CN105486247B - It is a kind of can continuous zoom surface figure measuring device - Google Patents
It is a kind of can continuous zoom surface figure measuring device Download PDFInfo
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- CN105486247B CN105486247B CN201510797149.1A CN201510797149A CN105486247B CN 105486247 B CN105486247 B CN 105486247B CN 201510797149 A CN201510797149 A CN 201510797149A CN 105486247 B CN105486247 B CN 105486247B
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- optical system
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- amici prism
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
Abstract
The invention discloses it is a kind of can continuous zoom surface figure measuring device, including light source, collecting lens system, Amici prism, interference objective, variable-power optical system, imaging optical system, area array CCD camera, micro- mobile device and objective table.Collecting lens system exit light is towards Amici prism, and the reflected light of Amici prism is towards interference objective；Variable-power optical system is co-axially located between Amici prism and imaging optical system；Interference imaging optical path is connected by Amici prism in one with illumination path.Variable-power optical system is continuous zoom optical system, including compensation group, zoom group and fixed group.The present apparatus can not need replacement object lens, need to only adjust the enlargement ratio M of variable-power optical system for different enlargement ratio requirements, can be realized and become larger or contract measurement field range, and amplification factor is continuously adjustable.Measuring surface form is realized suitable for phase difference interferometry or vertical scanning White Light Interferometer.
Description
Technical field
The present invention relates to measuring surface form technical field, it is specifically a kind of can continuous zoom measuring surface form dress
It sets.
Background technique
In recent years, being constantly progressive and develop with Precision Manufacturing Technology, especially in semiconductor nano making technology, micro-
The fields such as Mechatronic Systems, nanocomposite, Ultra-precision Turning utilize nondestructive such as optical interference method and device thereof
The technology of measurement object dimensional surface topography has obtained increasingly extensive application.Interference microtechnic is optical interference techniques and shows
The product that microtechnology combines improves the lateral resolution of interference pattern, makes by increasing micro- amplification system in interference system
Can complete micro-nano structure 3 d surface topography measurement.This field has been optical interferometry side well known to user at present
Method mainly has phase shift interferometry and the two kinds of measurement method of white light interference vertical scanning method.For fine object dimensional table
Face topography measurement, interference microtechnic, which has, not to be contacted sample surfaces, not to destroy sample structure, high sensitivity and rapid survey
Feature.The Chinese patent literature of Publication No. CN101625231 discloses a kind of white light interference profile meter, has a large amount of
The characteristics of journey, non-cpntact measurement.But the object lens that this measuring device includes are relatively fixed settings, are divided into 5 by multiplying power ×, 10
×, 50 × etc..If having different enlargement ratio requirements to visual field in measurement, object lens are needed replacing to reach zoom purpose,
And multiplying power variation is discontinuous.
Summary of the invention
In view of the above-mentioned deficiencies in the prior art, it is an object of the present invention to provide it is a kind of can continuous zoom measuring surface form dress
It sets, has the characteristics that simple and compact for structure, enlargement ratio is continuously adjustable.
Realize above-mentioned purpose, the technical solution that the present invention uses are as follows:
It is a kind of can continuous zoom surface figure measuring device, including light source, the Amici prism that receives source emissioning light, dry
Relate to object lens, micro- mobile device, variable-power optical system, imaging optical system, area array CCD camera, objective table；Micro- mobile device and dry
Object lens are related to sequentially coaxially to be arranged on the reflected light path direction of Amici prism；Interference objective is co-axially located at imaging optical system
The two sides of Amici prism constitute interference imaging optical path；Variable-power optical system is co-axially located at Amici prism and imaging optical system
Between；Area array CCD camera is co-axially located at the top of imaging optical system；The lower section of interference objective is arranged in objective table；Wherein,
Variable-power optical system includes compensation group, zoom group and fixed group；Compensation group, zoom group and fixed group are according to from the object side to the image side
Sequence is sequentially coaxially arranged；Zoom group makes linear movement to change the size of focal length；Compensation group does nonlinear moving with retrieved image
Face displacement, keeps image planes position constant.
Compared with prior art, the present invention its remarkable advantage:
1. such as wanting to become larger when measurement or contract measurement range, replacement object lens are not needed, can achieve quick continuous zoom
Effect.
2. device image planes position during zoom is motionless, it obtain system can during zoom and continuously clearly scheme
Picture, target not easy to lose.
Detailed description of the invention
Fig. 1 be can continuous zoom surface figure measuring device structural schematic diagram.
