KR100839380B1 - Vacuum evaporation apparatus for organic light emission display - Google Patents

Vacuum evaporation apparatus for organic light emission display Download PDF

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KR100839380B1
KR100839380B1 KR20060105806A KR20060105806A KR100839380B1 KR 100839380 B1 KR100839380 B1 KR 100839380B1 KR 20060105806 A KR20060105806 A KR 20060105806A KR 20060105806 A KR20060105806 A KR 20060105806A KR 100839380 B1 KR100839380 B1 KR 100839380B1
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organic light
plate
gap
light emitting
magnet
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KR20060105806A
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KR20080038650A (en
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김의규
김태형
한욱
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삼성에스디아이 주식회사
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본 발명에 따른 유기 발광 표시 장치의 진공 증착 장치는 진공 챔버, 진공 내측 하부로 배치되는 증착원, 챔버 내부의 증착원 위로 증착마스크를 구비하며 배치되는 마스크 프레임 조립체 및 마스크 프레임 조립체와 증착되는 기판을 사이에 두고 배치되는 마그넷 유닛을 포함한다. A vacuum vapor deposition apparatus of the organic light emitting display device according to the present invention includes a deposition source, a mask frame that is provided with a vapor-deposition mask over the evaporation source in the chamber and positioning assembly and the mask-frame assembly and the substrate to be deposited is placed in a vacuum chamber, the vacuum inside the lower comprises a magnet unit disposed therebetween. 또한, 마그넷 유닛은 기판 측으로 배치되는 갭플레이트(gap plate) 및 갭플레이트와 간격을 두고 배치되는 금속 자성체(metal magnet)를 포함한다. In addition, the magnet unit comprises a gap plate (plate gap) and a gap plate and the metal magnetic material (metal magnet) arranged at a distance which is disposed toward the substrate.
유기발광표시장치, 증착, 마스크, 러버마그넷, 메탈마그넷, 갭플레이트 The organic light emitting display device, the deposition, mask, rubber magnet, magnet-metal, plate gap

Description

유기 발광 표시 장치의 진공 증착 장치{VACUUM EVAPORATION APPARATUS FOR ORGANIC LIGHT EMISSION DISPLAY} A vacuum vapor deposition apparatus of the organic light emitting display device {VACUUM EVAPORATION APPARATUS FOR ORGANIC LIGHT EMISSION DISPLAY}

도 1은 본 발명의 실시예에 따른 유기 발광 표시 장치의 진공 증착 장치의 개략도이다. 1 is a schematic view of a vacuum vapor deposition apparatus of the organic light emitting display according to an exemplary embodiment of the present invention.

도 2는 도 1의 마스크 프레임 조립체 및 마그넷 유닛의 확대 단면도이다. Figure 2 is an enlarged cross-sectional view of the mask-frame assembly and the magnet unit of Fig.

본 발명은 진공 증착 장치에 관한 것으로, 보다 상세하게는 금속 자성체(metal magnet)을 이용한 마그넷 유닛을 이용한 유기 발광 표시 장치의 진공 증착 장치에 관한 것이다. The present invention relates to a vacuum vapor deposition apparatus, and more particularly to a vacuum vapor deposition apparatus of the organic light emitting display device using a magnet unit with the metal magnetic material (metal magnet).

유기 발광 표시 장치는 유기물질에 양극(anode)과 음극(cathode)을 통하여 주입된 전자와 정공이 재결합(recombination)하여 여기자(exciton)를 형성하고, 형성된 여기자로부터의 에너지에 의해 특정한 파장의 빛이 발생하는 현상을 이용한 자체 발광형 표시 장치이다. The OLED display device is a light of specific wavelength by the energy from to the electrons and the holes which are injected through the positive electrode (anode) and the negative electrode (cathode) on the organic material recombination (recombination) to form an exciton (exciton), formed excitons a self-luminous display device using a phenomenon that occurs.

유기 발광 표시 장치는 백라이트와 같은 별도의 광원이 요구되지 않아 액정 표시 장치에 비해 소비 전력이 낮을 뿐만 아니라 광시야각 및 빠른 응답속도 확보 가 용이하다는 장점이 있어 차세대 표시 장치로서 주목 받고 있다. The organic light emitting display device there is a separate light source is not to be required, as well as lower power consumption than liquid crystal display devices and wide viewing angle, and fast response speed advantage of being easy to obtain, such as a back light has attracted attention as a next generation display device.

유기 발광 표시 장치의 발광 소자는 정공 주입 전극인 애노드 전극, 유기박막층 및 전자 주입 전극인 캐소드 전극으로 이루어지고, 유기박막층이 적(Red; R), 녹(G; Green) 및 청(Blue; B)을 내는 각각의 유기 물질로 이루어져 풀 칼라(full color)를 구현한다. A light emitting element of the organic light emitting display device includes a hole injection electrode, an anode electrode, made of an organic thin film layer, and an electron injection electrode, a cathode electrode, an organic thin film layer is less (Red; R), green (G; Green), and blue (Blue; B ) made up respectively of the organic material that implements a full-color (full color).

