CN108107050A - Adjust the method for beam tilts and the lighting device of adjustment beam tilts - Google Patents
Adjust the method for beam tilts and the lighting device of adjustment beam tilts Download PDFInfo
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- CN108107050A CN108107050A CN201611052740.5A CN201611052740A CN108107050A CN 108107050 A CN108107050 A CN 108107050A CN 201611052740 A CN201611052740 A CN 201611052740A CN 108107050 A CN108107050 A CN 108107050A
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- angle
- light beam
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- camera lens
- adjustment
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8835—Adjustable illumination, e.g. software adjustable screen
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/063—Illuminating optical parts
- G01N2201/0631—Homogeneising elements
Abstract
The invention discloses a kind of methods for adjusting beam tilts, include the following steps：Step 1：Light beam is collimated using collimation camera lens, the light beam after collimation, the angle of divergence of light is smaller in light beam；Step 2：Light beam after collimation is adjusted to the inclination angle of light beam using angle demodulator.The uniformity of beam angle is improved, improves the uniformity of illumination field of view, and it is easy to operate, improve production efficiency.The invention also discloses a kind of lighting devices for adjusting beam tilts, including at least one set of lighting mechanism, the lighting mechanism includes the light source set along the light direction of propagation, collimation camera lens and angle demodulator, the light source sends light beam and is adjusted to through the collimation camera lens as collimated light beam, then, light beam adjusts the angular deflection for realizing light beam by the angle demodulator, planar surface to be measured is incident to, so as to fulfill wide-angle oblique incidence illuminating effect.
Description
Technical field
The present invention relates to field of machine vision more particularly to a kind of method for adjusting beam tilts and adjustment light beam to tilt
The lighting device at angle.
Background technology
In field of machine vision, annular dark field illumination widely uses, and annular dark field lighting device provides uniform shine
Mingguang City, feature the defects of for detecting the surface indentation of tested surface, protrusion, cut, the uniformity of illumination light are related to defect
Detect quality.
Currently used annular dark field lighting device has light emitting diode (LED) annular dark field lighting device and fiber annular
Dark-ground illumination device.In recent years, with the development of semicon industry, the update of the products such as computer, electronic product, detector is changed
Generation, people have increasingly higher demands to scanning with detection speed.The illumination of LED annular dark fields is used as light-pulse generator, energy
Amount can not meet the needs of high sweep speed, as continuous light source there is also energy it is insufficient the problem of.Fiber annular details in a play not acted out on stage, but told through dialogues is shone
It is bright, since the EDS maps of lighting source are uneven, cause every light being coupled into fiber optic conduction annular dark field lighting device
Fine capacity volume variance is larger, the total uniformity of fiber optic conduction ring lighting device is reduced, so as to affect defects detection quality.
As depicted in figs. 1 and 2, United States Patent (USP) US20070201020 (A1) discloses one kind filed in 26 days April in 2007
Optical fibre ring dark-ground illumination device provides a kind of annular dark field lighting system, employs 8 fiber exit ends (monopole illumination)
The structure of unit, each monopole lighting unit are integrated with the optical fiber of up to up to a hundred large-numerical apertures (NA), pass through 8 monopoles
The illumination superposition of lighting unit, so as to generate the illumination field of view of light intensity EDS maps meet demand.This structure can not achieve each
The uniformity of the ray angles distribution of monopole lighting unit, i.e., receive light angle difference in the position of different sample surfaces, can shadow
Ring the quality of detection.As shown in Figure 3 and Figure 4, the light distribution of single monopole lighting unit illumination, the angle model of illumination light are emulated
It is about 22 degree to enclose θ, and angle agreement is poor, and single monopole lighting unit illumination uniformity only has 40% or so.
As shown in Fig. 5~7, multi-polar illumination is carried out using multiple monopole lighting units, field illumination uniformity is mainly by 8
A monopole lighting unit superposition is realized, is about 94%, although multi-polar illumination can realize the illumination uniformity requirement of illumination field of view,
But its shortcoming：1) different position of illumination field of view receives the angle and illumination intensity difference of same monopole lighting unit illumination light
Greatly；2) angle of the different monopole lighting unit illumination lights of different position reception of illumination field of view and illumination intensity difference are big, two
Shortcoming can all influence detection performance.Therefore, the angle agreement and illumination uniformity of monopole lighting unit illumination light are improved, it can be real
Different position in the range of existing illumination field of view receives the angle and strength consistency of each monopole lighting unit illumination light, to carry
High defects detection performance.
