CN107971261B

CN107971261B - Cleaning device

Info

Publication number: CN107971261B
Application number: CN201711183558.8A
Authority: CN
Inventors: 梁荣理
Original assignee: TCL Huaxing Photoelectric Technology Co Ltd
Current assignee: TCL Huaxing Photoelectric Technology Co Ltd
Priority date: 2017-11-23
Filing date: 2017-11-23
Publication date: 2021-03-02
Anticipated expiration: 2037-11-23
Also published as: CN107971261A

Abstract

The invention provides a cleaning device for cleaning a substrate, which comprises a cleaning piece, a first drive, a second drive, a third drive, a rotating piece and a connecting rod. The cleaning piece comprises a central shaft, and the first drive and the second drive are respectively positioned at two axial ends of the central shaft. The first drive is used for driving the cleaning piece to rotate around the axis of the central shaft. The second drive is used for driving the rotating piece to rotate, one end of the connecting rod is fixedly connected with the central shaft in the axial direction, and the other end of the connecting rod is connected with the rotating piece in a sliding mode. The rotating part is used for driving the connecting rod to move along the axial direction of the central shaft so as to drive the cleaning part to move along the axial direction of the central shaft. The third drive is used for driving the cleaning piece to move relative to the substrate in a first direction, and an included angle is formed between the first direction and the axial direction of the central shaft. The invention improves the cleaning capability of the cleaning device.

Description

Cleaning device

Technical Field

The invention relates to the field of cleaning devices, in particular to a cleaning device for cleaning a liquid crystal display panel.

Background

The cleaning device is widely applied in the liquid crystal display panel manufacturing industry, such as used before a plurality of processes of film forming, photoresist coating and the like. In the cleaning process, there is a problem that dirt particles are too large or adhered too tightly, and a cleaning apparatus having a rolling brush is required.

The traditional rolling brush is only cleaned in one direction of the glass substrate when cleaning, namely dirt is removed only by the rotation of the rolling brush and the relative movement of the glass substrate, so that the glass substrate is stressed in a certain direction and is small in force in other directions, and the problem that the cleaning is not clean and the manufacturing process of the liquid crystal display panel is influenced is solved.

Disclosure of Invention

The invention aims to provide a cleaning device, which improves the cleaning capability.

The invention provides a cleaning device, which is used for cleaning a substrate and comprises a cleaning piece, a first drive, a second drive, a third drive, a rotating piece and a connecting rod, wherein the first drive, the second drive, the third drive, the rotating piece and the connecting rod are arranged on the cleaning piece;

the cleaning piece is used for contacting with the substrate to clean the substrate, the cleaning piece comprises a central shaft, and the first drive and the second drive are respectively positioned at two axial ends of the central shaft; the first drive is used for driving the cleaning piece to rotate around the axis of the central shaft; the second drive is used for driving the rotating piece to rotate, one end of the connecting rod is fixedly connected with the central shaft in the axial direction, the other end of the connecting rod is connected with the rotating piece in a sliding mode, and the rotating piece is used for driving the connecting rod to move along the axial direction of the central shaft so as to drive the cleaning piece to move along the axial direction of the central shaft;

the third drive is used for driving the cleaning piece to move relative to the substrate in a first direction, and an included angle is formed between the first direction and the axial direction of the central shaft.

Wherein, it includes the guide rail to rotate the piece, the guide rail winds the periphery that rotates the piece sets up, the connecting rod has first end, first end is connected to rotate the piece, first end is equipped with the leading wheel, the leading wheel for the connecting rod is rotatory, be equipped with the fixture block on the leading wheel, the fixture block with guide rail looks block, and with follow the guide rail slides.

The rotating part is of a cam structure and is provided with a rotating center, a large radius end and a small radius end, the rotating part rotates around the rotating center, the distance between the large radius end and the rotating center is larger than the distance between the small radius end and the rotating center, and the rotating part rotates to enable the first end to slide between the large radius end and the small radius end.

The cleaning device further comprises an outer bearing and an inner bearing, the inner bearing is rotatably connected with the outer bearing, the outer bearing is fixed at the second end of the connecting rod, the second end is opposite to the first end, the inner bearing is connected with the third end of the central shaft, the third end is arranged at one side close to the second drive, and the central shaft rotates to drive the inner bearing to rotate relative to the outer bearing.

