CN205303414U - Regulate in vacuum - Google Patents
Regulate in vacuum Download PDFInfo
- Publication number
- CN205303414U CN205303414U CN201620034299.7U CN201620034299U CN205303414U CN 205303414 U CN205303414 U CN 205303414U CN 201620034299 U CN201620034299 U CN 201620034299U CN 205303414 U CN205303414 U CN 205303414U
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- China
- Prior art keywords
- flange
- vacuum
- vacuum gauge
- regulate
- edge
- Prior art date
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- Withdrawn - After Issue
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Abstract
The utility model discloses a regulate in vacuum, regulate in vacuum includes that resistance is regulated, the penning gauge pipe, arrange in the regulate in vacuum outside magnetic component forever, be used for connecting vacuum measurement equipment and regulate in vacuum's high -pressure socket, regulate in vacuum still includes flange assembly, positive pole subassembly, flange assembly includes edge of a knife flange and welds the body on edge of a knife flange, the body be equipped with installation resistance regulate with the cavity of positive pole subassembly, the positive pole subassembly includes clamp plate, the ceramic member that has metallized and welds the positive pole pole on ceramic assembly, be equipped with on the clamp plate and be used for welding ceramic assembly's welding groove and be used for installing that resistance is regulated, ceramic assembly's cavity, adopt its measuring range of regulate in vacuum can reach 105Pa -10 -7Pa, has extended the measurement upper limit of penning gauge pipe.
Description
Technical field
This utility model relates to a kind of vacuum gauge, particularly relates to a kind of composite evacuated regulate.
Background technology
In vacuum measurement, resistance is regulated and regulated with cold cathode ionization is all that currently used vacuum measurement widely is regulated. Resistance is regulated owing to its heated filament processes through special process, has pressure measurement wide ranges, stable performance, an advantage such as concordance is good, reflecting time is fast, life-span length; It is also current widely used a kind of fine vacuum ionization gauge that cold cathode ionization is regulated, use in the fields such as device manufacture, vacuum coating and vacuum metallurgy are made, but, cold cathode ionization is regulated its measurement scope measurement when coarse vacuum and is limited in scope, along with vacuum test application is more and more extensive, it is also problem demanding prompt solution that resistance is regulated the vacuum gauge carrying out compound regulated with cold cathode ionization.
Utility model content
This utility model provides a kind of vacuum gauge, described vacuum gauge is that resistance is regulated regulate with cold cathode ionization composite evacuated and regulated, the measurement scope of the coarse vacuum that cold cathode ionization is regulated can be expanded, meeting the needs of height vacuum measurement ranges test, technical scheme described in the utility model is simultaneously:
A kind of vacuum gauge, described vacuum gauge includes that resistance is regulated, cold cathode ionization is regulated, is placed in the permanent-magnet component outside vacuum gauge, in order to connect the high-tension terminal of vacuum measurement equipment and vacuum gauge, described vacuum gauge also includes flange assembly, anode assemblies, and described anode assemblies is fixing with flange assembly to be connected; Described flange assembly includes edge of a knife flange and the body being welded on edge of a knife flange, described body is provided with installation resistance and regulates the chamber with anode assemblies, described edge of a knife flange is provided with solder bath, and described body is placed in the solder bath of edge of a knife flange and is welded and fixed with edge of a knife flange; Described anode assemblies includes pressing plate, metallized ceramic member and the anode rod being welded on ceramic component, described pressing plate be provided with the welding groove in order to welding ceramics assembly and in order to install resistance and regulate, the chamber of ceramic component.
Described a kind of vacuum gauge, the junction of described anode assemblies and flange assembly is provided with welding groove, anode assemblies and flange assembly and is fixedly connected by welding.
Described a kind of vacuum gauge, the chamber that the installation resistance on described pressing plate is regulated is through hole and the step being positioned on through hole.
Described a kind of vacuum gauge, described pressing plate is additionally provided with to install the installing hole of high-tension terminal.
Described a kind of vacuum gauge, described edge of a knife flange is CF35 flange.
The resistance of a kind of new structure that employing the technical solution of the utility model provides is composite evacuated regulates, and its measurement scope can reach 105Pa-10-7Pa, expanded the measurement upper limit that cold cathode ionization is regulated.
