CN108000058A - A kind of manufacture method of high-cleanness current limliting gasket seal - Google Patents
A kind of manufacture method of high-cleanness current limliting gasket seal Download PDFInfo
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- CN108000058A CN108000058A CN201711081348.8A CN201711081348A CN108000058A CN 108000058 A CN108000058 A CN 108000058A CN 201711081348 A CN201711081348 A CN 201711081348A CN 108000058 A CN108000058 A CN 108000058A
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- disk
- electrobrightening
- cleanness
- temperature
- current limliting
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
Abstract
The present invention relates to air-channel system field, particularly a kind of manufacture method of high-cleanness current limliting gasket seal.This method mainly includes:(1) using sheet metal processing generation metal disk;(2) generation micropore is processed at disk center;(3) annealing softening processing is carried out to disk;(4) electrobrightening is carried out to disk;(5) processing is passivated to disk;(6) cleaning, drying is carried out to disk, and carries out plastic packaging preservation.High-cleanness current limliting gasket seal of the present invention can preserve easy to use for a long time, with good sealing effect, with very strong high temperature resistant, corrosion resistance, available for the sealing of special gas medium, extremely low gas flow can be obtained, meets special traffic demand, more compact air-channel system can be obtained, reduces cost of installation and use.The present invention can effectively push the development and application of high-cleanness current limliting gasket seal, be of great significance for the air-channel system of the related specific use of development.
Description
Technical field
It is particularly a kind of to be used to realize limit while the sealing of high-cleanness gas path joint the present invention relates to air-channel system field
The manufacture method of the high-cleanness current limliting gasket seal of gas flow processed.
Background technology
Air-channel system is all very common in industrial and agricultural production, science and technology research and development links.Into after 90 years 20th century,
With the fast development of world's new and high technology, computer industry is to the demand of large scale integrated circuit, to the need of liquid crystal display
Ask substantial increase;With the development of novel energy, the also life of developing polysilicon solar cell and thin-film solar cells energetically
Production;In addition, Novel electric light source, optoelectronic semiconductor component, photoconductive fiber communication apparatus are also grown rapidly, in above-mentioned high-tech product
In production process, a large amount of high-purity gas are required for, to produce the various devices of dependable performance.In the process using high-purity gas
In, the high-purity gas pipe-line system for meeting corresponding requirements is essential.The function of these gas piping systems is mainly realized
The functions such as the break-make of gas, flow control, heating, cooling, non-return, filtering, current limliting.And to realize these functions just needs in gas
Various parts are added in body pipe-line system to realize correlation function, such as:The break-make of gas just needs diaphragm valve, flow control
Mass flow controller is just needed, non-return just needs check-valves, and current limliting just needs current limiter etc..Connection between these parts
Joint location needs to ensure reliable sealing effect, to prevent gas from leaking, because may relate to largely have in above application
Poison is harmful, and inflammable and explosive gas, once a leak occurs, not only resulting in economic loss, and can cause the accident of casualties to be sent out
It is raw.
At present, it is exactly end face seal type joint using most commonly used connector for these, is clipped between connector close
Gasket, metal gasket is oppressed by internal and external screw thread interlocking, gasket is produced certain deformation, so as to reach the effect of sealing
Fruit.However, the gas of tiny flow quantity can not be also produced without the micropore current limiter that bore dia is below 0.1mm currently on the market,
And in some cases, more strictly also resulting in existing current limiter to bulk size requirements can not use.Therefore,
It is necessary to develop while has the high-cleanness gasket of sealing and micropore current limliting concurrently, air-channel system can be simplified by the high-cleanness gasket
Assembling process, produce the gas of tiny flow quantity, realize more compact effect, reduce the production cost of related gas circuit.
The content of the invention
Limitation gas flow can be realized at the same time by being used for the sealing of high-cleanness gas path joint it is an object of the invention to provide one kind
High-cleanness current limliting gasket seal manufacture method, low slip can be prepared by this method, low surface roughness, sealing
Reliably, the high-cleanness current limliting gasket seal of tiny flow quantity can be produced.
