CN107900838A - A kind of optical mirror plane polissoir - Google Patents
A kind of optical mirror plane polissoir Download PDFInfo
- Publication number
- CN107900838A CN107900838A CN201711170928.4A CN201711170928A CN107900838A CN 107900838 A CN107900838 A CN 107900838A CN 201711170928 A CN201711170928 A CN 201711170928A CN 107900838 A CN107900838 A CN 107900838A
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- axis
- platform
- roller
- transmission shaft
- guide rod
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/005—Blocking means, chucks or the like; Alignment devices
- B24B13/0055—Positioning of lenses; Marking of lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/02—Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables
- B24B47/04—Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables by mechanical gearing only
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
- Particle Accelerators (AREA)
Abstract
The invention discloses a kind of optical mirror plane polissoir, including body, Wire driven robot device, moving platform, mirror polisher, active support device.Moving platform lifting device is fixed in rack, and moving platform is lifted by Wire driven robot device；Stage+module is mirror-finished on moving platform, passes through two motors and three toothed belt transmissions so that mirror finish platform can realize the translation of two frees degree on moving platform；The ion beam emittance device is connected by three revolute pairs, a connecting-rods with constant lengh, two electric pushrods and three flexural pivots with mirror finish platform, can realize the rotation of two frees degree of ion beam emittance device；The active support device supported using full floating is fixed in rack.The present invention applies minute surface active support system in optical manufacturing, can effectively reduce difficulty of processing, shorten the process-cycle.The series-parallel connection burnishing machine of the present invention can realize larger processing space, larger rigidity and less accumulated error.
Description
Technical field
The present invention relates to mechanical processing manufacturing technology, more particularly to a kind of optical mirror plane polissoir.
Background technology
At present to the polishing of optical mirror plane, especially for the polishing of off-axis aspheric surface minute surface, traditional optical manufacturing work
Skill such as small abrasive nose, can introduce print-through, edge effect etc. in process, it is difficult to which complete independently is to high accuracy, high steepness
The polishing of off-axis aspheric surface minute surface.Ion beam polishing is the manufacturing process that a kind of certainty is high, stability is good, has adding for higher
Work efficiency rate and reliability, especially have the convergency factor of higher in the finishing polish stage.
At present during optical manufacturing, minute surface mainly uses rigid support, and difficulty of processing is big, and processing efficiency is low.Propped up using active
Support technology can effectively reduce difficulty of processing, shorten the process-cycle.Traditional active support supports and floats using fixed
The mode that support phase combines, wherein being fixedly supported in process situations such as local stress being caused excessive.
The content of the invention
Goal of the invention：In order to overcome the deficiencies in the prior art, the present invention provides a kind of optical mirror plane polissoir,
By using ion beam polishing mode, coordinate with active support system, processing efficiency can be effectively improved, improve processing reliably
Property, reduce difficulty of processing, realize the polishing of efficient, high-precision optical mirror plane.
