CN201167082Y - Squirrel-cage typed ion source of helium mass spectrometer vacuum leak detector - Google Patents
Squirrel-cage typed ion source of helium mass spectrometer vacuum leak detector Download PDFInfo
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- CN201167082Y CN201167082Y CNU2008201282679U CN200820128267U CN201167082Y CN 201167082 Y CN201167082 Y CN 201167082Y CN U2008201282679 U CNU2008201282679 U CN U2008201282679U CN 200820128267 U CN200820128267 U CN 200820128267U CN 201167082 Y CN201167082 Y CN 201167082Y
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- ion source
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- squirrel
- cage
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Abstract
The utility model relates to an ion source of a squirrel-cage helium mass spectrometer leak detector. The positive electrode 5 of the ion source is a honeycombed grid formed by a molybdenum sheet after chemical etching and is cylindrical; the top part of the positive electrode is welded with a nickel ring 6, and the bottom part thereof is welded with a disc 3, and finally welded with a support point of the positive electrode; the width of a grid filament of the positive electrode is 0.1mm, the thickness is 0.05mm, and the distance of each grid is 1mm; a lamp filament 4 is arranged on the outer side of the positive electrode; the lamp filament 4 is circular; the lamp filament 4 is a yttrium oxide iridic gold lamp filament; the diameter of the lamp filament is 0.08 mm; the lamp filament is wound into a circle shape, and the circumferential diameter is 14mm.
Description
Technical field
The present invention relates to squirrel-cage typed ion source of helium mass spectrometer vacuum leak detector, relate in particular to a kind of ionogenic anode construction and material.
Background technology
Classical mass spectrometer gaseous sample ionization source is electron bombardment ionization source (being called for short the EI source).This ion source has superperformances such as ion flow is stable, the energy dispersion is little, and shortcoming is that ionizing efficiency is lower.A kind of novel ionization source of development is called the squirrel-cage ion source now.
The ionogenic ionization mechanism of squirrel-cage is: the filament by a pair of heating (temperature is up to more than 2200 ℃) produces electronics, and electronics quickens to fly to center anode under the accelerating voltage effect of 80-100V.Anode commonly used is a Φ 1.5mm stainless steel wire coiling spiral type, and electronics passes anode region (this district is the equipotential field), with the gas molecule collision ionization formation ion in the district, as the ion N of nitrogen, oxygen, steam, helium
2 +, O
2 +, H
2O
+, He
+Deng, Peng Zhuan electronics does not pass the anode region, is subjected to the cathode electric field effect, and speed drops to zero, returns anode then, and electronics comes and goes repeatedly at anode region, and vibration forms stronger ion flow, so this ion source has stronger ion flow than classical electron bombardment ionization source.
There is following problem in this squirrel-cage ion source: because ionogenic anode is to be formed by spiral stainless steel wire coiling, cause the repeatability and the low precision that assemble like this, thereby the strength stability that produces ion flow is poor.In addition, two filaments, wherein heating, another root is standby, can form the cold situation of heat on one side on one side, so just accumulates pollutant easily on anode, causes the instability of ion flow.
Summary of the invention
The object of the present invention is to provide a kind of long-life and the squirrel-cage typed ion source of helium mass spectrometer vacuum leak detector of stronger emission effciency is arranged.The anode material thickness in this source is that 0.05mm molybdenum sheet electrochemical etching is cellular, has accurate more structure and high electron penetration rate.The filament in source supports circumferential, homogeneous heating and emission effciency height with long-life yittrium oxide iraurite silk.
For achieving the above object, the present invention adopts following technical scheme:
A kind of squirrel-cage typed ion source of helium mass spectrometer vacuum leak detector, it has ionogenic negative electrode 22, anode carrier 21, on anode carrier, has disk 23,25 one-tenth on anode is cylindric, be that the thick molybdenum sheet of 0.05mm forms cellular grid behind chemical etching, the width of grid silk is 0.1mm, each grid apart from 1mm, make electronics by bigger transmitance is arranged, the outside of anode has filament 24, filament 24 is circular, anode top and 26 welding of nickel ring, the bottom of anode and disk 23 welding, last and anode carrier spot welding, wherein anode diameter Φ 8--12mm is preferably Φ 10mm.
In yet another aspect, filament material yittrium oxide iraurite filament, iraurite silk Φ 0.08mm turns to circle, and circle diameter Φ 14mm is contained in outside, anode middle part.
After adopting technique scheme, the present invention has following beneficial effect: the iraurite filament can produce electronics in the time of 800 ℃, good oxidation resistance is arranged, and is difficult for blowing when vacuum degree is bad, and the life-span can reach 1-2.Filament coiled circle helps evenly heating around the anode, avoids anode heat on one side, on one side cold, can reduce source internal contamination thing and accumulate on the position of cooling.Filament is done circumferential, produces electronics on a circumferential plane, and ion flow can be stronger.Filament will be handled with the method that activates before use or after use after a while, and usual operating current is 2.5A, and galvanization 3.5A during activation 25 minutes, guarantees that like this filament has very strong emission effciency.
