CN218101169U - Cathode assembly of MAT type mass spectrometer - Google Patents
Cathode assembly of MAT type mass spectrometer Download PDFInfo
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- CN218101169U CN218101169U CN202221710148.0U CN202221710148U CN218101169U CN 218101169 U CN218101169 U CN 218101169U CN 202221710148 U CN202221710148 U CN 202221710148U CN 218101169 U CN218101169 U CN 218101169U
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Abstract
The utility model relates to the technical field of mass spectrometers, in particular to a cathode component of MAT type mass spectrometer, wherein a substrate is fixed on an ionization box of an ion source; the left lower part and the right lower part of the substrate are respectively provided with a left base column and a right base column, and the middle part of the substrate is provided with a middle base column; the lower ends of the left bracket and the right bracket are respectively welded on a left base column and a right base column on the upper end surface of the substrate; two ends of the cathode filament are respectively welded at the upper ends of the left bracket and the right bracket; the shielding cover is buckled above the left support, the right support and the cathode filament and is fixed with the upper end face of the substrate through the middle base column. The utility model discloses the negative pole subassembly is applicable to gas isotope mass spectrometer, can make performance such as accuracy, life of mass spectrometer have great promotion.
Description
Technical Field
The utility model belongs to the technical field of the mass spectrometer, concretely relates to MAT type mass spectrometer cathode assembly.
Background
MAT type Mass Spectrometry was UF 6 The special gas isotope mass spectrometer is the most advanced commercial instrument in the gas isotope mass spectrometer in the early world, and has the characteristics of stable performance, high precision, low memory effect and the like. Today, the basic physical optical systems, analytical systems and performance metrics remain advanced. The ion source of MAT type mass spectrometer is an electron ionization type ion source, mainly comprises a cathode component, an ionization box, an electron receiving electrode and an electrostatic lens system, wherein the emission cathode of the cathode component is coated with LaB 6 The rhenium ribbon of (1).
For a long time, cathode assemblies of MAT type mass spectrometers are imported from western countries, but are limited by international situational influences, long-term stable sources of goods cannot be guaranteed, and at present, no sufficient spare parts meet consumption requirements. At present, no substitute exists in domestic markets, and once a cathode filament is burnt out, the measurement and analysis work of an instrument cannot be guaranteed.
Therefore, it is desirable to design a cathode assembly of MAT type mass spectrometer to solve the above problems.
Disclosure of Invention
An object of the utility model is to provide a MAT type mass spectrometer cathode assembly ensures high accuracy main equipment safety, stable operation.
The technical scheme of the utility model as follows:
the cathode assembly of the MAT type mass spectrometer comprises a cathode filament, a shielding case, a substrate, a left support, a right support, a left base column, a right base column, a middle base column, a right lead and a left lead;
the substrate is fixed on an ionization box of the ion source;
the left lower part and the right lower part of the substrate are respectively provided with a left base column and a right base column, and the middle part of the substrate is provided with a middle base column;
the lower ends of the left bracket and the right bracket are respectively welded on a left base column and a right base column on the upper end surface of the substrate;
two ends of the cathode filament are respectively welded at the upper ends of the left bracket and the right bracket;
the shielding cover is buckled above the left support, the right support and the cathode filament and is fixed with the upper end surface of the substrate through the middle base column;
and one end of the right lead and one end of the left lead are respectively fixed on the lower end surface of the substrate through the right base pillar and the left base pillar, and the other ends of the right lead and the left lead are used for being connected with a power supply pin of the ion source.
The surface of the base material of the cathode filament is provided with single crystal LaB 6 And (7) plating.
The thickness of the plating layer is 4-6 μm.
And a small window is processed on the shielding case, and electrons emitted by the cathode filament can pass through the small window.
The substrate is a ceramic rectangular block.
The left support and the right support are both rectangular sheet structures.
The base material of the cathode filament is W-3Re tungsten-rhenium alloy wire with the diameter of 0.1-0.2 mm and the length of 7-9 mm.
The beneficial effects of the utility model reside in that:
(1) The cathode component of the utility model is suitable for a gas isotope mass spectrometer at 1 x 10 -4 Heating to 800-1000 deg.c in Pa vacuum state for 8 hr to obtain LaB 6 The plating layer is complete and stable, and has no problems of layering, foaming and the like.
(2) The utility model adds a LaB with a certain thickness on the cathode filament 6 Coating at 1400-2000 deg.C with LaB 6 The emission capability of the mass spectrometer is four or five orders of magnitude higher than that of tungsten, so that the accuracy, the service life and other performances of the mass spectrometer are greatly improved.
(3) As the western countries are prohibited for China and no substitute is available in the domestic market, the utility model breaks through the blockade of foreign technology, and solves the problem of UF 6 The neck is difficult to be clamped in productionThe title is obtained.
Drawings
FIG. 1 is a schematic view of a cathode assembly.
In the figure: 1 a cathode filament; 2, a shielding case; 3 a substrate; 4, a left bracket; 5, a right bracket; 6, a left base column; 7 right base pillar; 8, a middle base column; 9 a right lead; 10 left lead.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
The cathode assembly of the MAT type mass spectrometer shown in FIG. 1 comprises a cathode filament 1, a shielding case 2, a substrate 3, a left support 4, a right support 5, a left base pillar 6, a right base pillar 7, a middle base pillar 8, a right lead 9 and a left lead 10.
