CN107958830A - A kind of octal is composite evacuated to regulate - Google Patents
A kind of octal is composite evacuated to regulate Download PDFInfo
- Publication number
- CN107958830A CN107958830A CN201711263033.5A CN201711263033A CN107958830A CN 107958830 A CN107958830 A CN 107958830A CN 201711263033 A CN201711263033 A CN 201711263033A CN 107958830 A CN107958830 A CN 107958830A
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- China
- Prior art keywords
- guan
- octal
- feet
- pipe base
- low
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
Abstract
Regulate the invention discloses a kind of octal is composite evacuated,Including octal potsherd,Electrode supports bar assembly,Pipe base pin components,Low-vacuum measurement is regulated and filament,Octal potsherd side is provided with electrode and supports bar assembly,Octal potsherd opposite side is provided with pipe base pin components,Two collectors and the first foot of pipe base,Seven feet of Guan Ji correspond to connection,Two accelerate pole and pipe base crus secunda,Guan Ji octals correspond to connection,Two filament steady arms and tetra- feet of Guan Ji,Five feet of Guan Ji correspond to connection,Two low-vacuum measurements regulate steady arm and tri- feet of Guan Ji,Six feet of Guan Ji correspond to connection,The first foot of pipe base is connected with seven feet of Guan Ji,Pipe base crus secunda is electrically connected with Guan Ji octals,Octal potsherd is equipped with tube core,Filament is connected with tube core,Line between two lines and two collectors accelerated between pole is mutually perpendicular to be in crosswise.The present invention has high and low vacuum test scope, has the advantages that performance is stable, measuring accuracy is high, reflecting time is fast.
Description
Technical field
The present invention relates to vacuum test field, more particularly to a kind of octal is composite evacuated regulates.
Background technology
In vacuum measurement, ZJ-52 types Pirani gauge and ZJ-10 types ionization gauge are all to use wide vacuum measurement at present
Regulate, the heated filament of ZJ-52 types is handled through special process, have pressure measurement scope is wide, performance is stable, uniformity is good, reflection when
Between fast, long lifespan the advantages that；ZJ-10 type hot cathode ioization gauges are to be ionized at present using high vacuum in a kind of wide wide-range
Rule, but existing ZJ-10 types hot cathode ioization gauge is bigger than normal there are volume, and electrode area is bigger than normal, discharge quantity when so regulating work
Increasing, comparatively, there is certain influence in when work to stability and precision, test scope does not change, therefore to meeting market need
Required further improvement for the miniaturization asked.There is no one kind to realize that high vacuum test is tested with low vacuum in the prior art
Compatible vacuum gauge, can not be suitable for unknown vacuum monitor.
The content of the invention
Part in view of the shortcomings of the prior art, is regulated it is an object of the invention to provide a kind of octal is composite evacuated,
Its octal is composite evacuated to regulate high vacuum ionization type in compatible ZJ-10 wide-ranges and regulates and regulate two kinds with ZJ-52 low-vacuum measurements
Vacuum gauge, had not only been applicable to high and low vacuum test, but also improved measuring accuracy, operated more convenient, operating efficiency higher.
