KR20040039910A - Heating source apparatus for Organic electron luminescence - Google Patents

Heating source apparatus for Organic electron luminescence Download PDF

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KR20040039910A
KR20040039910A KR1020020068147A KR20020068147A KR20040039910A KR 20040039910 A KR20040039910 A KR 20040039910A KR 1020020068147 A KR1020020068147 A KR 1020020068147A KR 20020068147 A KR20020068147 A KR 20020068147A KR 20040039910 A KR20040039910 A KR 20040039910A
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source
heat source
organic el
organic
shutter
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KR100504477B1 (en
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김명섭
이승현
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엘지전자 주식회사
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L51/00Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
    • H01L51/0001Processes specially adapted for the manufacture or treatment of devices or of parts thereof
    • H01L51/0002Deposition of organic semiconductor materials on a substrate
    • H01L51/0008Deposition of organic semiconductor materials on a substrate using physical deposition, e.g. sublimation, sputtering

Abstract

PURPOSE: A heat source element of an organic electro-luminescence device is provided to enhance the productivity of the organic electro-luminescence device by reducing the number of linear heat sources and the number of chambers in a co-deposition process of two or three materials. CONSTITUTION: A heat source element of an organic electro-luminescence device includes a transparent substrate, a first electrode, an organic layer, and a second electrode. The first electrode, the organic layer, and the second electrode are formed on the transparent substrate. A linear heat source is used for depositing organic materials. A shutter is adhered to the linear heat source. A shape of the shutter is determined according to the amount of the depositing organic materials. An aperture ratio of the shutter is controlled by the amount of the depositing organic materials.

Description

유기 EL의 열 소스 장치{Heating source apparatus for Organic electron luminescence} Heat source equipment of the organic EL {Heating source apparatus for Organic electron luminescence}

본 발명은 유기 EL(electroluminescence)을 이용하여 평판 디스플레이(flat panel display) 패널을 제작할 때 사용되는 대용량 유기 EL의 열 소스(source) 장치에 관한 것이다. The present invention relates to a heat source (source) of the large organic EL device which is used when producing the flat-panel display (flat panel display) panel using an organic EL (electroluminescence).

일반적으로 저분자 유기 EL 소자 제작시 유기물 증착은 열(thermal) 승화 방식을 이용한다. Generally when making low molecular weight organic EL device with an organic material deposition takes advantage of the heat (thermal) sublimation method. 이때 사용되는 열을 가하여 유기물을 승화시키는 열 소스(source) 장치로는 도가니형, 보트형, 바스켓형 등이 있으나 이것들은 대부분 용량이 작아 대면적 기판을 이용한 양산 시에는 보다 큰 열 소스 장치가 필요하다. At this time, a heat source (source) apparatus for applying heat sublimated organic material used is a crucible-type, boat type, basket-type, etc., but these have to have a larger heat source apparatus during production using a large area substrate smaller, most capacity Do.

도 1a 내지 도1c는 종래 유기 EL의 열 소스(source) 장치를 나타내는 도면이다. Figure 1a to 1c is a view of the heat source (source) of the conventional organic EL device.

도 1a 내지 도 1c를 참조하면, 도 1a는 기존의 작은 도가니(crucible)를 여러개 사용한 열 소스 장치이며, 도 1b는 기존 도가니(crucible) 형태를 유지하면서 용량(크기)을 늘린 형태의 열 소스 장치이다. Referring to Fig. 1a to Fig. 1c, Fig. 1a is a heat source device using multiple existing small crucible (crucible), Figure 1b is a form of the heat source apparatus, increase the capacity (size) while maintaining the form of conventional crucible (crucible) to be.

그리고, 도 1c는 도 1b와 같이 대면적 기판의 폭 길이와 같거나 긴 선 모양의(linear) 소스를 이용하여 스캔을 하면서 증착하는 방식의 열 소스 방식이 대두되었다. And, Figure 1c has the same rise and a width length of the large area substrate or a long line-shaped (linear) method for the heat-source vapor deposition using a source with the scanning of as shown in Figure 1b.

