CN101551078A - Light source for lighting and pattern detection device using the same - Google Patents
Light source for lighting and pattern detection device using the same Download PDFInfo
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- CN101551078A CN101551078A CN 200910130153 CN200910130153A CN101551078A CN 101551078 A CN101551078 A CN 101551078A CN 200910130153 CN200910130153 CN 200910130153 CN 200910130153 A CN200910130153 A CN 200910130153A CN 101551078 A CN101551078 A CN 101551078A
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Abstract
The invention provides a lighting unit with the same light incidence condition at the arbitrary point of the filming area and a pattern detection device capable of performing the good-bad judgment of a depression pit. A plurality of LEDs (2) are arranged on a LED supporting component (3) and the light emits at parallel state from the LEDs (2) and incidents into the filming area (R) at preset incidence angle Theta to form area light sources (a-h). The size of the area with the LEDs (2) is bigger than the size of the filming area (R). Light emits at parallel state from eight area light sources (a-h) and incidents into the whole filming area (R) at preset angle Theta. Thus the light on the same angle incidents from all direction in the same irradiance intensity on the arbitrary points of the BAC in the filming area (R) and the light incidence condition is same on the arbitrary points. Thus the good-bad is judged based on the lightness (brightness) of the depression pit in all the detected areas.
Description
Technical field
The present invention relates to a kind of relatively should the surface for the inspection of the surface state of carrying out object from the illumination light source of oblique irradiating illumination light, and to the patterned illumination illumination light that is formed at substrate, obtain illuminated pattern image and the inspection apparatus for pattern automatically checked.
Background technology
Known have an inspection apparatus for pattern of the patterned illumination illumination light on the substrate that is formed on transmitance being judged the quality of pattern according to captured image.
In this kind inspection apparatus for pattern, from a side of the pattern that is formed with substrate by the indirect illumination unit, oblique incidence ground, inspection area throws light on relatively, take the pattern of substrate then by camera unit, according to the briliancy distribution patterns of the image that is taken, can detect and have or not pit (recess or breach) on the pattern.If pit is arranged on pattern, the situation that broken string takes place is then arranged, thereby must detect as defective work.
As above-mentioned lighting unit, as being used for to checking that object from the omnirange lighting unit of irradiating illumination light obliquely, often uses the ring illumination unit.Testing fixture as using the ring illumination unit for example has patent documentation 1.
According to above-mentioned communique, shown in Figure 14 (a), existing ring illumination, in the bulk container 102 of thin cylinder ring-type with a plurality of LED103 alignment arrangements on concentric circles.
In addition, be that Figure 14 (b) and b are shown in Figure 14 (c) to view as a of this Figure 14 (a) to view, each LED103 has the configuration of angle ground in the center O direction of circle, and for the workpiece of checking, becoming can be from oblique irradiating illumination light.
Patent documentation 1: TOHKEMY 2002-328094 communique
In above-mentioned inspection apparatus for pattern, indirect illumination light is on the arbitrfary point in the zone of carrying out Work inspection device, and is from the light of omnirange (360 ° of directions) the same incident angle of incident, necessary identical from the luminous intensity of all directions institute incident.
In addition, no matter the inspection area which point, its condition (from the light of the same incident angle of omnirange incident, identical from the luminous intensity of all directions institute incident) also must be identical.Its reason below is described.
(1) in above-mentioned inspection apparatus for pattern, if there is pit on pattern, then the part as bright (briliancy height) is taken.If light (briliancy) is big, then the size of pit is big, and if light (briliancy) is little, then pit is little.
If little pit, also having can be as underproof situation, at this time, judges quality according to the size of the light (briliancy) of pit.
(2) the inspection area certain a bit, if the illumination light intensity that is incident in this point is according to direction and difference, even pit (breach) big or small identical then, according to the direction of generation breach, bright (briliancy) also can change.
For example, as shown in figure 15, can make illumination light from the right side with stronger intensity, and shine from the left side with more weak intensity.Be positioned at the pit on pattern P right side, because the stronger illumination light of reflected intensity, thereby brighten, on the contrary, be positioned at the pit in pattern P left side, because the more weak illumination light of reflected intensity, thereby deepening.
That is to say that even breach (pit) is big or small identical, light (briliancy) is also inequality, and can't implement correct inspection (good and bad judgement).Therefore, illumination light must be thrown light on same intensity from omnirange (360 ° of directions) in the arbitrfary point of inspection area.