As shown in figure 8, Chinese patent CN101551078 (B) filed in 27 days March in 2009 discloses a kind of LED annulars
Dark-ground illumination device, the 8 monopole lighting units represented by a~h, which are superimposed, to be realized, each monopole lighting unit is integrated with very much
A LED carries out oblique incidence illumination using prism plate, and LED has certain angle of divergence, reduces each position in illumination field of view and connect
By the angle agreement of each monopole lighting unit；Secondly, complicated, manufacture assembling is more difficult, and can not realize illumination light
Oblique incidence angle adjusting.
The collection Chengdu of oblique illumination device is nonadjustable, since build-up tolerance causes the oblique firing angle of not homopolarity illumination light
Degree is different, influences the imaging performance of defect different position.As shown in Figure 9, the two poles of the earth are oblique is mapped to sample surfaces defect not
Same position, due to incident angle θ1And θ2Difference, the scattering strength of different position can be variant, causes the different position of defect
The luminous intensity of imaging is inconsistent.Secondly as the scattering strength of different defects is different, the illumination light oblique incidence angle of demand is
It is discrepant.
As shown in Figure 10, detection device the defects of rear road, is imaged using microscopic system, the working distance of microcobjective
Generally between 20mm-30mm, i.e., the axial dimension of object lens to sample surface will meet<30mm, so, the axis of dark-ground illumination module
It is restricted thereto to size.
As shown in figure 11, the detection object of Chinese patent CN204479492 (U) is optics filed in 13 days March in 2015
Element surface defect, the lighting system of use, illumination distances about 100mm, and the application scenarios of rear road defect detection equipment
It is entirely different, the dark-ground illumination demand after bulk can not meet in road defect detection equipment.Secondly, the angle illuminated is not
It is adjustable.
To sum up, the rear road the defects of in the dark-ground illumination of detection device, it is desirable to the oblique incidence of monopole lighting unit illumination light
Angle is consistent, and according to the defects of different, adjusts the oblique incidence angle of illumination light, can improve Technological adaptability, and dark
The size of field lighting module will meet the requirement of object lens working distance.
The content of the invention
The present invention provides a kind of method for adjusting beam tilts, to solve LED annular dark fields lighting device and light
Fine annular dark field lighting device can be only formed the demand of the illumination uniformity of certain illumination field of view and cannot meet monopole illumination
When irradiation light angle agreement and illumination uniformity requirement the problem of.
In order to solve the above-mentioned technical problem, the technical scheme is that：
A kind of method for adjusting beam tilts, includes the following steps：
Step 1：Light beam is collimated using collimation camera lens, the light beam after collimation, in light beam the angle of divergence of light compared with
It is small；
Step 2：Light beam after collimation is adjusted to the inclination angle of light beam using angle demodulator.
Preferably, the angle demodulator is using reflection adjustment or refraction adjustment.
The method for the adjustment beam tilts that the present invention uses will carry out angular deflection after beam collimation, improve beam angle
The uniformity of degree improves the uniformity of illumination field of view, and easy to operate, improves production efficiency.
It is described including at least one set of lighting mechanism the present invention also provides a kind of lighting device for adjusting beam tilts
Lighting mechanism includes the light source set along the light direction of propagation, collimation camera lens and angle demodulator, and the light source sends light beam warp
The collimation camera lens is adjusted to as collimated light beam, and then, light beam is adjusted by the angle demodulator realizes that the angle of light beam is inclined
Turn, planar surface to be measured is incident to, so as to fulfill wide-angle oblique incidence illuminating effect.
