CN107175560A - A kind of optical fabrication equipment - Google Patents

A kind of optical fabrication equipment Download PDF

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Publication number
CN107175560A
CN107175560A CN201710430201.9A CN201710430201A CN107175560A CN 107175560 A CN107175560 A CN 107175560A CN 201710430201 A CN201710430201 A CN 201710430201A CN 107175560 A CN107175560 A CN 107175560A
Authority
CN
China
Prior art keywords
axis
straight line
slide unit
line slide
ball
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710430201.9A
Other languages
Chinese (zh)
Inventor
程刚
乔智
郭锋
山显雷
张慧珍
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
China University of Mining and Technology CUMT
Original Assignee
China University of Mining and Technology CUMT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by China University of Mining and Technology CUMT filed Critical China University of Mining and Technology CUMT
Priority to CN201710430201.9A priority Critical patent/CN107175560A/en
Publication of CN107175560A publication Critical patent/CN107175560A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/0018Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor for plane optical surfaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/005Blocking means, chucks or the like; Alignment devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/02Frames; Beds; Carriages

Abstract

The present invention proposes a kind of optical fabrication equipment, including:Workbench, fixed mount, Cutting tool installation manner platform, cutter drive motor, mirror finish cutter, a main straight line slide unit and three auxiliary straight line slide units.Cutting tool installation manner platform is fixed on main straight line slide unit, and Cutting tool installation manner platform is provided with mirror finish cutter;Three auxiliary straight line slide units are connected by the Hooke's hinge being sequentially connected, branch chain bar, spherical hinge and Cutting tool installation manner platform respectively;Main straight line slide unit realizes the movement of mirror finish cutter one degree of freedom, and three auxiliary straight line slide units realize the rotation of mirror finish cutter three degree of freedom.Parallel institution is introduced into the configuration of lathe by the present invention, and rigidity is big, and precision is high, Stability Analysis of Structures.Workpiece can be processed well, reach required High-precision standard.

Description

A kind of optical fabrication equipment
Technical field
The invention belongs to be machined manufacturing technology field, more particularly to a kind of optical fabrication equipment.
Background technology
Following several stages are mainly passed through to optical fabrication at present:Cast blank, turning, grinding and polishing, still Manufacturing procedure is more, and operating efficiency is low, especially the processing to the mirror face parts of some high-precision requirements, is also limited by precision System, does not reach high-precision requirement.Mirror-quality of the existing mirror finish lathe in the presence of processing due to structure is low, plus The problem of work specification of workpieces is small, is unfavorable for promoting.
The content of the invention
Goal of the invention:Low in order to solve existing mirror finish quality, the problem of inefficiency, the present invention proposes a kind of optics Mirror finish equipment.The process equipment application parallel institution is high with machining accuracy as configuration, the characteristics of rigidity is big.
Technical scheme:In order to realize above-mentioned technique effect, the present invention provides following technical scheme:
A kind of optical fabrication equipment, including:Workbench, fixed mount, Cutting tool installation manner platform, cutter drive motor, minute surface Process tool, a main straight line slide unit and three auxiliary straight line slide units;
The top surface of the workbench is as processing plane, and mirror face part to be processed is placed in the processing plane;
The bottom of three auxiliary straight line slide units is each attached in the processing plane, and three auxiliary straight lines are slided The triangular prism shape processing formed between platform and the processing plane using the length direction of three auxiliary straight line slide units as rib is empty Between;
The fixed mount setting passes through directly over the triangular prism shape processing space at the top of the main straight line slide unit Ball bearing is rotated with the fixed mount and is connected, and the bottom of the main straight line slide unit is stretched into the triangular prism shape processing space;
The Cutting tool installation manner platform is triangular plate, and the triangular plate is fixed on the slide unit of the main straight line slide unit On, and the plate face of the set square is vertical with main straight line slide unit length direction, the triangular plate can add in the triangular prism shape Slided in work space along the main straight line slide unit length direction;Three angles of the triangular plate pass through bindiny mechanism and institute respectively The slide unit stated on three auxiliary straight line slide units connects one to one;The bindiny mechanism include be sequentially connected Hooke's hinge, Branch chain bar, spherical hinge, the Hooke's hinge are hinged with the slide unit on corresponding auxiliary straight line slide unit, and the ball pivot of the spherical hinge Seat angle corresponding with the triangular plate is connected;
The cutter drive motor is arranged on the Cutting tool installation manner platform, and the mirror finish cutter drives with the cutter The output end of dynamic motor is connected, and the blade of the mirror finish cutter is towards the processing plane.
Further, the optical fabrication equipment also includes:Cross slid platform and mirror face part fixture;The cross is slided Platform includes orthogonal x-axis straight line slide unit and y-axis straight line slide unit, and the x-axis straight line slide unit is fixed in the processing plane, And the y-axis straight line slide unit is fixed on the sliding block of the x-axis straight line slide unit;The mirror face part fixture is fixed on the y-axis On the sliding block of straight line slide unit, mirror face part to be processed is clamped on the mirror face part fixture.
Further, the x-axis straight line slide unit includes:Two be parallel to each other x-axis line slideway, x-axis sliding block, x-axis rolling Ballscrew, x-axis spindle motor;The y-axis straight line slide unit includes:Two be parallel to each other y-axis line slideway, y-axis sliding block, y-axis Ball-screw, y-axis spindle motor;
Two x-axis line slideways are fixed in the processing plane, and the x-axis ball-screw is arranged at described two Between x-axis line slideway, and the length direction of the x-axis ball-screw is parallel with the x-axis line slideway length direction;It is described The input of x-axis ball-screw is connected with the output end of the x-axis spindle motor;The x-axis sliding block is connected across two x-axis Between line slideway, and it is connected with the feed screw nut of the x-axis ball-screw;
Two y-axis line slideways are fixed on the x-axis sliding block, and the y-axis ball-screw is arranged at two y Between axle line slideway, and the length direction of the y-axis ball-screw is parallel with the y-axis line slideway length direction;The y The input of axle ball-screw is connected with the output end of the y-axis spindle motor;The y-axis sliding block is connected across two y-axis Between line slideway, and it is connected with the feed screw nut of the y-axis ball-screw.