The technical scheme is that:
A kind of manufacture method of high-cleanness current limliting gasket seal, concrete operation step are as follows:
(1) thickness of slab is used as 1~2mm metallic plates, and by way of punching press or laser cutting, processing generation outside diameter is 12
The disk of~20mm;
(2) shaping of a diameter of 0.05~0.1mm micropores is carried out to disk center using profound and subtle hole electric spark machining tool
Processing;
(3) after capillary processing shaping to be done, annealing softening processing is carried out to it;
(4) to carrying out electrobrightening through the disk with micropore after Overheating Treatment;
(5) processing is passivated to the disk after electrobrightening;
(6) disk after Passivation Treatment is cleaned by ultrasonic using deionized water, to remove passivating solution, and it is dustless clean at hundred grades
Dried in clean room, and independent vacuum plastic encapsulation is carried out to every.
The manufacture method of the high-cleanness current limliting gasket seal, the material of metallic plate is 304/304L stainless steel plates, or
Person's 316/316L stainless steel plates, either T2/T1 copper plates or 1050/1060/1070 pure aluminum plate.
The manufacture method of the high-cleanness current limliting gasket seal, in step (2), when carrying out capillary processing, for material
For 304/304L stainless steels, 316/316L stainless steels, and the disk of T1/T2 red coppers, used working solution is dielectric strength
For the deionized water of 15~20M Ω cm;And for the disk that material is 1050/1060/1070 fine aluminium, used working solution
For kerosene;It is 304/304L stainless steels and the disk of 316/316L stainless steels for material, used electrode material is tungsten filament,
A diameter of 0.03~0.08mm;For the disk that material is T1/T2 red coppers, used electrode material is molybdenum filament, a diameter of
0.03~0.08mm;For the disk that material is 1050/1060/1070 fine aluminium, used electrode material is brass wire, diameter
For 0.03~0.08mm.
The manufacture method of the high-cleanness current limliting gasket seal, in step (2), peak point current used by capillary processing
For 0.2~0.3A, electric current pulsewidth is 2~4 μ s, and the burst length is 90~110 μ s, and processing capacitance is 3000~3500pF, electrode
For the control of the distance between workpiece at 40~55 μm, machined electrode vibration amplitude is 4~6 × 10-6M, vibration frequency for 900~
1100Hz, rotating speed are 8000~12000rpm.
The manufacture method of the high-cleanness current limliting gasket seal, in step (3), when carrying out annealing softening processing, uses
Electric heater unit be tube type high-temperature furnace, be passed through the argon hydrogen gaseous mixture containing 8~12vol% hydrogen, for material be 304/
The disk of 304L stainless steels and 316/316L stainless steels, its heat treatment temperature are 1000 DEG C~1100 DEG C, and soaking time is 8~20
Minute, rapid water cooling;For the disk that material is T1/T2 red coppers, its heat treatment temperature is 400~500 DEG C, soaking time 10
~20 minutes, rapid water cooling;For the disk that material is 1050/1060/1070 fine aluminium, its heat treatment temperature is 360~420
DEG C, soaking time is 30~40 minutes, rapid water cooling.
The manufacture method of the high-cleanness current limliting gasket seal, in step (4), during electrobrightening, is for material
The disk of 304/304L stainless steels, the formula of used electrolytic polishing liquid are:40~180g/L of phosphatase 11, hexamethylenetetramine
10~30g/L, 70~90mL/L of sulfuric acid, 40~60mL/L of glycerine, 5~15g/L of o-benzoic sulfimide, water surplus;Electricity
The voltage of solution polishing is 18~22V, and the time of electrobrightening is 5~7 minutes, and the temperature of electrobrightening is 55~65 DEG C;For
Material is the disk of 316/316L stainless steels, and the formula of used electrolytic polishing liquid is:190~210g/L of perchloric acid, ice vinegar
Sour surplus;The voltage of electrobrightening is 25~35V, and the time of electrobrightening is 7~9 minutes, the temperature of electrobrightening for 75~
85℃;For the disk that material is T1/T2 red coppers, the formula of its used electrolytic polishing liquid is:820~830mL/ of orthophosphoric acid
L, deionized water surplus;The voltage of electrobrightening is 1~3V, and the time is 35~45 minutes, and the temperature of electrobrightening is 35~45
℃;For the disk that material is 1050/1060/1070 fine aluminium, the formula of its used electrolytic polishing liquid is:Perchloric acid 90~
110mL/L, absolute ethyl alcohol surplus;The voltage of electrobrightening is 29~31V, and the time of electrobrightening is 25~35 seconds, and electrolysis is thrown
The temperature of light is 35~45 DEG C.