또한, 유기박막층은 전자와 정공의 균형을 좋게 하여 발광 효율을 높이도록 발광층(emitting layer; EML), 전자 수송층(electron transport layer; ETL) 및 정공 수송층(hole transport layer; HTL)을 포함한 다층 구조로 이루어질 수 있으며, 경우에 따라서는 별도의 전자 주입층(electron injection layer; EIL)과 홀 주입층(hole injection layer; HIL)을 더 포함할 수 있다. The organic thin film layer is a light emitting layer to enhance luminous efficiency by improving the electron-hole balance to a multi-layer structure including; (HTL hole transport layer) (emitting layer;; EML), an electron transporting layer (electron transport layer ETL) and a hole transport layer can be made and, in some cases, a separate electron injection layer may further include;; (HIL hole injection layer) (electron injection layer EIL) and a hole injection layer.

이와 같이 구성된 유기 발광 표시 장치를 제작함에 있어서, 투명한 절연기판에 ITO등으로 이루어진 애노드 전극을 포토리소 그래피법 등으로 성막하여 스트라이프 형상으로 형성한다. In the production of such a configuration as the organic light emitting display device, by forming the anode electrode made of ITO or the like on a transparent insulating substrate as a photolithography method or the like is formed in a stripe shape.

그리고 애노드 전극이 형성된 기판에 유기박막층 및 캐소드 전극의 형성패턴과 동일한 패턴을 갖는 마스크를 밀착시키고 증착물질을 증착하여 유기박막층 및 캐소드 전극의 패턴을 형성한다. And the anode electrode is adhered to a mask having the same pattern as the pattern formed in the organic thin film layer and a cathode electrode formed on the substrate and depositing a deposition material to form a pattern of the organic thin film layer and a cathode electrode.

또한, 상기와 같은 증착 공정을 실시함에 있어서, 상기한 기판과 마스크를 밀착시키기 위해 일반적으로 고무 자성체(rubber magnet)를 사용하고 있다. Further, using the In carrying out the deposition process as described above, general magnetic material rubber (rubber magnet) in order to close the above-mentioned substrate and the mask.

그런데 상기한 고무 자성체를 사용하여 기판과 마스크를 고정한 상태에서 유기 박막을 증착하는 경우에는 고무 자성체에서 아웃개싱(out gassing)이 발생하게 되며, 상기한 아웃개싱은 유기 발광층의 수명을 저하시키는 주요 요인으로 작용한다. However, the main factor in the case using the rubber magnetic material to deposit an organic thin film in a state fixed to the substrate and the mask, and that this outgassing (out gassing) generated in the rubber magnetic material, wherein the outgassing decreases the life of the organic light-emitting layer It acts as a.

또한, 고무 자성체는 금속 자성체(metal magnet)에 비해 자력의 세기가 약하고, 자장이 불균일하므로 대형의 기판에 증착을 실시하는 경우에 적용하기에는 부적합하다. Further, the rubber magnetic material is not suitable to apply to the case of performing the deposition on a large substrate is weak and the intensity of the magnetic force, a magnetic field is not uniform, so compared with the metal magnetic material (metal magnet).

본 발명은 상기한 문제점을 해결하기 위한 것으로, 본 발명의 목적은 금속 자성체를 사용하여 아웃개싱을 방지하고, 대면적의 기판에 대한 증착 공정에 적합한 진공 증착 장치를 제공하는 데 있다. The present invention for solving the above problems, an object of this invention to use a metal magnetic material to prevent outgassing and provides a vacuum vapor deposition apparatus suitable for deposition on a substrate of large area.

본 발명에 따른 유기 발광 표시 장치의 진공 증착 장치는 진공 챔버, 진공 내측 하부로 배치되는 증착원, 챔버 내부의 증착원 위로 증착마스크를 구비하며 배치되는 마스크 프레임 조립체 및 마스크 프레임 조립체와 증착되는 기판을 사이에 두고 배치되는 마그넷 유닛을 포함한다. A vacuum vapor deposition apparatus of the organic light emitting display device according to the present invention includes a deposition source, a mask frame that is provided with a vapor-deposition mask over the evaporation source in the chamber and positioning assembly and the mask-frame assembly and the substrate to be deposited is placed in a vacuum chamber, the vacuum inside the lower comprises a magnet unit disposed therebetween. 또한, 마그넷 유닛은 기판 측으로 배치되는 갭플레이트(gap plate) 및 갭플레이트와 간격을 두고 배치되는 금속 자성체(metal magnet)를 포함한다. In addition, the magnet unit comprises a gap plate (plate gap) and a gap plate and the metal magnetic material (metal magnet) arranged at a distance which is disposed toward the substrate.

또한, 갭플레이트는 일정한 간격을 두고 형성되는 복수의 홈들을 구비하고, 금속 자성체는 홈들의 내부로 배치될 수 있다. Further, the gap plates are provided with a plurality of grooves formed with a predetermined interval, and a metal magnetic substance may be placed into the interior of the groove.

또한, 이웃하는 금속 자성체들이 서로 반대의 극 방향으로 배치될 수 있다. In addition, the neighboring metal magnetic body may be arranged in a polarity opposite to each other.

또한, 갭플레이트의 내부로 설치되는 냉각 튜브를 더 포함할 수 있다. And, the method may further include a cooling tube which is installed into the interior of the plate gap.

또한, 마그넷 유닛은 그 하부로 금속 자성체가 일정한 간격으로 배열되는 마그넷 플레이트를 더 포함할 수 있다. Further, the magnet unit may further comprise a magnet plate which is a metallic magnetic material arranged at a constant interval in the lower portion.

