator
CN108133918A (en) Micro capillary groove evaporator
CN2720631Y (en) Fin heat-tube radiator
CN103824825B (en) Micro-channel phase change heat exchange device
CN105696056A (en) Heat exchanger with condensate drop self-repelling function nanolayer
CN108302347A (en) Led lamp
CN108155164A (en) Microflute group is heat sink and preparation method thereof
CN205420261U (en) Layer structure is scribbled in metal heat diffuser's heat dissipation
CN204534200U (en) A kind of LED bay light
CN110220236A (en) Heating module and heating system
CN108133918B (en) Micro-groove group radiator
CN105860938B (en) Strengthen the graphite film and preparation method thereof of critical heat flux density
CN206469225U (en) A kind of heat abstractor and the bulkhead lamp with the heat abstractor
CN215871887U (en) Tubular heating device and heating equipment
CN112781421B (en) Ultrathin heat pipe with bionic liquid absorption core

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant