CN108008658B - Data acquisition system and acquisition method - Google Patents
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- CN108008658B CN108008658B CN201610934139.2A CN201610934139A CN108008658B CN 108008658 B CN108008658 B CN 108008658B CN 201610934139 A CN201610934139 A CN 201610934139A CN 108008658 B CN108008658 B CN 108008658B
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- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
- G05B19/042—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
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- G—PHYSICS
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- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
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Abstract
The invention discloses a data acquisition system and an acquisition method, wherein the system comprises: an upper computer; the motion control cabinet comprises a motion main control card, a motion control board card, an IO board card, a data acquisition card, a first GbE control bus, a first SRIO data bus and a first synchronization bus, wherein the first GbE control bus, the first SRIO data bus and the first synchronization bus are arranged on a cabinet back plate and connected with the motion main control card, the motion control board card, the IO board card and the data acquisition card; the data acquisition case comprises a data main control card, a data receiving card, a second GbE control bus, a second SRIO data bus and a second synchronous bus, wherein the second GbE control bus, the second SRIO data bus and the second synchronous bus are arranged on a back plate of the case and connected with the data main control card and the data receiving card, and the data main control card is connected with an upper computer. The invention adopts the data acquisition case to acquire the data in the motion control case on the premise of not influencing the synchronous servo control, thereby improving the real-time property and the reliability of mass data acquisition and meeting the requirements of the photoetching machine on the real-time property and the mass data property.
Description
Technical Field
The invention relates to the field of synchronous control of photoetching machines, in particular to a data acquisition system and a data acquisition method.
Background
The acquisition and processing of high-speed mass real-time data are always a technical problem, and the conventional data transmission band is narrow in width, poor in real-time processing capability and inflexible in data storage capacity. The traditional parallel backplane system architecture used in the lithography machine is limited by bus clock, data bit width and electromagnetic interference, so that the traditional parallel backplane system architecture has difficulty in bearing such a large data traffic requirement. With the requirements of more moving tables of the photoetching machine, more motor shafts, large information amount, complex motion control algorithm, real-time control and the like, the data amount generated in the control process is more and more large, a high-bandwidth transmission bus and a high-frequency CPU are adopted to reduce the data transmission and processing time so as to quickly complete the servo cycle, and meanwhile, the requirements of supporting mass data acquisition and being more rigorous are provided. Particularly, the magnetic levitation dual-stage photoetching machine has the advantages that the total data amount is greatly increased, the servo sampling frequency is required to be doubled, and the real-time data acquisition is required to be higher.
Disclosure of Invention
The invention provides a data acquisition system and an acquisition method, which aim to solve the problems in the prior art.
In order to solve the technical problems, the technical scheme of the invention is as follows: a data acquisition system comprising:
an upper computer;
the motion control cabinet comprises a motion main control card, a plurality of motion control board cards, an IO board card, a data acquisition card, a first GbE control bus, a first SRIO data bus and a first synchronization bus, wherein the first GbE control bus, the first SRIO data bus and the first synchronization bus are arranged on a cabinet back plate and connected with the motion main control card, the motion control board cards, the IO board cards and the data acquisition card;
the data acquisition case comprises a data main control card, a data receiving card, a second GbE control bus, a second SRIO data bus and a second synchronous bus, wherein the second GbE control bus, the second SRIO data bus and the second synchronous bus are arranged on a case back plate and connected with the data main control card and the data receiving card, and the data main control card is connected with the upper computer.
Furthermore, the motion main control card and the data acquisition card both adopt PowerPC board cards.
Furthermore, the motion main control card is connected with the upper computer through the Ethernet.
Furthermore, the motion control cabinet further comprises a data exchange card, and the data exchange card is connected with the IO board card through a backplane bus.
Furthermore, a plurality of motion control cabinets are arranged, each motion control cabinet corresponds to one data receiving card, and the data receiving cards are connected with the data acquisition cards through optical fibers.
Furthermore, the data master control card adopts a PowerPC board card.
Furthermore, the data main control card is connected with the upper computer through an Ethernet.
