CN107940904B - A kind of vacuum drying chamber and Minton dryer - Google Patents
A kind of vacuum drying chamber and Minton dryer Download PDFInfo
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- CN107940904B CN107940904B CN201711126684.XA CN201711126684A CN107940904B CN 107940904 B CN107940904 B CN 107940904B CN 201711126684 A CN201711126684 A CN 201711126684A CN 107940904 B CN107940904 B CN 107940904B
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- cold plate
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B5/00—Drying solid materials or objects by processes not involving the application of heat
- F26B5/04—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum
- F26B5/06—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum the process involving freezing
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
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- General Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
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Abstract
The embodiment of the present invention provides a kind of vacuum drying chamber and Minton dryer, it is related to organic solution film forming technical field, it is able to solve the evaporation rate for judging and adjusting organic solvent in substrate layer in existing Minton dryer according to detection environment vacuum degree, the poor problem of the film thickness homogeneity of the substrate layer after leading to drying.The microscope carrier and cold plate being oppositely arranged including vacuum chamber and in vacuum chamber, microscope carrier is for carrying substrate to be dried, the plate face temperature of cold plate is lower than the table top temperature of microscope carrier, the film surface to be dried of substrate to be dried is additionally provided with solvent concentration detector towards cold plate in vacuum chamber.
Description
Technical field
The present invention relates to organic solution film technique field more particularly to a kind of vacuum drying chamber and vacuum drying dresses
It sets.
Background technique
With the development of display technology with progress, for existing display device, Organic Light Emitting Diode
(Organic Light Emitting Diode, OLED) is used as a kind of current mode luminescent device, because it is relative to TFT-LCD
Have certainly for (hin Film Transistor Liquid Crystal Display, thin-film transistor LCD device)
Shine, quick response, wide viewing angle and high brightness, it is beautiful in colour, volume is frivolous the advantages that, be applied to height more and more
In performance display field.
For large-sized OLED display, realize that OLED colour is aobvious using the mode of white light OLED cooperation color membrane substrates
The mode shown, it is lower for the utilization rate of material, and power consumption is larger the problems such as so that people increasingly tend to beat using ink-jet
It prints (ink jet printing, IJP) film preparing technology and makes OLED.In the manufacturing process of printing OLED, for organic material
The wet film of material carries out in vacuum drying technical process, and the vacuum drying effect of film layer is the important of decision film thickness uniformity
Link.Vacuum drying also known as parsing-desiccation, are that material is placed under condition of negative pressure, by heating the boiling reached under negative pressure state
It puts or by cooling so that by molten point come a kind of drying mode of dried material after material solidification.
Drying for the organic solvent in wet film on substrate, it is also desirable to it is carried out under negative pressure state, under negative pressure state,
The fusing point and boiling point of organic solvent in film layer can all be reduced with the raising of environment vacuum degree, so that organic solvent energy
It is enough to be separated faster by being evaporated in film layer.The film thickness uniformity of organic film after making vacuum drying is higher, needs organic
Solvent is more balanced in evaporation separation process evaporation rate, more demanding for the variation of the vacuum degree of environment, it is desirable to be able to root
The vacuum pull down rate in Minton dryer is adjusted according to the evaporation rate of organic solvent.It is in vacuum in the prior art
Vacuum level detector is set in drying device, the environment vacuum degree in Minton dryer is examined by vacuum level detector
Survey, still, due to vacuum level detector be environment vacuum degree is detected, and in film layer the boil-up rate of organic solvent also by
To the influence of the factors such as environment temperature, only pass through the detection of environment vacuum degree, it is difficult to the real-time boil-up rate of organic solvent into
Row is accurately estimated and is adjusted, and the film thickness uniformity so as to cause the organic film after drying process is poor, and then is influenced entire
The display effect of OLED display.
Summary of the invention
The embodiment of the present invention provides a kind of vacuum drying chamber and Minton dryer, is able to solve existing vacuum drying
The evaporation rate for judging and adjusting organic solvent in substrate layer in device according to detection environment vacuum degree, after leading to drying
The poor problem of the film thickness homogeneity of substrate layer.
In order to achieve the above objectives, the embodiment of the present invention adopts the following technical scheme that
The one side of the embodiment of the present invention, provides a kind of vacuum drying chamber, including vacuum chamber and in vacuum chamber
The microscope carrier and cold plate being inside oppositely arranged, microscope carrier are lower than the platform of microscope carrier for carrying substrate to be dried, the plate face temperature of cold plate
Face temperature, the film surface to be dried of substrate to be dried also set up organic solvent concentration inspection towards cold plate in vacuum chamber
Survey device.