Fig. 2 is the structural schematic diagram of Mirau type interference objective.
Fig. 3 is the structural schematic diagram of variable-power optical system.
Fig. 4 is the relational graph of zoom curve and compensated curve and enlargement ratio.
Specific embodiment
With reference to the accompanying drawings and examples, a specific embodiment of the invention is described in further detail.Following reality
Example is applied for illustrating the present invention, but is not intended to limit the scope of the invention.
It is as shown in Figure 1 the structural schematic diagram of the present apparatus, including light source 1, collecting lens system 2, Amici prism 3, interferences
Mirror 4, variable-power optical system 6, imaging optical system 7, area array CCD camera 8, micro- mobile device 9, objective table 10 etc..Collecting lens system
System 2 falls with the composition of interference objective 4 and penetrates formula Kohler illumination optical path, forms uniform beam and illuminates measured workpiece 5；Collecting lens system 2 goes out
Light is penetrated towards Amici prism 3, the reflected light of Amici prism 3 is towards interference objective 4；Micro- mobile device 9 and interference objective 4 are successively same
Axis is arranged on the reflected light path direction of Amici prism 3；Interference objective 4 and imaging optical system 7 are co-axially located at Amici prism 3
Two sides, constitute interference imaging optical path；Variable-power optical system 6 is co-axially located between Amici prism 3 and imaging optical system 7；
Area array CCD camera 8 is co-axially located at the top of imaging optical system 7；Interference imaging optical path and illumination path pass through Amici prism 3
It is connected in one.The lower section of interference objective 4 is arranged in objective table 10, and measured workpiece 5 is placed on objective table 10.Either phase
Poor interferometry or vertical scanning White Light Interferometer, interference image sequence required for interference calculates is by micro- mobile device 9
Realize that interference objective 4 and sample surface relative distance change along optical axis direction driving；Micro- mobile device 9 is piezoelectricity
Ceramic PZT or the Mechanical Moving platform of motor (including servo motor, stepper motor etc.) driving；Micro-shifting along optical axis direction is dynamic
The settable driving interference objective 4 of device 9 drives sample stage 10 to realize that interference objective 4 is opposite with sample surface
Distance change.
It is illustrated in figure 2 the structural schematic diagram of Mirau type interference objective, including microcobjective 401, reference plate 402, light splitting
Reflecting region 404 on plate 403 and reference plate.Light beam from optical system front end penetrates reference plate after microcobjective 401
402, then it is divided into two beams through part reflective semitransparent film on beam-splitter 403, a branch of plate 403 that is split is reflected into anti-on reference plate 402
Region 404 is penetrated, beam-splitter 403 is returned to after being reflected by reflecting region 404 and is reflected again, finally returns to object through reference plate 402
Mirror 401 forms reference light；Another beam projects measured workpiece through beam-splitter 403, through beam-splitter after measured workpiece reflects
403 and reference plate 402 return on microcobjective 401, formed test light.Two-beam merges in 401 visual field of object lens and interferes.
It is illustrated in figure 3 the structural schematic diagram of variable-power optical system, including compensation group 601, zoom group 602 and fixed group
603。d1Indicate the distance between compensation group 601 and zoom group 602, d2Indicate the distance between zoom group 602 and fixed group 603.
The focal length of compensation group 601, zoom group 602 and fixed group 603 is respectively 75mm, -20mm and 75mm.When zoom group 602 is by left-hand
When right linear movement, focal length is by short elongated, while image planes are subjected to displacement.Make corresponding nonlinear moving with compensation group 601, makes to send out
The compensated rear reimaging of image planes of displacement has been given birth on fixed position.601 cooperative motion of zoom group 602 and compensation group, two
Person's collective effect makes enlargement ratio consecutive variations.The introducing of nonlinear motion not only provides possibility, Er Qie great to image planes stabilization
Image quality is improved greatly.The relationship of corresponding zoom curve and compensated curve and enlargement ratio is as shown in Figure 4.