Technical solution：To achieve the above object, the technical solution adopted by the present invention is：
A kind of optical mirror plane polissoir, including body, active support device, four Wire driven robot devices, moving platform and
Mirror-finish equipment；
The body includes bottom platform, four support columns and a top platform, and four support columns are supported on bottom and put down
Between platform and four angles of top platform, the quadrangular shape processing space using Z axis as vertical height direction is formed；
The active support device is arranged in quadrangular shape processing space, and is fixed with bottom platform, polished minute surface
It is placed on active support device, the vertical central axis of quadrangular shape processing space, active support device and polished minute surface
Point-blank；
Four Wire driven robot devices are installed on four angles of top platform, dynamic flat by four flexible cable controls of folding and unfolding
The translation of platform in the Z-axis direction；
The moving platform includes Z axis slide unit, and Z axis slide unit includes two Z axis sliding blocks, a biography is installed on each Z axis sliding block
Moving axis A, two transmission shaft A are located in same level and position is parallel, and pass through two Y-axis synchronization band connections, one of Z
Y-axis servomotor, Y-axis retarder and synchronous pulley A are provided with axis sliding block, wherein one transmission is driven by synchronous pulley A
Axis A is rotated, and drives another transmission shaft A to rotate synchronously by Y-axis synchronous belt；Led between two Z axis sliding blocks by two Y-axis
Bar is fixed, and two Y-axis guide rods are located in same level and position is parallel, and a Y-axis slide unit is provided with every Y-axis guide rod,
Two Y-axis slide units are fixedly connected with two Y-axis synchronous belts respectively, and Y-axis slide unit synchronizing moving is driven by Y-axis synchronous belt；Each Y
A piece transmission shaft B is installed, two transmission shaft B are located in same level and position is parallel, and pass through X-axis synchronous belt on axis slide unit
Connect, be provided with X-axis servomotor, X-axis retarder and synchronous pulley B on one of Y-axis slide unit, driven by synchronous pulley B
A dynamic wherein transmission shaft B is rotated, and drives another transmission shaft B to rotate synchronously by X-axis synchronous belt；Between two Y-axis slide units
Fixed by two X-axis guide rods, two X-axis guide rods are located in same level and position is parallel, are installed on every X-axis guide rod
One X-axis slide block；
The mirror finish equipment includes ion beam emittance device, mirror finish platform and adjustment mechanism, ion beam emittance device
The lower section of mirror finish platform is installed on by adjusting mechanism, the launch angle of ion beam emittance device is adjusted by adjusting mechanism；
The upper surface of mirror finish platform is fixed with two X-axis slide blocks, while is fixedly connected with X-axis synchronous belt, passes through X-axis synchronous belt band
Index glass mirror polish platform synchronizing moving.
Preferably, the adjustment mechanism includes a connecting-rods with constant lengh and two electric pushrods, in the following table of mirror finish platform
Face has been evenly arranged three flexural pivots, has been evenly arranged three key seats in the side of ion beam emittance device, a connecting-rods with constant lengh and two
The upper end of electric pushrod is connected with three flexural pivots respectively, the lower end of a connecting-rods with constant lengh and two electric pushrods respectively by axis pin with
Three key seat connections.
Preferably, four Angle Positions of four support columns of the moving platform correspondence are each provided with one group of roller bar-roller machine
Structure, roller and roller bar in same group are installed in same installation axle, and roller is located at outside；Support column is set along Z-direction
T-slot is put, roller bar-roller mechanism is installed in T-slot, and can be moved back and forth along T-slot；Four flexible cables each connect one
A roller, controls the folding and unfolding of flexible cable to control the movement of moving platform in the Z-axis direction by four Wire driven robot devices.
Preferably, four flexible cable pilot holes are provided with the top platform, four flexible cable pilot holes are located at four respectively
The surface of roller bar；The Wire driven robot device includes guide rod, driving support platform, movable slider and leadscrew-nut mechanism, leads
Bar is fixed on top platform by guide rod supports frame, drives support platform and movable slider to be installed on guide rod and can be opposite
Guide rod moves back and forth, and servomotor, retarder and shaft coupling are provided with driving support platform；Leadscrew-nut mechanism includes solid
Determine nut and leading screw, fixing nut is fixed on top platform, and one end of leading screw passes through shaft coupling, retarder and servomotor
Output terminal is connected, and the other end of leading screw is connected by bearing with movable slider, and one end of flexible cable is fixedly connected with leading screw, flexible cable it is another
One end is connected through corresponding flexible cable pilot hole and the roller bar of underface.
Preferably, the active support device includes actively supporting body and force actuator, the number of force actuator
Integral multiple, is arranged in using Hindle/Whiffletree type multi-point support modes and actively supported on body, pass through power promoters
Support polished minute surface.
Beneficial effect：Optical mirror plane polissoir provided by the invention, relative to the prior art, has following advantage：1、
1st, mirror finish equipment can both realize the translation in three directions of x, y, z on moving platform, further through one two turns
Dynamic parallel institution realizes the rotation of two frees degree of ion beam emittance device, ensure that larger working space and arbitrarily from
Beamlet incident angle, can ensure that mirror polisher can reach the optional position of minute surface, and all the time with optimal incidence angle
Degree is polished, and improves processing efficiency and processing quality；
2nd, ion beam polishing is the manufacturing process that a kind of certainty is high, stability is good, have the processing efficiency of higher with can
By property, especially in convergency factor of the finishing polish stage with higher；
3rd, difficulty of processing can effectively be reduced using active support technology, shortens the process-cycle；Actively support is using complete floating
Dynamic support, avoids situations such as local stress is excessive, more suitable for being used in processing.