The invention also provides a data acquisition method of the data acquisition system, which comprises the following steps:
s1: a sensor in the motion terminal converts the collected multi-channel analog signals into optical signals and sends the optical signals to an IO board card;
s2: the upper computer sends the motion control instruction to a motion main control card in the motion control cabinet;
s3: the motion master control card analyzes the received motion control instruction and sends the motion control instruction to the IO board card through a first GbE control bus;
s4: the IO board card converts the received optical signals into digital signals, and meanwhile, the analyzed motion control instruction commands are arranged and packaged and synchronously distributed to the data acquisition card and each motion control board card through a first SRIO data bus;
s5: each motion control board card is synchronously servo-controlled through a first synchronous bus, the motion control board cards calculate motor control quantity according to motion control instructions, and the motion control instructions and the calculated motor control quantity are returned to the IO board cards and the data acquisition cards through a first SRIO data bus;
s6: the IO board card processes the received motor control quantity and then outputs the motor control quantity to the motion terminal, and meanwhile, the control process information is fed back to the motion main control card;
s7: the data acquisition card collects control process information and transmits the collected data to a data receiving card of the data acquisition case through optical fibers, and the data receiving card transmits the data to the data main control card through a second SRIO data bus;
s8: and the data main control card sends the control process information or the emergency information to the upper computer for storage through a second GbE control bus.
Further, in step S2, the upper computer sends the motion control instruction to the motion master control card through the ethernet.
Further, in step S6, the IO board processes the received motor control amount through the internal FPGA.
Further, the motor control quantity is processed by the FPGA and then is sent to the data exchange card through an optical fiber to be subjected to digital-to-analog conversion and then is output to the motion terminal.
Further, in step S7, the data acquisition card and the data receiving card are connected by an optical fiber.
According to the data acquisition system and the data acquisition method provided by the invention, the data in the motion control cabinet is acquired by adopting the independent data acquisition cabinet on the premise of not influencing synchronous servo control, so that the real-time performance and the reliability of mass data acquisition are improved; the data acquisition case comprises a data main control card and a data receiving card, so that the data acquisition system is more flexible and has stronger expandability; the data acquisition case and the motion control case adopt SRIO data buses to replace VME64x parallel buses, so that the bandwidth is improved, the reliability of data is improved, and the number of occupied pins is reduced; the data acquisition case and the motion control case adopt GbE control buses to replace the existing VME buses, so that the transmission bandwidth is improved; the data acquisition card adopts the PowerPC board card to realize data acquisition, improves the data acquisition capacity, reduces the calculation time, and meets the high requirements of development of the photoetching machine industry on real-time performance and big data performance.
Drawings
FIG. 1 is a schematic diagram of the data acquisition system of the present invention;
FIG. 2 is a functional diagram of the motion control housing of the present invention;
FIG. 3 is a timing diagram of data acquisition during a servo cycle of the present invention;
FIG. 4 is a flow chart of the control process data acquisition of the present invention.
Shown in the figure: 1. an upper computer; 2. a motion control cabinet; 21. a motion master control card; 22. a motion control board card; 23. IO board card; 24. a data acquisition card; 25. a first GbE control bus; 26. a first SRIO data bus; 27. a first synchronization bus; 28. a data exchange card; 3. a data acquisition chassis; 31. a data master control card; 32. a data receiving card; 33. a second GbE control bus; 34. a second SRIO data bus; 35. a second synchronous bus; 4. and (5) synchronously controlling the board card.