Preferably, the angle demodulator includes prism wedge and is rotated along axis for controlling the prism wedge
Rotation regulating mechanism, prism wedge are located at the back focal plane of collimation camera lens, and the rotation regulating mechanism controls the prism wedge edge
Axis rotates, and the light beam that light source is sent is incident on after the collimation camera lens and prism wedge adjustment and treats master plate table
Face, wherein, the incidence angle of the light beam of planar surface to be measured and the relation of prism wedge rotation angle：θ=arc (n sin (alpha-beta))
+Δα；θ represents the angle of light beam and planar surface to be measured, and α represents the prism wedge
The complementary angle of the angle of wedge, Δ α represent the rotation angle of the prism wedge, and n is prism wedge Refractive Index of Material, realizes that beam angle is inclined
Turn.
Preferably, the angle demodulator is micro reflector array, micro reflector array is located at the rear coke of collimation camera lens
Face, light beam are reflected by micro reflector array, realize angular deflection.
Preferably, it is described collimation camera lens for aspherical mirror, spherical mirror or other have by beam collimation effect optics member
Part, light beam become directional light, the angle of divergence very little of light beam after the collimation camera lens.
Preferably, the light source is laser or optical fiber illuminating system etc..
Preferably, the optical fiber illuminating system includes simple optical fiber, capacity usage ratio, the optical fibre illumination system are improved
Bulk cargo is with the situation that simple and simple optical fiber is not in fracture.
Preferably, the width of the collimation camera lens is less than 15mm.
Preferably, the height of the angle demodulator is less than 15mm.
The lighting device for the adjustment beam tilts that the present invention uses, the angle of each light in every group of lighting mechanism, light beam
The deviation of degree improves the uniformity of monopole illuminating bundle angle, and the maintaining uniform illumination of every group of lighting mechanism in the range of 1 degree
Property can reach more than 90%, improve monopole illumination illumination uniformity.In illumination field of view, multigroup lighting mechanism cooperation is real
The performance boost that different position receives different monopole illuminating bundle angle agreements and illumination uniformity is showed.
Description of the drawings
Fig. 1 is the front view of a fiber annular dark-ground illumination device in the prior art；
Fig. 2 is the side view of a fiber annular dark-ground illumination device in the prior art；
Fig. 3 and Fig. 4 is the surface of intensity distribution of the emulation monopole illumination of a fiber annular dark-ground illumination device in the prior art；
Fig. 5 is the multi-polar illumination schematic diagram of a fiber annular dark-ground illumination device in the prior art；
Fig. 6 and Fig. 7 is the surface of intensity distribution of the emulation multi-polar illumination of a fiber annular dark-ground illumination device in the prior art；
Fig. 8 is the structure diagram of a LED annular dark field lighting devices in the prior art；
Fig. 9 is the multi-polar illumination schematic diagram of a LED annular dark field lighting devices in the prior art；
Figure 10 is the structure diagram of rear road defect detection equipment in the prior art；
Figure 11 is the illumination schematic diagram of an oblique incidence in the prior art；
Figure 12 is the structure diagram of the lighting mechanism of the lighting device of the adjustable irradiation light of the embodiment of the present invention two；
Figure 13 be the lighting device of the adjustable irradiation light of the embodiment of the present invention two prism wedge before light distribution illustrate
Figure；
Figure 14 and Figure 15 is the light of the emulation monopole illumination of the lighting device of the adjustable irradiation light of the embodiment of the present invention two
Strong distribution map；
Figure 16 is the multi-polar illumination schematic diagram of the lighting device of the adjustable irradiation light of the embodiment of the present invention two；
Figure 17 and Figure 18 is the light of the emulation multi-polar illumination of the lighting device of the adjustable irradiation light of the embodiment of the present invention two
Strong distribution map；
Figure 19 is the structure diagram of the lighting mechanism of the lighting device of the adjustable irradiation light of the embodiment of the present invention three.
Shown in Figure 12：1- light sources, 2- collimations camera lens, 3- prism wedges, 4- rotation regulating mechanisms, 5- treat master plate；
Shown in Figure 19：1- light sources, 2- collimations camera lens, 5- treat master plate, 6- micro reflector arrays.
Specific embodiment
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, below in conjunction with the accompanying drawings to the present invention
Specific embodiment be described in detail.It should be noted that attached drawing of the present invention uses simplified form and uses non-essence
Accurate ratio, only for the purpose of facilitating and clarifying the purpose of the embodiments of the invention.