이하, 첨부한 도면을 참고로 하여 본 발명의 실시예에 대하여 본 발명이 속하는 기술 분야에서 통상의 지식을 가진 자가 용이하게 실시할 수 있도록 상세히 설명한다. It will now be described in detail so that the invention can be easily implemented by those of ordinary skill, in which with respect to the embodiment of the present invention with reference to the accompanying drawings. 본 발명은 여러 가지 상이한 형태로 구현될 수 있으며 여기에서 설명하는 실시예에 한정되지 않는다. The invention is not be implemented in many different forms and limited to the embodiments set forth herein.

도 1은 본 발명의 실시예에 따른 진공 증착 장치를 도시한 개략도이다. 1 is a schematic view showing a vacuum vapor deposition apparatus according to an embodiment of the invention. 도시한 바와 같이, 본 발명의 실시예에 따른 진공 증착 장치는 내부가 진공으로 유지되는 챔버(10), 챔버(10) 내부에 배치되는 증착원(20), 증착원(20)의 상부로 배치되는 마스크 프레임 조립체(30), 및 마스크 프레임 조립체(30)와의 사이에 기판(40)을 두고 배치되는 마그넷 유닛(50)을 포함한다. As shown, the vacuum vapor deposition apparatus according to an embodiment of the present invention is arranged in the upper part of the evaporation source 20, the evaporation source 20 is inside the disposed within the chamber 10, the chamber 10 is maintained at a vacuum with the substrate 40 between the mask frame assembly 30, and a mask-frame assembly 30 that includes a magnet unit (50) is arranged.

챔버(10)의 내부는 기판(40)에 박막을 증착 시 내부 공간이 소정의 진공도와 상온보다 높은 소정의 온도로 유지된다. The interior of the chamber 10, the internal space when depositing a thin film on the substrate 40 is kept at a predetermined temperature higher than a predetermined degree of vacuum and at room temperature.

증착원(20)은 챔버(10) 내의 상부 또는 하부로 증착물을 수용하며 배치되고, 이 증착원(20)의 반대측에 마스크(32)와 프레임(34)이 결합된 마스크 프레임 조립체(30)를 개재한 상태로 기판(40)이 배치된다. Evaporation source 20 is a mask 32 and a frame 34 fitted with a mask-frame assembly 30 on the opposite side of and receiving the deposition material, and arranged in the upper or lower, the evaporation source 20 of the chamber 10 the substrate 40 is disposed in a sandwiched state.

이때, 마스크(32)는 프레임(34)에 인장력이 가하여지도록 고정된다. At this time, the mask 32 is fixed such that applying a tensile force to the frame 34.

프레임(34)은 중앙이 개구된 직사각형으로 이루어질 수 있으며, 탄성력을 가지는 재질로 형성될 수 있다. Frame 34 may be formed with a central opening is a rectangle, and may be formed of a material having an elastic force. 또한, 프레임(34)은 마스크(32)에 가하여지는 인장력을 충분히 견딜 수 있는 강성을 가져야 하며 피 증착물과 마스크(32)의 밀착 시 간섭을 일으키지 않은 구조를 갖는다. In addition, the frame 34 must have a rigidity enough to withstand the tensile force acting on the mask 32 and has a structure that is causing adhesion when the interference of the blood and deposition mask 32. The

상기한 프레임(34)은 36Alloy(Invar), 42Alloy, SUS410, SUS420 및 SUS430 등의 재질로 이루어질 수 있다. The frame 34 may be formed of a material such as 36Alloy (Invar), 42Alloy, SUS410, SUS420 and SUS430.

마스크(32)는 프레임(34)에 인장력이 가하여지도록 그 가장자리부가 지지되고, 복수의 단위 패턴을 구비하며, 하나의 단위 패턴에 의해 하나의 소자가 증착된다. Mask 32 is added so that the edge of the support was added a tensile force to the frame 34, and includes a plurality of unit pattern, one element is deposited by a unit pattern.

각 단위 패턴에는 소정의 슬롯들이 형성되어 피증착될 박막이 소정의 패턴으로 형성될 수 있도록 한다. Each of the unit pattern, so that a thin film to be vapor-deposited is formed to a given slot may be formed in a predetermined pattern.

마스크(32)는 자성을 띤 박판으로 이루어질 수 있는 데, 니켈 또는 니켈과 코발트의 합금으로 이루어질 수 있고, 바람직하게는 미세 패턴의 형성이 용이하고, 표면 거칠기가 좋은 니켈 85 중량%와 코발트 15중량%으로 이루어진 합금으로 이루어질 수 있다. Mask 32 is used which may be made as thin magnetically, it is made of nickel or an alloy of nickel and cobalt, and preferably facilitate the formation of a fine pattern, and the surface roughness is good nickel 85% by weight of cobalt 15 wt. It may be made of an alloy consisting of in%.

또한, 마스크(32)는 슬롯을 전주(electro forming)법에 의해 형성하여 미세한 패터닝과 우수한 표면 평활성을 얻도록할 수 있다. In addition, the mask 32 may be formed by a slot in the pole (electro forming) method to so as to obtain a fine pattern and an excellent surface smoothness. 이러한 증착용 마스크(32)는 에칭(etching) 방법에 의해서도 제조될 수 있는 데, 포토 레지스트를 이용해 슬롯의 패턴을 가지는 레지스트 층을 박판에 형성하거나 슬롯의 패턴을 가진 필름을 박판에 부착한 후 박판을 에칭함으로써 제조할 수 있다. The deposition mask 32 is etched (etching) method to which may be prepared according to, using the photoresist and then forming a resist layer on a thin plate having a pattern of slots or attaching a film having a pattern of slots in the sheet metal foil a can be prepared by etching.

