CN107887308A - Full-automatic multi-functional processing equipment - Google Patents
Full-automatic multi-functional processing equipment Download PDFInfo
- Publication number
- CN107887308A CN107887308A CN201711251547.9A CN201711251547A CN107887308A CN 107887308 A CN107887308 A CN 107887308A CN 201711251547 A CN201711251547 A CN 201711251547A CN 107887308 A CN107887308 A CN 107887308A
- Authority
- CN
- China
- Prior art keywords
- chamber
- crane
- full
- package cavity
- mechanical pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of full-automatic multi-functional processing equipment, is related to semiconductor manufacturing facility technical field, including workbench, and workbench is fixed with thermal processing chamber, activation release chamber, package cavity and excessive chamber successively；First crane, water circulation system and the first mechanical pump are installed in hot processing chamber room；The second crane and the second mechanical pump are installed in activation release chamber；3rd mechanical pump and a molecular pump are installed in package cavity；Track, the first crane, the second crane form track linked system.The present invention is heat-treated, activated the fully-automatic equipment of release, encapsulation, high sealing environment and high vacuum working environment by integrating product.While product turnover is greatly reduced, working environment needed for production is ensure that, substantially increases production efficiency, saves enterprise's production cost.
Description
Technical field
The invention belongs to technical field of semiconductors, more particularly to a kind of full-automatic multi-functional processing equipment.
Background technology
With the continuous development of semicon industry, increasing product needs to be heat-treated in process of production, stable
The requirement such as gaseous environment, high-cleanness, high, high sealing environment and high vacuum environment.At present the present situation of most enterprise is production equipment
Function is single, so as to cause complex production process.The excessive circulation of product will certainly cause product yield to decrease, dangerous
Coefficient increases, and the relatively low increase production cost of production efficiency.R ＆ D design integrates the fully-automatic equipment of numerous production functions,
It is the direction that existing semicon industry is badly in need of capturing.
The content of the invention
It is an object of the invention to provide full-automatic multi-functional processing equipment, is heat-treated by collecting product, activation discharges, envelope
The fully-automatic equipment that dress, high sealing environment and high vacuum working environment are integrated, solves existing production equipment function list
One, so as to cause complex production process, cause product yield to decrease, danger coefficient increase the problems such as.
In order to solve the above technical problems, the present invention is achieved by the following technical solutions：
The present invention is full-automatic multi-functional processing equipment, including workbench, the workbench are fixed with hot processing chamber successively
Room, activation release chamber, package cavity and excessive chamber；The thermal processing chamber, activation release chamber, package cavity, excessively
Connected between chamber by vacuum valve；Lead between the thermal processing chamber, activation release chamber, package cavity, excessive chamber
Track is crossed to be linked；First crane, water circulation system and the first mechanical pump are installed in the hot processing chamber room；It is described to swash
Second crane and the second mechanical pump are installed in release chamber living；3rd mechanical pump and one point are installed in the package cavity
Sub- pump；The track, the first crane, the second crane form track linked system.
Further, the thermal processing chamber, activation release chamber, package cavity and excessive chamber are respectively provided with one
Observation window.
Further, the thermal processing chamber Single port and excessive chamber mouth are respectively arranged with door.
Further, it is described that video acquisition device excessively is installed outside the observation window of chamber.
The invention has the advantages that：
1st, the present invention is heat-treated by collecting product, activation discharges, encapsulate, high sealing environment and high vacuum working environment are
The fully-automatic equipment of one.While product turnover is greatly reduced, working environment needed for production is ensure that, is greatly improved
Production efficiency, save enterprise's production cost.
2nd, the present invention has function diversification, and product turnover is in high stable environment, the reduction human factor of high degree
Infringement to product quality, production efficiency is high, steady quality.
Certainly, any product for implementing the present invention it is not absolutely required to reach all the above advantage simultaneously.
