CN106756801A - A kind of evaporated device and evaporation process - Google Patents
A kind of evaporated device and evaporation process Download PDFInfo
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- CN106756801A CN106756801A CN201510828671.1A CN201510828671A CN106756801A CN 106756801 A CN106756801 A CN 106756801A CN 201510828671 A CN201510828671 A CN 201510828671A CN 106756801 A CN106756801 A CN 106756801A
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Abstract
The present invention relates to OLED manufacturing technology field, more particularly to a kind of evaporated device and evaporation process, simulate in advance and carry out magnetic sheet laminating mechanism for the change caused by shade, and form standard state parameter, by under detection means detection vacuum state, the removable shade forms a detection state parameter output in the state parameter under the magnetic fields that the magnetic press fit device is formed；Control unit forms the Regulate signal output according to the detection state parameter.Magnetic press fit device, removable shade do corresponding adjustment in the presence of Regulate signal, so that magnetic press fit device, removable shade are in optimum position, avoid under vacuum conditions, magnetic press fit device, removable shade produce uncontrolled variable, reduce the evaporation product of evaporation product.
Description
Technical field
The present invention relates to OLED manufacturing technology field, more particularly to a kind of evaporated device and
Evaporation process.
Background technology
Display of organic electroluminescence (0LED) has actively luminous, wide viewing angle, high brightness, low
Many advantages, such as voltage and energy-conservation, it is referred to as green energy resource.0LED is " Dual Implantations formula " device
Part, electronics and hole are injected from negative electrode and anode respectively, and generation is combined in organic luminous layer
Singlet exciton, singlet exciton lights because of degrading radiation.Due to the electron affinity of organic material
Electron affinity than metal and inorganic material is much smaller, wants effectively toward note in organic material
Enter electronics, the work function of its cathode material must be sufficiently low.The negative electrode of OLED is mostly using true
Empty evaporation process is formed.
Existing evaporation process is as follows：Into a sealing vacuum area, substrate carrier carries one
Substrate to be deposited；And the region being deposited with the need for exposing substrate to be deposited, may move shade
The lower end of above-mentioned substrate to be deposited, and the above-mentioned substrate to be deposited of covering of throwing the net are moved to, because removable
Dynamic shade has patterned openings, and the opening area of removable shade is the steaming of substrate to be deposited
Plating region.After the completion of removable shade is thrown the net, magnetic press fit device is pushed, and above-mentioned magnetic pressure is attached together
Put the substrate to be deposited is clamped with reference to above-mentioned removable shade, but generally use this
The evaporation substrate that the mode of kind is manufactured, it always occurs being deposited with the inaccurate phenomenon in position, and then leads
Cause, the quality of evaporation product is relatively low, and whole evaporation process is all to carry out under vacuum conditions,
The used temperature of evaporation is relatively low, is unfavorable for that staff has found the disadvantage occurred in its evaporation process
End.
The content of the invention
In view of the shortcomings of the prior art, a kind of evaporation effect of present invention offer is good, be deposited with yield rate
Evaporated device and evaporation process high.
A kind of evaporated device, is applied to the manufacture of OLED, wherein, including：
Substrate carrier, is used to carry a substrate to be deposited；
Magnetic press fit device, is arranged at the top of the substrate carrier, in a Regulate signal
Under effect, adjust between the magnetic pressure plate and the substrate carrier of the magnetic press fit device it is relative away from
From and/or magnetic field；
Removable shade, with patterned openings, is present in the substrate carrier lower section, is used to
The mode of throwing the net of the removable shade is adjusted in the presence of the Regulate signal；
Detection means, presses under the substrate carrier state in the magnetic press fit device, detects institute
Removable shade is stated in the state parameter under the magneticaction that the magnetic press fit device is formed, and shape
Into a detection state parameter output；
Control unit, the removable shade that is stored with is in the standard state under the magnetic fields
Parameter, when the detection state parameter mismatches the standard state parameter, forms the tune
Section signal output.
Above-mentioned evaporated device, wherein, also include,
Alignment device, is arranged on the magnetic press fit device, for causing the magnetic press fit device
Face the substrate carrier and the movement for carrying out perpendicular to orientation substrate after contraposition is completed.
Above-mentioned evaporated device, wherein, the detection means includes,
Measurement microscope group, is used to detect the pixel, and/or the base to be deposited of the removable shade
The critical distance of total spacing of plate, and/or the substrate to be deposited and the removable shade；
Laser sensor, is used to detect that the removable shade is relative with the substrate to be deposited
Distance.
