TWI597474B - Measuring device - Google Patents
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- TWI597474B TWI597474B TW105109599A TW105109599A TWI597474B TW I597474 B TWI597474 B TW I597474B TW 105109599 A TW105109599 A TW 105109599A TW 105109599 A TW105109599 A TW 105109599A TW I597474 B TWI597474 B TW I597474B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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Description
本發明是有關於一種測量裝置，對平板顯示器（flat panel display）用玻璃（glass）基板、金屬薄板、矽晶圓（silicon wafer）及樹脂薄板等的背面尺寸、形狀進行測量。The present invention relates to a measuring apparatus for measuring a back surface size and shape of a glass substrate, a metal thin plate, a silicon wafer, a resin sheet, and the like for a flat panel display.
以往，已知有固定於基台上的板玻璃的尺寸測量方法（例如參照專利文獻1）。根據該尺寸測量方法，藉由利用電荷耦合裝置（Charge Coupled Device，CCD）攝影機（camera）來拍攝板玻璃表面的圖像，從而可測量板玻璃的形狀。 現有技術文獻 專利文獻Conventionally, a method of measuring the size of a plate glass fixed to a base is known (for example, refer to Patent Document 1). According to this size measuring method, the shape of the sheet glass can be measured by photographing an image of the surface of the sheet glass by using a Charge Coupled Device (CCD) camera. Prior art literature
專利文獻1：日本專利特開2001-241921號公報Patent Document 1: Japanese Patent Laid-Open Publication No. 2001-241921
[發明所欲解決之課題][Problems to be solved by the invention]
然而，所述尺寸測量方法存在下述問題：儘管可測量板玻璃表面的形狀，但無法測量背面的形狀。因此，在對板玻璃背面的形狀進行測量時，需要使板玻璃反轉的作業。However, the size measuring method has a problem in that although the shape of the sheet glass surface can be measured, the shape of the back surface cannot be measured. Therefore, when measuring the shape of the back surface of the plate glass, it is necessary to reverse the operation of the plate glass.
本發明的目的在於提供一種測量裝置，可容易地對測量對象物背面的形狀進行測量。 [解決課題之手段]An object of the present invention is to provide a measuring apparatus which can easily measure the shape of the back surface of a measuring object. [Means for solving the problem]
本發明的測量裝置的特徵在於包括：平台部，載置平板狀的測量對象物；顯微鏡，具有物鏡及攝影部；以及角隅稜鏡（corner cube），配置於所述平台部的與所述測量對象物的背面側的測量位置對應的位置處，所述攝影部經由所述角隅稜鏡及所述物鏡，來拍攝所述測量對象物的背面側的測量位置的像。The measuring device according to the present invention includes: a platform portion on which a flat object to be measured is placed; a microscope having an objective lens and a photographing portion; and a corner cube disposed on the platform portion and the At a position corresponding to the measurement position on the back side of the measurement object, the imaging unit images an image of the measurement position on the back side of the measurement object via the corner 隅稜鏡 and the objective lens.
而且，本發明的測量裝置的特徵在於，在所述平台部的與所述測量對象物的背面側的多個所述測量位置對應的各個位置，形成有配置所述角隅稜鏡的配置部，所述角隅稜鏡被分別配置於所述配置部，所述測量裝置更包括顯微鏡移動部，所述顯微鏡移動部使所述顯微鏡沿著所述測量對象物的緣部而移動，所述攝影部經由所述角隅稜鏡及所述物鏡，來依序拍攝所述測量對象物的背面側的多個測量位置的像。Further, the measuring device according to the present invention is characterized in that the arrangement portion in which the corners are arranged is formed at each position of the platform portion corresponding to a plurality of the measurement positions on the back side of the object to be measured. The corners are respectively disposed in the arrangement portion, and the measuring device further includes a microscope moving portion that moves the microscope along an edge of the measurement object, The photographing unit sequentially images the plurality of measurement positions on the back side of the measurement object through the corner 隅稜鏡 and the objective lens.