The cleaning device further comprises a first sleeve, the first sleeve is sleeved on the periphery of the connecting rod and provided with a first accommodating cavity for accommodating the inner bearing, the outer bearing and the third end, and the third end is rotatably connected with the first sleeve.

An elastic part is further arranged between the first driving part and the central shaft, the elastic part extends along the axial direction of the central shaft, and the elastic force of the elastic part is used for assisting the cleaning part to reciprocate along the axial direction of the central shaft.

The cleaning device further comprises a second sleeve, the second sleeve is connected between the first drive and the central shaft, the first drive drives the second sleeve to rotate around the axis of the central shaft so as to drive the central shaft to rotate, the central shaft is connected to the second sleeve in a sliding mode, and when the central shaft moves along the axial direction of the central shaft, the central shaft and the second sleeve slide relatively.

The central shaft is provided with a fourth end opposite to the third end, the second sleeve is provided with a second containing cavity for containing the elastic piece and the fourth end, and the elastic piece is connected between the inner wall of the second sleeve and the fourth end.

The cleaning device comprises a rotating part, a first cleaning part and a second cleaning part, wherein the number of the rotating part is at least two, the first rotating part and the second rotating part are included, the first rotating part is used for driving the first cleaning part to move, the second rotating part is used for driving the second cleaning part to move, the direction of the large-radius end of the first rotating part is different from the direction of the large-radius end of the second rotating part, and therefore the moving directions of the first cleaning part and the second cleaning part are opposite.

The rotating part further comprises a third rotating part and a fourth rotating part, the cleaning part further comprises a third cleaning part and a fourth cleaning part, the third cleaning part is located on two opposite sides of the base plate respectively, the third rotating part is used for driving the third cleaning part to move, the fourth rotating part is used for driving the fourth cleaning part to move, the direction of the large radius end of the third rotating part is different from that of the large radius end of the fourth rotating part, the direction of the large radius end of the first rotating part is different from that of the large radius end of the third rotating part, so that the moving directions of the third cleaning part and the fourth cleaning part are opposite, and the moving directions of the first cleaning part and the third cleaning part are opposite.

The cleaning device provided by the invention at least has the following beneficial effects:

the cleaning piece rotates around the axis of the central shaft through a first drive, the rotating piece rotates through a second drive, and the rotating piece is connected to the connecting rod in a sliding mode to drive the connecting rod to move along the axial direction of the central shaft, so that the cleaning piece moves along the axial direction of the central shaft, and the cleaning device cleans the substrate along the axial direction of the central shaft; and the cleaning device also enables the cleaning piece to move along the first direction relative to the substrate through a third drive, the first direction is crossed with the axial direction of the central shaft, namely, the cleaning device can realize the cleaning along the axial direction of the central shaft and the first direction at the same time, through the simultaneous cleaning along the two directions, the cleaning dead zone can be cleaned, the intensity of the cleaning force and the width of the cleaning area can be increased, thereby improving the cleanliness of the substrate in the liquid crystal display panel and the display quality of the liquid crystal display panel.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.

Fig. 1 is a schematic structural view of a cleaning device according to a first embodiment of the present invention in one state.

Fig. 2 is a schematic structural view of a cleaning device provided in a first embodiment of the present invention in another state.

Fig. 3 is a plan view of a cleaning device according to a first embodiment of the present invention.

FIG. 4 is a schematic sectional view taken along the direction AA' in FIG. 2.

FIG. 5 is a schematic sectional view taken along the direction BB' in FIG. 4.

FIG. 6 is a schematic sectional view taken along the direction CC' in FIG. 2.

Fig. 7 is a schematic structural diagram of a cleaning device according to a second embodiment of the present invention.

Fig. 8 is a schematic structural view of a cleaning device according to a third embodiment of the present invention.

Detailed Description

The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.