한편, 마그넷 유닛(50)은 기판(40)을 사이에 두고 마스크 프레임 조립체(30)와 대향되도록 배치되며, 마그넷 유닛(50)에서 발생하는 자장에 의해 마스크(32)가 기판(40)에 밀착되어 피증착물에 음영이 생기지 않도록 한다. On the other hand, close to the magnet unit 50 is interposed between the substrate 40, the mask frame assembly 30 and is disposed so as to be opposed, the mask 32 has the substrate 40 by the magnetic field generated from the magnet unit (50) Do the shades arise to avoid deposits.

상기와 같은 진공 증착 장치를 사용하여 기판(40)에 박막을 증착함에 있어서, 전술한 바와 같이 챔버(10)의 내부 공간을 소정의 진공도를 갖는 진공으로 유지하고, 상온보다 높은 소정의 온도로 만든 후, 증착원(20)으로부터 증착물을 기화 또는 승화시켜 마스크(32)를 통해 기판(40)에 증착한다. In as depositing a thin film on the substrate 40 using a vacuum deposition apparatus as described above, keeping the inner space of the chamber 10 as described above in a vacuum having a predetermined degree of vacuum, and made to a predetermined temperature higher than room temperature, then, the vaporized or sublimed from an evaporation source for deposition material 20 is deposited on substrate 40 through a mask 32. the

이하에서는 마그넷 유닛(50)의 구성에 대하여 상세하게 설명하도록 한다. Hereinafter, detailed description will be given to the configuration of the magnet unit (50). 도 2는 도 1의 마스크 프레임 조립체(30), 기판(40) 및 마그넷 유닛(50)을 확대하여 도시한 단면도이다. Figure 2 is a sectional view showing an enlarged view of the mask-frame assembly 30, the substrate 40 and the magnet unit 50 of Fig.

도시한 바와 같이, 마그넷 유닛(50)은 갭플레이트(gap plate, 52), 갭플레이트(52)와 일정 거리를 두고 배치되는 금속 자성체(54) 및 금속 자성체(54)가 결합되어 배열되는 마그넷 플레이트(58)를 포함한다. As shown, the magnet unit 50 is coupled to the gap plate (gap plate, 52), the gap plate 52 and a distance the metal magnetic body 54 and the metal magnetic body 54 which is spaced and arranged in the magnet plate and a 58.

이와 같이, 본 발명의 실시예에 따른 진공 증착 장치는 강력하고 균일한 자장을 발생시키는 금속 자성체(54)를 구비함으로써 대형 기판(40)의 증착 시 기판(40)과 마스크(32)를 강력하게 밀착시킬 수 있다. In this way, a vacuum vapor deposition apparatus according to an embodiment of the present invention is a strong, robust deposition when the substrate 40 and the mask 32 in the by having a metal magnetic body (54) for generating a uniform magnetic field large board 40 adhesive can be.

이 경우 고무 자성체를 사용하는 경우와는 달리 아웃개싱이 발생할 염려가 없다. In this case, unlike the case of using a rubber magnetic material it does not have to worry about the outgassing occurs.

갭플레이트(52)에는 복수의 홈(52a)이 일정한 간격을 두고 형성된다. Gap plate 52 is formed with a plurality of grooves (52a) at regular intervals. 상기한 홈(52a)의 내측으로는 금속 자성체(54)가 상기한 갭플레이트(52)에 접촉하지 않으면서 배치된다. To the inside of the one groove (52a) it is arranged without contact with the gap plate 52 above the metal magnetic material (54). 이에 따라 복수의 금속 자성체들(54)은 서로 일정한 피치를 형성하며 배치된다. Thus in accordance with a plurality of metal magnetic body 54 it is formed in a predetermined pitch from each other, and are arranged.

또한, 상기와 같이 금속 자성체(54)가 갭플레이트(52)에 접촉하지 않으므로 기판(40)이 깨어지는 것이 방지된다. In addition, the metal magnetic body 54 as described above does not come into contact with the gap plate 52 is prevented from the substrate 40 is to be broken.

한편, 도시한 바와 같이 이웃하는 금속 자성체들(54)은 그 극의 방향이 서로 반대가 되도록 배열될 수 있다. On the other hand, the neighboring metal as illustrated magnetic body 54 may be arranged to be opposite to each other that the direction of the pole. 즉, 하나의 금속 자성체(54)의 N극이 갭플레이트(52) 및 기판(40)의 방향으로 배열되면, 이와 이웃하는 금속 자성체(54)의 S극이 갭플레이트(52) 및 기판(40)의 방향으로 의 배치될 수 있다. That is, when the N-pole of a metal magnetic body 54 is arranged in the direction of the gap plate 52 and the substrate 40, on the other neighboring metal S-pole of the magnetic body 54, a gap plate 52 and the substrate (40 ) it can be arranged in the direction of.

또한, 상기한 갭플레이트(52)의 내부에는 내부로 냉각수가 흐르는 냉각 튜브가 배치되어 기판(40)의 온도를 균일하게 유지시켜 줄 수 있다. In addition, the interior of the plate a gap (52) is arranged to cool the cooling water flowing through the tube into the can line by uniformly maintaining the temperature of the substrate 40.