Preferably, organic solvent concentration detector is arranged between microscope carrier and cold plate.
Further, organic solvent concentration detector is provided with multiple, and multiple organic solvent concentration detectors are uniformly arranged
Between microscope carrier and cold plate.
Preferably, the temperature difference between the plate face temperature of cold plate and the table top temperature of microscope carrier is 10-20 DEG C.
Further, the condensation plate surface is provided with diversion component.
Further, the vacuum drying chamber of the embodiment of the present invention further includes being arranged in the indoor support plate of vacuum chamber, In
Support rod that can be flexible along the direction perpendicular to support plate plate face is provided in support plate, it is fixed between support rod and microscope carrier to connect
It connects, for being supported and moving to microscope carrier.
The another aspect of the embodiment of the present invention provides a kind of Minton dryer, the vacuum drying including any of the above-described
Chamber, further includes vacuum withdraw device, and the bleeding point of vacuum withdraw device is connected to vacuum chamber.
Further, the Minton dryer of the embodiment of the present invention further includes controller, controller and organic solvent concentration
Detector electrical connection, and be electrically connected with vacuum withdraw device, for being controlled according to the testing result of organic solvent concentration detector
The vacuum pull down rate of vacuum withdraw device.
Further, the Minton dryer of the embodiment of the present invention further includes the heater connecting with microscope carrier, controller with
Heater electrical connection, to control heating of the heater to microscope carrier according to the testing result of organic solvent concentration detector.And/or
Minton dryer further includes the thermosistor connecting with cold plate, and controller is electrically connected with thermosistor, with dense according to organic solvent
The testing result control thermosistor for spending detector adjusts the temperature of cold plate.
Preferably, vacuum withdraw device includes level-one vacuum pump and secondary vacuum aspiration pump.Wherein, level-one vacuum is taken out
Air pump vacuum degree is 10-3Support, secondary vacuum aspiration pump vacuum degree are 10-5Support.
The embodiment of the present invention provides a kind of vacuum drying chamber and Minton dryer, including vacuum chamber and in vacuum
The microscope carrier and cold plate being oppositely arranged in chamber, microscope carrier are lower than microscope carrier for carrying substrate to be dried, the plate face temperature of cold plate
Table top temperature, it is dense to be additionally provided with solvent towards cold plate the film surface to be dried of substrate to be dried in vacuum chamber
Spend detector.By the way that the indoor organic solvent concentration detector of vacuum chamber is arranged in by the film layer to be dried on substrate to be dried
In the organic solvent that evaporates detected in the indoor concentration of vacuum chamber, it is corresponding according to the variation tendency of organic solvent concentration
The temperature difference between the vacuum pull down rate and cold plate and microscope carrier of vacuum withdraw device is adjusted, to adjust the steaming of organic solvent
Send out rate, to improve the evaporation rate uniformity of organic solvent in the film layer to be dried on substrate to be dried, and then improve to
The film thickness homogeneity of film layer to be dried on dry substrate.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
It obtains other drawings based on these drawings.
Fig. 1 is one of the structural schematic diagram of the vacuum drying chamber of the embodiment of the present invention；
Fig. 2 is the second structural representation of the vacuum drying chamber of the embodiment of the present invention；
Fig. 3 is the A-A cross-sectional view of Fig. 2；
Fig. 4 is the structural schematic diagram of cold plate；
Fig. 5 is the third structural representation of the vacuum drying chamber of the embodiment of the present invention；
Fig. 6 is one of the structural schematic diagram of Minton dryer of the embodiment of the present invention；
Fig. 7 is the second structural representation of the Minton dryer of the embodiment of the present invention；
Fig. 8 is the third structural representation of the Minton dryer of the embodiment of the present invention.
Appended drawing reference:
10- vacuum chamber；20- microscope carrier；21- substrate to be dried；22- film layer to be dried；23- heater；30- cold plate；
31- thermosistor；40- organic solvent concentration detector；50- support plate；60- is dried in vacuo chamber；70- vacuum withdraw device；
701- bleeding point；80- controller；32- diversion component.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
The embodiment of the present invention provides a kind of vacuum drying chamber, as shown in Figure 1, including vacuum chamber 10 and in vacuum chamber
The microscope carrier 20 and cold plate 30 being oppositely arranged in room 10, microscope carrier 20 is for carrying substrate 21 to be dried, the plate face temperature of cold plate 30
Degree is lower than the table top temperature of microscope carrier, and 22 surface of film layer to be dried of substrate 21 to be dried is towards cold plate 30, in vacuum chamber 10
Inside it is additionally provided with solvent concentration detector 40.