As shown in Figure 1, the light that light source 1 issues is successively after collecting lens system 2, Amici prism 3 and interference objective 4,
It forms uniform beam and illuminates measured workpiece 5.2 emergent light of collecting lens system is towards Amici prism 3, the reflected light court of Amici prism 3
To Mirau type interference objective 4；Mirau type interference objective 4 make the light beam reflected by Amici prism 3 converge in the direction of the optical axis and
It is irradiated in measured workpiece 5, and makes the reference reflecting obtained measuring beam from measured workpiece 5 with obtaining inside interference objective
Light beam interference；Interference light is after the interference objective 4 return, successively by way of Amici prism 3, variable-power optical system 6 and imaging
It after optical system 7, focuses on 8 target surface of CCD camera, forms interference fringe.Micro- mobile device 9 drives Mirau type interference objective 4
Along optical axis longitudinal scanning, the image of shooting is real-time transmitted to computer (not providing in figure) by CCD camera 8.Computer by these
Interference image successively arranges, and forms a series of interference images, finally characterizes three according to the relationship of phase or luminous intensity and height
Tie up surface topography.
Consider from imaging angle, the enlargement ratio of whole system is represented by
Γ=β Μ,
Wherein β=fi/fo。fiFor the focal length of imaging optical system 7, foFor the focal length of interference objective 4.M is zoom optical system
The enlargement ratio of system 6.Since interference objective 4 in device and imaging optical system 7 are relatively fixed settings, so system magnifying power
Γ changes as 6 enlargement ratio M of variable-power optical system changes.
So the object-image relation of whole system is represented by for the angle of image transitive relation
Y '=Γ y.
Due to system image height y ' be it is constant, 6 enlargement ratio M of variable-power optical system is bigger, and system magnification Γ is bigger,
Object plane height y is smaller；6 enlargement ratio M of variable-power optical system is smaller, and system magnification Γ is smaller, and object plane height y is bigger.?
The variation that is enlargement ratio of variable-power optical system 6 changes from small to big, observed range change from large to small, corresponding visual field
Angle changes from large to small.
Therefore, if there is different enlargement ratio requirements to visual field, replacement object lens is not needed, zoom optics need to be only adjusted
The enlargement ratio M of system can be realized and become larger or contract measurement field range, and amplification factor is continuously adjustable.
Claims (6)
1. one kind can continuous zoom surface figure measuring device, it is characterised in that: including light source (1), receive light source (1) transmitting
It is the Amici prism (3) of light, interference objective (4), variable-power optical system (6), imaging optical system (7), area array CCD camera (8), micro-
Mobile device (9), objective table (10)；Micro- mobile device (9) and interference objective (4) are sequentially coaxially arranged in Amici prism (3)
On reflected light path direction；Interference objective (4) and imaging optical system (7) are co-axially located at the two sides of Amici prism (3), constitute dry
Relate to imaging optical path；Variable-power optical system (6) is co-axially located between Amici prism (3) and imaging optical system (7)；Area array CCD
Camera (8) is co-axially located at the top of imaging optical system (7)；Objective table (10) is arranged in the lower section of interference objective (4)；Its
In, variable-power optical system (6) includes compensation group (601), zoom group (602) and fixes group (603)；Compensation group (601), zoom group
(602) sequentially coaxially it is arranged with fixed group (603) according to sequence from the object side to the image side；Zoom group (602) does linear movement
Change the size of focal length；Compensation group (601) does nonlinear moving to compensate image speckles, keeps image planes position constant；Compensation group
(601), the focal length of zoom group (602) and fixed group (603) is respectively 75mm, -20mm and 75mm；
When zoom group (602) linear movement, focal length is by short elongated, while image planes are subjected to displacement；Made with compensation group (601) corresponding
Nonlinear moving, make the image planes being displaced it is compensated after reimaging on fixed position.
2. it is according to claim 1 can continuous zoom surface figure measuring device, it is characterised in that: light source (1) issue
Light successively after Amici prism (3) and interference objective (4), form uniform beam.
3. it is according to claim 1 can continuous zoom surface figure measuring device, it is characterised in that: interference objective (4)
Select one of Michelson structure, Mirau structure and Linnik structure.
4. it is according to claim 3 can continuous zoom surface figure measuring device, it is characterised in that: micro- mobile device
It (9) is the device for realizing interference objective (4) and the variation of measured workpiece surface relative distance, driving interference objective (4) is vertical along optical axis
Drive measured workpiece is mobile to be scanned to change interference along optical axis driving objective table (10) to scanning or micro- mobile device (9)
Light path between object lens (4) and measured workpiece (5)；Table is realized suitable for phase difference interferometry or vertical scanning White Light Interferometer
Face topography measurement.
5. it is according to claim 4 can continuous zoom surface figure measuring device, it is characterised in that: micro- mobile device
It (9) is piezoelectric ceramics PZT or motor-driven Mechanical Moving platform；Micro- mobile device (9) along optical axis direction drives interference
Object lens (4) or driving objective table (10) realize that interference objective (4) and measured workpiece surface relative distance change.