Further, the mirror face part fixture includes:Cross guide rail and four root ball-screws;The cross is led Rail is divided into the sub- line slideway of four equal lengths, and the four roots ball-screw is respectively arranged at four sub- line slideways In, the grip block that can be slided along the sub- line slideway of correspondence, institute are respectively and fixedly provided with the feed screw nut of the four roots ball-screw State grip block and the clamp groove being adapted with mirror face part is formed towards the side of the cross guideway centreline;The cross Main drive gear is provided with guideway centreline, and the four roots ball-screw is equal on the end axle of cross guideway centreline one end Provided with sub- drive gear, the sub- drive gear is engaged with the main drive gear, and the surfaces of revolution of the sub- drive gear hangs down Directly in the surfaces of revolution of the main drive gear.
Beneficial effect:Compared with prior art, the present invention has advantages below:
The present invention uses parallel-connection structure form, and rigidity is big, and Stability Analysis of Structures, accumulated error is small.Type of drive is using servo electricity Machine drives ball-screw form, and kinematic accuracy is high, more easy to control.
Brief description of the drawings
Fig. 1 is the structure chart of embodiment 1;
Fig. 2 is the structure chart of embodiment 2;
Fig. 3 is the structure chart of cross slid platform in embodiment;
Fig. 4 is the Facad structure figure of mirror face part fixture in embodiment;
Fig. 5 is the backside structure figure of mirror face part fixture in embodiment.
In figure:1st, workbench, 2, fixed mount, 3, Cutting tool installation manner platform, 4, cutter drive motor, 5, mirror finish cutter, 6, Ball bearing, 7, main drive motor, 8, main ball-screw, 9, auxiliary motor, 10, line slideway, 11, sliding block, 12, Hooke's hinge, 13rd, branch chain bar, 14, spherical hinge, 15, ball pivot seat, 16, x-axis line slideway, 17, x-axis sliding block, 18, x-axis ball-screw, 19, x-axis Spindle motor, 20, y-axis line slideway, 21, y-axis sliding block, 22, y-axis ball-screw, 23, y-axis spindle motor, 24, elastic shaft coupling Device, 25, cross guide rail, 26, sub- ball-screw, 27, grip block, 28, clamp groove, 29, main drive gear, 30, sub- driving Gear, 31, leading screw fixed seat, 32, fixed plate, 33, handwheel, the 34, first belt pulley, the 35, second belt pulley, 36, belt.
Embodiment
The present invention is further described below in conjunction with the accompanying drawings.
Fig. 1 show the structure chart of the embodiment of the present invention 1, including:Workbench 1, fixed mount 2, Cutting tool installation manner platform 3, cutter Motor 4, mirror finish cutter 5, a main straight line slide unit and three auxiliary straight line slide units.The main straight line slide unit and three Auxiliary straight line slide unit is ballscrew type straight line slide unit;Wherein, the main straight line slide unit includes:Main drive motor 7, main ball Leading screw 8;And the auxiliary straight line slide unit includes:Auxiliary motor 9, line slideway 10, sliding block 11.
The top surface of the workbench 1 is as processing plane, and mirror face part to be processed is placed in the processing plane;
The bottom of three line slideways 10 is each attached in the processing plane, and three line slideways 10 He The triangular prism shape processing space using the length direction of three line slideways as rib is formed between the processing plane;
The fixed mount 2 is arranged on directly over the triangular prism shape processing space, and the top of the main ball-screw 8 with The output end of the main drive motor 7 is connected, and the bottom of main ball-screw 8 is stretched into the triangular prism shape processing space;Entirely Main straight line slide unit is rotated with the fixed mount 2 by ball bearing 6 and is connected.
The Cutting tool installation manner platform 3 is the triangular plate parallel to the triangular prism shape processing space cross section;The triangle Shape plate is fixed on the sliding block 10 of the main ball-screw 8, and the plate face of the triangular plate and the length of the main ball-screw 8 Spend direction vertical, the triangular plate can be slided along the main ball-screw 8 in the triangular prism shape processing space;Described three Three angles of angular plate are connected one to one by bindiny mechanism with the sliding block 11 on three auxiliary straight line slide units respectively;The company Connection mechanism includes the Hooke's hinge 12, branch chain bar 13, the spherical hinge 14 that are sequentially connected, an end axle of the Hooke's hinge 12 with it is corresponding auxiliary The sliding block 11 helped on straight line slide unit is hinged, and another end axle of Hooke's hinge 12 is connected with the end axle of the spherical hinge, and the ball 15 angles corresponding with the triangular plate of ball pivot seat of hinge 14 are connected.
The cutter drive motor 4 is arranged on the Cutting tool installation manner platform 3, and the mirror finish cutter 5 and the knife The output end for having motor 4 is connected, and the blade of the mirror finish cutter 5 is towards the processing plane.