Referring to fig. 1 to 3, a cleaning apparatus 100 for cleaning a substrate 000 is provided according to a first embodiment of the invention. The substrate 000 may be a carrier substrate or a glass cover plate used for manufacturing a liquid crystal display panel. The cleaning apparatus 100 includes a cleaning member 110, a first drive 120, a second drive 130, a third drive 140, a rotation member 150, and a link 160. The cleaning members 110 are adapted to contact the substrate 000 by moving relative to the substrate 000 to generate a force for cleaning dirt, etc. on the substrate 000. The cleaning member 110 includes a central shaft 111. The first driver 120 and the second driver 130 are respectively located at two ends of the central shaft 111 in the axial direction. The first driver 120 is used to drive the cleaning member 110 to rotate around the axis L of the central shaft 111. The axial center L of the center shaft 111 is a symmetric center line of the center shaft 111, and the symmetric center line extends in the axial direction x along the center shaft 111. The second driver 130 is used for driving the rotation member 150 to rotate. One end of the link 160 is fixedly connected to the central shaft 111 in the x-direction, and the other end is slidably connected to the rotating member 150. The rotating member 150 is configured to drive the connecting rod 160 to move along the axial direction x of the central shaft 111, so as to drive the cleaning member 110 to move along the axial direction x of the central shaft 111. The third driver 140 is configured to drive the cleaning member 110 to move in a first direction y relative to the substrate 000, where the first direction y forms an included angle with the axial direction x of the central shaft 111.

In this embodiment, the cleaning device 100 rotates the cleaning element 110 around the axis L of the central shaft 111 through the first driver 120, and rotates the rotating element 150 through the second driver 130, and the rotating element 150 is slidably connected to the connecting rod 160 to drive the connecting rod 160 to move along the axial direction x of the central shaft 111, so that the cleaning element 110 moves along the axial direction x of the central shaft 111, thereby cleaning the substrate 000 along the axial direction x of the central shaft 111 by the cleaning device 100; furthermore, the cleaning device 100 further moves the cleaning member 110 relative to the substrate 000 along the first direction y intersecting the axial direction x of the central shaft 111 through the third driving device 140, that is, the cleaning device 100 can simultaneously clean along the axial direction x of the central shaft 111 and the first direction y, and by simultaneously cleaning in two directions, a dead zone of cleaning can be cleaned, the intensity of cleaning force and the width of cleaning area can be increased, so that the cleanliness of the substrate 000 in the liquid crystal display panel by the cleaning device 100 can be improved, and the display quality of the liquid crystal display panel can be improved.

Optionally, the cleaning member 110 may include a rolling brush 113, and the rolling brush 113 is disposed around the center shaft 111.

Optionally, the cleaning apparatus 100 further includes a support stage 190, and the substrate 000 is disposed on the support stage 190. The third driver 140 is disposed on the supporting platform 190, a transmission member 191 is further disposed on the supporting platform 190, and the third driver 140 drives the transmission member 191 to move along the y direction, so as to drive the cleaning member to move along the y direction. The first direction y may be perpendicular to the axial direction x of the central shaft 111.

Referring to fig. 1 to 5, the rotating member 150 includes a guide rail 151. The guide rail 151 is disposed around the outer periphery of the rotation member 150. The link 160 has a first end 161, and the first end 161 is connected to the rotating member 150. The first end 161 is provided with a guide wheel 162, and the guide wheel 162 rotates relative to the link 160. A fixture block 163 is disposed on the guide wheel 162, and the fixture block 163 is engaged with the guide rail 151 and slides along the guide rail 151.

Referring to fig. 1 and 2, the rotating member 150 is a cam structure having a rotation center 152, a large radius end 153 and a small radius end 154. The rotating member 150 rotates around the rotation center 152, and the distance between the large radius end 153 and the rotation center 152 is greater than the distance between the small radius end 154 and the rotation center 152. Rotation of the rotating member 150 causes the first end 161 to slide between the large radius end 153 and the small radius end 154.

Specifically, the first, second, and

third drivers

120, 130, and 140 may be motors. The central shaft 111 of the cleaning member 110 may include a shaft 112 penetrating the center of the cleaning member 110, and a first connecting shaft 113 and a second connecting shaft 114 connected to opposite ends of the shaft 112, wherein the first connecting shaft 113 is disposed at a side close to the first driver 120. The first connecting shaft 113 and the second connecting shaft 114 are connected to opposite ends of the shaft 112 by couplings 115a and 115b, respectively. The shaft couplings 115a and 115b are fixedly connected to the two connecting

shafts

113 and 114 and the shaft 112, so as to perform torque transmission for rotating around the axis L of the central shaft 111 and moving along the axial direction x of the central shaft 111.