而且，本發明的測量裝置的特徵在於包括：平台部，載置平板狀的測量對象物；顯微鏡，具有物鏡及攝影部；角隅稜鏡，位於所述測量對象物的背面側；角隅稜鏡移動部，使所述角隅稜鏡沿著所述測量對象物的緣部而移動；顯微鏡移動部，使所述顯微鏡沿著所述測量對象物的緣部而移動；以及控制部，使所述角隅稜鏡追隨於所述顯微鏡的移動而依序移動至所述測量對象物的背面側的測量位置，所述攝影部經由所述角隅稜鏡及所述物鏡，來依序拍攝所述測量對象物的背面側的多個測量位置的像。Further, the measuring apparatus according to the present invention includes: a platform portion on which a flat object to be measured is placed; a microscope having an objective lens and a photographing portion; and a corner 隅稜鏡 located on the back side of the object to be measured; The mirror moving portion moves the corner ridge along an edge of the measurement object; the microscope moving portion moves the microscope along an edge of the measurement object; and the control unit makes The corners sequentially move to a measurement position on the back side of the measurement object following the movement of the microscope, and the photographing unit sequentially shoots through the corners and the objective lens An image of a plurality of measurement positions on the back side of the measurement object.
而且，本發明的測量裝置的特徵在於，所述測量對象物在緣部具有倒角部分，所述攝影部經由所述物鏡及所述角隅稜鏡，來拍攝所述測量對象物的背面的所述倒角部分的像。Further, the measuring device according to the present invention is characterized in that the object to be measured has a chamfered portion at an edge portion, and the photographing portion photographs the back surface of the object to be measured via the objective lens and the corner. The image of the chamfered portion.
而且，本發明的測量裝置的特徵在於，所述測量對象物是平板顯示器用玻璃基板、金屬薄板、矽晶圓及樹脂薄板中的任一種。 [發明的效果]Further, the measuring device of the present invention is characterized in that the object to be measured is any one of a glass substrate for a flat panel display, a metal thin plate, a tantalum wafer, and a resin sheet. [Effects of the Invention]
根據本發明的測量裝置，可容易地對測量對象物背面的形狀進行測量。According to the measuring apparatus of the present invention, the shape of the back surface of the measuring object can be easily measured.
以下，參照圖式，對於第1實施形態的測量裝置，以將平板顯示器用玻璃基板作為測量對象物（以下稱作工件）來測量的情況為例進行說明。圖1是第1實施形態的測量裝置的側面圖。如圖1所示，測量裝置2包括：平板矩形狀的平台部6，以平行於水平面的方式來載置工件4；以及顯微鏡8，用於對載置於平台部6的工件4進行測量。In the following, the measurement device of the first embodiment will be described by taking a glass substrate for a flat panel display as a measurement object (hereinafter referred to as a workpiece) as an example. Fig. 1 is a side view of the measuring device of the first embodiment. As shown in FIG. 1, the measuring device 2 includes a flat plate-shaped platform portion 6 on which the workpiece 4 is placed in parallel with a horizontal plane, and a microscope 8 for measuring the workpiece 4 placed on the platform portion 6.
在平台部6上，如圖2所示，在工件4被載置於平台部6時與工件4的緣部對應的位置6a處，形成有多個用於配置角隅稜鏡（corner cube）12的配置部14。配置部14是形成於平台部6表面的凹狀部分，在各配置部14配置有各角隅稜鏡12。On the platform portion 6, as shown in FIG. 2, at a position 6a corresponding to the edge portion of the workpiece 4 when the workpiece 4 is placed on the platform portion 6, a plurality of corner cubes are formed. The arrangement unit 14 of 12. The arranging portion 14 is a concave portion formed on the surface of the platform portion 6, and each corner portion 12 is disposed in each of the arranging portions 14.
圖3是角隅稜鏡12的立體圖。如圖3所示，角隅稜鏡12是上部12x具有圓筒形狀且下部12y具有三棱錐形狀的構件。此處，在角隅稜鏡12的上端，形成有使光入射的圓形的入射面12a，在下部12y的內面，在三面形成有對光進行反射的反射面12b。FIG. 3 is a perspective view of the corner file 12. As shown in FIG. 3, the corner file 12 is a member in which the upper portion 12x has a cylindrical shape and the lower portion 12y has a triangular pyramid shape. Here, at the upper end of the corner turn 12, a circular incident surface 12a through which light is incident is formed, and on the inner surface of the lower portion 12y, a reflecting surface 12b that reflects light is formed on three sides.
另外，角隅稜鏡12如圖4所示，以入射面12a的中心位於與工件4的緣部對應的位置6a的外側的方式，而配置在與工件4背面側的測量位置對應的位置。而且，各個角隅稜鏡12以入射面12a較平台部6的表面位置低0 mm～2 mm的方式而配置於配置部14內。Further, as shown in FIG. 4, the corner gusset 12 is disposed at a position corresponding to the measurement position on the back side of the workpiece 4 so that the center of the incident surface 12a is located outside the position 6a corresponding to the edge of the workpiece 4. Further, each of the corners 12 is disposed in the arrangement portion 14 such that the incident surface 12a is 0 mm to 2 mm lower than the surface position of the land portion 6.
