CN107841718A - One kind is without glue double side flexible copper coated board production equipment - Google Patents
One kind is without glue double side flexible copper coated board production equipment Download PDFInfo
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- CN107841718A CN107841718A CN201711029947.5A CN201711029947A CN107841718A CN 107841718 A CN107841718 A CN 107841718A CN 201711029947 A CN201711029947 A CN 201711029947A CN 107841718 A CN107841718 A CN 107841718A
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- Prior art keywords
- vacuum
- vacuum cavity
- production equipment
- board production
- flexible copper
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3435—Applying energy to the substrate during sputtering
- C23C14/3442—Applying energy to the substrate during sputtering using an ion beam
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
Abstract
The invention discloses one kind without glue double side flexible copper coated board production equipment, including vacuum cavity, retractable volume system, the vacuum cavity side is provided with target pole car, and target pole is provided with the car of the target pole, second seal is provided between target pole car and the vacuum cavity.Beneficial effect is：(1) cavity body is circle, will not form pumping dead angle, and vacuum is uniform；Vacuum acquiring system is molecular pump without oil system, it is ensured that nothing returns oil in vacuum chamber；The cyropump of configuration improves the pumping speed deflated to base material during continuous coating, so as to improve operating efficiency.(2) double retractable volume systems are employed, the wide a roll of two-sided plating of magnetron sputtering area full width and the one side platings of volume two can be met；It can also meet that volume two plating the breadth of area half are plated one sides and two-sided plating, it is full-featured.(3) plasma processing device is set at entrance magnetron sputtering area, Ions Bombardment is carried out to substrate surface, improves base surface roughness, it is ensured that the peel strength between film layer and base material.
Description
Technical field
The present invention relates to copper-clad plate production equipment technical field, is produced more particularly to one kind without glue double side flexible copper coated board
Equipment.
Background technology
As electronic product develops towards towards direction short, small, light, thin, attractive in appearance, flexible print wiring with its is flexible,
The advantages that solid wiring, three dimensions interconnection, plays more and more important in the miniaturization of electronic equipment, high reliability etc.
Effect, be widely used in the related industries such as automobile, phone, toy, household electrical appliances, computer, camera, instrument and meter at present
In.Under this background, higher expectation has been expressed for flexible print wiring board.Flexibility coat copper plate is production flexible printing electricity
The main material of road plate, therefore the production technology of flexibility coat copper plate has strong influence to the performance of electronic product.By product
Structure is different, and flexibility coat copper plate has three layers of flexibility coat copper plate and two layers of flexibility coat copper plate at present.Three layers of flexibility coat copper plate are by copper
Paper tinsel, polyimide film (PI films) and middle one layer of adhesive totally three layers of different materials composition.Adhesive used, mainly there is ring
Oxygen type adhesive and acrylic ester type adhesive.The presence of adhesive is both advantageous and disadvantageous, and favourable aspect is：Pass through the work of adhesive
With polyimide film and copper foil are combined, turn into an entirety.Disadvantageously：Heat resistance, the size of adhesive are steady
Qualitative and reliability etc., and it is unfavorable for environmental protection, all much it is less than two layers of glue-free copper coated plate.Use traditional asphalt mixtures modified by epoxy resin
It is steady that three layers of flexibility coat copper plate prepared by fat and acrylic ester type adhesive are difficult in adapt to miniaturization, densification, bendability, size
Qualitative, electric conductivity, heat resistance and frivolous etc. the market of product need, and exploitation is with excellent flexibility and reliably and with long-term
The ultra-thin non-gel flexible copper-clad plate of performance is into the task of top priority.
Two layers of flexibility coat copper plate are made up of copper foil and polyimide film materials at two layers.With three layers of flexibility coat copper plate phase
Than, due to no above-mentioned adhesive, product have higher heat resistance and dimensional stability and more excellent pliability and
Long-term reliability.In recent years, as notice is increasingly turned to opening for adhesion without adhesiver dosage form product by the development of electronic technology, industry
Hair and application.
Traditional FCCL mainly has glue-type product, mainly by copper, adhesive, the three-decker of PI films composition, abbreviation 3L-
FCCL.Adhesive is mostly epoxies in 3L-FCCL, and heat endurance is poor with respect to PI base materials, causes FCCL heat endurance, size
Stability declines therewith, and the thickness of base material is larger, due to being unfavorable for national environmental protection policy using adhesive and having glue-type to cover copper
Plate is compared, and non-gel flexible copper-clad plate does not need binding agent, therefore heat-resist, good stability of the dimension, and reliability is high；Meanwhile nothing
Glue flexibility coat copper plate is very thin, and resistance to bend(ing) is high.