The manufacture method of the high-cleanness current limliting gasket seal, in step (5), during Passivation Treatment, is for material
The disk of 304/304L stainless steels, the formula of used passivating solution are:8~12ml/L of sulfuric acid, 15~25g/L of potassium nitrate, water
Surplus;The time of passivation is 18~22 minutes, and the temperature of passivation is 80~85 DEG C;For the circle that material is 316/316L stainless steels
Piece, the formula of used passivating solution are:340~360mL/L of nitric acid, deionized water surplus;The time of passivation is 25~35 points
Clock, the temperature of passivation is 45~55 DEG C;For the disk that material is T1/T2 red coppers, the formula of used passivating solution is:Sulfuric acid
15~17ml/L, 90~110g/L of chromium trioxide, water surplus;The time of passivation is 15~25 seconds, and the temperature of passivation is 25~35
℃;For the disk that material is 1050/1060/1070 fine aluminium, the formula of used passivating solution is:35~37ml/L of sulfuric acid,
190~210g/L of chromium trioxide, water surplus;The time of passivation is 25~35 seconds, and the temperature of passivation is 25~30 DEG C.
The present invention has the following advantages and beneficial effect:
(1) present invention is few using metal material, and flow is simply efficient;
(2) the high-cleanness current limliting gasket seal made of the present invention can preserve steadily in the long term, facilitate onsite application;
(3) using the high-cleanness current limliting gasket seal that makes of the present invention can be obtained in joint very low slip (<6
×10-12std cm3/s);
(4) erosion-resisting ability is supported with good using its surface of high-cleanness current limliting gasket seal that the present invention makes,
Therefore the joint sealing available for etchant gas pipeline;
(5) the high-cleanness current limliting gasket seal made of the present invention can be born>200 DEG C of high temperature, therefore can be used for
The joint sealing of high-temperature gas pipeline;
(6) the high-cleanness current limliting gasket seal made of the present invention can obtain extremely low gas flow, can be used for
Special traffic demand;
(7) the high-cleanness current limliting gasket seal made of the present invention has dimensional structure closely, can obtain more
For compact air-channel system, cost of installation and use is reduced, the effect of sealing and current limliting can be achieved at the same time, correlation can be substantially reduced
The size of air-channel system, reduces cost of installation and use.
Brief description of the drawings
The operating process schematic diagram of Fig. 1 present invention.
The structure schematic diagram of Fig. 2 high-cleanness current limliting gasket seals of the present invention.
Embodiment
As shown in Figure 1, in specific implementation process, the manufacture method of high-cleanness current limliting gasket seal of the present invention, including such as
Lower step:
(1) 304/304L stainless steel plates are used, either 316/316L stainless steel plates either T1/T2 copper plates or
1050/1060/1070 pure aluminum plate, thickness of slab is 1~2mm, and by way of punching press or laser cutting, processing generation outside diameter is 12
The metal disk of~20mm.
(2) shaping of a diameter of 0.05~0.1mm micropores is carried out to disk center using profound and subtle hole electric spark machining tool
Processing, be 304/304L stainless steels and 316/316L stainless steels for material, and the disk of T1/T2 red coppers, its processing when institute
The working solution used is the deionized water that dielectric strength is 15~20M Ω cm, and pure for 1050/1060/1070 for material
The disk of aluminium, used working solution is kerosene when it is processed;It is stainless for 304/304L stainless steels and 316/316L for material
The disk of steel, used electrode material is tungsten filament when it is processed, a diameter of 0.03~0.08mm;It is purple for T1/T2 for material
The disk of copper, used electrode material is molybdenum filament when it is processed, a diameter of 0.03~0.08mm;It is 1050/ for material
The disk of 1060/1070 fine aluminium, used electrode material is brass wire when it is processed, a diameter of 0.03~0.08mm;
Selected peak point current is 0.2~0.3A in micropore forming process, and electric current pulsewidth is 2~4 μ s, pulse
Time is 90~110 μ s, and processing capacitance is 3000~3500pF, and the distance between electrode and workpiece are controlled at 40~55 μm, added
Work electrode vibration amplitude is 4~6 × 10-6M, vibration frequency are 900~1100Hz, and rotating speed is 8000~12000rpm.