顯微鏡8如圖1所示，在鏡筒8a的下側端部具備以規定的倍率來觀察工件4的物鏡8b，在鏡筒8a的上側端部具備經由物鏡8b來拍攝工件4的像的CCD攝影機8c。而且，顯微鏡8在鏡筒8a的側方具備落射照明部8e。另外，顯微鏡8是由未圖示的框架（frame）予以支持，該框架可沿著工件4的表面而在水平面內二維地移動。As shown in Fig. 1, the microscope 8 includes an objective lens 8b for observing the workpiece 4 at a predetermined magnification at a lower end portion of the lens barrel 8a, and a CCD for imaging an image of the workpiece 4 via the objective lens 8b at an upper end portion of the lens barrel 8a. Camera 8c. Further, the microscope 8 is provided with an epi-illumination portion 8e on the side of the lens barrel 8a. Further, the microscope 8 is supported by a frame (not shown) which is movable two-dimensionally in the horizontal plane along the surface of the workpiece 4.
圖5是工件4的緣部的側面圖。如圖5所示，對工件4的緣部實施有倒角加工，在側面4a的上下分別形成有上傾斜面4b、下傾斜面4c。另外，圖5所示的上傾斜面4b的倒角尺寸L1及下傾斜面4c的倒角尺寸L2是測量裝置2的測量對象。FIG. 5 is a side view of the edge of the workpiece 4. As shown in Fig. 5, the edge portion of the workpiece 4 is chamfered, and an upper inclined surface 4b and a lower inclined surface 4c are formed on the upper and lower sides of the side surface 4a. Further, the chamfered dimension L1 of the upper inclined surface 4b and the chamfered dimension L2 of the lower inclined surface 4c shown in FIG. 5 are measurement targets of the measuring device 2.
接下來，參照圖式，對於使用測量裝置2來測量工件4的背面形狀的處理，以使用對物5倍的物鏡8b以及外徑30 mm且高度22.7 mm的角隅稜鏡12的情況為例進行說明。另外，物鏡8b原本的作動距離（以下稱作工作距離（working distance））為64 mm。對於工作距離，將在後文進行詳細說明。Next, with reference to the drawings, a case where the measurement of the back surface shape of the workpiece 4 using the measuring device 2 is performed using the objective lens 8b of 5 times the object and the corner 隅稜鏡 12 having an outer diameter of 30 mm and a height of 22.7 mm as an example. Be explained. Further, the original operating distance of the objective lens 8b (hereinafter referred to as a working distance) is 64 mm. The working distance will be described in detail later.
首先，測量裝置2的未圖示的控制部使未圖示的驅動部驅動，而使由框架所支持的顯微鏡8移動，從而如圖6所示，使顯微鏡8的位置對準角隅稜鏡12的正上方。接下來，調整物鏡8b的水平位置，以使物鏡8b的中心軸X的位置位於從角隅稜鏡12的入射面12a的中心Y的位置偏離規定距離的位置，並調整物鏡8b的鉛垂位置，以使從物鏡8b的射出面至角隅稜鏡12的入射面12a為止的距離A為34.132 mm。此處，從工件4的緣部至角隅稜鏡12的入射面12a的中心Y為止的距離F為4 mm。而且，從角隅稜鏡12的入射面12a至工件4的背面為止的距離G為2 mm。First, the control unit (not shown) of the measuring device 2 drives a driving unit (not shown) to move the microscope 8 supported by the frame, thereby aligning the position of the microscope 8 as shown in FIG. Just above the 12th. Next, the horizontal position of the objective lens 8b is adjusted so that the position of the central axis X of the objective lens 8b is located at a position deviated from the position of the center Y of the incident surface 12a of the corner turn 12 by a predetermined distance, and the vertical position of the objective lens 8b is adjusted. The distance A from the exit surface of the objective lens 8b to the incident surface 12a of the corner turn 12 is 34.132 mm. Here, the distance F from the edge of the workpiece 4 to the center Y of the incident surface 12a of the corner 12 is 4 mm. Further, the distance G from the incident surface 12a of the corner turn 12 to the back surface of the workpiece 4 is 2 mm.
接下來，控制部從落射照明部8e射出照明光。射出的照明光由鏡筒8a內的未圖示的二向分光鏡（dichroic mirror）予以反射後，經由物鏡8b而入射至角隅稜鏡12的入射面12a。入射至入射面12a的照明光由反射面12b反覆反射，對工件4背面的測量位置進行照射。Next, the control unit emits illumination light from the epi-illumination unit 8e. The emitted illumination light is reflected by a dichroic mirror (not shown) in the lens barrel 8a, and then incident on the incident surface 12a of the corner 12 via the objective lens 8b. The illumination light incident on the incident surface 12a is repeatedly reflected by the reflection surface 12b, and illuminates the measurement position on the back surface of the workpiece 4.