이와 같은 방식의 열 소스(source) 장치는 도가니 하나하나를 컨트롤(control)하기 어렵고 점점 더 복잡해지는 유기 EL 소자 구조에 대응하기가 어려우며, 특히 2~3개의 물질을 코-데포지션(co-deposition) 하기에 많은 선 모양(linear)의 소스(source)와 챔버(chamber)가 필요한 번거로움이 있다. The heat source (source) in the same way, apparatus crucible one single control (control) to difficult and increasingly complex is difficult to correspond to the organic EL device structure, in particular the nose for two or three materials - to the position (co-deposition ) there are a lot of good appearance (hassle required source (source) and a chamber (chamber) of the linear) below.

따라서, 본 발명의 목적은 이상에서 언급한 종래 기술의 문제점을 감안하여 안출한 것으로서, 복잡한 유기 EL 소자에 대응하여 양산에 적합한 유기 EL의 열 소스(source) 장치를 제공하기 위한 것이다. Thus, as one made in view of the object of the present invention view of the problems of the prior art referred to above, it is to provide an organic EL heat source (source) of the device suitable for mass production in response to complex organic EL device.

도 1a 내지 도 1c는 종래 유기 EL이 열 소스(source) 장치들을 나타낸 도면 Figure 1a to 1c are views illustrating a conventional organic EL heat source (source) unit

도 2a 내지 도 2c는 본 발명에 따른 유기 EL의 열 소스(source) 장치를 나타낸 도면 Figures 2a to 2c is a view of the heat source (source) of the organic EL device according to the invention

도 3a 내지 도 3c는 본 발명에 따른 유기 EL의 열 소스 장치의 다양한 모양을 나타낸 도면 Figures 3a-3c illustrate various shapes of the heat source of the organic EL device according to the invention

이상과 같은 목적을 달성하기 위한 본 발명의 특징에 따르면, 투명기판 상에 제 1 전극, 유기물층, 제 2 전극이 형성되는 유기 EL 소자에 있어서, 상기 유기물 증착에 사용되는 선 모양(linear)의 열 소스(source) 장치에 셔터(shutter)를 부착한다. According to a feature of the present invention for achieving the object described above, in the organic EL device is a first electrode, organic material layer, the second electrode is formed on a transparent substrate, the heat of the line-shaped (linear) used for the organic material deposition source is attached to the shutter (shutter) to (source) unit.

바람직하게, 상기 셔터의 모양은 유기물이 증착되는 부분의 양에 따라 개구율을 작게하거나 크게 한다. Preferably, the shape of the shutter is reduced, or increase the aperture ratio with the amount of the organic portion of the deposition.

그리고, 상기 개구율의 모양은 삼각 이상의 다각형 내지 원, 타원등 어느 하나의 모양이 이용된다. Then, the shape of the opening ratio of the one or more shapes such as a triangular polygon to a circle, an ellipse is used.

또한, 상기 개구율의 조절은 홀의 간격을 조절하거나, 홀의 크기를 조절하여 개구율을 줄이고, 또는 홀의 간격과 홀의 크기를 혼용하여 조절하므로 개구율이 조절된다. In addition, regulation of the opening ratio will reduce the aperture ratio by adjusting the hole spacing, or adjusting the hole size, or controlled by mixing the hole spacing and hole size, so the aperture ratio is adjusted.

이하 본 발명의 바람직한 일 실시 예에 따른 구성 및 작용을 첨부된 도면을 참조하여 설명한다. It will be described below with reference to the accompanying drawings, a configuration and operation according to an embodiment of the present invention.

도 2a 내지 도 2c는 본 발명에 따른 유기 EL의 열 소스(source) 장치를 나타내는 도면이다. Figures 2a to 2c is a view of the heat source (source) of the organic EL device according to the invention.