상기에서는 본 발명의 바람직한 실시예에 대하여 설명하였지만, 본 발명은 이에 한정되는 것이 아니고 특허청구범위와 발명의 상세한 설명 및 첨부한 도면의 범위 안에서 여러 가지로 변형하여 실시하는 것이 가능하고 이 또한 본 발명의 범위에 속하는 것은 당연하다. In the above has been described with a preferred embodiment of the present invention, and the present invention is not limited to this can be carried out in various modifications in the detailed description and the scope of the appended figures of the appended claims and the invention is also the invention It is within the scope of the wonder.

상술한 바와 같이, 본 발명의 진공 증착 장치에 따르면 금속 자성체를 사용함으로써 고무 자성체의 사용시 발생하는 아웃개싱을 방지할 수 있으며, 강하고 균일한 자장을 제공하여 대면적 기판의 증착에 적용이 가능하다. As it described above, according to the vacuum vapor deposition apparatus of the present invention it is possible to prevent outgassing generated when using the rubber magnetic material by using a metal magnetic body, providing a strong and uniform magnetic field to be applied to the deposition of large area substrates.

Claims (5)

  1. 진공 챔버; A vacuum chamber;
    상기 진공 챔버 내측 하부로 배치되는 증착원; An evaporation source disposed in the inner lower portion of the vacuum chamber;
    상기 진공 챔버 내부의 상기 증착원 위로 증착마스크를 구비하며 배치되는 마스크 프레임 조립체; A mask frame assembly that is provided and placing the deposition mask above the evaporation source inside the vacuum chamber; And
    상기 마스크 프레임 조립체와 증착되는 기판을 사이에 두고 배치되는 마그넷 유닛 Magnet unit is disposed across the substrate to be deposited and the mask frame assembly
    을 포함하고, And including,
    상기 마그넷 유닛은, It said magnet unit comprises:
    상기 기판 측으로 배치되는 갭플레이트(gap plate); Gap plate (plate gap) is arranged toward the substrate; And
    상기 갭플레이트와 간격을 두고 배치되는 금속 자성체(metal magnet) Metal is disposed with the gap spacing and the magnetic material plate (metal magnet)
    를 포함하는 유기 발광 표시 장치의 진공 증착 장치. A vacuum vapor deposition apparatus of the organic light emitting display apparatus including a.
  2. 제1 항에 있어서, According to claim 1,
    상기 갭플레이트는 일정한 간격을 두고 형성되는 복수의 홈들을 구비하고, 상기 금속 자성체는 상기 홈들의 내부로 배치되는 유기 발광 표시 장치의 진공 증착 장치. The gap plates are provided with a plurality of grooves formed at constant intervals, the metal magnetic material is a vacuum vapor deposition apparatus of the organic light emitting display device is arranged to the inside of the groove.
  3. 제2 항에 있어서, 3. The method of claim 2,
    이웃하는 상기 금속 자성체들이 서로 반대의 극 방향으로 배치되는 유기 발광 표시 장치의 진공 증착 장치. Adjacent the metal magnetic body to one another vacuum vapor deposition apparatus of the organic light emitting display device are arranged in a polarity opposite to that.
  4. 제1 항에 있어서, According to claim 1,
    상기 갭플레이트의 내부로 설치되는 냉각 튜브를 더 포함하는 유기 발광 표시 장치의 진공 증착 장치. A vacuum vapor deposition apparatus of the organic light emitting display device further comprises a cooling tube which is installed into the interior of the plate gap.
  5. 제1 항에 있어서, According to claim 1,
    상기 마그넷 유닛은 그 하부로 상기 금속 자성체가 일정한 간격으로 배열되는 마그넷 플레이트를 더 포함하는 유기 발광 표시 장치의 진공 증착 장치. The magnet unit is a vacuum vapor deposition apparatus as that of the lower organic light emitting display further comprises a magnet plate which is arranged in the metal magnetic material at regular intervals.
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Cited By (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8193011B2 (en) 2009-08-24 2012-06-05 Samsung Mobile Display Co., Ltd. Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same
US8707889B2 (en) 2011-05-25 2014-04-29 Samsung Display Co., Ltd. Patterning slit sheet assembly, organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus, and the organic light-emitting display apparatus
US8833294B2 (en) 2010-07-30 2014-09-16 Samsung Display Co., Ltd. Thin film deposition apparatus including patterning slit sheet and method of manufacturing organic light-emitting display device with the same
US8846547B2 (en) 2010-09-16 2014-09-30 Samsung Display Co., Ltd. Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the thin film deposition apparatus, and organic light-emitting display device manufactured by using the method
US8852687B2 (en) 2010-12-13 2014-10-07 Samsung Display Co., Ltd. Organic layer deposition apparatus
US8859043B2 (en) 2011-05-25 2014-10-14 Samsung Display Co., Ltd. Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same
US8859325B2 (en) 2010-01-14 2014-10-14 Samsung Display Co., Ltd. Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method
US8871542B2 (en) 2010-10-22 2014-10-28 Samsung Display Co., Ltd. Method of manufacturing organic light emitting display apparatus, and organic light emitting display apparatus manufactured by using the method
US8876975B2 (en) 2009-10-19 2014-11-04 Samsung Display Co., Ltd. Thin film deposition apparatus
US8882921B2 (en) 2009-06-08 2014-11-11 Samsung Display Co., Ltd. Thin film deposition apparatus
US8882556B2 (en) 2010-02-01 2014-11-11 Samsung Display Co., Ltd. Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method
US8882922B2 (en) 2010-11-01 2014-11-11 Samsung Display Co., Ltd. Organic layer deposition apparatus
US8882920B2 (en) 2009-06-05 2014-11-11 Samsung Display Co., Ltd. Thin film deposition apparatus
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US8906731B2 (en) 2011-05-27 2014-12-09 Samsung Display Co., Ltd. Patterning slit sheet assembly, organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus, and the organic light-emitting display apparatus
