CN108008658A - A kind of data collecting system and acquisition method - Google Patents
A kind of data collecting system and acquisition method Download PDFInfo
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- CN108008658A CN108008658A CN201610934139.2A CN201610934139A CN108008658A CN 108008658 A CN108008658 A CN 108008658A CN 201610934139 A CN201610934139 A CN 201610934139A CN 108008658 A CN108008658 A CN 108008658A
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
- G05B19/042—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
- G05B19/0423—Input/output
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/20—Pc systems
- G05B2219/24—Pc safety
- G05B2219/24215—Scada supervisory control and data acquisition
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- Automation & Control Theory (AREA)
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Abstract
The invention discloses a kind of data collecting system and acquisition method, which includes:Host computer;Motion control cabinet, it is connected including movement main control card, motion control board, I O board card, data collecting card and the first GbE controlling bus, the first SRIO data/address bus and the first synchronous bus being connected on case back plate and with movement main control card, motion control board, I O board card and data collecting card, movement main control card with host computer;Data acquisition cabinet, including data main control card, data receiver card and the 2nd GbE controlling bus, the 2nd SRIO data/address bus and the second synchronous bus being connected on case back plate and with data main control card and data receiver card, data main control card are connected with host computer.Data of the present invention using data acquisition cabinet in motion control cabinet is gathered on the premise of not influencing synchronous servo control, improve the real-time and reliability of mass data collection, meet requirement of the litho machine to real-time and big data.
Description
Technical field
The present invention relates to litho machine Synchronization Control field, and in particular to a kind of data collecting system and acquisition method.
Background technology
The collection and processing of high speed magnanimity real time data, are exactly a technical barrier always, existing data transfer bandwidth
Narrow, processing capability in real time is poor, and data storage capacity is dumb.The Traditional parallel back board system framework used in litho machine due to by
The limitation of bus clock, data bit width, electromagnetic interference, has been difficult to bear so big data traffic requirement.With photoetching
Machine sports platform number is more, and the motor number of axle is more, contain much information and compound movement control algolithm, real-time control etc. require, control
Process produce data volume it is increasing, use high bandwidth transfer bus and high-frequency CPU with reduce the transmission of data and
Processing time, to be rapidly completed servo period, while supports mass data collection to propose harsher requirement.Especially magnetic
Floating dual stage litho machine more requires the double of servo sample frequency, real time data is adopted while total amount of data is significantly lifted
Collection proposes the requirement of higher.
The content of the invention
The present invention provides a kind of data collecting system and acquisition method, to solve problems of the prior art.
In order to solve the above-mentioned technical problem, the technical scheme is that:A kind of data collecting system, including:
Host computer;
Motion control cabinet, including move main control card, some motion control boards, I O board card, data collecting card and set
Controlled on case back plate and with the first GbE that the movement main control card, motion control board, I O board card and data collecting card are connected
Bus, the first SRIO data/address bus and the first synchronous bus processed, the movement main control card are connected with the host computer;
Data acquisition cabinet, including data main control card, data receiver card and on case back plate and with the data
The 2nd GbE controlling bus, the 2nd SRIO data/address bus and the second synchronous bus that main control card is connected with data receiver card, the number
It is connected according to main control card with the host computer.
Further, the movement main control card and data collecting card use powerpc board card.
Further, connected between the movement main control card and the host computer by Ethernet.
Further, the motion control cabinet further includes data exchange card, is connected with the I O board card by core bus
Connect.
Further, the motion control cabinet is equipped with several, and each motion control cabinet connects with the data
Receive card to correspond to, the data receiver card is connected with the data collecting card by optical fiber.
Further, the data main control card uses powerpc board card.
Further, connected between the data main control card and the host computer by Ethernet.
