CN202547862U - Double-resistance single-ionization compound vacuum gauge - Google Patents
Double-resistance single-ionization compound vacuum gauge Download PDFInfo
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- CN202547862U CN202547862U CN201220076557XU CN201220076557U CN202547862U CN 202547862 U CN202547862 U CN 202547862U CN 201220076557X U CN201220076557X U CN 201220076557XU CN 201220076557 U CN201220076557 U CN 201220076557U CN 202547862 U CN202547862 U CN 202547862U
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Abstract
The utility model discloses a double-resistance single-ionization compound vacuum gauge. The double-resistance single-ionization compound vacuum gauge comprises a power circuit, a resistance vacuum gauge circuit, an ionization vacuum gauge circuit, a single chip microcomputer and a drive display circuit, the resistance vacuum gauge circuit comprises a first resistance vacuum gauge circuit and a second resistance vacuum gauge circuit, the first resistance vacuum gauge circuit is an independent resistance gauge measuring unit, the second resistance vacuum gauge circuit is combined with the ionization vacuum gauge circuit to form a compound vacuum gauge measuring unit, and signal output ends of the first resistance vacuum gauge circuit, the second resistance vacuum gauge circuit and the ionization vacuum gauge circuit are connected with a signal input end of the single chip microcomputer. By the technical scheme, when the vacuum degree measured by a resistance unit is higher than the vacuum degree at which an ionization gauge can be opened, a filament of the ionization gauge is automatically lighted to enter a high-vacuum measurement status, so that the vacuum degree is automatically and continuously measured from low to high, and the defect that an ionization vacuum gauge of a traditional compound vacuum gauge needs to be opened or closed manually is overcome.
Description
Technical field
The utility model relates to a kind of vacuum meter, particularly relates to a kind of pair of resistance single ionization compound vacuum gauge.
Background technology
Vacuum meter is an instrument of measuring gas pressure intensity in the vacuum system, and the kind of vacuum meter is a lot, mainly comprises static deformation vacuum meter, static liquid vacuum meter, compression type vacuum gauge, thermocouple vacuum gauge, resistance manometer and vacuum ionization ga(u)ge.The vacuum ranges that present many vacuum systems need be measured compares broad; Only often can not cover whole measurement ranges with a kind of vacuum meter; At present commercially available compound vacuum gauge mainly is compounded in an ion gauge and a resistance vacuum gauge in the instrument and forms, and mainly there is following shortcoming in commercially available this compound vacuum gauge at present: 1, can not connect the electric vacuum degree when the vacuum tightness of measured system when hanging down, in the time of must being higher than the vacuum tightness that ionization gauge can open when the vacuum tightness of measured system; Could use ion gauge; Need the manual ion gauge of connecting, the time spent needs manually to break off the ionization gauge power supply, needs the feasible commercially available compound vacuum gauge at present of switch of manual operation ion gauge; Can not carry out continuous coverage in low vacuum and high vacuum, and can influence the accuracy of measurement.2, the measurement result of existing compound vacuum gauge mainly shows through graduation apparatus and pointer, can not carry out intelligent digital to the result who measures and handle.
The utility model content
The purpose of the utility model is the two resistance single ionization compound vacuum gauges that to provide in order addressing the above problem that a kind of automaticity is high, easy to use, flexible, measurement range is wide, measurement result is reliable, to carry out continuous coverage in low vacuum and high vacuum.
The utility model is realized through following technical scheme:
A kind of pair of resistance single ionization compound vacuum gauge; Comprise power circuit, resistance vacuum gauge circuit, ion gauge circuit, single-chip microcomputer and driving display circuit; Said resistance vacuum gauge circuit comprises the first resistance vacuum gauge circuit and the second resistance vacuum gauge circuit, and the said first resistance vacuum gauge circuit is individual resistors instrumentation amount unit; Said second resistance vacuum gauge circuit and ion gauge combination of circuits are the compound vacuum gauge measuring unit.The signal output part of the said first resistance vacuum gauge circuit, the second resistance vacuum gauge circuit and ion gauge circuit all is connected with the signal input part of said single-chip microcomputer.