At present, non-gel flexible copper-clad plate mainly has following several preparation methods：
1) rubbing method：Polyimides, curing molding are coated with copper foil surface.
2) method is pressed：Under high temperature, the copper foil with polyimides is carried out laminated into type.
3) sputtering method：Conductive prime coat is formed in polyimide film surface, then forms copper metal layer.
In three of the above method, only rubbing method can not prepare dual platen；Laminating various structures, peel strength is big, still
Copper thickness is limited, it is impossible to using extra thin copper foil, according to extra thin copper foil, gauffer is easily produced in coating or lamination, even
Be broken so that its with HDI (high density interconnection substrate) technologies and COF (ChiponFlex, flexible chip) technology for base
Application in the medium-to-high grade precise electronic products such as liquid crystal (plasma) display of plinth, liquid crystal (plasma) TV receives necessarily
Limitation.And sputtering method can prepare single, double panel, and copper foil can be very thin, thickness customizable, suitable for ultra fine-line,
It is a kind of most promising method for preparing non-gel flexible copper-clad plate.
Gold of the glue-free copper coated plate magnetron sputtering coil film coating equipment of prior art on web-like base material needed for one side sputter
Belong to layer, have the following disadvantages：
(1), coating machine vacuum cavity generally selects square cavity, and vacuum acquiring system selects oil diffusion pump system, distribution
In the both sides of vacuum chamber, this distribution form causes vacuum in vacuum chamber uneven, so as to not cause forming sputtering film thickness also not
Uniformly；Oil diffusion pump often returns oily phenomenon, forms oil film in workpiece substrate that can be in vacuum chamber, causes sputter film layer and base material
Between adhesion it is poor；Other oil diffusion pump power consumption is larger, because its control mode is digital output modul, so even in work
Technique pumping speed become hour also can only total power output, energy consumption is very big.
(2), generally only configure a set of retractable volume system, thus can only sputter it is a roll of, operating efficiency is low.
(3), usual only supporting sputtering target, does not match plasma processing, film layer and base material can be caused when plating some base materials
Between peel strength it is inadequate.
Therefore, it is necessary to study new technology come to meet the higher and higher requirement in market.
The content of the invention
The purpose of the present invention is that to solve the above problems and provides a kind of produced without glue double side flexible copper coated board and set
It is standby.
The present invention is achieved through the following technical solutions above-mentioned purpose：
One kind is without glue double side flexible copper coated board production equipment, including vacuum cavity, retractable volume system, the vacuum cavity one
Side is provided with target pole car, and target pole is provided with the car of the target pole, second is provided between target pole car and the vacuum cavity
Seal, the vacuum cavity are provided with rear flange close to the side of target pole car, and the vacuum cavity opposite side is provided with
The retractable volume system, first seal, the retractable volume system are provided between the retractable volume system and the vacuum cavity
Sliding seat is provided with below system and target pole car, drive motor is provided with the sliding seat, is set below the sliding seat
There is guide rail, the vacuum cavity outer wall both sides are provided with fixed seat, controller, the vacuum chamber are provided with above the fixed seat
Vacuum acquiring system is provided with external wall, is provided with molecular pump on the vacuum acquiring system, on the vacuum cavity inwall
Vacuum level detector is provided with, two upper drive rolls, the retractable volume system has been arranged side by side in the retractable volume internal system upper end
Two lower drive rolls have been arranged side by side in system interior lower end, and the retractable volume internal system both sides are respectively arranged with Scroll and unreeled
Axle, is provided with roller set on the Scroll and the unreeling shaft, and electrostatic is provided with the roller set outer wall on the Scroll
Cancellation element, at least two guide rollers, guiding described in two of which are set between the Scroll and the upper drive roll
Jockey pulley is provided between roller, deep cooling water trap, the lower drive roll and magnetron sputtering are installed in the vacuum cavity
Plasma processing device is provided between area's entrance.
Further, the cavity inside the vacuum cavity is circular configuration.
Further, the target pole of magnetron sputtering is provided with two rows, and target described in two rows extremely can be that relative fashion is set,
Can also be that alternative form is set.
