CN108110085A - A kind of method for inhibiting crystal silicon cell photo attenuation - Google Patents

A kind of method for inhibiting crystal silicon cell photo attenuation Download PDF

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Publication number
CN108110085A
CN108110085A CN201711352636.2A CN201711352636A CN108110085A CN 108110085 A CN108110085 A CN 108110085A CN 201711352636 A CN201711352636 A CN 201711352636A CN 108110085 A CN108110085 A CN 108110085A
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CN
China
Prior art keywords
silicon chip
photo attenuation
crystal silicon
cell photo
minutes
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Pending
Application number
CN201711352636.2A
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Chinese (zh)
Inventor
何广东
金井升
张昕宇
金浩
赵世杰
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Zhejiang Jinko Solar Co Ltd
Jinko Solar Co Ltd
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Zhejiang Jinko Solar Co Ltd
Jinko Solar Co Ltd
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Application filed by Zhejiang Jinko Solar Co Ltd, Jinko Solar Co Ltd filed Critical Zhejiang Jinko Solar Co Ltd
Priority to CN201711352636.2A priority Critical patent/CN108110085A/en
Publication of CN108110085A publication Critical patent/CN108110085A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
    • H01L21/228Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a liquid phase, e.g. alloy diffusion processes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/547Monocrystalline silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Photovoltaic Devices (AREA)

Abstract

This application discloses it is a kind of inhibit crystal silicon cell photo attenuation method, including:The organic solution with preset concentration is uniformly distributed on silicon chip after making herbs into wool;Dry the silicon chip;In inert gas atmosphere, anneal to the silicon chip, the carbon atom in the organic solution is decomposited to come and diffuse into the silicon chip.The method of above-mentioned inhibition crystal silicon cell photo attenuation, can inhibit the generation of boron oxygen pair, reduce the photo attenuation amplitude of solar battery sheet.