Specifically, the rotating member 150 is a cam, the second driver 130 drives the cam 150 to rotate, and the cam 150 rotates to make the guide wheel 162 of the link 160 slide along the rotating track of the cam 150 relative to the guide rail 151. During the process that the guide wheel 162 slides along the rotation track of the cam 150, when the guide wheel 162 slides from the large radius end 153 of the cam 150 to the small radius end 154 of the cam 150, the distance from the first end 161 of the link 160 to the rotation center 152 of the cam 150 decreases, so that the first end 161 of the link 160 moves toward the rotation center 152 of the cam 150; when the guide wheel 162 slides from the small radius end 154 of the cam 150 to the large radius end 153 of the cam 150, the distance from the first end 161 of the link 160 to the rotation center 152 of the cam 150 increases, so that the first end 161 of the link 160 moves away from the rotation center 152 of the cam 150, and the above process realizes the back and forth movement of the first end 161 of the link 160 along the axial direction x of the central shaft 111.

Referring to fig. 1 and 2, the cleaning device 100 further includes an outer bearing 170 and an inner bearing 171. The inner bearing 171 is rotatably connected with the outer bearing 170. The outer bearing 170 is fixed to the second end 162 of the connecting rod 160, and the second end 162 is opposite to the first end 161. The inner bearing 171 is connected to a third end 111a of the central shaft 111, and the third end 111a is disposed at a side close to the second driver 130. The central shaft 111 rotates to drive the inner bearing 171 to rotate relative to the outer bearing 170, and the inner bearing 171 and the outer bearing 170 undertake the rotation movement of the cleaning piece 110 and the axial movement x along the central shaft 111, so that the two movements are not interfered with each other. The outer bearing 170 and the inner bearing 171 transmit an axial x-moment along the central axis 111 and keep the connecting rod 160 from rotating with the rotating member 150.

Referring to fig. 1 and 2, the cleaning device 100 further includes a first sleeve 172. The first sleeve 172 is sleeved on the periphery of the connecting rod 160. The first sleeve 172 has a first receiving cavity 173 for receiving the inner bearing 171, the outer bearing 170 and the third end 111 a.

In this embodiment, the third end 111a of the connecting rod 160 is rotatably connected to the first sleeve 172.

Specifically, the third end 111a of the link 160 is the second connection shaft 114. Balls 174 are disposed between the second connecting shaft 114 and the first sleeve 172. The balls 174 are used to reduce the rotational friction of the rotational connection between the second connecting shaft 114 and the first sleeve 172. A pair of rolling bearings 175 may be further disposed around the second connecting shaft 114 to reduce the friction resistance of the balls 174 during rolling. An inner cylinder 176 is provided outside the pair of rolling bearings 175, and balls 174 are provided between the inner cylinder 176 and the first sleeve 172.

The first end 161 of the connecting rod 160 moves back and forth along the axial direction x of the central shaft 111, transmits the axial x movement moment to the inner bearing 171 through the outer bearing 170, and transmits the axial x movement moment to the third end 111a of the central shaft 111, namely, the second connecting shaft 114 through the inner bearing 171, and the second connecting shaft 114 transmits the axial x movement moment to the cleaning member 110 through the couplings 115a and 115b, so that the cleaning member 110 moves back and forth along the axial direction x of the central shaft 111 to apply a force in the x direction to the substrate 000 for cleaning the substrate 000.

Referring to fig. 1 and 2, an elastic member 180 is further disposed between the first driver 120 and the central shaft 111. The elastic member 180 extends in the axial direction x of the center shaft 111. The cleaning element 110 reciprocates along the axial direction x of the central shaft 111 to drive the elastic element 180 to extend and retract. The elastic force of the elastic member 180 is used to assist the cleaning member 110 to reciprocate along the axial direction x of the central shaft 111. The elastic member 180 may be a spring or the like. Preferably, the elastic force of the spring is not less than one-half of the weight of the cleaning member 110.

Referring to fig. 1 and 2, the cleaning device 100 further includes a second sleeve 181. The second sleeve 181 is connected between the first drive 120 and the central shaft 111. The first driver 120 drives the second sleeve 181 to rotate around the axis L of the central shaft 111, so as to drive the central shaft 111 to rotate. The central shaft 111 is slidably connected to the second sleeve 181. When the central shaft 111 moves along the axial direction x, the central shaft 111 slides relative to the second sleeve 181.

