CN110094935A - Minton dryer - Google Patents
Minton dryer Download PDFInfo
- Publication number
- CN110094935A CN110094935A CN201910412022.1A CN201910412022A CN110094935A CN 110094935 A CN110094935 A CN 110094935A CN 201910412022 A CN201910412022 A CN 201910412022A CN 110094935 A CN110094935 A CN 110094935A
- Authority
- CN
- China
- Prior art keywords
- bleeding point
- area
- minton dryer
- cabinet
- accommodating cabinet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
- F26B25/005—Treatment of dryer exhaust gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B5/00—Drying solid materials or objects by processes not involving the application of heat
- F26B5/04—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum
- F26B5/045—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum for drying thin, flat articles in a batch operation, e.g. leather, rugs, gels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B9/00—Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards
- F26B9/06—Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards in stationary drums or chambers
Abstract
The present invention provides a kind of Minton dryer, and wherein the device includes: accommodating cabinet, and wherein at least two is respectively arranged with bleeding point on surface；Air pathway structure, including multiple interface interconnecting pieces, each interface coupling portion Lian Jie not a bleeding points；Vacuum pumping pump is connect with the air pathway structure, and by the air pathway structure, the vacuum pumping pump is connected to the accommodating cabinet, can be vacuumized to the accommodating cabinet.Using the Minton dryer, by the way that bleeding point is respectively set at least two surfaces of accommodating cabinet, accommodating box house air can be detached from the different location of accommodating cabinet, guarantee that substrate to be dried accommodates the uniformity of box house solvent distribution in the drying process, avoid the occurrence of that local concentration is excessively high, cause the central area of substrate to be dried and fringe region as solvent atmosphere it is different caused by membrane thickness unevenness problem.
Description
Technical field
The present invention relates to display fabrication techniques fields, refer in particular to a kind of Minton dryer.
Background technique
Currently, Organic Light Emitting Diode (Organic Light-Emitting Diode, OLED) is also known as organic electric shock
Light shows, the display manufacturing of organic luminous semiconductor when, generally use the film layer that display is made in printing type, and print system
After display film layer, the vacuum drying (Vacuum Drying, VCD) of organic wet film is the critical process for determining film thickness uniformity.
In routine techniques, for the vacuum drying VCD equipment of organic wet film when being dried in vacuo, due to base to be dried
Deposition printing solvent on organic wet film of plate, in the drying process, printing solvent evaporation causes different location solvent inside equipment
Atmosphere is different, the non-uniform problem of dry film on substrate, and with the increase of substrate, causes the uniform sex differernce of dry film brighter
It is aobvious.
Summary of the invention
The purpose of technical solution of the present invention is to provide a kind of Minton dryer, dry using prior art vacuum for solving
Dry equipment causes drying to be formed by the non-uniform problem of dry film.
The embodiment of the present invention provides a kind of Minton dryer, wherein includes:
Cabinet is accommodated, wherein at least two is respectively arranged with bleeding point on surface；
Air pathway structure, including multiple interface interconnecting pieces, each interface coupling portion Lian Jie not a pumpings
Port；
Vacuum pumping pump is connect with the air pathway structure, by the air pathway structure, the vacuum pumping pump and institute
Accommodating cabinet connection is stated, the accommodating cabinet can be vacuumized.
Optionally, the Minton dryer, wherein in the first surface and second surface of the accommodating cabinet respectively
It is provided with the bleeding point；
Wherein, the first surface is the top surface of the accommodating cabinet, and the second surface is the phase of the first surface
Adjacent surface.
Optionally, the Minton dryer, wherein the third surface of the accommodating cabinet is also equipped with the pumping
Mouthful, wherein the third surface is opposite with the second surface.
Optionally, the Minton dryer, wherein the bleeding point on the first surface includes the first pumping
Mouthful and multiple second bleeding points, wherein first bleeding point is arranged in the first area of the first surface, each described the
A second area on the first surface is respectively set in two bleeding points, and multiple second areas are in the first area
Around be distributed.
