CN105489465A - Vacuum gauge - Google Patents
Vacuum gauge Download PDFInfo
- Publication number
- CN105489465A CN105489465A CN201610022654.3A CN201610022654A CN105489465A CN 105489465 A CN105489465 A CN 105489465A CN 201610022654 A CN201610022654 A CN 201610022654A CN 105489465 A CN105489465 A CN 105489465A
- Authority
- CN
- China
- Prior art keywords
- vacuum gauge
- flange
- assembly
- gauge
- edge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
- H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes
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- Measuring Fluid Pressure (AREA)
Abstract
The invention discloses a vacuum gauge which comprises the components of a resistance gauge, a cold cathode ionization gauge, a permanent magnetic assembly placed outside the vacuum gauge, and a high-voltage socket which is used for connecting vacuum measuring equipment with the vacuum gauge. The vacuum gauge further comprises a flange assembly and an anode assembly. The flange assembly comprises a blade flange and a tube which is welded on the blade flange. The tube is provided with a chamber for mounting the resistance gauge and an anode assembly. The anode assembly comprises a pressure plate, a metalized ceramic assembly and an anode pole which is welded on the ceramic assembly. The pressure plate is provided with a welding trough for welding the ceramic assembly and a chamber for mounting the resistance gauge and the ceramic assembly. The measuring range of the vacuum gauge can reach 10<5>Pa-10<-7>Pa, thereby expanding the upper measurement limit of the cold cathode ionization gauge.
Description
Technical field
The present invention relates to a kind of vacuum gauge, particularly relate to a kind of composite evacuatedly to regulate.
Background technology
In vacuum measurement, resistance is regulated and regulated with cold cathode ionization is all use vacuum measurement widely to regulate at present.Resistance is regulated because its heated filament is through special process process, the advantage such as have pressure measurement wide ranges, stable performance, consistency is good, reflecting time is fast, the life-span is long; It is also current widely used a kind of high vacuum ionization gauge that cold cathode ionization is regulated, use in the fields such as device manufacture, vacuum coating and vacuum metallurgy are done, but, it is limited that cold cathode ionization regulates the measuring range of its measuring range when low vacuum, along with vacuum test application is more and more extensive, resistance being regulated the vacuum gauge carrying out compound of regulating with cold cathode ionization is also problem demanding prompt solution.
Summary of the invention
The invention provides a kind of vacuum gauge, described vacuum gauge is that resistance is regulated regulate with cold cathode ionization composite evacuated and regulated, can expand the measuring range of the low vacuum that cold cathode ionization is regulated, meet the needs of height vacuum measurement ranges test, technical solutions according to the invention are simultaneously:
A kind of vacuum gauge, described vacuum gauge comprises that resistance is regulated, cold cathode ionization is regulated, be placed in permanent-magnet component outside vacuum gauge, in order to connect the high-tension terminal of vacuum measurement equipment and vacuum gauge, described vacuum gauge also comprises flange assembly, anode assemblies, and described anode assemblies is fixedly connected with flange assembly; Described flange assembly comprises edge of a knife flange and is welded in the body on edge of a knife flange, described body is provided with installation resistance and regulates the chamber with anode assemblies, described edge of a knife flange is provided with solder bath, and described body is placed in the solder bath of edge of a knife flange and is welded and fixed with edge of a knife flange; The anode rod that described anode assemblies comprises pressing plate, metallized ceramic member and is welded on ceramic component, described pressing plate be provided with in order to the welding groove of welding ceramics assembly and regulate in order to install resistance, the chamber of ceramic component.
Described a kind of vacuum gauge, the junction of described anode assemblies and flange assembly is provided with welding groove, and anode assemblies and flange assembly are fixedly connected by welding.
Described a kind of vacuum gauge, the step that the chamber that the installation resistance on described pressing plate is regulated is through hole and is positioned on through hole.
Described a kind of vacuum gauge, described pressing plate is also provided with the installing hole in order to installation high-voltage socket.
Described a kind of vacuum gauge, described edge of a knife flange is CF35 flange.