Optionally, the central shaft 111 has a fourth end 111b opposite to the third end 111 a. The second sleeve 181 has a second receiving cavity 182 for receiving the elastic member 180 and the fourth end 111 b. The elastic member 180 is connected between the inner wall of the second sleeve 181 and the fourth end 111 b.

Specifically, the fourth end 111b of the central shaft 111 may be a first connecting shaft 113. The first connecting shaft 113 may have a circular rod shape. A protrusion 183 may be protruded from a circumferential surface of the first connecting shaft 113, a sliding groove 184 may be formed in an inner wall of the second sleeve 181, the protrusion 183 is engaged with the sliding groove 184 in a direction of an axis L around the central shaft 111, and the protrusion 183 moves in the sliding groove 184 along an axial direction x of the central shaft 111. The first driver 120 drives the second sleeve 181 to rotate around the axis L of the central shaft 111, the rotational torque is transmitted to the first connecting shaft 113 through the protrusion 183, and the first connecting shaft 113 transmits the rotational torque to the shaft 112 through a coupling 115a, so as to drive the cleaning element 110 to rotate.

In one embodiment, referring to fig. 6, the protrusion 183 may be a hemispherical ball or a hemispherical protrusion. When the protrusion 183 is a hemispherical ball, the hemispherical ball 183 can only slide along the sliding slot 184 in the x direction, so as to ensure that the cleaning member 110 moves in the x direction while limiting the rotational movement of the cleaning member 110 relative to the second sleeve 181, thereby increasing the transmission efficiency of the first drive 120.

Alternatively, the hemispherical balls 183 may be asymmetrically distributed, and may transmit both the rotational torque of the first driver 120 and the axial x-torque of the rotating member 150 along the central shaft 111.

Alternatively, the number of the hemispherical balls 183 may be increased or decreased as necessary. Preferably, the hemispherical balls 183 are uniformly distributed on the shaft, preventing the centrifugal force of the hemispherical balls 183 from causing overall vibration when rotating.

Optionally, referring to fig. 1 and fig. 2, an anti-rotation block 186 is further disposed on a circumferential surface of the first connecting shaft 113 for preventing the first connecting shaft 113 and the second sleeve 181 from rotating relatively, so as to ensure that the first connecting shaft 113 and the second sleeve 181 are stationary relative to each other in a direction around an axis l of the central shaft 111. The length of the anti-rotation block 186 is not in contact with the hemispherical balls 183 and the sliding grooves 184, so as not to hinder the relative rotation between the first connecting shaft 113 and the second sleeve 181. The anti-rotation block 186 allows the maximum left and right shaking distance to be 1+0.5mm, and the height of the anti-rotation block 186 is about half of the height of the hemispherical ball 183, so as to prevent the hemispherical ball 183 from rotating and shaking greatly when the hemispherical ball 183 is worn too much.

The shaft 112 transmits the rotational torque to the second connection shaft 114 (i.e., the fourth end 111b of the center shaft 111) through another coupling 115 b. The second connecting shaft 114 transmits the rotation torque to the inner bearing 171 to rotate the inner bearing 171. Since the inner bearing 171 is rotatably coupled to the outer bearing 170 and the outer bearing 170 is kept stationary in the axial direction L around the center axis 111, the rotational torque is transmitted to the inner bearing 171 and is not transmitted.

In this application, the rotating member 150, the connecting rod 160, the central shaft 111, etc. may be made of plastic, metal, etc.

In this application, the material of ball 174, first sleeve 172, second sleeve 181 can be more than the bearing steel, and the high wearability of hardness is good, and the model size can be configured according to actual conditions.

Alternatively, the rotation speed of the second driver 130 may be less than the rotation speed of the central shaft 111 around the axis L of the central shaft 111 and greater than one-half of the rotation speed of the central shaft 111 around the axis L of the central shaft 111.

Optionally, the cleaning device 100 may further include a cleaning member lifting mechanism (not shown). The roller brush 113 can be moved toward or away from the substrate 000 in the z direction by the cleaning member lifting mechanism, so as to adjust the height of the roller brush 113 and increase the acting force of the roller brush 113 on the substrate 000.