US8907326B2 (en) 2009-06-24 2014-12-09 Samsung Display Co., Ltd. Organic light-emitting display device and thin film deposition apparatus for manufacturing the same
US8916237B2 (en) 2009-05-22 2014-12-23 Samsung Display Co., Ltd. Thin film deposition apparatus and method of depositing thin film
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US8945974B2 (en) 2012-09-20 2015-02-03 Samsung Display Co., Ltd. Method of manufacturing organic light-emitting display device using an organic layer deposition apparatus
US8945979B2 (en) 2012-11-09 2015-02-03 Samsung Display Co., Ltd. Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus by using the same, and organic light-emitting display apparatus manufactured by the method
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US9012258B2 (en) 2012-09-24 2015-04-21 Samsung Display Co., Ltd. Method of manufacturing an organic light-emitting display apparatus using at least two deposition units
US9018647B2 (en) 2010-09-16 2015-04-28 Samsung Display Co., Ltd. Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method
US9040330B2 (en) 2013-04-18 2015-05-26 Samsung Display Co., Ltd. Method of manufacturing organic light-emitting display apparatus
US9051636B2 (en) 2011-12-16 2015-06-09 Samsung Display Co., Ltd. Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus using the same, and organic light-emitting display apparatus
US9136476B2 (en) 2013-03-20 2015-09-15 Samsung Display Co., Ltd. Method of manufacturing organic light-emitting display apparatus, and organic light-emitting display apparatus manufactured by the method
US9150952B2 (en) 2011-07-19 2015-10-06 Samsung Display Co., Ltd. Deposition source and deposition apparatus including the same
US9174250B2 (en) 2009-06-09 2015-11-03 Samsung Display Co., Ltd. Method and apparatus for cleaning organic deposition materials
US9206501B2 (en) 2011-08-02 2015-12-08 Samsung Display Co., Ltd. Method of manufacturing organic light-emitting display apparatus by using an organic layer deposition apparatus having stacked deposition sources
US9234270B2 (en) 2011-05-11 2016-01-12 Samsung Display Co., Ltd. Electrostatic chuck, thin film deposition apparatus including the electrostatic chuck, and method of manufacturing organic light emitting display apparatus by using the thin film deposition apparatus
US9249493B2 (en) 2011-05-25 2016-02-02 Samsung Display Co., Ltd. Organic layer deposition apparatus and method of manufacturing organic light-emitting display apparatus by using the same
US9257649B2 (en) 2012-07-10 2016-02-09 Samsung Display Co., Ltd. Method of manufacturing organic layer on a substrate while fixed to electrostatic chuck and charging carrier using contactless power supply module
US9260778B2 (en) 2012-06-22 2016-02-16 Samsung Display Co., Ltd. Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus using the same, and organic light-emitting display apparatus manufactured using the method
US9279177B2 (en) 2010-07-07 2016-03-08 Samsung Display Co., Ltd. Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method
US9306191B2 (en) 2012-10-22 2016-04-05 Samsung Display Co., Ltd. Organic light-emitting display apparatus and method of manufacturing the same
US9347886B2 (en) 2013-06-24 2016-05-24 Samsung Display Co., Ltd. Apparatus for monitoring deposition rate, apparatus provided with the same for depositing organic layer, method of monitoring deposition rate, and method of manufacturing organic light emitting display apparatus using the same
US9388488B2 (en) 2010-10-22 2016-07-12 Samsung Display Co., Ltd. Organic film deposition apparatus and method of manufacturing organic light-emitting display device by using the same
US9450140B2 (en) 2009-08-27 2016-09-20 Samsung Display Co., Ltd. Thin film deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same
US9453282B2 (en) 2010-03-11 2016-09-27 Samsung Display Co., Ltd. Thin film deposition apparatus
US9461277B2 (en) 2012-07-10 2016-10-04 Samsung Display Co., Ltd. Organic light emitting display apparatus
US9496524B2 (en) 2012-07-10 2016-11-15 Samsung Display Co., Ltd. Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus using the same, and organic light-emitting display apparatus manufactured using the method
US9496317B2 (en) 2013-12-23 2016-11-15 Samsung Display Co., Ltd. Method of manufacturing organic light emitting display apparatus
US9512515B2 (en) 2011-07-04 2016-12-06 Samsung Display Co., Ltd. Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same
US9534288B2 (en) 2013-04-18 2017-01-03 Samsung Display Co., Ltd. Deposition apparatus, method of manufacturing organic light-emitting display apparatus by using same, and organic light-emitting display apparatus manufactured by using deposition apparatus
US9624580B2 (en) 2009-09-01 2017-04-18 Samsung Display Co., Ltd. Thin film deposition apparatus
US9748483B2 (en) 2011-01-12 2017-08-29 Samsung Display Co., Ltd. Deposition source and organic layer deposition apparatus including the same
US9873937B2 (en) 2009-05-22 2018-01-23 Samsung Display Co., Ltd. Thin film deposition apparatus
US10246769B2 (en) 2010-01-11 2019-04-02 Samsung Display Co., Ltd. Thin film deposition apparatus