Optionally, the Minton dryer, wherein total aperture of first bleeding point on the first area
Sectional area, greater than total aperture sectional area of second bleeding point on each second area.
Optionally, the Minton dryer, wherein the interface interconnecting piece includes connecing with what the bleeding point was connect
Oral area and the buffer part being connect with the interface portion, wherein the internal diameter of the buffer part is greater than the internal diameter of the interface portion.
Optionally, the Minton dryer, wherein also divide on the 4th surface and the 5th surface of the accommodating cabinet
It is not provided with the bleeding point, wherein the 4th surface and the 5th surface are respectively the neighboar lists of the first surface
Face, and the 4th surface is opposite with the 5th surface.
Optionally, the Minton dryer, wherein be provided in the storage box body for placing substrate to be dried
Plummer；
Wherein, the height of the bleeding point set on the second surface and the third surface is greater than the carrying
The height of platform.
Optionally, the Minton dryer, wherein be additionally provided with cold plate in the storage box body, wherein institute
It states that cold plate is opposite with the plummer, and is located at the top of the plummer.
Optionally, the Minton dryer, wherein in the inside of the air pathway structure, multiple interfaces
Interconnecting piece is interconnected.
At least one of specific embodiment of the invention above-mentioned technical proposal has the advantages that
Minton dryer described in the embodiment of the present invention is being arranged bleeding point on dry accommodating cabinet, is utilizing phase
The air pathway structure of connection by vacuum pumping pump to accommodating cabinet vacuumize, with detach setting storage box it is intracorporal to
The solvent that dry substrate is evaporated in the drying process, since pumping is respectively set at least two surfaces of accommodating cabinet
Mouthful, therefore accommodating box house air can be detached from the different location of accommodating cabinet, guarantee substrate to be dried in drying process
The uniformity of middle accommodating box house solvent distribution, avoid the occurrence of that local concentration is excessively high, causes substrate to be dried after the drying
The problem of membrane thickness unevenness.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of Minton dryer described in the embodiment of the present invention；
Fig. 2 is in Minton dryer described in the embodiment of the present invention, and accommodate the top surface structure of cabinet first implements structure
Schematic diagram；
Fig. 3 is in Minton dryer described in the embodiment of the present invention, and accommodate the top surface structure of cabinet second implements structure
Schematic diagram；
Fig. 4 is the third implementation structure that the top surface structure of cabinet is accommodated in Minton dryer described in the embodiment of the present invention
Schematic diagram.
Specific embodiment
To keep the technical problem to be solved in the present invention, technical solution and advantage clearer, below in conjunction with attached drawing and tool
Body embodiment is described in detail.
To solve to use the VCD equipment of routine techniques, when organic wet film after printing is dried, due in equipment
Portion's different location solvent atmosphere is different, so that the non-uniform problem of dry film on substrate, it is dry that the embodiment of the present invention provides a kind of vacuum
Dry device by the way that bleeding point is respectively set at least two surfaces of the accommodating cabinet dry for organic wet film, and utilizes
The air pathway structure being connected vacuumizes accommodating cabinet by vacuum pumping pump, so that organic wet film is in drying process
In, the solvent atmosphere of different location is evenly distributed in storage box body, to guarantee the uniform film thickness of obtained dry film after drying.
The structural schematic diagram of Minton dryer described in the embodiment of the present invention is as shown in Figure 1, wherein the vacuum drying dress
It sets and includes:
Cabinet 100 is accommodated, is respectively arranged with bleeding point 101 on wherein at least two surface；
Air pathway structure 200, including multiple interface interconnecting pieces 210, each interface interconnecting piece 210 are separately connected a pumping
Port 101；
Vacuum pumping pump 300 is connect with air pathway structure 200, by air pathway structure 200, vacuum pumping pump 300 and appearance
The connection of cabinet 100 is set, accommodating cabinet 100 can be vacuumized.
Optionally, in the embodiment of the present invention, the accommodating cabinet 100, specifically should be to dry for placing substrate to be dried
Dry substrate can be but be not limited to only can be to be made using printing type in OLED display manufacturing process, deposited organic wet film
Display base plate.