In addition, the situation that produces projection is arranged on the surface of pattern.Because it is lower that projection produces the possibility of broken string, thereby needn't detect as defective.In order to distinguish pit that detection produces at patterned surfaces with projection and the indirect illumination light that throws light on, but because angle is difficult to difference detection pit and projection.For pit and projection difference with patterned surfaces detect, need come irradiating illumination light with optimal angular range.With above-mentioned same, immutablely must can't distinguish pit and projection according to the direction that produces breach.Therefore, the inspection area certain a bit, must be from the light of omnirange (360 ° of directions) the same incident angle of incident.
In addition, all for the inspection area, if deviation is arranged from the illumination light intensity or the incident angle of all directions, even the pit of identical size then, size according to position light (briliancy) also can change, or can't distinguish with projection, thereby can't finish correct inspection (good and bad judgement).Therefore, at arbitrary position of inspection area (point), also must be from the light of the same incident angle of omnirange (360 ° of directions) incident, also must be identical from the luminous intensity of all directions institute incident.
In above-mentioned inspection apparatus for pattern, being image unit with ccd linear sensor scans in the direction of the direction quadrature that extends with linear transducer, and it is all to take the inspection area.
Figure 16 is the vertical view of ccd linear sensor (not shown) elongated area of once taking.The size of camera watch region for example is long 18mm, and width is 2 μ m.
Though medelling is represented on this figure, but as described above, even for example at the central part A of camera watch region, in addition at left part B or right part C, the illumination light of institute's incident also is from the same incident angle of omnirange (360 ° of directions), and is necessary identical from the luminous intensity of all directions institute incident.
But in existing ring illumination shown in Figure 14, each LED103 is disposed at round center O direction with having angle.Therefore, as shown in figure 17, be not directional light from the light of each LED, illumination light is towards the central part A of camera watch region.
Therefore, when having in the inspection area as Figure 16 big or small, at central part A, though shine the light of uniform intensity and angle from omnirange, the point beyond this, for example at both ends B or C, the luminous intensity of institute's incident is according to direction and inequality.
Get back to Figure 17,,, (b) (be not represented by dotted lines among the figure) for example from illumination light (a) with respect to the direction institute incident of the direction quadrature that ccd linear sensor extended at camera watch region B, C.So at B, the position of C is even the pit of jagged court (a) or direction (b) from this direction also not incident illumination light, thereby can't detect pit.
That is to say, in above-mentioned inspection apparatus for pattern,, can't still use existing ring illumination as the indirect illumination unit.
Summary of the invention
The present invention In view of the foregoing finishes, the object of the present invention is to provide a kind of arbitrfary point in the zone of taking, light from omnirange (360 ° of directions) the same incident angle of incident, identical from the luminous intensity of all directions institute incident, and no matter which point of camera watch region, all can obtain all identical indirect illumination unit of its condition, and can use the inspection apparatus for pattern of the correct inspection (good and bad judgement) of the pit of this indirect illumination unit.
The result of the wholwe-hearted research of inventor, found arbitrfary point in the zone of taking, light from omnirange (360 ° of directions) the same incident angle of incident, identical from the luminous intensity of all directions institute incident, and no matter which point of inspection area, in order to make its condition (from the light of the same incident angle of omnirange incident, and identical from the luminous intensity of all directions institute incident) all identical, size anyhow for captured zone, as long as will be identical with it or and area source of penetrating directional light also bigger than it as a unit, annularly around the modes of camera watch region be configured in the same plane on camera watch region top on just passable with a plurality of this area source.
Use Fig. 1 that the principle of solution is described.
Fig. 1 (a) is wire camera watch region R is watched in expression from the top a vertical view, prepare and 6 linear light source a, bs, c, d, e, the f of camera watch region R equal length, be illustrated in the state that disposes in the mode that centers on camera watch region R on the same plane of camera watch region R top with width.In addition, Fig. 1 (b) is that expression is from laterally watching the side view of Fig. 1 (a).
As shown in Figure 1, penetrate illumination light with parastate, and be incident in the each point BAC of camera watch region R with predetermined incident angle from the light source a～f of wire.That is to say, be incident in the central portion A of camera watch region R from the emitted light of the central portion A ' of each light source.In addition, be incident in the left part B of camera watch region R, be incident in the right part C of camera watch region R in addition from the emitted light of the right part C ' of each light source from the emitted light of the left part B ' of each light source.