Brief description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, used required for being described below to embodiment
Accompanying drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the present invention, for ability
For the those of ordinary skill of domain, on the premise of not paying creative work, it can also be obtained according to these accompanying drawings other attached
Figure.
Fig. 1 is the full-automatic multi-functional processing equipment schematic diagram of the present invention；
Fig. 2 is Fig. 1 side view.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained all other under the premise of creative work is not made
Embodiment, belong to the scope of protection of the invention.
In the description of the invention, it is to be understood that term " perforate ", " on ", " under ", " thickness ", " top ", " in ",
Indicating position or the position relationship such as " length ", " interior ", " surrounding ", it is for only for ease of the description present invention and simplifies description, without
It is that the component of instruction or hint meaning or element must have specific orientation, with specific azimuth configuration and operation, therefore not
It is understood that as limitation of the present invention.
Refer to shown in Fig. 1-2, the present invention is a kind of full-automatic multi-functional processing equipment, including workbench 1, workbench 1
Thermal processing chamber 2, activation release chamber 4, package cavity 5 and excessive chamber 6 are fixed with successively；Thermal processing chamber 2, activation release
Connected between chamber 4, package cavity 5, excessive chamber 6 by vacuum valve 3；Thermal processing chamber 2, activation release chamber 4, encapsulation
Linked between chamber 5, excessive chamber 6 by track；First crane, water circulation system are installed in thermal processing chamber 2
With the first mechanical pump；Second crane and the second mechanical pump are installed in activation release chamber 4；Is provided with package cavity 5
Three mechanical pumps and a molecular pump；Track, the first crane, the second crane form track linked system.
Wherein, thermal processing chamber 2, activation release chamber 4, package cavity 5 and excessively chamber 6 are respectively provided with an observation
Window 9.
Wherein, the Single port of thermal processing chamber 2 and the Single port of excessive chamber 6 are respectively arranged with door 7.
Wherein, video acquisition device is installed, video acquisition device is arranged on outside one outside the observation window 9 of excessive chamber 6
In shell, video acquisition device is connected with a wireless communication module, and the data message that video acquisition device gathers is passed through into channel radio
Letter module is sent to terminal device.A supporting plate 8 is also equipped with excessive chamber 6, supporting plate 8 is fixed with the rail coordinated with track side by side
Road wheel.
Thermal processing chamber：This chamber is mainly used in the heat treatment requirements of product, and crane is provided with chamber and is used to place production
Product.This chamber can meet the product demand of low vacuum equipped with mechanical pump, and be provided with water-cooling system to meet the needs of cooling.
When product is heat-treated, the display meeting real-time display related data such as chamber interior vacuum, temperature at present is manipulated.
Activation release chamber：This chamber is mainly used in the related process such as Product Activation, release, and chamber is interior to be provided with crane
For placing product.This chamber can meet the product demand of low vacuum equipped with mechanical pump.When activating release, display is manipulated
Understand the real-time display related data such as chamber interior vacuum at present.
Package cavity：This chamber is mainly used for the encapsulation of product, and package platforms and sealed in unit are provided with chamber.This
Chamber can meet that product is low, the different demands of high vacuum working environment equipped with mechanical pump and molecular pump.In encapsulation, manipulation
Display understands the real-time display related data such as chamber interior vacuum, temperature at present.
Excessive chamber：This chamber is mainly used for the over effect taken out at the end of production.
Track linked system：The system is mainly used for the transmission of product between each chamber, and track lifts with each chamber
Frame is linked the turnover for realizing product between each chamber.
Vacuum valve device：The present apparatus is mainly used for isolation and UNICOM between each chamber.
In the description of this specification, the description of reference term " one embodiment ", " example ", " specific example " etc. means
At least one implementation of the present invention is contained in reference to specific features, structure, material or the feature that the embodiment or example describe
In example or example.In this manual, identical embodiment or example are not necessarily referring to the schematic representation of above-mentioned term.
Moreover, specific features, structure, material or the feature of description can close in any one or more embodiments or example
Suitable mode combines.