In the above-mentioned technical solutions, main drive motor 7 drives main ball-screw 8 to rotate, and makes fixed on main ball-screw 8 Cutting tool installation manner platform 3 move up and down, realize the movement of the one degree of freedom of mirror finish cutter 5.And by controlling three auxiliary straight Moving up and down for line slide unit top shoe 11 can realize the rotation of the three degree of freedom of mirror finish cutter 5.Above-mentioned technical proposal is adopted Parallel-connection structure form is used, rigidity is big, and Stability Analysis of Structures, accumulated error is small.
For further optimization above-mentioned technical proposal, implementation 2 set forth below, the overall structure figure of embodiment 2 as shown in Fig. 2 It adds cross slid platform and mirror face part fixture on the basis of embodiment 1.
The structure of cross slid platform is as shown in Figure 3:
The cross slid platform includes orthogonal x-axis straight line slide unit and y-axis straight line slide unit, the x-axis straight line slide unit bag Include:Two the x-axis line slideway 16, x-axis sliding block 17, x-axis ball-screw 18, the x-axis spindle motors 19 that are parallel to each other;The y-axis Straight line slide unit includes:Two the y-axis line slideway 20, y-axis sliding block 21, y-axis ball-screw 22, the y-axis spindle motors that are parallel to each other 23;
Two x-axis line slideways 16 are fixed in the processing plane, and the x-axis ball-screw 18 is arranged at described Between two x-axis line slideways 16, and the length direction of the x-axis ball-screw 18 and the length side of x-axis line slideway 16 To parallel;The input of the x-axis ball-screw 18 is connected with the output end of the x-axis spindle motor 19;The x-axis sliding block 17 It is connected across between two x-axis line slideways 16, and is connected with the feed screw nut of the x-axis ball-screw 18;
Two y-axis line slideways 20 are fixed on the x-axis sliding block 17, and the y-axis ball-screw 22 is arranged at institute State between two y-axis line slideways 20, and the length direction of the y-axis ball-screw 22 and the length of y-axis line slideway 20 Direction is parallel;The input of the y-axis ball-screw 22 is connected with the output end of the y-axis spindle motor 23;The y-axis sliding block 21 are connected across between two y-axis line slideways 20, and are connected with the feed screw nut of the y-axis ball-screw 22.
The mirror face part fixture is fixed on the y-axis sliding block 21, and mirror face part to be processed is clamped in the minute surface On part clamp.
Between the x-axis ball-screw 18 and x-axis spindle motor 19 and the y-axis ball-screw 22 and y-axis leading screw Yielding coupling 24 is equipped between motor 23.
The structure of the mirror face part fixture is as shown in Fig. 4 to 5:
The mirror face part fixture includes:The root ball-screw 26 of cross guide rail 25 and four;The cross guide rail 25 It is fixed in fixed plate 32, the fixed plate 32 is fixed on the cross slid platform y-axis sliding block 21;25 points of the cross guide rail For the sub- line slideway of four equal lengths, and the four roots ball-screw 26 is respectively arranged in four sub- line slideways, And connected respectively by leading screw fixed seat 31 with corresponding sub- line slideway.
The folder that can be slided along the sub- line slideway of correspondence is respectively and fixedly provided with the feed screw nut of the four roots ball-screw 26 Block 27 is held, the grip block forms the clamp groove being adapted with mirror face part towards the side of the cross guideway centreline 28;The center of cross guide rail 25 is provided with main drive gear 29, and the four roots ball-screw 26 is led close to cross Sub- drive gear 30 is equipped with the end axle of the center one end of rail 25, the sub- drive gear 30 is nibbled with the main drive gear 29 Close, and the sub- drive gear 30 the surfaces of revolution perpendicular to the main drive gear 29 the surfaces of revolution.
In the fixed plate 32, handwheel 33, the first belt pulley 34, the second belt pulley 35 and belt 36 are additionally provided with;It is described Main drive gear 29 connects the first belt pulley 34 by power transmission shaft, and the handwheel 33 connects the second belt by handwheel power transmission shaft Wheel 35, is driven between the first belt pulley 34 and the second belt pulley 35 by belt 36.Above-mentioned optical fabrication equipment is in operating When, rotate handwheel 33 and drive the first belt pulley 34, the first belt pulley 34 drives the second belt pulley 35, the second belt by belt 36 The main drive gear 29 of the driving of wheel 35 rotates, and is rotated by the sub- drive gear 30 engaged with main drive gear 29, so that institute State sub- ball-screw 26 to rotate, make four synchronizing movings of grip block 27, centering effect is good, clamping speed is fast.Four grip blocks 27 The material of clamp groove 28 use elastomeric material, prevent clamping when destroy workpiece.
Described above is only the preferred embodiment of the present invention, it should be pointed out that:For the ordinary skill people of the art For member, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications also should It is considered as protection scope of the present invention.