The purpose of the present invention is achieved through the following technical solutions：
A kind of octal is composite evacuated to regulate, including octal potsherd, electrode support bar assembly, pipe base pin components, low true
Sky measurement is regulated and filament, the octal potsherd one side are provided with electrode and support bar assembly, and the octal potsherd is another
Side is provided with pipe base pin components, and the electrode supports bar assembly to accelerate pole, two filaments to support by two collectors, two
Bar, two low-vacuum measurements regulate steady arm composition, and the pipe base pin components are by the first foot of pipe base, pipe base crus secunda, Guan Ji
3rd foot, tetra- feet of Guan Ji, five feet of Guan Ji, six feet of Guan Ji, seven feet of Guan Ji, Guan Ji octals composition, two collectors
Connect one to one respectively with the first foot of pipe base, seven feet of Guan Ji, two accelerate poles respectively with pipe base crus secunda, Guan Ji octals
Connect one to one, two filament steady arms connect one to one with tetra- feet of Guan Ji, five feet of Guan Ji respectively, two low vacuum
Measurement regulates steady arm and connects one to one respectively with tri- feet of Guan Ji, six feet of Guan Ji, and the low-vacuum measurement regulates correspondence
It is connected to two low-vacuum measurements to regulate on steady arm, resistance wire supporting rack, the resistance is connected with five feet of Guan Ji
It is connected with silk supporting rack and regulates matched resistance wire with low-vacuum measurement；First foot of pipe base is electrically connected with seven feet of Guan Ji
Connect, the pipe base crus secunda is electrically connected with Guan Ji octals, and the ceramic tube base is equipped with supports bar assembly side positioned at electrode
Tube core, be connected with the tube core and two corresponding filaments of filament steady arm, two lines and two accelerated between poles
Line between a collector is mutually perpendicular to be in crosswise.
In order to which the present invention is better achieved, the low-vacuum measurement is regulated regulates for ZJ-52 type low-vacuum measurements, the electricity
Resistance silk regulates corresponding resistance wire for ZJ-52 type low-vacuum measurements.
Further technical solution is：The filament is in two and accelerates pole and the center of two collectors.
Preferably, the length of the collector is 15mm, a diameter of 1mm of collector；Between between two collectors
Away from for 5mm.
Preferably, the length of the acceleration pole is 15mm, accelerate a diameter of 1mm of pole；Between two accelerate between pole
Away from for 10mm.
Preferably, the filament is yittrium oxide filament.
Preferably, the octal potsherd Exterior capsule, which is enclosed with, can cut down ring.
Preferably, the octal potsherd, which is located at pipe base pin components side, is fixed with positioning pin.
The present invention compared with the prior art, has the following advantages and beneficial effect：
(1) high vacuum ionization type in ZJ-10 wide-ranges is regulated and regulates both progress with ZJ-52 low-vacuum measurements by the present invention
It is compound, and overall structure, connection relation etc. are improved, the composite evacuated interface regulated of its octal can make user and need
The general-purpose interfaces such as the CF35 flanges wanted, KF40 flanges, KF16 flanges, KF10 flanges, meet that user selects.
(2) it is of the invention it is total it is high regulate total high reduction 15mm or so than high vacuum ionization type in ZJ-10 wide-range, and receive
Collector and acceleration pole-face product also greatly reduce 90% or so, its volume smaller, discharge quantity is also less, and work more stable, parts
Processing cost is also lower, and the shell for any interface of band that can also be needed with user, which welds, to be used, and meets user's wide-range electricity
It is release to regulate the demand that compound miniaturization is regulated with low-vacuum measurement.
(3) present invention has high and low vacuum test scope, has stable performance, measuring accuracy height, test result uniformity
Good, the advantages that reflecting time is fast, long lifespan.
Brief description of the drawings
Fig. 1 is the structure diagram of the present invention；
Fig. 2 is the structure diagram of the present invention；
Fig. 3 is the assembling schematic diagram of the present invention.
Wherein, it is entitled corresponding to the reference numeral in attached drawing：
1- octal potsherds, 2- can cut down ring, 3- positioning pins, 4- tube cores, 5- electrodes support bar assembly, 51- collections
Pole, 52- acceleration pole, 6- pipe base pin components, 61- pipes the first foot of base, 62- pipe base crus secundas, the 3rd foot of 63- pipes base,
The 4th foot of 64- pipes base, the 5th foot of 65- pipes base, the 6th foot of 66- pipes base, the 7th foot of 67- pipes base, 68- pipe base octals,
7- filaments, 8- resistance wire supporting racks, 9- resistance wires.