Accompanying drawing explanation
The vacuum gauge structure chart of Fig. 1 this utility model embodiment;
The flange front view of Fig. 2 this utility model embodiment;
The flange top view of Fig. 3 this utility model embodiment;
The body sectional view of Fig. 4 this utility model embodiment;
The body top view of Fig. 5 this utility model embodiment;
The sectional view of Fig. 6 this utility model embodiment flange assembly;
The anode assemblies of Fig. 7 this utility model embodiment;
The pressing plate front view of Fig. 8 this utility model embodiment;
The pressing plate top view of Fig. 9 this utility model embodiment
In figure 1-resistance regulate, 2-permanent-magnet component, 3 high-tension terminals, 4 flange assemblies, 5 anode assemblies, 6 edge of a knife flanges, 7 bodys, 8 bodys install Pirani gauge tube chamber room, 9 solder baths, 10 pressing plates, 11 metallized ceramic members, 12 anode rods, 13 pressing plates are installed resistance and regulate chamber, the chamber installing anode assemblies on the chamber of ceramic component, 15 bodys installed by 14 pressing plates.
Specific embodiment
Embodiment
A kind of vacuum gauge described in this utility model embodiment, regulate including resistance, cold cathode ionization is regulated, be placed in the permanent-magnet component outside vacuum gauge, in order to connect the high-tension terminal of vacuum measurement equipment and vacuum gauge, described vacuum gauge also includes flange assembly, anode assemblies, the junction of described anode assemblies and flange assembly is provided with welding groove, anode assemblies and flange assembly and is fixedly connected by welding; Described flange assembly includes CF35 edge of a knife flange (also can be selected for the flange of other interfaces) and the body being welded on CF35 edge of a knife flange, described body is provided with installation resistance and regulates the chamber with anode assemblies, described CF edge of a knife flange is provided with solder bath, and described body is placed in the solder bath of CF35 edge of a knife flange and is welded and fixed with CF35 edge of a knife flange; Described anode assemblies includes pressing plate, metallized ceramic member and the anode rod being welded on ceramic component, described pressing plate be provided with the welding groove in order to welding ceramics assembly and in order to install resistance and regulate, the chamber of ceramic component, on described pressing plate install the through hole that chamber is �� 5 regulated of resistance and be positioned on through hole 7 �� 2 step, the step of described through hole is in order to place solder, can by Pirani gauge sealing of tube on pressing plate, described pressing plate is additionally provided with to install the screw hole of high-tension terminal.
Claims (5)
1. a vacuum gauge, described vacuum gauge includes that resistance is regulated, cold cathode ionization is regulated, is placed in the permanent-magnet component outside vacuum gauge, in order to connect the high-tension terminal of vacuum measurement equipment and vacuum gauge, it is characterized in that, described vacuum gauge also includes flange assembly, anode assemblies, and described anode assemblies is fixing with flange assembly to be connected; Described flange assembly includes edge of a knife flange and the body being welded on edge of a knife flange, described body is provided with installation resistance and regulates the chamber with anode assemblies, described edge of a knife flange is provided with solder bath, and described body is placed in the solder bath of edge of a knife flange and is welded and fixed with edge of a knife flange; Described anode assemblies includes pressing plate, metallized ceramic member and the anode rod being welded on ceramic component, described pressing plate be provided with the welding groove in order to welding ceramics assembly and in order to install resistance and regulate, the chamber of ceramic component.
2. a kind of vacuum gauge as claimed in claim 1, it is characterised in that the junction of described anode assemblies and flange assembly is provided with welding groove, anode assemblies and flange assembly and is fixedly connected by welding.
3. a kind of vacuum gauge as claimed in claim 1 or 2, it is characterised in that the chamber that the installation resistance on described pressing plate is regulated includes through hole and the step being positioned on through hole.
4. a kind of vacuum gauge as claimed in claim 3, it is characterised in that described pressing plate is additionally provided with to install the screw hole of high-tension terminal.
5. a kind of vacuum gauge as claimed in claim 4, it is characterised in that described edge of a knife flange is CF35 flange.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620034299.7U CN205303414U (en) | 2016-01-14 | 2016-01-14 | Regulate in vacuum |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620034299.7U CN205303414U (en) | 2016-01-14 | 2016-01-14 | Regulate in vacuum |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205303414U true CN205303414U (en) | 2016-06-08 |
Family
ID=56475285
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620034299.7U Withdrawn - After Issue CN205303414U (en) | 2016-01-14 | 2016-01-14 | Regulate in vacuum |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205303414U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105489465A (en) * | 2016-01-14 | 2016-04-13 | 成都国光电气股份有限公司 | Vacuum gauge |
-
2016
- 2016-01-14 CN CN201620034299.7U patent/CN205303414U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105489465A (en) * | 2016-01-14 | 2016-04-13 | 成都国光电气股份有限公司 | Vacuum gauge |
| CN105489465B (en) * | 2016-01-14 | 2017-07-04 | 成都国光电气股份有限公司 | A kind of vacuum gauge |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20160608 Effective date of abandoning: 20170704 |
|
| AV01 | Patent right actively abandoned |