Present invention disclosed above preferred embodiment is only intended to help and illustrates the present invention.Preferred embodiment is not detailed
All details are described, it is only described embodiment also not limit the invention.Obviously, according to the content of this specification,
It can make many modifications and variations.This specification is chosen and specifically describes these embodiments, is to preferably explain the present invention
Principle and practical application so that skilled artisan can be best understood by and utilize the present invention.The present invention is only
Limited by claims and its four corner and equivalent.
Claims (4)
1. full-automatic multi-functional processing equipment, including workbench (1), it is characterised in that：
The workbench (1) is fixed with thermal processing chamber (2), activation release chamber (4), package cavity (5) and excessive chamber successively
Room (6)；
The thermal processing chamber (2), activation release chamber (4), package cavity (5), excessive chamber pass through vacuum valve between (6)
(3) connect；The thermal processing chamber (2), activation release chamber (4), package cavity (5), excessive chamber pass through track between (6)
Linked；
The first crane, water circulation system and the first mechanical pump are installed in the thermal processing chamber (2)；
The second crane and the second mechanical pump are installed in the activation release chamber (4)；
The 3rd mechanical pump and a molecular pump are installed in the package cavity (5)；
The track, the first crane, the second crane form track linked system.
2. full-automatic multi-functional processing equipment according to claim 1, it is characterised in that the thermal processing chamber (2), swash
Release chamber (4), package cavity (5) and excessive chamber (6) living are respectively provided with an observation window (9).
3. full-automatic multi-functional processing equipment according to claim 1, it is characterised in that the thermal processing chamber (2) one
Port and excessive chamber (6) Single port are respectively arranged with door (7).
4. full-automatic multi-functional processing equipment according to claim 1, it is characterised in that the sight of the excessively chamber (6)
Examine and video acquisition device is installed outside window (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711251547.9A CN107887308A (en) | 2017-12-01 | 2017-12-01 | Full-automatic multi-functional processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711251547.9A CN107887308A (en) | 2017-12-01 | 2017-12-01 | Full-automatic multi-functional processing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107887308A true CN107887308A (en) | 2018-04-06 |
Family
ID=61772716
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711251547.9A Pending CN107887308A (en) | 2017-12-01 | 2017-12-01 | Full-automatic multi-functional processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107887308A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102122609A (en) * | 2009-12-10 | 2011-07-13 | 奥博泰克Lt太阳能公司 | Auto-sequencing inline processing apparatus |
| CN103503123A (en) * | 2011-05-03 | 2014-01-08 | 泰拉半导体株式会社 | In-line heat treatment device |
| CN104078384A (en) * | 2013-03-27 | 2014-10-01 | 泰拉半导体株式会社 | In-line type heat treatment apparatus |
-
2017
- 2017-12-01 CN CN201711251547.9A patent/CN107887308A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102122609A (en) * | 2009-12-10 | 2011-07-13 | 奥博泰克Lt太阳能公司 | Auto-sequencing inline processing apparatus |
| CN103503123A (en) * | 2011-05-03 | 2014-01-08 | 泰拉半导体株式会社 | In-line heat treatment device |
| CN104078384A (en) * | 2013-03-27 | 2014-10-01 | 泰拉半导体株式会社 | In-line type heat treatment apparatus |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20200915 Address after: Room 508, R&D Center Building, China (Hefei) International Intelligent Voice Industry Park, 3333 Xiyou Road, Hefei High-tech Zone, 230000, Anhui Province Applicant after: HEFEI ZHILING INTELLIGENT TECHNOLOGY Co.,Ltd. Address before: 230000, Hefei province high tech Zone, 2800 innovation Avenue, 298 innovation industry park, H2 building, room two, Anhui Applicant before: HEFEI XINXIN INTELLIGENT TECHNOLOGY Co.,Ltd. |
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| TA01 | Transfer of patent application right | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180406 |
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| RJ01 | Rejection of invention patent application after publication |