CN108007387B - Surface shape measurement device and method based on Structured Illumination - Google Patents
Surface shape measurement device and method based on Structured Illumination Download PDFInfo
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- CN108007387B CN108007387B CN201711238050.3A CN201711238050A CN108007387B CN 108007387 B CN108007387 B CN 108007387B CN 201711238050 A CN201711238050 A CN 201711238050A CN 108007387 B CN108007387 B CN 108007387B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2518—Projection by scanning of the object
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- Length Measuring Devices By Optical Means (AREA)
Abstract
Surface shape measurement device and method based on Structured Illumination, belong to optical microscopy imaging and field of measuring technique.The device that is technically characterized by comprising the steps as follows: of the invention patent includes: Structured Illumination module, axial scan module and detecting module.The present invention increases in conventional structure optical illumination microscopic system by polarization spectroscope, low aperture objective, the axial scan device of the compositions such as Guan Jing and plane mirror, realize Structured Illumination striped in the high speed axial movement for being observed sample space, and different z are handled to the picture shot under the fringe projection of position using window Fourier transform, calculate related coefficient of each subregion image at projected fringe frequency, obtain each lateral position clarity axial response curve, the peak position of curve is the relative altitude of the sample lateral position, it is final to obtain sample surfaces face shape.The invention has adjustment simple, and axial scan speed is fast, and measurement result is influenced the small and high advantage of signal-to-noise ratio by sample surfaces difference in reflectivity.
Description
Technical field
The present invention relates to a kind of surface shape measurement device and methods, and in particular to a kind of surface shape measurement based on Structured Illumination
Device and method are, it can be achieved that Structured Illumination striped in the high speed axial scan for being observed sample space, and reduces background and makes an uproar
The influence of sound and sample table second difference in reflectivity to measurement result, belongs to optical microscopy imaging and surface shape measurement field.
Background technique
Zoom surface shape measurement method is by differentiating that it is clear that sample axially different position in image-forming objective lens visual field is imaged
It is clear to spend to obtain the face shape of sample surfaces.Conventional zoom surface shape measurement method carries out axial scan using objective table driving sample,
Scanning speed is slow, low efficiency.Also, conventional method is obtained using the contrast of axially different position shooting picture as measure object
The axial response of sample surfaces every is obtained, position corresponding to maximum value is the relative altitude of sample surfaces.However it is carried on the back
Scape influence of noise, for antiradar reflectivity and the biggish sample of difference in reflectivity, conventional method can introduce large error, constrain change
The application of burnt surface shape measurement method.
Summary of the invention
It has been given below about brief overview of the invention, in order to provide about the basic of certain aspects of the invention
Understand.It should be appreciated that this summary is not an exhaustive overview of the invention.It is not intended to determine pass of the invention
Key or pith, nor is it intended to limit the scope of the present invention.Its purpose only provides certain concepts in simplified form,
Taking this as a prelude to a more detailed description discussed later.
In consideration of it, in order to overcome the above technical problems, the present invention provides a kind of surface shape measurements based on Structured Illumination
Zoom and axial Tomography Velocity not only can be improved in surface shape measurement device and method of the device and method based on Structured Illumination,
But also observation cost can be reduced.
Scheme one: the present invention provides a kind of surface shape measurement device based on Structured Illumination, including Structured Illumination mould
Block, axial scan module and detecting module；
The Structured Illumination module is made of two-way illumination path, first via illumination path according to the light direction of propagation according to
It is secondary are as follows: kohler's illumination module one, Amplilude Sine Grating one and Guan Jingyi；Second road illumination path according to the light direction of propagation according to
It is secondary are as follows: kohler's illumination module two, Amplilude Sine Grating two and pipe mirror two；
The axial scan module according to light direction of propagation one successively are as follows: spectroscope two, spectroscope one, object lens one,
Plane mirror, Guan Jingsan, Guan Jingsi, spectroscope three and object lens two；
The detecting module according to the light direction of propagation successively are as follows: Guan Jingwu and CCD；
Sample is arranged in the lower section of object lens two.