Claims (4)

1. a kind of optical fabrication equipment, it is characterised in that including:Workbench, fixed mount, Cutting tool installation manner platform, cutter drives Motor, mirror finish cutter, a main straight line slide unit and three auxiliary straight line slide units;
The top surface of the workbench is as processing plane, and mirror face part to be processed is placed in the processing plane;
The bottom of three auxiliary straight line slide units be each attached to it is described processing plane on, and three auxiliary straight line slide units and The triangular prism shape processing space using the length direction of three auxiliary straight line slide units as rib is formed between the processing plane;
The fixed mount setting is directly over the triangular prism shape processing space, and the top of the main straight line slide unit passes through ball axle Hold to rotate with the fixed mount and be connected, the bottom of the main straight line slide unit is stretched into the triangular prism shape processing space;
The Cutting tool installation manner platform is triangular plate, and the triangular plate is fixed on the slide unit of the main straight line slide unit, and The plate face of the set square is vertical with main straight line slide unit length direction, and the triangular plate can be in the triangular prism shape processing space It is interior to be slided along the main straight line slide unit length direction;Three angles of the triangular plate pass through bindiny mechanism and described three respectively Slide unit on auxiliary straight line slide unit connects one to one;The bindiny mechanism include be sequentially connected Hooke's hinge, branch chain bar, Spherical hinge, the Hooke's hinge is hinged with the slide unit on corresponding auxiliary straight line slide unit, and the ball pivot of spherical hinge seat and institute The corresponding angle of triangular plate is stated to be connected;
The cutter drive motor is arranged on the Cutting tool installation manner platform, and the mirror finish cutter and cutter drives electricity The output end of machine is connected, and the blade of the mirror finish cutter is towards the processing plane.
2. a kind of optical fabrication equipment according to claim 1, it is characterised in that the optical fabrication equipment Also include:Cross slid platform and mirror face part fixture;The cross slid platform includes orthogonal x-axis straight line slide unit and y-axis straight line Slide unit, the x-axis straight line slide unit is fixed in the processing plane, and the y-axis straight line slide unit is fixed on the x-axis straight line and slided On the sliding block of platform;The mirror face part fixture is fixed on the sliding block of the y-axis straight line slide unit, mirror face part clamping to be processed On the mirror face part fixture.
3. a kind of optical fabrication equipment according to claim 2, it is characterised in that the x-axis straight line slide unit includes: Two the x-axis line slideway, x-axis sliding block, x-axis ball-screw, the x-axis spindle motors that are parallel to each other;The y-axis straight line slide unit bag Include:Two the y-axis line slideway, y-axis sliding block, y-axis ball-screw, the y-axis spindle motors that are parallel to each other;
Two x-axis line slideways are fixed in the processing plane, and the x-axis ball-screw is arranged at two x-axis Between line slideway, and the length direction of the x-axis ball-screw is parallel with the x-axis line slideway length direction;The x-axis The input of ball-screw is connected with the output end of the x-axis spindle motor;It is straight that the x-axis sliding block is connected across two x-axis Between line guide rail, and it is connected with the feed screw nut of the x-axis ball-screw;
Two y-axis line slideways are fixed on the x-axis sliding block, and it is straight that the y-axis ball-screw is arranged at two y-axis Between line guide rail, and the length direction of the y-axis ball-screw is parallel with the y-axis line slideway length direction;The y-axis rolling The input of ballscrew is connected with the output end of the y-axis spindle motor;The y-axis sliding block is connected across two y-axis straight lines Between guide rail, and it is connected with the feed screw nut of the y-axis ball-screw.
4. a kind of optical fabrication equipment according to claim 2, it is characterised in that the mirror face part fixture bag Include:Cross guide rail and four root ball-screws;The cross guide rail is divided into the sub- line slideway of four equal lengths, and institute Four root ball-screws are stated to be respectively arranged in four sub- line slideways, it is solid on the feed screw nut of the four roots ball-screw Surely there are the grip block that can be slided along the sub- line slideway of correspondence, side shape of the grip block towards the cross guideway centreline Into the clamp groove being adapted with mirror face part;Provided with main drive gear at the cross guideway centreline, and four root Ball-screw is equipped with sub- drive gear, the sub- drive gear and the master on the end axle of cross guideway centreline one end Drive gear engage, and the sub- drive gear the surfaces of revolution perpendicular to the main drive gear the surfaces of revolution.
CN201710430201.9A 2017-06-08 2017-06-08 A kind of optical fabrication equipment Pending CN107175560A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710430201.9A CN107175560A (en) 2017-06-08 2017-06-08 A kind of optical fabrication equipment