Detailed Description
The invention is described in detail below with reference to the attached drawing figures:
as shown in fig. 1-2, the present invention provides a data acquisition system comprising:
the upper computer 1 adopts a workstation, applies a Unix or windows operating system and is used for sending a motion control instruction and storing control process data;
the motion control cabinet 2 comprises a motion main control card 21, a plurality of motion control board cards 22, an IO board card 23, a data acquisition card 24, a first GbE control bus 25, a first SRIO data bus 26 and a first synchronization bus 27 which are arranged on a cabinet back plate and connected with the motion main control card 21, the motion control board cards 22, the IO board cards 23 and the data acquisition card 24, wherein the motion main control card 21 is connected with the upper computer 1 through an Ethernet; the motion control cabinet 2 further includes a data exchange card 28, which is connected to the IO board card 23 through a backplane bus and is configured to perform digital-to-analog conversion on the motor control quantity. The motion main control card 21 and the data acquisition card 24 both adopt PowerPC (Performance Optimization With Enhanced RISC-Performance computing, central processing unit of reduced instruction set RISC architecture) boards, wherein the motion main control card 21 is a PowerPC main board, and realizes communication connection With the upper computer 1 through ethernet, and simultaneously communicates With other boards in the motion control case 2 through a first GbE control bus 25 to complete program downloading, register/memory reading and writing, state acquisition and interrupt response of the motion control board 22, the IO board 23 and the data acquisition card 24, and realize functions such as synchronous parameter issuing, synchronous scanning queue issuing, synchronous execution state acquisition and the like through PCIe port; a first SRIO data bus 26, which mainly implements data transmission functions, including interferometer position data, sensor data, motion control data, and actuator control data; the boards in the motion control cabinet 2 are synchronized through a first synchronization Bus (Sync _ Bus)27 to realize strict servo synchronization of the motion control board 22, the IO board 23 and the data acquisition card 24, trigger system synchronous servo interruption, broadcast a synchronous scanning state, and acquire synchronous execution states of the motion control board 22 and the IO board 23; external synchronization: the servo period synchronization and the transmission of the synchronous state/information of the motion control system and the measuring system are realized through an external synchronization interface (Mo-Sync). Synchronization between the motion control cards 23: the synchronous timing control of the motion control card 23 by the synchronous control board card 4 is realized through the first synchronous bus 27, the synchronous servo interrupt of the CPUs of all the motion control cards 23 is triggered, the synchronous scanning state broadcasted by the synchronous control board card 4 is received, and the synchronous execution information is uploaded; the data acquisition card 24 is provided with a plurality of data acquisition cards 24, and the synchronization among the data acquisition cards 24 is as follows: the synchronous timing control of the data acquisition card 24 by the synchronous control board 4 is realized through the first synchronous bus 27, the synchronous servo interrupt of the CPUs of all the data acquisition cards 24 is triggered, the synchronous scanning state broadcasted by the synchronous control board 4 is received, and the synchronous execution information is uploaded.
The SRIO (serial Rapid IO) bus is a serial bus, can avoid some defects of the parallel bus, such as difficult wiring, easy generation of parallel crosstalk and the like, the single-channel highest transmission rate of the SRIO bus can reach 6.25Gbps, a 4x mode is supported, namely data of 6.25 × 4-25 Gbps can be transmitted at one time, the maximum load of the SRIO bus is 256Byte, meanwhile, the SRIO bus has very high packing efficiency (> 90%), the effectiveness of data transmission is greatly improved, in addition, the SRIO bus has a strict checking and error correcting mechanism, supports CRC16, and the accuracy of data transmission is strictly ensured.
Data acquisition machine case 3, including data master control card 31 and data receiving card 32 and locate on the quick-witted case backplate and with second GbE control bus 33, second SRIO data bus 34 and the second synchronous bus 35 that data master control card 31 and data receiving card 32 are connected, data master control card 31 with host computer 1 connects. The data main control card 31 is a PowerPC board card, and the data receiving card 32 is connected with the data acquisition card 24 through an optical fiber, so as to receive data on the data acquisition card 24 in the motion control cabinet 2. Data from the data acquisition card 24 is derived from data multicast or broadcast by the first SRIO data bus 26. The data receiving card 32 receives the servo cycle data through a sampling frequency faster than the servo cycle.
Referring to fig. 1, a plurality of motion control cabinets 2 are provided, and each motion control cabinet 2 corresponds to one data receiving card 32.
The invention also provides a data acquisition method of the data acquisition system, which comprises the following steps:
s1, a sensor in the motion terminal converts collected multi-channel analog signals into optical signals, the optical signals are sent to an IO board 23, the IO board 23 communicates with an external sensor through HSS L1-16 ports and communicates with an internal board through an SRIO port, wherein the sensor comprises but is not limited to a pressure sensor, a flow sensor, a temperature sensor, a position sensor, a speed sensor, a limit sensor and the like, the sensor is used for obtaining states of various motion terminals, reading and modifying current operation machine constants, the motion terminals are actuators, and comprise a short-stroke motor, a long-stroke motor and a power amplifier thereof, a small-sized vibration absorber (MAM), a silicon chip ejection motor (EPIN) and a power amplifier thereof, various pneumatic switches, a hardware switch and the like.
