CN2263786Y - High-vacuum micro-ionization gauge with extra-low suction and exhaustion rate - Google Patents
High-vacuum micro-ionization gauge with extra-low suction and exhaustion rate Download PDFInfo
- Publication number
- CN2263786Y CN2263786Y CN 96209398 CN96209398U CN2263786Y CN 2263786 Y CN2263786 Y CN 2263786Y CN 96209398 CN96209398 CN 96209398 CN 96209398 U CN96209398 U CN 96209398U CN 2263786 Y CN2263786 Y CN 2263786Y
- Authority
- CN
- China
- Prior art keywords
- anode ring
- electron emitter
- repeller
- filament
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000919 ceramic Substances 0.000 claims abstract description 13
- 229910052751 metal Inorganic materials 0.000 claims abstract description 6
- 239000002184 metal Substances 0.000 claims abstract description 6
- 238000007789 sealing Methods 0.000 claims abstract description 3
- 239000011521 glass Substances 0.000 claims description 6
- 238000007872 degassing Methods 0.000 abstract description 6
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052721 tungsten Inorganic materials 0.000 abstract description 3
- 239000010937 tungsten Substances 0.000 abstract description 3
- 239000006185 dispersion Substances 0.000 abstract 1
- 238000005259 measurement Methods 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 description 13
- 230000010355 oscillation Effects 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
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- Measuring Fluid Pressure (AREA)
Abstract
The utility model relates to a high-vacuum micro-ionization gauge with an extra-low suction and exhaustion rate, which is composed of a metal outer casing, an ion collecting electrode with a ceramic stem, an anode ring, and an electron emitter, wherein, one end of the metal outer casing is melted and sealed with the ceramic stem, and the other end of the metal outer casing is connected with a component to be measured; the ion collecting electrode and the electron emitter component are arranged coaxially and asymmetrically in the metal outer casing correspondingly to the anode ring, and the electronic emitter component comprises a tungsten filament and a reflecting electrode. The utility model doesn't need degassing within the range of the measuring pressure. The utility model has the advantages of extra-low suction and exhaustion rate which is suitable for high-vacuum measurement in the sealing component, firm structure, low sensibility dispersion rate and vibration resistance, and is suitable to measure the pressure in switch tubes.
Description
The utility model relates to a kind of high vacuum micro-ionization gauge with extremely low suction and exhaustion rate, is mainly used in 10
-1～10
-5The high vacuum of Pa pressure range measures, and the high vacuum that is particularly useful for various air lockings (as high-pressure vacuum switch pipe, teletron) measures.
In the prior art, two kinds of micro-ionization gauges that the inventor of present patent application once delivered in the eighties, a kind of pressure range 10 that is used for
-2～10
-9The ultrahigh vacuum of Pa measures, and another kind is used for 10
-2～10
-11The extra-high vacuum of Pa measures (saw monograph " scientific basic of vacuum technique " 1987, national defence publishing house publishes).These two kinds of miniature vacuum gauges have all utilized static saddle field constraint electronic oscillation can produce extremely long electron path thereby can obtain the notion of higher ionization gauge sensitivity.But above-mentioned two kinds of ionization gauges run into many difficulties from laboratory development to entering suitability for industrialized production.
The purpose of this utility model is over against a kind of high vacuum micro-ionization gauge with extremely low suction and exhaustion rate of commercial Application design, to adapt to the requirement of high-pressure vacuum switch pipe one class air locking.Two kinds of micro-ionization gauges in the prior art have been done more improvement, (1) lead-in wire is drawn by end pottery (or glass) stem stem, in order to reduce the influence of anode ring side rod, do it extremely shortly, promptly the anode ring reduces to about 2mm to the distance between the electron emitter (filament).(2) for fear of asking owing to the utmost point apart from further reducing to cause self-sustained oscillation, electron emitter (being filament) in former two kinds of ionization gauges and collector mutually the coaxial balanced configuration of antianode ring change coaxial symmetrical arrangements into, so, electronics in the saddle field vibration under whole approximately just change into unsymmetrical oscillation from symmetric oscillations, reduced oscillation frequency, thereby also reduced rule sensitivity, made the pressure of the utility model rule measure the upper limit from 10
-2～10
-3Pa expands to 10
-1Pa has expanded application.
The high vacuum micro-ionization gauge with extremely low suction and exhaustion rate of the utility model design comprises shell, ceramic stem, ion collector, anode ring and electron emitter assembly.One end of shell and ceramic stem be sealing by fusing mutually, and the other end and the device under test of shell join.Ion collector and electron emitter assembly be coaxial asymmetric being installed in the golden shell of antianode ring mutually, and three's support bar by separately respectively is fixed on the ceramic stem.The anode ring is an annulus, is made by fine wire.Ion collection is glass or ceramic disks very, is coated with golden film on the plane relative with the anode ring.The electron emitter assembly comprises filament and repeller, repeller is glass or ceramic disks, is coated with golden film on its plane relative with the anode ring, and filament places between repeller and the anode ring, and be fixed on the support bar, the golden film of filament one utmost point and repeller links.
Effect of the present utility model is:
(1) in the pressure range that measures, do not need degasification, do not have the sensitivity abnormal occurrence yet.And traditional various ionization gauges (as BA rule and large cylinder ionization gauge) fully degasification before measuring, general degasification power is about 50～100 watts.If not degasification, then often owing to give vent to anger or sensitivity causes maximum error unusually, have time error can be up to 1000%1 owing to do not need degasification, it is low to measure power supply power consumption.