Adopt two Pirani gauges and an ionization gauge to form individual resistors instrumentation amount unit and duplex measurement unit, said compound vacuum gauge measuring unit has manual work pattern and automatic operation mode.When measuring; At first resistance unit get into to be measured, and when the resistance unit measurement of vacuum was higher than the vacuum tightness that ionization gauge can open, the ionization gauge filament was lighted automatically; Get into high vacuum and measure state, thereby realized vacuum tightness automatic continuous coverage from low to high.The signal output part of said second analog to digital conversion circuit is connected with the signal input part of said single-chip microcomputer.
Further improvement as the utility model is; The said first resistance vacuum gauge circuit comprises that first resistance is regulated, the first measurement bridge circuit, first is adjusted the amplifying circuit and first analog to digital conversion circuit; The signal output part that said first resistance is regulated is connected with the signal input part of said first metering circuit; The signal input part of the signal output part of the said first measurement bridge circuit and the said first adjustment circuit is connected; The signal output part of the said first adjustment circuit is connected with the signal input part of said first analog to digital conversion circuit, and the signal output part of said first analog to digital conversion circuit is connected with the signal input part of said single-chip microcomputer.
Further improvement as the utility model is; The said second resistance vacuum gauge circuit comprises that second resistance is regulated, the second measurement bridge circuit, second amplifies adjustment circuit, analogue quantity output circuit and second analog to digital conversion circuit; The signal input part that the signal output part that said second resistance is regulated and said second is measured bridge circuit is connected; The signal input part that the signal output part of the said second measurement bridge circuit and said second amplifies the adjustment circuit is connected; Said second amplifies the signal output part of adjusting circuit is connected with the signal input part of said analogue quantity output circuit and the signal input part of said second analog to digital conversion circuit respectively, and the signal output part of said second analog to digital conversion circuit is connected with the signal input part of said single-chip microcomputer.
Further improvement as the utility model is; Said ion gauge circuit comprises ionization gauge, ion flow amplifying circuit, the 3rd analog to digital conversion circuit and transmitter current stabilizing circuit; The intensifying ring of said ionization gauge is connected with the output terminal of said high-voltage power supply; The collector of said ionization gauge is connected with the signal input part of said ion flow amplifying circuit; The filament of said ionization gauge is connected with the signal input part of said transmitter current stabilizing circuit; The signal input part of the signal output part of said ion flow amplifying circuit and said the 3rd analog to digital conversion circuit, the signal output part of said the 3rd analog to digital conversion circuit is connected with the signal input part of said single-chip microcomputer.
As the utility model preferably, said first analog to digital conversion circuit, said second analog to digital conversion circuit and the 3rd analog to digital conversion circuit all adopt V/F conversion chip.
The beneficial effect of the utility model is:
Adopt technique scheme; When the resistance unit measurement of vacuum was higher than the vacuum tightness that ionization gauge can open, the ionization gauge filament was lighted automatically, got into high vacuum and measured state; Thereby realized vacuum tightness automatic continuous coverage from low to high; Avoided traditional compound vacuum gauge to need manual unlocking or close the shortcoming of ion gauge, the utility model adopts and adopts the LED numeral to show to measurement result, makes reading of measurement result convenient and accurate.
Description of drawings
Fig. 1 is the structural representation of the two resistance single ionization compound vacuum gauges of the utility model.