The resistance of a kind of new structure adopting technical scheme of the present invention to provide is composite evacuated regulates, and its measuring range can reach 10
5p
a-10
-7p
a, expanded the measurement upper limit that cold cathode ionization is regulated.
Accompanying drawing explanation
The vacuum gauge structure chart of Fig. 1 embodiment of the present invention;
The flange front view of Fig. 2 embodiment of the present invention;
The flange vertical view of Fig. 3 embodiment of the present invention;
The body cutaway view of Fig. 4 embodiment of the present invention;
The body vertical view of Fig. 5 embodiment of the present invention;
The cutaway view of Fig. 6 embodiment of the present invention flange assembly;
The anode assemblies of Fig. 7 embodiment of the present invention;
The pressing plate front view of Fig. 8 embodiment of the present invention;
The pressing plate vertical view of Fig. 9 embodiment of the present invention
In figure, 1-resistance is regulated, 2-permanent-magnet component, 3-high-tension terminal, 4-flange assembly, 5-anode assemblies, 6-edge of a knife flange, 7-body, 8-body install Pirani gauge tube chamber room, 9-solder bath, 10-pressing plate, 11-metallized ceramic member, 12-anode rod, 13-pressing plate is installed chamber chamber that resistance regulates, 14-pressing plate being installed ceramic component, the chamber 15-body being installed anode assemblies.
Specific embodiment
Embodiment
A kind of vacuum gauge described in the embodiment of the present invention, comprise that resistance is regulated, cold cathode ionization is regulated, be placed in permanent-magnet component outside vacuum gauge, in order to connect the high-tension terminal of vacuum measurement equipment and vacuum gauge, described vacuum gauge also comprises flange assembly, anode assemblies, the junction of described anode assemblies and flange assembly is provided with welding groove, and anode assemblies and flange assembly are fixedly connected by welding; The body that described flange assembly comprises CF35 edge of a knife flange (also can select the flange of other interfaces) and is welded on CF35 edge of a knife flange, described body is provided with installation resistance and regulates the chamber with anode assemblies, described CF edge of a knife flange is provided with solder bath, and described body is placed in the solder bath of CF35 edge of a knife flange and is welded and fixed with CF35 edge of a knife flange; The anode rod that described anode assemblies comprises pressing plate, metallized ceramic member and is welded on ceramic component, described pressing plate be provided with in order to the welding groove of welding ceramics assembly and regulate in order to install resistance, the chamber of ceramic component, the chamber that installation resistance on described pressing plate is regulated is the through hole of Φ 5 and is positioned at the step of 7 × 2 on through hole, the step of described through hole is in order to place solder, resistance can be regulated is welded on pressing plate, and described pressing plate is also provided with the screw hole in order to installation high-voltage socket.
Claims (5)
1. a vacuum gauge, described vacuum gauge comprises that resistance is regulated, cold cathode ionization is regulated, be placed in permanent-magnet component outside vacuum gauge, in order to connect the high-tension terminal of vacuum measurement equipment and vacuum gauge, it is characterized in that, described vacuum gauge also comprises flange assembly, anode assemblies, and described anode assemblies is fixedly connected with flange assembly; Described flange assembly comprises edge of a knife flange and is welded in the body on edge of a knife flange, described body is provided with installation resistance and regulates the chamber with anode assemblies, described edge of a knife flange is provided with solder bath, and described body is placed in the solder bath of edge of a knife flange and is welded and fixed with edge of a knife flange; The anode rod that described anode assemblies comprises pressing plate, metallized ceramic member and is welded on ceramic component, described pressing plate be provided with in order to the welding groove of welding ceramics assembly and regulate in order to install resistance, the chamber of ceramic component.
2. a kind of vacuum gauge as claimed in claim 1, is characterized in that, the junction of described anode assemblies and flange assembly is provided with welding groove, and anode assemblies and flange assembly are fixedly connected by welding.
3. a kind of vacuum gauge as claimed in claim 1 or 2, is characterized in that, the chamber that the installation resistance on described pressing plate is regulated comprises through hole and is positioned at the step on through hole.