As shown in Figure 1, optical path of illuminating light is that A-A ', B-B ' and C-C ' are parallel to each other, and length also equates from (distance of light source till the camera watch region) separately, thereby at the A of camera watch region R, B, the each point of C, from the light of all directions (situation of Fig. 1 is 6 directions) the same incident angle of incident, and identical from the luminous intensity of all directions institute incident.In addition, no matter which point of camera watch region R, all from the light of the same incident angle of omnirange incident and identical from the luminous intensity of all directions institute incident.
In 1 figure, become miscellaneous in order not make figure, the light source number on every side that is disposed at camera watch region R is made as 6, but its quantity is many more, more can be from the illumination light of uniform intensity of omnirange incident and angle.
Fig. 2 is that the expression camera watch region is the example of rectangular-shaped situation.
Fig. 2 (a), (b) same with Fig. 1 (a), watch the vertical view of OBL camera watch region R from the top, prepare 8 OBL area source a～h with the identical size of camera watch region R, be illustrated in the state that disposes in the mode that centers on camera watch region R on the same plane of camera watch region R top.In addition, Fig. 3 is that expression is from laterally watching the side view of Fig. 2 (a).
By the A ' of area source a～h, B ', C ', D ', illumination light penetrates with parallel state, and is incident on the ABCD each point of camera watch region R with predetermined incident angle.For example, shown in Fig. 2 (a), lower-left D in the figure of camera watch region R, incident is from the light of the lower-left D ' of each area source (among the figure with shown in the dotted line).In addition, shown in Fig. 2 (b), at the upper right B of camera watch region R, incident is from the light (representing with single chain line among the figure) of the upper right B ' of each area source.
Similarly, at the bottom right of camera watch region R C, incident is from the illumination light of the bottom right C ' of area source; At the upper left A of camera watch region R, incident is from the illumination light of the upper left A ' of area source.
Fig. 3 represents D ' by area source a and d to the D of camera watch region R incident illumination light, and by the state of C ' to the C of camera watch region R incident illumination light.
Optical path of illuminating light is that A-A ', B-B ', C-C ' and D-D ' are parallel mutually, and length (distance till from light source to camera watch region) also equates separately, thereby at the A of camera watch region R, B, the each point of C, from the light of all directions (situation of Fig. 2 is 8 directions) the same incident angle of incident, and identical from the luminous intensity of all directions institute incident.In addition, no matter which point of camera watch region R, all from the light of the same incident angle of omnirange incident and identical from the luminous intensity of all directions institute incident.
The area source number on every side that is disposed at camera watch region R is many more, more can be from the illumination light of uniform intensity of omnirange incident and angle.But, as described later,, then make the diameter (size) of its corresponding lighting unit become big, and device can maximize if increase the number of area source.
Based on more than, in the present invention, solve above-mentioned problem as follows.
(1) a kind of illumination light source, to shine the area source of directional light to the irradiated area, dispose a plurality ofly at grade annularly, the size that makes each area source is that the illuminated irradiation area from the light of each area source on illuminated area surface comprises all sizes in illuminated zone.
(2) in above-mentioned (1) described illumination light source, above-mentioned a plurality of area sources are constituted on same plane, arrange a plurality of LED a plurality of.And, with the LED in each area source, with illuminated in the mode in illuminated zone, towards the inboard oblique arrangement of the ring-type that disposes each area source from the directional light of each area source.
(3) in above-mentioned (1) described illumination light source, the light emitting side that above-mentioned a plurality of area sources are constituted at a plurality of LED disposes prism plate a plurality of annularly, described prism plate will penetrate as directional light from the emitted light of above-mentioned a plurality of LED, constitute the prism plate of each area source, with from the illuminated mode of the directional light of each prism plate, make the light that penetrates from each LED dispose the ring-type inboard refraction of each area source in illuminated zone.
(4) a kind of inspection apparatus for pattern possesses: the dark field illumination unit, for forming figuratum workpiece from oblique irradiation indirect illumination light; Image unit is taken the above-mentioned pattern that is thrown light on by above-mentioned dark field illumination unit; The workpiece holding unit that keeps workpiece; And control part, according to the quality of judging pattern by the captured pattern image of above-mentioned image unit, as the illumination light source in the above-mentioned dark field illumination unit use above-mentioned (1～3).
In the present invention, can obtain following effect.
(1) in the arbitrfary point in the zone of taking, light from omnirange (360 ° of directions) the same incident angle of incident, identical from the luminous intensity of all directions institute incident, and no matter which point of inspection area, make its condition all identical, that is to say that the light that makes same incident angle all throws light on from the luminous intensity of all directions institute incident in the same manner from omnirange incident.