S2: the upper computer 1 sends the motion control instruction to the motion main control card 21 in the motion control case 2, specifically, the upper computer 1 sends the motion control instruction to the motion main control card 21 through the ethernet, and the motion main control card 21 adopts a PowerPC board card.
S3: the motion master control card 21 parses the received motion control command and sends the motion control command to the IO board card 23 through the first GbE control bus 25.
S4: the IO board 23 converts the received optical signals into digital signals, and at the same time, arranges and packages the analyzed motion control instruction commands, and synchronously distributes the commands to the data acquisition card 24 and each motion control board 22 through the first SRIO data bus 26.
S5: each motion control board 22 is synchronously servo-controlled through a first synchronization bus 27, each motion control board 22 calculates a motor control amount according to a motion control instruction, and the motion control instruction and the calculated motor control amount are returned to the IO board 23 and the data acquisition card 24 through a first SRIO data bus 26.
S6: the IO board 23 processes the received motor control quantity and outputs the processed motor control quantity to the motion terminal, and simultaneously feeds back control process information to the motion main control card 21, specifically, the IO board 23 processes the received motor control quantity through an internal FPGA (Field-programmable gate Array), and the processed motor control quantity is sent to the data exchange card 28 through an optical fiber for digital-to-analog conversion and then output to the motion terminal to perform motion control. In the motion control process, data acquisition of the control process is required, and of course, data of interest may be acquired after being screened, as shown in fig. 4, the method includes 6 steps of controller input and output, actuator system output, actuator output, sensor input, sensor output, and measurement system input data.
S7: the data acquisition card 24 collects control process information, transmits the collected data to the data receiving card 32 of the data acquisition case through optical fibers, the data receiving card 32 transmits the data to the data main control card 31 through the second SRIO data bus 34, the data main control card 31 adopts a PowerPC board, and the data acquisition card 24 is connected with the data receiving card 32 through optical fibers. The data of the control process is collected through the data acquisition card 24, tools such as an oscilloscope, a data analyzer and the like are required to be provided, the data acquisition card 24 is firstly input with the sampling frequency, the data acquisition card 24 is informed to collect the data, the data are simultaneously sent to the data receiving card 32 in a multicast mode when being sent to other board cards, and after the data receiving card 32 receives the data, the data are processed and monitored according to the requirements of the upper computer 1 and the provided data processing tools. In this embodiment, each servo cycle may collect 32 bits of data, including 280 hardware data such as various sensors and actuators, and 400 operation control process data.
The invention can realize real-time mass data acquisition, can finish the whole flow of data from receiving to output in a specified time (such as 150us) to finish the acquisition of more than 1000 32-bit data, and estimates the data transmission delay:
the IO board card 23 waits for external data to arrive from an HSS L protocol to an SRIO protocol and finishes the external data in 10 us;
b: the data is sent to the data acquisition card 24 through the data exchange card 28 in a multicast mode, and the data acquisition is completed within 15 us;
c: the data acquisition card 24 sends the data to the data receiving card 32, which is completed within 20 us;
d: the upper computer 1 processes the data and finishes the processing within 40 us.
S8: the data main control card 31 transmits the control process information or the emergency information to the upper computer 1 for storage through the second GbE control bus 33.
As shown in fig. 3, for the specific process of data acquisition in one servo cycle in this embodiment, it is assumed that the number of the motion control cards 22 is 4, and the number is respectively the first motion control card 22a to the fourth motion control card 22d, and the number of the IO boards 23 is 2, and the number is respectively the first IO board 23a and the second IO board 23 b:
time T0:
the servo cycle begins;
external sensor data of HSS L1-HSS L8 ports of the IO board card 23 are prepared;
the HSS L9-HSS L12 ports wait for receiving external sensor data;
the HSS L13-HSS L16 ports wait for receiving interferometer measurement data;
time T1:
the SRIO driver in the first IO board card 23a packages the data at the ports HSS L1-HSS L4 into P1 packets, sends P1 packets destined for the first to fourth motion control cards 22 a-22 d, and the data acquisition card 24;
the SRIO driver in the first IO board card 23a packages the data at the ports HSS L5-HSS L8 into a P2 packet, sends a P2 packet destined for the first motion control card 22a, the second motion control card 22b, and the data acquisition card 24;
the HSS L1-HSS L8 ports trigger updating of external sensor data.