Above-mentioned evaporated device, wherein, the testing equipment also includes a detection platform, sets
Immediately below the removable shade, it is used to carry the measurement microscope group, the laser sensor.
Above-mentioned evaporated device, wherein, the measurement microscope group is white light projection-type microscope group.
Above-mentioned evaporated device, wherein, the mode of throwing the net includes, narrow side is thrown the net and broadside
Net.
Above-mentioned evaporated device, wherein, described control unit includes memory, is used to store institute
State the corresponding relation of standard state parameter and the detection state parameter.
Above-mentioned evaporated device, wherein, the magnetic press fit device also includes a driver element, institute
The control end connection described control unit of driver element is stated, is used to receive described control unit output
The Regulate signal, and drive the magnetic pressure to attach together in the presence of the Regulate signal to be placed in
Moved perpendicular to the direction of the substrate carrier.
A kind of evaporation process, is applied to the manufacture of OLED, wherein, including：
There is provided one has the evaporated device body of substrate carrier,
One substrate to be deposited is provided, the substrate to be deposited is positioned on the substrate carrier；
Push the magnetic press fit device of the evaporated device body so that the magnetic press fit device is combined
One removable shade clamps the substrate to be deposited；
Detection means detects the covering state of the substrate to be deposited and the removable shade, with
And the relative distance of the magnetic press fit device and the removable shade, and form one and detect state
Parameter is exported；
Control unit forms one and adjusts according to the detection state parameter, with reference to a standard state parameter
Section signal, the magnetic press fit device acts on lower point with the removable shade in the Regulate signal
Matched action is not performed.
Above-mentioned evaporation process, wherein, also include, it is removable with described in the magnetic press fit device
Dynamic shade leads in being performed respectively under Regulate signal effect after matched action finishes
Cross a vapor deposition source carries out vapor deposition treatment to the substrate to be deposited.
Compared with prior art, it is an advantage of the invention that：
In the application, simulate carry out magnetic sheet laminating mechanism for the change caused by shade in advance,
And form standard state parameter, it is described removable under detecting vacuum state by detection means
Shade forms one in the state parameter under the magnetic fields that the magnetic press fit device is formed
Detection state parameter output；Control unit forms the regulation letter according to the detection state parameter
Number output.Magnetic press fit device, removable shade do corresponding adjustment in the presence of Regulate signal,
So that magnetic press fit device, removable shade are in optimum position, it is to avoid under vacuum conditions, magnetic
Press fit device, removable shade produce uncontrolled variable, reduce the evaporation quality of evaporation product.
Brief description of the drawings
Fig. 1 is evaporated device structural representation in the present invention；
Fig. 2 is evaporation process schematic flow sheet in the present invention.
Specific embodiment
The invention will be further described with specific embodiment below in conjunction with the accompanying drawings, but not as this
The restriction of invention.
Below in conjunction with the accompanying drawing in the embodiment of the present invention, to the technical side in the embodiment of the present invention
Case is clearly and completely described, it is clear that described embodiment is only the present invention one
Divide embodiment, rather than whole embodiments.Based on the embodiment in the present invention, this area is general
The every other implementation that logical technical staff is obtained on the premise of creative work is not made
Example, belongs to the scope of protection of the invention.
It should be noted that in the case where not conflicting, embodiment and embodiment in the present invention
In feature can be mutually combined.
The drawbacks of for prior art, found by multiple analog study, the drawbacks of existing process
Mainly there are following several situations, one, for OLED, during its evaporation, magnetic pressure is closed
After device is pushed, influence easily is produced on substrate to be deposited and removable shade, for example, cause to treat
Evaporation substrate and removable shade are subjected to displacement；2nd, thrown the net when removable shade and cover to be deposited
During substrate, because of shade Action of Gravity Field in itself so that sagging displacement, shade edge occurs in shade
Sagging displacement is more, and after shade is sagging, the region that its patterned openings is covered also changes,
Evaporation quality is caused to substantially reduce.3rd, after the completion of shade, it is impossible to obtain shade with it is to be deposited
Throw the net size and the mode of throwing the net of the matching degree of substrate, such as shade match base to be deposited completely
Plate, but shade is mismatched with substrate relative position to be deposited, and then also result in evaporation effect
It is poor.