The substrate 3 is a ceramic rectangular block and is fixed on an ionization box of the ion source.
The left lower part and the right lower part of the substrate 3 are respectively provided with a left base pillar 6 and a right base pillar 7, and the middle part of the substrate 3 is provided with a middle base pillar 8.
The left support 4 and the right support 5 are both rectangular sheet structures, and the lower ends of the left support 4 and the right support are respectively welded on a left base pillar 6 and a right base pillar 7 on the upper end face of the substrate 3 and used for fixing the cathode filament 1.
And two ends of the cathode filament 1 are respectively welded at the upper ends of the left support 4 and the right support 5. The base material of the cathode filament 1 is a W-3Re tungsten-rhenium alloy wire with the diameter of 0.15mm and the length of 8mm, and the surface of the cathode filament is coated with single crystal LaB 6 The thickness of the plating layer is 4 to 6 μm, preferably 5 μm.
The shielding case 2 is buckled above the left support 4, the right support 5 and the cathode filament 1 and fixed with the upper end face of the substrate 3 through the middle base column 8. A small window is processed on the shielding case 2, electrons emitted by the cathode filament 1 in a working state pass through the small window, and then enter the ionization box in a spiral form under the action of a small magnet, so that UF is treated 6 After the sample molecules are bombarded into ions, the ions finally reach the electron receiving electrode.
And one ends of the right lead 9 and the left lead 10 are respectively fixed on the lower end surface of the substrate 3 through the right base pillar 7 and the left base pillar 6, and the other ends of the right lead and the left lead are used for connecting power supply pins of the ion source.
The shielding cover 2, the left bracket 4, the right bracket 5, the left base column 6, the right base column 7 and the middle base column 8 are all made of No6003 nickel alloy, have good oxidation resistance and corrosion resistance, and can be used for a long time at the temperature of 1000-1100 ℃.
The substrate 3 is AL 2 O 3 The ceramic has the characteristics of good insulativity, high melting point, high hardness, wear resistance, excellent insulativity and the like.
The right lead 9 and the left lead 10 are 99.97% silver wires, are chemically stable, have good ductility, and have the highest electrical conductivity and heat conductivity in all metals.
Claims (7)
- MAT type mass spectrometer cathode assembly, its characterized in that: the LED lamp comprises a cathode filament (1), a shielding case (2), a substrate (3), a left support (4), a right support (5), a left base column (6), a right base column (7), a middle base column (8), a right lead (9) and a left lead (10);the substrate (3) is fixed on an ionization box of the ion source;a left base pillar (6) and a right base pillar (7) are respectively arranged at the left lower part and the right lower part of the substrate (3), and a middle base pillar (8) is arranged in the middle of the substrate (3);the lower ends of the left bracket (4) and the right bracket (5) are respectively welded on a left base column (6) and a right base column (7) on the upper end surface of the substrate (3);two ends of the cathode filament (1) are respectively welded at the upper ends of the left support (4) and the right support (5);the shielding case (2) is buckled above the left support (4), the right support (5) and the cathode filament (1) and is fixed with the upper end face of the substrate (3) through a middle base pillar (8);one end of the right lead (9) and one end of the left lead (10) are respectively fixed on the lower end face of the substrate (3) through the right base pillar (7) and the left base pillar (6), and the other ends of the right lead and the left lead are used for being connected with a power supply pin of an ion source.
- 2. The MAT-type mass spectrometer cathode assembly of claim 1, wherein: the surface of the base material of the cathode filament (1) is provided with single crystal LaB 6 And (7) plating.
- 3. The MAT-type mass spectrometer cathode assembly of claim 2, wherein: the thickness of the plating layer is 4-6 μm.
- 4. The MAT-type mass spectrometer cathode assembly of claim 1, wherein: and a small window is processed on the shielding case (2), and electrons emitted by the cathode filament (1) can pass through the small window.
- 5. The MAT-type mass spectrometer cathode assembly of claim 1, wherein: the substrate (3) is a ceramic rectangular block.
- 6. The MAT-type mass spectrometer cathode assembly of claim 1, wherein: the left support (4) and the right support (5) are both rectangular sheet structures.
- 7. The MAT-type mass spectrometer cathode assembly of claim 1, wherein: the base material of the cathode filament (1) is a W-3Re tungsten-rhenium alloy wire with the diameter of 0.1-0.2 mm and the length of 7-9 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221710148.0U CN218101169U (en) | 2022-07-04 | 2022-07-04 | Cathode assembly of MAT type mass spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221710148.0U CN218101169U (en) | 2022-07-04 | 2022-07-04 | Cathode assembly of MAT type mass spectrometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218101169U true CN218101169U (en) | 2022-12-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221710148.0U Active CN218101169U (en) | 2022-07-04 | 2022-07-04 | Cathode assembly of MAT type mass spectrometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218101169U (en) |
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2022
- 2022-07-04 CN CN202221710148.0U patent/CN218101169U/en active Active
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