Therefore, the light (briliancy) in the captured zone can not change to some extent owing to the position, no matter the inspection area which point, can identical conditions take.
(2) by the dark field illumination unit of lighting source of the present invention as inspection apparatus for pattern used, thereby it is region-wide what check, distinguish pit and projection according to captured image, the difference of the light (briliancy) by pit is the decidable quality then.
Description of drawings
Fig. 1 (a) (b) is the figure (camera watch region is the situation of wire) of explanation principle of the present invention.
Fig. 2 (a) (b) is the figure (camera watch region is the situation of rectangle) of explanation principle of the present invention.
Fig. 3 is the side view of Fig. 2 (a).
Fig. 4 (a)～(c) is the figure of formation of the area source of the expression lighting unit that constitutes the present invention the 1st embodiment.
Fig. 5 (a) (b) is the figure of situation that disposes the area source of 8 Fig. 4 equably.
Fig. 6 (a) (b) is the expression explanation camera watch region R for rectangle, from the figure of the situation of 8 each area source irradiating illumination light.
Fig. 7 (a) (b) is the figure of formation of the light source of the explanation lighting unit that constitutes the 2nd embodiment of the present invention.
Fig. 8 is the figure that cuts out of explanation prism plate.
Fig. 9 is prism plate is installed in figure from explanation to light source shown in Figure 7.
Figure 10 (a)～(c) is the figure that amplifies the area source of the lighting unit of representing formation the 2nd embodiment.
Figure 11 (a)～(c) is the figure that is illustrated in the variation of employed prism plate among Figure 10.
Figure 12 (a)～(c) is that expression uses the lighting unit of the 2nd embodiment to observe the figure of the experimental result of pit.
Figure 13 is the figure of embodiment that expression is applicable to lighting unit of the present invention the situation of inspection apparatus for pattern.
Figure 14 (a)～(c) is the figure of the existing ring illumination of explanation unit.
Even Figure 15 is the big or small identical of explanation pit (breach), according to the direction that breach produces, the figure of the situation that light (briliancy) also changes.
Figure 16 is the vertical view of the expression ccd linear sensor elongated area of once taking.
Figure 17 is that explanation makes the figure of illumination light towards the central part of camera watch region in existing ring illumination unit.
Symbol description
1: area source; 2:LED; 3: supporting member 4: diffuser plate; 5: prism plate;
6: pillar; 10: dark field illumination unit (indirect illumination unit); 11: image unit;
The 11a:CCD linear transducer; 11b: lens unit; 12: the image unit driving mechanism;
13: scanning element; 14: workpiece holding unit (work piece platform); 15: control part;
R: camera watch region; W: workpiece; A～h: area source.
The specific embodiment
Below, be illustrated at the concrete configuration example of the light source portion of the lighting unit of embodiments of the present invention.Fig. 4 is the figure of formation of the area source of the expression lighting unit that constitutes the 1st embodiment of the present invention, arranging obliquely makes the direction of a plurality of LED become parallel, and illumination light penetrates with parastate, and expression is incident in the embodiment of the area source of camera watch region with the incident angle of regulation.
Fig. 4 (a) is the vertical view that (camera watch region side) watches illuminating area source from the below, and Fig. 4 (b) is a side view of representing to watch from the A direction light source of Fig. 4 (a), and Fig. 4 (c) is the light source of Fig. 4 (a) is watched in expression from the B direction a front view.In addition, these figure are ideographs for convenience of explanation, actual LED be shorten be spaced a plurality of.
As shown in the drawing, in the present embodiment, penetrate with parastate from the chief ray of the illumination light of each LED2, be incident in camera watch region R and constitute area source 1 with the incident angle θ of regulation.In addition, between LED2 and camera watch region R, also can shown in this figure dotted line, diffuser plate 4 be set.
Shown in Fig. 4 (a), from the light that each LED2 penetrates, the mode parallel to each other with the strongest light component (chief ray) is arranged in a plurality of LED2 on the LED supporting member 3.In addition,, directional light must be arranged, thereby arrange the size in the zone of LED2 from this area source 1 incident at camera watch region R, also bigger than the size of camera watch region R.
With the area source 1 that so constitutes, be configured in annularly in mode in the plane on the camera watch region of a plurality of bulks around camera watch region.Therefore, supporting member 3 is if form fan-shaped, then more convenient.