被工件4背面的測量位置所反射的反射光由反射面12b反覆反射，並經由入射面12a而入射至物鏡8b後，透過二向分光鏡而在未圖示的攝影元件上成像，在攝影元件上成像的像由CCD攝影機8c所拍攝。藉此，基於所拍攝的攝影資料來測量下傾斜面4c的倒角尺寸L2。The reflected light reflected by the measurement position on the back surface of the workpiece 4 is reflected by the reflection surface 12b, is incident on the objective lens 8b via the incident surface 12a, and is then imaged by a dichroic beam splitter on an imaging element (not shown). The imaged image is taken by the CCD camera 8c. Thereby, the chamfer size L2 of the lower inclined surface 4c is measured based on the photographed photograph data.
隨後，控制部反覆進行下述處理，直至拍攝了所有測量位置為止，所述處理是：一邊使顯微鏡8沿著工件4的緣部而移動，一邊依序從角隅稜鏡12的正上方拍攝測量位置的像。Subsequently, the control unit repeatedly performs the following processing until all the measurement positions are taken, and the process is such that the microscope 8 is moved along the edge of the workpiece 4 while sequentially photographing from directly above the corner 12 Measure the image of the position.
接下來，對物鏡8b的工作距離進行說明。如上所述，對物5倍的物鏡8b原本的工作距離B為64 mm。而且，角隅稜鏡12內的光路長度是：將距離C（19.872 mm）、距離D（8.485 mm）、距離E（17.043 mm）合計所得的45.4 mm。Next, the working distance of the objective lens 8b will be described. As described above, the original working distance B of the objective lens 8b which is 5 times the object is 64 mm. Further, the length of the optical path in the corner 12 is 45.4 mm obtained by totaling the distance C (19.872 mm), the distance D (8.485 mm), and the distance E (17.043 mm).
另外，因角隅稜鏡12的折射而延伸的光路長度可基於數式1而算出。在數式1中，t為角隅稜鏡12內的光路長度，n為角隅稜鏡12的折射率。Further, the length of the optical path extending due to the refraction of the corner 隅稜鏡 12 can be calculated based on Equation 1. In Equation 1, t is the optical path length in the corner 隅稜鏡 12, and n is the refractive index of the corner 隅稜鏡12.
t（n-1）/n …數式1 根據數式1，因折射而延伸的光路長度為45.4 mm×（1.52 mm-1 mm）/1.52 mm=15.532 mm。t(n-1)/n (Formula 1) According to Equation 1, the length of the optical path extending due to refraction is 45.4 mm × (1.52 mm - 1 mm) / 1.52 mm = 15.52 mm.
當將角隅稜鏡12內的光路長度換算為空氣中的光路長度時，則將角隅稜鏡12內的光路長度（45.4 mm）減去因折射而延伸的光路長度（15.532 mm）。其結果，算出空氣中的光路長度為45.4 mm-15.532 mm=29.868 mm。When the optical path length in the corner 12 is converted into the optical path length in the air, the optical path length (45.4 mm) in the corner 12 is subtracted from the optical path length (15.532 mm) extended by the refraction. As a result, the optical path length in the air was calculated to be 45.4 mm - 15.532 mm = 29.868 mm.
根據以上所述，將原本的工作距離B（64mm）減去29.868 mm所得的34.132 mm成為使用外徑30 mm且高度22.7 mm的角隅稜鏡12時的工作距離（距離A）。進而，將距離A（34.132 mm）減去從入射面12a至工件4的背面為止的距離G（2 mm）所得的32.132 mm，成為使用該角隅稜鏡12時的從物鏡8b的射出面至測量位置為止的實際的工作距離。According to the above, the 34.132 mm obtained by subtracting 29.868 mm from the original working distance B (64 mm) becomes the working distance (distance A) when the corner 隅稜鏡 12 having an outer diameter of 30 mm and a height of 22.7 mm is used. Further, 32.132 mm obtained by subtracting the distance G (2 mm) from the incident surface 12a to the back surface of the workpiece 4 by the distance A (34.132 mm) becomes the exit surface of the objective lens 8b when the corner 隅稜鏡12 is used. The actual working distance up to the position is measured.