(3) after capillary processing shaping to be done, annealing softening processing is carried out to perforated metal disk, used electricity adds
Hot charging is set to tube type high-temperature furnace, is passed through the argon hydrogen gaseous mixture containing 8~12vol% hydrogen, stainless for 304/304L for material
Steel and the disk with 316/316L stainless steels, its heat treatment temperature are 1000 DEG C~1100 DEG C, and soaking time is 8~20 minutes,
Rapid water cooling;For the disk that material is T1/T2 red coppers, its heat treatment temperature is 400~500 DEG C, and soaking time is 10~20
Minute, rapid water cooling;For the disk that material is 1050/1060/1070 fine aluminium, its heat treatment temperature is 360~420 DEG C, is protected
The warm time is 30~40 minutes, rapid water cooling.
(4) to the disk through carrying micropore after Overheating Treatment, electrobrightening processing is carried out, wherein being 304/ for material
The disk of 304L stainless steels, the formula of used electrolytic polishing liquid are 40~180g/L of phosphatase 11, hexamethylenetetramine 10~
30g/L, sulfuric acid (concentration 98wt%) 70~90mL/L, 40~60mL/L of glycerine, 5~15g/L of o-benzoic sulfimide, water
Surplus;The voltage of electrobrightening is 18~22V, and the time of electrobrightening is 5~7 minutes, and the temperature of electrobrightening is 55~65
℃;For the disk that material is 316/316L stainless steels, the formula of used electrolytic polishing liquid is perchloric acid (concentration
20wt%) 190~210g/L, 790~810g/L of glacial acetic acid;The voltage of electrobrightening is 25~35V, and the time of electrobrightening is
7~9 minutes, the temperature of electrobrightening was 75~85 DEG C;For the disk that material is T1/T2 red coppers, electrolysis used in it is thrown
The formula of light liquid is 820~830mL/L of orthophosphoric acid, 170~180mL/L of deionized water;The voltage of electrobrightening is 1~3V, when
Between be 35~45 minutes, the temperature of electrobrightening is 35~45 DEG C;Disk for material for 1050/1060/1070 fine aluminium, its
The formula of used electrolytic polishing liquid is perchloric acid (concentration 20wt%) 90~110mL/L, 890~910mL/L of absolute ethyl alcohol;
The voltage of electrobrightening is 29~31V, and the time of electrobrightening is 25~35 seconds, and the temperature of electrobrightening is 35~45 DEG C.
(5) processing is passivated to the perforated metal disk after electrobrightening, it is stainless for 304/304L for material
The disk of steel, the formula of used passivating solution are sulfuric acid (concentration 98wt%) 8~12ml/L, 15~25g/L of potassium nitrate, more than water
Amount;Passivation time is 18~22 minutes, and passivation temperature is 80~85 DEG C;For the disk that material is 316/316L stainless steels, institute
The formula of the passivating solution used is the concentrated nitric acid (concentration 68wt%) of 340~360mL/L and the deionized water of 640~660ml/L;
Passivation time is 25~35 minutes, and passivation temperature is 45~55 DEG C;It is used blunt for the disk that material is T1/T2 red coppers
The formula for changing liquid is sulfuric acid (concentration 98wt%) 15~17ml/L, chromium trioxide (purity 99.5wt%) 90~110g/L, more than water
Amount;The time of passivation is 15~25 seconds, and passivation temperature is 25~35 DEG C;For the circle that material is 1050/1060/1070 fine aluminium
Piece, the formula of used passivating solution are sulfuric acid (concentration 98wt%) 35~37ml/L, chromium trioxide (purity 99.5wt%) 190
~210g/L, water surplus;The time of passivation is 25~35 seconds, and the temperature of passivation is 25~30 DEG C.
(6) the perforated metal disk after Passivation Treatment is cleaned by ultrasonic using deionized water, to remove passivating solution, and hundred
Dried in level dustless clearing room, and independent vacuum plastic encapsulation is carried out to every, to realize protection well.
In the following, the present invention is further elaborated on by embodiment.