Shown in Fig. 4 (b), LED2 becomes the mode of desired angle θ with illumination light for the incident angle of camera watch region R, towards camera watch region R tilted configuration.
Higher from the directive property of the emitted light of LED2, thereby from the light of each LED2, be incident in camera watch region R with the state of almost parallel.
With a plurality of area sources 1 that so constituted, be configured in annularly in the same plane on the camera watch region R in mode around camera watch region R.
Fig. 5 and Fig. 6 are pattern ground expressions with the area source of Fig. 4 with 45 ° of figure that dispose 8 state equably.Fig. 5 (a) and Fig. 6 are vertical views, and Fig. 5 (b) is a side view.In addition, same with Fig. 4 between LED2 and camera watch region R, also diffuser plate 4 can be set shown in the dotted line of this figure.
Fig. 5 is the camera watch region R of expression for wire, from the state of 8 each area source 1-a～1-h irradiation irradiates light.In Fig. 1～Fig. 3, make big or small identical being illustrated of camera watch region R and area source 1, but in this figure, the area of area source 1 is also bigger than the area of camera watch region R.
In fact, it is consistent that the size that is difficult to make camera watch region R and the size of area source 1 make, for uniform illumination to the parallel light of all incident of camera watch region R, make the area of area source 1 more favourable slightly greatly than the area of camera watch region.
In 5 figure, from 8 area sources, illumination light penetrates with parallel state, is incident in all of camera watch region R with the angle θ that stipulates.Therefore, in the arbitrfary point on the BAC of camera watch region R, from omnirange (360 ° of directions), the illumination light of equal angular is with the incident of same illumination intensity, no matter which point of camera watch region, its condition { from the illumination light of omnirange (360 ° of directions) the equal angular situation with the incident of same illumination illumination } is all identical.
Fig. 6 is that expression is for rectangular-shaped camera watch region R, from the state of 8 each area source a～h irradiating illumination light.With the situation of Fig. 5 similarly, from 8 area sources, illumination light penetrates with parastate, is incident in all of camera watch region R with predetermined angular θ.
Therefore, in the arbitrfary point with the ABCD institute area surrounded of camera watch region R, with the incident of same illumination intensity, no matter camera watch region R which point, its condition is all identical from the illumination light of omnirange (360 ° of directions) equal angular.That is to say, from the illumination light of omnirange (360 ° of directions) equal angular with the incident of same illumination intensity.
Below, be illustrated at the lighting unit of the 2nd embodiment of the present invention.
In the present embodiment, combination LED and prism plate are used.
Same with the 1st embodiment, a plurality of LED are arranged in annularly on the supporting member on plane, be disposed on the camera watch region.But LED does not give angle, is configured as respectively under the court.Therefore, from the emitted light of each LED, the strongest light component (chief ray) is parallel to each other.
Fig. 7 (a) is that so vertical view of the light source of configuration is watched in expression from the below, and Fig. 7 (b) is the A-A sectional side view of Fig. 7.In addition, this figure represents used for convenience of explanation ideograph, in fact, LED be shorten be spaced a plurality of.
Shown in Fig. 7 (b), in the present embodiment, LED2 is installed in supporting member 3, and making becomes quadrature from the chief ray of the emitted light of LED2 with respect to the plane that includes camera watch region.
At the light emitting side of this light source, prism plate is cut apart and be mounted.As following ground, the prism plate of cutting apart is also bigger than camera watch region, makes the shape that the light injection part is divided into equal equal angles.
So-called prism plate is the side at transparent plate, is arranged in parallel a plurality of sections prism triangular in shape along long axis direction, and so-called mountain and paddy are that linearity ground forms continuously.Prism plate for example in liquid level display frame, is located between back side light and the liquid crystal panel for the light with liquid crystal panel makes evenly.
As shown in Figure 8, this kind prism plate is cut out the size of the area source that desire forms, and this preparation is a plurality of.Prism plate is formed on the long axis direction of the prism of prism plate 5 as shown in Figure 8, is cut out along the direction with the about quadrature of central shaft r-r of fan-shaped area source.
That is to say that when prism plate was installed on above-mentioned light source, the directional light emitted from prism plate cut out in the mode that the incident angle that approximately equates is incident in camera watch region R.
In addition, as shown in Figure 9, be installed on the light emitting side of light source shown in Figure 7.In Fig. 9,8 pieces of prism plates 5 are installed; Lighting unit becomes the state with 45 ° equivalent arrangements 8 area sources same with the 1st embodiment.