The present invention also provides a kind of collecting method of above-mentioned data collecting system, comprise the following steps:
S1:The multichannel analog signals collected are converted into optical signal by sensor in motion terminals, are sent to I O board card;
S2:Motion control instruction is sent to the movement main control card in motion control cabinet by host computer;
S3:Movement main control card will receive motion control instruction and be parsed and be sent to by the first GbE controlling bus
I O board card;
S4:The optical signal of reception is converted into digital signal by I O board card, while the motion control instruction after parsing is instructed
Arranged, packed, and by the first SRIO data/address bus synchronization distribution to data collecting card and each motion control board;
S5:Synchronous servo control, each motion control board are carried out to each motion control board card by the first synchronous bus
Motor controlled quentity controlled variable is calculated according to motion control instruction, and by motion control instruction and the motor controlled quentity controlled variable being calculated by first
SRIO data/address bus returns to I O board card and data collecting card;
S6:The motor controlled quentity controlled variable that I O board card docking is received outputs this to motion terminals after being handled, while will control
Procedural information feeds back to movement main control card;
S7:Data collecting card collects control procedural information, and the data being collected into are transferred to data acquisition by optical fiber
The data receiver card of cabinet, data receiver card send the data to data main control card by the 2nd SRIO data/address bus;
S8:Data main control card will control procedural information or emergence message to send to host computer by the 2nd GbE controlling bus
Preserved.
Further, in the step S2, motion control instruction is sent to the fortune by the host computer by Ethernet
Dynamic main control card.
Further, in the step S6, I O board card is handled the motor controlled quentity controlled variable of reception by internal FPGA.
Further, the motor controlled quentity controlled variable is also sent to data exchange card by optical fiber after FPGA processing and carried out
Exported after digital-to-analogue conversion to motion terminals.
Further, in the step S7, connected between the data collecting card and the data receiver card by optical fiber.
Data collecting system provided by the invention and acquisition method, are not influencing synchronization using single data acquisition cabinet
On the premise of SERVO CONTROL, the data in motion control cabinet are gathered, improve the real-time and reliability of mass data collection;
Data gather computer case includes data main control card and data receiver card, make data collecting system more flexibly, scalability it is stronger;Number
VME64x parallel bus is substituted using SRIO data/address bus with motion control cabinet according to collection cabinet, bandwidth is improved, increases
The reliabilities of data, reduces pin and takes quantity;Data acquisition cabinet uses GbE controlling bus with motion control cabinet
Existing VME buses are substituted, improve transmission bandwidth;Data collecting card realizes data acquisition using powerpc board card, improves
Data acquisition ability, reduces and calculates time, the height present invention accomplishes litho machine industry development to real-time and big data
It is required that.
Brief description of the drawings
Fig. 1 is the structure diagram of data collecting system of the present invention;
Fig. 2 is the fundamental diagram of motion control cabinet of the present invention;
Fig. 3 is the data sampling time sequence figure in a servo period of the invention;
Fig. 4 is present invention control process data collecting flowchart figure.
Shown in figure:1st, host computer;2nd, motion control cabinet;21st, main control card is moved;22nd, motion control board;23、IO
Board;24th, data collecting card;25th, the first GbE controlling bus;26th, the first SRIO data/address bus;27th, the first synchronous bus;28、
Data exchange card;3rd, data acquisition cabinet;31st, data main control card;32nd, data receiver card;33rd, the 2nd GbE controlling bus;34、
2nd SRIO data/address bus;35th, the second synchronous bus;4th, Synchronization Control board.