Time T2:
the CPU of the first motion control card 22a acquires the P1 packet and the P2 packet;
the CPU of the second motion control card 22b acquires the P1 packet and the P2 packet;
the CPU of the third motion control card 22c acquires the P1 packet;
the CPU of the fourth motion control card 22d acquires the P1 packet;
the data acquisition card 24 acquires a P1 packet and a P2 packet;
time T3:
external sensor data of the HSS L9 to HSS L12 ports of the IO board 23 are ready.
Time T4:
the SRIO driver of the second IO board card 23b packages the data at the ports HSS L9 to HSS L12 into a P3 packet, sends the P3 packet to the destinations of the first to fourth motion control cards 22a to 22d and the data acquisition card 24;
time T5:
the CPU of the first motion control card 22a acquires the P3 packet;
the CPU of the second motion control card 22b acquires the P3 packet;
the CPU of the third motion control card 22c acquires the P3 packet;
the CPU of the fourth motion control card 22d acquires the P3 packet;
the data acquisition card 24 acquires a P3 packet;
time T6:
interferometer data for the HSS L13 to HSS L16 ports of the IO card 23 are ready.
Time T7:
the SRIO driver of the second IO board card 23b packages the data at the HSS L13 port into a P4 packet, and sends a P4 packet destined for the first to fourth motion control cards 22a to 22d and the data acquisition card 24;
time T8:
the CPU of the first motion control card 22a acquires the P4 packet;
the CPU of the second motion control card 22b acquires the P4 packet;
the CPU of the third motion control card 22c acquires the P4 packet;
the CPU of the fourth motion control card 22d acquires the P4 packet;
the data acquisition card 24 acquires a P4 packet;
time T9:
the CPU of the first motion control card 22a completes the calculation, packages the setpoint data and the calculation data into a P5 packet, and sends a P5 packet destined for the first IO card 23 a;
the CPU of the second motion control card 22b completes the calculation, packages the setpoint data and the calculation data into a P6 packet, and sends a P6 packet destined for the first IO card 23 a;
the CPU of the third motion control card 22c completes the calculation, packages the setpoint data and the calculation data into P7, and sends a P7 packet destined for the second IO card 23 b;
the CPU of the fourth motion control card 22d completes the calculation, packages the setpoint data and the calculation data into a P8 packet, and sends a P8 packet destined for the second IO card 23 b; .
Time T10:
the SRIO driver of the first IO board 23a receives the P5 and P6 packets, and completes the parsing;
the SRIO driver of the second IO board 23b receives the P7 and P8 packets, and completes the parsing;
the data acquisition card 24 receives data of P5-P8 packets;
time T11:
all the set point data are sent out through the corresponding HSS L ports, all the operations in one servo period are completed, and the next servo trigger is waited.
In summary, the data acquisition system and the data acquisition method provided by the invention adopt the independent data acquisition case 3 to acquire the data in the motion control case 2 on the premise of not influencing the synchronous servo control, thereby improving the real-time performance and reliability of mass data acquisition; the data acquisition case 3 comprises a data main control card 31 and a data receiving card 32, so that the data acquisition system is more flexible and has stronger expandability; the data acquisition case 3 and the motion control case 2 both adopt an SRIO data bus to replace a VME64x parallel bus, so that the bandwidth is improved, the reliability of data is improved, and the number of occupied pins is reduced; the data acquisition case 3 and the motion control case 2 both adopt GbE control buses to replace the existing VME buses, so that the transmission bandwidth is improved; the data acquisition card 24 adopts the PowerPC board card to realize data acquisition, improves the data acquisition capacity, reduces the calculation time, and meets the high requirements of development of the photoetching machine industry on real-time performance and big data performance.
