CN107919309A - Plug-in sheet machine - Google Patents

Plug-in sheet machine Download PDF

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Publication number
CN107919309A
CN107919309A CN201711134978.7A CN201711134978A CN107919309A CN 107919309 A CN107919309 A CN 107919309A CN 201711134978 A CN201711134978 A CN 201711134978A CN 107919309 A CN107919309 A CN 107919309A
Authority
CN
China
Prior art keywords
carrier box
plug
slide unit
sheet machine
inserting piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201711134978.7A
Other languages
Chinese (zh)
Inventor
付家云
胡小海
赵军
胡瑾
曾霞
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sichuan Yongxiang Silicon Material Co Ltd
Original Assignee
Sichuan Yongxiang Silicon Material Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sichuan Yongxiang Silicon Material Co Ltd filed Critical Sichuan Yongxiang Silicon Material Co Ltd
Priority to CN201711134978.7A priority Critical patent/CN107919309A/en
Publication of CN107919309A publication Critical patent/CN107919309A/en
Pending legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10Measuring as part of the manufacturing process
    • H01L22/12Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Control And Other Processes For Unpacking Of Materials (AREA)

Abstract

The invention discloses a kind of plug-in sheet machine, including empty Carrier box conveyer, inserting piece device, fully loaded Carrier box conveyer;The inserting piece device includes the hopper, silicon chip separator, conveying inserting piece device being placed in sink;The hopper bottom is provided with lifting platform;The silicon chip separator includes the nozzle for being arranged at left and right sides of hopper and front and front end extends into separation belt in hopper;The conveying inserting piece device includes belt conveyor and liftable carrying carriage;The belt conveyor front end is positioned at the lower section of separation belt rear end, the sensible carrying carriage in belt conveyor rear end.Plug-in sheet machine with said structure, automatic to carry out inserted sheet and operate that simultaneously the transport of Carrier box before and after inserted sheet is carried out automatically, the operation of whole equipment is controlled by PLC controller, without manual intervention, greatly reduces the working strength of worker.Machine automatization burst inserted sheet improves work efficiency, and damage caused by reducing artificial burst inserted sheet, improves economic benefit.