(2) suction and exhaustion rate is extremely low, is about 1/50～1/100 of traditional BA type ionization gauge.The high vacuum that is suitable in the air locking measures.
(3) She Ji texture ratio is more firm, makes that the sensitivity of rule itself is diffusing in addition little, and the certain vibration of ability, is suitable for the high-pressure vacuum switch intraductal pressure and measures.
Description of drawings:
Fig. 1 is a structural representation of the present utility model.
Fig. 2 is the structural representation of electron emitter assembly in the micro-ionization gauge.
Below in conjunction with accompanying drawing, introduce content of the present utility model in detail.
Among Fig. 1, the 1st, this shell of shell is a metal, or on the glass inwall matel coated film.The 2nd, the anode ring, the anode ring can be made with thin molybdenum filament.The 3rd, ion collector support bar, the 4th, electron emitter assembly, the 5th, anode ring support bar, the 6th, ion collector, the 7th, ceramic stem.Fig. 2 is the structural representation of electron emitter assembly, and 8 is filaments among the figure, and this filament material can be a tungsten, the 9th, and golden film, the 10th, repeller, the 11st, filament support bar, the 12nd, the tie point of filament one utmost point and golden film.
Principle of work of the present utility model is as follows, according to structure shown in Figure 1, electron emitter 4 and ion collector 6 be coaxial asymmetric the laying of antianode ring mutually, promptly between the two apart from different, generally speaking, ion collector-anode ring spacing from greater than filament-anode ring spacing from, the latter gets 2mm, the former desirable 3～4mm.Ion collector can be gold film electrode, or is the wire gauze of transparency more than 90%.The Potential distribution form is to have a saddle point, near line of electric force bends saddle point near the axle Shangyang polar ring heart.And from saddle point than the territory, far field, line of electric force is to be the ray at center with the saddle point basically.Electron emitter comprises various cool and thermal power component emitters.Supposing to have an electronics is tungsten filament 8 emissions from emitter, begins it and moves along line of electric force, subsequently, because the momentum of electronics itself, no longer move along line of electric force and bend towards the anode ring, therefore, electronics passes through anode ring 2, vibration back and forth, under the situation of electrode balanced configuration, oscillation frequency is very high, and electron path is very long, because electrode symmetrical arrangements of the present utility model, electronics just incident anode ring gradually behind the vibration several times.Therefore the sensitivity of the utility model rule is about 0.01～0.2/Pa, decides on geometric electrode size and voltage distribution.To make gas molecule ionization with gas molecule collision and with certain probability in the electron motion process, the positive ion that produces in ion collector 6 and anode ring 2 spaces is in the ion collector 6 of negative potential and collects.Satisfying under the certain condition, how many generation ions is directly proportional with advising interior pressure, thereby how much just the energy correspondence of ion collector 6 collection of ionss go out to advise interior pressure.Because ionization gauge communicates with tested container, thereby also just measured the pressure (being general so-called vacuum tightness) in the container.
Claims (1)
1, a kind of high vacuum micro-ionization gauge with extremely low suction and exhaustion rate comprises shell and ceramic stem, it is characterized in that also comprising ion collector, anode ring and electron emitter assembly; One end of described shell and ceramic stem be sealing by fusing mutually, and the other end and the device under test of shell join; Described ion collector and electron emitter assembly be coaxial asymmetric being installed in the metal shell of antianode ring mutually, and three's support bar by separately respectively is fixed on the ceramic stem; The anode ring is an annulus, is made by fine wire; Ion collection is glass or ceramic disks very, is coated with golden film on the plane relative with the anode ring; The electron emitter assembly comprises filament and repeller, repeller is glass or ceramic disks, is coated with golden film on its plane relative with the anode ring, and filament places between repeller and the anode ring, and be fixed on the support bar, the golden film of filament one utmost point and repeller links.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 96209398 CN2263786Y (en) | 1996-05-17 | 1996-05-17 | High-vacuum micro-ionization gauge with extra-low suction and exhaustion rate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 96209398 CN2263786Y (en) | 1996-05-17 | 1996-05-17 | High-vacuum micro-ionization gauge with extra-low suction and exhaustion rate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2263786Y true CN2263786Y (en) | 1997-10-01 |
Family
ID=33893055
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 96209398 Expired - Lifetime CN2263786Y (en) | 1996-05-17 | 1996-05-17 | High-vacuum micro-ionization gauge with extra-low suction and exhaustion rate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2263786Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106680612A (en) * | 2015-11-11 | 2017-05-17 | 北京卫星环境工程研究所 | Performance test device for emitter of field emission electric thruster of satellite |
| CN112629746A (en) * | 2020-12-04 | 2021-04-09 | 合肥工业大学 | Symmetrical hot cathode ionization vacuum gauge capable of being used in high-intensity magnetic field environment |
-
1996
- 1996-05-17 CN CN 96209398 patent/CN2263786Y/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106680612A (en) * | 2015-11-11 | 2017-05-17 | 北京卫星环境工程研究所 | Performance test device for emitter of field emission electric thruster of satellite |
| CN106680612B (en) * | 2015-11-11 | 2019-08-06 | 北京卫星环境工程研究所 | The performance testing device of satellite field emission electric thruster emitter |
| CN112629746A (en) * | 2020-12-04 | 2021-04-09 | 合肥工业大学 | Symmetrical hot cathode ionization vacuum gauge capable of being used in high-intensity magnetic field environment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| C20 | Patent right or utility model deemed to be abandoned or is abandoned |