Further, target pole car is connected with the rear flange movable sealing of the vacuum cavity, and the target pole is stretched
Enter and magnetron sputtering area is formed in the vacuum cavity.
Further, the roll device of the retractable volume system is equally stretched into the vacuum cavity, two sets of windings
Axle and the unreeling shaft are located at magnetron sputtering area both sides respectively.
Further, the guide roller and the tension force are again provided between the unreeling shaft and the lower drive roll
Roller, the position of the jockey pulley can be adjusted by cylinder.
Further, the base material in the unreeling shaft is entered by the guide roller, the jockey pulley and the lower drive roll
Enter magnetron sputtering area, the base material that magnetron sputtering area comes out through the upper drive roll, the jockey pulley and the guide roller wind in
The Scroll, base material have a variety of from the unreeling shaft to the kind of drive of the Scroll.
Further, the sliding seat is fixed by screws in below target pole car and the retractable volume system, described
Sliding seat is arranged on the guide rail by chute.
Further, two sets of vacuum acquiring systems are at least installed, the vacuum obtains on the vacuum cavity outer wall
Obtain and sealing device is provided between system and the vacuum cavity, the molecular pump is fixed by screws in the vacuum acquirement system
In system, the molecular pump electrically connects with the controller.
Further, the deep cooling water trap is fixed by screws in inside the vacuum cavity under magnetron sputtering area
Side, the deep cooling water trap share two, and two deep cooling water traps are symmetrical arranged.
Further, the plasma processing device shares two, and two plasma processing devices correspond to one respectively
Block substrate, the plasma processing device electrically connect with the controller.
Further, the vacuum level detector is fixed by screws on the vacuum cavity, the vacuum degree measurement
Device electrically connects with the controller, and vacuum when being worked in the vacuum cavity is 0.1Pa.
The beneficial effects of the present invention are：(1) cavity body is circle, will not form pumping dead angle, and vacuum is uniform；Vacuum
Acquisition system is molecular pump without oil system, it is ensured that nothing returns oil in vacuum chamber；The cyropump of configuration is improved to continuous coating process
The pumping speed that middle base material is deflated, so as to improve operating efficiency.
(2) double retractable volume systems are employed, the wide a roll of two-sided plating of magnetron sputtering area full width and the one sides of volume two can be met
Plating；It can also meet that volume two plating the breadth of area half are plated one sides and two-sided plating, it is full-featured.
(3) plasma processing device is set at entrance magnetron sputtering area, Ions Bombardment is carried out to substrate surface, improves base material
Surface roughness, it is ensured that the peel strength between film layer and base material.
Brief description of the drawings
Fig. 1 is a kind of side view structure sketch of no glue double side flexible copper coated board production equipment of the present invention；
Fig. 2 is a kind of front view structure sketch of no glue double side flexible copper coated board production equipment of the present invention；
Fig. 3 is a kind of retractable volume system architecture sketch of no glue double side flexible copper coated board production equipment of the present invention；
Fig. 4 is a kind of vacuum cavity side view structure sketch of no glue double side flexible copper coated board production equipment of the present invention.
Description of reference numerals is as follows：
1st, vacuum acquiring system；2nd, unreeling shaft；3rd, plasma processing device；4th, Scroll；5th, guide roller；6th, jockey pulley；
7th, target pole；8th, upper drive roll；9th, lower drive roll；10th, roller set；11st, static eraser；12nd, deep cooling water trap；13rd, after
Flange；14th, target pole car；15th, retractable volume system；16th, vacuum cavity；17th, guide rail；18th, sliding seat；19th, fixed seat；20th, drive
Motor；21st, first seal；22nd, second seal；23rd, controller；24th, vacuum level detector；25th, molecular pump.