Embodiment one
A kind of method for adjusting beam tilts, includes the following steps：
Step 1：Light beam is collimated using collimation camera lens, the light beam after collimation, in light beam the angle of divergence of light compared with
It is small；
Step 2：Using angle demodulator, adjusted using reflection or refraction adjusts, the light beam after collimation is adjusted into light beam
Inclination angle.
Embodiment two
Refer to Figure 12, a kind of lighting device for adjusting beam tilts, including four groups of lighting mechanisms, the lighting mechanism
Light source 1, collimation camera lens 2 and angle demodulator, the light source 1 including being set along the light direction of propagation send light beam through the standard
The straight adjustment of camera lens 2 becomes collimated light beam, and then, light beam adjusts the angular deflection for realizing light beam by the angle demodulator, enters
It is incident upon and treats 5 surface of master plate, so as to fulfill wide-angle oblique incidence illuminating effect.
The angle demodulator includes prism wedge 3 and for controlling the rotation that the prism wedge 3 is rotated along its axis
Adjusting mechanism 4, the prism wedge 3 are located at the back focal plane of the collimation camera lens 2, and the rotation regulating mechanism 4 controls the wedge
Shape prism 3 is rotated along its axis, realizes beam angle deflection.The collimation camera lens 2 of the present embodiment and the prism wedge 3
Highly be respectively less than 15mm, height meet after road defect detection equipment axial dimension constraint (<30mm), adaptability is good.
It is described collimation camera lens 2 for aspherical mirror, spherical mirror or other have by beam collimation act on optical element, light beam warp
Become directional light, the angle of divergence very little of light beam after crossing the collimation camera lens 2.
The light source 1 is laser or optical fiber illuminating system etc., when the light source 1 is optical fiber illuminating system, the light
Fine lighting system uses simple optical fiber, and assembling is simple, and improves capacity usage ratio.
By taking one group of lighting mechanism as an example, monopole illumination is carried out, the light beam that light source 1 is emitted passes through after the collimation camera lens 2,
Light beam becomes directional light, and the angle of divergence very little of light in light beam is realized the angular deflection of light beam by the prism wedge 3, entered
It is mapped to and treats 5 surface of master plate, so as to fulfill wide-angle oblique incidence illuminating effect, the angular deviation range of light in light beam<1
Degree, uniformity are high；By the rotation regulating mechanism 4, rotation adjusts the prism wedge 3 and rotates, and adjustment light beam, which is incident to, to be treated
With treating the angle on 5 surface of master plate during 5 surface of master plate, the angular adjustment of monopole illumination is realized.
Figure 13 represents that light beam by the collimation camera lens 2, incides into the light distribution of 3 front surface of prism wedge, in Φ
Uniformity in 17mm field ranges is about 97.3%, and the angle of divergence of light is less than 0.8 degree in light beam, i.e., beam angle is consistent
Property it is high, deviation range can be less than 1 degree.
According to design requirement, visual field meets with the focal length of collimation camera lens 2 and the NA of light source 1：Visual field demand is if width
For the square of Dmm, then 2F × sin (NA) >=D, F is the focal length of collimation camera lens 2, and NA is the numerical aperture of light source.
According to the light beam of design and the angle for treating 5 surface of master plate, the light beam that measurement light source 1 is sent passes through the collimating mirror
First 2 and the prism wedge 3 adjust after be radiated at when 5 surface of master plate with treating the angle and beam angle on 5 surface of master plate
Whether degree uniformity meets design requirement, if not meeting design requirement, adjusts the prism wedge 3 and rotates, until meeting design
It is required that.