Embodiment
The present invention is described in further detail with reference to embodiment：
Embodiment
As shown in FIG. 1 to 3, a kind of octal is composite evacuated regulates, including octal potsherd 1, electrode support bar assembly 5,
Pipe base pin components 6, low-vacuum measurement regulate with filament 7,1 one side of octal potsherd be provided with electrode support bar assembly 5, eight
1 another side of foot potsherd is provided with pipe base pin components 6, and electrode supports bar assembly 5 by two collectors, 51, two acceleration poles
52nd, two filament steady arms, two low-vacuum measurements regulate steady arm composition, and currently preferred 51 length of collector is
15mm, a diameter of 1mm of collector 51；Spacing between two collectors 51 is 5mm.The currently preferred length for accelerating pole 52
Spend for 15mm, a diameter of 1mm of acceleration pole 52；Two spacing accelerated between pole 52 are 10mm.Pipe base pin components 6 are by Guan Ji
First foot 61, pipe base crus secunda 62, tri- feet 63 of Guan Ji, tetra- feet 64 of Guan Ji, five feet 65 of Guan Ji, six feet 66 of Guan Ji, pipe
The 7th foot 67 of base, Guan Ji octals 68 form, and two collectors 51 are a pair of with the first foot of pipe base 61, seven feet of Guan Ji 67 1 respectively
It should connect, two accelerate pole 52 to connect one to one respectively with pipe base crus secunda 62, Guan Ji octals 68, two filament steady arms
Connect one to one respectively with tetra- feet 64 of Guan Ji, five feet 65 of Guan Ji, two low-vacuum measurements regulate steady arm respectively with pipe
The 3rd foot 63 of base, six feet 66 of Guan Ji connect one to one, and low-vacuum measurement, which is regulated, is correspondingly connected to two low-vacuum measurement rule
On pipe steady arm, currently preferred low-vacuum measurement is regulated regulates for ZJ-52 type low-vacuum measurements, and resistance wire 9 is ZJ-52 types
Low-vacuum measurement regulates corresponding resistance wire.Direct combination of the present invention ZJ-52 type low-vacuum measurements are regulated, and ZJ-52 types are low
The measurement range that vacuum measurement is regulated can supplement the measurement range of remainder ionization gauge of the present invention, i.e. rough vacuum 105Pa
~10-1Pa measurement ranges, and ZJ-52 type low-vacuum measurements are regulated with pressure measurement scope is wide, performance is stable, uniformity
Good, the advantages that reflecting time is fast, long lifespan.The application can obtain rough vacuum 105Pa~10-1The test scope of Pa, at the same time
The test scope of condition of high vacuum degree, while the composite evacuated volume smaller regulated of the present invention can also be obtained, can meet related use
The demand at family.
As shown in Fig. 2, being connected with resistance wire supporting rack 8 on five feet 65 of Guan Ji, (the resistance wire supporting rack 8 is by insulating materials
It is fabricated), it is connected with resistance wire supporting rack 8 and regulates matched resistance wire 9 (resistance wire 9 and ZJ- with low-vacuum measurement
52 type low-vacuum measurements, which are regulated, to be engaged).
As shown in figure 3, the first foot of pipe base 61 is electrically connected with seven feet 67 of Guan Ji, pipe base crus secunda 62 and Guan Ji octals 68
It is electrically connected, octal potsherd 1 is equipped with the tube core 4 that 5 side of bar assembly is supported positioned at electrode, 1 Exterior capsule of ceramic tube base parcel
Ring 2 can be cut down by having.The outside of octal potsherd 1 of the application, which is equipped with, can cut down ring 2, have the following technical effect that：Firstth, can cut down ring 2 with
Octal potsherd 1 can match welding；Secondth, the big octal of ceramics of standard is allowd to cut down times of endless tube base and user's needs
Anticipate the shell welding of interface, CF35 flanges, KF40 flanges, KF16 flanges, the KF10 flanges etc. that can make user's needs are general
Interface, meets that user selects.Octal potsherd 1 is located at 6 side of pipe base pin components and is fixed with positioning pin 3.Present invention assembling
Good octal is composite evacuated to regulate overall total height≤45mm, maximum gauge 29mm.It is connected with tube core 4 and two filament steady arms
Corresponding filament 7, two accelerate poles 52 between lines and two collectors 51 between line be mutually perpendicular to be in crosswise.