Figure 10 is the figure that amplifies the part that 1 piece of prism plate is installed of expression light source.Figure 10 (a) is a vertical view of watching lighting source from the below, and Figure 10 (b) is a side view of watching the light source of Figure 10 (a) from the A direction, and Figure 10 (c) is a front view of watching the light source of Figure 10 (a) from the B direction.
As Figure 10 (b), (c) shown in, prism plate 5 is to be installed on LED supporting member 3 via pillar 6.In addition, shown in the dotted line of this figure, also diffuser plate 4 can be set between prism plate 5 and LED2.
Shown in Figure 10 (b), be parallel illumination light from the emitted chief ray of each LED2, be incident in the prism inclined-plane of prism plate 5 and reflect, under the state of keeping parallelism towards 2 direction branches.One side's of branch of institute light component is with incident angle θ illumination camera watch region R.The opposing party's of branch of institute light component is not to be used.The prism angle of prism plate 5 is designed to incident angle θ becomes desired numerical value.
Figure 11 is the variation of employed prism plate in Figure 10.The situation of Figure 10, the light that is incident in prism plate 5 is divided into 2 directions, thereby from the emitted light of LED2, half is not used.Therefore the utilization ratio of light is relatively poor.
For head it off, the section shape of prism plate 5 is made to become right angled triangle.Thus, the light that is incident in prism only reflects in a direction, and can utilize all emitted light from LED2.
Figure 12 represents to use the lighting unit of the 2nd embodiment shown in Figure 10 to observe the experimental result that results from the pit on the pattern.In addition, in this experimental example, shown in Figure 12 (c), the number of the lighting source that use prism plate 5 is cut apart is 12, that is to say, with the state of 12 area sources of 30 ° of equivalent arrangements.
Figure 12 (a) is the pit (observation thing) that expression will result from a certain pattern, when the position separately on the right side (position that is equivalent to the C of camera watch region R) of the central authorities (position that is equivalent to the A of camera watch region R) of (position that is equivalent to the B of above-mentioned camera watch region R), visual field, visual field rotates 360 ° on the left of the visual field of image unit (ccd linear sensor), the chart of the luminance variations of the pit of image unit video picture.
In the figure, the longitudinal axis is briliancy (relative value), and transverse axis is the anglec of rotation of pit (observation thing).
In the arbitrfary point of camera watch region R,, if identical,, would not change in the briliancy of pit even make it rotation from the luminous intensity of all directions institute incident from the light of omnirange (360 ° of directions) the same incident angle of incident.
The situation of throwing light at lighting unit by conventional example shown in Figure 14, if when visual field central authorities (A) rotation pit, then luminance variations approximately be ± 8%.Relative therewith, in the present invention, shown in Figure 12 (a), even the rotation pit, at arbitrary position of left side, visual field (B), visual field central authorities (A), right side, visual field (C), luminance variations also seldom.The variation of briliancy all approximately ± 3%, is compared and can be reduced to below half with conventional example in arbitrary position.
Figure 12 (b) is the pit (observation thing) that expression will be created in a certain pattern, the chart of the luminance variations when the left side, visual field of image unit (B), visual field central authorities (A), right side, visual field (C) mobile variation.In the figure, the longitudinal axis is represented briliancy (relative value), and transverse axis is the position of expression image unit.From the left side of the point marked and drawed is left side, visual field (B), visual field central authorities (A), right side, visual field (C).That is to say (B), visual field central authorities (A), the briliancy difference when right side, visual field (C) observes same pit in the visual field.
If all throw light on the same terms in the inspection area, even then make the change in location of placing pit (observation thing) which position of the visual field of inspection unit (no matter), because of watching thing is same pit, so its briliancy would not change.
In addition, with the chart of single chain line represented " (old) ", be the experimental result of the situation of throwing light on of the lighting unit by conventional example shown in Figure 14 among this figure.
Shown in Figure 12 (b), the situation of conventional example, when the position of mobile pit, then great changes have taken place for briliancy.Especially, at visual field central authorities (A), briliancy can rise, and as at visual field left side (B), right side, visual field (C), when being the end of visual field (camera watch region), then briliancy can reduce.The variation of briliancy approximately is ± 8%.
Relative therewith, in the present invention, at visual field central authorities (A), briliancy can rise, and at visual field left side (B), right side, visual field (C) trend of reduction is arranged, but its variation approximately be ± 4.5%, compare with conventional example, can be reduced to about half.