It should be noted that first, the vacuum evaporation of organic solvent, the vacuum of evaporation rate and local environment in film layer
It spends directly related.As the vacuum degree of vacuum environment improves, the fusing point and boiling point of organic solvent can all be decreased, to improve
The evaporation rate of organic solvent, organic solvent in the form of a vapor in vacuum chamber 10, are made by steaming in film layer 22 to be dried
The organic solvent concentration obtained in vacuum chamber 10 increases, since the plate face temperature of cold plate 30 is lower than the table top temperature of microscope carrier 20,
Gaseous organic solvent can be condensed into liquid on cold plate 30, and the condensation of gaseous state organic solvent can make the dense of gaseous state organic solvent
Degree reduces, meanwhile, gas is extracted to reduce the device of the air pressure in vacuum chamber 10 to vacuum chamber 10, is extracting the same of gas
When, it can also take the gaseous state organic solvent for including in gas away.Therefore, gas during evaporation drying, in vacuum chamber 10
The concentration of state organic solvent is the numerical value of variation.
Second, gas extraction rate is too fast or too slow in vacuum chamber 10, is all easy so that the wet film that inkjet printing is formed
Lead to the uneven thickness of film layer since the evaporation rate at position each on film surface is unstable in evaporation drying film forming procedure
It is even, and then influence the subsequent manufacturing process of film layer.Under normal conditions, the gas extraction needs in vacuum chamber 10 are maintained at
One rule of thumb or other modes determine gas extraction speed range in, it is to be dried in this gas extraction speed range
Organic solvent in film layer 22 first evaporates early period at relatively slow speeds, and the concentration of the organic solvent in vacuum chamber 10 is gradually
It increases, with the raising of vacuum degree, the concentration of organic solvent gradually rises and reaches saturated vapour pressure and maintains a period
Afterwards, with gaseous organic solvent on cold plate 30 condensation and gaseous organic solvent with the gas in vacuum chamber 10
Detach, the concentration of gaseous state organic solvent is gradually reduced again, in this way formed a coherent change curve.But due to organic molten
The evaporation rate of agent also suffers from the influence of other factors, therefore, it is necessary to according to organic solvent concentration detector 40 to vacuum chamber
The detection numerical value of organic solvent concentration in room 10 carries out feedback regulation to the rate of vacuum drawn during evaporation drying.
Third, as shown in Figure 1, carrying substrate 21 to be dried on microscope carrier 20, the table top temperature of microscope carrier 20 is transferred to be dried
On substrate 21, it is therefore contemplated that the temperature of substrate to be dried 21 is identical or approximately uniform as the temperature of microscope carrier 20.Base to be dried
Towards cold plate 30, the plate face temperature of cold plate 30 is lower than the table top temperature of microscope carrier 20 on 22 surface of film layer to be dried of plate 21, this
Sample one can be condensed into liquid after encountering low temperature on cold plate 30 by the organic solvent steamed in film layer 22 to be dried, thus
It is discharged after water conservancy diversion by other means.
4th, in the vacuum drying chamber of the embodiment of the present invention, for the concrete shape of organic solvent concentration detector 40
Without limitation with structure, as long as can be detected to concentration of the corresponding one or more organic solvents in gas.
For example, being detected based on concentration of the photo-ionisation principle to volatile gaseous organic matter.Pass through ultraviolet light first for gas to be detected
Body bombardment dissociates into ionic state, and the organic solvent molecule in gas dissociates into positively charged ion and electronegative electronics, and
It hits to form ionic current to two-plate respectively under the electric field action for the pole plate that polarizes, passes through the detection of the size to the ionic current
The concentration of organic solvent can be obtained.Moreover, after sensing, ion can be complex as gaseous organic solvent molecule again, it will not
The process of vacuum drying for treating dried film 22 impacts.