Currently preferred filament 7 is in two and accelerates pole 52 and the center of two collectors 51, i.e., two acceleration poles 52 and two
A collector 51 corresponds to two-by-two, and two accelerate pole 52 and two collectors 51 to be located at 7 both sides of filament, and two acceleration poles respectively
52 and two collectors 51 be in crosswise centered on filament 7.Currently preferred filament 7 is yittrium oxide filament.
The total of the present invention high regulates total high reduction 15mm or so than high vacuum ionization type in ZJ-10 wide-range so that no longer
The limitation in user installation space is limited to, reduces the surface area of whole vacuum gauge；By repeatedly testing, in different height
The degree adjustment parameter such as operating current voltage, linear, accuracy that the vacuum monitor of vacuum gauge of the present invention goes out, stability reach
The technique effect that can not be realized to the prior art.And collector 51 and acceleration 52 area of pole also greatly reduce 90% or so, its
Volume smaller, discharge quantity is also less, and work is more stable, and parts machining cost is also lower, and the band that can also be needed with user is appointed
The shell welding of meaning interface uses, and meets user's wide-range ionization type and regulates the need that compound miniaturization is regulated with low-vacuum measurement
Ask.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
All any modification, equivalent and improvement made within refreshing and principle etc., should all be included in the protection scope of the present invention.
Claims (8)
- Regulated 1. a kind of octal is composite evacuated, it is characterised in that：Bar assembly (5), pipe are supported including octal potsherd (1), electrode Base pin components (6), low-vacuum measurement are regulated is provided with electrode steady arm with filament (7), octal potsherd (1) one side Component (5), octal potsherd (1) another side are provided with pipe base pin components (6), and the electrode supports bar assembly (5) Pole (52), two filament steady arms, two low-vacuum measurements are accelerated to regulate steady arm and form by two collectors (51), two, The pipe base pin components (6) are by the first foot of pipe base (61), pipe base crus secunda (62), tri- feet of Guan Ji (63), tetra- feet of Guan Ji (64), five feet of Guan Ji (65), six feet of Guan Ji (66), seven feet of Guan Ji (67), Guan Ji octals (68) composition, two collections Pole (51) connects one to one with the first foot of pipe base (61), seven feet of Guan Ji (67) respectively, two accelerate pole (52) respectively with pipe Base crus secunda (62), Guan Ji octals (68) connect one to one, two filament steady arms respectively with tetra- feet of Guan Ji (64), pipe The 5th foot (65) of base connects one to one, two low-vacuum measurements regulate steady arm respectively with tri- feet of Guan Ji (63), Guan Ji Six feet (66) connect one to one, and the low-vacuum measurement, which is regulated, to be correspondingly connected to two low-vacuum measurements and regulate on steady arm, Resistance wire supporting rack (8) is connected with five feet of Guan Ji (65), is connected with the resistance wire supporting rack (8) and low vacuum Matched resistance wire (9) is regulated in measurement；First foot of pipe base (61) is electrically connected with seven feet of Guan Ji (67), the Guan Ji Two feet (62) are electrically connected with Guan Ji octals (68), and the octal potsherd (1) is equipped with supports bar assembly (5) one positioned at electrode The tube core (4) of side, is connected with the tube core (4) and two corresponding filaments of filament steady arm (7), and two accelerate pole (52) Between line and two collectors (51) between line be mutually perpendicular to be in crosswise.