Description

Plug-in sheet machine
Technical field
The present invention relates to a kind of automatically by the equipment in the silicon chip insertion Carrier box in hopper.
Background technology
The processing of monocrystalline silicon piece includes silicon single crystal rod elder generation evolution, then cuts into slices;The processing of polysilicon chip is cut including polycrystal silicon ingot Cut, then cut into slices;The processing of quasi-monocrystalline silicon is cut including mono-like silicon ingot, then is cut into slices.To sum up, section is the crystalline silicon sun One of essential technique in energy battery machining process.The silicon chip obtained after section is stacked together, it is necessary to be inserted after burst Enter and transported in silicon wafer bearing box (being commonly called as the gaily decorated basket), since silicon chip has the characteristics that thin, crisp, burst, the difficulty of inserted sheet It is very big.
The content of the invention
In view of this, the present invention provides a kind of plug-in sheet machine, for the Carrier box fortune before and after progress inserted sheet automatically and inserted sheet Send work.
To solve above technical problem, the technical scheme is that:A kind of plug-in sheet machine, including empty Carrier box transport dress Put, inserting piece device, fully loaded Carrier box conveyer;The inserting piece device includes hopper, the silicon chip separation dress being placed in sink Put, convey inserting piece device;The hopper bottom is provided with lifting platform;The silicon chip separator includes being arranged on a hopper left side The nozzle of right both sides and front and front end extend into the separation belt in hopper;The conveying inserting piece device includes conveying Belt and liftable carrying carriage;The belt conveyor front end is positioned at the lower section of separation belt rear end, belt conveyor rear end Sensible carrying carriage.Nozzle be used for clear water or other with use liquid injection so that the silicon chip of top using water with point Contact and be attracted from belt lower floor.Since separation belt constantly moves from front to back, the silicon chip and lower floor's silicon of top are driven Piece separates, while the liquid that nozzle ejects is impacted to shoveling the gap penetrated between top layer silicon chip and lower floor's silicon chip, to accelerate Separation.Silicon chip after separation is delivered to separation belt rear end under the drive of separation belt, and under fall on belt conveyor.It is and defeated Silicon chip, is inserted into Carrier box by the Carrier box for sending belt to be delivered to silicon chip in carrying carriage using inertia.
As an improvement further include for the defects of detecting defect silicon chip detection device, the defect detecting device bag The laser sensor set up separately in belt conveyor both sides is included, the laser sensor is connected with controller.Pass through laser sensor sense Defect silicon chip is answered, and information is fed back into controller.
As an improvement the belt conveyor is installed on platform that can be traversing so that after belt conveyor transverse shifting Sensible waste paper returnable.Control platform is traversing after controller receives defect silicon chip information, drives belt conveyor that waste paper is defeated It is sent in returnable.
As an improvement the sky Carrier box conveyer includes being arranged on the beam guideway above inserting piece device, also Including being arranged on the slide unit that can be moved back and forth on beam guideway along beam guideway;Carrier box clamping dress is installed on the slide unit Put;The Carrier box clamping device is connected by vertical telescopic oil cylinder with slide unit;The Carrier box clamping device includes box body, The two horizontal gripper cylinders in left and right are provided with the box body, the gripper cylinder front end is fixedly connected with clamping and grabs;Also wrap Guide rod is included, it is fixed that described guide rod one end is grasped with clamping, and the other end is arranged in box body and can be grabbed with clamping flexible;The cunning Platform, telescopic oil cylinder and gripper cylinder are by controller controlled motion.
As an improvement further include the driving device for driving slide unit to move back and forth;The driving device include with Beam guideway it is parallel can rotation screw, be cased with nut on the screw;The nut pieces together rolling with the screw thread on screw Pearl passage;The ball channel joins end to end by return;Some balls are provided with the ball channel;The slide unit Fixed with nut.The rotation of screw drives ball rotation and is circulated in ball channel, before its frictional force produced causes nut After move.Said structure converts rotational motion to linear movement, or moment of torsion is converted into axial repeated action power, has concurrently at the same time High accuracy, invertibity and efficient feature.Screw both ends are by bearings.Good branch can be carried out to screw using bearing Support, and can be so that screw rotation is more smooth.The motor for driving screw rotation is further included, the motor is by controller control System.
As a preferred embodiment, the slide unit is two.Equally, the equipment on slide unit also has two groups.When actual use, Empty Carrier box is waited in station turning, after the Carrier box on inserted sheet station is filled, the slide unit in front by fully loaded Carrier box from Inserted sheet station is removed, and the empty Carrier box of wait is moved into inserted sheet station by the slide unit at rear.Two actions are carried out at the same time, and have saved stream Journey and time.