5th, in the vacuum drying chamber of the embodiment of the present invention, for organic solvent concentration detector 40 in vacuum chamber
Fixed setting mode in 10 is not specifically limited, and organic solvent concentration detector 40 and vacuum chamber are also not shown in Fig. 1
Fixed form between 10 side walls, those skilled in the art are not damaging organic solvent concentration detector 40 itself and are not influencing
Under the premise of the detection numerical value of organic solvent concentration detector 40, various connection types can be used, organic solvent concentration is detected
Device 40 is fixedly connected.
The embodiment of the present invention provides a kind of vacuum drying chamber, including vacuum chamber and is oppositely arranged in vacuum chamber
Microscope carrier and cold plate, for microscope carrier for carrying substrate to be dried, the plate face temperature of cold plate is lower than the table top temperature of microscope carrier, to dry
The film surface to be dried of dry substrate is additionally provided with solvent concentration detector towards cold plate in vacuum chamber.By setting
It sets in the indoor organic solvent concentration detector of vacuum chamber to organic by being evaporated in the film layer to be dried on substrate to be dried
Solvent is detected in the indoor concentration of vacuum chamber, corresponding to adjust vacuum drawn dress according to the variation tendency of organic solvent concentration
The temperature difference between vacuum pull down rate and cold plate and microscope carrier set, to adjust the evaporation rate of organic solvent, to mention
The evaporation rate uniformity of organic solvent in film layer to be dried on high substrate to be dried, and then improve on substrate to be dried to dry
The film thickness homogeneity of dry film layer.
Preferably, as shown in Figure 1, organic solvent concentration detector 40 is arranged between microscope carrier 20 and cold plate 30.
So, as shown in Figure 1, organic solvent concentration detector 40 can be directly between microscope carrier 20 and cold plate 30
The concentration of organic solvent detected.Due under normal conditions, certain vacuum degree being realized to vacuum chamber 10, need pair
Gas in vacuum chamber 10 is extracted, for example, it is right that bleeding point is arranged on vacuum chamber 10 using devices such as aspiration pumps
Gas in vacuum chamber 10 is extracted, due to causing the air in vacuum chamber 10 to flow when gas extraction, in vacuum chamber
It this may result in the dense of the concentration value of the organic solvent at the bleeding point position and the organic solvent at other positions in room 10
Angle value generates different, therefore, in order to reduce concentration values that organic solvent concentration detector 40 detects by vacuum chamber
The influence of other factors in room 10, the concentration values for enabling organic solvent concentration detector 40 to detect really reflect organic
Solvent by steaming situation in film layer 22 to be dried, by the setting of organic solvent concentration detector 40 microscope carrier 20 and cold plate 30 it
Between more preferably.
Further, as shown in Fig. 2, organic solvent concentration detector 40 be provided with it is multiple, as shown in figure 3, multiple organic
Solvent strength detector 40 is uniformly arranged between microscope carrier 20 and cold plate 30.
As shown in Fig. 2, in order to treat the organic solvent on dry substrate 21 at each position of film layer 22 to be dried
Boil-up rate is directly reflected, it is preferred that multiple organic solvent concentration detectors 40 are provided in vacuum chamber 10, and
Multiple organic solvent concentration detectors 40 are uniformly arranged between microscope carrier 20 and cold plate 30, exemplary, as shown in figure 3, right
Organic solvent concentration detector 40 is respectively set in the center and periphery for answering film layer 22 to be dried, each organic solvent is dense
Degree detector 40 respectively individually detects the concentration of the organic solvent at its described position, according to each organic solvent concentration
The numerical value that detector 40 detects, it will be able to realize the inspection for treating the organic solvent boil-up rate in dried film 22 at each position
It surveys.
It should be noted that in the embodiment of the present invention, setting quantity for organic solvent concentration detector 40 and set
Seated position is not specifically limited, as shown in Figure 3 only a kind of exemplary set-up mode, and those skilled in the art can be according to reality
Production and design need, and organic solvent concentration detector 40 is specifically arranged.It is located in addition, being not shown in Fig. 3 to dry
The fixed form of the organic solvent concentration detector 40 of dry 22 center position of film layer, it is exemplary, it can be by vacuum chamber
Setting horizontally extends into the strut between microscope carrier 20 and cold plate 30 on 10 side walls, and organic solvent concentration detector 40 is fixed on branch
Mode on bar is fixed, and this mode can reduce detection of the fixing piece to organic solvent concentration detector 40 as far as possible
It is influenced caused by numerical value.