In addition,, that is to say that the number of area source is many more, can shine uniform illumination light from omnirange more for camera watch region with the quantity that lighting source is cut apart with prism plate.
But as above-mentioned ground, it is all parallel light must to be radiated at camera watch region, thereby the size of area source, must or go back big than it with the big or small identical of camera watch region.
Therefore, if increase the area source number, then the diameter of its corresponding lighting unit (size) can become big, makes device become and maximizes.Therefore, restricted on the viewpoint of the maximization of anti-locking apparatus for the number of cutting apart lighting unit (number of area source), and think so that represented 12 to cut apart (12 area sources) more suitable in the above-mentioned experimental example.
Lighting source of the present invention is applicable to the testing fixture in order to the surface state of checking object, below, be directed to the situation that illumination light source of the present invention is applicable to inspection apparatus for pattern and be illustrated.
To be expression be applicable to the figure of embodiment of the situation of inspection apparatus for pattern with lighting unit of the present invention to Figure 13, and this figure is the figure that watches the testing fixture of present embodiment from the side.
In Figure 13, the dark field illumination unit (indirect illumination unit) 10 of irradiation indirect illumination light is the lighting source shown in the 1st or the 2nd embodiment, and be located at annularly image unit 11 around, image unit is from 360 ° of comprehensive workpiece W that throw light on.
Image unit 11 is to be ccd linear sensor 11a and to be had the lens unit 11b that the pattern on the workpiece W is imaged on the optical element on this ccd linear sensor 11a and constituted by: imaging apparatus.
Image unit driving mechanism 12 is installed on image unit 11, drives image unit driving mechanism 12 by scanning element 13, thus, image unit 11 scans (scan) in this figure arrow direction.
Be provided with and check that object is the workpiece W of the pattern of distribution etc., by mounting on workpiece holding unit (work piece platform) 14, and by image unit 11 in the enterprising line scanning of workpiece W, take the pattern of the distribution that is formed on the workpiece W etc.
Above-mentioned scanning element 13, image unit 11, dark field illumination unit 10 etc. are controlled by control part 15.
In Figure 13, when workpiece W by mounting on workpiece holding unit (work piece platform) 14 time, then dark field illumination unit (indirect illumination unit) 10 lit a lamp.
Then, image unit 11 is scanned towards the opposing party's side (this figure from right to left) by side's side by the width of scanning element 13 at workpiece W.Wiring pattern picture on the workpiece W that is thrown light on by dark field illumination unit 10 is rasterized the ccd linear sensor 11a in image unit 11, and is stored at control part 15.
After the shooting of finishing Wiring pattern, then turned off the light in dark field illumination unit 10.
15 pairs of control parts carry out image by image unit 11 captured picture patterns to be handled, and zero defect is arranged on the check pattern.In addition, unusually just export alarm etc. if having.
If finish the inspection of this pattern, the then next workpiece W that checks by mounting on workpiece holding unit 14, below, repeat above-mentioned action.
In addition, in above-mentioned, the pattern inspection that is directed to substrate is illustrated, but for the situation of checking at the pattern of film shape workpiece, different in the transfer mechanism part that is provided with film shape workpiece, but can realize with same device.
Claims (4)
1. illumination light source is characterized in that:
To the area source of irradiated area irradiation directional light, dispose annularly at grade a plurality of,
The size of each area source is, the illuminated irradiation area from the light of each area source on illuminated area surface comprises all sizes in illuminated zone.
2. illumination light source as claimed in claim 1 is characterized in that:
Above-mentioned a plurality of area source is to arrange a plurality of LED a plurality of on same plane and constitute,
LED in each area source is with illuminated in the mode in illuminated zone from the directional light of each area source, towards the inboard oblique arrangement of the ring-type that disposes each area source.
3. illumination light source as claimed in claim 1 is characterized in that:
Above-mentioned a plurality of area source is that light emitting side at a plurality of LED disposes prism plate a plurality of annularly and constitutes, and described prism plate will penetrate as directional light from the light that above-mentioned a plurality of LED penetrate,
Constitute the prism plate of each area source,, make the light that penetrates from each LED dispose the ring-type inboard refraction of each area source with from the illuminated mode of the directional light of each prism plate in illuminated zone.