Embodiment
With reference to embodiment and accompanying drawing, the invention will be further described：
As Figure 1-Figure 4, one kind is without glue double side flexible copper coated board production equipment, including vacuum cavity 16, retractable volume system
System 15, the side of vacuum cavity 16 is provided with target pole car 14, and target pole 7, target pole car 14 are provided with target pole car 14
Second seal 22 is provided between the vacuum cavity 16, the vacuum cavity 16 is set close to the side of target pole car 14
Rear flange 13 is equipped with, the opposite side of vacuum cavity 16 is provided with the retractable volume system 15, the retractable volume system 15 and institute
State and first seal 21 is provided between vacuum cavity 16, the retractable volume system 15 and the lower section of target pole car 14 are provided with cunning
Seat 18 is moved, drive motor 20 is provided with the sliding seat 18, the lower section of sliding seat 18 is provided with guide rail 17, the vacuum chamber
The outer wall both sides of body 16 are provided with fixed seat 19, and the top of fixed seat 19 is provided with controller 23, the outer wall of vacuum cavity 16
On be provided with vacuum acquiring system 1, the vacuum acquiring system 1 makes to be in vacuum shape at work inside the vacuum cavity 16
State, molecular pump 25 is provided with the vacuum acquiring system 1, vacuum level detector is provided with the inwall of vacuum cavity 16
24, two upper drive rolls 8 have been arranged side by side in the inner upper end of retractable volume system 15, and the interior lower end of retractable volume system 15 is simultaneously
Row is provided with two lower drive rolls 9, and the inside both sides of retractable volume system 15 are respectively arranged with Scroll 4 and unreeling shaft 2, described
It is provided with roller set 10 on Scroll 4 and the unreeling shaft 2, the roller on the Scroll 4 covers is provided with electrostatic on 10 outer walls
Cancellation element 11, at least two guide rollers 5 are set, described in two of which between the Scroll 4 and the upper drive roll 8
Jockey pulley 6 is provided between guide roller 5, deep cooling water trap 12, the deep cooling steam are installed in the vacuum cavity 16
Trap 12 can be with cyropump, and cyropump improves the pumping speed deflated to base material during continuous coating, so as to improve work
Efficiency, plasma processing device 3, the plasma processing dress are provided between the lower drive roll 9 and magnetron sputtering area entrance
3 are put to carry out Ions Bombardment to substrate surface, improves base surface roughness, it is ensured that the stripping between film layer and base material is strong
Degree.
In the present embodiment, the cavity inside the vacuum cavity 16 is circular configuration.
In the present embodiment, the target pole 7 of magnetron sputtering is provided with two rows, and target pole 7 described in two rows can be relative fashion
Set, or alternative form is set.
In the present embodiment, target pole car 14 is connected with the movable sealing of the rear flange 13 of the vacuum cavity 16, institute
State target pole 7 and stretch into formation magnetron sputtering area in the vacuum cavity 16.
In the present embodiment, the roll device of the retractable volume system 15 is equally stretched into the vacuum cavity 16, two sets of institutes
State Scroll 4 and the unreeling shaft 2 and be located at magnetron sputtering area both sides respectively.
In the present embodiment, the guide roller 5 and described is again provided between the unreeling shaft 2 and the lower drive roll 9
Jockey pulley 6, the position of the jockey pulley 6 can be adjusted by cylinder.
In the present embodiment, the base material in the unreeling shaft 2 passes through the guide roller 5, the jockey pulley 6 and the lower active
Roller 9 enters magnetron sputtering area, and the base material that magnetron sputtering area comes out is through upper drive roll 8, the jockey pulley 6 and the guide roller
5 wind in the Scroll 4, and base material has a variety of from the unreeling shaft 2 to the kind of drive of the Scroll 4.
In the present embodiment, the sliding seat 18 is fixed by screws under target pole car 14 and the retractable volume system 15
Side, the sliding seat 18 are arranged on the guide rail 17 by chute.
In the present embodiment, two sets of vacuum acquiring systems 1 are at least installed on the outer wall of vacuum cavity 16, it is described true
Sealing device is provided between empty acquisition system 1 and the vacuum cavity 16, the molecular pump 25 is fixed by screws in described
In vacuum acquiring system 1, the molecular pump 25 electrically connects with the controller 23.
In the present embodiment, the deep cooling water trap 12 is fixed by screws in the inside magnetic control of vacuum cavity 16 and splashed
Penetrate below area, the deep cooling water trap 12 shares two, and two deep cooling water traps 12 are symmetrical arranged.
In the present embodiment, the plasma processing device 3 shares two, and two plasma processing devices 3 are right respectively
One piece of substrate is answered, the plasma processing device 3 electrically connects with the controller 23.
In the present embodiment, the vacuum level detector 24 is fixed by screws on the vacuum cavity 16, the vacuum
Degree detector 24 electrically connects with the controller 23, and vacuum when being worked in the vacuum cavity 16 is 0.1Pa.