For a variety of drawbacks of prior art, the present invention provides solution below.
A kind of evaporated device, is applied to the manufacture of OLED, wherein, including：Substrate is carried
Body 1, is used to carry a substrate to be deposited 2；Substrate carrier 1 is a hollow plummer, its base
The open area of onboard body 1 should be greater than or the scope of evaporation is needed equal to substrate to be deposited 2.
Magnetic press fit device 3, is arranged at the surface of the substrate carrier 1, in a regulation
In the presence of signal, between the magnetic pressure plate and the substrate carrier 1 of regulation magnetic press fit device 3
Relative distance, and/or electric current；The magnetic field that magnetic press fit device 3 is produced can be formed by permanent magnet,
Also can be formed by electromagnet.
Removable shade 4, with patterned openings, is arranged at the lower end of the substrate carrier 1,
To adjust the mode of throwing the net of the removable shade 4 in the presence of the Regulate signal；
Detection means 5, presses under the state of substrate carrier 1 in the press fit device, detection
The removable shade 4 is in the state under the magnetic fields that the magnetic press fit device 3 is formed
Parameter, and form a detection state parameter output；
Control unit, the removable shade 4 that is stored with is in the standard shape under the magnetic fields
State parameter, when the detection state parameter mismatches the standard state parameter, forms described
Regulate signal is exported.Standard state parameter be by advance simulate come magnetic press fit device 3 for
Influence (change of displacement or other changes) caused by removable shade 4 and substrate to be deposited 2
And formed.
Operation principle of the invention is：Into a sealing vacuum area, substrate carrier 1 is carried
One substrate to be deposited 2；And the region being deposited with the need for exposing substrate to be deposited 2, it is removable
Dynamic shade 4 is moved to the lower end of above-mentioned substrate to be deposited 2, and the above-mentioned base to be deposited of covering of throwing the net
Plate 2, be because removable shade 4 has the opening area of patterned openings, removable shade 4
It is the evaporation region of substrate to be deposited 2.After the completion of removable shade 4 is thrown the net, magnetic pressure is attached together
Put 3 to push, above-mentioned magnetic press fit device 3 combines the above-mentioned base to be deposited of removable shade 4 pairs
Plate 2 is clamped, and detection means 5 detects the removable shade 4 in the magnetic press fit device
State parameter under 3 magnetic fields for being formed, and form a detection state parameter output；
Control unit, the Regulate signal output is formed according to the detection state parameter.
For example, sagging occurs in above-mentioned removable shade 4, the detection of detection means 5 is removable
The state parameter of the hang of shade 4, control unit forms Regulate signal according to state parameter.
When the magnetic field that magnetic press fit device 3 is produced is formed by permanent magnet, Regulate signal regulation is above-mentioned
Relative distance between magnetic press fit device 3 and substrate carrier 1 so that above-mentioned magnetic press fit device 3
Shorten with the relative distance between substrate carrier 1, and then cause that above-mentioned magnetic press fit device 3 is produced
Magnetic field increase, the attraction of the removable shade 4 of enhancing magnetic field suction reduces removable shade
4 hang.
For example, when the magnetic field that magnetic press fit device 3 is produced is formed by electromagnet, Regulate signal is adjusted
The electric current of above-mentioned magnetic press fit device 3 is saved, increases the electric current for flowing into electromagnet, and then cause above-mentioned
The magnetic field increase that magnetic press fit device 3 is produced, the attraction of the removable shade 4 of enhancing magnetic field suction,
Reduce the hang of removable shade 4.
For example, (being aligned when above-mentioned removable shade 4 and substrate to be deposited 2 cover to mismatch
Hole is mismatched, and/or critical dimension is mismatched) when, the removable shade of the detection of detection means 5
4 form with the relative position information of substrate to be deposited 2, control unit according to relative position information
Regulate signal, the above-mentioned removable shade 4 of Regulate signal regulation changes mode of throwing the net, and/or can
The position of the mobile support chip of shade 4, so that above-mentioned removable shade 4 hides with substrate to be deposited 2
Lid is in matching status.Specific regulative mode makes specific change according to practical application herein,
Do not limit herein.