4. inspection apparatus for pattern possesses:
The dark field illumination unit is for forming figuratum workpiece from oblique irradiation indirect illumination light;
Image unit is taken the above-mentioned pattern that is thrown light on by above-mentioned dark field illumination unit;
The workpiece holding unit that keeps workpiece; And
Control part, the quality according to judge pattern by the captured pattern image of above-mentioned image unit is characterized in that,
The dark field illumination unit be claim 1,2 or claim 3 described in illumination light source.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP089874/2008 | 2008-03-31 | ||
| JP2008089874A JP4968138B2 (en) | 2008-03-31 | 2008-03-31 | Illumination light source and pattern inspection apparatus using the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101551078A true CN101551078A (en) | 2009-10-07 |
| CN101551078B CN101551078B (en) | 2013-05-08 |
Family
ID=41155469
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200910130153 Expired - Fee Related CN101551078B (en) | 2008-03-31 | 2009-03-27 | Light source for lighting and pattern detection device using the same |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP4968138B2 (en) |
| CN (1) | CN101551078B (en) |
| TW (1) | TWI442016B (en) |
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| CN102829447A (en) * | 2012-08-10 | 2012-12-19 | 昆山市和博电子科技有限公司 | Three-point and one-line type light source mounting mechanism |
| CN103743751A (en) * | 2014-01-15 | 2014-04-23 | 唐山英莱科技有限公司 | Unbeveledend butt weld detection system based on reflecting two-way converging adjustable light path |
| CN105372266A (en) * | 2015-12-01 | 2016-03-02 | 中国科学院上海技术物理研究所 | Apparatus and method for fast imaging of cadmium zinc telluride wafer corrosion morphology |
| CN107228864A (en) * | 2016-03-24 | 2017-10-03 | 苍南县三维电子塑胶有限公司 | The detecting system of panel surface defect |
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| JP3570815B2 (en) * | 1996-04-26 | 2004-09-29 | 松下電器産業株式会社 | Image pickup device for component mounting machine |
| US5690417A (en) * | 1996-05-13 | 1997-11-25 | Optical Gaging Products, Inc. | Surface illuminator with means for adjusting orientation and inclination of incident illumination |
| JP3726150B2 (en) * | 1997-06-12 | 2005-12-14 | 株式会社ダイレクトコミュニケーションズ | Micro-area illumination device |
| JP2002328094A (en) * | 2001-05-02 | 2002-11-15 | Nidec Tosok Corp | Led ring lighting and image inspecting device with it |
| EP1644661A4 (en) * | 2002-07-12 | 2007-09-05 | Electro Scient Ind Inc | Method and apparatus for uniform lighting source |
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| KR100737758B1 (en) * | 2004-06-30 | 2007-07-10 | 아주하이텍(주) | Automated optical inspection system including lighting device and method for inspecting of the same |
| JP4670375B2 (en) * | 2005-02-03 | 2011-04-13 | パナソニック株式会社 | Imaging device |
| JP4953086B2 (en) * | 2007-10-25 | 2012-06-13 | キリンテクノシステム株式会社 | PTP sheet inspection equipment |
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2008
- 2008-03-31 JP JP2008089874A patent/JP4968138B2/en not_active Expired - Fee Related
-
2009
- 2009-02-09 TW TW98104058A patent/TWI442016B/en not_active IP Right Cessation
- 2009-03-27 CN CN 200910130153 patent/CN101551078B/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102829447A (en) * | 2012-08-10 | 2012-12-19 | 昆山市和博电子科技有限公司 | Three-point and one-line type light source mounting mechanism |
| CN103743751A (en) * | 2014-01-15 | 2014-04-23 | 唐山英莱科技有限公司 | Unbeveledend butt weld detection system based on reflecting two-way converging adjustable light path |
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| CN107228864A (en) * | 2016-03-24 | 2017-10-03 | 苍南县三维电子塑胶有限公司 | The detecting system of panel surface defect |
| CN108107050A (en) * | 2016-11-25 | 2018-06-01 | 上海微电子装备（集团）股份有限公司 | Adjust the method for beam tilts and the lighting device of adjustment beam tilts |
| CN111246913A (en) * | 2018-07-31 | 2020-06-05 | 麦特拉斯株式会社 | Light irradiation device and method for manufacturing light irradiation device |
| CN111246913B (en) * | 2018-07-31 | 2021-10-26 | 麦特拉斯株式会社 | Light irradiation device and method for manufacturing light irradiation device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4968138B2 (en) | 2012-07-04 |
| TW200940949A (en) | 2009-10-01 |
| CN101551078B (en) | 2013-05-08 |
| JP2009244037A (en) | 2009-10-22 |
| TWI442016B (en) | 2014-06-21 |
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