As an improvement the fully loaded Carrier box conveyer includes being used to Carrier box being turned to water from vertical position Vertical switching mechanism that prosposition is put and the conveying device that Carrier box is transported to Accreditation Waiting Area from vertical switching mechanism, it is described vertical Switching mechanism includes the carrying cassette holder of L-shaped and the overturning oil cylinder of driving carrying cassette holder upset;The conveying device is included from perpendicular Straight switching mechanism extends to the beam track of Accreditation Waiting Area, and the cunning that can be moved back and forth along beam track is provided with the beam track Platform, is provided with rotatable holder on the slide unit, jacking cylinder is vertically arranged with holder;The jacking cylinder front end is set There is the supporting rack that Carrier box can be jacked up from carrying cassette holder;The overturning oil cylinder, slide unit, holder, jacking cylinder are by controller Controlled motion.
As an improvement the carrying cassette holder includes bottom plate and the backrest being vertically fixed on bottom plate;The bottom plate Shaft is installed with backrest intersection so that carrying cassette holder can be overturn around the shaft;The Carrier box is provided at both ends with axis pin, the bottom The locating slot for axis pin insertion is provided with plate.Avoid Carrier box from sliding or fall during upset to cause damages.
As an improvement Accreditation Waiting Area includes two parallel tracks, stent is provided with the track, the stent is opened There is the placing groove coordinated with Carrier box both ends axis pin.
As an improvement support frame as described above by two pieces of left and right gripper shoe groups into being provided with the support plate and Carrier box The groove that bottom shape coincide;And the distance between two pieces of support plates are more than the width of carrying cassette holder.The width of Carrier box is big In the width of carrying cassette holder, supporting rack lifts Carrier box and disengages it from carrying cassette holder beyond the part of carrying cassette holder.Exist afterwards Translated by slide unit so that the axis pin on Carrier box departs from the locating slot on bottom plate.
The invention has the beneficial effects that:Plug-in sheet machine with said structure, it is automatic carry out inserted sheet operation and can automatically into The transport of Carrier box before and after row inserted sheet, the operation of whole equipment are controlled by PLC controller, without manual intervention, are greatly reduced The working strength of worker.Machine automatization burst inserted sheet improves work efficiency, and damage caused by reducing artificial burst inserted sheet, carries High economic benefit.
Brief description of the drawings
Fig. 1 is the integral layout top view of the present invention.
Fig. 2 is the structure diagram of inserting piece device.
Fig. 3 is the structure diagram of empty Carrier box conveyer.
Fig. 4 is the structure diagram of full Carrier box conveyer.
Fig. 5 is full Carrier box conveyer usage state diagram.
Fig. 6 is the structure diagram of driving device.
Marked in figure:1 empty Carrier box conveyer, 2 inserting piece devices, 3 full Carrier box conveyers, 100 Carrier boxs;
11 beam tracks, 12 slide units, 13 telescopic oil cylinders, 14 box bodys, 15 gripper cylinders, 16 clamping grab, 17 guide rods, 18 Bar, 19 nuts, 110 bearings, 111 motors, 112 balls, 113 returns;
21 hoppers, 22 lifting platforms, 23 separation belts, 24 belt conveyors, 25 platforms, 26 carrying carriage, 27 nozzles, 28 are swashed Optical inductor, 29 sinks, 210 waste paper returnable;
32 axis pins, 33 carrying cassette holders, 34 overturning oil cylinders, 35 beam tracks, 36 slide units, 37 holders, 38 jacking cylinders, 39 Support, 310 screws, 311 nuts, 312 motors, 313 tracks,
Embodiment
In order to make those skilled in the art more fully understand technical scheme, with reference to embodiment The present invention is described in further detail.
As shown in Figure 1, the present invention includes empty Carrier box conveyer 1, inserting piece device 2, fully loaded Carrier box conveyer 3.
As shown in Fig. 3, Fig. 6, empty Carrier box conveyer 1 includes the beam guideway 11 for being arranged on the top of inserting piece device 2, also Including being arranged on the slide unit 12 that can be moved back and forth on beam guideway 11 along beam guideway 11;Slide unit 12 is two.The slide unit 12 On Carrier box clamping device is installed;The Carrier box clamping device is connected by vertical telescopic oil cylinder 13 with slide unit 12;Institute Stating Carrier box clamping device includes box body 14, and the two horizontal gripper cylinders 15 in left and right are provided with the box body 14, described to grab Take 15 front end of oil cylinder to be fixedly connected with clamping and grab 16;Guide rod 17 is further included, 16 fixations are grabbed in described 17 one end of guide rod with clamping, The other end, which is arranged in box body 14 and 16 can be grabbed with clamping, to be stretched;The slide unit 12, telescopic oil cylinder 13 and gripper cylinder 15 are equal By controller controlled motion.
Further include the driving device for driving slide unit 12 to move back and forth;The driving device includes flat with beam guideway 11 It is capable can rotation screw 18, be cased with nut 19 on the screw 18;The nut 19 pieces together rolling with the screw thread on screw 18 Pearl passage;The ball channel joins end to end by return 113;Some balls 112 are provided with the ball channel;Institute Slide unit 12 is stated to fix with nut 19.18 both ends of screw are supported by bearing 110.Further include the motor for driving 18 rotation of screw 111, the motor 111 is controlled by controller.Controller is PLC controller.