Although the embodiments of the present invention have been described in the specification, these embodiments are merely provided as a hint, and should not limit the scope of the present invention. Various omissions, substitutions, and changes may be made without departing from the spirit of the invention and are intended to be within the scope of the invention.
Claims (12)
1. A data acquisition system, comprising:
an upper computer;
the motion control cabinet comprises a motion main control card, a plurality of motion control board cards, an IO board card, a data acquisition card, a first GbE control bus, a first SRIO data bus and a first synchronization bus, wherein the first GbE control bus, the first SRIO data bus and the first synchronization bus are arranged on a cabinet back plate and connected with the motion main control card, the motion control board cards, the IO board cards and the data acquisition card;
the data acquisition case comprises a data main control card, a data receiving card, a second GbE control bus, a second SRIO data bus and a second synchronous bus, wherein the second GbE control bus, the second SRIO data bus and the second synchronous bus are arranged on a case back plate and connected with the data main control card and the data receiving card;
the data receiving card is connected with the data acquisition card through an optical fiber.
2. The data acquisition system of claim 1, wherein the motion master control card and the data acquisition card both employ PowerPC board cards.
3. The data acquisition system of claim 1, wherein the motion master control card is connected to the host computer via an ethernet.
4. The data acquisition system of claim 1, wherein the motion control chassis further comprises a data exchange card connected to the IO board via a backplane bus.
5. The data acquisition system according to claim 1, wherein a plurality of motion control cabinets are provided, each motion control cabinet corresponding to one of the data receiving cards, and the data receiving cards are connected to the data acquisition card through optical fibers.
6. The data acquisition system as claimed in claim 1, wherein the data master card is a PowerPC card.
7. The data acquisition system of claim 1, wherein the data master control card is connected to the upper computer via an ethernet.
8. A data acquisition method of the data acquisition system according to claim 1, comprising the steps of:
s1: a sensor in the motion terminal converts the collected multi-channel analog signals into optical signals and sends the optical signals to an IO board card;
s2: the upper computer sends the motion control instruction to a motion main control card in the motion control cabinet;
s3: the motion master control card analyzes the received motion control instruction and sends the motion control instruction to the IO board card through a first GbE control bus;
s4: the IO board card converts the received optical signals into digital signals, and meanwhile, the analyzed motion control instructions are arranged and packaged and synchronously distributed to the data acquisition card and each motion control board card through a first SRIO data bus;
s5: each motion control board card is synchronously servo-controlled through a first synchronous bus, the motion control board cards calculate motor control quantity according to motion control instructions, and the motion control instructions and the calculated motor control quantity are returned to the IO board cards and the data acquisition cards through a first SRIO data bus;
s6: the IO board card processes the received motor control quantity and then outputs the motor control quantity to the motion terminal, and meanwhile, the control process information is fed back to the motion main control card;
s7: the data acquisition card collects control process information and transmits the collected data to a data receiving card of the data acquisition case through optical fibers, and the data receiving card transmits the data to the data main control card through a second SRIO data bus;
s8: and the data main control card sends the control process information or the emergency information to the upper computer for storage through a second GbE control bus.
9. The data acquisition method according to claim 8, wherein in step S2, the upper computer sends the motion control command to the motion master control card through ethernet.
10. The data acquisition method according to claim 8, wherein in step S6, the IO board processes the received motor control quantity through an internal FPGA.
11. The data acquisition method as claimed in claim 10, wherein the motor control quantity is processed by the FPGA and then sent to the data exchange card through an optical fiber for digital-to-analog conversion and then output to the motion terminal.
12. The data acquisition method according to claim 8, wherein in step S7, the data acquisition card and the data receiving card are connected by an optical fiber.
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| CN111813051B (en) * | 2020-09-10 | 2021-02-02 | 江苏集萃苏科思科技有限公司 | Motion control device |
| CN113983924A (en) * | 2021-10-27 | 2022-01-28 | 北京航天巨恒系统集成技术有限公司 | Coordinate calculation system, method and device of multi-axis laser interferometer |
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| CN105511502A (en) * | 2015-12-24 | 2016-04-20 | 清华大学 | VPX bus-based workpiece bench synchronous motion control system and method |
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