Preferably, the temperature difference between the plate face temperature of cold plate 30 and the table top temperature of microscope carrier 20 is 10-20 DEG C.
The size of temperature difference between the plate face temperature of cold plate 30 and the table top temperature of microscope carrier 20 and the gaseous state evaporated
The condensing rate of organic solvent is directly proportional, and the rate of setting of the gaseous state organic solvent evaporated is to the gas in vacuum chamber 10
State organic solvent concentration has an impact.Temperature difference setting between the plate face temperature of cold plate 30 and the table top temperature of microscope carrier 20 is existed
Between 10-20 DEG C, the condensing rate of gaseous organic solvent is enabled to maintain in preferable range.If the plate of cold plate 30
Temperature difference between face temperature and the table top temperature of microscope carrier 20 is less than 10 DEG C, then gaseous organic solvent is not easy on cold plate 30
Condensation, then accelerate the time that organic solvent reaches saturated vapour pressure；If the table top of the plate face temperature of cold plate 30 and microscope carrier 20
Temperature difference between temperature is greater than 20 DEG C, then rate of setting of the gaseous organic solvent on cold plate 30 is too fast, cold plate 30
The liquid organic solvent of upper condensation easily drops to 22 surface of film layer to be dried not in time due to water conservancy diversion, leads to film layer to be dried
The thicknesses of layers on 22 surfaces is uneven.
It should be noted that be kept fixed model between the plate face temperature of cold plate 30 and the table top temperature of microscope carrier 20
The temperature difference enclosed at least needs to be provided with the thermoregulation part that can adjust temperature on cold plate 30, and/or is arranged on microscope carrier 20
Warming member.For the specific manifestation shape of the temperature regulation mechanism of cold plate 30 and temperature controlling unit in the embodiment of the present invention
Formula is not specifically limited, likewise, the specific manifestation form of heating mode and the component that heats up to microscope carrier 20 does not do specific limit
It is fixed, enable cold plate 30 or 20 surface of microscope carrier more uniformly to reach and keep required temperature as long as can heat or cool down
Degree.Exemplary, cold plate 30 can be controlling temperature in such a way that coolant liquid is circulated on its surface, by coolant liquid
It heats and cools down to adjust the surface temperature of cold plate 30.
Further, as shown in figure 4, being provided with diversion component 32 on 30 surface of cold plate.
It is exemplary, as shown in figure 4, diversion trench is arranged on 30 surface of cold plate, so that condensing in 30 surface of cold plate
Liquid organic solvent can flow to the side of cold plate 30, and the collecting part by the way that 30 side of cold plate is arranged in along diversion trench
The organic solvent of liquid is collected and is focused on by (being not shown in Fig. 4), to avoid the liquid organic solvent drop of condensation
Fall in the surface of film layer 22 to be dried.
It should be noted that not limiting the specific structure of diversion component 32 in the embodiment of the present invention, diversion component 32 may be used also
Think in addition to diversion trench other can by liquid organic solvent guide outflow structure or component, further, since cold plate
30 be easily directly dropped in without processing towards the liquid organic solvent condensed on the lower surface of microscope carrier 20 to
20 surface of dried film, therefore, at least water conservancy diversion is arranged on the lower surface towards microscope carrier 20 in the cold plate 30 of the embodiment of the present invention
Component 32, alternatively, those skilled in the art answer when being only provided with diversion component 32 on a side surface wherein on cold plate 30
When knowing, when the vacuum drying chamber to the embodiment of the present invention is installed, it need to will be provided with the one of diversion component 32 and face
It is arranged to microscope carrier 20.
Further, as shown in figure 5, the vacuum drying chamber of the embodiment of the present invention further includes being arranged in vacuum chamber 10
Support plate 50, support rod 51 that can be flexible along the direction perpendicular to 50 plate face of support plate, support are provided in support plate 50
It is fixedly connected between bar 51 and microscope carrier 20, for microscope carrier 20 to be supported and moved.
As shown in figure 5, being additionally provided with the support plate 50 with support rod 51 in vacuum chamber 10, wherein support rod 51
One end be arranged in support plate 50, and support rod 51 can along the direction stretching motion perpendicular to 50 plate face of support plate, support
The other end of bar 51 is fixedly connected with the lower surface of microscope carrier 20, so, by control support rod 51 relative to support plate 50
Stretching motion direction and moving distance, can be to microscope carrier 20 and the substrate to be dried 21 being arranged on microscope carrier 20 in vacuum chamber
Setting height in room 10 is adjusted.Since relative position of the cold plate 30 in vacuum chamber 10 is fixed, to also just make
Obtain to microscope carrier and can be arranged between the substrate to be dried 21 on microscope carrier 20 and cold plate 30 by adjusting support rod 51
Relative position is adjusted.