Pumping is arranged on the accommodating cabinet dry for organic wet film in Minton dryer described in the embodiment of the present invention
Mouthful, accommodating cabinet is vacuumized by vacuum pumping pump using the air pathway structure being connected, to detach substrate to be dried
The solvent evaporated in the drying process, since bleeding point, energy is respectively set at least two surfaces of accommodating cabinet
Enough different locations from accommodating cabinet detach accommodating box house air, to guarantee substrate to be dried storage box in the drying process
The uniformity of body internal solvent distribution, avoids the occurrence of that local concentration is excessively high, causes the film thickness of substrate to be dried after the drying uneven
Even problem.
In the embodiment of the present invention, optionally, as shown in Figure 1, the first surface 110 and second surface 120 of accommodating cabinet 100
On be respectively arranged with bleeding point 101；
Wherein, first surface 110 is the top surface for accommodating cabinet 100, and second surface 120 is the neighboar lists of first surface 110
Face.
It is understood that be usually in a horizontal state when substrate 1 to be dried is placed in the inside of accommodating cabinet 100, and to
Organic wet film of dry substrate 1 is upward.It should be noted that accommodating cabinet 100 top surface (first surface 110) be with it is to be dried
The opposite face of organic wet film of substrate 1, wherein the first surface 110 can be plane, or curved surface.
Minton dryer described in the embodiment of the present invention is arranged on the top surface (first surface 110) of accommodating cabinet 100 and takes out
Port 101, and bleeding point is respectively set on the surface (second surface 120) adjacent with top surface, make it possible in storage box
It is vacuumized respectively on the top surface and surface of body 100, to be detached in accommodating cabinet 100 from the different location of accommodating cabinet 100
The air in portion, avoiding substrate 1 to be dried from being accommodated in cabinet 100 in the drying process, the solvent that regional area is evaporated occur dense
Spend high problem.
Optionally, as depicted in figs. 1 and 2, it accommodates and is also equipped with bleeding point 101 on the third surface 130 of cabinet 100,
Middle third surface 130 is opposite with second surface 120.
Further, optionally, as shown in Fig. 2, also distinguishing on the 4th surface 140 and the 5th surface 150 of accommodating cabinet 100
It is provided with bleeding point 101, wherein the 4th surface 140 and the 5th surface 150 are respectively the adjacent surface of first surface 110, and the
Four surfaces 140 and the 5th surface 150 are opposite.
Based on above-mentioned mode, other than the top surface setting bleeding point 101 in accommodating cabinet 100, in accommodating cabinet 100
Bleeding point is also respectively set on each surface of top surface (first surface 110), further to guarantee from storage box
The different location of body 100 detaches the air inside accommodating cabinet 100, avoids accommodating and occurs regional area in cabinet 100 and evaporated
The excessively high problem of solvent strength out.
Optionally, accommodating cabinet 100 is formed as hexahedron structure, in other surfaces except the base, can be respectively provided with
Bleeding point 101, and air pathway structure 200 is utilized, vacuum pumping pump 300 can pass through 101 pairs of accommodating cabinets 100 of each bleeding point
It is vacuumized.
Optionally, the quantity for accommodating bleeding point 101 set on each surface of cabinet 100 can be one, can also
Think at least two, but no matter quantity be it is several, need to guarantee each interface interconnecting piece 210 difference of air pathway structure 200
Connect a bleeding point 101.
In the embodiment of the present invention, optionally, as shown in Fig. 2, the bleeding point 101 on first surface 110 includes the first pumping
Port 1011 and multiple second bleeding points 1012, wherein the first area of first surface 110 is arranged in the first bleeding point 1011
111, every one second bleeding point 1012 is separately positioned on the second area 112 on first surface 110, and multiple second areas
112 are distributed around first area 111.
Using above-mentioned structure, by first surface 110, the periphery distribution setting of the first bleeding point 1011 multiple the
Two bleeding points 1012, so that can be vacuumized from different location on the top surface of accommodating cabinet 100.
Optionally, first area 111 is located at the intermediate region of first surface 110.