Description

A kind of method for inhibiting crystal silicon cell photo attenuation
Technical field
The invention belongs to photovoltaic apparatus technical field, more particularly to a kind of side for inhibiting crystal silicon cell photo attenuation Method.
Background technology
At present, boron-doping P-type crystal silicon solar cell is the product for occupying photovoltaic market more than 70%.However, this kind of sun Energy battery is present with the phenomenon that efficiency declines when in use, which is referred to as photo attenuation (Light-induced degradation:LID), it is 2% to 3% that polycrystalline cell decay ratio is opposite, and monocrystalline attenuation ratio is up to 3% to 5%.Light Induced attenuation is as the B-O in silicon to caused by (boron oxygen to), the B-O is to easily capturing few son so that minority carrier life time declines, and causes Battery conversion efficiency declines, i.e. photo attenuation phenomenon.
In order to improve photo attenuation problem, the concentration of boron or oxygen can be reduced at silicon chip end, be combined into so as to reduce B and O The probability of complex, to reach the amplitude for reducing photo attenuation, such as casting silicon chip during silicon reduced using zone-melting process Oxygen content in piece uses instead and mixes Ga replacements and mix B to reduce Boron contents, but production cost can be significantly increased, and is unfavorable for scale Metaplasia is produced, and in addition the congeners of doped silicon can also inhibit its photo attenuation, such as carbon dope element in crystalline silicon, and carbon Segregation coefficient is much smaller than 1, carbon atom is caused to be unevenly distributed during ingot casting, so as to affect the optical attenuation of each region silicon chip Amplitude differs, and practicability substantially reduces.
The content of the invention
To solve the above problems, the present invention provides a kind of methods for inhibiting crystal silicon cell photo attenuation, can inhibit The generation of boron oxygen pair reduces the photo attenuation amplitude of solar battery sheet.
A kind of method for inhibiting crystal silicon cell photo attenuation provided by the invention, including:
The organic solution with preset concentration is uniformly distributed on silicon chip after making herbs into wool;
Dry the silicon chip;
In inert gas atmosphere, anneal to the silicon chip, the carbon atom in the organic solution is decomposited Come and diffuse into the silicon chip.
Preferably, in the method for above-mentioned inhibition crystal silicon cell photo attenuation, the organic solution is molten for glucose Liquid.
Preferably, in the method for above-mentioned inhibition crystal silicon cell photo attenuation, the scope of the preset concentration is 0.5mol/L to 1.0mol/L.
Preferably, in the method for above-mentioned inhibition crystal silicon cell photo attenuation, the drying silicon chip is:
At a temperature of 100 DEG C to 150 DEG C, the silicon chip is dried, continues 5 minutes to 10 minutes.
Preferably, in the method for above-mentioned inhibition crystal silicon cell photo attenuation, the inert gas is nitrogen.
Preferably, it is described that annealing bag is carried out to the silicon chip in the method for above-mentioned inhibition crystal silicon cell photo attenuation It includes:
At a temperature of 300 DEG C to 400 DEG C, first time annealing is carried out to the silicon chip, continues 5 minutes to 10 minutes;
At a temperature of 400 DEG C to 500 DEG C, second is carried out to the silicon chip and is annealed, continues 20 minutes to 30 minutes.
By foregoing description, the method for above-mentioned inhibition crystal silicon cell photo attenuation provided by the invention, due to bag It includes and the organic solution with preset concentration is uniformly distributed on the silicon chip after making herbs into wool;Dry the silicon chip;In inert gas gas It in atmosphere, anneals to the silicon chip, the carbon atom in the organic solution is decomposited to come and diffuse into the silicon chip, Therefore the generation of boron oxygen pair can be inhibited, reduce the photo attenuation amplitude of solar battery sheet.
Description of the drawings
It in order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing There is attached drawing needed in technology description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this The embodiment of invention, for those of ordinary skill in the art, without creative efforts, can also basis The attached drawing of offer obtains other attached drawings.
Fig. 1 is the schematic diagram of the method for the first inhibition crystal silicon cell photo attenuation provided by the embodiments of the present application.
Specific embodiment
The core concept of the present invention is to provide a kind of method for inhibiting crystal silicon cell photo attenuation, can inhibit boron oxygen To generation, reduce the photo attenuation amplitude of solar battery sheet.
Below in conjunction with the attached drawing in the embodiment of the present invention, the technical solution in the embodiment of the present invention is carried out clear, complete Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, those of ordinary skill in the art are obtained every other without making creative work Embodiment belongs to the scope of protection of the invention.
The method of the first inhibition crystal silicon cell photo attenuation provided by the embodiments of the present application is as shown in Figure 1, Fig. 1 is this Apply for the schematic diagram of the method for the first inhibition crystal silicon cell photo attenuation that embodiment provides, this method includes following step Suddenly:
S1:The organic solution with preset concentration is uniformly distributed on silicon chip after making herbs into wool;
Carbon atom can must be at high temperature decomposited used herein of organic matter, can be, but not limited to using dropwise addition Mode be uniformly coated on the matte of silicon chip, ensure that follow-up carbon atom is evenly distributed in silicon chip.
S2:Dry the silicon chip;
Here using the effect of baking step in the moisture in organic solution is evaporated, leave behind organic matter and stablize point It is distributed in the surface of silicon chip.
S3:It in inert gas atmosphere, anneals to the silicon chip, the carbon atom in the organic solution is decomposed Out and diffuse into the silicon chip.
It should be noted that this inert gas atmosphere can prevent it is anti-with the oxygen in air in organic matter decomposable process It answers and generates carbon monoxide, because carbon monoxide explosive in high temperature, needed before annealing by the air clean in stove.
By foregoing description, the side of the first inhibition crystal silicon cell photo attenuation provided by the embodiments of the present application Method is uniformly distributed the organic solution with preset concentration due to being included on the silicon chip after making herbs into wool;Dry the silicon chip;Lazy In property gas atmosphere, anneal to the silicon chip, the carbon atom in the organic solution is decomposited and comes and diffuse into institute It states in silicon chip, therefore the generation of boron oxygen pair can be inhibited, reduce the photo attenuation amplitude of solar battery sheet.
The method of second of inhibition crystal silicon cell photo attenuation provided by the embodiments of the present application is in the first above-mentioned suppression On the basis of the method for crystal silicon cell photo attenuation processed, following technical characteristic is further included:
The organic solution is glucose solution.
This glucose solution cost is relatively low, and phosphorus content is high, and easily decomposes, therefore here as preferred embodiment, certainly Other kinds of organic solution can also be used, is not intended to limit herein.
The method of the third inhibition crystal silicon cell photo attenuation provided by the embodiments of the present application is in the first above-mentioned suppression On the basis of the method for crystal silicon cell photo attenuation processed, following technical characteristic is further included:
The scope of the preset concentration is 0.5mol/L to 1.0mol/L.
This concentration range will not both cause meaningless waste, it may have and higher decomposition efficiency, resultant effect is relatively good, Certainly this is also only a kind of preferred embodiment, it is also an option that other schemes, are not intended to limit herein.
The method of 4th kind of inhibition crystal silicon cell photo attenuation provided by the embodiments of the present application is in the first above-mentioned suppression On the basis of the method for crystal silicon cell photo attenuation processed, following technical characteristic is further included:
The drying silicon chip is:
At a temperature of 100 DEG C to 150 DEG C, the silicon chip is dried, continues 5 minutes to 10 minutes.
This temperature range is higher than the boiling point of water, therefore is easier water is made to become vapor to come out, and can tie Air-extractor is closed, vapor is taken away, leaves behind glucose on silicon chip.
The method of 5th kind of inhibition crystal silicon cell photo attenuation provided by the embodiments of the present application is in the first above-mentioned suppression On the basis of the method for crystal silicon cell photo attenuation processed, following technical characteristic is further included:
The inert gas is nitrogen.
It should be noted that nitrogen is a kind of relatively conventional inert gas, it is easily obtained and cost is relatively low, may be used also certainly To select other inert gases such as argon gas, it is not intended to limit herein.
It is provided by the embodiments of the present application 6th kind inhibition crystal silicon cell photo attenuation method, be it is above-mentioned the first extremely 5th kind inhibition crystal silicon cell photo attenuation method in it is any on the basis of, further include following technical characteristic:
It is described to the silicon chip carry out annealing include:
At a temperature of 300 DEG C to 400 DEG C, first time annealing is carried out to the silicon chip, continues 5 minutes to 10 minutes;
At a temperature of 400 DEG C to 500 DEG C, second is carried out to the silicon chip and is annealed, continues 20 minutes to 30 minutes.
In twice annealing flow mentioned here, for the first time annealing purpose be by breakdown of glucose be carbon atom, second The purpose of secondary annealing is to diffuse into carbon atom in silicon chip, after the program adds one of carbon dope technique, can inhibit battery The boron oxygen pair of piece it is compound, so as to reduce cell piece optical attenuation amplitude.
It should also be noted that, the above method is all effective to p-type battery and N-type cell in theory, but due to N Type battery light decay amplitude is smaller, and the effect that this method embodies is weaker.
The foregoing description of the disclosed embodiments enables professional and technical personnel in the field to realize or use the present invention. A variety of modifications of these embodiments will be apparent for those skilled in the art, it is as defined herein General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, it is of the invention The embodiments shown herein is not intended to be limited to, and is to fit to and the principles and novel features disclosed herein phase one The most wide scope caused.