The present invention operation principle be：The vacuum in the vacuum cavity 16 is extracted into 3 using the vacuum acquiring system 1
× 10-3Pa or so, turns down baffle plate, working gas (conventional argon gas is as working gas) is filled with, when gas in the vacuum cavity 16
The pressure of body is stable to be ready for sputtering in 0.1Pa or so, and when one side or two-sided plating, the unreeling shaft 2 unreels base material warp
The guide roller 5, the jockey pulley 6, the guide roller 5 and the lower drive roll 9, through the plasma processing device 3 from
Component processing after enter magnetron sputtering area in is sputtered through the target pole 7, then just through the upper drive roll 8, the guide roller 5,
The jockey pulley 6 and the guide roller 5 are wound can appoint in the Scroll 4, two unreeling shafts 2 and the Scroll 4
Meaning collocation is set, and can also carry out one side plating to the base materials of volume two, i.e., double retractable volumes are opened simultaneously, can be used for width as plating area
The base materials of volume two plating one side of half or plating are two-sided.
The basic principles, principal features and advantages of the present invention have been shown and described above.The technical staff of the industry should
Understand, the present invention is not limited to the above embodiments, the original for simply illustrating the present invention described in above-described embodiment and specification
Reason, without departing from the spirit and scope of the present invention, various changes and modifications of the present invention are possible, these changes and improvements
It all fall within the protetion scope of the claimed invention.The claimed scope of the invention is by appended claims and its Xiao Wu circle
It is fixed.
Claims (12)
1. one kind is without glue double side flexible copper coated board production equipment, it is characterised in that：It is described including vacuum cavity, retractable volume system
Vacuum cavity side is provided with target pole car, target pole is provided with the car of the target pole, between target pole car and the vacuum cavity
Second seal is provided with, the vacuum cavity is provided with rear flange close to the side of target pole car, and the vacuum cavity is another
Side is provided with the retractable volume system, is provided with first seal between the retractable volume system and the vacuum cavity, institute
State and be provided with sliding seat below retractable volume system and target pole car, drive motor, the slip are provided with the sliding seat
Seat lower section is provided with guide rail, and the vacuum cavity outer wall both sides are provided with fixed seat, controller is provided with above the fixed seat,
Vacuum acquiring system is provided with the vacuum cavity outer wall, molecular pump, the vacuum are provided with the vacuum acquiring system
Vacuum level detector is provided with cavity inner wall, two upper drive rolls, institute has been arranged side by side in the retractable volume internal system upper end
State retractable volume internal system lower end and two lower drive rolls have been arranged side by side, the retractable volume internal system both sides are respectively arranged with receipts
Spool and unreeling shaft, are provided with roller set on the Scroll and the unreeling shaft, on the roller set outer wall on the Scroll
Static eraser is provided with, at least two guide rollers are set between the Scroll and the upper drive roll, wherein two
Jockey pulley is provided between the individual guide roller, deep cooling water trap, the lower drive roll are installed in the vacuum cavity
Plasma processing device is provided between the entrance of magnetron sputtering area.
2. one kind according to claim 1 is without glue double side flexible copper coated board production equipment, it is characterised in that：The vacuum chamber
The cavity in internal portion is circular configuration.
3. one kind according to claim 1 is without glue double side flexible copper coated board production equipment, it is characterised in that：Magnetron sputtering
The target pole is provided with two rows, and target described in two rows extremely can be that relative fashion is set, or alternative form is set.
4. one kind according to claim 1 is without glue double side flexible copper coated board production equipment, it is characterised in that：Target pole car
It is connected with the rear flange movable sealing of the vacuum cavity, the target pole, which is stretched into, forms magnetron sputtering in the vacuum cavity
Area.
5. one kind according to claim 1 is without glue double side flexible copper coated board production equipment, it is characterised in that：The retractable volume
The roll device of system is equally stretched into the vacuum cavity, and two sets of Scrolls and the unreeling shaft splash positioned at magnetic control respectively
She Qu both sides.
6. one kind according to claim 1 is without glue double side flexible copper coated board production equipment, it is characterised in that：The unreeling shaft
The guide roller and the jockey pulley are again provided between the lower drive roll, the position of the jockey pulley can pass through cylinder
Regulation.