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Application Number Priority Date Filing Date Title
CN201710430201.9A CN107175560A (en) 2017-06-08 2017-06-08 A kind of optical fabrication equipment

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CN107175560A true CN107175560A (en) 2017-09-19

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107900838A (en) * 2017-11-22 2018-04-13 中国矿业大学 A kind of optical mirror plane polissoir
CN107984331A (en) * 2017-11-28 2018-05-04 中国矿业大学 A kind of five axis series-parallel connection photo process equipments and its method of work
CN109093396A (en) * 2018-07-23 2018-12-28 安徽六方重联机械股份有限公司 A kind of automatic lathe cutter device for nut production
CN109352459A (en) * 2018-10-15 2019-02-19 山东中衡光电科技有限公司 A kind of large-aperture optical free-form surface processing device
CN111687715A (en) * 2020-06-23 2020-09-22 刘颖 Optical lens polishing device convenient to maintain
CN112192444A (en) * 2020-09-04 2021-01-08 太仓臻溢科技有限公司 Multi-dimensional constant force control device
CN112975653A (en) * 2021-02-05 2021-06-18 何宽 Machining device for elliptical ring-shaped optical glass
CN114454031A (en) * 2022-01-24 2022-05-10 易秋生 Optical lens piece glass is polished piece resorption and is sprayed equipment
CN117260988A (en) * 2023-09-06 2023-12-22 中国矿业大学 Multi-parallel optical mirror surface processing device

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CN205968290U (en) * 2016-08-25 2017-02-22 天津宝涞精工集团股份有限公司 Major diameter ring class part is from feeling relieved special clamping device

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107900838A (en) * 2017-11-22 2018-04-13 中国矿业大学 A kind of optical mirror plane polissoir
CN107984331A (en) * 2017-11-28 2018-05-04 中国矿业大学 A kind of five axis series-parallel connection photo process equipments and its method of work
CN109093396A (en) * 2018-07-23 2018-12-28 安徽六方重联机械股份有限公司 A kind of automatic lathe cutter device for nut production
CN109352459A (en) * 2018-10-15 2019-02-19 山东中衡光电科技有限公司 A kind of large-aperture optical free-form surface processing device
CN111687715A (en) * 2020-06-23 2020-09-22 刘颖 Optical lens polishing device convenient to maintain
CN112192444A (en) * 2020-09-04 2021-01-08 太仓臻溢科技有限公司 Multi-dimensional constant force control device
CN112975653A (en) * 2021-02-05 2021-06-18 何宽 Machining device for elliptical ring-shaped optical glass
CN114454031A (en) * 2022-01-24 2022-05-10 易秋生 Optical lens piece glass is polished piece resorption and is sprayed equipment
CN117260988A (en) * 2023-09-06 2023-12-22 中国矿业大学 Multi-parallel optical mirror surface processing device

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Application publication date: 20170919

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