Brief description of the drawings
Fig. 1 is the structure diagram of the present invention；
Fig. 2 is Wire driven robot apparatus structure schematic diagram；
Fig. 3 is moving platform structure diagram；
Fig. 4 is mirror finish device structure schematic diagram；
Fig. 5 is that the force actuator of active support device arranges schematic diagram.
Embodiment
The present invention is further described below in conjunction with the accompanying drawings.
It is a kind of optical mirror plane polissoir as shown in Figure 1, including body, active support device, four Wire driven robots dresses
Put, moving platform and mirror finish equipment.
The body includes 1, four support column 2 of bottom platform and a top platform 3, four support columns 2 are supported on bottom
Between portion's platform 1 and four angles of top platform 3, the quadrangular shape processing space using Z axis as vertical height direction is formed.
The active support device is arranged in quadrangular shape processing space, and is fixed with bottom platform 1, polished minute surface
22 are placed on active support device, the vertical center of quadrangular shape processing space, active support device and polished minute surface 22
Axis is point-blank.The active support device includes actively supporting body 24 and force actuator 23, force actuator 23
Number is 12, is evenly arranged in and actively supports on body 24, polished minute surface 22 is supported by power promoters 23.This case uses
Situations such as local stress when the active support device of full floating support can be to avoid processing is excessive, can more easily adjust
The pose of polished minute surface 22, is more suitably applied to optical machining system.
As shown in Fig. 2, four Wire driven robot devices are installed on four angles of top platform 3, pass through folding and unfolding four
Flexible cable 25 controls the translation of moving platform in the Z-axis direction.It is provided with four flexible cable pilot holes 26 on the top platform 3, four
Flexible cable pilot hole 26 is respectively positioned at the surface of four roller bars 29；The Wire driven robot device includes guide rod 10, driving support
Platform 6, movable slider 11 and leadscrew-nut mechanism, guide rod 10 are fixed on top platform 3 by guide rod supports frame 12, driving support
Platform 6 and movable slider 11 are installed on guide rod 10 and can be moved back and forth with respect to guide rod 10, are installed in driving support platform 6
There are servomotor 4, retarder 5 and shaft coupling 7；Leadscrew-nut mechanism includes fixing nut 8 and leading screw 9, and fixing nut 8 is fixed on
On top platform 3, one end of leading screw 9 is connected by shaft coupling 7, retarder 5 with the output terminal of servomotor 4, leading screw 9 it is another
End is connected by bearing 27 with movable slider 11, and one end of flexible cable 25 is fixedly connected with leading screw 9, and the other end of flexible cable 25 passes through pair
The flexible cable pilot hole 26 answered is connected with the roller bar 29 of underface.
The servomotor 4 and retarder 5 of the band brake retainer drive the leading screw 9 to do to revolve by the shaft coupling 7
Transhipment is dynamic.Because the fixing nut 8 is integrally fixed on the top platform 3, leading screw 9 not only rotated, but also with
Servomotor 4, retarder 5, shaft coupling 7, driving platform 6, bearing 27, the movable slider 11 of the band brake retainer are used as one
It is overall to be translatable along described two closed slides 10；One end of the flexible cable 25 is fixed on the leading screw 9, therefore, described
Flexible cable 25 can be along spiral wound on the leading screw 9, and can ensure the flexible cable part not being wound on the leading screw 9
The position relative to the top platform 3 can be kept constant so that the flexible cable 25 can be oriented to by the flexible cable all the time
Hole 26 lifts the roller bar 29 vertically.