Along the axial-rotation prism wedge 3 of prism wedge 3, the angular adjustment that 5 surface of master plate is treated in light beam incidence can be carried out,
The incidence angle of light beam and the relation of rotation angle：
θ=arc (n sin (alpha-beta))+Δ α；
Wherein,θ represents light beam and treats the angle on 5 surface of master plate, and α represents institute
The complementary angle of 3 angle of wedge of prism wedge is stated, Δ α represents the rotation angle of the prism wedge 3, and n is prism wedge Refractive Index of Material,
Adjustable range such as following table：
Table 1
| The Δ α (Degree) of adjusting | θ(Degree) |
| 0 | 13.44 |
| 5 | 13.73 |
| 10 | 14.21 |
| 15 | 14.87 |
| 20 | 15.76 |
As seen from the above table, for prism wedge 3 along 20 ° of its axial-rotation, the incident angle range of adjustment beam is 1.3 °.Wedge
Shape prism 3 can generate visual field along the axial translation of prism wedge 3, translational movement is along its axial-rotationIts axis
To needing to adjustWith visual field offset caused by compensation adjustment angle, ensure that the center of visual field is constant.
If beam angle uniformity does not meet design requirement, when light beam and treat that the angle on 5 surface of master plate is more than design and wants
During the angle asked, the prism wedge 3 is adjusted so that light beam treats that master plate 5 needs edge with treating that the angle on 5 surface of master plate becomes smaller
Its axis translates up；When light beam is with when the angle on 5 surface of master plate is less than the angle of design requirement, adjusting the wedge-shaped rib
Mirror 3 is so that light beam with treating that the angle on 5 surface of master plate becomes larger, treats that master plate 5 needs to translate downwards along its axis.
Treat that the lighting simulation effect on 5 surface of master plate is shown in Figure 14 and Figure 15, Figure 15 represents visual field intensity of illumination in Figure 14
Enlarged drawing, the incident angle θ of design are 14 degree, analyze and obtain light beam and incide into treat that the maximum angle on 5 surface of master plate is about
14.3 degree, minimum angles are 13.5 degree, the angular deviation of light in light beam<1 degree, improve the uniformity of beam angle；Point
It is 95.4% that analysis, which can obtain field of view center 12mm × 12mm area illuminations uniformity, improves the illumination uniformity of monopole illumination.
Figure 16 is referred to, multi-polar illumination is carried out with four groups of lighting mechanisms, sees in the lighting simulation effect for treating 5 surface of master plate
Figure 17 and Figure 18, Figure 18 represent the enlarged drawing of visual field intensity of illumination in Figure 17, can obtain field of view center 12mm × 12mm area illuminations
Uniformity is 95.4%, on the basis of the uniformity of quadrupole illuminating visual field is ensured, improves different position in illumination field of view and receives
To the angle agreement of each monopole illumination light, and improve different position in illumination field of view and receive each monopole illumination light
Intensity homogeneity, uniformity 95.4%.
Embodiment three
Figure 19 is referred to, difference lies in the angle demodulator is micro reflector array to embodiment three with embodiment two
6, for the light beam that light source 1 is emitted after the collimation camera lens 2, light beam becomes directional light, the angle of divergence very little of light in light beam,
The angular deflection of light beam is realized by micro reflector array 6, incides into and treats 5 surface of master plate, so as to fulfill wide-angle oblique incidence
Illuminating effect, the angular deviation range of light in light beam<1 degree.By adjusting micro reflector array 6, realize that light beam incides into
Treat the angular adjustment on 5 surface of master plate.
Those skilled in the art can carry out invention spirit and model of the various modification and variations without departing from the present invention
It encloses.In this way, if these modifications and changes of the present invention belongs within the scope of the claims in the present invention and its equivalent technologies, then
The present invention is also intended to including these modification and variations.
Claims (10)
- A kind of 1. method for adjusting beam tilts, which is characterized in that include the following steps：Step 1：Light beam is collimated using collimation camera lens；Step 2：Using the inclination angle of the light beam after angle demodulator adjustment collimation.
- 2. the method for adjustment beam tilts according to claim 1, which is characterized in that the angle demodulator is using anti- Penetrate adjustment or refraction adjustment.
- 3. a kind of lighting device for adjusting beam tilts, which is characterized in that including at least one set of lighting mechanism, the flare-aircraft Structure includes the light source set gradually along the light direction of propagation, collimation camera lens and angle demodulator, the light source and sends light beam through institute Collimation camera lens is stated to be adjusted to as collimated light beam, then light beam adjusts the angular deflection for realizing light beam by the angle demodulator, It is incident to planar surface to be measured.