Embodiment
The present invention is described in detail below in conjunction with the accompanying drawings:
As shown in Figs. 1-2, the present invention provides a kind of data collecting system, including:
Host computer 1, using work station, using Unix or windows operating systems, for send motion control instruction with
And preserve control process data;
Motion control cabinet 2, including movement main control card 21, some motion control boards 22, I O board card 23, data collecting card
24 and on case back plate and with the movement main control card 21, motion control board 22, I O board card 23 and data collecting card
The first GbE controlling bus 25, the first SRIO data/address bus 26 and the first synchronous bus 27 of 24 connections, the movement main control card 21
It is connected with the host computer 1 by Ethernet;The motion control cabinet 2 further includes data exchange card 28, with the I O board card
23 are connected by core bus, for carrying out digital-to-analogue conversion to motor controlled quentity controlled variable.The movement main control card 21 and data collecting card
24 use PowerPC (Performance Optimization With Enhanced RISC-Performance
Computing, the central processing unit of reduced instruction set computer RISC Architecture) board, wherein, movement main control card 21 is PowerPC mainboards
Card, the communication connection between host computer 1 is realized by Ethernet, while passes through the first GbE controlling bus 25 and motion control
Other boards in cabinet 2 communicate, complete to motion control board 22, I O board card 23, data collecting card 24 program under
Carry, register/memory read-write, state obtain, interrupt response, by PCIe port realize synchronization parameter issue, synchronous scanning
The functions such as queue issues, synchronous execution state obtains;First SRIO data/address bus 26, mainly realizes data-transformation facility, including
The control data of interferometer position data, sensing data, motion control data and actuator;2 inner panel of motion control cabinet
Motion control board 22, I O board card 23 and data collecting card are synchronously realized by the first synchronous bus (Sync_Bus) 27 between card
24 stringent servo synchronization, triggers system synchronization servo interrupt, broadcast synchronization scanning mode, obtains motion control board 22 and IO
Synchronous execution state of board 23 etc.;Outer synchronization:Realize that kinetic control system is with measurement by outer sync cap (Mo-Sync)
The servo period of system is synchronous, the transmission of synchronous regime/information.Synchronization between motion control card 23:Pass through the first synchronous bus
27 realize that Synchronization Control board 4 controls the synchronous sequence of motion control card 23, trigger all motion control cards 23 CPU it is same
Servo interrupt is walked, receives the synchronous scanning state of the broadcast of Synchronization Control board 4, uploads synchronous execution information;Data collecting card 24
Equipped with multiple, the synchronization between multiple data collecting cards 24:Realize Synchronization Control board 4 to data by the first synchronous bus 27
The synchronous sequence control of capture card 24, the synchronous servo for triggering the CPU of all data collecting cards 24 interrupt, and receive Synchronization Control plate
The synchronous scanning state of the broadcast of card 4, uploads synchronous execution information.
SRIO (Serial RapidIO) bus is universal serial bus, can be avoided some shortcomings of parallel bus, such as cloth
Line is difficult, is also easy to produce the problems such as parallel cross-talk, and SRIO bus single channel maximum transmission rates can reach 6.25Gbps, supports 4x moulds
Formula, i.e., can once transmit the data of 6.25 × 4=25Gbps, the maximum load of SRIO buses is 256Byte;SRIO buses at the same time
With it is very high packing efficiency (>90%), greatly promote the validity of data transfer;In addition, SRIO buses have strictly
Verification and mechanism for correcting errors, support CRC16, the strict guarantee accuracy of data transfer.
Data acquisition cabinet 3, including data main control card 31 and data receiver card 32 and on case back plate and with institute
State the 2nd GbE controlling bus 33, the 2nd SRIO data/address bus 34 and second that data main control card 31 and data receiver card 32 connect
Synchronous bus 35, the data main control card 31 are connected with the host computer 1.The data main control card 31 uses powerpc board card,
Data receiver card 32 is connected with data collecting card 24 by optical fiber, so as to receive in motion control cabinet 2 on data collecting card 24
Data.The data source of data collecting card 24 is in the data of 26 multicast of the first SRIO data/address bus or broadcast.Data receiver
Card 32 receives servo period data by sample frequency more faster than servo period.
Please emphasis with reference to Fig. 1, the motion control cabinet 2 is equipped with several, described in each motion control cabinet 2 and one
Data receiver card 32 corresponds to.
The present invention also provides a kind of collecting method of above-mentioned data collecting system, comprise the following steps:
S1:The multichannel analog signals collected are converted into optical signal by sensor in motion terminals, are sent to I O board card 23,
Communicated in I O board card 23 by the port of HSSL1~16 with external sensor, and pass through SRIO ports and inner panel cartoon letters.Wherein
Sensor includes but is not limited to:Pressure sensor, flow sensor, temperature sensor, position sensor, velocity sensor,
Limit sensors etc..For obtaining the state of various motion terminals, read, change current operation machine constant, motion terminals
That is actuator, including short stroke motor, long stroke motor and its power amplifier, small-sized damper (MAM), silicon chip push-out motor (EPIN)
And its power amplifier, various jettrons and hardware switch etc..