When work, controller control motor 111 drives screw 18 to rotate, so as to drive the slide unit fixed with nut 19 12 move forward and backward.Telescopic oil cylinder 13 is used to lift Carrier box 100 and gripper cylinder 15 is used to grab Carrier box 100 Take.Further include for the defects of detecting defect silicon chip detection device, the defect detecting device includes setting up separately in belt conveyor two The laser sensor of side, the laser sensor are connected with controller.
As shown in Fig. 2, inserting piece device 2 includes the hopper 21, silicon chip separator, conveying inserted sheet dress being placed in sink 29 Put;21 bottom of hopper is provided with lifting platform 22;The silicon chip separator includes being arranged on the left and right sides of hopper 21 The separation belt 23 in hopper is extended into the nozzle 27 in front and front end;The conveying inserting piece device includes conveying skin Band 24 and liftable carrying carriage 26;24 front end of belt conveyor conveys skin positioned at the lower section of 23 rear end of separation belt The sensible carrying carriage 26 in 24 rear end of band.Further include for the defects of detecting defect silicon chip detection device, the defect detecting device Including setting up the laser sensor 28 in 24 both sides of belt conveyor separately, the laser sensor 28 is connected with controller.Belt conveyor 24 are installed on platform 25 that can be traversing so that sensible waste paper returnable 210 after 24 transverse shifting of belt conveyor.
As shown in Figure 4, Figure 5, being fully loaded with Carrier box conveyer 3 includes being used to Carrier box 100 being turned to from vertical position The vertical switching mechanism of horizontal level and the conveying device that Carrier box 100 is transported to Accreditation Waiting Area from vertical switching mechanism.Institute Stating vertical switching mechanism includes the overturning oil cylinder 34 that the carrying cassette holder 33 of L-shaped and driving carrying cassette holder 33 are overturn;Carry cassette holder 33 include bottom plate and the backrest being vertically fixed on bottom plate;Bottom plate and the backrest intersection is installed with shaft so that Carrier box Seat can be overturn around the shaft.Carrier box 100 is provided at both ends with axis pin 32, and the locating slot being inserted into for axis pin 32 is provided with the bottom plate. The conveying device includes extending to the beam track 35 of Accreditation Waiting Area from vertical switching mechanism, is provided with the beam track 35 The slide unit 36 that can be moved back and forth along beam track 35, is provided with rotatable holder 37 on the slide unit 36, vertical on holder 37 It is provided with jacking cylinder 38;38 front end of jacking cylinder is provided with the branch that can jack up Carrier box 100 from carrying cassette holder 33 Support 39;Supporting rack 39 is by two pieces of left and right gripper shoe groups into being provided with what is coincide with 100 bottom shape of Carrier box in the support plate Groove;And the distance between two pieces of support plates are more than the width of carrying cassette holder 33.The overturning oil cylinder 34, slide unit 36, holder 37th, jacking cylinder 38 is by controller controlled motion.Accreditation Waiting Area includes two parallel tracks 313, is provided with the track 313 Stent 314, the stent 314 are provided with the placing groove coordinated with 100 both ends axis pin 32 of Carrier box.
Further include the driving device for driving slide unit 36 to move back and forth;The driving device includes flat with beam guideway 35 It is capable can rotation screw 310, be cased with nut 311 on the screw 310;The nut 311 and the screw thread split on screw 310 Into ball channel;The ball channel joins end to end by return;Some balls are provided with the ball channel;It is described Slide unit 35 is fixed with nut 311.The screw 310 drives rotation by motor 312, and the motor 312 is connected with controller.
When work, fully loaded Carrier box 100 is transported to and turns over vertically by empty Carrier box conveyer 1 from carrying carriage 26 On the carrying cassette holder 33 of rotation mechanism.The driving carrying cassette holder 33 of overturning oil cylinder 34 carries out the upset of vertical direction so that Carrier box 100 It is horizontal positioned.Slide unit 35 is moved to 33 lower section of carrying cassette holder, driving jacking cylinder 38 past Accreditation Waiting Area side after Carrier box 100 is jacked up To slip.During slip, holder 37 does 90 ° of rotations of horizontal direction so that Carrier box 100 also carries out 90 ° of horizontal rotations. After reaching Accreditation Waiting Area, jacking cylinder 38 is shunk so that the axis pin 32 at 100 both ends of Carrier box is fallen within the placing groove of stent 314.
It the above is only the preferred embodiment of the present invention, it is noted that above-mentioned preferred embodiment is not construed as pair The limitation of the present invention, protection scope of the present invention should be subject to claim limited range.For the art For those of ordinary skill, without departing from the spirit and scope of the present invention, some improvements and modifications can also be made, these change Protection scope of the present invention is also should be regarded as into retouching.