Further optionally, first area 111 can for in the print area of substrate 1 to be dried in accommodating cabinet 100
The opposite region of the heart, second area 112 are the region namely second not opposite with the center of the print area of substrate 1 to be dried
Region 112 is opposite with the edge of print area of substrate 1 to be dried.
To guarantee that first area 111 can effectively extract the solvent of the overcentre of the print area of substrate 1 to be dried, the
Total aperture sectional area of the first bleeding point 1011 on one region 111 is greater than the central area of the print area in region 1 to be dried
Area.
Further optionally, total aperture sectional area of the first bleeding point 1011 on first area 111 is greater than every one second
Total aperture sectional area of the second bleeding point 1012 on region 112.
By making total aperture sectional area of the first bleeding point 1011 on first area 111, it is greater than and is located at first area 111
Total aperture sectional area of the second bleeding point 1012 on each second area 112 of periphery, so that when being vacuumized, in list
In the time of position, the sucking rate vacuumized by first area 111 is greater than the pumping vacuumized by second area 112
Amount.
It should be noted that substrate 1 to be dried is in the drying process, limited by diffusion conditions, in the upper of substrate 1 to be dried
Orientation is set, and the solvent strength of middle section is higher than the solvent strength of fringe region.In the embodiment of the present invention, by making the unit time
Interior, the sucking rate that first area 111 is vacuumized is greater than the sucking rate that second area 112 is vacuumized, second area 112
It is arranged around first area 111, namely the sucking rate for guaranteeing that the middle section of 1 top of substrate to be dried vacuumizes is greater than marginal zone
The sucking rate that domain vacuumizes can guarantee the evaporation solvent of each position above 100 inside substrate 1 to be dried of accommodating cabinet more
Add uniformly, avoid the occurrence of that the solvent strength that regional area is evaporated is excessively high, solves the central area of prior art printing substrate
With fringe region as solvent atmosphere it is different caused by membrane thickness unevenness problem.
On first surface 110, optionally, the quantity of the first bleeding point 1011 set by first area 111 can be
One, or at least two；Equally, the second bleeding point 1012 set by each second area 112 can be one,
It can be at least two.Wherein, no matter the quantity of the first bleeding point 1011 is several, the first bleeding point on first area 111
1011 total aperture sectional area be the first whole bleeding points 1011 set on first area 111 aperture sectional area it
With；Similarly, no matter the quantity of the second bleeding point 1012 set on each second area 112 is several, each second area
Total aperture sectional area of the second bleeding point 1012 on 112 is whole second set on the corresponding second area 112
The sum of aperture sectional area of bleeding point 1012.
For example, as shown in figure 3, wherein in an embodiment, set every one first pumping on first area 111
The diameter of set every one second bleeding point 1012 can be identical on mouth 1011 and second area 112, but on first area 111
The quantity of the first set bleeding point 1011 is more than the quantity of the second bleeding point 1012 set on second area 112, from
And make total aperture sectional area of the first bleeding point 1011 on first area 111, greater than second on each second area 112
Total aperture sectional area of bleeding point 1012.
Optionally, as shown in figure 4, in another embodiment, set 1011 He of the first bleeding point on first area 111
The quantity of the second set bleeding point 1012 is identical on second area 112, is such as one, but set on first area 111
The diameter for the first bleeding point 1011 set is greater than the diameter of the second bleeding point 1012 set on second area 112, to make
The total aperture sectional area for obtaining the first bleeding point 1011 on first area 111, greater than the second pumping on each second area 112
Total aperture sectional area of mouth 1012.
It should be noted that above-mentioned set about being arranged on the first bleeding point 1011 and second area 112 on first area 111
The specific implementation structure for setting the second bleeding point 1012 by way of example only, is specifically not limited thereto, such as on first area 111
First bleeding point 1011 can be set, multiple second bleeding points 1012 can be set on second area 112, as shown in Fig. 2,
As long as can guarantee total aperture sectional area of the first bleeding point 1011 on first area 111, it is greater than on each second area 112
The second bleeding point 1012 total aperture sectional area.