It should be noted that the situation constant in other characteristic conditions of the embodiment of the present invention being dried in vacuo in chamber
Under, the distance between substrate to be dried 21 on microscope carrier 20 and cold plate 30 have with the gaseous state by evaporating in film layer 22 to be dried
Rate of setting inverse correlation of the solvent on cold plate 30.Therefore, by adjusting the distance between microscope carrier 20 and cold plate 30,
Can the evaporation rate to organic solvent adjusted accordingly.
The another aspect of the embodiment of the present invention provides a kind of Minton dryer, as shown in fig. 6, including above-mentioned any one
The vacuum drying chamber 60 of item, further includes vacuum withdraw device 70.The bleeding point 701 and vacuum chamber 10 of vacuum withdraw device 70
Connection.
So, as shown in fig. 6, starting vacuum withdraw device 70,701 energy of bleeding point being connected with vacuum chamber 10
It is enough to extract the gas in vacuum chamber 10 outward, to gradually reduce the air pressure in vacuum chamber 10, until reaching required true
Reciprocal of duty cycle.Gas extraction rate in vacuum chamber 10 directly affects the evaporation rate of the organic solvent in film layer 22 to be dried.It wants
So that the uniform film layer of film thickness can be formed in film layer 22 to be dried after drying and forming-film, it is required that true in vacuum chamber 10
Reciprocal of duty cycle be gradually increased with a relatively stable rate (i.e. so that air pressure in vacuum chamber 10 with relatively stable rate gradually
Reduce), in this process, the organic solvent in film layer 22 to be dried first evaporates early period at relatively slow speeds, vacuum chamber
The concentration of organic solvent in room 10 is gradually risen with stable increasing degree, with the raising of vacuum degree, the concentration of organic solvent by
It edges up and height and reaches and maintain a period after saturated vapour pressure, it is solidifying on cold plate 30 then as gaseous organic solvent
Knot and gaseous organic solvent detaching with the gas in vacuum chamber 10, the concentration of gaseous state organic solvent again can gradually under
Drop forms a coherent change curve.And according to the ingredient of the organic solvent in film layer 22 to be dried difference, evaporation drying mistake
Organic solvent concentration also needs different degrees of adjusting on the basis of this change curve in journey.
According to organic solvent concentration detector 40 to the real-time detection numerical value of organic solvent concentration in vacuum chamber 10 with it is upper
The matching degree between change curve is stated, the size of the gas extraction rate of vacuum withdraw device 70 is adjusted, it will be able to
The evaporation rate for making the Minton dryer of the embodiment of the present invention treat organic solvent in dried film 22 as far as possible is in
In preset speed range, thus improve treat dried film 22 carry out dried film on vacuum drying metacoxal plate film thickness it is equal
One property.
Since organic solvent concentration detector 40 is directly to carry out to the concentration value of the organic solvent in vacuum chamber 10
Detection, and in the prior art by being detected to the vacuum degree in vacuum chamber 10, then according to true in vacuum chamber 10
For reciprocal of duty cycle compared with the organic solvent concentration value that the proportionate relationship between organic solvent evaporation rate is calculated, that directly detects is dense
Angle value is more accurate intuitive, and avoids other factors in Minton dryer (such as the temperature of microscope carrier 20, cold plate 30
The distance between rate of setting, cold plate 30 and microscope carrier 20 etc.) influence to the concentration value of organic solvent, it further improves dry
Dry treated film uniformity effect.
Further, as shown in fig. 7, the Minton dryer of the embodiment of the present invention further includes controller 80, controller 80
It is electrically connected with organic solvent concentration detector 40, and is electrically connected with vacuum withdraw device 70, for being examined according to organic solvent concentration
Survey the vacuum pull down rate of the testing result control vacuum withdraw device 70 of device 40.
It should be noted that being electrically connected between controller 80 and organic solvent concentration detector 40 is not shown in Fig. 7
And the electrical connection between vacuum withdraw device 70, those skilled in the art should know electrical connection may include leading
The various ways such as line connection, in the embodiment of the present invention without limitation for electric connection mode, as long as can be realized electrical connection and pass
Power transmission signal.