6. it is according to claim 1 can continuous zoom surface figure measuring device, it is characterised in that: the light source (1)
Collecting lens system (2) are additionally provided between Amici prism (3).
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| CN201510797149.1A CN105486247B (en) | 2015-11-18 | 2015-11-18 | It is a kind of can continuous zoom surface figure measuring device |
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| CN201510797149.1A CN105486247B (en) | 2015-11-18 | 2015-11-18 | It is a kind of can continuous zoom surface figure measuring device |
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| CN105486247A CN105486247A (en) | 2016-04-13 |
| CN105486247B true CN105486247B (en) | 2019-02-01 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106197257A (en) * | 2016-07-06 | 2016-12-07 | 中国科学院光电技术研究所 | Amplitude & Phase combined modulation super-resolution three-dimensional micro-nano structure topography measurement device |
| CN106441152B (en) * | 2016-10-18 | 2019-02-01 | 淮阴师范学院 | Asymmetric optical interferometry method and device |
| CN106873124A (en) * | 2016-12-27 | 2017-06-20 | 广东工业大学 | A kind of method for automatically adjusting focal length |
| CN107561089B (en) * | 2017-09-15 | 2024-04-02 | 深圳市牧激科技有限公司 | Inner hole detection optical system and inner hole detection equipment |
| CN108020174B (en) * | 2017-11-30 | 2019-06-11 | 哈尔滨工业大学 | Surface shape measurement device and method based on Structured Illumination |
| CN108007387B (en) * | 2017-11-30 | 2018-12-07 | 哈尔滨工业大学 | Surface shape measurement device and method based on Structured Illumination |
| CN108007382B (en) * | 2017-11-30 | 2019-06-11 | 哈尔滨工业大学 | Surface shape measurement device and method based on Structured Illumination |
| CN107727003B (en) * | 2017-11-30 | 2019-06-18 | 哈尔滨工业大学 | Surface shape measurement device and method based on Structured Illumination |
| CN108020173B (en) * | 2017-11-30 | 2019-06-11 | 哈尔滨工业大学 | Surface shape measurement device and method based on Structured Illumination |
| CN109540004B (en) * | 2018-11-29 | 2020-06-30 | 中国科学院微电子研究所 | Optical detection system and detection method thereof |
| CN110307802A (en) * | 2019-06-24 | 2019-10-08 | 天津大学 | It is a kind of to focus the curved surface pattern measurement method that gauge head focus is searched for automatically based on laser |
| CN117128889B (en) * | 2023-10-26 | 2023-12-29 | 深圳市鹰眼在线电子科技有限公司 | Modularized magnification conversion contour measurement device based on Linnik interference objective lens |
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| CN101661156A (en) * | 2008-08-26 | 2010-03-03 | 中国科学院西安光学精密机械研究所 | Method for realizing zoom optical system without moving lens group and optical system |
| CN101782679A (en) * | 2009-01-16 | 2010-07-21 | 中国人民解放军空军航空大学 | Zoom regulating mechanism of optical system |
| CN204255304U (en) * | 2014-11-24 | 2015-04-08 | 镇江超纳仪器有限公司（中外合资） | A kind of three-dimensional surface profile measurement mechanism |
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| CN101661156A (en) * | 2008-08-26 | 2010-03-03 | 中国科学院西安光学精密机械研究所 | Method for realizing zoom optical system without moving lens group and optical system |
| CN101782679A (en) * | 2009-01-16 | 2010-07-21 | 中国人民解放军空军航空大学 | Zoom regulating mechanism of optical system |
| CN101625231A (en) * | 2009-04-14 | 2010-01-13 | 华中科技大学 | White light interference profile meter |
| CN204255304U (en) * | 2014-11-24 | 2015-04-08 | 镇江超纳仪器有限公司（中外合资） | A kind of three-dimensional surface profile measurement mechanism |
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Effective date of registration: 20221207 Address after: Unit E2E3-301, Artificial Intelligence Industrial Park, No. 88, Jinjihu Avenue, Suzhou Industrial Park, Jiangsu Province, 215000 Patentee after: Changchuan Technology (Suzhou) Co.,Ltd. Address before: 1809, Block A, Twin Building, No. 468, Wisdom Avenue, Dingmao District, Zhenjiang City, Jiangsu Province, 212000 Patentee before: ZHENJIANG SUBNANO INSTRUMENTS INCORPORATED., LTD. |