In the embodiment of the present invention, optionally, as shown in Figure 1, each interface interconnecting piece 210 of air pathway structure 200 wraps
The interface portion 211 connecting with bleeding point 101 and the buffer part connecting with interface portion 211 212 are included, wherein the internal diameter of buffer part 212
Greater than the internal diameter of interface portion 211.
By making air pathway structure 200 that internal diameter be arranged gradually on the interface interconnecting piece 210 being connected with bleeding point 101
Reduced buffer part 212 and interface portion 211 achievees the purpose that adjust the pumping flow velocity vacuumized by bleeding point 101.
In the embodiment of the present invention, as shown in Figure 1, being provided with the carrying for placing substrate 1 to be dried in accommodating cabinet 100
Platform 102 and cold plate 103, wherein cold plate 103 and plummer 102 are opposite, and are located at the top of plummer 102.
Specifically, which is low temperature organic solvent condensate plate, and plummer 102 has high temperature, and plummer 102
The temperature difference between cold plate 102 is at 10 degree or so.Multiple base to be dried is used to support in addition, being additionally provided on plummer 102
The inside of the lifting column 104 of plate 1, accommodating cabinet 100 is additionally provided with the vacuum meter for carrying out vacuum measurement.
Optionally, pumping set on second surface 120, third surface 130, the 4th surface 140 and the 5th surface 150
The height of mouth 101 is greater than the height of plummer 102, to guarantee to pass through second surface 120, third surface 130, the 4th surface 140
The space of 102 top of plummer can effectively be vacuumized with bleeding point 101 set on the 5th surface 150.
Set by optionally, distinguishing on second surface 120, third surface 130, the 4th surface 140 and the 5th surface 150
Bleeding point 101 can be one, or at least two.
Optionally, Minton dryer described in the embodiment of the present invention, in the inside of air pathway structure 200, multiple interfaces
Interconnecting piece 210 is interconnected.By forming interconnected channel in the inside of air pathway structure 200, make vacuum pumping pump 300
It is evenly dispersed to accommodating in cabinet 100 that air-flow can will be vacuumized by air pathway structure 200, to guarantee to vacuumize air-flow
Stability and uniformity.
It should be noted that the quantity for accommodating the vacuum pumping pump 300 vacuumized in cabinet 100 can be one,
It can be at least two, when the quantity of vacuum pumping pump 300 is at least two, one can be separately connected with each vacuum pumping pump 300
A air pathway structure 200, each air pathway structure 200 are respectively connected to accommodating cabinet 100.
Minton dryer described in the embodiment of the present invention can be applied to when OLED display production after organic film printing
Drying.Using Minton dryer described in the embodiment of the present invention, as shown in connection with fig. 1, dry to the organic film after printing
When, substrate 1 to be dried is set on the plummer 102 in accommodating cabinet 100, and distinguish plummer 102 and cold plate 103
Reach corresponding specific temperature, the two temperature difference is at 10 degree or so, and the solvent of organic film evaporates energy on substrate 1 to be dried
It is enough to deposit to cold plate 103, and vacuum pumping pump 300 is opened simultaneously, pass through 101 pairs of multiple bleeding points appearances on accommodating cabinet 100
It sets cabinet 100 to vacuumize, makes to vacuumize the evenly dispersed inside to accommodating cabinet 100 of air-flow, guarantee different in accommodating cabinet 100
The solvent atmosphere of position is evenly distributed, so that substrate to be dried 1 is obtained the uniform film thickness of dry film after drying, avoids out
Current situation portion excessive concentration, prints made display to improve at the problem of causing substrate to be dried membrane thickness unevenness after the drying
The purpose of the performance of substrate.
Above-described is the preferred embodiment of the present invention, it should be pointed out that the ordinary person of the art is come
It says, under the premise of not departing from principle of the present invention, can also make several improvements and retouch, these improvements and modifications should also regard
For protection scope of the present invention.
Claims (10)
1. a kind of Minton dryer characterized by comprising
Cabinet is accommodated, wherein at least two is respectively arranged with bleeding point on surface；
Air pathway structure, including multiple interface interconnecting pieces, each interface coupling portion Lian Jie not a bleeding points；
Vacuum pumping pump is connect with the air pathway structure, by the air pathway structure, the vacuum pumping pump and the appearance
Cabinet connection is set, the accommodating cabinet can be vacuumized.