S2:Motion control instruction is sent to the movement main control card 21 in motion control cabinet 2 by host computer 1, specifically, on
Motion control instruction is sent to the movement main control card 21 by position machine 1 by Ethernet, and movement main control card 21 uses powerpc board
Card.
S3:Movement main control card 21 will receive motion control instruction and be parsed and be sent out by the first GbE controlling bus 25
It is sent to I O board card 23.
S4:The optical signal of reception is converted into digital signal by I O board card 23, while the motion control instruction after parsing is referred to
Order is arranged, packed, and by 26 synchronization distribution of the first SRIO data/address bus to data collecting card 24 and each motion control board
Card 22.
S5:SERVO CONTROL, each motion control are synchronized to each motion control board 22 by the first synchronous bus 27
Board 22 calculates motor controlled quentity controlled variable according to motion control instruction, and motion control instruction and the motor controlled quentity controlled variable being calculated are led to
Cross the first SRIO data/address bus 26 and return to I O board card 23 and data collecting card 24.
S6:I O board card 23 outputs this to motion terminals after being handled the motor controlled quentity controlled variable of reception, while will control
Procedural information processed feeds back to movement main control card 21, specifically, I O board card 23 passes through internal FPGA (Field-Programmable
Gate Array, field programmable gate array) the motor controlled quentity controlled variable of reception is handled, the motor controlled quentity controlled variable passes through FPGA
Also sent by optical fiber after processing and exported after carrying out digital-to-analogue conversion to data exchange card 28 to motion terminals, it is transported
Dynamic control.Need to be controlled process data collection during motion control, naturally it is also possible to first to data interested into
It is acquired after row screening, as shown in figure 4, including controller input and output, actuator system output, actuator output, sensing
Device inputs, sensor output, 6 steps of measuring system input data.
S7:Data collecting card 24 collects control procedural information, and the data being collected into are transferred to data by optical fiber and are adopted
Collect the data receiver card 32 of cabinet, data receiver card 32 sends the data to data main control card by the 2nd SRIO data/address bus 34
31, which uses powerpc board card, passes through light between the data collecting card 24 and the data receiver card 32
Fibre connection.Control process data is acquired by data collecting card 24, it is necessary to using the offer work such as oscillograph, data analyzer
Tool, first input need the data gathered, and sample frequency, starts to notify 24 gathered data of data collecting card, these data are being sent out
Data receiver card 32 is sent to the form of multicast at the same time when giving other boards, after data receiver card 32 receives data, according to
The requirement of host computer 1 and the data processing tools provided, handle data, monitoring data.In the present embodiment, each servo period can be with
Gather 32 data, including the hardware data such as various kinds of sensors, actuator 280, fortune power control process data 400.
The present invention can realize real time mass data acquisition, can completing data (such as 150us) before the deadline
The collection for completing to be more than 1000 32bit data from the whole flow process for receiving output, data transfer Delay computation:
a:I O board card 23 waits external data to be completed from HSSL agreements to the arrival of SRIO agreements in 10us;
b:Data are sent to data collecting card 24 by data exchange card 28 by the form of multicast, are completed in 15us;
c:Data collecting card 24 sends data to data receiver card 32, is completed in 20us;
d:Host computer 1 handles data, is completed in 40us.
S8:Data main control card 31 will control procedural information or emergence message transmission supreme by the 2nd GbE controlling bus 33
Position machine 1 is preserved.
As shown in figure 3, it is the detailed process of data acquisition, if motion control in the present embodiment in a servo period
The quantity of card 22 is 4, is respectively the motion control card 22d of the first motion control card 22a~the 4th, the quantity of I O board card 23 is 2
A is respectively the first I O board card 23a, the second I O board card 23b:
The T0 moment:
Servo period starts;
The external sensor data of HSSL1~HSSL8 ports of I O board card 23 is ready for;
The external sensor data to be received such as HSSL9~HSSL12 ports;
The interferometer measurement data to be received such as HSSL13~HSSL16 ports;
The T1 moment:
The data of HSSL1~HSSL4 ports are packaged as P1 bags by the SRIO drivings in the first I O board card 23a, send P1 bags,
Destination is the motion control card 22d of the first motion control card 22a~the 4th, and data collecting card 24;
The data of HSSL5~HSSL8 ports are packaged as P2 bags by the SRIO drivings in the first I O board card 23a, send P2 bags,
Destination is the first motion control card 22a and the second motion control card 22b, and data collecting card 24;
HSSL1~HSSL8 ports triggering renewal external sensor data.