- 4. the lighting device of adjustment beam tilts according to claim 3, which is characterized in that the angle demodulator bag Include prism wedge and for controlling the rotation regulating mechanism that the prism wedge is rotated along its axis, the prism wedge is located at institute The back focal plane of collimation camera lens is stated, the light beam that light source is sent is incident on after the collimation camera lens and prism wedge adjustment and treats Master plate surface, wherein, the incidence angle of the light beam of planar surface to be measured and the relation of prism wedge rotation angle：θ=arc (n sin(α-β))+Δα；θ represents the angle of light beam and planar surface to be measured, and α represents institute The complementary angle of the prism wedge angle of wedge is stated, Δ α represents the rotation angle of the prism wedge, and n is prism wedge Refractive Index of Material.
- 5. the lighting device of adjustment beam tilts according to claim 3, which is characterized in that the angle demodulator is Micro reflector array, the micro reflector array are located at the back focal plane of the collimation camera lens.
- 6. the lighting device of adjustment beam tilts according to claim 3, which is characterized in that the collimation camera lens is non- Spherical mirror or spherical mirror.
- 7. the lighting device of adjustment beam tilts according to claim 3, which is characterized in that the light source is laser Or optical fiber illuminating system.
- 8. the lighting device of adjustment beam tilts according to claim 7, which is characterized in that the optical fiber illuminating system Including simple optical fiber.
- 9. the lighting device of adjustment beam tilts according to claim 3, which is characterized in that the height of the collimation camera lens Degree is less than 15mm.
- 10. the lighting device of adjustment beam tilts according to claim 3, which is characterized in that the angle demodulator Height be less than 15mm.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611052740.5A CN108107050A (en) | 2016-11-25 | 2016-11-25 | Adjust the method for beam tilts and the lighting device of adjustment beam tilts |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611052740.5A CN108107050A (en) | 2016-11-25 | 2016-11-25 | Adjust the method for beam tilts and the lighting device of adjustment beam tilts |
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| CN108107050A true CN108107050A (en) | 2018-06-01 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114354627A (en) * | 2022-01-04 | 2022-04-15 | 浙江大学 | Annular uniform collimation lighting device and method for surface defect detection |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070201020A1 (en) * | 2003-07-11 | 2007-08-30 | Falai Li | Fiber optic darkfield ring light |
| CN101551078A (en) * | 2008-03-31 | 2009-10-07 | 优志旺电机株式会社 | Light source for lighting and pattern detection device using the same |
| CN204353654U (en) * | 2014-10-24 | 2015-05-27 | 深圳英诺激光科技有限公司 | The laser aid of cone of nulls degree and back taper groove processing can be realized |
| CN204479492U (en) * | 2015-03-13 | 2015-07-15 | 浙江师范大学 | Optical element surface flaw inspection device |
| CN204924614U (en) * | 2015-08-20 | 2015-12-30 | 中国工程物理研究院激光聚变研究中心 | Monitoring devices is floated at debugging of laser entry angle and angle |
-
2016
- 2016-11-25 CN CN201611052740.5A patent/CN108107050A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070201020A1 (en) * | 2003-07-11 | 2007-08-30 | Falai Li | Fiber optic darkfield ring light |
| CN101551078A (en) * | 2008-03-31 | 2009-10-07 | 优志旺电机株式会社 | Light source for lighting and pattern detection device using the same |
| CN204353654U (en) * | 2014-10-24 | 2015-05-27 | 深圳英诺激光科技有限公司 | The laser aid of cone of nulls degree and back taper groove processing can be realized |
| CN204479492U (en) * | 2015-03-13 | 2015-07-15 | 浙江师范大学 | Optical element surface flaw inspection device |
| CN204924614U (en) * | 2015-08-20 | 2015-12-30 | 中国工程物理研究院激光聚变研究中心 | Monitoring devices is floated at debugging of laser entry angle and angle |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114354627A (en) * | 2022-01-04 | 2022-04-15 | 浙江大学 | Annular uniform collimation lighting device and method for surface defect detection |
| CN114354627B (en) * | 2022-01-04 | 2022-11-22 | 浙江大学 | Annular uniform collimation lighting device and method for surface defect detection |
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Application publication date: 20180601 |