Specifically, the moving range of the roller brush 113 in the x direction may be 0 to 200 mm. The moving range of the roller brush 113 in the y direction may be 0 to 1000 mm. The moving range of the roller brush 113 along the z direction is 0 to 500 mm.

Specifically, the rotating speed of the rolling brush 113 may range from 0r/min to 1000r/min, and may be clockwise or counterclockwise.

Referring to fig. 7, fig. 7 is a schematic structural diagram of a cleaning device according to a second embodiment of the present invention. See fig. 1-6 in combination. In the first embodiment, the number of the rotating members 150 is at least two, and the rotating members include a first rotating member 150a and a second rotating member 150 b. The number of the cleaning members 110 is at least two, including first cleaning members 110a and second cleaning members 110 b. The first rotating member 150a is used for driving the first cleaning member 110a to move. The second rotating member 150b is used for driving the second cleaning member 110b to move. The direction of the large radius end 153 of the first rotating member 150a is different from the direction of the large radius end 153 of the second rotating member 150 b. Preferably, the direction of the large radius end 153 of the first rotating member 150a and the direction of the large radius end 153 of the second rotating member 150b may be different by 90 °, so that the first cleaning member 110a and the second cleaning member 110b move in opposite directions, i.e., in the directions x1 and x2, respectively.

In addition, the alternating movement of the first cleaning member 110a and the second cleaning member 110b in the x1 direction is controlled by adjusting the angle between the direction of the large radius end 153 of the first rotating member 150a and the direction of the large radius end 153 of the second rotating member 150 b. The above structure design can make the two cleaning members on one side of the substrate 000 move in opposite directions, so as to keep the stress balance of the substrate 000 and increase the cleaning efficiency of the cleaning device 100.

The first rotating member 150a and the second rotating member 150b may be connected by a connecting shaft. The second driver 130 drives the first and second

rotating members

150a and 150b to rotate simultaneously with the connecting shaft 188 through the 45-degree bevel gear 187.

Referring to fig. 8, fig. 8 is a schematic structural diagram of a cleaning device according to a third embodiment of the present invention. See fig. 1-7 in combination. In the second embodiment, the rotating member 150 further includes a third rotating member 150c and a fourth rotating member 150 d. The cleaning member 110 further includes a third cleaning member 110c and a fourth cleaning member 110 d. The third cleaning member 110c and the fourth cleaning member 110d, and the first cleaning member 110a and the second cleaning member 110b are respectively located at opposite sides of the substrate 000. The third rotating member 150c is used for driving the third cleaning member 110c to move, and the fourth rotating member 150d is used for driving the fourth cleaning member 110d to move. The large radius end 153 of the third rotating member 150c is located in a direction different from that of the large radius end 153 of the fourth rotating member 150 d. Optionally, the direction of the large radius end 153 of the third rotating member 150c and the direction of the large radius end 153 of the fourth rotating member 150d may be different by 90 °, so that the third cleaning member 110c and the fourth cleaning member 110d move in opposite directions, the direction of the large radius end 153 of the first rotating member 150a and the direction of the large radius end 153 of the third rotating member 150c are different, and the direction of the large radius end 153 of the first rotating member 150a and the direction of the large radius end 153 of the third rotating member 150c may be different by 90 °, so that the first cleaning member 110a and the third cleaning member 110c move in opposite directions. The direction of the large radius end 153 of the second rotating member 150b and the direction of the large radius end 153 of the fourth rotating member 150d may be different by 90 ° so that the second cleaning member 110b and the fourth cleaning member 110b move in opposite directions. The above structure design can make the two cleaning members on one side of the substrate 000 move in opposite directions, and the cleaning members on the upper and lower sides of the substrate 000 move in opposite directions, so as to maintain the stress balance of the substrate 000 and increase the cleaning efficiency of the cleaning device 100.

Alternatively, the driving motors of the third and fourth

rotating members

150c and 150d may be the same as or different from the driving motors of the first and second

rotating members

150a and 150 b. When the driving motors are different, the cleaning piece lifting mechanisms can be respectively and independently assembled with the cleaning piece lifting mechanisms.

While the foregoing is directed to the preferred embodiment of the present invention, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention.