2. Minton dryer according to claim 1, which is characterized in that the first surface and second of the accommodating cabinet
The bleeding point is respectively arranged on surface；
Wherein, the first surface is the top surface of the accommodating cabinet, and the second surface is the neighboar lists of the first surface
Face.
3. Minton dryer according to claim 2, which is characterized in that the third surface of the accommodating cabinet is also provided with
There is the bleeding point, wherein the third surface is opposite with the second surface.
4. Minton dryer according to claim 2, which is characterized in that the bleeding point packet on the first surface
The first bleeding point and multiple second bleeding points are included, wherein the first area of the first surface is arranged in first bleeding point,
A second area on the first surface is respectively set in each second bleeding point, and multiple second areas are in institute
It states and is distributed around first area.
5. Minton dryer according to claim 4, which is characterized in that first pumping on the first area
Total aperture sectional area of mouth, greater than total aperture sectional area of second bleeding point on each second area.
6. Minton dryer according to claim 1, which is characterized in that the interface interconnecting piece includes and the pumping
The interface portion of mouth connection and the buffer part being connect with the interface portion, wherein the internal diameter of the buffer part is greater than the interface portion
Internal diameter.
7. Minton dryer according to claim 3, which is characterized in that the 4th surface and the 5th of the accommodating cabinet
Also the bleeding point is respectively arranged on surface, wherein the 4th surface and the 5th surface are respectively the first surface
Adjacent surface, and the 4th surface is opposite with the 5th surface.
8. Minton dryer according to claim 3, which is characterized in that be provided in the storage box body for placing
The plummer of substrate to be dried；
Wherein, the height of the bleeding point set on the second surface and the third surface is greater than the plummer
Highly.
9. Minton dryer according to claim 8, which is characterized in that be additionally provided with condensation in the storage box body
Plate wherein the cold plate is opposite with the plummer, and is located at the top of the plummer.
10. Minton dryer according to claim 1, which is characterized in that more in the inside of the air pathway structure
A interface interconnecting piece is interconnected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910412022.1A CN110094935A (en) | 2019-05-17 | 2019-05-17 | Minton dryer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910412022.1A CN110094935A (en) | 2019-05-17 | 2019-05-17 | Minton dryer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110094935A true CN110094935A (en) | 2019-08-06 |
Family
ID=67448572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910412022.1A Pending CN110094935A (en) | 2019-05-17 | 2019-05-17 | Minton dryer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110094935A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111873648A (en) * | 2019-08-16 | 2020-11-03 | 广东聚华印刷显示技术有限公司 | Inkjet printing vacuum drying device and inkjet printing method |
| CN113091413A (en) * | 2021-04-30 | 2021-07-09 | Tcl华星光电技术有限公司 | Vacuum drying device |
| CN114571879A (en) * | 2022-02-23 | 2022-06-03 | 深圳市华星光电半导体显示技术有限公司 | Inkjet printing vacuum drying device and inkjet printing drying method |
| CN114834165A (en) * | 2022-05-13 | 2022-08-02 | 昆山国显光电有限公司 | Inkjet printing drying device and inkjet printing apparatus |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103353209A (en) * | 2013-06-20 | 2013-10-16 | 京东方科技集团股份有限公司 | Vacuum drying device and photolithographic process |
| CN107062812A (en) * | 2017-04-26 | 2017-08-18 | 京东方科技集团股份有限公司 | One kind is dried under reduced pressure chamber and vacuum decompression drying equipment |