It is further: the stripe direction of the Amplilude Sine Grating one and the stripe direction phase of Amplilude Sine Grating two
It is mutually vertical；
Further: the axial maximum moving range of the plane mirror is equal to the depth of focus of object lens one.
Further: the Guan Jingyi, pipe mirror two, Guan Jingsan and Guan Jingsi focal length are equal.
Scheme two: a kind of surface shape measurement method based on Structured Illumination proposed by the present invention, this method are based on scheme
What the surface shape measurement device described in one based on Structured Illumination was realized, specific steps:
Data collection steps:
Step a, kohler's illumination module one issues incoherent illumination light, by Guan Jing after the modulation of Amplilude Sine Grating one
One outgoing, meanwhile, kohler's illumination module two issues incoherent illumination light, by pipe mirror two after the modulation of Amplilude Sine Grating two
Outgoing, two beam illumination lights are combined into a branch of illumination light by spectroscope two, spectroscope one, and illumination light is emitted to flat after object lens one
Face reflecting mirror is emitted to sample surface using Guan Jingsan, Guan Jingsi, spectroscope three and object lens two after reflection；
Step b, the light of sample surfaces Sine distribution is radiated at after sample surfaces reflect, successively by object lens two and light splitting
Mirror three reflects, and is finally focused on CCD by Guan Jingwu and forms image；
Step c, 2. the quasi- focal plane that setting plane mirror initial position is located at object lens one, is then conjugated sinusoidal light and is located at object lens
Two quasi- focal plane is 2. ', plane mirror axial scan range D is set1+D2, then corresponding to the sinusoidal optical axis direction scanning range of conjugation is
D1’+D2', plane mirror position and the sinusoidal optical position corresponding relationship of conjugation are D1/D1'=D2/D2'=(M1M2)2；The D1For
The remote burnt displacement of plane mirror, D1' it is to be conjugated the nearly burnt displacement of sinusoidal light, D2For the nearly burnt displacement of plane mirror, D2' it is to be conjugated just
The remote burnt displacement of string light, M1For the focal length ratio of object lens one and Guan Jingsan, M2For the focal length ratio of Guan Jingsi and object lens two；
Step d, the setting scanning number of plies is N, then plane reflection scanning stepping is (D1+D2)/N is conjugated sinusoidal optical axis direction scanning
Stepping is (D1’+D2')/N, an Image Acquisition is carried out in each axial position CCD, it is final to obtain N width image.
Data processing step:
Step e, image segmentation: the image segmentation by every width M × M size of CCD acquisition is the son of J × J L × L size
Figure；
Step f, axial response calculates: N number of subgraph of same lateral position is subjected to L rank discrete Fourier transform respectively,
Component of every width subgraph at frequency f is acquired, the axial response of the lateral position is obtained；
Step g, peak position is fitted: using Gaussian function as objective function, fitting axial response obtains peak position, as
The relative altitude of the point；
Step h, the operation that step b and step c are carried out to J group sub-collective drawing, may finally obtain each lateral position sample
The relative altitude of product takes two groups of detectors to obtain sample relative altitude average value, obtains sample surface shape.
Further: the calculated relationship of J and M, L are J=M-L+1 in the step e；
Further: frequency f=L/k in the step f, wherein k is the logarithm containing sine streak in subgraph；
Further: subgraph component calculation method at frequency f is in the step fWherein f (x, y) is pixel value of the image at (x, y), and m, n are x, y
Corresponding frequency component.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the surface shape measurement device of the invention based on Structured Illumination.
Fig. 2 is the surface shape measurement method flow chart of the invention based on Structured Illumination.
Fig. 3 is the surface shape measurement method flow chart of data processing figure of the invention based on Structured Illumination.
In figure: 1 Kohler illumination module one, 2 Amplilude Sine Gratings one, 3 pipe mirrors one, 4 Kohler illumination modules two, 5 amplitudes
Type sinusoidal grating two, 6 pipe mirrors two, 7 spectroscopes one, 8 object lens one, 9 plane mirrors, 10 spectroscopes two, 11 pipe mirrors three, 12 pipe mirrors
Four, 13 spectroscopes three, 14 object lens two, 15, sample to be tested, 16 pipe mirrors five, 17CCD.