The T2 moment:
The CPU of first motion control card 22a gets P1 bags and P2 bags;
The CPU of second motion control card 22b gets P1 bags and P2 bags;
The CPU of 3rd motion control card 22c gets P1 bags;
The CPU of 4th motion control card 22d gets P1 bags;
Data collecting card 24 obtains P1 bags, P2 bags;
The T3 moment:
The external sensor data of HSSL9~HSSL12 ports of I O board card 23 is ready for.
The T4 moment:
The SRIO drivings of second I O board card 23b are packaged as P3 bags to the data of HSSL9~HSSL12 ports, send P3 bags,
Destination is the motion control card 22d of the first motion control card 22a~the 4th, and data collecting card 24;
The T5 moment:
The CPU of first motion control card 22a gets P3 bags;
The CPU of second motion control card 22b gets P3 bags;
The CPU of 3rd motion control card 22c gets P3 bags;
The CPU of 4th motion control card 22d gets P3 bags;
Data collecting card 24 obtains P3 bags;
The T6 moment:
The interferometer data of HSSL13~HSSL16 ports of I O board card 23 are ready for.
The T7 moment:
The data of HSSL13 ports are packaged as P4 bags by the SRIO drivings of the second I O board card 23b, send P4 bags, destination is
The motion control card 22d of first motion control card 22a~the 4th, and data collecting card 24;
The T8 moment:
The CPU of first motion control card 22a gets P4 bags;
The CPU of second motion control card 22b gets P4 bags;
The CPU of 3rd motion control card 22c gets P4 bags;
The CPU of 4th motion control card 22d gets P4 bags;
Data collecting card 24 obtains P4 bags;
The T9 moment:
The CPU of first motion control card 22a completes to calculate, and point data will be set to be packaged as P5 bags with calculating data, sends
P5 bags, destination are the first I O board card 23a;
The CPU of second motion control card 22b completes to calculate, and point data will be set to be packaged as P6 bags with calculating data, sends
P6 bags, destination are the first I O board card 23a;
The CPU of 3rd motion control card 22c completes to calculate, and point data will be set to be packaged as P7 with calculating data, sends P7
Bag, destination is the second I O board card 23b;
The CPU of 4th motion control card 22d completes to calculate, and point data will be set to be packaged as P8 bags with calculating data, sends
P8 bags, destination are the second I O board card 23b;.
The T10 moment:
The SRIO drivings of first I O board card 23a receive P5 and P6 bags, and complete to parse;
The SRIO drivings of second I O board card 23b receive P7 and P8 bags, and complete to parse;
Data collecting card 24 receives the data of P5~P8 bags;
The T11 moment:
All setting point datas are sent by corresponding HSSL ports, all operations of servo period are completed, under wait
One servo triggering.
In conclusion data collecting system provided by the invention and acquisition method, are existed using single data acquisition cabinet 3
On the premise of not influencing synchronous servo control, the data in collection motion control cabinet 2, improve the real-time of mass data collection
Property and reliability;Data acquisition cabinet 3 includes data main control card 31 and data receiver card 32, makes data collecting system cleverer
Work, scalability are stronger;Data acquisition cabinet 3 is parallel using SRIO data/address bus replacement VME64x with motion control cabinet 2
Bus, improves bandwidth, adds the reliability of data, reduces pin and takes quantity;Data acquisition cabinet 3 and motion control
Cabinet 2 substitutes existing VME buses using GbE controlling bus, improves transmission bandwidth;Data collecting card 24 uses
Powerpc board card realizes data acquisition, improves data acquisition ability, reduces and calculates the time, present invention accomplishes litho machine
High request of the industry development to real-time and big data.
Although embodiments of the present invention are illustrated in specification, these embodiments are intended only as prompting,
It should not limit protection scope of the present invention.It is equal that various omission, substitution, and alteration are carried out without departing from the spirit and scope of the present invention
It should include within the scope of the present invention.