Embodiment 1
In the present embodiment, 304L stainless steel plate of the thickness of slab for 1mm is used, by way of punching press, processing generation outside diameter is
The disk of 12mm, carries out disk center using profound and subtle hole electric spark machining tool the forming of a diameter of 0.1mm micropores, adds
Working solution used in man-hour is the deionized water that dielectric strength is 16M Ω cm, and used electrode material is tungsten filament, diameter
For 0.08mm;Selected peak point current is 0.25A in micropore forming process, and electric current pulsewidth is 2 μ s, and the burst length is
90 μ s, processing capacitance are 3000pF, the control of the distance between electrode and workpiece at 40 μm, the vibration amplitude of machined electrode for 4 ×
10-6M, vibration frequency 900Hz, rotating speed 8000rpm.After capillary processing shaping to be done, it is carried out at annealing softening
Reason, used electric heater unit is tube type high-temperature furnace, is passed through the argon hydrogen gaseous mixture containing 10vol% hydrogen, it is heat-treated temperature
Spend for 1000 DEG C, soaking time is 10 minutes, rapid water cooling.Then, to the disk through carrying micropore after Overheating Treatment, carry out
Electrobrightening, the formula of used electrolytic polishing liquid are phosphatase 11 60g/L, hexamethylenetetramine 20g/L, sulfuric acid (concentration
98wt%) 80mL/L, glycerine 50mL/L, o-benzoic sulfimide 10g/L, water surplus;The voltage of electrobrightening is 20V,
The time of electrobrightening is 6 minutes, and the temperature of electrobrightening is 60 DEG C.Then, the disk after electrobrightening is carried out blunt
Change is handled, and the formula of used passivating solution is sulfuric acid (concentration 98wt%) 10ml/L, potassium nitrate 20g/L, water surplus;Passivation
Time is 20 minutes, and the temperature of passivation is 80 DEG C.Disk after being passivated is cleaned by ultrasonic using deionized water, it is blunt to remove
Change liquid, and dried in hundred grades of dustless clearing rooms, and independent vacuum plastic encapsulation is carried out to every, protected well with realizing
Shield.
Embodiment 2
316L stainless steel plate of the thickness of slab for 1mm is used, by way of laser cutting, processing generates the circle that outside diameter is 20mm
Piece, carries out disk center using profound and subtle hole electric spark machining tool the forming of a diameter of 0.06mm micropores, processing when institute
The working solution used is the deionized water that dielectric strength is 18M Ω cm, and used electrode material is tungsten filament during processing, diameter
For 0.04mm;Selected peak point current is 0.25A in micropore forming process, and electric current pulsewidth is 2 μ s, and the burst length is
100 μ s, processing capacitance are 3100pF, the control of the distance between electrode and workpiece at 42 μm, the vibration amplitude of machined electrode for 4 ×
10-6M, vibration frequency 1000Hz, rotating speed 10000rpm.After capillary processing shaping to be done, annealing softening is carried out to it
Processing, used electric heater unit is tube type high-temperature furnace, is passed through the argon hydrogen gaseous mixture containing 10vol% hydrogen, it is heat-treated
Temperature is 1100 DEG C, and soaking time is 12 minutes, rapid water cooling.Then, to the disk through carrying micropore after Overheating Treatment, into
Row electrobrightening, the formula of used electrolytic polishing liquid are perchloric acid (concentration 20wt%) 200g/L, glacial acetic acid 800g/L, electricity
The voltage of solution polishing is 30V, and the time of electrobrightening is 8 minutes, and the temperature of electrobrightening is 80 DEG C.Then, to by being electrolysed
Disk after polishing is passivated processing, and the formula of used passivating solution for concentrated nitric acid (concentration 68wt%) 350mL/L and is gone
Ionized water 650ml/L, passivation time are 30 minutes, and passivation temperature is 50 DEG C.Deionized water is used to the disk after being passivated
It is cleaned by ultrasonic, to remove passivating solution, and is dried in hundred grades of dustless clearing rooms, and independent vacuum plastic envelope is carried out to every
Dress, to realize protection well.