Specific embodiment
Exemplary embodiment of the invention is described hereinafter in connection with attached drawing.For clarity and conciseness,
All features of actual implementation mode are not described in the description.It should be understood, however, that developing any this actual implementation
Much decisions specific to embodiment must be made during example, to realize the objectives of developer, for example, symbol
Restrictive condition those of related to system and business is closed, and these restrictive conditions may have with the difference of embodiment
Changed.In addition, it will also be appreciated that although development is likely to be extremely complex and time-consuming, to having benefited from the present invention
For those skilled in the art of disclosure, this development is only routine task.
Here, and also it should be noted is that, in order to avoid having obscured the present invention because of unnecessary details, in the accompanying drawings
Illustrate only with closely related apparatus structure and/or processing step according to the solution of the present invention, and be omitted and the present invention
The little other details of relationship.
Embodiment 1: present embodiments providing a kind of surface shape measurement device based on Structured Illumination as shown in Fig. 1, uses
Three-dimensional computed tomography scanning is realized in being switched fast axial position.
A kind of surface shape measurement device based on Structured Illumination, including Structured Illumination module, axial scan module and spy
Survey module；
The Structured Illumination module is made of two-way illumination path, first via illumination path according to the light direction of propagation according to
It is secondary are as follows: kohler's illumination module 1, Amplilude Sine Grating 1 and Guan Jingyi 3；Second road illumination path is according to light propagation side
To successively are as follows: kohler's illumination module 24, Amplilude Sine Grating 25 and pipe mirror 26；
The axial scan module according to light direction of propagation one successively are as follows: spectroscope 2 10, spectroscope 1, object lens
One 8, plane mirror 9, Guan Jingsan 11, Guan Jingsi 12, spectroscope 3 13 and object lens 2 14；
The detecting module according to the light direction of propagation successively are as follows: Guan Jingwu 16 and CCD17；
Sample 15 is arranged in the lower section of object lens 2 14.
Surface shape measurement device according to claim 1 based on Structured Illumination, it is characterised in that: the amplitude type
The stripe direction of sinusoidal grating 1 and the stripe direction of Amplilude Sine Grating 25 are mutually perpendicular to；
Surface shape measurement device according to claim 1 based on Structured Illumination, it is characterised in that: the plane is anti-
Penetrate the depth of focus that the axial maximum moving range of mirror 9 is equal to object lens 1.
Surface shape measurement device according to claim 1 based on Structured Illumination, it is characterised in that: the Guan Jingyi
3, pipe mirror 26, Guan Jingsan 11 are equal with 12 focal length of Guan Jingsi.
Embodiment 2: a kind of surface shape measurement side based on Structured Illumination is present embodiments provided as shown in attached drawing 2 and Fig. 3
Method realizes three-dimensional computed tomography scanning for being switched fast axial position.
A kind of surface shape measurement method based on Structured Illumination, this method are based on described in embodiment 1 based on structure light
What the surface shape measurement device of illumination was realized, specific steps:
Data collection steps:
Step a, kohler's illumination module 1 issues incoherent illumination light, by pipe after the modulation of Amplilude Sine Grating 1
Mirror 1 be emitted, meanwhile, kohler's illumination module 24 issue incoherent illumination light, by Amplilude Sine Grating 25 modulation after by
Pipe mirror 26 is emitted, and two beam illumination lights are combined into a branch of illumination light by spectroscope 2 10, spectroscope 1, and illumination light passes through object lens one
It is emitted to plane mirror 9 after 8, is emitted after reflection using Guan Jingsan 11, Guan Jingsi 12, spectroscope 3 13 and object lens 2 14
To 15 surface of sample；
Step b, the light of sample surfaces Sine distribution is radiated at after sample surfaces reflect, and successively passes through object lens 2 14 and is divided
Light microscopic 3 13 reflects, and is finally focused on CCD17 by Guan Jingwu 16 and forms image；
Step c, 2. the quasi- focal plane that setting 9 initial position of plane mirror is located at object lens 1, is then conjugated sinusoidal light and is located at object
The quasi- focal plane of mirror 2 14 is 2. ', 9 axial scan range D of plane mirror is set1+D2, then corresponding to be conjugated sinusoidal optical axis direction scanning model
It encloses for D1’+D2', 9 position of plane mirror and the sinusoidal optical position corresponding relationship of conjugation are D1/D1'=D2/D2'=(M1M2)2；Institute
State D1For the remote burnt displacement of plane mirror 9, D1' it is to be conjugated the nearly burnt displacement of sinusoidal light, D2For the nearly burnt displacement of plane mirror 9, D2’
To be conjugated the remote burnt displacement of sinusoidal light, M1For the focal length ratio of object lens 1 and Guan Jingsan 11, M2For Guan Jingsi 12 and object lens 2 14
Focal length ratio；
Step d, the setting scanning number of plies is N, then it is (D that plane mirror 9, which scans stepping,1+D2)/N is conjugated sinusoidal optical axis direction
Scanning stepping is (D1’+D2')/N, an Image Acquisition is carried out in each axial position CCD17, it is final to obtain N width image.