Embodiment
Below in conjunction with accompanying drawing and specific embodiment the utility model is done further to specify:
As shown in Figure 1; A kind of pair of resistance single ionization of the utility model compound vacuum gauge; Comprise power circuit, resistance vacuum gauge circuit, ion gauge circuit, single-chip microcomputer and driving display circuit; Said resistance vacuum gauge circuit comprises the first resistance vacuum gauge circuit and the second resistance vacuum gauge circuit, and the said first resistance vacuum gauge circuit is individual resistors instrumentation amount unit; Said second resistance vacuum gauge circuit and ion gauge combination of circuits are the compound vacuum gauge measuring unit, and the signal output part of the said first resistance vacuum gauge circuit, the second resistance vacuum gauge circuit and ion gauge circuit all is connected with the signal input part of said single-chip microcomputer.
Adopt two Pirani gauges and an ionization gauge to form individual resistors instrumentation amount unit and duplex measurement unit, said compound vacuum gauge measuring unit has manual work pattern and automatic operation mode.When measuring; At first resistance unit get into to be measured, and when the resistance unit measurement of vacuum was higher than the vacuum tightness that ionization gauge can open, the ionization gauge filament was lighted automatically; Get into high vacuum and measure state, thereby realized vacuum tightness automatic continuous coverage from low to high.
The said first resistance vacuum gauge circuit comprises that first resistance is regulated, the first measurement bridge circuit, first is adjusted the amplifying circuit and first analog to digital conversion circuit; The signal output part that said first resistance is regulated is connected with the signal input part of said first metering circuit; The signal input part of the signal output part of the said first measurement bridge circuit and the said first adjustment circuit is connected; The signal output part of the said first adjustment circuit is connected with the signal input part of said first analog to digital conversion circuit, and the signal output part of said first analog to digital conversion circuit is connected with the signal input part of said single-chip microcomputer.The said second resistance vacuum gauge circuit comprises that second resistance is regulated, the second measurement bridge circuit, second amplifies adjustment circuit, analogue quantity output circuit and second analog to digital conversion circuit; The signal input part that the signal output part that said second resistance is regulated and said second is measured bridge circuit is connected; The signal input part that the signal output part of the said second measurement bridge circuit and said second amplifies the adjustment circuit is connected; Said second amplifies the signal output part of adjusting circuit is connected with the signal input part of said analogue quantity output circuit and the signal input part of said second analog to digital conversion circuit respectively, and the signal output part of said second analog to digital conversion circuit is connected with the signal input part of said single-chip microcomputer.
The first measurement bridge circuit and second is measured bridge circuit and is all adopted the constant temperature type to measure bridge circuit, first Pirani gauge and second Pirani gauge is operated under the constant temperature state, when being raise by measuring pressure; The molecule heat transfer capacity increases in regulating, and the temperature and the resistance of regulating heated filament all descend, with regard to out of trim; Export a voltage signal simultaneously and give the electric bridge control circuit; Its output voltage is increased, and the temperature of regulating heated filament is gone up with resistance, up to return to regulate original in till the fixed temperature.
Said ion gauge circuit comprises ionization gauge, ion flow amplifying circuit, the 3rd analog to digital conversion circuit and transmitter current stabilizing circuit; The intensifying ring of said ionization gauge is connected with the output terminal of said high-voltage power supply; The collector of said ionization gauge is connected with the signal input part of said ion flow amplifying circuit; The filament of said ionization gauge is connected with the signal input part of said transmitter current stabilizing circuit; The signal input part of the signal output part of said ion flow amplifying circuit and said the 3rd analog to digital conversion circuit, the signal output part of said the 3rd analog to digital conversion circuit is connected with the signal input part of said single-chip microcomputer.
Ion flow amplifying circuit and the 3rd analog to digital conversion circuit are the hearts of ion gauge metering circuit; Because in measurement, the positive ion stream that the ionization gauge collector is collected is very faint, after amplifying through amplifier; Change signal through A/D, and signal is sent into single-chip microcomputer.Transmitter current stable is through changing the size of thyristor operating angle, and then changes that the filament heating current realizes.When transmitter current changed, the voltage drop of resistance changed on the transmitter current stabilizing circuit, changed the silicon controlled conduction angle through pulse transformer T1, thereby realized the stable of transmitter current.