Embodiment 3
T2 copper plate of the thickness of slab for 2mm is used, by way of punching press, processing generation outside diameter is the disk of 12mm, is used
Profound and subtle hole electric spark machining tool carries out disk center the forming of a diameter of 0.08mm micropores, it is used when processing
Working solution is the deionized water that dielectric strength is 20M Ω cm, and used electrode material is molybdenum filament, a diameter of 0.07mm;
Selected peak point current is 0.3A in micropore forming process, and electric current pulsewidth is 4 μ s, and the burst length is 100 μ s, processing electricity
Hold and controlled for 3500pF, the distance between electrode and workpiece at 50 μm, the vibration amplitude of machined electrode is 6 × 10-6M, vibration frequency
Rate is 1100Hz, rotating speed 12000rpm.After capillary processing shaping to be done, annealing softening processing is carried out to it, is used
Electric heater unit be tube type high-temperature furnace, be passed through the argon hydrogen gaseous mixture containing 10vol% hydrogen, heat treatment temperature is 400~500
DEG C, soaking time is 10 minutes, rapid water cooling.Then, to the disk through carrying micropore after Overheating Treatment, electrolysis throwing is carried out
Light, the formula of used electrolytic polishing liquid are orthophosphoric acid 825mL/L, deionized water 175mL/L, and the voltage of electrobrightening is
2V, time are 40 minutes, and the temperature of electrobrightening is 40 DEG C.Then, processing is passivated to the disk after electrobrightening,
The formula of used passivating solution is sulfuric acid (concentration 98wt%) 16ml/L, chromium trioxide (purity 99.5wt%) 100g/L, water
Surplus;The time of passivation is 20 seconds, and the temperature of passivation is 30 DEG C.It is clear using deionized water ultrasound to the disk after being passivated
Wash, to remove passivating solution, and dried in hundred grades of dustless clearing rooms, and independent vacuum plastic encapsulation is carried out to every, with
Realize protection well.
It is to have micropore, surface light among one kind as shown in Fig. 2, using high-cleanness current limliting gasket seal produced by the invention
Cleanliness is high, carries out the circular foil member of transpassivation processing, its used material is 316L stainless steels.Current limliting gasket seal
The roughness Ra on upper and lower two surfaces<It 0.25 μm, by Passivation Treatment, can for a long time preserve, and be imitated with sealing well
Fruit, very strong high temperature resistant and corrosion resistance, the joint sealing available for special gas medium.
Current limliting gasket seal is in integrally disc, a diameter of 12~20mm of the disk, the thickness of the disk for 1~
2mm.The pore structure that the centre bore of current limliting gasket seal combines up and down for taper hole and micropore, taper hole is up big and down small bellmouth,
The lower end diameter of taper hole is identical with the diameter of micropore.A diameter of 0.05~0.1mm of the micropore, the height of the micropore are
0.6~0.8mm.
Using current limliting gasket seal produced by the invention, its upper and lower two surface is used for the sealing of end face seal type joint,
Micropore among current limliting gasket seal is used for current limliting, to realize minute gas flow.The present invention can effectively push high-cleanness current limliting
The development and application of gasket seal, the micropore at current limliting gasket seal center can obtain extremely low gas flow, and it is some special to meet
Traffic demand, is of great significance for developing some specific use air-channel systems.
Claims (7)
1. a kind of manufacture method of high-cleanness current limliting gasket seal, it is characterised in that concrete operation step is as follows:
(1) use thickness of slab as 1~2mm metallic plates, by way of punching press or laser cutting, processing generation outside diameter for 12~
The disk of 20mm;
(2) forming of a diameter of 0.05~0.1mm micropores is carried out to disk center using profound and subtle hole electric spark machining tool;
(3) after capillary processing shaping to be done, annealing softening processing is carried out to it;
(4) to carrying out electrobrightening through the disk with micropore after Overheating Treatment;
(5) processing is passivated to the disk after electrobrightening;
(6) disk after Passivation Treatment is cleaned by ultrasonic using deionized water, to remove passivating solution, and in hundred grades of dustless clearing rooms
In dried, and carry out independent vacuum plastic encapsulation to every.
2. the manufacture method of high-cleanness current limliting gasket seal described in accordance with the claim 1, it is characterised in that the material of metallic plate
For 304/304L stainless steel plates, either 316/316L stainless steel plates either T2/T1 copper plates or 1050/1060/1070 pure
Aluminium sheet.
3. the manufacture method of high-cleanness current limliting gasket seal described in accordance with the claim 2, it is characterised in that in step (2), into
It is 304/304L stainless steels for material, 316/316L stainless steels during row capillary processing, and the disk of T1/T2 red coppers, made
Working solution is the deionized water that dielectric strength is 15~20M Ω cm;And it is 1050/1060/1070 fine aluminium for material
Disk, used working solution is kerosene;For the disk that material is 304/304L stainless steels and 316/316L stainless steels, institute
The electrode material used is tungsten filament, a diameter of 0.03~0.08mm;For the disk that material is T1/T2 red coppers, used electricity
Pole material is molybdenum filament, a diameter of 0.03~0.08mm;For the disk that material is 1050/1060/1070 fine aluminium, used electricity
Pole material is brass wire, a diameter of 0.03~0.08mm.