Data processing step:
Step e, image segmentation: the image segmentation by every width M × M size of CCD acquisition is the son of J × J L × L size
Figure；
Step f, axial response calculates: N number of subgraph of same lateral position is subjected to L rank discrete Fourier transform respectively,
Component of every width subgraph at frequency f is acquired, the axial response of the lateral position is obtained；
Step g, peak position is fitted: using Gaussian function as objective function, fitting axial response obtains peak position, as
The relative altitude of the point；
Step h, the operation that step b and step c are carried out to J group sub-collective drawing, may finally obtain each lateral position sample
The relative altitude of product takes two groups of detectors to obtain sample relative altitude average value, obtains sample surface shape.
More specifically: the calculated relationship of J and M, L are J=M-L+1 in the step e；
More specifically: frequency f=L/k in the step f, wherein k is the logarithm containing sine streak in subgraph；
More specifically: subgraph component calculation method at frequency f is in the step fWherein f (x, y) is pixel value of the image at (x, y), and m, n are x, y
Corresponding frequency component.
Although disclosed embodiment is as above, its content is only to facilitate understand technical side of the invention
Case and the embodiment used, are not intended to limit the present invention.Any those skilled in the art to which this invention pertains, not
Under the premise of being detached from disclosed core technology scheme, any modification and change can be made in form and details in implementation
Change, but protection scope defined by the present invention, the range that the appended claims that must still be subject to limits.
Claims (7)
1. the surface shape measurement device based on Structured Illumination, it is characterised in that: including Structured Illumination module, axial scan module
And detecting module；The Structured Illumination module is made of two-way illumination path, and first via illumination path is according to light propagation side
To successively are as follows: kohler's illumination module one (1), Amplilude Sine Grating one (2) and Guan Jingyi (3)；Second road illumination path according to
The light direction of propagation is successively are as follows: kohler's illumination module two (4), Amplilude Sine Grating two (5) and pipe mirror two (6)；The axial direction
Scan module according to light direction of propagation one successively are as follows: spectroscope two (10), spectroscope one (7), object lens one (8), plane are anti-
Penetrate mirror (9), Guan Jingsan (11), Guan Jingsi (12), spectroscope three (13) and object lens two (14)；The detecting module is passed according to light
Broadcast direction successively are as follows: Guan Jingwu (16) and CCD (17)；Sample (15) are arranged in the lower section of object lens two (14).
2. the surface shape measurement device according to claim 1 based on Structured Illumination, it is characterised in that: the amplitude type is just
The stripe direction of string grating one (2) and the stripe direction of Amplilude Sine Grating two (5) are mutually perpendicular to.
3. the surface shape measurement device according to claim 1 based on Structured Illumination, it is characterised in that: the plane reflection
The axial maximum moving range of mirror (9) is equal to the depth of focus of object lens one (8).
4. the surface shape measurement device according to claim 1 based on Structured Illumination, it is characterised in that: the Guan Jingyi
(3), pipe mirror two (6), Guan Jingsan (11) and Guan Jingsi (12) focal length are equal.