It is exemplary, it is done as shown in fig. 7, treating dried film 22 in the Minton dryer using the embodiment of the present invention
During dry film forming, if the detection numerical value for the organic solvent concentration detector 40 that controller 80 is got is higher than scheduled variation
Corresponding numerical value in curve, i.e. gaseous state organic solvent concentration are higher than predetermined value, then controller 80 is to vacuum withdraw device 70
Output order, control vacuum withdraw device 70 reduces gas extraction rate accordingly, so that realizing to treat has in dried film 22
The feedback regulation of the boil-up rate of solvent.
Preferably, as shown in figure 8, Minton dryer further includes the heater 23 connecting with microscope carrier 20, controller 80 with
Heater 23 is electrically connected, to control the adding to microscope carrier 20 of heater 23 according to the testing result of organic solvent concentration detector 40
Heat.And/or Minton dryer further includes the thermosistor 31 connecting with cold plate 30, controller 80 is electrically connected with thermosistor 31,
The temperature of cold plate 30 is adjusted with controlling thermosistor 31 according to the testing result of organic solvent concentration detector 40.
It is exemplary, the connection setting heater 23 on microscope carrier 20, alternatively, the connection setting thermosistor 31 on cold plate 30,
Alternatively, as shown in figure 8, thermosistor is arranged in connection also on cold plate 30 while connection setting heater 23 on microscope carrier 20
31.So, it is taken out according to the gas of the corresponding adjustment vacuum withdraw device of the testing result of organic solvent concentration detector 40
Rate is taken, on the basis of being adjusted with the evaporation rate to organic solvent, additionally it is possible to pass through control heater 23 and/or control
Thermosistor 31 adjusts the film layer to be dried 22 on microscope carrier 20 and the temperature difference between cold plate 30, by adjusting cold plate 30
On the rate of setting of organic solvent the evaporation rate of organic solvent is adjusted.
Preferably, vacuum withdraw device 70 includes level-one vacuum pump and secondary vacuum aspiration pump.Wherein, level-one vacuum
Aspiration pump vacuum degree is 10-3Support, secondary vacuum aspiration pump vacuum degree are 10-5Support.
So, the gas in vacuum chamber 10 is extracted by vacuum withdraw device 70 it is required to realize
During vacuum degree, primary extraction, level-one vacuum pump are carried out to vacuum chamber 10 by level-one vacuum pump first
Vacuum degree be 10-3Support, when the vacuum degree in vacuum chamber 10 reaches 10-3After support, restart secondary vacuum aspiration pump to vacuum
Gas in chamber 10 further extracts, until the vacuum degree in vacuum chamber 10 reaches 10-5Support.Wherein, by true to level-one
Empty pump air pump and secondary vacuum aspiration pump are respectively set, and level-one vacuum pump can tentatively be arranged and extract in vacuum chamber 10
Gas reaches 10-3The time of the vacuum degree of support and secondary vacuum aspiration pump extract gas in vacuum chamber 10 and reach 10-5Support
Vacuum degree time, and the further inspection according to organic solvent concentration detector 40 to organic solvent concentration in vacuum chamber 10
It surveys numerical value and feedback regulation is carried out to the gas extraction rate of level-one vacuum pump and secondary vacuum aspiration pump.
The above description is merely a specific embodiment, but scope of protection of the present invention is not limited thereto, any
Those familiar with the art in the technical scope disclosed by the present invention, can easily think of the change or the replacement, and should all contain
Lid is within protection scope of the present invention.Therefore, protection scope of the present invention should be based on the protection scope of the described claims.
Claims (10)
1. a kind of vacuum drying chamber, which is characterized in that be oppositely arranged including vacuum chamber and in the vacuum chamber
Microscope carrier and cold plate, the microscope carrier are lower than the platform of the microscope carrier for carrying substrate to be dried, the plate face temperature of the cold plate
Face temperature, the film surface to be dried of the substrate to be dried are additionally provided in the vacuum chamber towards the cold plate
Solvent concentration detector.
2. vacuum drying chamber according to claim 1, which is characterized in that the organic solvent concentration detector setting exists
Between the microscope carrier and the cold plate.
3. vacuum drying chamber according to claim 2, which is characterized in that the organic solvent concentration detector is provided with
Multiple, multiple organic solvent concentration detectors are uniformly arranged between the microscope carrier and the cold plate.