In the application, simulate carry out magnetic sheet laminating mechanism for the change caused by shade 4 in advance,
And form standard state parameter, it is described removable under detecting vacuum state by detection means 5
Shade 4 is moved in the state parameter under the magnetic fields that the magnetic press fit device 3 is formed, and
Form one and detect state parameter output；Control unit is according to the detection state parameter is formed
Regulate signal is exported.Magnetic press fit device 3, removable shade 4 do in the presence of Regulate signal
Corresponding adjustment so that magnetic press fit device 3, removable shade 4 are in optimum position, it is to avoid
Under vacuum conditions, magnetic press fit device 3, removable shade 4 produce uncontrolled variable, reduce
The evaporation quality of evaporation product.
As further preferred embodiment, above-mentioned evaporated device, wherein, also include,
Alignment device, is arranged at the magnetic press fit device 3, for causing the magnetic press fit device 3
Just to carrying out the movement perpendicular to orientation substrate under the state of the substrate carrier 1.Avoid above-mentioned magnetic
There is position skew in press fit device 3, cause pressing inaccurate during pushing, further ensure that
Magnetic press fit device 3 is in optimum position.
As further preferred embodiment, above-mentioned evaporated device, wherein, the detection dress
Putting 5 includes, measures microscope group 51, is used to detect pixel, and/or the institute of the removable shade
The spacing, and/or the substrate to be deposited of substrate to be deposited 2 are stated in the removable shade 4
Critical distance；Further, the measurement microscope group 51 is white light projection-type microscope group.White light
The wide visual field of projection-type microscope group is 4.7 ㎜.Laser sensor, is used to detect the removable screening
Cover the relative distance of 4 and the substrate to be deposited.
As further preferred embodiment, above-mentioned evaporated device, wherein, the detection sets
It is standby also to include a detection platform 52, it is arranged at immediately below the removable shade 4, it is used to hold
Carry the measurement microscope group 51, the laser sensor.
As further preferred embodiment, above-mentioned evaporated device, wherein, above-mentioned evaporation
Equipment, wherein, the mode of throwing the net includes, narrow side is thrown the net and thrown the net with broadside.Mode of throwing the net root
Change according to the size of specific substrate to be deposited 2, be not particularly limited herein.
As further preferred embodiment, above-mentioned evaporated device, wherein, the control is single
Unit includes memory, is used to store the corresponding pass of the canonical parameter and the detection state parameter
System.Control unit, with reference to above-mentioned corresponding relation, is chosen and inspection according to the detection state parameter
Survey the standard state parameter of state parameter matching.
As further preferred embodiment, above-mentioned evaporated device, wherein, when magnetic pressure is attached together
When putting 3 and being formed by permanent magnet, the magnetic press fit device 3 also includes a driver element, the drive
The control end connection described control unit of moving cell, is used to receive the institute of described control unit output
Regulate signal is stated, and the magnetic press fit device 3 is driven in the presence of the Regulate signal in vertical
Nogata is to movement so that the institute of the formation of the removable shade 4 of the magnetic press fit device 3 pairs
State magnetic field-enhanced.
Present invention simultaneously provides a kind of evaporation process, the manufacture of OLED is applied to, wherein,
Including：
There is provided one has the evaporated device body of substrate carrier,
One substrate to be deposited is provided, the substrate to be deposited is positioned on the substrate carrier；
Push the magnetic press fit device of the evaporated device body so that the magnetic press fit device is combined
One removable shade clamps the substrate to be deposited；
Detection means detects the covering state of the substrate to be deposited and the removable shade, with
And the relative distance of the magnetic press fit device and the removable shade, and form one and detect state
Parameter is exported；
Control unit forms one and adjusts according to the detection state parameter, with reference to a standard state parameter
Section signal, the magnetic press fit device acts on lower point with the removable shade in the Regulate signal
Matched action is not performed.
Above-mentioned evaporation process, wherein, also include, it is removable with described in the magnetic press fit device
Dynamic shade leads in being performed respectively under Regulate signal effect after matched action finishes
Cross a vapor deposition source carries out vapor deposition treatment to the substrate to be deposited.
Above-mentioned evaporation process, its operation principle is identical with evaporated device operation principle, herein not
It is specifically limited.
Preferred embodiments of the present invention are the foregoing is only, implementation of the invention is not thereby limited
Mode and protection domain, to those skilled in the art, should can appreciate that all utilizations
Equivalent and obvious change gained done by description of the invention and diagramatic content
The scheme for arriving, should be included in protection scope of the present invention.