Said first analog to digital conversion circuit, said second analog to digital conversion circuit and the 3rd analog to digital conversion circuit all adopt V/F conversion chip LM331 (U3), convert the voltage signal of Pirani gauge to digital signal and send into single-chip microcomputer.Said single-chip microcomputer adopts STC89C52, is 8 bit CPUs, parallel I/O mouth 16 lines; 3 16 bit timing devices; Chip integration becomes RAM that 512 bytes are arranged, because the parallel I/O mouth of this sheet uses inadequately, has therefore just expanded the programmable parallel interface chip 8255 of a slice again; 8255 have 38 bit parallel mouths, can be used for transmission control and and upper machine communication with display.In this instrument, individual resistors instrumentation amount unit and duplex measurement unit are controlled respectively through two single-chip microcomputer 89C52, have increased the anti-jamming capacity when measuring.
It should be noted last that above embodiment is only unrestricted in order to the technical scheme of explanation the utility model.Although the utility model is specified with reference to embodiment; Those of ordinary skill in the art is to be understood that; The technical scheme of the utility model is made amendment or is equal to replacement; The spirit and the scope that do not break away from the utility model technical scheme, it all should be encompassed in the middle of the claim scope of the utility model.
Claims (5)
1. two resistance single ionization compound vacuum gauge; Comprise power circuit, resistance vacuum gauge circuit, ion gauge circuit, single-chip microcomputer and driving display circuit; It is characterized in that: said resistance vacuum gauge circuit comprises the first resistance vacuum gauge circuit and the second resistance vacuum gauge circuit, and the said first resistance vacuum gauge circuit is individual resistors instrumentation amount unit; Said second resistance vacuum gauge circuit and ion gauge combination of circuits are the compound vacuum gauge measuring unit, and the signal output part of the said first resistance vacuum gauge circuit, the second resistance vacuum gauge circuit and ion gauge circuit all is connected with the signal input part of said single-chip microcomputer.
2. according to claim 1 pair of resistance single ionization compound vacuum gauge; It is characterized in that: the said first resistance vacuum gauge circuit comprises that first resistance is regulated, the first measurement bridge circuit, first is adjusted the amplifying circuit and first analog to digital conversion circuit; The signal output part that said first resistance is regulated is connected with the signal input part of said first metering circuit; The signal input part of the signal output part of the said first measurement bridge circuit and the said first adjustment circuit is connected; The signal output part of the said first adjustment circuit is connected with the signal input part of said first analog to digital conversion circuit, and the signal output part of said first analog to digital conversion circuit is connected with the signal input part of said single-chip microcomputer.
3. according to claim 1 pair of resistance single ionization compound vacuum gauge; It is characterized in that: the said second resistance vacuum gauge circuit comprises that second resistance is regulated, the second measurement bridge circuit, second amplifies adjustment circuit, analogue quantity output circuit and second analog to digital conversion circuit; The signal input part that the signal output part that said second resistance is regulated and said second is measured bridge circuit is connected; The signal input part that the signal output part of the said second measurement bridge circuit and said second amplifies the adjustment circuit is connected; Said second amplifies the signal output part of adjusting circuit is connected with the signal input part of said analogue quantity output circuit and the signal input part of said second analog to digital conversion circuit respectively, and the signal output part of said second analog to digital conversion circuit is connected with the signal input part of said single-chip microcomputer.
4. according to claim 1 pair of resistance single ionization compound vacuum gauge; It is characterized in that: said ion gauge circuit comprises ionization gauge, ion flow amplifying circuit, the 3rd analog to digital conversion circuit and transmitter current stabilizing circuit; The intensifying ring of said ionization gauge is connected with the output terminal of said high-voltage power supply; The collector of said ionization gauge is connected with the signal input part of said ion flow amplifying circuit; The filament of said ionization gauge is connected with the signal input part of said transmitter current stabilizing circuit; The signal input part of the signal output part of said ion flow amplifying circuit and said the 3rd analog to digital conversion circuit, the signal output part of said the 3rd analog to digital conversion circuit is connected with the signal input part of said single-chip microcomputer.