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101649905B1 (en) * 2009-12-07 2016-08-23 엘지디스플레이 주식회사 Evaporation Apparatus For Organic Light Emitting Display
KR20140139360A (en) * 2013-05-27 2014-12-05 삼성디스플레이 주식회사 Substrate transfer unit for deposition, deposition apparatus comprising the same, method for manufacturing organic light emitting display apparatus using the same, organic light emitting display apparatus manufacture by the method
KR20160033339A (en) 2014-09-17 2016-03-28 삼성디스플레이 주식회사 Magnet plate assembly, and apparatus for deposition comprising the same and the method of depositing using the same
KR20160054114A (en) 2014-11-05 2016-05-16 삼성디스플레이 주식회사 Mask frame assembly for deposition, manufacturing method of the same
KR20160090984A (en) 2015-01-22 2016-08-02 삼성디스플레이 주식회사 Position controllable magnet plate
KR20160127221A (en) 2015-04-23 2016-11-03 삼성디스플레이 주식회사 Mask frame assembly for thin layer deposition, manufacturing method of the same and manufacturing method of display device there used

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030069679A (en) * 2002-02-22 2003-08-27 삼성에스디아이 주식회사 magnet plate for alignment of mask of organic thin film deposition device and alignment structur of magnet plate between mask
JP2004146251A (en) * 2002-10-25 2004-05-20 Asahi Glass Co Ltd Metal mask deposition method, wiring pattern, and organic electroluminescence display element
KR20050035561A (en) * 2003-10-13 2005-04-19 삼성오엘이디 주식회사 Mask frame assembly, and forming apparatus of thin layer

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030069679A (en) * 2002-02-22 2003-08-27 삼성에스디아이 주식회사 magnet plate for alignment of mask of organic thin film deposition device and alignment structur of magnet plate between mask
JP2004146251A (en) * 2002-10-25 2004-05-20 Asahi Glass Co Ltd Metal mask deposition method, wiring pattern, and organic electroluminescence display element
KR20050035561A (en) * 2003-10-13 2005-04-19 삼성오엘이디 주식회사 Mask frame assembly, and forming apparatus of thin layer