Claims (12)
- A kind of 1. data collecting system, it is characterised in that including:Host computer;Motion control cabinet, including movement main control card, some motion control boards, I O board card, data collecting card and arranged on machine The first GbE controls being connected on case backboard and with the movement main control card, motion control board, I O board card and data collecting card are total Line, the first SRIO data/address bus and the first synchronous bus, the movement main control card are connected with the host computer;Data acquisition cabinet, including data main control card, data receiver card and on case back plate and with the data master control Block the 2nd GbE controlling bus, the 2nd SRIO data/address bus and the second synchronous bus connected with data receiver card, the data master Control card is connected with the host computer.
- 2. data collecting system according to claim 1, it is characterised in that the movement main control card and data collecting card are equal Using powerpc board card.
- 3. data collecting system according to claim 1, it is characterised in that movement main control card and the host computer it Between connected by Ethernet.
- 4. data collecting system according to claim 1, it is characterised in that the motion control cabinet further includes data friendship Card is changed, is connected with the I O board card by core bus.
- 5. data collecting system according to claim 1, it is characterised in that the motion control cabinet is equipped with several, Each motion control cabinet is corresponding with a data receiver card, and the data receiver card passes through light with the data collecting card Fibre connection.
- 6. data collecting system according to claim 1, it is characterised in that the data main control card uses powerpc board Card.
- 7. data collecting system according to claim 1, it is characterised in that the data main control card and the host computer it Between connected by Ethernet.
- 8. a kind of collecting method of data collecting system as claimed in claim 1, it is characterised in that including following step Suddenly:S1:The multichannel analog signals collected are converted into optical signal by sensor in motion terminals, are sent to I O board card;S2:Motion control instruction is sent to the movement main control card in motion control cabinet by host computer;S3:Movement main control card will receive motion control instruction and be parsed and be sent to I O board by the first GbE controlling bus Card;S4:The optical signal of reception is converted into digital signal by I O board card, while the motion control instruction after parsing is arranged, Packing, and by the first SRIO data/address bus synchronization distribution to data collecting card and each motion control board;S5:By the first synchronous bus to each motion control board card carry out synchronous servo control, each motion control board according to Motion control instruction calculates motor controlled quentity controlled variable, and motion control instruction and the motor controlled quentity controlled variable being calculated are passed through the first SRIO Data/address bus returns to I O board card and data collecting card;S6:The motor controlled quentity controlled variable that I O board card docking is received outputs this to motion terminals after being handled, while will control process Information feeds back to movement main control card;S7:Data collecting card collects control procedural information, and the data being collected into are transferred to data acquisition cabinet by optical fiber Data receiver card, data receiver card sends the data to data main control card by the 2nd SRIO data/address bus;S8:Data main control card will control procedural information or emergence message to send to host computer and carry out by the 2nd GbE controlling bus Preserve.
- 9. collecting method according to claim 8, it is characterised in that in the step S2, the host computer passes through Motion control instruction is sent to the movement main control card by Ethernet.
- 10. collecting method according to claim 8, it is characterised in that in the step S6, I O board card passes through inside FPGA the motor controlled quentity controlled variable of reception is handled.
- 11. collecting method according to claim 10, it is characterised in that the motor controlled quentity controlled variable passes through FPGA processing Also sent by optical fiber and exported after carrying out digital-to-analogue conversion to data exchange card to motion terminals afterwards.
- 12. collecting method according to claim 8, it is characterised in that in the step S7, the data collecting card Connected between the data receiver card by optical fiber.
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CN110096035A (en) * | 2019-05-14 | 2019-08-06 | 桂林电子科技大学 | High-precision high-speed sports platform Synchronous motion control system and method based on Open VPX |
CN111813051A (en) * | 2020-09-10 | 2020-10-23 | 江苏集萃苏科思科技有限公司 | Motion control device |
CN113983924A (en) * | 2021-10-27 | 2022-01-28 | 北京航天巨恒系统集成技术有限公司 | Coordinate calculation system, method and device of multi-axis laser interferometer |
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