Claims (10)

1. a kind of plug-in sheet machine, including empty Carrier box conveyer, inserting piece device, fully loaded Carrier box conveyer;It is characterized in that: The inserting piece device includes the hopper, silicon chip separator, conveying inserting piece device being placed in sink;The hopper bottom is set It is equipped with lifting platform;The silicon chip separator includes being arranged at left and right sides of hopper and the nozzle in front and front end extension Into the separation belt in hopper;The conveying inserting piece device includes belt conveyor and liftable carrying carriage;It is described defeated Belt front end is sent positioned at the lower section of separation belt rear end, the sensible carrying carriage in belt conveyor rear end.
A kind of 2. plug-in sheet machine according to claim 1, it is characterised in that:Further include and examined for the defects of detecting defect silicon chip Device is surveyed, the defect detecting device includes setting up the laser sensor in belt conveyor both sides, the laser sensor and control separately Device connection processed.
A kind of 3. plug-in sheet machine according to claim 2, it is characterised in that:The belt conveyor is installed on platform that can be traversing On so that sensible waste paper returnable after belt conveyor transverse shifting.
A kind of 4. plug-in sheet machine according to claim 1, it is characterised in that:The sky Carrier box conveyer includes being arranged on Beam guideway above inserting piece device, further includes the slide unit that is arranged on and can be moved back and forth on beam guideway along beam guideway;It is described Carrier box clamping device is installed on slide unit;The Carrier box clamping device is connected by vertical telescopic oil cylinder with slide unit;Institute Stating Carrier box clamping device includes box body, and the two horizontal gripper cylinders in left and right, the gripper cylinder are provided with the box body Front end is fixedly connected with clamping and grabs;Guide rod is further included, it is fixed that described guide rod one end is grasped with clamping, and the other end is arranged on box body It is interior and can be grabbed with clamping flexible;The slide unit, telescopic oil cylinder and gripper cylinder are by controller controlled motion.
A kind of 5. plug-in sheet machine according to claim 4, it is characterised in that:Further include the drive for driving slide unit to move back and forth Dynamic device;The driving device include it is parallel with beam guideway can rotation screw, be cased with nut on the screw;The spiral shell Female screw thread with screw pieces together ball channel;The ball channel joins end to end by return;The ball channel Inside it is provided with some balls;The slide unit is fixed with nut.
A kind of 6. plug-in sheet machine according to claim 4, it is characterised in that:The slide unit is two.
A kind of 7. plug-in sheet machine according to claim 1, it is characterised in that:The fully loaded Carrier box conveyer includes being used for Carrier box is turned to the vertical switching mechanism of horizontal level from vertical position and conveys Carrier box from vertical switching mechanism To the conveying device of Accreditation Waiting Area, the vertical switching mechanism includes the carrying cassette holder of L-shaped and turning over for driving carrying cassette holder upset Turn oil cylinder;The conveying device includes extending to the beam track of Accreditation Waiting Area from vertical switching mechanism, is set on the beam track The slide unit that can be moved back and forth along beam track is equipped with, rotatable holder is provided with the slide unit, is vertically arranged with holder Jacking cylinder;The jacking cylinder front end is provided with the supporting rack that can jack up Carrier box from carrying cassette holder;The upset oil Cylinder, slide unit, holder, jacking cylinder are by controller controlled motion.
A kind of 8. plug-in sheet machine according to claim 7, it is characterised in that:The carrying cassette holder is solid including bottom plate and vertically The backrest being scheduled on bottom plate;Bottom plate and the backrest intersection is installed with shaft so that carrying cassette holder can be overturn around the shaft;It is described to hold Carry box and be provided at both ends with axis pin, the locating slot for axis pin insertion is provided with the bottom plate.
A kind of 9. plug-in sheet machine according to claim 8, it is characterised in that:The Accreditation Waiting Area includes two parallel tracks, Stent is provided with the track, the stent is provided with the placing groove coordinated with Carrier box both ends axis pin.
A kind of 10. plug-in sheet machine according to claim 7, it is characterised in that:Support frame as described above is by two pieces of left and right gripper shoe groups Into being provided with the groove coincideing with Carrier box bottom shape in the support plate;And the distance between two pieces of support plates, which are more than, holds Carry the width of cassette holder.
CN201711134978.7A 2017-11-15 2017-11-15 Plug-in sheet machine Pending CN107919309A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201711134978.7A CN107919309A (en) 2017-11-15 2017-11-15 Plug-in sheet machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201711134978.7A CN107919309A (en) 2017-11-15 2017-11-15 Plug-in sheet machine

Publications (1)

Publication Number Publication Date
CN107919309A true CN107919309A (en) 2018-04-17

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201711134978.7A Pending CN107919309A (en) 2017-11-15 2017-11-15 Plug-in sheet machine

Country Status (1)

Country Link
CN (1) CN107919309A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111799201A (en) * 2020-07-14 2020-10-20 苏州太阳井新能源有限公司 Last unloading buffer memory mechanism with environmental control

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5457113B2 (en) * 2009-09-14 2014-04-02 日鉄住金ファインテック株式会社 Wafer transfer method and wafer transfer apparatus
CN203910836U (en) * 2014-06-19 2014-10-29 温州海旭科技有限公司 Full-automatic silicon wafer inserting machine
CN204375715U (en) * 2015-02-13 2015-06-03 苏州博阳能源设备有限公司 A kind of silicon chip inserting machine

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5457113B2 (en) * 2009-09-14 2014-04-02 日鉄住金ファインテック株式会社 Wafer transfer method and wafer transfer apparatus
CN203910836U (en) * 2014-06-19 2014-10-29 温州海旭科技有限公司 Full-automatic silicon wafer inserting machine
CN204375715U (en) * 2015-02-13 2015-06-03 苏州博阳能源设备有限公司 A kind of silicon chip inserting machine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111799201A (en) * 2020-07-14 2020-10-20 苏州太阳井新能源有限公司 Last unloading buffer memory mechanism with environmental control
CN111799201B (en) * 2020-07-14 2023-08-01 苏州太阳井新能源有限公司 Feeding and discharging buffer memory mechanism with environment control

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Application publication date: 20180417

RJ01 Rejection of invention patent application after publication