Said structure scheme can realize that the flexible cable 25 along the spiral wound on the leading screw 9, ensures each all the time
The radius of winding is identical, therefore can ensure that the leading screw 9 often turns an angle, and the flexible cable 25 will rise one accordingly
Fixed distance, can so ensure the precision of control；The Wire driven robot device is distributed on described 3 four angles of top platform,
Four roller bars 29 on the moving platform are lifted by four flexible cables 25, realize the moving platform in z-axis side
Upward translation；Four Wire driven robots can realize the lifting of relatively large load, and work efficiency is high；Four roller bars, 29 He
Four rollers 30 coordinate in four T-slots of four support columns 2, on the one hand can limit rocking for moving platform, another
Aspect, since roller is made of flexible material, has certain fault-tolerance, it is possible to achieve in four motors is not absolute synchronization
In the case of still be able to smoothly lift moving platform.
As shown in figure 3, the moving platform includes Z axis slide unit 13, Z axis slide unit 13 includes two Z axis sliding blocks 21, each Z axis
A piece transmission shaft A35 is installed, two transmission shaft A35 are located in same level and position is parallel, and pass through two Y on sliding block 21
Axis synchronous belt 14 connects, and Y-axis servomotor 32, Y axis retarder 33 and synchronous pulley are provided with one of Z axis sliding block 21
A34, is rotated by a synchronous pulley A34 drivings wherein transmission shaft A35, another transmission shaft is driven by Y-axis synchronous belt 14
A35 is rotated synchronously；Fixed between two Z axis sliding blocks 21 by two Y-axis guide rods 15, two Y-axis guide rods 15 are located at same level
On face and position is parallel, is provided with a Y-axis slide unit 31 on every Y-axis guide rod 15, two Y-axis slide units 31 respectively with two Y-axis
Synchronous belt 14 is fixedly connected, and 31 synchronizing moving of Y-axis slide unit is driven by Y axis synchronous belt 14；One is installed on each Y-axis slide unit 31
Root transmission shaft B, two transmission shaft B are located in same level and position is parallel, and pass through X-axis synchronization band connection, one of Y
X-axis servomotor 17, X-axis retarder 18 and synchronous pulley B are provided with axis slide unit 31, wherein one is driven by synchronous pulley B
Root transmission shaft B is rotated, and drives another transmission shaft B to rotate synchronously by X-axis synchronous belt；Pass through two between two Y-axis slide units 31
Root X-axis guide rod 20 is fixed, and two X-axis guide rods 20 are located in same level and position is parallel, and one is installed on every X-axis guide rod 20
A X-axis slide block.The program makes mirror finish platform 19 realize the translation of X-direction and Y-direction on moving platform, passes through synchronous belt
Transmission, it is possible to achieve the transmission of relatively large load, while can also realize high-precision control.
Four Angle Positions that the moving platform corresponds to four support columns 2 are each provided with one group of roller bar-roller mechanism, same
Roller 30 and roller bar 29 in group are installed in same installation axle, and roller 30 is located at outside；Support column 2 is set along Z direction of principal axis
T-slot is put, roller bar-roller mechanism is installed in T-slot, and can be moved back and forth along T-slot；Four flexible cables 25 each connect
One roller, controls the folding and unfolding of flexible cable 25 to control the movement of moving platform in the Z-axis direction by four Wire driven robot devices.
As shown in figure 4, the mirror finish equipment includes ion beam emittance device 36, mirror finish platform 19 and adjustment machine
Structure, ion beam emittance device 36 are installed on the lower section of mirror finish platform 19 by adjusting mechanism, and ion is adjusted by adjusting mechanism
The launch angle of beam transmitter 36；Mirror finish platform 19 upper surface fixed with two X-axis slide blocks, while with X-axis synchronous belt
It is fixedly connected, mirror finish 19 synchronizing moving of platform is driven by X-axis synchronous belt；The adjustment mechanism includes a connecting-rods with constant lengh 37
With two electric pushrods 39, three flexural pivots 40 are evenly arranged in the lower surface of mirror finish platform 19, in ion beam emittance device
36 side has been evenly arranged three key seats, the upper end of a connecting-rods with constant lengh 37 and two electric pushrods 39 respectively with three flexural pivots
The lower end of 40 connections, a connecting-rods with constant lengh 37 and two electric pushrods 39 is connected by axis pin 38 with three key seats respectively.Ion beam
The revolute pair that transmitter 36 is made up of three pins 38 is connected with a connecting-rods with constant lengh 37 and two electric pushrods 39 respectively；It is described
Connecting-rods with constant lengh 37 and two electric pushrods are connected by three flexural pivots with mirror finish platform 19；Said structure scheme, constitutes one
A parallel institution, realizes the rotation of two frees degree of ion beam emittance device 36, can be by adjusting ion beam emittance device 36
Position, ion beam emittance device 36 is remained maximum work relative to the incident angle at any point on minute surface 22 to be processed
Make the angle of efficiency.