如此，藉由對物鏡8b的倍率、物鏡8b的位置、角隅稜鏡12的尺寸、角隅稜鏡12的位置進行適當組合，從而可確保適當的工作距離與光路長度，從而可測量工件4背面的形狀。In this manner, by appropriately combining the magnification of the objective lens 8b, the position of the objective lens 8b, the size of the corner 隅稜鏡12, and the position of the corner 隅稜鏡12, an appropriate working distance and an optical path length can be secured, and the workpiece 4 can be measured. The shape of the back.
根據該第1實施形態的測量裝置2，藉由在平台部6上的與工件4的緣部對應的位置6a處配置角隅稜鏡12，從而可容易地測量工件4背面的形狀而無須使工件4反轉。According to the measuring device 2 of the first embodiment, by arranging the corners 12 at the position 6a corresponding to the edge of the workpiece 4 on the land portion 6, the shape of the back surface of the workpiece 4 can be easily measured without The workpiece 4 is reversed.
另外，亦可考慮：如圖7所示，在平台部6上，與和工件4的緣部對應的位置6a平行地配置一對反射鏡20，如圖8所示，利用反射鏡20來使光反射，藉此來測量工件4背面的形狀。此時，難以進行反射鏡20的角度調整，但根據第1實施形態的測量裝置2，無須調整反射鏡20的角度，便可容易地測量工件4背面的形狀。Further, it is also conceivable that a pair of mirrors 20 are arranged in parallel with the position 6a corresponding to the edge of the workpiece 4 on the platform portion 6, as shown in Fig. 8, as shown in Fig. 8, by means of the mirror 20 The light is reflected by which the shape of the back surface of the workpiece 4 is measured. At this time, it is difficult to adjust the angle of the mirror 20, but according to the measuring device 2 of the first embodiment, the shape of the back surface of the workpiece 4 can be easily measured without adjusting the angle of the mirror 20.
接下來，對第2實施形態的測量裝置進行說明。該第2實施形態的測量裝置是代替如第1實施形態般在配置部14配置角隅稜鏡12，而在平台部6形成使角隅稜鏡12移動的狹縫（slit），以使角隅稜鏡12追隨於顯微鏡8而移動。因而，第2實施形態中，對與第1實施形態不同的部分進行詳細說明，而對重複的部分則適當省略說明。Next, a measuring device according to the second embodiment will be described. In the measuring device according to the second embodiment, instead of the first embodiment, the corner portion 12 is disposed in the arrangement portion 14, and the platform portion 6 is formed with a slit for moving the corner portion 12 to make the angle.隅稜鏡12 follows the microscope 8 and moves. Therefore, in the second embodiment, portions that are different from the first embodiment will be described in detail, and the overlapping portions will be appropriately omitted.
圖9是第2實施形態的測量裝置的側面圖。如圖9所示，測量裝置28包括：平板矩形狀的平台部6，以平行於水平面的方式來載置工件4；以及顯微鏡8，用於對載置於平台部6的工件4進行測量。Fig. 9 is a side view of the measuring device of the second embodiment. As shown in FIG. 9, the measuring device 28 includes a flat plate-shaped platform portion 6 on which the workpiece 4 is placed in parallel with the horizontal plane, and a microscope 8 for measuring the workpiece 4 placed on the platform portion 6.
此處，在平台部6上，沿著在工件4被載置於平台部6時與工件4的緣部對應的位置6a（參照圖2）而形成有狹縫30。而且，在平台部6的下部，具備搭載有角隅稜鏡12的滑件（slider）32、可沿狹縫30滑動地支持滑件32的導軌（guide rail）34、使滑件32沿導軌34移動的滾珠螺桿36、及使滾珠螺桿36驅動的馬達（motor）38。而且，顯微鏡8是由框架予以支持，該框架可沿著工件4的表面而在水平面內二維地移動。Here, the slit portion 30 is formed on the land portion 6 along a position 6a (see FIG. 2) corresponding to the edge portion of the workpiece 4 when the workpiece 4 is placed on the land portion 6. Further, a slider 32 on which the corner cymbal 12 is mounted, a guide rail 34 that slidably supports the slider 32 along the slit 30, and a slider 32 along the guide rail are provided at a lower portion of the platform portion 6. A moving ball screw 36 and a motor 38 for driving the ball screw 36. Moreover, the microscope 8 is supported by a frame which is movable two-dimensionally in the horizontal plane along the surface of the workpiece 4.