Claims (6)

  1. A kind of 1. method for inhibiting crystal silicon cell photo attenuation, which is characterized in that including:
    The organic solution with preset concentration is uniformly distributed on silicon chip after making herbs into wool;
    Dry the silicon chip;
    In inert gas atmosphere, anneal to the silicon chip, the carbon atom in the organic solution is decomposited to come simultaneously It diffuses into the silicon chip.
  2. 2. the method according to claim 1 for inhibiting crystal silicon cell photo attenuation, which is characterized in that the organic matter is molten Liquid is glucose solution.
  3. 3. the method according to claim 1 for inhibiting crystal silicon cell photo attenuation, which is characterized in that the preset concentration Scope be 0.5mol/L to 1.0mol/L.
  4. 4. the method according to claim 1 for inhibiting crystal silicon cell photo attenuation, which is characterized in that described in the drying Silicon chip is:
    At a temperature of 100 DEG C to 150 DEG C, the silicon chip is dried, continues 5 minutes to 10 minutes.
  5. 5. the method according to claim 1 for inhibiting crystal silicon cell photo attenuation, which is characterized in that the inert gas For nitrogen.
  6. 6. inhibit the method for crystal silicon cell photo attenuation according to claim 1-5 any one of them, which is characterized in that described Annealing is carried out to the silicon chip to be included:
    At a temperature of 300 DEG C to 400 DEG C, first time annealing is carried out to the silicon chip, continues 5 minutes to 10 minutes;
    At a temperature of 400 DEG C to 500 DEG C, second is carried out to the silicon chip and is annealed, continues 20 minutes to 30 minutes.
CN201711352636.2A 2017-12-15 2017-12-15 A kind of method for inhibiting crystal silicon cell photo attenuation Pending CN108110085A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111416005A (en) * 2020-04-24 2020-07-14 天合光能股份有限公司 Preparation method of non-B-doped crystalline silicon solar cell

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102171141A (en) * 2008-09-30 2011-08-31 赢创德固赛有限公司 Production of solar-grade silicon from silicon dioxide
CN106449891A (en) * 2016-11-30 2017-02-22 桂林融通科技有限公司 Preparation method for inhibiting light attenuation of solar cells
CN106711285A (en) * 2016-12-28 2017-05-24 东方环晟光伏(江苏)有限公司 Method for eliminating light induced degradation of boron-doped crystalline silicon cell and device thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102171141A (en) * 2008-09-30 2011-08-31 赢创德固赛有限公司 Production of solar-grade silicon from silicon dioxide
CN106449891A (en) * 2016-11-30 2017-02-22 桂林融通科技有限公司 Preparation method for inhibiting light attenuation of solar cells
CN106711285A (en) * 2016-12-28 2017-05-24 东方环晟光伏(江苏)有限公司 Method for eliminating light induced degradation of boron-doped crystalline silicon cell and device thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111416005A (en) * 2020-04-24 2020-07-14 天合光能股份有限公司 Preparation method of non-B-doped crystalline silicon solar cell

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Application publication date: 20180601