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8916237B2 (en) 2009-05-22 2014-12-23 Samsung Display Co., Ltd. Thin film deposition apparatus and method of depositing thin film
US9873937B2 (en) 2009-05-22 2018-01-23 Samsung Display Co., Ltd. Thin film deposition apparatus
US8882920B2 (en) 2009-06-05 2014-11-11 Samsung Display Co., Ltd. Thin film deposition apparatus
US8882921B2 (en) 2009-06-08 2014-11-11 Samsung Display Co., Ltd. Thin film deposition apparatus
US9174250B2 (en) 2009-06-09 2015-11-03 Samsung Display Co., Ltd. Method and apparatus for cleaning organic deposition materials
US8907326B2 (en) 2009-06-24 2014-12-09 Samsung Display Co., Ltd. Organic light-emitting display device and thin film deposition apparatus for manufacturing the same
US8193011B2 (en) 2009-08-24 2012-06-05 Samsung Mobile Display Co., Ltd. Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same
US8921831B2 (en) 2009-08-24 2014-12-30 Samsung Display Co., Ltd. Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method
US9450140B2 (en) 2009-08-27 2016-09-20 Samsung Display Co., Ltd. Thin film deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same
US9624580B2 (en) 2009-09-01 2017-04-18 Samsung Display Co., Ltd. Thin film deposition apparatus
US9224591B2 (en) 2009-10-19 2015-12-29 Samsung Display Co., Ltd. Method of depositing a thin film
US8876975B2 (en) 2009-10-19 2014-11-04 Samsung Display Co., Ltd. Thin film deposition apparatus
US8951349B2 (en) 2009-11-20 2015-02-10 Samsung Display Co., Ltd. Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same
US9660191B2 (en) 2009-11-20 2017-05-23 Samsung Display Co., Ltd. Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same
US10287671B2 (en) 2010-01-11 2019-05-14 Samsung Display Co., Ltd. Thin film deposition apparatus
US10246769B2 (en) 2010-01-11 2019-04-02 Samsung Display Co., Ltd. Thin film deposition apparatus
US8859325B2 (en) 2010-01-14 2014-10-14 Samsung Display Co., Ltd. Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method
US8882556B2 (en) 2010-02-01 2014-11-11 Samsung Display Co., Ltd. Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method
US9453282B2 (en) 2010-03-11 2016-09-27 Samsung Display Co., Ltd. Thin film deposition apparatus
US8894458B2 (en) 2010-04-28 2014-11-25 Samsung Display Co., Ltd. Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method
US9136310B2 (en) 2010-04-28 2015-09-15 Samsung Display Co., Ltd. Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method
US9279177B2 (en) 2010-07-07 2016-03-08 Samsung Display Co., Ltd. Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method
US8833294B2 (en) 2010-07-30 2014-09-16 Samsung Display Co., Ltd. Thin film deposition apparatus including patterning slit sheet and method of manufacturing organic light-emitting display device with the same
US9018647B2 (en) 2010-09-16 2015-04-28 Samsung Display Co., Ltd. Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method
US8846547B2 (en) 2010-09-16 2014-09-30 Samsung Display Co., Ltd. Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the thin film deposition apparatus, and organic light-emitting display device manufactured by using the method
US8871542B2 (en) 2010-10-22 2014-10-28 Samsung Display Co., Ltd. Method of manufacturing organic light emitting display apparatus, and organic light emitting display apparatus manufactured by using the method
US9388488B2 (en) 2010-10-22 2016-07-12 Samsung Display Co., Ltd. Organic film deposition apparatus and method of manufacturing organic light-emitting display device by using the same
US8882922B2 (en) 2010-11-01 2014-11-11 Samsung Display Co., Ltd. Organic layer deposition apparatus
US8852687B2 (en) 2010-12-13 2014-10-07 Samsung Display Co., Ltd. Organic layer deposition apparatus
US9748483B2 (en) 2011-01-12 2017-08-29 Samsung Display Co., Ltd. Deposition source and organic layer deposition apparatus including the same
US9234270B2 (en) 2011-05-11 2016-01-12 Samsung Display Co., Ltd. Electrostatic chuck, thin film deposition apparatus including the electrostatic chuck, and method of manufacturing organic light emitting display apparatus by using the thin film deposition apparatus
US9076982B2 (en) 2011-05-25 2015-07-07 Samsung Display Co., Ltd. Patterning slit sheet assembly, organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus, and the organic light-emitting display apparatus
US9249493B2 (en) 2011-05-25 2016-02-02 Samsung Display Co., Ltd. Organic layer deposition apparatus and method of manufacturing organic light-emitting display apparatus by using the same
US8707889B2 (en) 2011-05-25 2014-04-29 Samsung Display Co., Ltd. Patterning slit sheet assembly, organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus, and the organic light-emitting display apparatus
US8859043B2 (en) 2011-05-25 2014-10-14 Samsung Display Co., Ltd. Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same
US8906731B2 (en) 2011-05-27 2014-12-09 Samsung Display Co., Ltd. Patterning slit sheet assembly, organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus, and the organic light-emitting display apparatus
US9777364B2 (en) 2011-07-04 2017-10-03 Samsung Display Co., Ltd. Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same
US9512515B2 (en) 2011-07-04 2016-12-06 Samsung Display Co., Ltd. Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same
US8951610B2 (en) 2011-07-04 2015-02-10 Samsung Display Co., Ltd. Organic layer deposition apparatus
US9150952B2 (en) 2011-07-19 2015-10-06 Samsung Display Co., Ltd. Deposition source and deposition apparatus including the same
US9206501B2 (en) 2011-08-02 2015-12-08 Samsung Display Co., Ltd. Method of manufacturing organic light-emitting display apparatus by using an organic layer deposition apparatus having stacked deposition sources
US9051636B2 (en) 2011-12-16 2015-06-09 Samsung Display Co., Ltd. Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus using the same, and organic light-emitting display apparatus
US9260778B2 (en) 2012-06-22 2016-02-16 Samsung Display Co., Ltd. Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus using the same, and organic light-emitting display apparatus manufactured using the method
US9496524B2 (en) 2012-07-10 2016-11-15 Samsung Display Co., Ltd. Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus using the same, and organic light-emitting display apparatus manufactured using the method
US9257649B2 (en) 2012-07-10 2016-02-09 Samsung Display Co., Ltd. Method of manufacturing organic layer on a substrate while fixed to electrostatic chuck and charging carrier using contactless power supply module
US9461277B2 (en) 2012-07-10 2016-10-04 Samsung Display Co., Ltd. Organic light emitting display apparatus
US8956697B2 (en) 2012-07-10 2015-02-17 Samsung Display Co., Ltd. Method of manufacturing organic light-emitting display apparatus and organic light-emitting display apparatus manufactured by using the method
US8945974B2 (en) 2012-09-20 2015-02-03 Samsung Display Co., Ltd. Method of manufacturing organic light-emitting display device using an organic layer deposition apparatus
US9012258B2 (en) 2012-09-24 2015-04-21 Samsung Display Co., Ltd. Method of manufacturing an organic light-emitting display apparatus using at least two deposition units
US9306191B2 (en) 2012-10-22 2016-04-05 Samsung Display Co., Ltd. Organic light-emitting display apparatus and method of manufacturing the same
US8945979B2 (en) 2012-11-09 2015-02-03 Samsung Display Co., Ltd. Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus by using the same, and organic light-emitting display apparatus manufactured by the method
US9136476B2 (en) 2013-03-20 2015-09-15 Samsung Display Co., Ltd. Method of manufacturing organic light-emitting display apparatus, and organic light-emitting display apparatus manufactured by the method
US8993360B2 (en) 2013-03-29 2015-03-31 Samsung Display Co., Ltd. Deposition apparatus, method of manufacturing organic light emitting display apparatus, and organic light emitting display apparatus
US9040330B2 (en) 2013-04-18 2015-05-26 Samsung Display Co., Ltd. Method of manufacturing organic light-emitting display apparatus
US9534288B2 (en) 2013-04-18 2017-01-03 Samsung Display Co., Ltd. Deposition apparatus, method of manufacturing organic light-emitting display apparatus by using same, and organic light-emitting display apparatus manufactured by using deposition apparatus
US8962360B2 (en) 2013-06-17 2015-02-24 Samsung Display Co., Ltd. Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the organic layer deposition apparatus
US9347886B2 (en) 2013-06-24 2016-05-24 Samsung Display Co., Ltd. Apparatus for monitoring deposition rate, apparatus provided with the same for depositing organic layer, method of monitoring deposition rate, and method of manufacturing organic light emitting display apparatus using the same
US9496317B2 (en) 2013-12-23 2016-11-15 Samsung Display Co., Ltd. Method of manufacturing organic light emitting display apparatus

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