4. a kind of vacuum gauge as claimed in claim 3, is characterized in that, described pressing plate is also provided with the screw hole in order to installation high-voltage socket.
5. a kind of vacuum gauge as claimed in claim 4, is characterized in that, described edge of a knife flange is CF35 flange.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610022654.3A CN105489465B (en) | 2016-01-14 | 2016-01-14 | A kind of vacuum gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610022654.3A CN105489465B (en) | 2016-01-14 | 2016-01-14 | A kind of vacuum gauge |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105489465A true CN105489465A (en) | 2016-04-13 |
| CN105489465B CN105489465B (en) | 2017-07-04 |
Family
ID=55676381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610022654.3A Active CN105489465B (en) | 2016-01-14 | 2016-01-14 | A kind of vacuum gauge |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105489465B (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5568053A (en) * | 1993-04-28 | 1996-10-22 | The Fredericks Company | Ionization gauge having a non-time varying magnetic field generator of separated opposed magnets |
| US6474171B1 (en) * | 1999-03-24 | 2002-11-05 | The Boc Group Plc | Vacuum gauge |
| DE102007001444B3 (en) * | 2007-01-03 | 2008-04-30 | Otto-Von-Guericke-Universität Magdeburg | Vacuum measuring device, has cold cathode ionization manometer arranged in measuring tube by inverse magnetron type and heat conducting manometer, and including two cathodes concerning measuring tube opening of tube housing |
| US20110279127A1 (en) * | 2010-05-14 | 2011-11-17 | Canon Anelva Corporation | Cold cathode ionization vacuum gauge, vacuum processing apparatus having the same, discharge starting auxiliary electrode used for the same, and method of measuring pressure using the same |
| CN202547862U (en) * | 2012-03-02 | 2012-11-21 | 成都中科唯实仪器有限责任公司 | Double-resistance single-ionization compound vacuum gauge |
| CN103311085A (en) * | 2013-06-27 | 2013-09-18 | 成都国光电气股份有限公司 | Miniature composite vacuum gauge tube |
| US20140368210A1 (en) * | 2013-06-13 | 2014-12-18 | Canon Anelva Corporation | Cold cathode ionization vacuum gauge and inner wall protection member |
| CN205303414U (en) * | 2016-01-14 | 2016-06-08 | 成都国光电气股份有限公司 | Regulate in vacuum |
-
2016
- 2016-01-14 CN CN201610022654.3A patent/CN105489465B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5568053A (en) * | 1993-04-28 | 1996-10-22 | The Fredericks Company | Ionization gauge having a non-time varying magnetic field generator of separated opposed magnets |
| US6474171B1 (en) * | 1999-03-24 | 2002-11-05 | The Boc Group Plc | Vacuum gauge |
| DE102007001444B3 (en) * | 2007-01-03 | 2008-04-30 | Otto-Von-Guericke-Universität Magdeburg | Vacuum measuring device, has cold cathode ionization manometer arranged in measuring tube by inverse magnetron type and heat conducting manometer, and including two cathodes concerning measuring tube opening of tube housing |
| US20110279127A1 (en) * | 2010-05-14 | 2011-11-17 | Canon Anelva Corporation | Cold cathode ionization vacuum gauge, vacuum processing apparatus having the same, discharge starting auxiliary electrode used for the same, and method of measuring pressure using the same |
| CN202547862U (en) * | 2012-03-02 | 2012-11-21 | 成都中科唯实仪器有限责任公司 | Double-resistance single-ionization compound vacuum gauge |
| US20140368210A1 (en) * | 2013-06-13 | 2014-12-18 | Canon Anelva Corporation | Cold cathode ionization vacuum gauge and inner wall protection member |
| CN103311085A (en) * | 2013-06-27 | 2013-09-18 | 成都国光电气股份有限公司 | Miniature composite vacuum gauge tube |
| CN205303414U (en) * | 2016-01-14 | 2016-06-08 | 成都国光电气股份有限公司 | Regulate in vacuum |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105489465B (en) | 2017-07-04 |
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| GR01 | Patent grant |