7. one kind according to claim 1 is without glue double side flexible copper coated board production equipment, it is characterised in that：The unreeling shaft
In base material magnetron sputtering area is entered by the guide roller, the jockey pulley and the lower drive roll, magnetron sputtering area comes out
Base material wound through the upper drive roll, the jockey pulley and the guide roller in the Scroll, base material is from the unreeling shaft
To the Scroll the kind of drive have it is a variety of.
8. one kind according to claim 1 is without glue double side flexible copper coated board production equipment, it is characterised in that：The sliding seat
It is fixed by screws in below target pole car and the retractable volume system, the sliding seat is arranged on the guide rail by chute
On.
9. one kind according to claim 1 is without glue double side flexible copper coated board production equipment, it is characterised in that：The vacuum chamber
Two sets of vacuum acquiring systems are at least installed on external wall, set between the vacuum acquiring system and the vacuum cavity
There is sealing device, the molecular pump is fixed by screws in the vacuum acquiring system, the molecular pump and the controller
Electrical connection.
10. one kind according to claim 1 is without glue double side flexible copper coated board production equipment, it is characterised in that：The deep cooling
Water trap is fixed by screws in inside the vacuum cavity below magnetron sputtering area, and the deep cooling water trap shares
Two, two deep cooling water traps are symmetrical arranged.
11. one kind according to claim 1 is without glue double side flexible copper coated board production equipment, it is characterised in that：The ion
Source processing unit shares two, and two plasma processing devices correspond to one piece of substrate, the plasma processing device respectively
Electrically connected with the controller.
12. one kind according to claim 1 is without glue double side flexible copper coated board production equipment, it is characterised in that：The vacuum
Degree detector is fixed by screws on the vacuum cavity, and the vacuum level detector electrically connects with the controller, described
Vacuum when being worked in vacuum cavity is 0.1Pa.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711029947.5A CN107841718A (en) | 2017-10-30 | 2017-10-30 | One kind is without glue double side flexible copper coated board production equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711029947.5A CN107841718A (en) | 2017-10-30 | 2017-10-30 | One kind is without glue double side flexible copper coated board production equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107841718A true CN107841718A (en) | 2018-03-27 |
Family
ID=61681560
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711029947.5A Pending CN107841718A (en) | 2017-10-30 | 2017-10-30 | One kind is without glue double side flexible copper coated board production equipment |
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| CN (1) | CN107841718A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108677159A (en) * | 2018-06-21 | 2018-10-19 | 河南航晨纳米材料有限公司 | A kind of novel flexible is without gum base materials manufacturing equipment |
| CN109413980A (en) * | 2018-11-15 | 2019-03-01 | 深圳市西陆光电技术有限公司 | A kind of production method without chemical plating process and the uhf electromagnetic wave screened film without conductive particle and the wiring board containing the film |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101492809A (en) * | 2009-02-17 | 2009-07-29 | 广州力加电子有限公司 | Vacuum magnetron sputtering coil film coating apparatus |
| CN201358299Y (en) * | 2009-02-17 | 2009-12-09 | 广州力加电子有限公司 | Vacuum magnetron-sputtering type winding film-coating device |
| CN206486587U (en) * | 2016-12-05 | 2017-09-12 | 广州方邦电子股份有限公司 | A kind of double-face vacuum magnetron sputtering coil film coating apparatus |
-
2017
- 2017-10-30 CN CN201711029947.5A patent/CN107841718A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101492809A (en) * | 2009-02-17 | 2009-07-29 | 广州力加电子有限公司 | Vacuum magnetron sputtering coil film coating apparatus |
| CN201358299Y (en) * | 2009-02-17 | 2009-12-09 | 广州力加电子有限公司 | Vacuum magnetron-sputtering type winding film-coating device |
| CN206486587U (en) * | 2016-12-05 | 2017-09-12 | 广州方邦电子股份有限公司 | A kind of double-face vacuum magnetron sputtering coil film coating apparatus |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108677159A (en) * | 2018-06-21 | 2018-10-19 | 河南航晨纳米材料有限公司 | A kind of novel flexible is without gum base materials manufacturing equipment |
| CN108677159B (en) * | 2018-06-21 | 2021-01-29 | 河南航晨纳米材料有限公司 | Flexible non-glue substrate manufacturing equipment |
| CN109413980A (en) * | 2018-11-15 | 2019-03-01 | 深圳市西陆光电技术有限公司 | A kind of production method without chemical plating process and the uhf electromagnetic wave screened film without conductive particle and the wiring board containing the film |
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Application publication date: 20180327 |