5. the surface shape measurement method based on Structured Illumination, this method is based on any described based on structure in Claims 1 to 4
What the surface shape measurement device of optical illumination was realized, it is characterised in that: specific steps: data collection steps:
Step a, kohler's illumination module one (1) issues incoherent illumination light, by pipe after Amplilude Sine Grating one (2) modulation
Mirror one (3) outgoing, meanwhile, kohler's illumination module two (4) issues incoherent illumination light, adjusts by Amplilude Sine Grating two (5)
It is emitted after system by pipe mirror two (6), two beam illumination lights are combined into a branch of illumination light by spectroscope two (10), spectroscope one (7), illuminate
Light is emitted to plane mirror (9) after object lens one (8), using Guan Jingsan (11), Guan Jingsi (12), spectroscope after reflection
Three (13) and object lens two (14) are emitted to sample (15) surface；
Step b, the light of sample surfaces Sine distribution is radiated at after sample surfaces reflect, successively by object lens two (14) and light splitting
Mirror three (13) reflection, is finally focused on CCD (17) by Guan Jingwu (16) and forms image；
Step c, the quasi- focal plane that setting plane mirror (9) initial position is located at object lens one (8) 2., is then conjugated sinusoidal light and is located at object
The quasi- focal plane of mirror two (14) is 2. ', plane mirror (9) axial scan range D is set1+D2, then the corresponding sine optical axis direction that is conjugated is swept
Retouching range is D1’+D2', plane mirror (9) position and the sinusoidal optical position corresponding relationship of conjugation are D1/D1'=D2/D2'=
(M1M2)2；The D1For the remote burnt displacement of plane mirror (9), D1' it is to be conjugated the nearly burnt displacement of sinusoidal light, D2For plane mirror (9)
Nearly burnt displacement, D2' it is to be conjugated the remote burnt displacement of sinusoidal light, M1For the focal length ratio of object lens one (8) and Guan Jingsan (11), M2For Guan Jing
The focal length ratio of four (12) and object lens two (14)；
Step d, the setting scanning number of plies is N, then plane mirror (9) scanning stepping is (D1+D2)/N is conjugated sinusoidal optical axis direction and sweeps
Retouching stepping is (D1’+D2')/N, an Image Acquisition is carried out in each axial position CCD (17), it is final to obtain N width image；
Data processing step:
Step e, image segmentation: the image segmentation by every width M × M size of CCD acquisition is the subgraph of J × J L × L size；
Step f, axial response calculates: N number of subgraph of same lateral position being carried out L rank discrete Fourier transform respectively, is acquired
Component of every width subgraph at frequency f, obtains the axial response of the lateral position；Subgraph is in frequency f punishment amount in the step f
Calculation method isWherein f (x, y) is pixel value of the image at (x, y), m, n
It is respectively frequency component corresponding to x, y；
Step g, peak position is fitted: using Gaussian function as objective function, fitting axial response obtains peak position, as the point
Relative altitude；
Step h, the operation that step b and step c are carried out to J group sub-collective drawing, may finally obtain each lateral position sample
Relative altitude takes detector to obtain the average value of two groups of sample relative altitudes, obtains sample surface shape.
6. based on the surface shape measurement method of Structured Illumination according to claim 5, it is characterised in that: in the step e
The calculated relationship of J and M, L are J=M-L+1.
7. the surface shape measurement method according to claim 6 based on Structured Illumination, it is characterised in that: in the step f
Frequency f=L/k, wherein k is the logarithm containing sine streak in subgraph.
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| CN100573040C (en) * | 2008-03-17 | 2009-12-23 | 南京航空航天大学 | The scaling method of object surface three-dimensional contour structure light measurement system |
| CN101281023A (en) * | 2008-05-22 | 2008-10-08 | 北京中星微电子有限公司 | Method and system for acquiring three-dimensional target shape |
| TWI426296B (en) * | 2009-06-19 | 2014-02-11 | Ind Tech Res Inst | Method and system for three-dimensional polarization-based confocal microscopy |
| CN204255304U (en) * | 2014-11-24 | 2015-04-08 | 镇江超纳仪器有限公司（中外合资） | A kind of three-dimensional surface profile measurement mechanism |
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