The above is only the preferred embodiment of the present invention, it should be pointed out that：For the ordinary skill people of the art
For member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications also should
It is considered as protection scope of the present invention.
Claims (5)
- A kind of 1. optical mirror plane polissoir, it is characterised in that：Including body, active support device, four Wire driven robot devices, Moving platform and mirror finish equipment；The body includes bottom platform (1), four support columns (2) and a top platform (3), four support column (2) supports Between bottom platform (1) and four angles of top platform (3), form the quadrangular shape using Z axis as vertical height direction and process Space；The active support device is arranged in quadrangular shape processing space, and fixed with bottom platform (1), polished minute surface (22) be placed on active support device, quadrangular shape processing space, active support device and polished minute surface (22) it is vertical Central axis is point-blank；Four Wire driven robot devices are installed on four angles of top platform (3), are controlled by four flexible cables (25) of folding and unfolding The translation of moving platform in the Z-axis direction；The moving platform includes Z axis slide unit (13), and Z axis slide unit (13) includes two Z axis sliding blocks (21), each Z axis sliding block (21) A piece transmission shaft A (35) of upper installation, two transmission shaft A (35) are located in same level and position is parallel, and pass through two Y-axis Synchronous belt (14) connects, and Y-axis servomotor (32), Y-axis retarder (33) and synchronization are provided with one of Z axis sliding block (21) Belt wheel A (34), is rotated by synchronous pulley A (34) drivings wherein transmission shaft A (35), is driven by Y-axis synchronous belt (14) Another transmission shaft A (35) rotates synchronously；It is fixed by two Y-axis guide rods (15) between two Z axis sliding blocks (21), two Y-axis Guide rod (15) is located in same level and position is parallel, is provided with a Y-axis slide unit (31) on every Y-axis guide rod (15), and two A Y-axis slide unit (31) is fixedly connected with two Y-axis synchronous belts (14) respectively, and Y-axis slide unit (31) is driven by Y-axis synchronous belt (14) Synchronizing moving；A transmission shaft B is installed on each Y-axis slide unit (31), two transmission shaft B are located in same level and position is put down OK, and by X-axis synchronization band connection, X-axis servomotor (17), X-axis retarder are provided with one of Y-axis slide unit (31) (18) and synchronous pulley B, rotated by a synchronous pulley B drivings wherein transmission shaft B, another is driven by X-axis synchronous belt Transmission shaft B is rotated synchronously；It is fixed by two X-axis guide rods (20) between two Y-axis slide units (31), two X-axis guide rod (20) positions It is parallel in same level and position, an X-axis slide block is installed on every X-axis guide rod (20)；The mirror finish equipment includes ion beam emittance device (36), mirror finish platform (19) and adjustment mechanism, ion beam hair Emitter (36) is installed on the lower section of mirror finish platform (19) by adjusting mechanism, and ion beam emittance device is adjusted by adjusting mechanism (36) launch angle；The upper surface of mirror finish platform (19) is fixed with two X-axis slide blocks, while is fixed with X-axis synchronous belt Connection, mirror finish platform (19) synchronizing moving is driven by X-axis synchronous belt.
- 2. optical mirror plane polissoir according to claim 1, it is characterised in that：The adjustment mechanism includes a fixed length Bar (37) and two electric pushrods (39), three flexural pivots (40) have been evenly arranged in the lower surface of mirror finish platform (19), The side of ion beam emittance device (36) has been evenly arranged three key seats, a connecting-rods with constant lengh (37) and two electric pushrods (39) it is upper End is connected with three flexural pivots (40) respectively, and the lower end of a connecting-rods with constant lengh (37) and two electric pushrods (39) passes through axis pin respectively (38) it is connected with three key seats.