Claims (10)
1. a kind of evaporated device, is applied to the manufacture of OLED, it is characterised in that including：
Substrate carrier, is used to carry a substrate to be deposited；
Magnetic press fit device, is arranged at the top of the substrate carrier, for a Regulate signal
Under effect, adjust relative distance between the magnetic press fit device and the substrate carrier and/or
Magnetic field；
Removable shade, with patterned openings, is present in the substrate carrier lower section, is used to
The mode of throwing the net of the removable shade is adjusted in the presence of the Regulate signal；
Detection means, presses under the substrate carrier state in the magnetic press fit device, detects institute
Removable shade is stated in the state parameter under the magneticaction that the magnetic press fit device is formed, and shape
Into a detection state parameter output；
Control unit, the removable shade that is stored with is in the standard state under the magneticaction
Parameter, when the detection state parameter mismatches the standard state parameter, forms the tune
Section signal output.
2. evaporated device according to claim 1, it is characterised in that also include:
Alignment device, is arranged on the magnetic press fit device, for causing the magnetic press fit device
The movement perpendicular to orientation substrate is just carried out to the substrate carrier and after contraposition is completed.
3. evaporated device according to claim 1, it is characterised in that the detection dress
Put including:
Measurement microscope group, is used to detect the pixel of the removable shade, and/or described to be deposited
The critical distance of total spacing of substrate, and/or the substrate to be deposited and the removable shade；
Laser sensor, is used to detect that the removable shade is relative with the substrate to be deposited
Distance.
4. evaporated device according to claim 3, it is characterised in that the detection sets
It is standby also to include a detection platform, it is arranged at immediately below the removable shade, it is used to carry described
Measurement microscope group, the laser sensor.
5. steamed bun equipment according to claim 3, it is characterised in that the measurement mirror
Group is white light projection-type microscope group.
6. steamed bun equipment according to claim 1, it is characterised in that the side of throwing the net
Formula includes that narrow side is thrown the net and thrown the net with broadside.
7. steamed bun equipment according to claim 1, it is characterised in that the control list
Unit includes memory, is used to store the standard state parameter right with the detection state parameter
Should be related to.
8. evaporated device according to claim 1, it is characterised in that the magnetic pressure is closed
Device also includes a driver element, and the control end of the driver element connects described control unit,
It is used to receive the Regulate signal of described control unit output, and in the work of the Regulate signal
The magnetic pressure is driven to attach together the direction movement being placed in perpendicular to the substrate carrier with lower.
9. a kind of evaporation process, is applied to the manufacture of OLED, it is characterised in that including：
There is provided one has the evaporated device body of substrate carrier,
One substrate to be deposited is provided, the substrate to be deposited is positioned on the substrate carrier；
Push the magnetic press fit device of the evaporated device body so that the magnetic press fit device is combined
One removable shade clamps the substrate to be deposited；
Detection means detects the covering state of the substrate to be deposited and the removable shade, with
And the relative distance of the magnetic press fit device and the removable shade, and form one and detect state
Parameter is exported；
Control unit forms one and adjusts according to the detection state parameter, with reference to a standard state parameter
Section signal, the magnetic press fit device acts on lower point with the removable shade in the Regulate signal
Matched action is not performed.
10. evaporation process according to claim 9, it is characterised in that also include, institute
State magnetic press fit device and the removable shade in performed respectively under Regulate signal effect with
The action for matching finish after, the substrate to be deposited is carried out at evaporation by a vapor deposition source
Reason.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510828671.1A CN106756801A (en) | 2015-11-24 | 2015-11-24 | A kind of evaporated device and evaporation process |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510828671.1A CN106756801A (en) | 2015-11-24 | 2015-11-24 | A kind of evaporated device and evaporation process |
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| CN106756801A true CN106756801A (en) | 2017-05-31 |
Family
ID=58963409
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| CN201510828671.1A Pending CN106756801A (en) | 2015-11-24 | 2015-11-24 | A kind of evaporated device and evaporation process |
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| CN108060388A (en) * | 2017-12-18 | 2018-05-22 | 信利（惠州）智能显示有限公司 | A kind of alignment method of substrate and mask plate |
| CN108342695A (en) * | 2018-02-11 | 2018-07-31 | 京东方科技集团股份有限公司 | A kind of vapor deposition coldplate |
| CN108707862A (en) * | 2018-06-26 | 2018-10-26 | 武汉华星光电半导体显示技术有限公司 | Pressing plate and detection device |
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