Description of drawings
The present invention will be described below in conjunction with accompanying drawing, wherein:
Fig. 1 is conventional squirrel-cage ion source schematic diagram.
Fig. 2 is an ionogenic end view of the present invention.
Fig. 3 is the ionogenic vertical view that cuts along the horizontal tangent of Fig. 2 of the present invention.
Embodiment
The present invention is further described below in conjunction with accompanying drawing and example.
Accompanying drawing 1 is conventional squirrel-cage ion source schematic diagram.Wherein anode 1 is the stainless steel wire of the spiral type coiling of a Φ 1.5mm, negative electrode 3 is in the outside of anode 1, there are the filament 2 and the filament 4 of a pair of heating (temperature is up to more than 2200 ℃) to produce electronics 5 in the outside of anode 1, electronics 5 quickens to fly to center anode under the accelerating voltage effect of 80-100V, electronics 5 passes the anode region and forms ion 6 with gas molecule 7 ionization by collisions in the district, Peng Zhuan electronics does not pass the anode region, be subjected to the cathode electric field effect, speed drops to zero, return anode then, electronics comes and goes repeatedly at anode region, and vibration forms stronger ion flow.
Accompanying drawing 2 is ionogenic end views of the present invention.Wherein has negative electrode 22, anode carrier 21 is in the bottom, have disk 23 on anode carrier, anode 25 is that the thick molybdenum sheet of 0.05mm forms cellular grid behind chemical etching, and it is cylindric that anode becomes, the outside of anode has filament 24, the top of anode and 26 welding of nickel ring, the bottom of anode and disk 23 welding, last and anode carrier spot welding, wherein anode diameter Φ 8--12mm is preferably Φ 10mm.
Fig. 3 is the ionogenic vertical view that cuts along the level of Fig. 2 of the present invention.The filament 24 non-outsides that are centered around anode 25 are wherein supported by stem closedly, can evenly heat anode like this, and wherein the width of grid silk is 0.1mm, each grid apart from 1mm, and make electronics by bigger transmitance is arranged.
In a specific embodiment, the ionogenic anode of helium mass spectrometer leak detector adopts the thick molybdenum sheet of 0.05mm to form cellular grid behind chemical etching, anode is cylindric, its diameter is 10mm, be provided with filament in outside, anode middle part, anode assembles easily like this, and produces stable ion flow intensity.
In another specific embodiment, adopt the above-mentioned ionogenic anode of helium mass spectrometer leak detector, filament material adopts yittrium oxide iraurite filament, and iraurite silk Φ 0.08mm turns to circle, and circle diameter Φ 14mm is contained in outside, anode middle part.And filament will be handled with the method that activates before use or after use after a while, and galvanization 3.5A during activation 25 minutes, guarantees that like this filament has very strong emission effciency.Because filament coiled circle helps evenly heating around the anode, avoid anode heat on one side, on one side cold, can reduce source internal contamination thing and accumulate on the position of cooling.Filament is done circumferential, produces electronics on a circumferential plane, and ion flow can be stronger.
Claims (7)
1. the ion source of a squirrel-cage helium mass spectrometer leak detector is characterized in that, anode (25) is to form cellular grid by molybdenum sheet behind chemical etching, becomes cylindric.
2. according to the ion source of claim 1, it is characterized in that the width of grid silk is 0.1mm, thickness is 0.05mm, each grid apart from 1mm.
3. according to the ion source of claim 1, it is characterized in that anode diameter is 8--12mm.
4. according to the ion source of claim 3, it is characterized in that anode diameter is 10mm.
5. according to the ion source of claim 1, it is characterized in that the outside of anode has filament (24), filament (24) is circular.
6. according to the ion source of claim 5, it is characterized in that filament (24) is a yittrium oxide iraurite filament, filament diameter is 0.08mm, turns to circle, and circle diameter is 14mm.
7. according to the ion source of claim 1, it is characterized in that anode top and nickel ring (26) welding, the bottom of anode and disk (23) welding, last and anode carrier spot welding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201282679U CN201167082Y (en) | 2008-07-14 | 2008-07-14 | Squirrel-cage typed ion source of helium mass spectrometer vacuum leak detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201282679U CN201167082Y (en) | 2008-07-14 | 2008-07-14 | Squirrel-cage typed ion source of helium mass spectrometer vacuum leak detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201167082Y true CN201167082Y (en) | 2008-12-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008201282679U Expired - Fee Related CN201167082Y (en) | 2008-07-14 | 2008-07-14 | Squirrel-cage typed ion source of helium mass spectrometer vacuum leak detector |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE112010001207B4 (en) * | 2009-03-18 | 2016-05-04 | Ulvac, Inc. | A method of detecting oxygen or air in a vacuum processing apparatus and air leak detection method |
-
2008
- 2008-07-14 CN CNU2008201282679U patent/CN201167082Y/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE112010001207B4 (en) * | 2009-03-18 | 2016-05-04 | Ulvac, Inc. | A method of detecting oxygen or air in a vacuum processing apparatus and air leak detection method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20081217 Termination date: 20130714 |