도 2a는 유기 EL의 열 소스(source) 장치를 나타낸 평면도이고, 도 2b는 유기 EL의 열 소스 장치를 나타낸 단면도이며, 도 2c는 유기 EL의 열 소스 장치의 측면도로 소자 구조가 글래스/ ITO/ CuPC/ NPD: Alq3(1:1)/ Alq3/ LiF/ Al 일 경우, 먼저 기판 위에 애노드 전극으로 ITO를 100nm 정도 입힌다. Figure 2a is a plan view showing the heat source (source) unit in the organic EL, Figure 2b is a cross-sectional view showing an organic EL heat source apparatus, Figure 2c is a device structure glass / ITO / a side view of the organic EL heat source apparatus CuPC / NPD: Alq3 (1: 1) / If Alq3 / LiF / Al yl, first coated with an approximately 100nm ITO as the anode electrode on the substrate.

그리고, 상기 애노드 위에 정공 주입층으로 코퍼 프탈로시아닌(CuPc) 등을 10nm 정도 입힌다. Then, the coated 10nm extent of a hole injection layer copper phthalocyanine (CuPc), etc. on the anode.

그 다음, 정공 수송층으로서 4, 4'-bis[N-(l-naphthy)-N-pheny1-amino]bipheny1(NPD)을 50nm 정도 입힌다. Then, as the hole transport layer 4, 4'-bis a [N- (l-naphthy) -N-pheny1-amino] bipheny1 (NPD) coated with about 50nm.

다음으로 기존의 선 모양의 소스로 상기 유기 EL 소자의 NPD / NPD: Alq3 부분을 형성하기 위해서는 NPD용 싱글 선 모양의 소스 1개, NPD : Alq3(1 : 1) 용 더블 선 모양의 소스 1개, Alq3용 싱글 선 모양의 소스 1개, 모두 3 셋트의 선 모양의 소스 및 3개의 챔버가 필요하지만, 본 발명에서는 셔터가 부착된 선 모양의 소스를 사용하게 되면 각 선 모양의 소스에 부착된 셔터 오브-오프(shutter of-off)함으로 해서 구조를 형성할 수 있기 때문에 단 1개의 선 모양의 소스 셋트와 1개의 챔버만 있으면 된다. Next, NPD / NPD of the organic EL device as the source of the existing line shape: In order to form the Alq3 partial single line-shaped source 1 for NPD dog, NPD: Alq3 (1: 1) double-line shape from the source 1 for one source 1 of the single line shape for Alq3 dog, both the linear shape of the source and the three chambers of the third set is required, but if the present invention, the use of the source of the shutter is attached to the line shape attached to the source of each line-shaped shutter of-off is sufficient (of shutter-off) by only one line-shaped source and one set of chambers it is possible to to form a structure.

그리고, 전자 수송층으로 8-hydroxyquinoline aluminum(Alq3)을 30nm 정도 입힌다. Then, the coated 8-hydroxyquinoline aluminum (Alq3) as an electron transport layer about 30nm.

그 다음, 전자주입층으로 Li2O를 0.5nm 정도 입히고, 캐소드 전극으로 Al을 200nm 정도 입힌다. Then, the Li2O as an electron injecting layer, dealing approximately 0.5nm, coated around the Al 200nm as the cathode electrode.

도 3a 내지 도 3c는 본 발명에 따른 유기 EL의 열 소스 장치의 다양한 모양을 나타낸 도면으로, 증착용 선 모양의 소스 셔터 모양은 개구율이 증착되는 유기물의 양을 고려하여 유기물이 두껍게 증착되는 부분에는 개구율을 작게, 유기물이 얇게 증착되는 부분에는 개구율을 크게 함으로 해서 두께를 균일(uniformity)하게 맞출 수 있다. Figures 3a to 3c are views illustrating various shapes of the organic EL heat source apparatus according to the present invention, authentication source shutter shape of the line-shaped wear is, the portion in which the organic material thickly deposited, taking into account the amount of organic matter that is the opening ratio is deposited reducing the rate of an opening portion, which organic material is thinly deposited has to fit uniformly (uniformity) to a thickness larger by a numerical aperture.