Claims

1. A cleaning device is used for cleaning a substrate and is characterized by comprising a cleaning piece, a first drive, a second drive, a third drive, a rotating piece and a connecting rod; the cleaning device comprises at least two cleaning pieces, a first cleaning piece and a second cleaning piece, wherein the rotating pieces comprise at least two rotating pieces, each rotating piece comprises a first rotating piece and a second rotating piece, and the arrangement direction of the first rotating pieces is vertical to that of the second rotating pieces;

the first cleaning piece and the second cleaning piece are used for contacting with the substrate to clean the substrate, the first cleaning piece comprises a central shaft, and the first driving piece and the second driving piece are respectively positioned at two axial ends of the central shaft; the first drive is used for driving the first cleaning piece to rotate around the axis of the central shaft; the second driver is used for driving the first rotating part to rotate and driving the second rotating part to rotate, one end of the connecting rod is fixedly connected with the central shaft in the axial direction, the other end of the connecting rod is connected with the first rotating part in a sliding mode, the first rotating part is used for driving the connecting rod to move along the axial direction of the central shaft so as to drive the first cleaning part to move along the axial direction of the central shaft, and the second rotating part drives the second cleaning part to synchronously move in the opposite direction of the first cleaning part;

2. The cleaning apparatus as claimed in claim 1, wherein the rotating member includes a guide rail disposed around a periphery of the rotating member, the connecting rod has a first end connected to the rotating member, the first end is provided with a guide wheel, the guide wheel rotates relative to the connecting rod, the guide wheel is provided with a locking block, and the locking block is engaged with the guide rail and slides along the guide rail.

3. The cleaning apparatus as claimed in claim 2, wherein the rotating member is a cam structure having a rotation center, a large radius end and a small radius end, the rotating member rotates about the rotation center, a distance between the large radius end and the rotation center is larger than a distance between the small radius end and the rotation center, and the rotating member rotates to slide the first end between the large radius end and the small radius end.

4. The cleaning apparatus as claimed in claim 3, further comprising an outer bearing and an inner bearing, wherein the inner bearing is rotatably connected to the outer bearing, the outer bearing is fixed to a second end of the connecting rod, the second end is opposite to the first end, the inner bearing is connected to a third end of the central shaft, the third end is disposed near a side of the second drive, and the central shaft rotates to drive the inner bearing to rotate relative to the outer bearing.

5. The cleaning apparatus as claimed in claim 4, further comprising a first sleeve, wherein the first sleeve is disposed around the connecting rod, the first sleeve has a first receiving cavity for receiving the inner bearing, the outer bearing and the third end, and the third end is rotatably connected to the first sleeve.

6. The cleaning apparatus as claimed in claim 5, wherein an elastic member is disposed between the first driving member and the central shaft, the elastic member extends along the axial direction of the central shaft, and the elastic force of the elastic member is used to assist the cleaning member to reciprocate along the axial direction of the central shaft.

7. The cleaning apparatus as claimed in claim 6, wherein the cleaning apparatus further comprises a second sleeve, the second sleeve is connected between the first drive and the central shaft, the first drive drives the central shaft to rotate by driving the second sleeve to rotate around the axis of the central shaft, the central shaft is slidably connected to the second sleeve, and the central shaft slides relative to the second sleeve when the central shaft moves along the axial direction of the central shaft.

8. The cleaning apparatus as claimed in claim 7, wherein said central shaft has a fourth end disposed opposite to said third end, said second sleeve has a second receiving cavity for receiving said resilient member and said fourth end, said resilient member is connected between an inner wall of the second sleeve and said fourth end.

9. The cleaning apparatus defined in any one of claims 3-8, wherein the large radius end of the first rotating member is in a different direction than the large radius end of the second rotating member.

10. The cleaning apparatus of claim 9, wherein the rotating member further comprises a third rotating member and a fourth rotating member, the cleaning piece also comprises a third cleaning piece and a fourth cleaning piece, the third cleaning piece and the fourth cleaning piece are respectively positioned at two opposite sides of the substrate, the third rotating part is used for driving the third cleaning part to move, the fourth rotating part is used for driving the fourth cleaning part to move, the direction of the large radius end of the third rotating member is different from the direction of the large radius end of the fourth rotating member, the direction of the large radius end of the first rotating member is different from the direction of the large radius end of the third rotating member, so that the third cleaning member and the fourth cleaning member move in opposite directions, and the first cleaning member and the third cleaning member move in opposite directions.