5. according to claim 1 pair of resistance single ionization compound vacuum gauge is characterized in that: said first analog to digital conversion circuit, said second analog to digital conversion circuit and the 3rd analog to digital conversion circuit all adopt V/F conversion chip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220076557XU CN202547862U (en) | 2012-03-02 | 2012-03-02 | Double-resistance single-ionization compound vacuum gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220076557XU CN202547862U (en) | 2012-03-02 | 2012-03-02 | Double-resistance single-ionization compound vacuum gauge |
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| Publication Number | Publication Date |
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| CN202547862U true CN202547862U (en) | 2012-11-21 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201220076557XU Expired - Fee Related CN202547862U (en) | 2012-03-02 | 2012-03-02 | Double-resistance single-ionization compound vacuum gauge |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103190999A (en) * | 2012-01-09 | 2013-07-10 | 上海理工大学 | Rehabilitation training device for range of upper-limb joint motion |
| CN103311085A (en) * | 2013-06-27 | 2013-09-18 | 成都国光电气股份有限公司 | Miniature composite vacuum gauge tube |
| CN105489465A (en) * | 2016-01-14 | 2016-04-13 | 成都国光电气股份有限公司 | Vacuum gauge |
| CN105699007A (en) * | 2016-03-08 | 2016-06-22 | 成都国光电气股份有限公司 | Resistance vacuum transmitter |
| CN106372313A (en) * | 2016-08-31 | 2017-02-01 | 兰州空间技术物理研究所 | Production method of extreme-high vacuum ionization gauge |
| CN107958830A (en) * | 2017-12-04 | 2018-04-24 | 成都国光电气股份有限公司 | A kind of octal is composite evacuated to regulate |
-
2012
- 2012-03-02 CN CN201220076557XU patent/CN202547862U/en not_active Expired - Fee Related
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103190999A (en) * | 2012-01-09 | 2013-07-10 | 上海理工大学 | Rehabilitation training device for range of upper-limb joint motion |
| CN103190999B (en) * | 2012-01-09 | 2015-02-18 | 上海理工大学 | Rehabilitation training device for range of upper-limb joint motion |
| CN103311085A (en) * | 2013-06-27 | 2013-09-18 | 成都国光电气股份有限公司 | Miniature composite vacuum gauge tube |
| CN105489465A (en) * | 2016-01-14 | 2016-04-13 | 成都国光电气股份有限公司 | Vacuum gauge |
| CN105489465B (en) * | 2016-01-14 | 2017-07-04 | 成都国光电气股份有限公司 | A kind of vacuum gauge |
| CN105699007A (en) * | 2016-03-08 | 2016-06-22 | 成都国光电气股份有限公司 | Resistance vacuum transmitter |
| CN105699007B (en) * | 2016-03-08 | 2019-02-12 | 成都国光电气股份有限公司 | A kind of resistance vacuum transmitter |
| CN106372313A (en) * | 2016-08-31 | 2017-02-01 | 兰州空间技术物理研究所 | Production method of extreme-high vacuum ionization gauge |
| CN106372313B (en) * | 2016-08-31 | 2019-08-23 | 兰州空间技术物理研究所 | A kind of preparation method of extremely high vacuum ionization gauge |
| CN107958830A (en) * | 2017-12-04 | 2018-04-24 | 成都国光电气股份有限公司 | A kind of octal is composite evacuated to regulate |
| CN107958830B (en) * | 2017-12-04 | 2023-07-25 | 成都国光电气股份有限公司 | Eight-foot composite vacuum gauge |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121121 Termination date: 20200302 |
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| CF01 | Termination of patent right due to non-payment of annual fee |