- Regulated 2. a kind of octal described in accordance with the claim 1 is composite evacuated, it is characterised in that：The low-vacuum measurement regulate for ZJ-52 type low-vacuum measurements are regulated, and the resistance wire (9) regulates corresponding resistance wire for ZJ-52 type low-vacuum measurements.
- Regulated 3. a kind of octal described in accordance with the claim 1 is composite evacuated, it is characterised in that：The filament (7) is in two Accelerate pole (52) and the center of two collectors (51).
- 4. regulated according to a kind of octal of claims 1 to 3 any one of them is composite evacuated, it is characterised in that：The collector (51) length is 15mm, a diameter of 1mm of collector (51)；Spacing between two collectors (51) is 5mm.
- 5. regulated according to a kind of octal of claims 1 to 3 any one of them is composite evacuated, it is characterised in that：The acceleration pole (52) length is 15mm, accelerates a diameter of 1mm of pole (52)；Two spacing accelerated between pole (52) are 10mm.
- 6. regulated according to a kind of octal described in claim 1 or 3 is composite evacuated, it is characterised in that：The filament (7) is oxidation Yttrium filament.
- Regulated 7. a kind of octal described in accordance with the claim 1 is composite evacuated, it is characterised in that：The octal potsherd (1) is outside Closed be enclosed with portion can cut down ring (2).
- 8. regulated according to a kind of octal described in claim 1 or 7 is composite evacuated, it is characterised in that：The octal potsherd (1) Positioning pin (3) is fixed with positioned at pipe base pin components (6) side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711263033.5A CN107958830B (en) | 2017-12-04 | 2017-12-04 | Eight-foot composite vacuum gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711263033.5A CN107958830B (en) | 2017-12-04 | 2017-12-04 | Eight-foot composite vacuum gauge |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107958830A true CN107958830A (en) | 2018-04-24 |
| CN107958830B CN107958830B (en) | 2023-07-25 |
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ID=61962949
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711263033.5A Active CN107958830B (en) | 2017-12-04 | 2017-12-04 | Eight-foot composite vacuum gauge |
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| Country | Link |
|---|---|
| CN (1) | CN107958830B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2109635U (en) * | 1992-01-14 | 1992-07-08 | 北京大学 | Four pole wide range ionozation gauge tube |
| JP2005127733A (en) * | 2003-10-21 | 2005-05-19 | Anelva Corp | Measuring apparatus including crystal oscillator |
| CN202547862U (en) * | 2012-03-02 | 2012-11-21 | 成都中科唯实仪器有限责任公司 | Double-resistance single-ionization compound vacuum gauge |
| CN103311085A (en) * | 2013-06-27 | 2013-09-18 | 成都国光电气股份有限公司 | Miniature composite vacuum gauge tube |
| CN204257587U (en) * | 2014-12-31 | 2015-04-08 | 成都兴睿宝电子科技有限公司 | A kind of small-sized ultra high vacuum is regulated |
-
2017
- 2017-12-04 CN CN201711263033.5A patent/CN107958830B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2109635U (en) * | 1992-01-14 | 1992-07-08 | 北京大学 | Four pole wide range ionozation gauge tube |
| JP2005127733A (en) * | 2003-10-21 | 2005-05-19 | Anelva Corp | Measuring apparatus including crystal oscillator |
| CN202547862U (en) * | 2012-03-02 | 2012-11-21 | 成都中科唯实仪器有限责任公司 | Double-resistance single-ionization compound vacuum gauge |
| CN103311085A (en) * | 2013-06-27 | 2013-09-18 | 成都国光电气股份有限公司 | Miniature composite vacuum gauge tube |
| CN204257587U (en) * | 2014-12-31 | 2015-04-08 | 成都兴睿宝电子科技有限公司 | A kind of small-sized ultra high vacuum is regulated |
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| Publication number | Publication date |
|---|---|
| CN107958830B (en) | 2023-07-25 |
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