4. vacuum drying chamber according to claim 1-3, which is characterized in that the plate face temperature of the cold plate
Temperature difference between the table top temperature of the microscope carrier is 10-20 DEG C.
5. vacuum drying chamber according to claim 1, which is characterized in that the condensation plate surface is provided with diversion division
Part.
6. vacuum drying chamber according to claim 4, which is characterized in that further include that setting is indoor in the vacuum chamber
Support plate is provided with support rod that can be flexible along the direction perpendicular to support plate plate face, the support rod in the support plate
It is fixedly connected between the microscope carrier, for the microscope carrier to be supported and moved.
7. a kind of Minton dryer, which is characterized in that including vacuum drying chamber as claimed in any one of claims 1 to 6,
It further include vacuum withdraw device, the bleeding point of the vacuum withdraw device is connected to vacuum chamber.
8. Minton dryer according to claim 7, which is characterized in that further include controller, the controller with have
The electrical connection of solvent concentration detector, and be electrically connected with the vacuum withdraw device, for being examined according to the organic solvent concentration
The testing result for surveying device controls the vacuum pull down rate of the vacuum withdraw device.
9. Minton dryer according to claim 8, which is characterized in that the Minton dryer further includes and microscope carrier
The heater of connection, the controller are electrically connected with the heater, according to the detection of the organic solvent concentration detector
As a result heating of the heater to the microscope carrier is controlled；
And/or the Minton dryer further includes the thermosistor connecting with cold plate, the controller and thermosistor electricity
Connection, to control the thermosistor to the temperature tune of the cold plate according to the testing result of the organic solvent concentration detector
Section.
10. according to the described in any item Minton dryers of claim 7-9, which is characterized in that the vacuum withdraw device packet
Include level-one vacuum pump and secondary vacuum aspiration pump；
Wherein, the level-one vacuum pump vacuum degree is 10-3Support, the secondary vacuum aspiration pump vacuum degree are 10-5Support.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| RU2809800C1 (en) * | 2022-12-08 | 2023-12-18 | Общество с ограниченной ответственностью "Технологии Без Границ" | Extraction, concentration and drying complex |
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| CN109200736B (en) | 2017-06-30 | 2021-01-08 | 京东方科技集团股份有限公司 | Condensing plate, vacuum drying equipment and vacuum drying method |
| CN108944085A (en) * | 2018-06-22 | 2018-12-07 | 京东方科技集团股份有限公司 | A kind of vacuum drying cabinet, Minton dryer and vacuum drying method |
| CN108847457B (en) * | 2018-06-25 | 2020-09-29 | 深圳市华星光电技术有限公司 | Vacuum drying equipment |
| CN111098610B (en) * | 2018-10-29 | 2021-10-12 | 广东聚华印刷显示技术有限公司 | Vacuum drying apparatus and method for determining vacuum drying conditions |
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| CN110116559A (en) * | 2019-04-23 | 2019-08-13 | 深圳市华星光电半导体显示技术有限公司 | Vacuum dryer |
| CN110094935A (en) * | 2019-05-17 | 2019-08-06 | 京东方科技集团股份有限公司 | Minton dryer |
| CN110328975A (en) * | 2019-07-01 | 2019-10-15 | 深圳市华星光电半导体显示技术有限公司 | Minton dryer |
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| CN111129360B (en) * | 2019-12-25 | 2023-02-07 | Tcl华星光电技术有限公司 | Vacuum drying device and display substrate drying method |
| WO2022234716A1 (en) * | 2021-05-06 | 2022-11-10 | 東京エレクトロン株式会社 | Depressurization drying device, depressurization drying method, and method for shortening time required for depressurization drying process |
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| JP4179276B2 (en) * | 2004-12-24 | 2008-11-12 | セイコーエプソン株式会社 | Solvent removal apparatus and solvent removal method |
| KR20110139253A (en) * | 2009-03-09 | 2011-12-28 | 이 아이 듀폰 디 네모아 앤드 캄파니 | Process for forming an electroactive layer |
| CN103707451A (en) * | 2013-12-27 | 2014-04-09 | 京东方科技集团股份有限公司 | Substrate vacuum drying device and method |
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| RU2809800C1 (en) * | 2022-12-08 | 2023-12-18 | Общество с ограниченной ответственностью "Технологии Без Границ" | Extraction, concentration and drying complex |
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