이때 홀(hole)의 모양은 삼각이상의 다각형 내지 원, 타원 모두 사용해도 상관없으며, 개구율을 줄이는 방법은 도 3a나 3b와 같이 홀(hole) 간격을 줄이거나, 늘리는 방법과 도 3c와 같이 홀(hole)의 크기를 줄이거나 늘리는 방법도 있으며, 홀의 간격을 줄이거나 늘리는 방법과 홀의 크기를 줄이거나 늘리는 방법을 혼용하여 사용할 수 있다. The hole, as the shape is to or more triangular polygon circle, ellipse, no correlation with all, or a method of reducing the opening ratio, reduce the hole (hole) intervals as shown in Figure 3a or 3b, method and Figure 3c to increase the hole (hole) ( a method to increase or reduce the size of the hole), and can be shared to use the method to increase or reduce the size of holes and a method to reduce or increase the hole spacing.

이상의 설명에서와 같이 본 발명은 도가니 하나하나를 컨트롤(control)하기 쉽고 점점 더 복잡해지는 유기 EL 소자 구조에 대응하여 특히 2~3개의 물질을 코-데포지션(co-deposition) 하여도 많은 개수의 선 모양(linear)의 소스(source)와 챔버(chamber)가 필요하지 않으며, 선 모양의 소스를 균일하게 보정할 수 있는 장점이 있다. As in the above description, the present invention is the crucible a single control (control) to easily and increasingly complex corresponding to become the organic EL device structure in the nose, especially two or three materials - of a lot number by having the position (co-deposition) does not require a source (source) and the chamber (chamber) of a line-shaped (linear), there is an advantage capable of evenly correcting the source of the line shape.

이상 설명한 내용을 통해 당업자라면 본 발명의 기술 사상을 일탈하지 아니하는 범위에서 다양한 변경 및 수정이 가능함을 알 수 있을 것이다. Those skilled in the art what is described above will be appreciated that various changes and modifications within the range which does not depart from the spirit of the present invention are possible.

따라서, 본 발명의 기술적 범위는 실시예에 기재된 내용으로 한정하는 것이 아니라 특허 청구 범위에 의해서 정해져야 한다. Accordingly, the technical scope of the present invention is not limited to the contents described in the examples should be defined by the claims.

Claims (4)

  1. 투명기판 상에 제 1 전극, 유기물층, 제 2 전극이 형성되는 유기 EL 소자에 있어서, In the organic EL device is a first electrode, organic material layer, the second electrode is formed on a transparent substrate,
    상기 유기물 증착에 사용되는 선 모양(linear)의 열 소스(source) 장치에 셔터(shutter)를 부착하는 것을 특징으로 하는 유기 EL의 열 소스 장치. Heat sources of the organic EL device, characterized in that for attaching the shutter (shutter) on the heat source (source) unit in the line-shaped (linear) used for the organic material deposition.
  2. 제 1 항에 있어서, 상기 셔터의 모양은 유기물이 증착되는 부분의 양에 따라 개구율을 작게하거나 크게 하는 것을 특징으로 하는 유기 EL의 열 소스 장치. The method of claim 1, wherein the shape of the shutter is open the source of the organic EL device, characterized in that to reduce the aperture ratio or larger, depending on the amount of the portion of the organic material deposition.
  3. 제 2 항에 있어서, 상기 개구율의 모양은 삼각 이상의 다각형 내지 원, 타원등 중 어느 하나의 모양이 이용되는 것을 특징으로 하는 유기 EL의 열 소스 장치. The method of claim 2, wherein the shape of the opening ratio is any one of a heat source of the organic EL device, characterized in that the shape is used, such as triangular or more of polygonal to a circle, an ellipse.
  4. 제 3 항에 있어서, 상기 개구율의 조절은 홀의 간격을 조절하거나, 홀의 크기를 조절하여 개구율을 줄이고, 또는 홀의 간격과 홀의 크기를 혼용하여 조절하므로 개구율이 조절되는 것을 특징으로 하는 유기 EL의 열 소스 장치. The method of claim 3, wherein the adjustment of the opening ratio will reduce the aperture ratio by adjusting the scaling, or the hole of the hole spacing or hole spacing and hole mix size adjustment, so the organic EL characterized in that the aperture ratio is adjustable heat source Device.
KR20020068147A 2002-11-05 2002-11-05 Heating source apparatus for Organic electron luminescence KR100504477B1 (en)

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