- 3. optical mirror plane polissoir according to claim 1, it is characterised in that：The moving platform corresponds to four support columns (2) four Angle Positions are each provided with one group of roller bar-roller mechanism, roller (30) and roller bar (29) installation in same group In same installation axle, roller (30) is located at outside；Support column (2) sets T-slot, roller bar-roller mechanism along Z-direction In T-slot, and it can be moved back and forth along T-slot；Four flexible cables (25) each connect a roller, pass through four flexible cables The movement of the folding and unfolding control moving platform of driving device control flexible cable (25) in the Z-axis direction.
- 4. optical mirror plane polissoir according to claim 1, it is characterised in that：It is provided with the top platform (3) Four flexible cable pilot holes (26), four flexible cable pilot holes (26) are respectively positioned at the surface of four roller bars (29)；The flexible cable Driving device includes guide rod (10), driving support platform (6), movable slider (11) and leadscrew-nut mechanism, and guide rod (10) is by leading Bar supporting rack (12) is fixed on top platform (3), and driving support platform (6) and movable slider (11) are installed on guide rod (10) And can be moved back and forth with respect to guide rod (10), servomotor (4), retarder (5) and connection are installed in driving support platform (6) Axis device (7)；Leadscrew-nut mechanism includes fixing nut (8) and leading screw (9), and fixing nut (8) is fixed on top platform (3), One end of leading screw (9) is connected by shaft coupling (7), retarder (5) with the output terminal of servomotor (4), the other end of leading screw (9) It is connected by bearing (27) with movable slider (11), one end of flexible cable (25) is fixedly connected with leading screw (9), the other end of flexible cable (25) It is connected through corresponding flexible cable pilot hole (26) with the roller bar (29) of underface.
- 5. optical mirror plane polissoir according to claim 1, it is characterised in that：The active support device is included actively Body (24) and force actuator (23) are supported, the number of force actuator (23) is 3 integral multiple, using Hindle/ Whiffletree type multi-point support modes, which are arranged in, actively to be supported on body (24), is supported by power promoters (23) polished Minute surface (22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711170928.4A CN107900838B (en) | 2017-11-22 | 2017-11-22 | A kind of optical mirror plane polissoir |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711170928.4A CN107900838B (en) | 2017-11-22 | 2017-11-22 | A kind of optical mirror plane polissoir |
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| Publication Number | Publication Date |
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| CN107900838A true CN107900838A (en) | 2018-04-13 |
| CN107900838B CN107900838B (en) | 2019-08-06 |
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| CN201711170928.4A Expired - Fee Related CN107900838B (en) | 2017-11-22 | 2017-11-22 | A kind of optical mirror plane polissoir |
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| CN112571245A (en) * | 2020-12-07 | 2021-03-30 | 温州大学激光与光电智能制造研究院 | Polishing device for surface of steel plate |
| CN113695991A (en) * | 2021-09-07 | 2021-11-26 | 成都极致智造科技有限公司 | Ion beam polishing device for optical element |
| FR3121377A1 (en) * | 2021-04-06 | 2022-10-07 | Safran Reosc | ISOSTATIC PRECISION MECHANICAL POSITIONING DEVICE WITHOUT INDUCED MECHANICAL STRESS |
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| CN109454635A (en) * | 2018-10-15 | 2019-03-12 | 山东中衡光电科技有限公司 | A kind of steel wire flexible cable parallel connection mirror processing device based on lever principle |
| CN112571245A (en) * | 2020-12-07 | 2021-03-30 | 温州大学激光与光电智能制造研究院 | Polishing device for surface of steel plate |
| FR3121377A1 (en) * | 2021-04-06 | 2022-10-07 | Safran Reosc | ISOSTATIC PRECISION MECHANICAL POSITIONING DEVICE WITHOUT INDUCED MECHANICAL STRESS |
| CN113695991A (en) * | 2021-09-07 | 2021-11-26 | 成都极致智造科技有限公司 | Ion beam polishing device for optical element |
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| CN107900838B (en) | 2019-08-06 |
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