接下來，參照圖式，對使用第2實施形態的測量裝置28來測量工件4背面的形狀時的處理進行說明。另外，以下，與第1實施形態同樣地，以使用對物5倍的物鏡8b及外徑30 mm且高度22.7 mm的角隅稜鏡12的情況為例進行說明。Next, a process when the shape of the back surface of the workpiece 4 is measured using the measuring device 28 of the second embodiment will be described with reference to the drawings. In the following, as in the first embodiment, a case where the objective lens 8b of five times the object and the corner 隅稜鏡12 having an outer diameter of 30 mm and a height of 22.7 mm are used will be described as an example.
首先，測量裝置28的未圖示的控制部使未圖示的驅動部驅動而使由框架所支持的顯微鏡8移動，從而如圖9所示，使顯微鏡8的位置對準角隅稜鏡12的正上方。接下來，控制部從物鏡8b的落射照明部8e射出照明光。射出的照明光由鏡筒8a內的未圖示的二向分光鏡予以反射後，經由物鏡8b而入射至角隅稜鏡12的入射面12a。入射至入射面12a的照明光由反射面12b反覆反射，對工件4背面的測量位置進行照射。First, a control unit (not shown) of the measuring device 28 drives a driving unit (not shown) to move the microscope 8 supported by the frame, thereby aligning the position of the microscope 8 with the angle 隅稜鏡12 as shown in FIG. Just above it. Next, the control unit emits illumination light from the epi-illumination unit 8e of the objective lens 8b. The emitted illumination light is reflected by a dichroic mirror (not shown) in the lens barrel 8a, and then incident on the incident surface 12a of the corner 12 via the objective lens 8b. The illumination light incident on the incident surface 12a is repeatedly reflected by the reflection surface 12b, and illuminates the measurement position on the back surface of the workpiece 4.
被工件4背面的測量位置所反射的反射光由反射面12b反覆反射，並經由入射面12a而入射至物鏡8b後，透過二向分光鏡而在未圖示的攝影元件上成像。The reflected light reflected by the measurement position on the back surface of the workpiece 4 is reflected by the reflection surface 12b, and is incident on the objective lens 8b via the incident surface 12a, and then transmitted through a dichroic beam splitter to image on an imaging element (not shown).
在該狀態下，控制部一邊驅動馬達38來使滾珠螺桿36旋轉，以使搭載有角隅稜鏡12的滑件32沿著導軌34依序移動，並且使由框架所支持的顯微鏡8沿著狹縫30依序移動，一邊藉由CCD攝影機8c來進行攝影。藉此，可連續地測量工件4的下傾斜面4c上的多個測量位置的倒角尺寸L2。In this state, the control unit drives the motor 38 to rotate the ball screw 36 so that the slider 32 on which the corner turn 12 is mounted is sequentially moved along the guide rail 34, and the microscope 8 supported by the frame is moved along The slits 30 are sequentially moved while being photographed by the CCD camera 8c. Thereby, the chamfer size L2 of the plurality of measurement positions on the lower inclined surface 4c of the workpiece 4 can be continuously measured.
根據該第2實施形態的測量裝置28，在平台部6上形成使角隅稜鏡12移動的狹縫，且與顯微鏡8同步地使角隅稜鏡12移動，藉此可容易且連續地測量工件4背面的形狀。According to the measuring device 28 of the second embodiment, a slit for moving the corner 隅稜鏡 12 is formed on the land portion 6, and the corner 隅稜鏡 12 is moved in synchronization with the microscope 8, whereby the measurement can be easily and continuously measured. The shape of the back of the workpiece 4.
另外，所述各實施形態中使用的工件4只要是薄的平板狀的測量對象物即可，除了平板顯示器用玻璃基板以外，亦可使用金屬薄板、矽晶圓、樹脂薄板等。In addition, the workpiece 4 used in each of the above-described embodiments may be a thin flat measuring object, and a thin metal plate, a tantalum wafer, a resin sheet, or the like may be used in addition to the glass substrate for a flat panel display.
而且，所述各實施形態中，以使用外徑30 mm且高度22.7 mm的角隅稜鏡12的情況為例進行了說明，但亦可使用尺寸不同的角隅稜鏡。例如使用外徑20 mm且高度15.5 mm的角隅稜鏡。此時，角隅稜鏡內的光路長度為31 mm，圖6所示的距離C為12.672 mm，距離D為8.485 mm，距離E為9.843 mm。此時，調整物鏡8b的鉛垂位置以使距離A成為43.605 mm，藉此可確保適當的工作距離與光路長度，從而可測量工件4背面的形狀。Further, in each of the above embodiments, the case where the corners 12 having an outer diameter of 30 mm and a height of 22.7 mm is used has been described as an example, but corners having different sizes may be used. For example, a corner with an outer diameter of 20 mm and a height of 15.5 mm is used. At this time, the optical path length in the corner is 31 mm, the distance C shown in Fig. 6 is 12.672 mm, the distance D is 8.485 mm, and the distance E is 9.843 mm. At this time, the vertical position of the objective lens 8b is adjusted so that the distance A becomes 43.605 mm, whereby an appropriate working distance and an optical path length can be ensured, and the shape of the back surface of the workpiece 4 can be measured.
而且，當使用外徑18 mm且高度14 mm的角隅稜鏡時，角隅稜鏡內的光路長度為28 mm，圖6所示的距離C為11.172 mm，距離D為8.485 mm，距離E為8.343 mm。此時，調整物鏡8b的鉛垂位置以使距離A成為45.579 mm，藉此可確保適當的工作距離與光路長度，從而可測量工件4背面的形狀。Moreover, when using an angle 外径 with an outer diameter of 18 mm and a height of 14 mm, the optical path length in the corner is 28 mm, the distance C shown in Fig. 6 is 11.172 mm, the distance D is 8.485 mm, and the distance E is It is 8.343 mm. At this time, the vertical position of the objective lens 8b is adjusted so that the distance A becomes 45.579 mm, whereby the proper working distance and the optical path length can be ensured, so that the shape of the back surface of the workpiece 4 can be measured.
而且，所述各實施形態中，以使用對物5倍的物鏡8b的情況為例進行了說明，但亦可使用不同倍率的物鏡。例如使用對物10倍的物鏡。此時，原本的工作距離B為48 mm。此時，亦可藉由調整物鏡8b的鉛垂位置，確保適當的工作距離與光路長度，從而測量工件4背面的形狀。Further, in each of the above embodiments, the case of using the objective lens 8b which is five times as large as the object has been described as an example, but an objective lens having a different magnification may be used. For example, an objective lens 10 times the object is used. At this time, the original working distance B is 48 mm. At this time, the shape of the back surface of the workpiece 4 can also be measured by adjusting the vertical position of the objective lens 8b to ensure an appropriate working distance and optical path length.
而且，所述第2實施形態中，以將馬達38與滾珠螺桿36組合而成的驅動系統為例進行了說明，亦可藉由使用線性馬達（linear motor）來使角隅稜鏡12沿著狹縫30移動。Further, in the second embodiment, a drive system in which the motor 38 and the ball screw 36 are combined is described as an example, and the corner turn 12 may be formed by using a linear motor. The slit 30 moves.
2、28‧‧‧測量裝置
4‧‧‧工件
4a‧‧‧側面
4b‧‧‧上傾斜面
4c‧‧‧下傾斜面
6‧‧‧平台部
6a‧‧‧位置
8‧‧‧顯微鏡
8a‧‧‧鏡筒
8b‧‧‧物鏡
8c‧‧‧CCD攝影機
8e‧‧‧落射照明部
12‧‧‧角隅稜鏡
12a‧‧‧入射面
12b‧‧‧反射面
12x‧‧‧上部
12y‧‧‧下部
14‧‧‧配置部
20‧‧‧反射鏡
30‧‧‧狹縫
32‧‧‧滑件
34‧‧‧導軌
36‧‧‧滾珠螺桿
38‧‧‧馬達
L1、L2‧‧‧倒角尺寸
A、C、D、E、F、G‧‧‧距離
B‧‧‧工作距離
X‧‧‧中心軸
Y‧‧‧中心2, 28‧‧‧ measuring device
4‧‧‧Workpiece
4a‧‧‧ side
4b‧‧‧Upper slope
4c‧‧‧Under inclined surface
6‧‧‧ Platform Department
6a‧‧‧Location
8‧‧‧Microscope
8a‧‧‧Mirror tube
8b‧‧‧ objective lens
8c‧‧‧CCD camera
8e‧‧‧Emission lighting department
12‧‧‧Corner
12a‧‧‧Incoming surface
12b‧‧‧reflecting surface
12x‧‧‧ upper
12y‧‧‧ lower
14‧‧‧Configuration Department
20‧‧‧Mirror
30‧‧‧slit
32‧‧‧Sliding parts
34‧‧‧rails
36‧‧‧Rolling screw
38‧‧‧Motor
L1, L2‧‧‧ chamfer size
A, C, D, E, F, G‧‧‧ distance
B‧‧‧Working distance
X‧‧‧ central axis
Y‧‧‧ Center
圖1是第1實施形態的測量裝置的側面圖。 圖2是第1實施形態的測量裝置的平台部的平面圖。 圖3是第1實施形態的角隅稜鏡的立體圖。 圖4是從上方觀察配置於第1實施形態的測量裝置的平台部上的角隅稜鏡的圖。 圖5是被載置於第1實施形態的測量裝置的平台部上的工件（work）的緣部的側面圖。 圖6是表示使用第1實施形態的測量裝置來測量工件背面的狀況的圖。 圖7是在使用反射鏡（mirror）來測量工件背面的情況下，從上方觀察配置於平台部下部的反射鏡的圖。 圖8是表示使用反射鏡來測量工件背面的狀況的圖。 圖9是第2實施形態的測量裝置的側面圖。Fig. 1 is a side view of the measuring device of the first embodiment. Fig. 2 is a plan view showing a platform portion of the measuring device of the first embodiment. Fig. 3 is a perspective view of a corner horn according to the first embodiment. 4 is a view of the corner 配置 placed on the platform portion of the measuring device according to the first embodiment as seen from above. Fig. 5 is a side view of an edge portion of a work placed on a platform portion of the measuring device of the first embodiment. Fig. 6 is a view showing a state in which the back surface of the workpiece is measured using the measuring device of the first embodiment. FIG. 7 is a view of a mirror disposed at a lower portion of the platform portion as viewed from above when a back surface of the workpiece is measured using a mirror. Fig. 8 is a view showing a state in which the back surface of the workpiece is measured using a mirror. Fig. 9 is a side view of the measuring device of the second embodiment.
2‧‧‧測量裝置 2‧‧‧Measurement device
4‧‧‧工件 4‧‧‧Workpiece
6‧‧‧平台部 6‧‧‧ Platform Department
8‧‧‧顯微鏡 8‧‧‧Microscope
8a‧‧‧鏡筒 8a‧‧‧Mirror tube
8b‧‧‧物鏡 8b‧‧‧ objective lens
8c‧‧‧CCD攝影機 8c‧‧‧CCD camera
8e‧‧‧落射照明部 8e‧‧‧Emission lighting department
12‧‧‧角隅稜鏡 12‧‧‧Corner
14‧‧‧配置部 14‧‧‧Configuration Department
Claims (6)
Applications Claiming Priority (1)
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| JP2015087388A JP6464021B2 (en) | 2015-04-22 | 2015-04-22 | measuring device |
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| TW201638554A TW201638554A (en) | 2016-11-01 |
| TWI597474B true TWI597474B (en) | 2017-09-01 |
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| KR (1) | KR101833611B1 (en) |
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| CN108050934B (en) * | 2017-12-25 | 2020-07-14 | 武汉比天科技有限责任公司 | Visual vertical positioning method for workpiece with chamfer |
| CN108195319B (en) * | 2017-12-25 | 2020-07-14 | 武汉比天科技有限责任公司 | Visual oblique positioning method for workpiece with chamfer |
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| JPH0633142U (en) * | 1992-09-25 | 1994-04-28 | 安藤電気株式会社 | 2 camera imaging mechanism |
| US6404544B1 (en) * | 1999-06-01 | 2002-06-11 | Optical Perspectives Group, Llc | Wavelength multiplexed quantitative differential interference contrast microscopy |
| JP2001241921A (en) * | 2000-03-01 | 2001-09-07 | Nippon Electric Glass Co Ltd | Method of measuring size of sheet glass |
| US6624894B2 (en) * | 2001-06-25 | 2003-09-23 | Veeco Instruments Inc. | Scanning interferometry with reference signal |
| DE10223107A1 (en) * | 2002-05-22 | 2003-12-04 | Zeiss Carl Jena Gmbh | Device for imaging objects |
| JP2007240503A (en) * | 2005-04-08 | 2007-09-20 | Hitachi Kokusai Electric Inc | Microscope imaging device and dimension measuring instrument |
| JP4652883B2 (en) * | 2005-04-28 | 2011-03-16 | 日本発條株式会社 | Measuring apparatus and measuring method |
| CN101339144B (en) * | 2008-08-14 | 2010-12-29 | 中国印钞造币总公司 | Coin two-sided automatic detection device |
| JP2010267665A (en) * | 2009-05-12 | 2010-11-25 | Sumitomo Electric Ind Ltd | Optical transmission module |
| JP2014085296A (en) * | 2012-10-26 | 2014-05-12 | Tokyo Seimitsu Co Ltd | Wafer shape measurement device |
| JP2016085034A (en) * | 2013-02-19 | 2016-05-19 | 旭硝子株式会社 | Image-capturing system for transparent plate-like body surface inspection |
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| CN106066158B (en) | 2018-11-02 |
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