4. according to the manufacture method of the high-cleanness current limliting gasket seal described in claim 1 or 3, it is characterised in that step (2)
In, peak point current is 0.2~0.3A used by capillary processing, and electric current pulsewidth is 2~4 μ s, and the burst length is 90~110 μ s,
Processing capacitance is 3000~3500pF, and for the control of the distance between electrode and workpiece at 40~55 μm, machined electrode vibration amplitude is 4
~6 × 10-6M, vibration frequency are 900~1100Hz, and rotating speed is 8000~12000rpm.
5. according to the manufacture method of the high-cleanness current limliting gasket seal described in claim 1 or 2 or 3, it is characterised in that step
(3) in, when carrying out annealing softening processing, the electric heater unit used is tube type high-temperature furnace, is passed through containing 8~12vol% hydrogen
Argon hydrogen gaseous mixture, the disk for material for 304/304L stainless steels and 316/316L stainless steels, its heat treatment temperature is
1000 DEG C~1100 DEG C, soaking time is 8~20 minutes, rapid water cooling;For material be T1/T2 red coppers disk, its heat at
It is 400~500 DEG C to manage temperature, and soaking time is 10~20 minutes, rapid water cooling;It is 1050/1060/1070 fine aluminium for material
Disk, its heat treatment temperature be 360~420 DEG C, soaking time be 30~40 minutes, rapid water cooling.
6. according to the manufacture method of the high-cleanness current limliting gasket seal described in claim 1 or 2 or 3, it is characterised in that step
(4) in, during electrobrightening, for the disk that material is 304/304L stainless steels, the formula of used electrolytic polishing liquid is:Phosphorus
Acid 140~180g/L, 10~30g/L of hexamethylenetetramine, 70~90mL/L of sulfuric acid, 40~60mL/L of glycerine, o-benzoyl
5~15g/L of sulfimide, water surplus;The voltage of electrobrightening is 18~22V, and the time of electrobrightening is 5~7 minutes, electrolysis
The temperature of polishing is 55~65 DEG C;For the disk that material is 316/316L stainless steels, the formula of used electrolytic polishing liquid
For:190~210g/L of perchloric acid, glacial acetic acid surplus;The voltage of electrobrightening is 25~35V, and the time of electrobrightening is 7~9
Minute, the temperature of electrobrightening is 75~85 DEG C;For the disk that material is T1/T2 red coppers, its used electrolytic polishing liquid
Formula be:820~830mL/L of orthophosphoric acid, deionized water surplus;The voltage of electrobrightening is 1~3V, and the time is 35~45 points
Clock, the temperature of electrobrightening is 35~45 DEG C;For the disk that material is 1050/1060/1070 fine aluminium, electrolysis used in it
The formula of polishing fluid is:90~110mL/L of perchloric acid, absolute ethyl alcohol surplus;The voltage of electrobrightening is 29~31V, and electrolysis is thrown
The time of light is 25~35 seconds, and the temperature of electrobrightening is 35~45 DEG C.
7. according to the manufacture method of the high-cleanness current limliting gasket seal described in claim 1 or 2 or 3, it is characterised in that step
(5) in, during Passivation Treatment, for the disk that material is 304/304L stainless steels, the formula of used passivating solution is:Sulfuric acid 8
~12ml/L, 15~25g/L of potassium nitrate, water surplus;The time of passivation is 18~22 minutes, and the temperature of passivation is 80~85 DEG C;
For the disk that material is 316/316L stainless steels, the formula of used passivating solution is:340~360mL/L of nitric acid, deionization
Water surplus;The time of passivation is 25~35 minutes, and the temperature of passivation is 45~55 DEG C;Disk for material for T1/T2 red coppers,
The formula of used passivating solution is:15~17ml/L of sulfuric acid, 90~110g/L of chromium trioxide, water surplus;The time of passivation is
15~25 seconds, the temperature of passivation was 25~35 DEG C;For the disk that material is 1050/1060/1070 fine aluminium, used passivation
The formula of liquid is:35~37ml/L of sulfuric acid, 190~210g/L of chromium trioxide, water surplus;The time of passivation is 25~35 seconds, blunt
The temperature of change is 25~30 DEG C.
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