| CN107062828A (en) * | 2017-06-09 | 2017-08-18 | 京东方科技集团股份有限公司 | A kind of Minton dryer |
| CN107940904A (en) * | 2017-11-14 | 2018-04-20 | 合肥鑫晟光电科技有限公司 | One kind vacuum drying chamber and Minton dryer |
| CN207649229U (en) * | 2017-12-20 | 2018-07-24 | 广东聚华印刷显示技术有限公司 | Minton dryer |
-
2019
- 2019-05-17 CN CN201910412022.1A patent/CN110094935A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103353209A (en) * | 2013-06-20 | 2013-10-16 | 京东方科技集团股份有限公司 | Vacuum drying device and photolithographic process |
| CN107062812A (en) * | 2017-04-26 | 2017-08-18 | 京东方科技集团股份有限公司 | One kind is dried under reduced pressure chamber and vacuum decompression drying equipment |
| CN107062828A (en) * | 2017-06-09 | 2017-08-18 | 京东方科技集团股份有限公司 | A kind of Minton dryer |
| CN107940904A (en) * | 2017-11-14 | 2018-04-20 | 合肥鑫晟光电科技有限公司 | One kind vacuum drying chamber and Minton dryer |
| CN207649229U (en) * | 2017-12-20 | 2018-07-24 | 广东聚华印刷显示技术有限公司 | Minton dryer |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111873648A (en) * | 2019-08-16 | 2020-11-03 | 广东聚华印刷显示技术有限公司 | Inkjet printing vacuum drying device and inkjet printing method |
| CN111873648B (en) * | 2019-08-16 | 2022-03-29 | 广东聚华印刷显示技术有限公司 | Inkjet printing vacuum drying device and inkjet printing method |
| CN113091413A (en) * | 2021-04-30 | 2021-07-09 | Tcl华星光电技术有限公司 | Vacuum drying device |
| CN114571879A (en) * | 2022-02-23 | 2022-06-03 | 深圳市华星光电半导体显示技术有限公司 | Inkjet printing vacuum drying device and inkjet printing drying method |
| CN114571879B (en) * | 2022-02-23 | 2024-03-08 | 深圳市华星光电半导体显示技术有限公司 | Ink-jet printing vacuum drying device and ink-jet printing drying method |
| CN114834165A (en) * | 2022-05-13 | 2022-08-02 | 昆山国显光电有限公司 | Inkjet printing drying device and inkjet printing apparatus |
| CN114834165B (en) * | 2022-05-13 | 2024-03-26 | 昆山国显光电有限公司 | Ink jet printing drying device and ink jet printing equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110094935A (en) | Minton dryer | |
| JP2007531762A5 (en) | ||
| CN106783935B (en) | The encapsulating structure and packaging method of organic electroluminescence device, display device | |
| CN103726030B (en) | Precipitation equipment and the manufacturing method for using its organic light-emitting display device | |
| CN208271866U (en) | A kind of flexible substrate substrate and high-flatness flexible substrate | |
| CN208444841U (en) | Display screen and display device | |
| CN109801939A (en) | A kind of display base plate and preparation method thereof, display device | |
| CN106784212B (en) | QLED and preparation method thereof | |
| CN106607320B (en) | Thermal vacuum drying device suitable for flexible base board | |
| CN206179903U (en) | Multi -functional encapsulating film and display structure | |
| CN207775340U (en) | A kind of evaporation source and evaporation coating device | |
| CN209592008U (en) | A kind of composite pallet for dry etching LED graphical sapphire substrate | |
| CN208439266U (en) | A kind of communication device storage auxiliary device | |
| CN206680574U (en) | A kind of epitaxial growth graphite carrier | |
| CN106856226B (en) | A kind of light emitting diode with quantum dots device and preparation method thereof | |
| CN105543784B (en) | A kind of deposition system | |
| CN104726839B (en) | Apparatus for fixing substrate | |
| CN214931510U (en) | Transfer drying tray | |
| CN108004512A (en) | A kind of evaporation source and evaporation coating device | |
| CN108277460B (en) | Evaporation coating device | |
| CN218404371U (en) | Heating cavity | |
| CN207133113U (en) | A kind of medical treatment detection dries device with drift | |
| CN207966989U (en) | A kind of display of organic electroluminescence | |
| CN105921368A (en) | Three-cavity-layer type end cap special for vacuum suction piece mouth of spin coater tray | |
| CN207749178U (en) | A kind of OLED vapor depositions crucible |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |